KR19980019572A - Waste Freon Gas Treatment System Using High Temperature Plasma - Google Patents
Waste Freon Gas Treatment System Using High Temperature Plasma Download PDFInfo
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- KR19980019572A KR19980019572A KR1019980011099A KR19980011099A KR19980019572A KR 19980019572 A KR19980019572 A KR 19980019572A KR 1019980011099 A KR1019980011099 A KR 1019980011099A KR 19980011099 A KR19980011099 A KR 19980011099A KR 19980019572 A KR19980019572 A KR 19980019572A
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- 239000002699 waste material Substances 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 239000012141 concentrate Substances 0.000 claims 1
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 abstract description 12
- 239000001294 propane Substances 0.000 abstract description 6
- 238000000354 decomposition reaction Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000002485 combustion reaction Methods 0.000 abstract description 3
- 239000002360 explosive Substances 0.000 abstract description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 abstract description 2
- 230000006378 damage Effects 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 33
- 239000003990 capacitor Substances 0.000 description 6
- 239000002341 toxic gas Substances 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
- B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3405—Arrangements for stabilising or constricting the arc, e.g. by an additional gas flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/17—Exhaust gases
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Treating Waste Gases (AREA)
Abstract
본 발명은 전기고온 프라즈마를 발생하여 반도체 제조 과정에서 발생한 폐프레온 가스를 분해, 처리하는 환경관련 장치이다.The present invention is an environment-related device for generating an electric high temperature plasma to decompose and process the waste freon gas generated in the semiconductor manufacturing process.
오존층 파괴물질인 프레온 가스는 특성상 고온 분해처리가 요구되는 바 현재 반도체 제조 공정상 발생한 폐프레온 가스는 프로판 가스의 연소 화염에 의하여 처리되거나 처리를 하지 않고 대기중으로 방출되고 있다.Freon gas, which is an ozone-depleting substance, requires high-temperature decomposition treatment due to its characteristics. At present, the waste freon gas generated in the semiconductor manufacturing process is discharged into the atmosphere without or treated by a combustion flame of propane gas.
또한 반도체 제조 공정상 발생되는 프레온 가스는 공장 여러곳에서 분산되어 발생하나 통합 처리의 어려움 때문에 개별 처리하고 있다.In addition, Freon gas generated in the semiconductor manufacturing process is distributed in various places of the factory, but is processed separately due to the difficulty of integrated processing.
이로 인하여 폭발가스인 프로판 가스를 전 공장에 분산 설치, 사용하여야 하는 위험성을 극복하기 위하여, 소형으로 전기와 소량의 공기만을 사용하여 고온의 프라즈마 화염을 이용한 폐프레온 처리 장치를 개발하고 이를 반도체 제조 공장에 보급함으로써 안정성 확보와 오존층 파괴 원인 물질인 폐프레온 가스를 분해, 처리하여 환경 보존에 기여하고자 함.Therefore, in order to overcome the danger of distributing and installing propane gas, which is explosive gas, in all factories, a waste freon processing apparatus using a high temperature plasma flame is developed using a small amount of electricity and a small amount of air. It will contribute to preserving the environment by decomposing and disposing waste freon gas, which is a source of stability and destruction of ozone layer, by distributing to
Description
제1도는 프라즈마 화염 발생장치 확대 절단도.1 is an enlarged cutaway view of the plasma flame generator.
제2도는 프라즈마 화염발생 장치 단면도.2 is a cross-sectional view of the plasma flame-generating device.
제3도는 프라즈마 발생장치 상면도.3 is a top view of the plasma generator.
제4도는 프라즈마 발생장치 사시도.4 is a perspective view of the plasma generator.
제 5도는 프라즈마 폐프레온 가스 처리장치 계통도.5 is a schematic diagram of a plasma waste Freon gas treatment system.
* 도면의 주요 부분에 대한 부호의 간단한 설명* Brief description of symbols for the main parts of the drawing
1 : 상부전극, 2 : 하부전극, 3 : 공기회전실 칸막이, 4 : 압축공기 입구, 5 : 압축공기 회전실, 6 : 냉각통, 7 : 프레온가스 유입구, 8 : 토출가스, 9 : 턱, 10 : 프라즈마 아크화염, 11 : 전원, 12 : 전압 조정기, 13 : 저압 변압기, 14 : 주파수 변조기, 15 : 고압 변압기, 16 : 고압 콘덴서, 17 : 간극대, 18 : 저압 콘덴서, 19 : 중첩 변압기, 20 : 온도 감지기, 21 : 흡착제, 22 : 배기가스, 23 : 고압부, 24 : 저압부1: upper electrode, 2: lower electrode, 3: air rotary chamber partition, 4: compressed air inlet, 5: compressed air rotary chamber, 6: cooling cylinder, 7: Freon gas inlet, 8: discharge gas, 9: jaw, 10: plasma arc flame, 11 power supply, 12 voltage regulator, 13 low voltage transformer, 14 frequency modulator, 15 high voltage transformer, 16 high voltage capacitor, 17 gap, 18 low voltage capacitor, 19 overlap transformer, 20: temperature sensor, 21: adsorbent, 22: exhaust gas, 23: high pressure part, 24: low pressure part
[발명의 상세한 설명]Detailed description of the invention
본 발명은 오존층 파괴의 원인 물질인 프레온 가스를 효율적으로 분해, 처리하는 장치이다.The present invention is an apparatus for efficiently decomposing and treating Freon gas, which is a substance causing ozone layer destruction.
일반적으로 반도체 제조 공정과정에서 발생하고 있는 폐프레온 가스 및 이와 더불어 혼합 배출되고 있는 독성가스, 폭발성가스 등을 안전하고 효율적으로 처리하는 것이 본 발명의 목적이다.In general, it is an object of the present invention to safely and efficiently treat the waste freon gas generated in the semiconductor manufacturing process and the toxic gas and the explosive gas that are mixed and discharged.
본 고온 프라즈마를 이용한 프레온 가스 분해처리 장치는 대기압 상태에서 전극사이의 프라즈마 가스(압축공기)를 이온화하여 전기절연을 파괴하고 이온화된 가스를 통하여 다량의 전류를 흘림으로써 고온의 프라즈마 화염을 발생시키고 여기에 폐프레온 가스를 통과시킴으로써 폐프레온 가스를 열분해 처리하는 장치이다.Freon gas decomposition processing apparatus using the high temperature plasma ionizes the plasma gas (compressed air) between the electrodes at atmospheric pressure, destroys electrical insulation, and generates a high temperature plasma flame by flowing a large amount of current through the ionized gas. It is an apparatus for thermally treating waste freon gas by passing the waste freon gas through.
종래의 프레온 가스 분해처리장치는 프로판가스를 연료로 하는 화염처리방식으로 프레온 가스를 열분해 시키고 있다.The conventional freon gas cracking treatment apparatus pyrolyzes freon gas by a flame treatment method using propane gas as a fuel.
반도체 제조공정에서 프레온 가스는 특성상 밀폐된 대형 건물내 여러 곳에서 분산되어 사용되고 있다.In the semiconductor manufacturing process, Freon gas is dispersed and used in various places in large closed buildings.
따라서 폭발성 프로판 가스 배관을 밀폐된 건물내 여러 곳으로 분산되어 설치하고 또한 건물내 청정공간 유지를 위하여, 연소 또한 밀폐용기에서 처리됨으로써 항상 가스 누출이나 폭발의 위험성을 노출시키고 있다.Therefore, explosive propane gas pipes are distributed and installed in various places in a closed building, and in order to maintain a clean space in the building, combustion is also treated in a closed container, thereby exposing the risk of gas leakage or explosion.
또 프로판 가스의 연소를 위하여 다량의 공기를 주입하여 사용함으로써 다량의 배기가스를 배출하고 있다.In addition, a large amount of exhaust gas is discharged by injecting a large amount of air for combustion of propane gas.
이에 따라 배기가스 냉각장치나 배기가스 배출장치(닥트)등의 설치가 증대되고 있다.As a result, installation of an exhaust gas cooling device, an exhaust gas discharge device (dact), and the like is increasing.
본 발명은 이러한 종래의 문제점을 근간으로 문제점 해결과 대체방식으로 전기와 소량의 공기만을 사용함은 물론 화염온도가 프로판가스보다 높은(2,000℃∼5,000℃) 폐프레온 고온 프라즈마 분해 처리장치를 개발하게 되었다.The present invention has been developed based on the above-mentioned problems, using only electricity and a small amount of air as a solution to the problem and alternative methods, as well as developing a waste freon high temperature plasma decomposition apparatus having a flame temperature higher than that of propane (2,000 ° C. to 5,000 ° C.). .
이상에서 설명한 기존의 문제점 및 발명 목적을 토대로 도면을 통해 보다 상세하게 설명하고자 한다.Based on the existing problems and the object of the invention described above will be described in more detail through the drawings.
첨부된 도면중 제5도의 개통도를 중심으로 프레온 가스 분해 처리방식과 이에 수반된 전기장치 두가지로 본 발명장치의 내용을 살펴본다.Based on the opening degree of FIG. 5 of the accompanying drawings, the contents of the present invention will be described in terms of a freon gas decomposition treatment method and an accompanying electric device.
우선 프레온 가스 처리방식을 개괄적으로 살펴보면, 배관형상의 상부 전극(1)에 공기 회전실(5)를 사이에 두고 배관형상의 하부 전극(2)을 결합한 프라즈마 발생장치와 전극(1, 2)사이로 분해, 처리할 폐가스가 통과하도록 고안된 구조이다.First of all, the method of processing the Freon gas is generally described. Between the plasma generator and the electrodes 1 and 2 in which the pipe-shaped lower electrode 2 is coupled to the pipe-shaped upper electrode 1 with the air rotating chamber 5 interposed therebetween. It is designed to pass waste gas to be decomposed and treated.
작동 방식은 전극(1)과 전극(2) 사이에(전극간격거리 : 5∼25m/m)에 15,000볼트∼100,000볼트의 기립형사의 저전류를 인가하여 양전극간 절연을 파괴시키고 고전압과 중첩된 저전압(200볼트∼1,000볼트), 대전류(5암페어∼100암페어)를 흘려 전극(1)과 전극(2) 사이에 전기 아크를 발생시킨다.The operating method is to apply a low current of 15,000 volts to 100,000 volts between the electrodes 1 and 2 (electrode spacing distance: 5 to 25 m / m) to break up the insulation between the two electrodes and overlap the high voltage. A low voltage (200 volts to 1,000 volts) and a large current (5 amps to 100 amps) flow to generate an electric arc between the electrode 1 and the electrode 2.
이 아크는 프라즈마 가스 유입구(4)(압축공기)에 나선형으로 투입된 프라즈마 가스(압축공기)의 회전에 의하여 계속적으로 전극의 끝단 원통부분을 따라 회전하면서 아크화염(10) 발생하게 한다.This arc causes the arc flame 10 to be generated while continuously rotating along the end portion of the electrode by the rotation of the plasma gas (compressed air) spirally injected into the plasma gas inlet 4 (compressed air).
여기서 발생한 2,000℃∼5,000℃의 고온 아크 화염(10) 사이를 프레온 가스 유입구(7)를 통해 유입된 폐프레온 가스가 관통하여 흐름으로써 고온, 아크의 빛, 아크내 이온등의 입자에 의하여 프레온 가스가 분해, 처리되고 토출가스(8)가 나온다.The waste freon gas introduced through the freon gas inlet 7 flows between the high temperature arc flames 10 to 2,000 ° C. to 5,000 ° C. through the high temperature, arc light, ions in the arc, and the like. Is decomposed and processed, and the discharge gas 8 comes out.
이 토출가스(8)에는 프레온 가스가 분해되면서 염소, 플로우등 독성가스가 혼합되어짐으로써 최종적으로 하단에 설치된 흡착제(21)에서 발생한 독성가스를 흡착방식으로 처리하여 배기(22)한다.As the freon gas is decomposed to the discharge gas 8, toxic gases such as chlorine and flow are mixed, and finally, the toxic gas generated in the adsorbent 21 installed at the lower end is treated by the adsorption method and exhausted.
본 고안의 폐프레온 가스 분해장치의 전기장치를 살펴보면 전원(11)(200볼트∼380볼트)에서 고압부(23)와 저압부(24)로 분리된다.Looking at the electrical device of the waste Freon gas decomposition device of the present invention is separated into a high pressure portion 23 and a low pressure portion 24 from the power source 11 (200 volts to 380 volts).
고압부(23)는 주파수 변조기(14)에서 전원 주파수 60헬쯔(HZ)를 100헬쯔(HZ)∼300헬쯔(HZ)로 변조하여 고압 변압기(15)를 통과하면서 15,000볼트∼100,000볼트로 상승하고 이 고전압은 고압콘덴서(16)을 충전한다. 충전이 진행되면서 콘덴서(16)의 양단 전압이 상승하고 이 상승 전압이 간극대(17)의 절연이 파괴되는 전압까지 되면 콘덴서(16)에 충전된 전하는 순간적으로 중첩 변압기(19)와 간극대(17)를 통하여 방전된다.The high voltage section 23 modulates the power frequency 60 hertz (HZ) from the frequency modulator 14 to 100 hertz (HZ) to 300 hertz (HZ) and rises to 15,000 volts to 100,000 volts while passing through the high voltage transformer 15. The high voltage charges the high voltage capacitor 16. As the charge proceeds, when the voltage across the capacitor 16 rises and the voltage rises to a voltage at which the insulation of the gap 17 is broken, the charge charged in the capacitor 16 is instantaneously overlapped with the overlapping transformer 19 and the gap band ( 17) is discharged.
이 방전전류는 중첩 변압기(19)에서 증폭되어 콘덴서(16)을 통하여 전극(1)과 전극(2)사이에 시동 아크를 발생시킨다.This discharge current is amplified in the superposition transformer 19 to generate a starting arc between the electrode 1 and the electrode 2 via the capacitor 16.
저압부(24)는 온도 조절용 전압조정기(12)를 거쳐 저압변압기(13)에서 200볼트∼1,000볼트 정도로 조정되고 이 전압은 중첩 변압기(19)를 통하여 전극(1)과 전극(2) 사이에서 시동아크가 발생됨과 동시에 대전류아크 화염을 발생시킨다.The low voltage section 24 is adjusted to about 200 to 1,000 volts in the low voltage transformer 13 through the voltage regulator 12 for temperature control, and the voltage is adjusted between the electrode 1 and the electrode 2 through the overlapping transformer 19. A starting arc is generated and a high current arc flame is generated at the same time.
화염의 온도조정은 온도감지기(20)과 온도 조절용 변압기(12)에 의하여 이루워진다.The temperature control of the flame is made by the temperature sensor 20 and the temperature control transformer 12.
이상에서 프라즈마 화염 발생장치와 전기장치 두가지로 살펴본 폐프레온 분해, 처리 장치는 이와 더불어 전극의 수명을 연장시키기 위하여 아크를 전극의 압축공기 회전실(5)에 의해 회전시켰고 일반적으로 프라즈마에서 사용하는 직류대신 교류를 사용하고 있다.The waste freon disassembly and processing apparatus, which was examined in terms of the plasma flame generator and the electrical apparatus, was rotated by the compressed air rotating chamber 5 of the electrode to extend the life of the electrode. Instead it uses alternating current.
또한 아크의 안정화를 위하여 고압부(23)의 주파수를 증대하였고 하부 전극(2)의 아크발생부 하단에 턱(9)을 설치하였다.In addition, the frequency of the high pressure unit 23 was increased for stabilization of the arc, and the jaw 9 was installed at the lower end of the arc generator of the lower electrode 2.
또한 프라즈마 가스는 압축공기를 사용하여 폐가스 유입구(7)를 통해 유입된 폐가스를 산화시킴으로써 열분해 및 산화반응이 동시에 일어난다.In addition, the plasma gas oxidizes the waste gas introduced through the waste gas inlet 7 by using compressed air, so that pyrolysis and oxidation reaction occur simultaneously.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019980011099A KR19980019572A (en) | 1998-03-31 | 1998-03-31 | Waste Freon Gas Treatment System Using High Temperature Plasma |
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| Application Number | Priority Date | Filing Date | Title |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010106040A (en) * | 2000-05-20 | 2001-11-29 | 박동화 | Method for abatement and treatment of CFC or PFC by direct-current thermal plasma |
| KR100493523B1 (en) * | 2002-07-30 | 2005-06-07 | 구성배 | Arclamp flamethrower with waterproof, explosion proof and warning function |
| KR100541542B1 (en) * | 1999-08-31 | 2006-01-12 | 삼성전자주식회사 | Fixing device for high pressure electrode for residual gas combustion |
-
1998
- 1998-03-31 KR KR1019980011099A patent/KR19980019572A/en not_active Ceased
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100541542B1 (en) * | 1999-08-31 | 2006-01-12 | 삼성전자주식회사 | Fixing device for high pressure electrode for residual gas combustion |
| KR20010106040A (en) * | 2000-05-20 | 2001-11-29 | 박동화 | Method for abatement and treatment of CFC or PFC by direct-current thermal plasma |
| KR100493523B1 (en) * | 2002-07-30 | 2005-06-07 | 구성배 | Arclamp flamethrower with waterproof, explosion proof and warning function |
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