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KR102582762B9 - Method for processing substrate and method for manufacturing organic light-emitting device using the same - Google Patents

Method for processing substrate and method for manufacturing organic light-emitting device using the same

Info

Publication number
KR102582762B9
KR102582762B9 KR1020180024458A KR20180024458A KR102582762B9 KR 102582762 B9 KR102582762 B9 KR 102582762B9 KR 1020180024458 A KR1020180024458 A KR 1020180024458A KR 20180024458 A KR20180024458 A KR 20180024458A KR 102582762 B9 KR102582762 B9 KR 102582762B9
Authority
KR
South Korea
Prior art keywords
emitting device
organic light
same
processing substrate
manufacturing organic
Prior art date
Application number
KR1020180024458A
Other languages
Korean (ko)
Other versions
KR102582762B1 (en
KR20180124705A (en
Inventor
신용우
김기덕
김도형
황철주
Original Assignee
주성엔지니어링(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주성엔지니어링(주) filed Critical 주성엔지니어링(주)
Publication of KR20180124705A publication Critical patent/KR20180124705A/en
Priority to KR1020230125891A priority Critical patent/KR20230142395A/en
Application granted granted Critical
Publication of KR102582762B1 publication Critical patent/KR102582762B1/en
Publication of KR102582762B9 publication Critical patent/KR102582762B9/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/87Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065Plasma etching; Reactive-ion etching
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/50Forming devices by joining two substrates together, e.g. lamination techniques
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020180024458A 2017-05-11 2018-02-28 Substrate processing method and method of manufacturing organic light emitting device using the same Active KR102582762B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020230125891A KR20230142395A (en) 2017-05-11 2023-09-20 Substrate processing method and method of manufacturing organic light emitting device using the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20170058605 2017-05-11
KR1020170058605 2017-05-11

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020230125891A Division KR20230142395A (en) 2017-05-11 2023-09-20 Substrate processing method and method of manufacturing organic light emitting device using the same

Publications (3)

Publication Number Publication Date
KR20180124705A KR20180124705A (en) 2018-11-21
KR102582762B1 KR102582762B1 (en) 2023-09-25
KR102582762B9 true KR102582762B9 (en) 2024-12-20

Family

ID=64602405

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020180024458A Active KR102582762B1 (en) 2017-05-11 2018-02-28 Substrate processing method and method of manufacturing organic light emitting device using the same
KR1020230125891A Ceased KR20230142395A (en) 2017-05-11 2023-09-20 Substrate processing method and method of manufacturing organic light emitting device using the same

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020230125891A Ceased KR20230142395A (en) 2017-05-11 2023-09-20 Substrate processing method and method of manufacturing organic light emitting device using the same

Country Status (1)

Country Link
KR (2) KR102582762B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113675356A (en) * 2020-05-14 2021-11-19 Ncd有限公司 Method for forming a touch screen panel on a thin film package
KR102183409B1 (en) * 2020-05-18 2020-11-26 주식회사 엔씨디 A method for making the touch screen panel on the thin film encapsulation of oled
KR102620048B1 (en) 2020-09-16 2024-01-02 삼성디스플레이 주식회사 Etching device and method of manufacturing display device using same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100780944B1 (en) * 2005-10-12 2007-12-03 삼성전자주식회사 Carbon-containing film etching method and manufacturing method of semiconductor device using same
JP4543336B2 (en) * 2007-05-01 2010-09-15 ソニー株式会社 Manufacturing method of display device
KR101364577B1 (en) * 2007-08-17 2014-02-26 위순임 Multi output remote plasma generator and plasma processing system having the same
KR101570471B1 (en) * 2008-09-18 2015-11-23 삼성디스플레이 주식회사 Organic light emitting display device and manufacturing method thereof
JP6059657B2 (en) * 2011-07-13 2017-01-11 東京エレクトロン株式会社 Semiconductor manufacturing system and method
KR20140137172A (en) * 2013-05-22 2014-12-02 최대규 Remote plasma system having self-management function and self management method of the same
KR102351003B1 (en) * 2015-01-30 2022-01-13 엘지디스플레이 주식회사 Organic light emitting display and method for manufacturing the same
JP6537473B2 (en) * 2015-10-06 2019-07-03 東京エレクトロン株式会社 Method of processing an object

Also Published As

Publication number Publication date
KR102582762B1 (en) 2023-09-25
KR20180124705A (en) 2018-11-21
KR20230142395A (en) 2023-10-11

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