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KR102464089B9 - 그래핀의 품질 평가 방법 - Google Patents

그래핀의 품질 평가 방법

Info

Publication number
KR102464089B9
KR102464089B9 KR1020200185690A KR20200185690A KR102464089B9 KR 102464089 B9 KR102464089 B9 KR 102464089B9 KR 1020200185690 A KR1020200185690 A KR 1020200185690A KR 20200185690 A KR20200185690 A KR 20200185690A KR 102464089 B9 KR102464089 B9 KR 102464089B9
Authority
KR
South Korea
Prior art keywords
graphene
evaluate
quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020200185690A
Other languages
English (en)
Other versions
KR102464089B1 (ko
KR20220094456A (ko
Inventor
홍병희
김동진
우윤성
Original Assignee
서울대학교 산학협력단
그래핀스퀘어 주식회사
단국대학교 천안캠퍼스 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 서울대학교 산학협력단, 그래핀스퀘어 주식회사, 단국대학교 천안캠퍼스 산학협력단 filed Critical 서울대학교 산학협력단
Priority to KR1020200185690A priority Critical patent/KR102464089B1/ko
Priority to JP2021122473A priority patent/JP7698824B2/ja
Priority to US17/501,668 priority patent/US11933955B2/en
Publication of KR20220094456A publication Critical patent/KR20220094456A/ko
Application granted granted Critical
Publication of KR102464089B1 publication Critical patent/KR102464089B1/ko
Publication of KR102464089B9 publication Critical patent/KR102464089B9/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G01N2021/8433—Comparing coated/uncoated parts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Ophthalmology & Optometry (AREA)
  • Surgery (AREA)
  • Mathematical Physics (AREA)
  • Textile Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020200185690A 2020-12-29 2020-12-29 그래핀의 품질 평가 방법 Active KR102464089B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020200185690A KR102464089B1 (ko) 2020-12-29 2020-12-29 그래핀의 품질 평가 방법
JP2021122473A JP7698824B2 (ja) 2020-12-29 2021-07-27 グラフェンの品質評価方法
US17/501,668 US11933955B2 (en) 2020-12-29 2021-10-14 Method for evaluating quality of graphene

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200185690A KR102464089B1 (ko) 2020-12-29 2020-12-29 그래핀의 품질 평가 방법

Publications (3)

Publication Number Publication Date
KR20220094456A KR20220094456A (ko) 2022-07-06
KR102464089B1 KR102464089B1 (ko) 2022-11-09
KR102464089B9 true KR102464089B9 (ko) 2023-10-12

Family

ID=82117044

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200185690A Active KR102464089B1 (ko) 2020-12-29 2020-12-29 그래핀의 품질 평가 방법

Country Status (3)

Country Link
US (1) US11933955B2 (ko)
JP (1) JP7698824B2 (ko)
KR (1) KR102464089B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102464089B1 (ko) 2020-12-29 2022-11-09 서울대학교 산학협력단 그래핀의 품질 평가 방법
CN118528473B (zh) * 2024-07-24 2024-10-29 厦门麦克斯韦烯墨新材料有限公司 一种磁性石墨烯导热膜的制备及检测方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH073508B2 (ja) * 1989-02-22 1995-01-18 浜松ホトニクス株式会社 コンフオーカルスキヤンニング顕微鏡
JPH073508A (ja) 1993-05-18 1995-01-06 Ishikawa Giken Gomme Kk 冷却乾燥装置を有する人体被着品
JPH07333510A (ja) * 1994-06-02 1995-12-22 Nikon Corp レーザ走査顕微鏡装置
JPH08136815A (ja) * 1994-11-11 1996-05-31 Olympus Optical Co Ltd 共焦点走査型光学顕微鏡
JP3358648B2 (ja) * 1996-08-16 2002-12-24 横河電機株式会社 共焦点用光スキャナ
JP5641484B2 (ja) * 2009-08-31 2014-12-17 国立大学法人九州大学 グラフェン薄膜とその製造方法
US9515288B2 (en) * 2012-06-19 2016-12-06 Koninklijke Philips N.V. Organic electroluminescent device
US9464990B2 (en) * 2012-07-06 2016-10-11 The Regents Of The University Of California Centimeter-scale high resolution metrology of entire CVD grown graphene sheets
KR101377166B1 (ko) * 2012-08-20 2014-03-26 에스 알 씨 주식회사 근적외선을 이용한 투과성 박막 검사방법 및 검사장치
KR102083960B1 (ko) * 2012-08-30 2020-03-03 엘지전자 주식회사 그래핀의 제조 방법 및 그 그래핀과 그 제조 장치
WO2016171615A1 (en) * 2015-04-20 2016-10-27 Ngee Ann Polytechnic Graphene-based membrane and method of producing the same
KR101751271B1 (ko) 2015-06-16 2017-06-29 광주과학기술원 다층 그래핀의 제조방법
FR3045826A1 (fr) * 2015-12-17 2017-06-23 Commissariat Energie Atomique Supports amplificateurs de contraste utilisant un materiau bidimensionnel
KR102170863B1 (ko) * 2016-03-31 2020-10-28 한국전자기술연구원 그래핀 비파괴 검사방법
KR102017251B1 (ko) * 2017-10-26 2019-09-03 국일그래핀 주식회사 그래핀 박막의 무전사 제조방법
KR102464089B1 (ko) 2020-12-29 2022-11-09 서울대학교 산학협력단 그래핀의 품질 평가 방법

Also Published As

Publication number Publication date
US11933955B2 (en) 2024-03-19
US20220206276A1 (en) 2022-06-30
JP2022104781A (ja) 2022-07-11
KR102464089B1 (ko) 2022-11-09
KR20220094456A (ko) 2022-07-06
JP7698824B2 (ja) 2025-06-26

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