KR102655427B1 - Vacuum Chamber And Gate Structure Using Linear Stage - Google Patents

Abstract

The present invention relates to a gate structure using a vacuum chamber and a linear stage, a process chamber in which a housing opening through which a sample enters and exits is formed at the front upper part to create a vacuum environment inside the housing, a door flange inserted inside the housing opening, and the A door unit including a door base coupled to the outside of the housing opening, including a door opening corresponding to the housing opening, and a door coupled to the outside of the door base to open and close the door opening, a holder on which a sample is loaded on the upper surface, and the holder. A holder flange corresponding to the door flange is formed on the outer peripheral surface so that a holder unit provided inside the housing and a first axis slider coupled to allow the holder unit to move up and down and the holder flange contact or separate from the door flange. It includes a transfer unit that transfers the first axis slider to the first axis.

Description

Gate structure using vacuum chamber and linear stage {Vacuum Chamber And Gate Structure Using Linear Stage}

The present invention relates to a gate structure using a vacuum chamber and a linear stage.

A vacuum chamber refers to a device containing a space maintained in a vacuum state, and examples include devices such as semiconductor manufacturing equipment, scanning electron microscope (SEM), and mass spectrometry.

In general, these vacuum chambers include a process chamber in which a vacuum environment is created for manufacturing, processing, inspection, analysis, etc., and a load lock chamber and gate valve to maintain the vacuum environment in the process chamber when samples are brought into or out of the process chamber. Includes.

As a prior art for this, there is a vacuum chamber disclosed in Republic of Korea Patent Publication No. 10-1531632.

Figure 1 is a perspective view showing a conventional vacuum chamber, and Figure 2 is an exploded perspective view showing the gate valve structure of a conventional vacuum chamber.

Referring to Figures 1 and 2, a conventional vacuum chamber has a process chamber 10 and a load lock chamber 20 installed on the opening 31 through which a sample is loaded or removed into the process chamber 10, and is a vertical cylinder. It includes driving means such as 330 and a rotating medium 340, and includes a gate valve 300 installed between the process chamber 10 and the load lock chamber 20 to open and close the opening.

More specifically, in a conventional vacuum chamber, a transport means for bringing a sample into or out of the process chamber 10 and a driving means for opening and closing the gate valve 300 are installed outside the process chamber 10, respectively.

As a result, the conventional vacuum chamber has problems such as increased manufacturing costs and limited mounting space for other components due to the configuration of the load lock chamber 20, the gate valve 300, etc. and the transportation or driving means included in these configurations. there is.

In addition, the conventional vacuum chamber has a relatively complex structure, so it is not suitable for miniaturization, and maintenance such as cleaning is not easy.

Republic of Korea Patent Publication No. 10-1531632 (announcement date 2015.06.29)

The present invention was conceived to solve the above-mentioned problems, and its purpose is to provide a vacuum chamber that maintains the vacuum state of the process chamber by a transfer unit installed in the process chamber without using a load lock chamber or gate valve. .

In addition, the present invention aims to provide a vacuum chamber that is suitable for miniaturization and has a relatively simple structure and is easy to disassemble and assemble for maintenance such as cleaning.

In order to solve the above-described problems, the present invention provides a vacuum chamber that functions as a gate valve through a transfer unit and a holder unit.

More specifically, the vacuum chamber according to the present invention includes a process chamber in which a housing opening through which a sample enters and exits is formed at the front upper part to create a vacuum environment inside the housing.

In addition, the vacuum chamber includes a door flange inserted inside the housing opening and a door opening corresponding to the housing opening, a door base coupled to the outside of the housing opening, and a door base coupled to the outside of the door base to open and close the door opening. Includes a door unit including a door.

In addition, the vacuum chamber includes a holder on which a sample is loaded on the upper surface, a holder flange corresponding to the door flange formed on the outer peripheral surface of the holder, and a holder unit provided inside the housing and a device in which the holder unit is coupled so that the holder unit can move up and down. It includes a transfer unit that transfers the first axis slider to the first axis so that the first axis slider and the holder flange are in contact with or separated from the door flange.

In addition, according to the linear reciprocating motion by the first axis slider, the holder unit moves upward and downward by cam guides formed on both sides and cam members formed on both sides of the lower part of the housing opening.

In addition, the door flange and the holder flange are each formed as a surface that slopes forward and downward, and the holder flange can press the door flange by the linear movement of the first axis slider.

In addition, the door flange and the holder flange are each formed as a plane horizontal to the direction of movement of the first axis slider, and the holder unit moves upward so that the holder flange can press the door flange.

In addition, the cam guide may be provided with a movement prevention portion to limit linear movement of the holder unit along the first axis.

Additionally, a sealing member may be provided on one of the surfaces where the holder flange and the door flange come into contact.

In addition, the first axis slider may have at least one permanent magnet and a bush formed at the top, the bottom of the holder unit may be made of a metal that responds to magnetic force, and may include a bush hole into which the bush is inserted.

Additionally, the transfer unit may transfer the holder unit in a direction of a second axis that perpendicularly intersects the first axis.

More specifically, the transfer unit includes a second-axis encoder formed on one side, a second-axis stator and a second-axis linear guide respectively installed extending in the second axis direction, and a slider base coupled to the inner bottom of the housing. do.

In addition, the transfer unit includes a first axis stator, a first axis linear guide, and a first axis scale that extend in the first axis direction at the top, respectively, and a second axis mover formed on one side of the lower part and extend in the second axis direction. It includes a second axis slider that moves linearly in the second axis direction relative to the slider base, including a second axis scale installed and a second axis linear block movably coupled to the second axis linear guide. .

In addition, the transfer unit includes a first axis mover and a first axis encoder formed on one side, and a first axis linear block movably coupled to the first axis linear guide at the bottom, with respect to the second axis slider. It includes a first axis slider that moves relatively linearly in the first axis direction.

Additionally, the second-axis encoder and the second-axis stator may each penetrate the bottom of the housing and be coupled to the slider base.

The vacuum chamber according to the present invention can be implemented at a relatively low cost by not using a load lock chamber or gate valve to maintain a vacuum state in the process chamber when loading or unloading samples, and can improve space utilization within the process chamber. It can be improved.

In addition, the vacuum chamber according to the present invention has a relatively simple structure, is suitable for miniaturization, and can improve maintainability such as cleaning.

In addition to the above-described effects, specific effects of the present invention are described below while explaining specific details for carrying out the invention.

1 is a perspective view showing a conventional vacuum chamber.
Figure 2 is an exploded perspective view showing the gate valve structure of a conventional vacuum chamber.
Figure 3 is an exploded perspective view of a vacuum chamber according to an embodiment of the present invention.
Figure 4 is a perspective view showing a process chamber according to an embodiment of the present invention.
Figures 5a and 5b are perspective views showing the closed and open states of the door unit, respectively, according to an embodiment of the present invention.
Figures 6a and 6b are respectively perspective views showing a holder unit according to an embodiment of the present invention.
Figure 7 is a bottom view of a holder unit according to an embodiment of the present invention.
Figure 8 is a perspective view of a transfer unit according to an embodiment of the present invention.
Figure 9 is an exploded perspective view of a transfer unit according to an embodiment of the present invention.
Figures 10a and 10b are front and bottom views, respectively, of a first slider according to an embodiment of the present invention.
11A and 11B are front and bottom views, respectively, of the second slider according to an embodiment of the present invention.
Figures 12a and 12b are diagrams showing the transfer state of the holder unit in the vacuum chamber according to an embodiment of the present invention, respectively.
Figures 13a and 13b are diagrams showing the transfer state of the holder unit in the vacuum chamber according to an embodiment of the present invention, respectively.

Hereinafter, some embodiments of the present invention will be described in detail through illustrative drawings. When adding reference numerals to components in each drawing, it should be noted that identical components are given the same reference numerals as much as possible even if they are shown in different drawings. Additionally, when describing embodiments of the present invention, if detailed descriptions of related known configurations or functions are judged to impede understanding of the embodiments of the present invention, the detailed descriptions will be omitted.

Additionally, when describing the components of an embodiment of the present invention, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the component from other components, and the nature, sequence, or order of the component is not limited by the term. When a component is described as being “connected,” “coupled,” or “connected” to another component, that component can be connected or connected directly to that other component, but there is no need for another component between each component. It should be understood that may be “connected,” “combined,” or “connected.”

Figure 3 is an exploded perspective view of a vacuum chamber according to an embodiment of the present invention.

Referring to FIG. 3, the vacuum chamber according to the present invention includes a process chamber 100, a door unit 200, a holder unit 300, and a transfer unit 400.

Figure 4 is a perspective view showing a process chamber according to an embodiment of the present invention.

Referring to FIG. 4, the process chamber 100 is coupled to the outside of the housing 110 and the housing 110, which has a housing opening 111 through which a sample is loaded or taken out, on the upper front side of the housing 110. It includes a vacuum pump 120 that creates a vacuum environment in the internal space and a vacuum valve 130 to control the vacuum environment.

More specifically, it is preferable that the vacuum pump 120 and the vacuum valve 130 are each formed on the side of the housing 110, and the vacuum valve 130 is located at the housing opening 111 that requires sealing to maintain a relatively vacuum environment. ) can be installed nearby.

Accordingly, it is possible to relatively quickly detect and control changes in the vacuum environment due to leakage that may occur when a sample is brought in or out through the housing opening 111.

In addition, the housing 110 can be separated into a housing body 110a and a housing cover 110b, and a sealing member is provided between the housing body 110a and the housing cover 110b to seal it from the external environment. do.

Additionally, the process chamber 100 may further include a window through which the inside of the housing 110 can be observed on the rear side and the opposite side where the vacuum pump 120 is installed.

Additionally, the process chamber 100 includes a cam member 140 below the housing opening 111.

The cam member 140 includes two cam blocks 142 to which at least one cam follower 141 is coupled, and is installed symmetrically on both sides of the housing opening 111 so that the cam followers 141 face each other. .

Figures 5a and 5b are perspective views showing the closed and open states of the door unit, respectively, according to an embodiment of the present invention.

Referring to FIG. 5, the door unit 200 includes a door flange 211 that is inserted into the housing opening 111 and a door opening 212 through which samples are brought in or out, and is located outside the housing opening 111. It includes a door base 210 coupled to the door 220 and a door 220 hinged to the door base 210 that opens and closes the door opening 212 upward.

Accordingly, the vacuum chamber according to the present invention has a structure in which the door unit 200 is coupled upward to the housing 110, and can facilitate maintenance such as cleaning the inside of the housing 110.

In addition, a sealing member is provided on the outside of the housing opening 111 where the door base 210 is coupled to prevent leakage due to coupling between the door base 210 and the housing 110.

In addition, a sealing member is provided on the surface of the door 220 that is in close contact with the door base 210 to close the door opening 212, thereby preventing leakage between the door 220 and the door base 210.

In addition, a sealing member is provided between the upper surface of the door base 210 and the corresponding lower surface of the door 210 to prevent leakage between the door 220 and the door base 210 when the door 220 is closed. there is.

Additionally, the door 220 may further include a window through which the inside of the housing 110 can be observed.

Figures 6a and 6b are respectively perspective views showing a holder unit according to an embodiment of the present invention.

Figure 7 is a bottom view of a holder unit according to an embodiment of the present invention.

Referring to Figures 6 and 7, the holder unit 300 has a holder 310 on which a sample is loaded on the upper surface, and a holder flange 311 corresponding to the door flange 211 is formed on the outer peripheral surface of the holder 310. It is provided inside the housing 110.

In addition, the holder unit 300 may further include a cam guide 312 corresponding to the cam member 140 on both sides and two bush holes 313 on the bottom, and the entire or part of the bottom may be connected to a magnet. It is preferable that it is formed of a metal that can stick.

The holder flange 311 may have a tapered surface that slopes downward toward the front as shown in a in FIG. 6 . Accordingly, the door flange 211 also has a tapered surface that slopes downward toward the front to correspond to the holder flange 311 on which the tapered surface is formed.

Additionally, the holder flange 311 may be formed with a flat surface as shown in b of FIG. 6. Accordingly, the door flange 211 is also formed with a flat surface to correspond to the holder flange 311 in which the flat surface is formed.

Figures 8 and 9 are a perspective view and an exploded perspective view, respectively, of a transfer unit according to an embodiment of the present invention.

Figures 10a and 10b are front and bottom views, respectively, of the first slider according to an embodiment of the present invention.

Figures 11a and 11b are front and bottom views, respectively, of the second slider according to an embodiment of the present invention.

8 to 11, the transfer unit 400 includes a first axis slider 410, a second axis slider 420, and a base 430 installed in the housing 110.

The transfer unit 400 includes a second-axis encoder 433 formed on one side, a second-axis stator 431 and a second-axis linear guide 432 that extend in the second axis direction and are respectively installed in the housing. (110) A slider base 430 coupled to the inner bottom, a first axis stator 421, a first axis linear guide 422, and a first axis scale 423 installed at the top, extending in the first axis direction, respectively. and a second axis mover 424 formed on one side of the lower part, a second axis scale 425 installed extending in the second axis direction, and a second axis linear movably coupled to the second axis linear guide 432. A second axis slider 420 that includes a block 426 and moves linearly in the second axis direction relative to the slider base 430, and a first axis mover 413 and a first axis encoder formed on one side, respectively. A straight line in the first axis direction relative to the second axis slider 420, including (414) and a first axis linear block 415 movably coupled to the first axis linear guide 422 at the bottom. It includes a first axis slider 410 that moves.

More specifically, it is preferable that the second-axis encoder 433 and the second-axis stator 431 formed on the slider base 430 are respectively coupled to the slider base 430 through the bottom of the housing 110. do. In addition, it is preferable that the second axis linear guide 432 is formed in at least two pieces.

In addition, the second-axis slider 420 moves linearly in the second-axis direction along the second-axis linear guide 432 by current flow between the second-axis stator 431 and the second-axis mover 424. .

Additionally, the second-axis slider 420 can be controlled by a second-axis scale 425 coupled to the bottom and a second-axis encoder 433 fixed to the slider base 430.

In addition, the first axis linear guide 422 is preferably formed of at least two, and the first axis scale 423 and the second axis scale 425 are the first axis encoder 414 and the second axis encoder 414, respectively. It is formed at a position corresponding to the axis encoder 433.

In addition, the first axis slider 410 moves linearly in the first axis direction along the first axis linear guide 422 by the current flow between the first axis stator 421 and the first axis mover 413. .

Additionally, the first axis slider 410 can be controlled by a first axis encoder 414 coupled to the side and a first axis scale 423 fixed to the second axis slider 420.

In addition, the first axis slider 410 includes at least one permanent magnet 411 at the top and two bushes 412 each inserted into the bush hole 313, so that the holder unit 300 is It is stably coupled so that it can be moved up and down based on the single-axis slider 410.

12A and 12B are diagrams showing the transfer state of the holder unit when the door flange 211 and the holder flange 311 are each formed to be inclined forward and downward in the vacuum chamber according to an embodiment of the present invention. am.

Referring to FIG. 12, in the vacuum chamber according to the present invention, when the door flange 211 and the holder flange 311 are each formed as a tapered surface inclined downwardly forward, the operating method will be described as follows.

The process chamber 100 creates a vacuum environment inside the housing 110 by the vacuum pump 120 and the vacuum valve 130. At this time, the holder unit 300 is located at the rear inside the housing 110 with respect to the door unit 200, as shown in a in FIG. 12, and is defined as a neutral state.

Meanwhile, in order to input a sample into the process chamber 100 for analysis or manufacturing, the holder unit 300 is transferred to the door unit 200 by the transfer unit 400.

More specifically, the holder unit 300 moves linearly along the first axis by the first axis slider 410 so that the holder flange 311 can contact the door flange 211.

Accordingly, the tapered surface of the holder flange 311 and the tapered surface of the door flange 211 are in close contact, and the door flange sealing member 211a is provided between the contact surface of the holder flange 311 and the door flange 211. Sealing is achieved by.

At this time, the holder unit 300 is fixed by the movement prevention portion 312a formed on the cam follower 141 and the cam guide 312 in a state where the holder flange 311 and the door flange 211 are sealed.

That is, the vacuum chamber according to the present invention can perform the role of a conventional gate valve by using the linear stage, which is the first axis slider 410, as described above.

More specifically, as the holder unit 300 moves along the first axis, the cam follower 141 comes into close contact with the cam guide 312, and moves along the first axis slider 410 according to the shape of the cam guide 312. It is spaced upward from the upper surface of the first axis slider 412, and when the transfer of the holder unit 300 is completed and the holder flange 311 and the door flange 211 are sealed, it is placed on the upper surface of the first axis slider 412. It settles down.

That is, the movement prevention part 312a is formed in a '^' shape, and when the sealing of the holder flange 311 and the door flange 211 is completed, the cam guide 412 is inserted into the center of the movement prevention part 312a. It is maintained in this state and fixes the holder unit 300.

Accordingly, the vacuum chamber according to the present invention can maintain the sealing of the holder flange 311 and the door flange 211 even when the power supply is interrupted.

In addition, in the vacuum chamber according to the present invention, when the door 220 is opened and a sample is loaded into the holder 310, the inside of the housing 110 is sealed by sealing the holder flange 311 and the door flange 211 as described above. A vacuum environment is maintained.

Accordingly, the vacuum chamber according to the present invention replaces the role of the gate valve with the holder unit 300 and the transfer unit 400 as described above, so the gate valve and the configuration for driving it can be omitted, so the process chamber ( 100) Internal space utilization improves.

Thereafter, when loading of the sample into the holder 310 is completed and the door 220 is closed, as described above, the holder unit 300 returns to the neutral state by the first axis slider 410.

At this time, the holder unit 300 can be finely adjusted in position by the first axis slider 410 and the second axis slider 420 so that inspection and analysis can be performed using probes, vision inspection devices, manufacturing devices, etc., so that the sample Inspection, analysis, manufacturing, etc. can be easily performed.

Meanwhile, Figures 13a and 13b are diagrams showing the transfer state of the holder unit when the door flange 211 and the holder flange 311 are each formed with flat surfaces in the vacuum chamber according to an embodiment of the present invention. am.

Referring to FIG. 13, in the vacuum chamber according to the present invention, a method of sealing the door flange 211 and the holder flange 311 when the door flange 211 and the holder flange 311 are each formed with a flat surface. is as follows:

The holder unit 300 moves linearly along the first axis by the first axis slider 410 so that the holder flange 311 can contact the door flange 211 in a neutral state.

At this time, the holder unit 300 moves along the first axis, and the cam follower 141 is in close contact with the cam guide 312, and the shape of the cam guide 312 moves upward with respect to the first axis slider 410. Thus, the door flange 211 and the holder flange 311 are sealed by being spaced apart from the upper surface of the first axis slider 412.

More specifically, the holder unit 300 is spaced apart from the upper surface of the first axis slider 410 by the upper moving part 312b formed on the cam guide 312 and the door flange 211 and the holder flange 311. is sealed.

At this time, the upper moving part 312b converts straight motion into up and down motion, and is preferably formed as an inclined surface between straight sections having different heights.

In addition, the holder unit 300 further includes a movement prevention portion 312a in the cam guide 312, so that in a state where the door flange 211 and the holder flange 311 are sealed, the holder unit 300 is first It can prevent movement to the axis.

Meanwhile, when the holder unit 300 moves in a neutral state as described above, the holder unit 300 and the permanent magnet 411 installed on the upper surface of the first axis slider 410 due to the self-weight of the holder unit 300 The upper surface of the first axis slider 410 is brought into close contact.

The preferred embodiments of the present invention described above have been disclosed for illustrative purposes, and those skilled in the art will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications, changes, and additions will be possible. The addition should be viewed as falling within the scope of the patent claims below.

100. Process chamber
110. Housing
110a. housing body
110b. housing cover
111. Housing opening
120. Vacuum pump
130. Vacuum valve
140. Cam member
141. Cam Follower
142. Camblock
200. Door unit
210. Door base
211. Door flange
212. Door opening
211a. Door flange sealing member
220. Door
300. Holder unit
310. Holder
311. Holder flange
312. Cam guide
312a. Movement prevention unit
312b. Upper moving part
313. Bush Hall
400. Transfer unit
410. 1st axis slider
411. Permanent magnet
412. Bush
413. Axis 1 mover
414. 1st axis encoder
415. 1st axis linear block
420. 2nd axis slider
421. First axis stator
422. 1st axis linear guide
423. 1st axis scale
424. Second axis mover
425. Second axis scale
426. 2nd axis linear block
430. Slider Base
431. 2nd axis stator
432. 2nd axis linear guide
433. 2nd axis encoder

Claims (10)

A process chamber having a housing that creates a vacuum environment therein;
a door opening provided at a front upper portion of the process chamber;
a door flange extending inside the door opening;
A door that opens and closes the door opening;
a holder unit on which a sample is loaded on the upper surface, a holder flange corresponding to the door flange is provided on the outer peripheral surface, and disposed inside the housing;
A vacuum comprising: a transfer unit having a first axis slider to which the holder unit is coupled, and transporting the first axis slider to a first axis extending in the forward and backward directions so that the holder flange contacts or separates from the door flange; chamber.
According to clause 1,
The door flange and the holder flange are each formed with a surface that slopes downward toward the front,
A vacuum chamber in which the holder flange presses the door flange by the linear movement of the first axis slider.
According to clause 2,
The holder unit is coupled to the first axis slider so that it can move up and down,
A vacuum chamber in which the holder unit moves upward and downward by cam guides formed on both sides and cam members formed on both sides of the lower part of the door opening according to the linear reciprocating motion by the first axis slider.
According to clause 1,
The holder unit is coupled to the first axis slider so that it can move up and down,
A vacuum chamber in which the holder unit moves upward and downward by cam guides formed on both sides and cam members formed on both sides of the lower part of the door opening according to the linear reciprocating motion by the first axis slider.
According to clause 4,
The door flange and the holder flange are each formed as a horizontal plane parallel to the direction of movement of the first axis slider,
A vacuum chamber in which the holder unit moves upward and the holder flange presses the door flange.
According to any one of claims 3 to 5,
A vacuum chamber in which a movement prevention portion is formed in the cam guide to limit linear movement of the holder unit along the first axis.
According to any one of claims 1 to 5,
A vacuum chamber in which a sealing member is provided on one of the surfaces where the holder flange and the door flange come into contact.
According to any one of claims 1 to 5,
The first axis slider has at least one permanent magnet and a bush formed at the top, respectively,
A vacuum chamber where the bottom of the holder unit is made of metal that responds to magnetic force and includes a bush hole into which the bush is inserted.
According to any one of claims 1 to 5,
The transfer unit is:
a slider base coupled to the inner bottom of the housing, including a second-axis encoder formed on one side, a second-axis stator and a second-axis linear guide respectively installed to extend in the second-axis direction; and
A first axis stator, a first axis linear guide, and a first axis scale that extend in the first axis direction at the top, and a second axis mover that is formed on one side of the bottom and a second axis that extends in the second axis direction and is installed. It further includes a second-axis slider that includes a scale and a second-axis linear block movably coupled to the second-axis linear guide and moves linearly in a second-axis direction relative to the slider base,
The first-axis slider includes a first-axis mover and a first-axis encoder formed on one side, and a first-axis linear block movably coupled to the first-axis linear guide at a lower portion, and the second-axis slider moves in a straight line relative to the first axis,
The second axis is a vacuum chamber extending in the left and right directions.
According to clause 9,
A vacuum chamber in which the second-axis encoder and the second-axis stator each penetrate the bottom of the housing and are coupled to the slider base.