KR102718276B1 - 반도체 나노결정 입자 및 그의 제조 방법과 이를 포함하는 소자 - Google Patents
반도체 나노결정 입자 및 그의 제조 방법과 이를 포함하는 소자 Download PDFInfo
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- KR102718276B1 KR102718276B1 KR1020190027402A KR20190027402A KR102718276B1 KR 102718276 B1 KR102718276 B1 KR 102718276B1 KR 1020190027402 A KR1020190027402 A KR 1020190027402A KR 20190027402 A KR20190027402 A KR 20190027402A KR 102718276 B1 KR102718276 B1 KR 102718276B1
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- Prior art keywords
- quantum dot
- selenium
- tellurium
- semiconductor nanocrystal
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- 239000004054 semiconductor nanocrystal Substances 0.000 title claims abstract description 87
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000002245 particle Substances 0.000 title description 16
- 239000002096 quantum dot Substances 0.000 claims abstract description 161
- 239000011669 selenium Substances 0.000 claims abstract description 92
- 239000011701 zinc Substances 0.000 claims abstract description 85
- 229910052714 tellurium Inorganic materials 0.000 claims abstract description 68
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims abstract description 68
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 65
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims abstract description 64
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 52
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 35
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000011593 sulfur Substances 0.000 claims abstract description 34
- 238000005424 photoluminescence Methods 0.000 claims abstract description 29
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 7
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000002243 precursor Substances 0.000 claims description 69
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- KZCOBXFFBQJQHH-UHFFFAOYSA-N octane-1-thiol Chemical compound CCCCCCCCS KZCOBXFFBQJQHH-UHFFFAOYSA-N 0.000 claims description 3
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- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims description 2
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- GIKNWQHOINULKX-UHFFFAOYSA-N [Se].C1(=CC=CC=C1)PC1=CC=CC=C1 Chemical compound [Se].C1(=CC=CC=C1)PC1=CC=CC=C1 GIKNWQHOINULKX-UHFFFAOYSA-N 0.000 claims description 2
- 150000004703 alkoxides Chemical class 0.000 claims description 2
- UYJXRRSPUVSSMN-UHFFFAOYSA-P ammonium sulfide Chemical compound [NH4+].[NH4+].[S-2] UYJXRRSPUVSSMN-UHFFFAOYSA-P 0.000 claims description 2
- 150000007942 carboxylates Chemical class 0.000 claims description 2
- VTXVGVNLYGSIAR-UHFFFAOYSA-N decane-1-thiol Chemical compound CCCCCCCCCCS VTXVGVNLYGSIAR-UHFFFAOYSA-N 0.000 claims description 2
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- 239000000843 powder Substances 0.000 claims description 2
- DWUCCPNOMFYDOL-UHFFFAOYSA-N propyl(sulfanyl)silicon Chemical compound CCC[Si]S DWUCCPNOMFYDOL-UHFFFAOYSA-N 0.000 claims description 2
- GOBNDSNLXZYUHQ-UHFFFAOYSA-N selenium;tributylphosphane Chemical compound [Se].CCCCP(CCCC)CCCC GOBNDSNLXZYUHQ-UHFFFAOYSA-N 0.000 claims description 2
- MJNSMKHQBIVKHV-UHFFFAOYSA-N selenium;trioctylphosphane Chemical compound [Se].CCCCCCCCP(CCCCCCCC)CCCCCCCC MJNSMKHQBIVKHV-UHFFFAOYSA-N 0.000 claims description 2
- SCTHSTKLCPJKPF-UHFFFAOYSA-N selenium;triphenylphosphane Chemical compound [Se].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 SCTHSTKLCPJKPF-UHFFFAOYSA-N 0.000 claims description 2
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- 239000011258 core-shell material Substances 0.000 description 6
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 6
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- 230000035484 reaction time Effects 0.000 description 5
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- 125000003118 aryl group Chemical group 0.000 description 4
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- XTAZYLNFDRKIHJ-UHFFFAOYSA-N n,n-dioctyloctan-1-amine Chemical compound CCCCCCCCN(CCCCCCCC)CCCCCCCC XTAZYLNFDRKIHJ-UHFFFAOYSA-N 0.000 description 4
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- 229920000642 polymer Polymers 0.000 description 1
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- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- NNOBHPBYUHDMQF-UHFFFAOYSA-N propylphosphine Chemical compound CCCP NNOBHPBYUHDMQF-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 125000003748 selenium group Chemical group *[Se]* 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- ORFSSYGWXNGVFB-UHFFFAOYSA-N sodium 4-amino-6-[[4-[4-[(8-amino-1-hydroxy-5,7-disulfonaphthalen-2-yl)diazenyl]-3-methoxyphenyl]-2-methoxyphenyl]diazenyl]-5-hydroxynaphthalene-1,3-disulfonic acid Chemical compound COC1=C(C=CC(=C1)C2=CC(=C(C=C2)N=NC3=C(C4=C(C=C3)C(=CC(=C4N)S(=O)(=O)O)S(=O)(=O)O)O)OC)N=NC5=C(C6=C(C=C5)C(=CC(=C6N)S(=O)(=O)O)S(=O)(=O)O)O.[Na+] ORFSSYGWXNGVFB-UHFFFAOYSA-N 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
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- 229940032094 squalane Drugs 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- JZALLXAUNPOCEU-UHFFFAOYSA-N tetradecylbenzene Chemical compound CCCCCCCCCCCCCCC1=CC=CC=C1 JZALLXAUNPOCEU-UHFFFAOYSA-N 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229940102001 zinc bromide Drugs 0.000 description 1
- 239000011667 zinc carbonate Substances 0.000 description 1
- 235000004416 zinc carbonate Nutrition 0.000 description 1
- 229910000010 zinc carbonate Inorganic materials 0.000 description 1
- GTLDTDOJJJZVBW-UHFFFAOYSA-N zinc cyanide Chemical compound [Zn+2].N#[C-].N#[C-] GTLDTDOJJJZVBW-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- 229940105296 zinc peroxide Drugs 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- RXBXBWBHKPGHIB-UHFFFAOYSA-L zinc;diperchlorate Chemical compound [Zn+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O RXBXBWBHKPGHIB-UHFFFAOYSA-L 0.000 description 1
- NHXVNEDMKGDNPR-UHFFFAOYSA-N zinc;pentane-2,4-dione Chemical compound [Zn+2].CC(=O)[CH-]C(C)=O.CC(=O)[CH-]C(C)=O NHXVNEDMKGDNPR-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02601—Nanoparticles
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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Abstract
Description
도 2는 비제한적인 일구현예에 따른 QD LED 소자의 모식적 단면도를 나타낸 것이다.
도 3은 비제한적인 일구현예에 따른 QD LED 소자의 모식적 단면도를 나타낸 것이다.
도 4는, 실시예 및 비교예에서 제조된 양자점의 시간 분해형 광발광 분광분석 결과를 나타낸 것이다.
도 5 는, 실시예 및 비교예에서 소자들에 대한 전계 발광 물성 평가 결과를 나타낸 도이다.
도 6은 실시예 및 비교예에서 제조된 소자들의 수명특성 평가 결과를 나타낸 것이다.
도 7 은, 실시예 및 비교예에서 소자들에 대한 전계 발광 물성 평가 결과를 나타낸 도이다.
Te/Se in core | Te/Se in shell |
PL(nm) | FWHM(nm) | QY(%) | |
실시예 4 | 0.028 | 0.0067 | 452 | 24 | 73 |
실시예 2 | 대략 0.03 | 0.0100 | 452 | 33 | 75 |
실시예 1 | 대략 0.03 | 0.0080 | 450 | 27 | 77 |
실시예 3 | 0.05 | 0.0080 | 464 | 41 | 71 |
비교예 1 | 0.033 | - | 448 | 20 | 69 |
비교예 2 | 0.05 | - | 449 | 29 | 66 |
비교예 3 | 0.067 | - | 471 | 60 | 68 |
Te/Se in core | Te/Se in shell |
mole ratio (/Zn) | Te/Se | ||||
S | Zn | Se | Te | ||||
실시예 1 | 0.028 | 0.008 | 0.52 | 1.00 | 0.37 | 0.006 | 0.016 |
실시예 3 | 0.05 | 0.008 | 0.506 | 1.00 | 0.381 | 0.008 | 0.021 |
비교예 1 | 0.033 | - | 0.56 | 1.00 | 0.381 | 0.002 | 0.005 |
PL decay lifetime (ns) |
|
비교예 1 | 30.4 |
실시예 1 | 42.2 |
실시예 2 | 42.6 |
Te/Se in core / Te/Se in shell |
Max. EQE | EQE @100nt |
Max. Cd/A |
Cd/m2 @5mA |
|
비교예 4 | 대략 0.03 / - | 4.7 | 4.6 | 3.1 | 155.9 |
실시예 5 | 대략 0.03 / 0.008 | 7.7 | 7.7 | 6.9 | 316.7 |
비교예 5 | 대략 0.03 / - | 8.6 | 8.0 | 5.5 | 202.7 |
실시예 6 | 대략 0.03 / 0.008 | 11.8 | 11.5 | 9.7 | 349.8 |
Claims (23)
- 아연, 텔루리움, 및 셀레늄을 포함하는 제1 반도체 나노결정을 포함하는 코어 및 상기 코어 위에 배치되고 아연, 텔루리움, 셀레늄, 및 황을 포함하는 반도체 나노결정 쉘을 가지는 양자점으로서,
상기 양자점은 카드뮴을 포함하지 않고
상기 양자점은 셀레늄에 대한 텔루리움의 몰 비가 0.06 이하이며,
상기 양자점의 광발광 피크 파장은 450 nm 이상 및 470 nm 이하이고,
상기 양자점의 광발광 피크의 반치폭은 41 nm 이하인 양자점. - 제1항에 있어서,
상기 양자점은 셀레늄에 대한 텔루리움의 몰 비가 0.005 초과인 양자점. - 제1항에 있어서,
상기 양자점은 아연에 대한 텔루리움의 몰 비가 0.003 이상인 양자점. - 제1항에 있어서,
상기 코어는 ZnTexSe1-x (여기서, x는 0 보다 크고 0.05 이하임) 를 포함하는 양자점. - 제1항에 있어서,
상기 코어의 크기는 2 nm 이상인 양자점. - 제1항에 있어서,
상기 반도체 나노결정 쉘은, 반경 방향으로 변화하는 조성을 가지는 양자점. - 제6항에 있어서,
상기 반도체 나노결정 쉘에서 텔루리움의 함량은 상기 양자점의 표면을 향해 감소하고, 상기 반도체 나노결정 쉘에서 상기 황의 함량은 상기 양자점의 표면을 향해 증가하는 양자점. - 제1항에 있어서,
상기 반도체 나노결정 쉘은, 상기 코어 바로 위에 배치되는 제1층 및 상기 제1층 위에 배치되는 하나 이상의 외층을 포함하고, 상기 제1층은 제2 반도체 나노결정을 포함하고 상기 외층은 상기 제2 반도체 나노결정과 다른 조성을 가지는 반도체 나노결정을 포함하는 양자점. - 제8항에 있어서,
상기 제2 반도체 나노결정은 아연, 셀레늄, 및 텔루리움을 포함하고, 상기 외층은 아연, 그리고 황 및 셀레늄 중 적어도 하나를 포함하는 양자점. - 제8항에 있어서,
상기 외층은, 제3 반도체 나노결정을 포함하고 상기 제1층 바로 위에 배치되는 제1 외층, 상기 제1 외층 상에 배치되고 제4 반도체 나노결정을 포함하는 제2 외층을 포함하고, 상기 제3 반도체 나노결정은 아연 및 셀레늄을 포함하고, 상기 제4 반도체 나노결정은 아연 및 황을 포함하는 양자점. - 제1항에 있어서,
상기 양자점은 양자 효율(QY)이 70% 이상인 양자점. - 제1항에 있어서,
상기 양자점의 광발광 피크의 반치폭은 35 nm 이하인 양자점. - 제1항에 있어서,
상기 양자점은 시간 분해형 광발광 분석에 의해 확인되는 광발광 소멸 시간 (PL decay lifetime)이 32 ns 이상인 양자점. - 제1항의 양자점의 제조 방법으로서,
아연, 셀레늄, 및 텔루리움을 포함하는 제1 반도체 나노결정을 포함하는 코어를 얻는 단계;
유기 용매 내에서, 상기 제1 반도체 나노결정을 포함하는 코어 및 유기 리간드의 존재 하에, 아연 전구체와, 셀레늄 전구체, 텔루리움 전구체, 및 황 전구체로부터 선택된 1종 이상의 비금속 전구체를 복수개의 단계에서 반응시켜서, 상기 코어의 표면에 아연, 셀레늄, 텔루리움, 및 황을 포함하는 반도체 나노결정 쉘을 형성하는 단계를 포함하는 방법. - 제14항에 있어서,
제1 반도체 나노결정을 포함하는 코어는, 셀레늄에 대한 텔루리움의 몰 비가 0.06 미만인 방법. - 제14항에 있어서,
상기 반도체 나노결정 쉘을 형성하는 단계는, 상기 아연 전구체와 상기 셀레늄 전구체 및 상기 텔루리움 전구체를 반응시킨 다음, 상기 아연 전구체와 상기 셀레늄 전구체 및 상기 황 전구체 중 적어도 하나를 반응시키는 것을 포함하는 방법. - 제14항에 있어서,
상기 아연 전구체는, Zn 금속 분말, ZnO, 알킬화 Zn 화합물, Zn 알콕시드, Zn 카르복실레이트, Zn 니트레이트, Zn 퍼콜레이트, Zn 설페이트, Zn 아세틸아세토네이트, Zn 할로겐화물, Zn 시안화물, Zn 히드록시드, 또는 이들의 조합을 포함하고,
상기 셀레늄 전구체는 셀렌-트리옥틸포스핀(Se-TOP), 셀렌-트리부틸포스핀(Se-TBP), 셀렌-트리페닐포스핀(Se-TPP), 셀렌-다이페닐포스핀(Se-DPP), 또는 이들의 조합을 포함하고,
상기 텔루리움 전구체는 텔루르-트리부틸포스핀(Te-TBP), 텔루르-트리페닐포스핀(Te-TPP), 텔루르-다이페닐포스핀(Te-DPP), 또는 이들의 조합을 포함하고,
상기 황 전구체는 헥산 싸이올, 옥탄 싸이올, 데칸 싸이올, 도데칸 싸이올, 헥사데칸 싸이올, 머캡토 프로필 실란, 설퍼-트리옥틸포스핀(S-TOP), 설퍼-트리부틸포스핀(S-TBP), 설퍼-트리페닐포스핀(S-TPP), 설퍼-트리옥틸아민(S-TOA), 비스트리메틸실릴 설퍼(bistrimethylsilyl sulfur), 황화 암모늄, 황화 나트륨, 또는 이들의 조합을 포함하는 방법. - 제1항의 양자점을 포함하는 전자 소자.
- 서로 마주보는 제1 전극과 제2 전극; 및
상기 제1 전극과 상기 제2 전극 사이에 위치하고 복수개의 양자점들을 포함하는 양자점 발광층을 포함하되,
상기 복수개의 양자점들은 제1항의 양자점을 포함하는 전계 발광 소자. - 제19항에 있어서,
상기 제1 전극과 상기 양자점 발광층 사이, 상기 제2 전극과 상기 양자점 발광층 사이, 또는 상기 제1 전극과 상기 양자점 발광층 사이 및 상기 제2 전극과 상기 양자점 발광층 사이에 전하 보조층을 포함하는 전계 발광 소자. - 제20항에 있어서,
상기 전하 보조층은, 전하 수송층, 전하 주입층, 또는 이들의 조합을 포함하는 전계 발광 소자. - 제19항에 있어서,
상기 전계 발광 소자는, 최대 외부 양자 효율(peak external quantum efficiency) 가 4% 이상인 전계 발광 소자. - 제19항에 있어서,
상기 전계 발광 소자는, CIE 색좌표의 x 가 0.2 이하인 광을 방출하는 전계 발광 소자.
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