KR102582762B9 - Method for processing substrate and method for manufacturing organic light-emitting device using the same - Google Patents
Method for processing substrate and method for manufacturing organic light-emitting device using the sameInfo
- Publication number
- KR102582762B9 KR102582762B9 KR1020180024458A KR20180024458A KR102582762B9 KR 102582762 B9 KR102582762 B9 KR 102582762B9 KR 1020180024458 A KR1020180024458 A KR 1020180024458A KR 20180024458 A KR20180024458 A KR 20180024458A KR 102582762 B9 KR102582762 B9 KR 102582762B9
- Authority
- KR
- South Korea
- Prior art keywords
- emitting device
- organic light
- same
- processing substrate
- manufacturing organic
- Prior art date
Links
- 238000000034 method Methods 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020230125891A KR20230142395A (en) | 2017-05-11 | 2023-09-20 | Substrate processing method and method of manufacturing organic light emitting device using the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20170058605 | 2017-05-11 | ||
KR1020170058605 | 2017-05-11 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020230125891A Division KR20230142395A (en) | 2017-05-11 | 2023-09-20 | Substrate processing method and method of manufacturing organic light emitting device using the same |
Publications (3)
Publication Number | Publication Date |
---|---|
KR20180124705A KR20180124705A (en) | 2018-11-21 |
KR102582762B1 KR102582762B1 (en) | 2023-09-25 |
KR102582762B9 true KR102582762B9 (en) | 2024-12-20 |
Family
ID=64602405
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020180024458A Active KR102582762B1 (en) | 2017-05-11 | 2018-02-28 | Substrate processing method and method of manufacturing organic light emitting device using the same |
KR1020230125891A Ceased KR20230142395A (en) | 2017-05-11 | 2023-09-20 | Substrate processing method and method of manufacturing organic light emitting device using the same |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020230125891A Ceased KR20230142395A (en) | 2017-05-11 | 2023-09-20 | Substrate processing method and method of manufacturing organic light emitting device using the same |
Country Status (1)
Country | Link |
---|---|
KR (2) | KR102582762B1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113675356A (en) * | 2020-05-14 | 2021-11-19 | Ncd有限公司 | Method for forming a touch screen panel on a thin film package |
KR102183409B1 (en) * | 2020-05-18 | 2020-11-26 | 주식회사 엔씨디 | A method for making the touch screen panel on the thin film encapsulation of oled |
KR102620048B1 (en) | 2020-09-16 | 2024-01-02 | 삼성디스플레이 주식회사 | Etching device and method of manufacturing display device using same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100780944B1 (en) * | 2005-10-12 | 2007-12-03 | 삼성전자주식회사 | Carbon-containing film etching method and manufacturing method of semiconductor device using same |
JP4543336B2 (en) * | 2007-05-01 | 2010-09-15 | ソニー株式会社 | Manufacturing method of display device |
KR101364577B1 (en) * | 2007-08-17 | 2014-02-26 | 위순임 | Multi output remote plasma generator and plasma processing system having the same |
KR101570471B1 (en) * | 2008-09-18 | 2015-11-23 | 삼성디스플레이 주식회사 | Organic light emitting display device and manufacturing method thereof |
JP6059657B2 (en) * | 2011-07-13 | 2017-01-11 | 東京エレクトロン株式会社 | Semiconductor manufacturing system and method |
KR20140137172A (en) * | 2013-05-22 | 2014-12-02 | 최대규 | Remote plasma system having self-management function and self management method of the same |
KR102351003B1 (en) * | 2015-01-30 | 2022-01-13 | 엘지디스플레이 주식회사 | Organic light emitting display and method for manufacturing the same |
JP6537473B2 (en) * | 2015-10-06 | 2019-07-03 | 東京エレクトロン株式会社 | Method of processing an object |
-
2018
- 2018-02-28 KR KR1020180024458A patent/KR102582762B1/en active Active
-
2023
- 2023-09-20 KR KR1020230125891A patent/KR20230142395A/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
KR102582762B1 (en) | 2023-09-25 |
KR20180124705A (en) | 2018-11-21 |
KR20230142395A (en) | 2023-10-11 |
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