KR102611865B1 - Light source device, exposure device, and light source device determination method - Google Patents

Abstract

The present invention relates to an exposure device used for exposure of printed wiring boards, etc., a light source device provided with a judgment circuit for discriminating with high precision, in a short time, and at low cost whether a discharge lamp serving as a light source is a genuine product and whether it is a new product or a used product. By providing, the light source device 100 is composed of a discharge lamp 110 serving as a light source, a judgment circuit 200, and a reflector container 151 to which the discharge lamp 110 and the judgment circuit 200 are attached. do. And, the judgment circuit 200 includes an RC parallel circuit 210 for detecting whether the discharge lamp 110 is a genuine product, and an RC parallel circuit 210 for determining whether the discharge lamp 110 is a new product. It consists of a fuse 220 connected in series.

Description

Light source device, exposure device, and light source device determination method

The present invention relates to an exposure device used for exposure of printed wiring boards, etc., a light source device including a judgment circuit for detecting whether a discharge lamp serving as a light source is a genuine product and whether it is a new product or a used product, and exposure using the light source device. It relates to a method of determining a device and a light source device.

Conventionally, in order to mount components in electronic devices, a printed wiring board is used in which a wiring pattern is formed with a metal such as copper on a resin or glass epoxy board. Photo etching technology is used to form wiring patterns on such printed wiring boards. Photoetching is performed by applying a photoresist, a photosensitive agent, to the entire surface of a substrate on which a metal layer for wiring is formed on the entire surface, and then irradiating the surface with light from an exposure device through a photo mask identical to the wiring pattern.

Photoresists include negative photoresists, whose solubility decreases when exposed to irradiated light, and positive photoresists, whose solubility increases when exposed to irradiated light. The part of the photoresist whose solubility has been relatively increased by irradiated light is removed through chemical treatment, and the exposed metal layer is removed by etching. Only the metal layer below the remaining photoresist remains, and the wiring pattern is formed by removing the photoresist. formed on the substrate. Even when irradiating light to either positive or negative photoresist, stable irradiation of light for a certain period of time with uniform illuminance is required in order to secure a uniform exposure amount over the entire irradiation surface.

However, in the manufacture of printed wiring boards, in order to improve the efficiency of the manufacturing process, one large printed wiring board with a plurality of circuits is manufactured, and after completion of the board, it is divided into individual circuits to be used in the desired electronic device. there is.

As printed wiring boards become larger, exposure equipment manufacturers are trying to obtain high illuminance by enlarging the discharge lamp as a light source, or to secure the necessary illuminance by using multiple light sources using a plurality of small, low-illuminance discharge lamps. For example, instead of using only one light source of an 8kW high-pressure discharge lamp, four light sources of a 2kW high-pressure discharge lamp are used. Low-illuminance discharge lamps are superior to high-intensity discharge lamps in terms of manufacturing difficulty and manufacturing cost, and many exposure apparatuses having multiple light sources are sold.

However, with the diversification of light sources, the homogeneity of a plurality of discharge lamps has become more important due to the need to secure a uniform exposure amount. Therefore, in order to stabilize the performance of exposure equipment and manufacture highly reliable printed wiring boards, it is necessary to use only genuine discharge lights manufactured by the same manufacturer, using the same materials and using the same method, and it is necessary to determine whether the discharge lights are genuine products. There is a need for devices and methods to determine .

There are several known methods for determining the discharge lamp or light source being used in optical devices, not limited to exposure devices (for example, see Patent Documents 1 to 3). For example, in the lamp abnormality detection device described in Patent Document 1, a predetermined voltage is supplied to an incandescent light bulb using a filament such as a halogen lamp, and the current value when the filament is half broken is compared with the current value when the filament is normal. This is done to detect lamps with abnormalities. However, although the life of the lamp can be detected with this, it is difficult to determine whether the lamp is a genuine product.

In addition, for example, in Patent Document 2, a circuit with a resistor and a condenser connected in parallel with a light source such as an incandescent lamp or a fluorescent lamp is connected, and the time constant (the difference between the resistance value and the capacitance value) when a predetermined voltage is supplied to both ends of the light source is connected. Product) is measured to detect whether the light source is an incandescent lamp or a fluorescent lamp. However, although it is possible to detect a large difference in time constants (the time constants are significantly different between incandescent lamps and fluorescent lamps) with this, it is difficult to determine whether the same incandescent lamp is a genuine product.

Additionally, for example, in Patent Document 3, ultraviolet rays are radiated to a plurality of filaments enclosed in the valve of the same incandescent bulb, and the discharge start voltage between the filaments is measured to detect defective products. However, although defective products can be detected with this, it is difficult to determine whether the lamp is a genuine product.

Japanese Patent Publication No. 7-52677 Japanese Patent Publication No. 2010-527504 Japanese Patent Publication No. 62-43059

In order to determine whether the light source device is a genuine product or a similar light source device manufactured by another manufacturer, it is necessary to determine whether the light source is defective, as in Patent Document 1 and Patent Document 3, or if it is of a different type (as in Patent Document 2). A more precise determination device is needed than to identify whether or not a light source is of a different type. In addition, it is necessary to simultaneously solve the problems of ensuring that the inspection time of multiple light sources does not significantly exceed the start-up time of the exposure apparatus and that the cost of the entire exposure apparatus is not significantly increased.

Additionally, from the viewpoint of ensuring a uniform exposure amount, it is not desirable to mix new and used light source devices, even if they are genuine light source devices from the same manufacturer. For this reason, there has been a demand for a light source device that can determine whether or not it is a used light source device that has been used at least once.

The present invention was made in consideration of the above-mentioned problems, and its purpose is to determine whether a discharge lamp serving as a light source is a genuine product and whether it is a new or used product in an exposure apparatus used for exposure of printed wiring boards, etc., with high precision, short time, and low cost. The object is to provide a light source device equipped with a judgment circuit for identification, an exposure device using the light source device, and a judgment method thereof.

According to one form of the present invention,

Discharge lamp as a light source,

circuit for judgment, and

A light source device comprising a reflector container to which the discharge lamp and the judgment circuit are attached,

The determination circuit is provided with a light source device having an RC parallel circuit for detecting whether the discharge lamp is a genuine product, and a fuse connected in series to the RC parallel circuit for determining whether the discharge lamp is a new product. do.

Additionally, according to another form of the present invention,

Discharge lamp as a light source,

circuit for judgment, and

A light source device comprising a reflector container to which the discharge lamp and the determination circuit are attached,

The determination circuit is provided with a light source device having an RC parallel circuit for detecting whether the discharge lamp is a genuine product, and a fuse connected in parallel to the RC parallel circuit for determining whether the discharge lamp is a new product. do.

Additionally, according to another form of the present invention,

Discharge lamp as a light source,

circuit for judgment, and

A light source device comprising a reflector container to which the discharge lamp and the determination circuit are attached,

The determination circuit includes an RC parallel circuit for detecting whether the discharge lamp is a genuine product, and a light source device having a diode connected in series to the RC parallel circuit for determining whether the discharge lamp is a new product. do.

Additionally, according to another aspect of the present invention,

Discharge lamp as a light source,

circuit for judgment, and

A light source device comprising a reflector container to which the discharge lamp and the judgment circuit are attached,

The determination circuit is provided with a light source device having an RC parallel circuit for detecting whether the discharge lamp is a genuine product, and a diode connected in parallel with the RC parallel circuit to determine whether the discharge lamp is a new product. do.

Preferably, the judgment circuit is accommodated in the reflector container.

Preferably, the fuse is a thermal fuse.

Additionally, according to another form of the present invention,

one or more of the above light source devices,

A frame for mounting the light source device toward the object to be irradiated,

A constant current power supply that supplies current to the judgment circuit,

A switch that turns on and off the current from the constant current power supply,

a control unit that turns the switch on and off to energize the judgment circuit for a predetermined period of time;

A measuring unit that measures the voltage at both ends of the judgment circuit while energized at least twice,

A comparison unit that compares the difference between the voltage across both ends during the first measurement and the voltage between both ends during the second measurement and a voltage range of a predetermined upper and lower limit value for determining whether discharge, etc. is positive or negative,

Upon receiving a signal from the comparator, if the difference between the voltages between both ends is within a predetermined voltage range, it is determined that the discharge light to be inspected is a genuine product. If the difference between the voltages between both ends is outside the predetermined voltage range, it is determined that the discharge light to be inspected is a genuine product. The judge decides that it is not,

After determining whether the discharge lamp is a genuine product,

A constant current power supply for used judgment that supplies current to the judgment circuit,

A used judgment switch that turns on and off the current from the used judgment constant current power supply,

a used judgment control unit that turns on/off the used judgment switch and energizes the judgment circuit;

A measurement unit for used judgment that measures the voltage at both ends of the judgment circuit while energized,

A used judgment unit that determines whether the discharge lamp is a used product based on whether the measured voltage at both ends is within the voltage range of a predetermined upper and lower limit value, and

An exposure apparatus including a display portion that displays a determination result is provided.

Applying electricity to the judgment circuit of the light source device for a predetermined period of time,

Measure the voltage at both ends of the judgment circuit while energized at least twice,

By comparing the difference between the voltage across both ends at the time of the first measurement and the voltage between both ends at the time of the second measurement, and the voltage range of a predetermined upper and lower limit value for determining whether a discharge, etc. is positive or negative,

If the difference between the voltages between both ends is within a predetermined voltage range, it is determined that the discharge lamp subject to determination is a genuine product. If the difference between the voltages of both ends is outside the predetermined voltage range, it is determined that the discharge lamp subject to determination is not a genuine product,

Additionally, after determining whether the discharge lamp is a genuine product,

Applying electricity to the judgment circuit,

By measuring the voltage at both ends of the judgment circuit while energized,

If the measured voltage at both ends is within the voltage range of predetermined upper and lower limits, the discharge light subject to judgment is determined to be new, and if it is outside the voltage range of predetermined upper and lower limits, the discharge light is determined to be used. Determination method of light source device.

According to the present invention, an exposure apparatus used for exposure of printed wiring boards, etc. is provided with a judgment circuit for discriminating with high accuracy, in a short time, and at low cost whether a discharge lamp serving as a light source is a genuine product and whether it is a new product or a used product. It was possible to provide a light source device, an exposure device using the light source device, and a determination method thereof.

Figure 1 is a diagram showing an example of an exposure machine 10 to which the present invention is applied.
FIG. 2 is a diagram showing an example of an exposure apparatus 50 to which the present invention is applied.
Figure 3 is a plan view showing an example of an exposure apparatus 50 to which the present invention is applied.
Figure 4 is a cross-sectional view showing an example of a light source device 100 to which the present invention is applied.
Figure 5 is a cross-sectional view showing an example of the discharge lamp 110.
Figure 6 is a diagram showing an example of a determination device 57 to which the present invention is applied.
FIG. 7 is a cross-sectional view showing an example of the light source device 100 according to Modification Example 1 to which the present invention is applied.
Figure 8 is a cross-sectional view showing an example of the light source device 100 according to Modification Example 2 to which the present invention is applied.
Figure 9 is a cross-sectional view showing an example of the light source device 100 according to Modification Example 3 to which the present invention is applied.
Figure 10 is a cross-sectional view showing another embodiment of the installation position of the judgment circuit 200.
Figure 11 is a cross-sectional view showing another embodiment of the installation position of the judgment circuit 200.

(Example 1)

(Configuration of exposure machine 10)

Figure 1 shows an exposure machine 10 according to Example 1 to which the present invention is applied. The exposure machine 10 is roughly composed of an exposure device 50, an integrator 12, a concave mirror 14, and an irradiation surface 16.

The exposure apparatus 50 emits light containing a wavelength suitable for exposure of the exposure object (X). Details of the exposure apparatus 50 will be explained after explaining the configuration of the exposure machine 10.

The integrator 12 has an incident surface 18 that receives light from the exposure device 50 and an exit surface 20 that emits the light with increased uniformity of the received light. A plurality of fly-eye lenses 21 are formed on the entrance surface 18 and the exit surface 20, respectively.

The concave mirror 14 has a reflective concave surface 22 on its inside. This concave mirror 14 reflects the light emitted from the integrator 12 on the reflective concave surface 22 and converts it into parallel light.

The irradiation surface 16 receives parallel light from the concave mirror 14, and is arranged in a direction substantially perpendicular to the parallel light. An exposure object (X) is placed on this irradiation surface (16). For example, a photosensitive agent is applied to the surface of the exposure object X. When parallel light from the concave mirror 14 illuminates a desired area on the exposure object X, a desired circuit pattern, etc. is formed on the surface of the exposure object X.

(Configuration of exposure device 50)

FIG. 2 is a diagram showing an exposure apparatus 50 according to Example 1 to which the present invention is applied. 3 is a top view of the exposure apparatus 50. The exposure device 50 includes a plurality of light source devices 100, a frame 52, a lighting circuit 54, a switch 55, a constant current power supply 56, a judgment device 57, and a constant current power supply 76 for used judgment. and a switch 78 for used judgment. In addition, the switch 55, the switch 78 for used judgment, the constant current power source 56, and the constant current power source 76 for used judgment may be set to be physically identical and share functions, or they may be set to be physically different from each other. do.

The light source device 100 emits light containing a wavelength suitable for exposure of the exposure object (X). As shown in FIG. 4, the light source device 100 is roughly composed of a discharge lamp 110, a reflector 150, an insulating base 170, and a judgment circuit 200. In addition, the reflector 150 and the insulating base 170 may be collectively described as the reflector container 151.

As shown in FIG. 5, the discharge lamp 110 includes a light emitting tube portion 112 and a pair of seal portions 114 extending from the light emitting tube portion 112. The light emitting tube portion 112 and the pair of seal portions 114 are integrally formed of quartz glass. Additionally, an internal space 116 sealed by a seal portion 114 is formed within the light emitting tube portion 112.

A foil 118 made of molybdenum is embedded in each seal portion 114 of the discharge lamp 110, and one end is connected to one end of the foil 118, and the other end is disposed in the internal space 116. A pair of electrodes 120 and a pair of lead rods 122, one end of which is connected to the other end of the foil 118 and the other end of which extends outward from the seal portion 114, are provided, respectively. there is. Additionally, a predetermined amount of mercury 124 and halogen (eg bromine) are enclosed in the internal space 116.

When a predetermined high voltage is applied to the pair of lead rods 122 installed in the discharge lamp 110, the glow discharge initiated between the pair of electrodes 120 installed in the internal space 116 of the light emitting tube portion 112 is an arc discharge. transitions to , and light (mainly ultraviolet rays) is emitted by the mercury 124 evaporated and excited by the arc.

Returning to Fig. 4, in the light source device 100 according to this embodiment, one seal portion 114 is inserted into the seal portion insertion hole 156 of the reflector 150. Additionally, the discharge lamp 110 may be used for alternating current lighting or for direct current lighting.

The reflector 150 has a bowl-shaped reflecting surface 152 on its inner surface. This reflective surface 152 reflects part of the light from the discharge lamp 110 arranged so that the light emitting tube portion 112 is located inside the reflector 150. In this embodiment, this reflective surface 152 is defined as a rotating paraboloid. Additionally, the light emitting point (roughly, the central position of the arc formed between the pair of electrodes 120 in the internal space 116) of the discharge lamp 110 coincides with the focus of the rotation paraboloid. As a result, the light emitted from the light emitting point of the discharge lamp 110, reflected by the reflecting surface 152, and then coming out of the opening 154 of the reflector 150 becomes substantially parallel light. Of course, the shape of the reflection surface 152 is not limited to this, and may be an ellipse of rotation, another rotation surface, or a shape other than a rotation surface. Additionally, it is not essential to align the light emitting point with the focus, and the light emitting point may be shifted from the focus as needed.

Additionally, a bottom neck portion 155 protrudes from the side opposite to the opening 154 of the reflector 150. Additionally, a seal portion insertion hole 156 into which one seal portion 114 of the discharge lamp 110 is inserted is formed in the reflective surface 152 of the reflector 150. This seal portion insertion hole 156 is formed from the bottom of the reflective surface 152 to the tip of the bottom neck portion 155.

As shown in FIG. 1, by combining the reflector 150 with the discharge lamp 110, the light emitted from the discharge lamp 110 is centered on the light traveling along the central axis CL of the reflecting surface 152. It proceeds forward of the reflector 150 within a range having a predetermined angle (opening angle).

Returning to FIG. 4, the insulating base 170 is formed of an electrical insulator such as ceramic, and is inserted into the bottom neck 155 and the seal portion insertion hole 156 of the reflector 150 and is installed on one side of the discharge lamp 110. A reflector insertion hole 172 into which the seal portion 114 is inserted is formed. By inserting the bottom neck portion 155 and the seal portion 114 into the reflector insertion hole 172, the insulating base 170 covers the seal portion insertion hole 156 from the outside.

In addition, the insulating base 170 is formed with an inner space 174 communicating with the above-mentioned reflector insertion hole 172, and the inner space 174 and the outer side are communicated with each other so that the power cable A is inserted and passed through. A power cable insertion hole 176 is formed.

Additionally, the insulating base 170 and the discharge lamp 110 (in this embodiment, also the judgment circuit 200) are fixed to each other by an inorganic adhesive (C) having electrical insulation properties and high thermal conductivity. Specifically, the end of the bottom neck 155 of the reflector 150 and one seal portion 114 of the discharge lamp 110 are inserted into the reflector insertion hole 172 of the insulating base 170, and the end of the bottom neck 155 of the reflector 150 is inserted into the reflector insertion hole 172 of the insulating base 170. With the judgment circuit 200 and the power cable A placed in the inner space 174 of 170, the inner space 174 is filled with an inorganic adhesive C.

The judgment circuit 200 includes an RC parallel circuit 210 and a fuse 220 in this embodiment. The RC parallel circuit 210 is a circuit constructed by connecting the resistor 212 and the condenser 214 in parallel.

The fuse 220 is a component connected in series to the RC parallel circuit 210. In the case of this embodiment, the capacity of the fuse 220 is not blown when a constant current for determining whether the discharge light 110 is a genuine product flows, as will be described later, and the fuse blowing operation unit 67 is It is set to disconnect when a current greater than the constant current flows. In addition, instead of this, a fuse 220, that is, a “thermal fuse”, which is blown by heat from the discharge lamp 110 while on, may be used.

Returning to FIG. 3 , the frame 52 is a substantially rectangular parallelepiped-shaped member in which a plurality of concave portions 58 on which a plurality of light source devices 100 are mounted are formed.

Returning to FIG. 2 , the lighting circuit 54 is a circuit that supplies the necessary power to the discharge lamps 110 of each light source device 100 attached to the frame 52. In addition, the constant current power supply 56 and the constant current power source 76 for use judgment are power supplies that supply a direct current constant current to the judgment circuit 200 of each light source device 100, and the switch 55 and the used judgment switch ( 78) turns on and off the direct current constant current supplied to the judgment circuit 200.

The determination device 57 is a device for determining whether each light source device 100 (discharge lamp 110) is a genuine product and whether each light source device 100 (discharge lamp 110) is a new product or a used product, Figure 6 As shown, a control unit 60, a measurement unit 62, a comparison unit 64, a determination unit 66, a fuse blowing operation unit 67, a control unit 68 for used judgment, and a measurement for used judgment It has a unit 70 and a used judgment unit 72. In addition, the control unit 60 and the control unit 68 for used judgment, the measurement unit 62 and the measurement unit 70 for used judgment, and the judgment unit 66 and the used judgment unit 72 each have the same physical function. You can set it up to be shared, or prepare something different for each.

The control unit 60 has a function to turn on/off the current supplied from the constant current power source 56 to the judgment circuit 200 by manipulating the switch 55.

The measuring unit 62 has a function of measuring the voltage at both ends of the judgment circuit 200. In addition, in the case of this embodiment, the measuring unit 62 is configured to measure the voltage at both ends of the judgment circuit 200 while energized at least twice.

The comparison unit 64 determines the difference between the voltage at both ends of the judgment circuit 200 measured in the measurement unit 62 at the first measurement and the voltage at both ends at the second measurement, and whether the discharge lamp 110 is a genuine product. It has the function of comparing the voltage range of the predetermined upper and lower limit values to be determined. The voltage distribution range of a plurality of RC parallel circuits for detecting genuine products measured in advance under predetermined conditions is recorded in the comparison unit 64, and the comparison unit 64 transmits the signal of the comparison result to the determination unit 66. do.

The determination unit 66 receives the result signal transmitted from the comparison unit 64, and determines that the discharge lamp 110 to be inspected is a genuine product if the difference between the voltages between both ends is within a predetermined voltage range. Conversely, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product. If it is outside the predetermined voltage range, it is determined that the discharge lamp 110 to be inspected is not a genuine product.

After the determination unit 66 determines whether the discharge lamp 110 is a genuine product, the fuse blowing operation unit 67 flows a current greater than the constant current for determining the genuine product to the determination circuit 200. As a result, the fuse 220 is blown and the decision circuit 200 is opened, and the resistance value at both ends of the decision circuit 200 becomes infinite.

After the operation by the fuse blowing operation unit 67, the used judgment control unit 68 operates the used judgment switch 78 to control the current supplied from the used judgment constant current power supply 76 to the judgment circuit 200. It has the function of turning on and off.

The used judgment measuring unit 70 has a function of measuring the voltage at both ends of the judgment circuit 200 while energized.

The used judgment unit 72 has a function of determining whether the discharge lamp 110 is a new product or a used product based on whether the voltage at both ends measured by the used judgment measurement unit 70 is within the voltage range of a predetermined upper and lower limit value. . In other words, when the voltage at both ends measured by the measuring unit 70 for used judgment is within the voltage range of a predetermined upper and lower limit value, the used judging unit 72 determines that the discharge lamp 110 is new. Conversely, if the voltage at both ends measured by the used product determination measuring unit 70 is outside the voltage range of the predetermined upper and lower limit values, the used product determining unit 72 determines that the discharge lamp 110 is a used product.

(Operation of exposure device 50)

When the power switch (not shown) of the exposure device 50 is turned on, the lighting circuit 54 supplies power to the discharge lamps 110 in all light source devices 100 attached to the frame 52. Normally, it takes several minutes for the discharge light 110 to fully start up.

For example, immediately after turning on the power switch of the exposure device 50, the control unit 60 of the judgment device 57 is connected to a judgment circuit in any of the light source devices 100 attached to the frame 52 ( The switch 55 connected to 200 is turned on, and a constant current is supplied from the constant current power supply 56 to the judgment circuit 200. Of course, the timing at which the determination device 57 operates is not limited to this.

Immediately after turning on the switch 55 for the first time, the measurement unit 62 measures the voltage across the judgment circuit 200 and sends the result (first time) to the comparison unit 64. Next, a constant current is supplied again to the same judgment circuit 200 after a predetermined time (for example, 10 seconds later) from the first measurement, and the measurement unit 62 is connected to both ends of the judgment circuit 200. The voltage is measured, and the result (second time) is sent to the comparison unit 64.

The comparison unit 64, which receives the results of two voltage measurements at both ends, sends a result signal to the determination unit 66 to determine whether the difference between the two measured voltages is within a pre-recorded voltage difference range. When the difference between the voltages between both ends is within a predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product. Conversely, when the difference between the voltages between both ends is outside the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product. It is determined that the target discharge lamp 110 is not a genuine product.

When a constant direct current is applied to the RC parallel circuit 210, current flows through the condenser 214 and the resistor 212 at the stage when no charge is accumulated in the condenser 214 at the beginning, so the RC parallel circuit 210 The voltage at both ends of is determined based on the combined impedance of the condenser 214 and the resistor 212. The first measurement of the voltage at both ends of the judgment circuit 200 by the measurement unit 62 is performed at this timing.

A short while after a direct current is passed through the RC parallel circuit 210, the condenser 214 becomes fully charged, and no current flows through the condenser 214. When no current flows through the condenser 214, the voltage across the RC parallel circuit 210 is determined based on the resistance value of the resistor 212 alone. The second measurement of the voltage at both ends of the judgment circuit 200 by the measurement unit 62 is performed at this timing. In general, the resistance value of the resistor 212 alone is larger than the combined impedance of the capacitor 214 and the resistor 212 described above. Since a constant current flows through the RC parallel circuit 210, the voltage at both ends of the RC parallel circuit 210 (second measurement value) when the resistance value of only the resistor 212 becomes the capacitor 214 and The voltage at both ends of the RC parallel circuit 210 at the time of the combined impedance of the resistor 212 is greater than the voltage (first measurement value).

Conversely, if the product is not a genuine product, the first measurement result and the second measurement result are the same or almost the same. As a result, it is possible to determine whether the light source device 100 (discharge lamp 110) is a genuine product using the above-described determination method. Additionally, it may be determined whether the product is a genuine product by measuring the voltage at both ends only at the second measurement timing described above. In this case, whether the product is a genuine product is determined based on whether the measured value of the voltage at both ends is within a predetermined voltage range.

After the genuine product determination in the first light source device 100 is completed, the control unit 60 starts supplying constant current to the judgment circuit 200 in the other light source device 100. Afterwards, a genuine product determination is made in the same manner as in the first case described above, and the same determination is continued until the determination of all light source devices 100 is completed or until the inspection of a predetermined range of light source devices 100 is completed. Repeat.

After the necessary genuine product judgment is completed, the fuse blowing operation unit 67 in the judgment device 57 flows a current (e.g., 30V, 1.4A) larger than the constant current for genuine product judgment to the judgment circuit 200. . As a result, the fuse 220 is blown and the decision circuit 200 is opened, and the resistance value at both ends of the decision circuit 200 becomes infinite.

Then, the used-use judgment control unit 68 in the judgment device 57 turns on the used-use judgment switch 78 connected to the judgment circuit 200 in any one of the light source devices 100, and A constant current is supplied to the judgment circuit 200 from the judgment constant current power supply 76. Immediately after turning on the second-hand judgment switch 78, the second-hand judgment measuring unit 70 measures the voltage across the judgment circuit 200 and sends the result to the second-hand judgment unit 72.

The used determination unit 72 determines whether the discharge lamp 110 is a new product or a used product based on whether the measured voltage is within a voltage range of a predetermined upper and lower limit value.

In the case of this embodiment, when the voltage at both ends measured by the measuring unit 70 for used judgment is within the voltage range of a predetermined upper and lower limit value, the used judging unit 72 determines that the discharge lamp 110 is new. Conversely, if the voltage at both ends measured by the used product determination measuring unit 70 is outside the voltage range of the predetermined upper and lower limit values, the used product determining unit 72 determines that the discharge lamp 110 is a used product. If the light source device 100 is a genuine product and has been used at least once (=used product), the fuse 220 in the judgment circuit 200 is the fuse blowing operation unit 67 as described above. Since the wire has already been disconnected, the judgment circuit 200 is in an open state (resistance value = infinite). For this reason, the maximum voltage of the constant current power supply 76 for used/used judgment is applied to the voltage at both ends of the judgment circuit 200. By setting the predetermined upper limit value to be smaller than the “maximum voltage of the constant current power source 76 for used judgment,” the used product for which the judgment circuit 200 is open can be judged by the measurement unit 70 for used judgment.

Up to this point, an example has been described in which the used product judgment is started after performing the genuine product judgment on all light source devices 100 attached to the exposure apparatus 50. However, the genuine product judgment and the used product judgment are continued for one light source device 100. After this, the genuine product judgment and the used product judgment may be continuously performed for other light source devices 100 as well. Of course, the genuine product judgment may be performed sequentially for a plurality of light source devices 100, and then the used product judgment may be performed sequentially. This is also the same in the following modification examples. Additionally, after determining a genuine product, you may determine a used product after using it for about 2000 hours.

(Features of exposure device 50)

According to this embodiment, a light source device 100 having a judgment circuit 200 for identifying with high accuracy, in a short time, and at low cost whether the discharge lamp 110 serving as a light source is a genuine product and whether it is a new or used product; It was possible to provide an exposure device 50 using the light source device 100 and a determination method thereof.

(Variation Example 1)

In the determination circuit 200 of the light source device 100 in the above-described embodiment, the fuse 220 was connected in series to the RC parallel circuit 210, but as shown in FIG. 7, the fuse 220 ) may be connected in parallel to the RC parallel circuit 210.

In this case, the determination of the regular product of the light source device 100 is as follows. That is, after the control unit 60 operates the switch 55 to supply power from the constant current power source 56 to the judgment circuit 200, the measurement unit 62 measures the voltage at both ends of the judgment circuit 200. At this time, if it is a regular product, current mainly flows through the fuse 220, so the voltage at both ends is sufficiently small (for example, about 0.4V).

Then, the fuse blowing operation unit 67 is operated to cause a large current and voltage (eg, 30V, 1.4A) to flow through the judgment circuit 200 (mainly a fuse). As a result, the fuse 220 is blown, and the judgment circuit 200 essentially becomes only the RC parallel circuit 210. Of course, in the same manner as in Example 1 described above, the fuse 220 may be blown by heat from the illuminated discharge lamp 110.

Next, the control unit 60 turns on the switch 55 again and supplies a constant current from the constant current power supply 56 to the judgment circuit 200. Immediately after turning on the switch 55 for the first time, the measuring unit 62 measures the voltage across the judgment circuit 200 and sends the result (first time) to the comparison unit 64. Next, a constant current is supplied again to the same judgment circuit 200 after a predetermined time (for example, 10 seconds later) from the first measurement, and the measurement unit 62 is connected to both ends of the judgment circuit 200. The voltage is measured, and the result (second time) is sent to the comparison unit 64.

The comparison unit 64, which receives the results of two voltage measurements at both ends, sends a result signal to the determination unit 66 to determine whether the difference between the two measured voltages is within a pre-recorded voltage difference range. When the difference between the voltages between both ends is within a predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product. Conversely, when the difference between the voltages between both ends is outside the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product. It is determined that the target discharge lamp 110 is not a genuine product. Additionally, it may be determined whether the product is a genuine product by measuring the voltage at both ends only at the second measurement timing described above. In this case, whether the product is a genuine product is determined based on whether the measured value of the voltage at both ends is within a predetermined voltage range.

Used goods are judged as follows. That is, the used-use judgment control unit 68 turns on the used-use judgment switch 78, and supplies a constant current from the used-use judgment constant current power supply 76 to the judgment circuit 200. Immediately after the second-hand judgment switch 78 is turned on for the first time, the second-hand judgment measuring unit 70 measures the voltage at both ends of the judgment circuit 200, and the result (1st time) is sent to the second-hand judgment comparison unit. Send to (71). Next, after a predetermined time (for example, 10 seconds later) from the first measurement, a constant current is supplied again to the same judgment circuit 200, and the measurement unit 70 for used judgment determines the judgment circuit 200. ) is measured, and the result (second time) is sent to the comparison unit 71 for used judgment.

The comparison unit 71 for used judgment, which receives the results of two voltage measurements at both ends, sends a result signal to the used judgment unit 72 to determine whether the difference between the two measured voltages is within a pre-recorded voltage difference range. When the difference between the voltages between both ends is within a predetermined voltage range, the used product determination unit 72 determines that the discharge lamp 110 to be inspected is a used product. Conversely, when the difference between the voltages between both ends is outside the predetermined voltage range, the used product determination unit 72 determines that the discharge lamp 110 to be inspected is new. The reason for this is the same as that explained when determining a genuine product in Example 1.

When the light source device 100 is a new, genuine product, the fuse 220 in the decision circuit 200 is connected in parallel with the RC parallel circuit 210 as described above, so the The voltage at both ends is almost zero no matter how many times it is measured. As a result, the difference between the first and second measured voltage values is outside the predetermined voltage range (almost the same = difference is zero), so the judgment circuit 200 is substantially composed of only the RC parallel circuit 210. Used products can be determined in the used product determination measuring unit 70. Additionally, it is possible to determine whether a product is new or used by measuring the voltage at both ends only at the second measurement timing described above. In this case, whether the measured value of the voltage at both ends is within a predetermined voltage range (almost zero) determines whether the product is new or used.

(Variation 2)

The decision circuit 200 of the light source device 100 in the above-described embodiment was composed of an RC parallel circuit 210 and a fuse 220, but as shown in FIG. 8, instead of the fuse 220, a diode was used. 230 may be connected in series to the RC parallel circuit 210.

In this case, the determination of the regular product of the light source device 100 is the same as in Example 1 (however, note that the current flowing from the constant current power supply 56 to the judgment circuit 200 is direct current in the forward direction of the diode 230). Therefore, the description is omitted by referring to the procedure for determining a regular product in Example 1.

Next, in this modification 2, a reverse voltage application unit 80 is used instead of the fuse blowing operation unit 67 in Embodiment 1. This reverse voltage application unit 80 has the function of applying a reverse voltage (direct current) to the diode 230 (determination circuit 200) at a level that causes damage to the diode 230. After completing the determination of the light source device 100 as a genuine product, the reverse voltage application unit 80 is operated to damage the diode 230 by the reverse voltage. As a result, the diode 230 causes a short circuit internally and loses its function, and the judgment circuit 200 becomes the same as consisting of only the RC parallel circuit 210.

In this way, when the light source device 100 is a regular product, the judgment circuit 200 after the reverse voltage application unit 80 operates is the same as that composed only of the RC parallel circuit 210, so that the The used product determination of the light source device 100 is performed by basically the same method as described in Modification Example 1 above. In addition, the direct current constant current supplied to the judgment circuit 200 from the constant current power source 76 for judgment must flow in the reverse direction of the diode 230 in the normal case.

(Variation 3)

Additionally, as shown in FIG. 9, the diode 230 may be connected in parallel with the RC parallel circuit 210. In this case, the determination of the regular product of the light source device 100 is the same as in Example 1 (however, note that the current flowing from the constant current power supply 56 to the judgment circuit 200 is a direct current in the reverse direction of the diode 230). At one point, the description is omitted by citing the procedure for determining a genuine product in Example 1.

After confirming that the light source device 100 is a genuine product, a large reverse voltage (direct current) is applied to the diode 230 by the reverse voltage application unit 80, causing a short circuit inside the diode 230 and its function is lost. As a result, the judgment circuit 200 becomes short-circuited.

Then, the used-use judgment control unit 68 in the judgment device 57 turns on the used-use judgment switch 78 and supplies a constant current from the used-use judgment constant current power supply 76 to the judgment circuit 200. (However, note that the current flowing from the constant current power source 76 for use judgment to the judgment circuit 200 is a direct current in the reverse direction of the diode 230). Immediately after the second-hand judgment switch 78 is turned on, the second-hand judgment measurement unit 70 measures the voltage across the judgment circuit 200 and sends the result to the second-hand judgment unit 72.

The used determination unit 72 determines whether the discharge lamp 110 is a new product or a used product based on whether the measured voltage is within a voltage range of a predetermined upper and lower limit value. In the case of this embodiment, when the voltage at both ends measured by the measuring unit 70 for used judgment is within the voltage range of a predetermined upper and lower limit value, the used judging unit 72 determines that the discharge lamp 110 is new. Conversely, if the voltage at both ends measured by the used product determination measuring unit 70 is outside the voltage range of the predetermined upper and lower limit values, the used product determining unit 72 determines that the discharge lamp 110 is a used product.

When the light source device 100 is a genuine product, as described above, the diode 230 in the determination circuit 200 is already short-circuited by the reverse voltage application unit 80, so the determination circuit 200 ) is in a short circuit (resistance value is quite small). For this reason, in the case of used goods, the voltage at both ends of the judgment circuit 200 is 1 V or less. If the light source device 100 is new, the diode 230 has not lost its function and current does not flow in the reverse direction, so current flows only through the RC parallel circuit 210. That is, since the determination circuit 200 is in the same state only as the RC parallel circuit 210, the voltage across both ends of the determination circuit 200 becomes greater than 1V (for example, 2.0V to 8.5V). Thereby, it is possible to determine whether the light source device 100 is used.

(Variation Example 4)

In the above-described embodiment and modification, the judgment circuit 200 is accommodated in the reflector container 151, but the installation position of the judgment circuit 200 is not limited to this, and is, for example, in the reflector container 151. It may be installed on the outer side (FIG. 10) or on the outside (back side) of the reflector 150 (FIG. 11).

The embodiment disclosed this time should be considered illustrative in all respects and not restrictive. The scope of the present invention is indicated by the claims rather than the above description, and is intended to include all changes within the meaning and scope equivalent to the claims.

10: exposure machine 12: integrator
14: Concave mirror 16: Irradiation surface
50: exposure device 52: frame
54: lighting circuit 55: switch
56: constant current power supply 57: judgment device
58: concave portion 60: control portion
62: measurement unit 64: comparison unit
66: Determination unit 67: Fuse disconnection operation unit
68: Control unit for used judgment 70: Measurement unit for used judgment
71: Comparison unit for used judgment 72: Used judgment unit
76: Constant current power supply for used judgment 78: Switch for used judgment
80: reverse voltage application unit 100: light source device
110: discharge lamp 112: light emitting tube part
114: seal part 116: internal space
118: foil 120: electrode
122: lead rod 124: mercury
150: reflector 151: reflector container
152: reflective surface 154: opening
155: bottom neck 156: seal insertion installation hole
170: Insulating base 172: Reflector insertion hole
174: Inner space 176: Power cable insertion hole
200: judgment circuit 210: RC parallel circuit
212: resistor 214: condenser
220: Fuse 230: Diode

Claims (8)

A discharge lamp as a light source,
circuit for judgment, and
A light source device comprising a reflector container to which the discharge lamp and the determination circuit are attached,
The determination circuit has an RC parallel circuit for determining whether the discharge lamp is a genuine product, and a fuse connected in series to the RC parallel circuit for determining whether the discharge lamp is a new product,
Whether the discharge lamp is a genuine product is determined based on the voltage measured at both ends of the judgment circuit by flowing a constant direct current through the RC parallel circuit,
Whether the discharge lamp is new is determined based on the voltage measured at both ends of the judgment circuit,
The light source device wherein the fuse is not blown when the constant current used to determine whether it is a genuine product is passed, but is blown when a current larger than the constant current is passed. A discharge lamp as a light source,
circuit for judgment, and
A light source device comprising a reflector container to which the discharge lamp and the determination circuit are attached,
The determination circuit has an RC parallel circuit for determining whether the discharge lamp is a genuine product, and a fuse connected in parallel to the RC parallel circuit for determining whether the discharge lamp is a new product,
Whether the discharge lamp is a genuine product is determined based on the voltage measured at both ends of the judgment circuit by flowing a constant direct current through the RC parallel circuit,
Whether the discharge lamp is new is determined based on the voltage measured at both ends of the determination circuit,
The light source device wherein the fuse is not blown when the constant current used to determine whether it is a genuine product is passed, but is blown when a current larger than the constant current is passed. A discharge lamp as a light source,
circuit for judgment, and
A light source device comprising a reflector container to which the discharge lamp and the determination circuit are attached,
The determination circuit has an RC parallel circuit for determining whether the discharge lamp is a genuine product, and a diode connected in series to the RC parallel circuit for determining whether the discharge lamp is a new product,
Whether or not the discharge lamp is a genuine product is determined based on the voltage measured at both ends of the determination circuit by flowing a forward direct current constant through the RC parallel circuit,
Whether the discharge lamp is new is determined based on the voltage measured at both ends of the determination circuit,
A light source device in which the diode is not damaged when the forward constant current flows, but is damaged when the reverse current flows. A discharge lamp as a light source,
circuit for judgment, and
A light source device comprising a reflector container to which the discharge lamp and the determination circuit are attached,
The determination circuit has an RC parallel circuit for determining whether the discharge lamp is a genuine product, and a diode connected in parallel with the RC parallel circuit to determine whether the discharge lamp is a new product,
Whether or not the discharge lamp is a genuine product is determined based on the measured value of the voltage measured at both ends of the judgment circuit by flowing a forward direct current constant through the RC parallel circuit,
Whether the discharge lamp is new is determined based on the voltage measured at both ends of the determination circuit,
A light source device in which the diode is not damaged when the forward constant current flows, but is damaged when the reverse current flows. The method according to any one of claims 1 to 4,
A light source device, wherein the judgment circuit is accommodated in the reflector container. The method of claim 1 or 2,
A light source device, wherein the fuse is a thermal fuse. The light source device according to claim 1,
A frame for mounting the light source device toward the object to be irradiated,
A constant current power supply that supplies current to the judgment circuit,
A switch that turns on and off the current from the constant current power supply,
a control unit that turns the switch on and off to energize the judgment circuit for a predetermined period of time;
A measuring unit that measures the voltage at both ends of the judgment circuit while energized at least twice,
A comparison unit that compares the difference between the voltage across both ends during the first measurement and the voltage between both ends during the second measurement and a voltage range of a predetermined upper and lower limit value for determining whether discharge, etc. is positive or negative,
Upon receiving a signal from the comparison unit, if the difference between the voltages between both ends is within a predetermined voltage range, it is determined that the discharge lamp to be inspected is a genuine product. If the difference between the voltages between both ends is outside the predetermined voltage range, it is determined that the discharge lamp to be inspected is not a genuine product. The tribunal that decides,
After determining whether the discharge lamp is a genuine product,
A constant current power supply for used judgment that supplies current to the judgment circuit,
A used judgment switch that turns on and off the current from the used judgment constant current power supply,
a used judgment control unit that turns on/off the used judgment switch and energizes the judgment circuit;
A measurement unit for use judgment that measures the voltage at both ends of the judgment circuit while energized, and
An exposure apparatus comprising a used judgment unit that determines whether the discharge lamp is a new product or a used product based on whether the measured voltage across both ends is within a voltage range of a predetermined upper and lower limit value. Applying electricity to the judgment circuit of the light source device according to claim 1 for a predetermined period of time,
Measure the voltage at both ends of the judgment circuit while energized at least twice,
By comparing the difference between the voltage across both ends at the time of the first measurement and the voltage at both ends at the time of the second measurement, and the voltage range of predetermined upper and lower limits for determining whether a discharge, etc. is positive or negative,
If the difference between the voltages between both ends is within a predetermined voltage range, it is determined that the discharge lamp subject to determination is a genuine product. If the difference between the voltages of both ends is outside the predetermined voltage range, it is determined that the discharge lamp subject to determination is not a genuine product,
Additionally, after determining whether the discharge lamp is a genuine product,
Applying electricity to the judgment circuit,
By measuring the voltage at both ends of the judgment circuit while energized,
If the measured voltage across both ends is within the voltage range of predetermined upper and lower limits, it is determined that the discharge light subject to judgment is new, and if it is outside the voltage range of predetermined upper and lower limits, the discharge light is determined to be used. Determination method of light source device.