KR102773328B1 - Hydrogen gas sensor apparatus with heater function humidity sensor and deterioration corrtecting method thereof - Google Patents

Abstract

The hydrogen gas sensor device of the present invention may include: a temperature sensor for measuring temperature; a first humidity sensor for measuring humidity; a hydrogen sensor for measuring hydrogen gas concentration by a heat conduction method; a first heater capable of heating the first humidity sensor; a correction calculation unit for performing correction on a measurement value of the hydrogen sensor according to a measurement value of the temperature sensor and a measurement value of the first humidity sensor to calculate a hydrogen gas measurement value; a heater control unit for operating the first heater when there is a possibility of poisoning of the first humidity sensor; and a second humidity sensor for measuring humidity while the first heater is operating.

Description

Hydrogen gas sensor apparatus with heater function humidity sensor and hydrogen gas measurement method {HYDROGEN GAS SENSOR APPARATUS WITH HEATER FUNCTION HUMIDITY SENSOR AND DETERIORATION CORRTECTING METHOD THEREOF}

The present invention relates to a hydrogen gas sensor device and a hydrogen gas measuring method, which are equipped with a heater-function humidity sensor and are capable of detecting hydrogen concentration even while a heater is applied for recovery from poisoning deterioration.

In general, the outlook for fossil fuels is not bright. Recently, with the emergence of new large energy consumers such as China and India, it is expected that the lifespan based on reserves will shorten. Accordingly, research is being conducted worldwide to replace fossil fuels with hydrogen energy.

Hydrogen energy is attracting attention as a storage medium for various alternative energies to address the energy supply and demand issues.

Hydrogen is being studied worldwide as a clean energy source, and is currently being used in various fields such as fuel cells and internal combustion engines. Its consumption is expected to expand in fields such as fuel cell vehicles and power generation within a few years.

However, hydrogen has a high flash point and has the property of exploding when its concentration exceeds a certain level, so the need for a hydrogen sensor that can detect hydrogen leakage during handling is becoming increasingly important.

Meanwhile, facilities such as storage facilities for chemicals and/or radioactive products, geothermal drilling, warehouse sites and industrial tanks may be at risk of hydrogen releases related to stored products, which may be explosive and may pose a risk to humans in some circumstances. There is also a need to control the risks in the above-mentioned areas and to proactively detect any hydrogen releases that may occur.

In particular, in the case of fuel cell electric vehicles (FCEVs), which are expected to be the most widespread use of hydrogen energy, hydrogen sensors mounted on fuel cell stacks are heavily relied on to increase energy efficiency and stability.

Accordingly, as hydrogen sensors for detecting hydrogen gas leaks, sensors using an electrical method that utilizes the change in the electrical conductivity of metals such as platinum and palladium due to hydrogen adsorption on the metal, sensors using an electrochemical method using oxide semiconductors and gas MOSFETs, and sensors using an optical method that detects hydrogen leaks using light have been developed.

In the case of a double-cost, cost-effective, heat-conduction type hydrogen detection sensor, the heat conductivity value due to the hydrogen concentration in the air is affected by the temperature/humidity values in the air, so the method of determining the hydrogen concentration by compensating the heat conductivity value for the temperature/relative humidity in the air is applied.

In the case of the Automotive relative humidity sensor applied for compensation of the above-mentioned heat conduction type hydrogen detection sensor, the method of applying a desiccant is common, and when a desiccant is used, durability deterioration occurs due to long-term use, which affects the relative humidity measurement. In addition, when the desiccant is poisoned by VOC, etc., the relative humidity sensor may experience poisoning deterioration.

In particular, hydrogen gas sensors for automobiles are inevitably located in sealed spaces where large amounts of VOCs are captured in certain installation environments. In such cases, conventional humidity sensors become poisoned by VOCs and cannot accurately measure relative humidity.

Humidity sensors that have been poisoned by VOCs can be restored to normal operation by adding a heater function to the humidity sensor. Therefore, humidity sensors with heater functions have been released recently. However, if you use the heater function to restore VOC poisoning, the hydrogen concentration at the installation location cannot be detected for at least several seconds, or at most several minutes, so the heat function cannot be used continuously in the normal usage area.

Accordingly, a method for continuously detecting hydrogen concentration is required even in the case of a hydrogen gas sensor equipped with a humidity sensor with a heater function.

Figure 1 is a side view showing the principle of a heat conduction type hydrogen sensor device.

Looking at the above phenomenon in more detail, in the case of a heat conduction type hydrogen gas sensor, compensation/correction should be performed by measuring the ambient temperature (T)/ambient relative humidity (%RH). In the case of relative humidity, a desiccant is generally used, and durability deterioration/VOC deterioration may occur. When the deterioration occurs, the humidity sensor (15) measures the relative humidity higher than the ambient (%RH) (%RH + α), and when the hydrogen concentration of the hydrogen sensor (20) is corrected by this value, the hydrogen concentration is measured as a lower value (%vol - β) than the actual value.

In order to recover the deteriorated desiccant, a relative humidity sensor with a built-in heater can be used. However, since deterioration cannot be recovered with a heater and only VOC poisoning can be recovered with a heater, it is inefficient and only unnecessary heating time is wasted if deterioration/VOC poisoning are not distinguished. In other words, since the hydrogen concentration cannot be detected while the heater is applied, a situation occurs in which the hydrogen concentration cannot be measured under conditions of deterioration that cannot be recovered by unnecessarily using a heater.

Republic of Korea Registration No. 10-1490178

The present invention provides a hydrogen gas measuring method and a hydrogen gas sensor device having a heater-function humidity sensor, which can continuously detect hydrogen concentration even while a heater is applied to recover a poisoned relative humidity sensor.

A hydrogen gas sensor device according to one aspect of the present invention may include: a temperature sensor for measuring temperature; a first humidity sensor for measuring humidity; a hydrogen sensor for measuring hydrogen gas concentration by a heat conduction method; a first heater capable of heating the first humidity sensor; a correction calculation unit for performing correction on a measurement value of the hydrogen sensor according to a measurement value of the temperature sensor and a measurement value of the first humidity sensor to calculate a hydrogen gas measurement value; a heater control unit for operating the first heater when there is a possibility of poisoning of the first humidity sensor; and a second humidity sensor for measuring humidity while the first heater is operating.

Here, a second heater capable of heating the second humidity sensor may be further included.

Here, the heater control unit selects one of the first humidity sensor and the second humidity sensor to heat, and the compensation operation unit can receive another humidity measurement value during the heating time.

Here, the heater control unit can heat the humidity sensor whose humidity is measured to be higher among the first humidity sensor and the second humidity sensor.

Here, the distance between the first humidity sensor and the hydrogen sensor, and the distance between the first humidity sensor and the second humidity sensor may be the same.

According to another aspect of the present invention, a hydrogen gas measurement method is provided in a hydrogen gas sensor device having a heater function humidity sensor and an additional humidity sensor, which applies temperature and humidity compensation, and may include the steps of: obtaining initial temperature sensor, humidity sensor and hydrogen sensor measurement values after power is supplied to the hydrogen gas sensor device; comparing an initial hydrogen gas measurement value derived from the obtained temperature sensor, humidity sensor and hydrogen sensor measurement values with a predetermined reference value, and heating the humidity sensor for a predetermined heating time if the initial hydrogen gas measurement value is not higher than the reference value; performing humidity measurement with another humidity sensor that is not heated during the heating time; performing humidity measurement with the heated humidity sensor when the heating time has elapsed; and deriving a hydrogen gas measurement value from the measurement values of the temperature sensor and the hydrogen sensor and the humidity measurement value.

Here, the heating time may be a time determined within the range of 1 minute to 60 minutes.

Here, the reference value may be a value selected within the range of -0.01% to -2.0%.

Here, in the step of heating the humidity sensor for the above-described predetermined heating time, in each VOC poisoning suspicion situation, the heater function humidity sensor and the additional humidity sensor can be alternately heated.

Here, in the step of heating the humidity sensor for the predetermined heating time, a humidity sensor having a higher humidity level among the heater function humidity sensor and the additional humidity sensor can be heated.

When a hydrogen gas sensor device and/or a hydrogen gas measuring method equipped with a heater-function humidity sensor according to the invention of the above-described configuration is implemented, there is an advantage in that the hydrogen concentration can be continuously detected using an additional humidity sensor even while a heater is applied to recover a poisoned relative humidity sensor.

The hydrogen gas sensor device and/or hydrogen gas measuring method equipped with a heater function humidity sensor of the present invention has the advantage of being able to distinguish between durability deterioration/VOC poisoning deterioration, appropriately apply a heater to a desiccant, and recover a humidity sensor that has been poisoned by VOC.

Figure 1 is a side view showing the principle of a heat conduction type hydrogen sensor device.
Figure 2 is a graph showing the thermal conductivity of hydrogen gas according to relative humidity.
Figure 3 is a block diagram illustrating the configuration of a hydrogen sensor device having a temperature and humidity sensor that measures temperature and humidity and a hydrogen sensor that measures hydrogen gas concentration by heat conduction.
FIG. 4 is a block diagram illustrating an embodiment of a hydrogen gas sensor device having a heater function humidity sensor and an additional humidity sensor according to the invention.
Figure 5a is a graph illustrating an example of a relative humidity sensor heater enable process.
Figure 5b is a graph showing another example of the relative humidity sensor heater enable process.
FIG. 6a is a layout diagram showing the arrangement relationship of a heater function humidity sensor and an additional humidity sensor in a hydrogen gas sensor device according to the embodiment of FIG. 4.
FIG. 6b is a layout diagram showing the arrangement relationship of a heater function humidity sensor and an additional humidity sensor in a hydrogen gas sensor device according to another embodiment of the present invention.
FIG. 7 is a flow chart showing one embodiment of a relative humidity measurement method performed in the hydrogen gas sensor device illustrated in FIG. 4.

In describing the present invention, terms such as first, second, etc. may be used to describe various components, but the components may not be limited by the terms. The terms are only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

When it is said that a component is connected or coupled to another component, it can be understood that it may be directly connected or coupled to that other component, but there may also be other components in between.

The terminology used in this specification is only used to describe specific embodiments and is not intended to limit the invention. The singular expression may include the plural expression unless the context clearly indicates otherwise.

In this specification, terms such as “include” or “have” are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, and can be understood as not excluding in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

Additionally, the shape and size of elements in the drawing may be exaggerated for clearer explanation.

Before presenting a relative humidity compensation method in a heat conduction type hydrogen gas sensor device according to the invention, the operating principle of the heat conduction type hydrogen gas sensor and the durability deterioration of the humidity sensor and the problems caused by it will be examined.

Figure 2 is a graph showing the thermal conductivity of hydrogen gas according to relative humidity.

In the case of a thermal conductivity type hydrogen gas sensor, compensation/correction must be performed by measuring the ambient temperature/relative humidity. In the case of relative humidity, a desiccant is generally used, and durability deterioration/VOC deterioration may occur.

The durability of the relative humidity sensor applied for relative humidity compensation of the thermal conductivity type hydrogen gas sensor easily deteriorates. In general, the relative humidity sensor applied with a desiccant experiences durability deterioration of 0.5%RH per year, and causes a relative humidity deviation of 7.5%RH during a maximum 15-year usage period.

Additionally, when a desiccant is poisoned by VOCs (volatile organic compounds), the relative humidity is generally measured higher than the ambient temperature.

As shown in Fig. 2, when the temperature in the air increases, the thermal conductivity of the gas changes depending on the relative humidity. Therefore, the thermal conductivity must be corrected by compensating for the actual relative humidity value in the air to enable accurate gas concentration measurement.

However, if a case occurs where the relative humidity in the actual atmosphere is measured higher than the actual humidity, the thermal conductivity is incorrectly compensated in the negative direction, resulting in a problem where the thermal conductivity is measured lower than the actual temperature. This also causes a problem where the output is lower than the actual hydrogen gas concentration in the atmosphere when measuring hydrogen gas.

Figure 3 is a block diagram illustrating the configuration of a hydrogen sensor device having a temperature and humidity sensor that measures temperature and humidity and a hydrogen sensor that measures hydrogen gas concentration using a heat conduction method.

FIG. 3 illustrates the configuration of a hydrogen sensor device having a temperature and humidity sensor (10) for measuring temperature and humidity and a hydrogen sensor (20) for measuring hydrogen gas concentration by heat conduction. In the step ① illustrated for the MCU (40), the MCU (40) acquires air temperature/air relative humidity information from the temperature and humidity sensor, in the step ②, temperature/humidity value compensation is performed, and in the step ③, the temperature/humidity value compensated hydrogen concentration can be output. For example, in the step ②, the hydrogen sensor (20) compensates for the thermal conductivity using the temperature/air relative humidity received and outputs a hydrogen concentration measurement value. The hydrogen sensor (20) is a sensor for detecting hydrogen leakage and is exposed to an environment with 0% hydrogen under general usage conditions.

However, if the humidity sensor (20) is poisoned by VOC, it will incorrectly measure higher than the relative humidity in the air (e.g., the relative humidity in the air is 50%RH, but it is incorrectly measured as 55%RH).

If there is a reference relative humidity sensor that has not been poisoned by VOC, it can be known that the humidity sensor (20) is currently poisoned. However, since poisoning occurs in all humidity sensors regardless of the number of humidity sensors installed in the same mounting position, its significance as a reference is reduced. In other words, in reality, it cannot be used as a reference humidity sensor in a VOC poisoning situation, and an indirect confirmation method is needed to determine that the humidity sensor has been poisoned by VOC.

First, the indirect basis for judging VOC poisoning of the humidity sensor is as follows.

In the case of thermal conductivity, a deviation occurs depending on the temperature/relative humidity in the air, and thus the temperature and relative humidity are measured by the temperature and humidity sensor to compensate for the thermal conductivity value measured by the hydrogen sensor.

However, if the relative humidity is incorrectly measured higher than the actual value (cause: durability deterioration or VOC poisoning) at the same hydrogen concentration (% vol), and if a different value is compensated for in the hydrogen sensor, the hydrogen sensor will measure a lower value than the actual concentration.

Therefore, considering that most of the operating conditions of the hydrogen leak sensor are in an environment where hydrogen volume is 0%VOL, it is possible to indirectly determine that the humidity sensor has deteriorated when the hydrogen sensor value decreases below the specified standard.

When humidity sensor deterioration occurs due to VOC poisoning, the poisoning deterioration can be recovered using the heater function built into the humidity sensor, but durability deterioration cannot be recovered.

Since the hydrogen concentration cannot be measured while the heater function of the humidity sensor is in use, periodic use of the heater function may result in a situation where hydrogen leak detection is not possible, so simply periodic use is discouraged.

That is, the present invention proposes a method of applying a cross heater by using two humidity sensors with a heater function and an additional (standby) humidity sensor to continuously detect hydrogen concentration.

FIG. 4 is a block diagram illustrating an embodiment of a hydrogen gas sensor device having a heater function humidity sensor and an additional humidity sensor according to the invention.

The hydrogen gas sensor device illustrated in FIG. 4 may include a temperature sensor (110) for measuring temperature; a first humidity sensor (120) for measuring humidity; a hydrogen sensor (130) for measuring hydrogen gas concentration by heat conduction; a first heater (140) capable of heating the first humidity sensor (120); a correction calculation unit (162) for performing correction on a measurement value of the hydrogen sensor according to a measurement value of the temperature sensor and a measurement value of the first humidity sensor to produce a 'hydrogen gas measurement value'; a heater control unit (164) for operating the first heater (140) if there is a possibility of poisoning of the first humidity sensor (120); and a second humidity sensor (130) for measuring humidity while the first heater (140) is operating.

In addition, as illustrated, a second heater (150) capable of heating the second humidity sensor (130) may be further included. In this case, if there is a possibility of poisoning of the first humidity sensor (120), the second humidity sensor (130) positioned in close proximity also has a significant possibility of poisoning, so the heater control unit (164) selects one of the first humidity sensor (120) and the second humidity sensor (130) to heat, and during the heating time, the correction operation unit (162) receives another humidity measurement value. At this time, the heater control unit (164) and/or the correction operation unit (162) select a humidity sensor to be heated according to one of various methods.

For example, in each VOC poisoning suspicion situation, the first humidity sensor (120) and the second humidity sensor (130) can be alternately heated.

For example, considering that a humidity sensor with a higher measured humidity among the first humidity sensor (120) and the second humidity sensor (130) is more susceptible to poisoning, and a humidity sensor with a lower measured humidity is less susceptible to poisoning, a humidity sensor with a higher measured humidity among the first humidity sensor (120) and the second humidity sensor (130) can be heated, and a humidity sensor with a lower measured humidity can be designated as the humidity sensor to be used during the heating period.

For example, the heater control unit (164) compares the initial 'hydrogen gas measurement value' with a predetermined reference value after power is supplied to the first (second) humidity sensor (120) and the hydrogen sensor (105), and if the initial measurement value of the hydrogen concentration is not higher than the reference value, it is determined that there is a possibility of VOC poisoning, and thus the first (second) heater (140) can be operated.

Depending on the implementation, the hydrogen gas sensor device may further include a storage unit (166) such as an EEPROM that records the humidity sensor heated immediately before the alternating heating, stores the predetermined reference value, or stores measured values.

The 'hydrogen gas measurement value' calculated by the above correction calculation unit (162) can be converted into a final measurement value and output to the outside through the output unit (190).

In the case of the illustrated hydrogen gas sensor device (100), the correction operation unit (162), the storage unit (166), and the heater control unit (164) were implemented as internal operation modules of a single MCU (160).

The above storage unit (166) may be implemented as a memory inside or outside the single MCU (160), such as an EEPROM (implemented as an MCU built-in EEPROM in the drawing).

Let us look specifically at an example of adjusting (updating) the above reference value (β) as a condition for enabling the relative humidity sensor heater.

Figure 5a is a graph illustrating an example of a relative humidity sensor heater enable process.

Figure 5b is a graph illustrating another example of the relative humidity sensor heater enable process.

As shown in the figure, if the hydrogen concentration during operation falls below the β value, it is assumed that durability deterioration or VOC poisoning has occurred and the heater is enabled for a specified heating time (10 minutes).

As in the case of Fig. 5a, if the hydrogen concentration is measured to be higher than β after 10 minutes, the heater enable criterion is fixed again based on the β value in the future.

As in the case of Fig. 5b, if the hydrogen concentration is at the same level as β (within ±0.1%) after 10 minutes, it can be determined as simple durability deterioration and the heater enable criterion can be adjusted to, for example, 2β.

In the above example, the heating time is set to 10 minutes, but in other implementations, the heating time may be selected by considering the influence of the VOC poisoning substance at the mounting location, with a time determined within 1 to 60 minutes.

For example, if the above reference value (β) is applied as -0.2%, in this case, in the illustrated S130 step, it can be confirmed whether the initial 'hydrogen gas measurement value' has a value greater than (higher than) -0.2%. In addition, in another implementation, the reference value (β) can be selected by considering the slope per hour at which the hydrogen concentration decreases due to poisoning by the VOC poisoning substance at the mounting location within -0.01% to -2.0%.

However, when the corresponding logic is implemented, the corresponding relative humidity sensor cannot be used for a set period of time while the heater is turned on. In the present invention, by configuring an additional relative humidity sensor, another relative humidity sensor can measure temperature/humidity and perform hydrogen concentration compensation without interruption while the heater is turned on.

FIG. 6a is a layout diagram showing the arrangement relationship of a heater function humidity sensor and an additional humidity sensor in a hydrogen gas sensor device according to the embodiment of FIG. 4.

FIG. 6b is a layout diagram showing the arrangement relationship of a heater function humidity sensor and an additional humidity sensor in a hydrogen gas sensor device according to another embodiment of the present invention.

As shown in FIGS. 6A and 6B, when a hydrogen sensor (105) and two relative humidity sensors (120, 130) are positioned in close proximity, there is a possibility that the temperature/relative humidity of the surroundings may change while the heater (140) is heating for one relative humidity sensor (120).

Therefore, in order to satisfy the condition that the heat source (i.e., heater (140)) must affect the hydrogen sensor (105) and the additional relative humidity sensor (130, 130-1) at the same level, as shown in FIGS. 6A and 6B, the hydrogen sensor (105) / relative humidity sensors 1, 2 (120, 130) can be configured to maintain the same distance. That is, it is advantageous to implement the three sensors to form an equilateral triangle relationship, but at least the distance between the heating humidity sensor (120) and the hydrogen sensor (105) and the distance between the two relative humidity sensors (120, 130) should be the same so that the peripheral temperature fluctuations are affected equally.

Fig. 6b illustrates another embodiment in which the additional relative humidity sensor (130-1) is not equipped with a heater. Even in cases in which the additional relative humidity sensor (130-1) is not equipped with a heater as in Fig. 6b, it is advantageous to implement the three sensors so as to form an equilateral triangle relationship.

The hydrogen gas sensor device of the structure of Fig. 6b has the advantage of being less expensive than that of Fig. 6a. Meanwhile, in the case of the hydrogen gas sensor device of the structure of Fig. 6, which is further improved, a poisoning prevention means may be further included to prevent poisoning of the additional relative humidity sensor (130-1). Alternatively, the additional relative humidity sensor (130-1) may be manufactured as a humidity sensor of a material/structure that is resistant to VOC poisoning, even if its precision is lower than that of the heated humidity sensor (120).

FIG. 7 is a flow chart showing one embodiment of a relative humidity measurement method performed in the hydrogen gas sensor device illustrated in FIG. 4.

The illustrated hydrogen gas measurement method applies temperature and humidity compensation and is a hydrogen gas measurement method in a hydrogen gas sensor device having a heater function humidity sensor and an additional humidity sensor, the method comprising: a step of obtaining initial temperature sensor, humidity sensor and hydrogen sensor measurement values (S120) after power is supplied to the hydrogen gas sensor device (S110); a step of comparing an initial 'hydrogen gas measurement value' derived from the obtained temperature sensor, humidity sensor and hydrogen sensor measurement values with a predetermined reference value (β) (S130), and if the initial hydrogen gas measurement value is not higher than the reference value (β), a step of heating the humidity sensor for a predetermined heating time (10 minutes) (S140); a step of performing humidity measurement with another humidity sensor that is not heated during the heating time (S150); a step of performing humidity measurement with the heated humidity sensor when the heating time has elapsed (S160); It may include a step (S180) of deriving a 'hydrogen gas measurement value' that is finally corrected by heat conduction from the measurement values of the above temperature sensor and hydrogen sensor and the humidity measurement value.

As illustrated in FIGS. 5a and 5b, since the initial hydrogen gas measurement value is derived as a negative value in step S120, a comparison with the reference value (β) in step S130 is performed.

Depending on the implementation, if the comparison result of the step S130 shows that the first hydrogen gas measurement value exists between the reference value (β) and 0%, it may be regarded as a normal value and derived as a 'hydrogen gas measurement value' as it is, or the first 'hydrogen gas measurement value' may be processed as an offset existing at a concentration of 0%.

In the above step S130, the reference value (β) can be selected within -0.01% to -2.0%.

In the above step S140, the heating time is set to 10 minutes, but in other implementations, a time determined within 1 to 60 minutes can be selected considering the influence on VOC poisoning substances at the mounting location.

Meanwhile, in the case of a hydrogen sensor device having a first humidity sensor and a first heater, a second humidity sensor and a second heater as illustrated in FIG. 4, it must be determined which of the first humidity sensor and the second humidity sensor will be heated in step S140 and which will be measured during the heating time in step S150.

For example, in steps S140 and S150, the first humidity sensor and the second humidity sensor may be alternately heated in each suspected VOC poisoning situation, or, among the first humidity sensor (120) and the second humidity sensor, the humidity sensor with a higher measured humidity may be heated, and the humidity sensor with a lower measured humidity may be designated as the humidity sensor to be used during the heating period.

In the illustrated S180 step, a hydrogen sensor that measures hydrogen gas concentration by a heat conduction method is applied, and a correction is performed on the measured value of the hydrogen sensor based on the measured value of the temperature sensor and the measured value of the humidity measured in the S150 step, thereby calculating a 'hydrogen gas measured value'.

Those skilled in the art should understand that the present invention can be implemented in other specific forms without changing the technical idea or essential characteristics thereof, and that the embodiments described above are exemplary in all respects and not restrictive. The scope of the present invention is indicated by the claims described below rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention.

100: Hydrogen gas sensor device 105: Hydrogen sensor
110: Temperature sensor 120: 1st humidity sensor
130: Second humidity sensor 140: First heater
150 : 2nd heater 160 : MCU
162: Compensation operation unit 164: Heater control unit
166 : Storage

Claims (10)

A temperature sensor (110) for measuring temperature;
A first humidity sensor (120) for measuring humidity;
A hydrogen sensor (105) that measures hydrogen gas concentration by heat conduction;
A first heater (140) capable of heating the first humidity sensor;
A correction calculation unit (162) that performs correction on the measurement value of the above hydrogen sensor based on the measurement value of the above temperature sensor and the measurement value of the above first humidity sensor to calculate a hydrogen gas measurement value;
If there is a possibility of poisoning of the first humidity sensor, a heater control unit (164) that operates the first heater; and
A second humidity sensor (130) that measures humidity while the first heater is in operation
Including,
The above correction operation unit (162) is
A hydrogen gas sensor device that receives a humidity measurement value of the second humidity sensor during the heating time of the first heater.
In the first paragraph,
A second heater capable of heating the second humidity sensor
A hydrogen gas sensor device further comprising:
In the second paragraph,
The above heater control unit selects one of the first humidity sensor and the second humidity sensor and heats it,
The above correction operation unit is a hydrogen gas sensor device that receives another humidity measurement value during the heating time.
In the third paragraph,
The above heater control unit,
A hydrogen gas sensor device that heats a humidity sensor having a higher humidity measured between the first humidity sensor and the second humidity sensor.
In the first paragraph,
A hydrogen gas sensor device in which the distance between the first humidity sensor and the hydrogen sensor, and the distance between the first humidity sensor and the second humidity sensor are the same.
A method for measuring hydrogen gas in a hydrogen gas sensor device having a heater function humidity sensor and an additional humidity sensor, applying temperature and humidity compensation,
A step of obtaining initial temperature sensor, humidity sensor and hydrogen sensor measurement values after power is supplied to the above hydrogen gas sensor device;
A step of comparing an initial hydrogen gas measurement value derived from the acquired temperature sensor, humidity sensor and hydrogen sensor measurement values with a predetermined reference value, and heating the humidity sensor for a predetermined heating time if the initial hydrogen gas measurement value is not higher than the reference value;
A step of performing humidity measurement with another humidity sensor that is not heated during the above heating time;
After the above heating time has elapsed, a step of performing humidity measurement using a heated humidity sensor; and
A step of deriving a hydrogen gas measurement value from the measurement values of the above temperature sensor and hydrogen sensor and the humidity measurement value.
A method for measuring hydrogen gas comprising:
In Article 6,
The above heating time is,
A method for measuring hydrogen gas, the time being determined within the range of 1 minute to 60 minutes.
In Article 6,
The above criteria are,
A method for measuring hydrogen gas, the value of which is selected within the range of -0.01% to -2.0%.
In Article 6,
In the step of heating the humidity sensor for the above-mentioned predetermined heating time,
A hydrogen gas measurement method in which the heater function humidity sensor and the additional humidity sensor are alternately heated in each VOC poisoning suspected situation.
In Article 6,
In the step of heating the humidity sensor for the above-mentioned predetermined heating time,
A hydrogen gas measuring method for heating a humidity sensor having a higher humidity level among the above heater function humidity sensor and the above additional humidity sensor.