KR102766678B1 - 편광판의 검사 방법 및 검사 장치 - Google Patents
편광판의 검사 방법 및 검사 장치 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3033—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8874—Taking dimensions of defect into account
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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- Life Sciences & Earth Sciences (AREA)
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- Immunology (AREA)
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- Optics & Photonics (AREA)
- Polarising Elements (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
Abstract
[해결 수단] 장척 방향으로 소정 간격으로 배치된 비편광부를 갖는 장척상의 편광판을, 그 장척 방향으로 반송하면서 그 외관을 검사하는 방법으로서, 그 편광판을 촬상하여 화상 데이터를 취득하는 공정과, 그 화상 데이터를 해석하여 결함 후보부를 추출하는 공정과, 결함 후보부가 기준치 이하의 사이즈를 갖는지의 여부를 판단하는 공정과, 결함 후보부의 사이즈에 기초하여 결함을 검출하는 공정을 포함하는 검사 방법.
Description
도 2a 는, 비편광부의 배치 패턴의 일례를 설명하는 개략 평면도이다.
도 2b 는, 비편광부의 배치 패턴의 다른 예를 설명하는 개략 평면도이다.
도 2c 는, 비편광부의 배치 패턴의 또 다른 예를 설명하는 개략 평면도이다.
도 3 은, 본 발명의 검사 방법에 사용될 수 있는 검사 장치를 설명하는 개략도이다.
도 4 는, 본 발명의 일 실시형태에 있어서의 결함 검출의 구체적 순서를 설명하는 플로 차트이다.
도 5 는, 본 발명의 다른 실시형태에 있어서의 결함 검출의 구체적 순서를 설명하는 플로 차트이다.
도 6 은, 도 5 에서 나타낸 실시형태에 있어서의 결함 검출의 구체적 순서를 설명하는 개략도이다.
10a : 비편광부
30 : 편광판
50 : 촬상 장치
80 : 화상 해석 장치
82 : 결함 후보부 추출부
84 : 사이즈 판단부
86 : 주기성 판단부
88 : 결함 검출부
100 : 검사 장치
Claims (10)
- 장척상의 편광자에 장척 방향으로 소정의 간격으로 배치된 비편광부를 형성하는 것, 그 비편광부를 갖는 장척상의 편광자를 사용하여 장척상의 편광판을 제조하는 것, 및, 그 장척상의 편광판을 장척 방향으로 반송하면서 그 외관을 검사하는 것을 포함하는, 편광판의 제조 방법으로서,
그 장척상의 편광판의 외관을 검사하는 것이,
그 편광판을 촬상하여 화상 데이터를 취득하는 공정과,
그 화상 데이터를 해석하여 결함 후보부를 추출하는 공정과,
그 결함 후보부가 기준치 이하의 사이즈를 갖는지의 여부를 판단하는 공정과,
그 결함 후보부가 그 장척 방향으로 주기성을 갖는지의 여부를 판단하는 공정과,
결함을 검출하는 공정을 포함하고,
그 결함을 검출하는 공정은, 그 결함 후보부의 사이즈 및 그 주기성의 유무에 기초하여 결함을 검출하는 공정인, 편광판의 제조 방법. - 제 1 항에 있어서,
상기 장척상의 편광자에, 장척 방향 및 폭 방향으로 소정 간격으로 배치된 비편광부를 형성하는, 편광판의 제조 방법. - 제 1 항에 있어서,
상기 화상 데이터의 취득이, 상기 편광판의 연속적인 촬상에 기초하여 행해지는, 편광판의 제조 방법. - 제 1 항에 있어서,
상기 결함 후보부의 추출이, 상기 화상 데이터의 휘도 정보에 기초하여 행해지는, 편광판의 제조 방법. - 삭제
- 제 1 항에 있어서,
상기 기준치를 초과하는 사이즈를 갖는 결함 후보부에 대해서만, 상기 장척 방향으로 주기성을 갖는지의 여부를 판단하는, 편광판의 제조 방법. - 제 1 항 또는 제 6 항에 있어서,
상기 결함 후보부의 주기성의 유무의 판단이, 상기 결함 후보부의 장척 방향에 있어서의 위치 좌표에 기초하여 행해지는, 편광판의 제조 방법. - 제 1 항에 또는 제 6 항에 있어서,
상기 결함 후보부의 주기성의 유무의 판단이, 판단 대상인 결함 후보부와, 그 반송 방향 상류측에 존재하는 비편광부의 장척 방향의 거리가, 소정 거리인지의 여부에 기초하여 행해지는, 편광판의 제조 방법. - 제 1 항에 있어서,
외관을 검사한 후에, 상기 장척상의 편광판을 원하는 사이즈로 재단하는 것을 추가로 포함하는, 편광판의 제조 방법. - 제 1 항에 있어서,
염기성 용액과의 접촉에 의해 상기 장척상의 편광자에 상기 비편광부를 형성하는, 편광판의 제조 방법.
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