KR102337696B1 - touch sensor - Google Patents

Abstract

It includes a substrate and one or more electrode cells formed on the substrate and composed of a first electrode pattern and a second electrode pattern, wherein the first electrode pattern includes a first connection line and one or more first electrode lines connected to the first connection line including, wherein the second electrode pattern includes a second connecting line and one or more second electrode lines connected to the second connecting line, wherein at least one of the first and second electrode lines is disposed along a first direction, Disclosed is a touch sensor in which the first electrode line and the second electrode line have the same separation distance in a second direction and are alternately and repeatedly arranged.

Description

touch sensor

The present invention relates to a capacitive touch sensor, and more particularly, a touch sensor or pressure that is composed of a single layer and recognizes a touch position or intensity of pressure by a change in capacitance generated by touch or pressure. It is about the touch sensor.

A signal detection method of a touch sensor performing a touch recognition function includes a capacitive method, a resistive film method, an electromagnetic induction method, an ultrasonic method, an infrared method, and the like. The capacitive method is one of the most used technologies in the market, and detects a contact position by detecting a change in the capacitance of an electrode generated by a touch of a finger or the like.

As smartphones and IPTVs are popularized, various demands for touch input are gradually occurring. In particular, pressure touch or force touch has recently been spotlighted as a technology capable of sensing pressure of a finger or the like and distinguishing and recognizing the intensity. The capacitive touch sensor can recognize the position of the touch and the intensity of the pressure by measuring the amount of change in the capacitance generated by the change in the distance between the electrodes by the pressure.

An electrode for sensing a touch is generally used to form a pattern, and the positions of the X and Y coordinates are respectively recognized using two patterns. In this case, when the two patterns are formed on the same layer, there is a problem in that the change in capacitance caused by touch or pressure is not immediately restored, so that the operation speed and accuracy of the touch sensor are deteriorated.

An object of the present invention is to solve the above problems, and an object of the present invention is to provide a touch sensor in which a capacitance, that is, a capacitance value, is immediately restored after sensing, thereby improving speed and accuracy of operation.

A touch sensor according to an embodiment of the present invention for achieving the above object includes a substrate; and one or more electrode cells formed on the substrate and configured with a first electrode pattern and a second electrode pattern.

The first electrode pattern may include a first connecting line and one or more first electrode lines connected to the first connecting line, and the second electrode pattern may include a second connecting line and one or more second electrode lines connected to the second connecting line. have.

At least one of the first electrode line and the second electrode line may be disposed along a first direction, and the first electrode line and the second electrode line may have the same spacing in the second direction and are alternately and repeatedly disposed.

The first connection line and the second connection line may be disposed along the second direction, and the first electrode line and the second electrode line may be disposed between the first connection line and the second connection line.

The separation distance may be 50 μm or more and 500 μm or less.

The width of the first electrode line or the second electrode line may be 20 μm or more and 500 μm or less.

It is formed between the substrate and the electrode cell, and may include an elastic substrate formed of polydimethylsiloxane (PDMS).

It is formed between the substrate and the electrode cell, and includes an elastic substrate formed of polydimethylsiloxane (PDMS), and the elastic modulus of the elastic substrate may be 0.5 MPa or more and less than 3 MPa.

A pressure touch sensor according to an embodiment of the present invention for achieving the above object is a substrate, one or more electrode cells formed on the substrate, a first electrode pattern and a second electrode pattern, and the substrate and the electrode It is formed between the cells, and may include an elastic substrate formed of polydimethylsiloxane (PDMS).

The first electrode pattern may include a first connecting line and one or more first electrode lines connected to the first connecting line, and the second electrode pattern may include a second connecting line and one or more second electrode lines connected to the second connecting line. have.

At least one of the first electrode line and the second electrode line may be disposed along a first direction, and the first electrode line and the second electrode line may have the same spacing in the second direction and are alternately and repeatedly disposed.

The separation distance may be 50 μm or more and 500 μm or less.

The width of the first electrode line or the second electrode line may be 20 μm or more and 500 μm or less.

The elastic modulus of the elastic substrate may be 0.5 MPa or more and less than 3 MPa.

The touch sensor according to an embodiment has the effect of improving the speed and accuracy of the operation of the touch sensor by limiting the values of the line and the space to an appropriate range in the formation of the electrode wiring.

In order to more fully understand the drawings recited in the Detailed Description, a detailed description of each drawing is provided.
1 shows the appearance of an electrode cell according to an embodiment.
2 is a side view of a touch sensor according to an exemplary embodiment.
3 is a side view illustrating a pressure touch sensor according to an exemplary embodiment.
4 is a view showing a top down view of the touch sensor according to an embodiment.
5 to 6 are graphs showing results of an experiment according to an embodiment.
7 to 8 are modified examples of the electrode cell according to the present invention.

Specific structural or functional descriptions of the embodiments according to the concept of the present invention disclosed in this specification are only exemplified for the purpose of explaining the embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention are It may be implemented in various forms and is not limited to the embodiments described herein.

Since the embodiments according to the concept of the present invention may have various changes and may have various forms, the embodiments will be illustrated in the drawings and described in detail herein. However, this is not intended to limit the embodiments according to the concept of the present invention to specific disclosed forms, and includes all modifications, equivalents, or substitutes included in the spirit and scope of the present invention.

Terms such as first or second may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one element from another, for example, without departing from the scope of the inventive concept, a first element may be termed a second element and similarly a second element A component may also be referred to as a first component.

When a component is referred to as being “connected” or “connected” to another component, it is understood that it may be directly connected or connected to the other component, but other components may exist in between. it should be On the other hand, when it is said that a certain element is "directly connected" or "directly connected" to another element, it should be understood that the other element does not exist in the middle. Other expressions describing the relationship between components, such as "between" and "immediately between" or "neighboring to" and "directly adjacent to", etc., should be interpreted similarly.

The terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In this specification, terms such as "comprise" or "have" are intended to designate that a feature, number, step, operation, component, part, or combination thereof described herein exists, but one or more other features It should be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present specification. does not

1 shows a state of an electrode cell according to an embodiment. Hereinafter, the structure of the electrode cell will be described with reference to FIG. 1 .

The electrode cell 100 may include a first electrode pattern 110 and a second electrode pattern 120 . The first electrode pattern 110 and the second electrode pattern 120 may be connected to the same electrode, or may be respectively connected to different electrodes. The first electrode pattern 110 may include a first connection line 110a and one or more first electrode lines 110b. The first electrode pattern 110 may be formed of a plurality of first electrode lines 110b, and all of the first electrode lines 110b may be connected to the first connecting lines 110a. The second electrode pattern 120 may include a second connection line 120a and one or more second electrode lines 120b. Similarly, the second electrode pattern 120 may include a plurality of second electrode lines 120b, and all of the second electrode lines 120b may be connected to the second connecting line 120a.

The first electrode pattern 110 and the second electrode pattern 120 may be disposed as follows. First, looking at the arrangement of the electrode lines, the first electrode line 110b and the second electrode line 120b may be disposed along the first direction. In this case, the first electrode line 110b or the second electrode line 120b may be parallel. However, they do not necessarily have to be parallel, and an electrode line within the angle may be included in the first direction by taking the first direction more broadly. In FIG. 1 , the X-axis can be viewed in a first direction in a plane. In the second direction, the first electrode line 110b and the second electrode line 120b may have the same separation distance and may be alternately and repeatedly disposed. The first direction and the second direction may be made orthogonal to each other. In this case, by making the electrode cell 100 in a rectangular or square shape, the arrangement of the electrode cell 100 may be convenient when manufacturing the touch sensor. In FIG. 1 , the Y-axis can be seen in the second direction in a plan view. Similarly to the first direction, the second direction may also have a wider range angle so that all within the angle may be included in the second direction.

Next, the arrangement of the connecting lines and the connection between the connecting lines and the electrode lines may be as follows. The first connecting line 110a and the second connecting line 120a are disposed along the second direction, and between the first connecting line 110a and the second connecting line 120a, the first electrode line 110b and the second electrode line 120b. This can be arranged. One end of the first electrode line 110b may be connected to the first connecting line 110a and the other end may be adjacent to the second connecting line 120a but not in contact with each other. In this case, the distance d3 between the non-contacting and the gaps may be the same as the spacing d2 between the first electrode line 110b and the second electrode line 120b, or may be unequal. For example, when d2 is 50 um, d3 may be 30 um. Similarly to the first electrode line 110b, the second electrode line 120b may be arranged such that one end is connected to the second connecting line 120a and the other end is adjacent to the first connecting line 110a but not in contact with each other. . Also at this time, the same principle as d3 can be applied to the distance between the gaps that are not in contact.

The separation distance d2 between the first electrode line 110b and the adjacent second electrode line 120b is referred to as a space. The width d1 of the first electrode line 110b or the second electrode line 120b is referred to as a line.

The space d2 may be 50 um or more and 500 um or less. As the value of the space d2 is narrower, the initial capacitance value increases, and it takes a long time until the initial capacitance value is restored to the initial capacitance value after sensing, so that a malfunction may occur in the touch sensor. Therefore, when the space d2 is less than 50 μm, a malfunction may occur in the touch sensor.

As the initial capacitance value is small, the rate of change of the capacitance value itself is also very small, so that the possibility of poor recognition may increase. When the space d2 exceeds 500 μm, the initial capacitance value becomes less than 0.3 pF, and the possibility of a recognition failure may increase. Accordingly, when the space d2 is greater than or equal to 50 μm and less than or equal to 500 μm, the restoring force of the capacitance may be excellently maintained to the extent that a detection failure of the touch sensor does not occur.

The line d1 may be 20 um or more and 500 um or less. When the value of the line d1 exceeds 500 μm, a defect in visibility may occur. If only visibility is considered, as the value of the line d1 decreases, the visibility problem does not occur. However, when the value of the line d1 is less than 20 μm, the restoring force of the capacitance may be reduced. Accordingly, to the extent that the value of the line d1 is greater than or equal to 20 μm and there is no problem in visibility up to less than or equal to 500 μm, the restoring force of the capacitance may be excellently maintained.

In more detail, the rate of change of the capacitance value according to the values of the space d2 and the line d1 will be described through the experimental results along with the description of the graphs of FIGS. 5 and 6 below.

2 is a side view of a touch sensor according to an exemplary embodiment. One or more electrode cells 100 are formed on the substrate 300 . Although FIG. 2 shows that the electrode cells 100 are arranged only in 4 columns or 4 rows, the number of electrode cells 100 may vary according to the size of the screen of the actual touch sensor. For example, the number of electrode cells 100 entering the touch sensor may be hundreds or more.

3 is a diagram illustrating a pressure touch sensor capable of recognizing pressure according to an exemplary embodiment. An elastic substrate 200 may be included between the substrate 300 and the electrode cell 100 . The elastic substrate 200 may be formed of polydimethyl siloxane (PDMS). Polydimethylsiloxane (PDMS) is one of the silicone polymers, and when the elastic substrate 200 formed of PDMS is included in the touch sensor, the pressure touch sensor may be configured. A pressure touch sensor refers to a device capable of recognizing a touch position and pressure strength by measuring a change in capacitance generated by a change in a distance between electrodes by pressure, and is also called a pressure sensor or a force touch sensor. The touch sensor including the elastic substrate 200 may be manufactured as a pressure touch sensor, and a general touch sensor may also be manufactured including the elastic substrate 200 . Even in the case of manufacturing as a pressure touch sensor, the principles of the present invention for the pressure sensor may be applied as it is.

When a pressure such as a finger is applied to the touch sensor, the distance between the electrodes is changed by the elastic substrate 200 and thus the capacitance may be reduced. The elastic modulus of the elastic substrate 200 may be 0.5 MPa or more and less than 3 MPa. When the modulus of elasticity is less than 0.5 MPa, the hardness of the elastic base 200 may be hardened, and thus the amount of displacement may be reduced. In addition, there may be a problem that the restoration does not go well. On the other hand, when the modulus of elasticity is 3 MPa or more, the hardness of the elastic substrate 200 is weakened and the interval of the space d2 is narrowed, which may cause a problem that two adjacent electrode wires are attached to each other. In addition, the elastic modulus may vary according to the type of the cover covering the upper portion. For example, in the case of a film, since it should be harder than in the case of glass, the modulus of elasticity may be small.

4 illustrates a state of a touch sensor according to an embodiment. 4 is a view of the touch sensor looking down from the top of the substrate 300 . In the touch sensor of FIG. 4 , nine electrode cells 100 are disposed, but as described above, the actual touch sensor may have a different number of electrode cells depending on the size of the screen. For example, the number of electrode cells entering the touch sensor may be hundreds or more. The arrangement of the electrode cell 100 may vary depending on the shape of the screen or panel to be manufactured.

5 to 6 are graphs showing results of an experiment according to an embodiment.

First, for the experiment, a pressure touch sensor sample was prepared and performed. The sample was prepared by the following process. A manufacturing process will be described with reference to FIGS. 1, 3 and 4 . An elastic substrate 200 formed of PDMS having an elastic modulus of 1.72 MPa is formed on the experimental substrate 300 or a device, and a metal is deposited by sputtering. It is completed through a photo process according to the values of each line (d1) and space (d2) to be tested. And measure the capacitance value (Cm) according to touch or pressure.

의 도전봉으로 터치하였을 때의 커패시턴스 값의 변화량을 측정한 것이고, 표 2는 상기 터치 후에 200g의 추를 놓아 압력을 주었을 때의 커패시턴스 값의 변화량을 측정한 것이다. 표 1과 표 2의 즉시 변화율은 초기 커패시턴스 값과 터치나 압력 직후에 이를 인식하여 변화 후 커패시턴스 값의 변화된 비율을 의미하는 것이다. 즉시 변화율은 지나치게 낮을 경우 인식 불량 문제가 나타날 수 있다. 표 2의 복원 변화율은 초기 커패시턴스 값과 터치나 압력을 주고 30초 후에 커패시턴스 값의 변화된 비율을 의미하는 것이다. 복원 변화율이 20% 미만일 경우, 복원력이 허용되는 범주에 들어간다고 판단할 수 있다. 20% 미만 내에서 복원되지 않는 커패시턴스 값에 대해서는 내부적인 회로설계와 제어 시스템으로 즉시 복원과 같은 상태로 인식할 수 있도록 조절 또는 조정이 가능한 정도라 할 수 있기 때문이다. 복원 변화율이 클 경우 터치 센서의 오작동 가능성이 커질 수 있다. 예를 들어, 손가락을 터치하였다가 떼어낸 후에도 터치가 계속 되어 있다고 인식하는 오작동을 일으킬 수 있다. 표 2에서의 복원 변화율은 30초가 되기 전에 복원 변화율이 20% 미만이 될 경우, 30초까지 기다리지 않고 변화율을 측정한 것이다. 복원 변화율이 20% 이상인 경우는, 30초까지 기다렸음에도 복원 변화율이 20%를 초과한 경우의 복원 변화율의 수치를 나타낸 것이다. 도 5와 도 6은 표 1과 표 2의 실험 결과를 이용하여 그래프로 나타낸 것이다. 먼저 도 5은 라인(d1)과 스페이스(d2) 값이 동일한 경우로 30um, 50um, 60um, 100um, 150um, 200um 에서 커패시턴스의 값을 나타낸 것이다. 도 6은 라인(d1) 값은 30um로 고정된 상태에서 스페이스(d2) 값이 30um, 50um, 60 um, 100um, 200um, 300um, 400um, 500um일 때의 커패시턴스의 값을 나타낸 것이다. 도 5과 도 6의 결과로부터 커패시턴스의 복원율은 라인(d1) 값 보다 스페이스(d2) 값에 의해 영향을 많이 받는 것을 확인할 수 있다. 표 2를 살펴보면, 스페이스(d2) 값이 30um 일 경우는 라인(d1) 값과 관계 없이 모두 복원 변화율이 20% 이상으로 복원력이 허용되는 범주 안에 들어가지 않는다. 스페이스(d2) 값이 50um 일 때부터 복원 변화율 20% 미만으로 복원력이 허용되는 범주 안에 들어간다고 볼 수 있다. 즉, 스페이스(d2)는 50um 이상일 때에 커패시턴스 값의 즉시 복원이 가능하다고 볼 수 있다. Table 1 and Table 2 show the experimental results as a table. The experiment was made by arranging 9 electrode cells 100 in 3 rows and 3 columns as shown in FIG. 4 . Table 1 shows radius 4

The amount of change in the capacitance value when touched with a conductive rod of The instantaneous rate of change in Tables 1 and 2 means the changed rate of the initial capacitance value and the capacitance value after the change by recognizing it immediately after touch or pressure. If the instantaneous rate of change is too low, a problem of poor recognition may appear. The restoration change rate in Table 2 means the initial capacitance value and the changed ratio of the capacitance value 30 seconds after applying a touch or pressure. When the restoration change rate is less than 20%, it can be determined that the restoration force falls within the acceptable range. This is because, for the capacitance value that is not restored within 20%, it can be said that it is possible to adjust or adjust so that the internal circuit design and control system can immediately recognize the same state as restoration. If the restoration change rate is large, the possibility of malfunction of the touch sensor may increase. For example, it may cause a malfunction of recognizing that the touch continues even after the finger is touched and then removed. The restoration change rate in Table 2 is a measure of the change rate without waiting until 30 seconds when the restoration change rate is less than 20% before 30 seconds. When the restoration change rate is 20% or more, it indicates the value of the restoration change rate when the restoration change rate exceeds 20% even after waiting for 30 seconds. 5 and 6 are graphs using the experimental results of Tables 1 and 2. First, FIG. 5 shows capacitance values at 30 μm, 50 μm, 60 μm, 100 μm, 150 μm, and 200 μm in the case where the line d1 and the space d2 have the same value. 6 shows capacitance values when the space d2 values are 30um, 50um, 60um, 100um, 200um, 300um, 400um, and 500um in a state where the line d1 value is fixed to 30um. From the results of FIGS. 5 and 6 , it can be seen that the capacitance recovery rate is more affected by the space d2 value than the line d1 value. Looking at Table 2, when the space (d2) value is 30 μm, regardless of the line (d1) value, the restoration change rate is 20% or more, and it does not fall within the allowable range of restoration force. When the space (d2) value is 50 μm, the restoration change rate is less than 20%, so it can be seen that the restoration force falls within the allowable range. That is, it can be seen that the instantaneous restoration of the capacitance value is possible when the space d2 is 50 μm or more.

All the experimental results when the space (d2) value is 50 μm or more fall within the allowable range of the restoring force, but as described above, when the space (d2) exceeds 500 μm, the initial capacitance value becomes small, so the rate of change of capacitance with respect to touch or pressure is reduced. less, and as a result, a problem of poor recognition may occur. According to the experimental results, when the space d2 is 600 um, the initial capacitance value is 0.21 pF, which is 0.3 pF or less, so there may be a possibility of poor recognition. Therefore, it can be seen that the appropriate range of the space (d2) value is 50 μm or more and 500 μm or less.

When the value of the line (d1) is 20 um or more, except for the case where the value of the space d2 is 30 um, the restoration change rate is less than 20%, which can be considered to fall within the allowable range of the restoration force. That is, when the line d1 is 20 μm or more, it can be seen that the capacitance value can be immediately restored. On the other hand, when the value of the line d1 exceeds 500 μm, as described above, a problem of poor visibility may occur. Therefore, it can be seen that the appropriate range of the line d1 value is 20 μm or more and 500 μm or less.

line (um) space (um) Initial Cm (pF)

터치 Cm(pF)radius 4

Touch Cm (pF) Immediate change rate (%) 20 30 8.43 4.83 42.7 30 30 7.92 4.51 43.1 100 30 6.14 2.91 52.6 200 30 4.37 3.04 30.4 300 30 3.24 2.12 34.6 20 50 6.55 4.76 27.3 30 50 6.13 4.28 30.2 50 50 5.21 3.21 38.4 20 60 5.03 3.16 37.2 30 60 4.51 3.78 16.2 60 60 4.05 3.36 17.0 100 60 1.71 1.43 16.4 200 60 2.98 2.63 11.7 300 60 2.23 1.87 16.1 20 100 2.51 1.89 24.7 30 100 2.14 1.68 21.5 100 100 1.93 1.23 36.3 200 100 2.03 1.46 28.1 300 100 1.33 0.84 36.8 150 150 1.53 0.71 53.6 20 200 1.39 0.92 33.8 30 200 1.22 0.69 43.4 100 200 1.16 0.53 54.3 200 200 0.96 0.48 50.0 300 200 0.77 0.4 48.1 20 300 0.81 0.56 30.9 30 300 0.61 0.38 37.7 30 400 0.49 0.36 26.5 30 500 0.38 0.34 10.5 30 600 0.21 0.19 9.5

line (um) space (um) Initial Cm(pF)

터치 +200g Cm(pF)radius 4

Touch +200g Cm(pF) Immediate change rate (%) Cm (pF) after 30 s Restoration change rate (%) 20 30 8.43 4.02 52.3 6.17 26.8 30 30 7.92 3.94 50.3 5.57 29.7 100 30 6.14 2.04 66.8 4.78 22.1 200 30 4.37 2.57 41.2 3.25 25.6 300 30 3.24 1.40 56.8 2.04 37.0 20 50 6.55 3.63 44.6 5.76 12.1 30 50 6.13 3.56 41.9 5.18 15.5 50 50 5.21 2.85 45.3 4.35 16.5 20 60 5.03 2.81 44.1 4.38 12.9 30 60 4.51 3.23 28.4 3.79 16.0 60 60 4.05 2.79 31.1 3.42 15.6 100 60 1.71 1.31 23.4 1.71 0 200 60 2.98 2.18 26.8 2.98 0 300 60 2.23 1.17 47.5 2.23 0 20 100 2.51 1.36 45.8 2.51 0 30 100 2.14 1.47 31.3 2.14 0 100 100 1.93 0.87 54.9 1.93 0 200 100 2.03 1.28 36.9 2.03 0 300 100 1.33 0.59 55.6 1.33 0 150 150 1.53 0.56 63.4 1.53 0 20 200 1.39 0.68 51.1 1.39 0 30 200 1.22 0.51 58.2 1.22 0 100 200 1.16 0.41 64.7 1.16 0 200 200 0.96 0.43 55.2 0.96 0 300 200 0.77 0.26 66.2 0.77 0 20 300 0.81 0.47 42.0 0.81 0 30 300 0.61 0.31 49.2 0.61 0 30 400 0.49 0.32 34.7 0.49 0 30 500 0.38 0.32 15.8 0.38 0 30 600 0.21 0.19 9.5 0.21 0

The above experiments are the result values using a metal electrode, and it can be seen that the tendency of the results is not different from that using a metal electrode even when the experiment is performed with a transparent electrode.

7 to 8 are modified examples of the electrode cell according to the present invention. The shape of the pattern of the first electrode pattern and the second electrode pattern constituting the electrode cell may be changed. Even if the pattern shape is changed, the effect of the line value and the space value on the restoring force of the capacitance value can be seen the same. Accordingly, the same principle of the present invention can be applied even in the case of an electrode cell having a deformed pattern. The deformed shape may be a shape bent in the form of a polygon in a zigzag shape as shown in FIG. 7 , or may be a shape bent in the form of a curve. In addition, the deformed shape is a shape in which the protrusions are formed as shown in FIG. 8 , and the protrusions may have a polygonal shape such as a triangle or a quadrangle, or a round shape such as a semicircle or an ellipse. In addition, the protrusion may be formed on the zigzag electrode line, or a dummy pattern may be formed between the adjacent first electrode line and the second electrode line.

Each of the drawings referenced in the description of the previous embodiment is merely an embodiment shown for convenience of description, and items, contents, and images of information displayed on each screen may be displayed in various forms modified.

Although the present invention has been described with reference to an embodiment shown in the drawings, this is merely exemplary, and those of ordinary skill in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Accordingly, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

100: electrode cell
110: first electrode pattern
110a: first connecting line
110b: first electrode line
120: second electrode pattern
120a: second connecting line
120b: second electrode wire
200: elastic base
300: substrate
d1: line
d2: space

Claims (10)

Board; and
It is formed on the upper portion of the substrate and includes one or more electrode cells composed of a first electrode pattern and a second electrode pattern,
The first electrode pattern includes a first connection line and at least one first electrode line connected to the first connection line, and the second electrode pattern includes a second connection line and at least one second electrode line connected to the second connection line,
At least one of the first electrode line and the second electrode line is disposed along a first direction, and the first electrode line and the second electrode line have the same spacing in the second direction and are alternately and repeatedly disposed,
The separation distance is 50um or more and 500um or less,
The width of the first electrode wire or the second electrode wire is 20um or more and 500um or less, the touch sensor.
The method of claim 1,
The first connecting line and the second connecting line are disposed along the second direction, and the first electrode line and the second electrode line are disposed between the first connecting line and the second connecting line.
delete delete 3. The method of any one of claims 1 or 2,
A touch sensor formed between the substrate and the electrode cell, and comprising an elastic substrate formed of polydimethylsiloxane (PDMS).
6. The method of claim 5,
The elastic modulus of the elastic substrate is 0.5 MPa or more and less than 3 MPa of the touch sensor.
6. The method of claim 5,
The touch sensor is a pressure touch sensor, the touch sensor. delete delete delete

Images