KR102260840B1 - Gas Supply System - Google Patents

Abstract

The present invention relates to a gas supply system and, more specifically, to a gas supply system which complementary connects modules corresponding to each other to stably supply a supply gas. According to the present invention, the gas supply system comprises: a first gas mixing/supplying device and a second gas mixing mixing/supplying including a plurality of modules corresponding to each other and connected in parallel to a gas consumer to supply a supply gas in which a plurality of types of gases are mixed to the gas consumer, respectively; at least one connection line connecting the first gas mixing/supplying device and the second gas mixing/supplying device to complementarily connect corresponding modules among the plurality of modules; and a control unit controlling whether the plurality of modules and the at least one connection line are interconnected to selectively form a supply passage for the supply gas.

Description

Gas Supply System

The present invention relates to a gas supply system, and to a gas supply system for more stably supplying supply gas by complementary connecting modules corresponding to each other.

In general, an apparatus using a gas is configured to use a supply gas suitable for each purpose, and it is required to satisfy a certain concentration and pressure according to each purpose and the type of the supply gas.

In particular, in the case of a gas supply device that supplies gas to a gas consuming place where precise work is performed, such as semiconductor processing equipment, concentration, pressure, temperature, etc. are required to satisfy precise error ranges.

1 shows an embodiment of a prior art gas supply device for supplying gas to semiconductor processing equipment.

Referring to FIG. 1 , a gas supply apparatus according to the related art includes a mixing unit 1 for mixing a plurality of types of gases, a tank 2 for storing the mixed gas supplied from the mixing unit 1 , and the It is configured to include a supply unit (3) for supplying the gas stored in the tank (2) to the gas consumer (S) that is a semiconductor processing equipment.

The mixing unit 1 includes a plurality of source gas supply lines 11 and 21 each connected to a plurality of source gas supply tanks 10 and 20 in which different types of source gases are stored and supplied with a plurality of types of source gases, and , a mixing unit 30 in which a plurality of types of source gases supplied from the plurality of source gas supply lines 11 and 21 are mixed, and the gas mixed in the mixing unit 30 flows to the tank 2 It includes a mixing gas supply line (31).

In the plurality of source gas supply lines 11 and 21, a pressure control unit (PRV, 12, 22) and a flow rate control unit (MFC, 13, 23) for controlling the pressure and flow rate of the source gas supplied along each flow path ) and source gas valves 14 and 24 for opening and closing each flow path are provided.

A control unit (not shown) controls the pressure control units 12 and 22, the flow rate control units 13 and 23, and the source gas valves 14 and 24 to control the pressure of the source gas supplied along each flow path and By controlling the flow rate and supply or not, the concentration and pressure of the supply gas are adjusted.

The supply unit 3 includes a tank gas supply line 40 through which the gas stored in the tank 2 flows to the gas consuming place S, and a tank gas supply for opening and closing the tank gas supply line 40 . a line valve 41 .

The control unit opens the tank gas supply line valve 41 when supplying gas to the gas consumer (S) is performed to supply the gas stored in the tank (2) to the gas consumer (S) do.

In the prior art as described above, in the initial stage of supplying the supply gas to the tank module 2 through the mixing unit 1, a flow rate hunting phenomenon occurs due to the structural limitation of the mixing unit 1, and the tank There was a problem in that the concentration of the gas stored in (2) became irregular.

In addition, the gas supply device is one device in which the mixing unit 1, the tank 2, and the supply unit 3 are connected, and there is a limit in the acceptable capacity depending on the place and the installation process. , thus, there may be a problem in supplying the supply gas to the gas consumer.

For example, when the supply gas is continuously supplied to the gas consumer through the gas supply device, when the supply gas is refilled in the tank 2 after consuming all the supply gas stored in the tank 2 Up to now, there may be a problem that the supply gas cannot be stably provided to the gas consumers.

In addition, when an abnormality occurs in any one of the mixing unit 1, the tank 2, and the supply unit 3, the supply gas can be stably provided to the gas demanding place until the abnormality is resolved. There could be no problems.

Accordingly, a gas supply device and a gas supply method for stably supplying a supply gas satisfying a predetermined concentration range to the gas consumer S are being actively discussed.

As an example of the prior art for the gas supply device as described above, there is Korean Patent Registration No. 10-1659200.

The present invention has been devised to solve the above problems, and an object of the present invention is to provide a gas supply system for stably supplying gas to a gas consumer by maintaining a constant concentration of supply gas.

The gas supply system of the present invention for realizing the object as described above includes a plurality of modules corresponding to each other and is connected in parallel to a gas consumer to supply a supply gas in which a plurality of types of gases are mixed to the gas consumer, respectively. A first gas mixing supply device and a second gas mixing supply device configured to At least one connection line for connecting the at least one connection line, at least one connection line valve for opening and closing the at least one connection line, respectively, and controlling the driving of the at least one connection line valve to provide the first gas mixing and supply device and the second It is configured to include a control unit for selectively forming a supply flow path of the supply gas by controlling whether the gas mixing supply device is in communication.

The first gas mixing and supplying device and the second gas mixing and supplying device include a mixing module for mixing and supplying a plurality of types of gases, a tank module for storing the supply gas supplied from the mixing module, and the storage in the tank module. It is configured to include a supply module for supplying the supply gas to the gas consumer, respectively,

a first connection part for connecting the mixing module and the tank module to the first gas mixing supply device and the second gas mixing supply device; a second connection part for connecting the tank module and the supply module to the supply module; A third connection part to which the gas consumer is connected is formed, respectively,

The at least one connection line includes a first connection line connecting the first connection part of the first gas mixing supply device and the first connection part of the second gas mixing supply device, and a second connection part of the first gas mixing supply device. a second connection line connecting the connecting portion and the second connecting portion of the second gas mixing and supplying device; and a third connecting portion connecting the third connecting portion of the first gas mixing and supplying device and the third connecting portion of the second gas mixing and supplying device. It may be configured to include at least one of the connection lines.

In addition, the control unit, depending on whether each of the plurality of modules is normally operated, any one of a pair of mixing modules respectively included in the first gas mixing supply device and the second gas mixing supply device and corresponding to each other; Any one of the pair of tank modules and any one of the pair of supply modules may be selected and sequentially connected.

In addition, the mixing module includes a mixing gas supply line for flowing the supply gas in which a plurality of types of gases are mixed to the tank module, and a mixing gas concentration analysis unit for measuring the concentration of the supply gas flowing through the mixing gas supply line The control unit may be configured to determine whether the mixing module is normally operated by comparing the concentration of the supply gas measured by the mixing gas concentration analyzer with a preset reference concentration range.

In addition, the mixing module includes a mixing gas supply line for flowing the supply gas in which a plurality of types of gases are mixed to the tank module, and a mixing gas pressure measuring unit for measuring the pressure of the supply gas flowing through the mixing gas supply line. The control unit may be configured to determine whether the mixing module is normally operated by comparing the pressure of the supply gas measured by the mixing gas pressure measuring unit with the pressure inside the tank module.

In addition, the tank module is configured to include a tank module pressure measuring unit for measuring the gas pressure inside the tank module, and the control unit includes a pressure of the supply gas measured by the tank module pressure measuring unit and a preset reference pressure range. can be made to determine whether the tank module is normally operated by comparing the .

In addition, the supply module includes a tank gas supply line for flowing the supply gas stored in the tank module to the gas consumer, and a tank gas concentration analyzer for measuring the concentration of the supply gas flowing through the tank gas supply line. The control unit may be configured to determine whether the supply module is normally operated by comparing the concentration of the supply gas measured by the tank gas concentration analyzer with a preset reference concentration range.

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In addition, it includes a first valve for opening and closing the connection passage on the mixing module side of the first connection portion, and a second valve for opening and closing the connection passage on the tank module side of the first connection portion, wherein the control unit, the first gas mixing supply The first valve of the apparatus is opened and the second valve is closed, the first valve of the second gas mixing and supply apparatus is closed and the second valve is opened, so that the supply gas is supplied from the mixing module of the first gas mixing and supply apparatus to the first It is possible to control the flow to the tank module of the second gas mixing supply device through the connection line.

In addition, the control unit opens the first valve and the second valve of the first gas mixing supply device, and closes the first valve and the second valve of the second gas mixing supply device, so that the supply gas is the first gas It can be controlled to flow from the mixing module of the mixing supply device to the tank module of the first gas mixing supply device.

In addition, a third valve for opening and closing the connection passage on the tank module side of the second connection portion, and a fourth valve for opening and closing the connection passage on the supply module side of the second connection portion, wherein the control unit, the first gas mixing supply The third valve of the device is opened and the fourth valve is closed, the third valve of the second gas mixing and supplying device is closed and the fourth valve is opened, so that the supply gas is discharged from the tank module of the first gas mixing and supplying device to the second It is possible to control the flow to the supply module of the second gas mixing and supply device through the connection line.

In addition, the control unit opens the third and fourth valves of the first gas mixing and supplying device, and closes the third and fourth valves of the second gas mixing and supplying device, so that the supply gas is the first gas It can be controlled to flow from the tank module of the mixing supply device to the supply module of the first gas mixing and supply device.

In addition, a fifth valve for opening and closing the supply module side connection passage of the third connection part, wherein the control unit, the first gas mixing supply device and the first gas consumer connecting portion to which the gas consumer is connected is closed and the second In a state in which the second gas consumer connection part to which the second gas mixing supply device and the gas consumer are connected is opened, the fifth valve of the first gas mixing and supply device is opened and the fifth valve of the second gas mixing and supply device is closed, the It is possible to control the supply gas to flow from the supply module of the first gas mixing and supply device to the third connection line to be supplied to the gas consumer through the second gas consumer connection part.

In addition, the control unit opens the fifth valve of the first gas mixing and supply device in a state in which the first gas consumer connecting part is opened and the second gas consumer connecting part is closed and the fifth valve of the second gas mixing and supplying device is closed. Close, it is possible to control the supply gas to be supplied from the supply module of the first gas mixing and supply device to the gas consumer through the first gas consumer connection part.

In addition, the mixing module includes a mixing gas supply line valve for opening and closing the mixing gas supply line, a mixing gas vent line branched from the mixing gas supply line and connected to the outside, and a mixing gas for opening and closing the mixing gas vent line It may be configured to include a vent line valve.

In addition, when the concentration of the supply gas measured by the mixing gas concentration analyzer satisfies a preset reference concentration range, the control unit opens the mixing gas supply line valve and closes the mixing gas vent line valve, and analyzes the mixing gas concentration When the concentration of the supply gas measured in the unit does not satisfy the reference concentration range, the mixing gas supply line valve may be closed but the mixing gas vent line valve may be opened.

In addition, the mixing module includes a mixing gas supply line valve for opening and closing the mixing gas supply line, a mixing gas vent line branched from the mixing gas supply line and connected to the outside, and a mixing gas for opening and closing the mixing gas vent line It may be configured to include a vent line valve.

In addition, when the pressure of the supply gas measured by the mixing gas pressure measurement unit is equal to or greater than the internal pressure of the tank module, the control unit opens the mixing gas supply line valve and closes the mixing gas vent line valve, and measures the mixing gas pressure When the pressure of the supply gas measured in the unit is less than the internal pressure of the tank module, the mixing gas supply line valve is closed but the mixing gas vent line valve is opened.

In addition, the mixing module may include a mixing gas concentration analysis line branched from the mixing gas supply line and connected to the outside, and a mixing gas concentration analysis line valve that opens and closes the mixing gas concentration analysis line.

In addition, the mixing gas concentration analysis unit may be provided to measure the concentration of the supply gas when the supply gas flows from the mixing gas supply line to the mixing gas concentration analysis line.

In addition, the control unit, by controlling the driving of the mixing gas concentration analysis line valve to control whether the supply gas to the mixing gas concentration analysis line by controlling whether the concentration of the supply gas through the mixing gas concentration analysis unit is measured can be made to control

In addition, the mixing module may include a mixing gas pressure measurement line branched from the mixing gas supply line and connected to the outside, and a mixing gas pressure measurement line valve that opens and closes the mixing gas pressure measurement line.

In addition, the mixing gas pressure measurement unit may be provided to measure the pressure of the supply gas when the supply gas flows from the mixing gas supply line to the mixing gas pressure measurement line.

In addition, the control unit may be configured to control the driving of the mixing gas pressure measurement line valve to control whether the pressure of the supply gas is measured through the mixing gas pressure measurement unit.

In addition, the mixing module may be configured to further include a mixing gas vent flow rate control unit that adjusts the amount of the supply gas discharged through the mixing gas vent line by adjusting the opening degree of the mixing gas vent line.

In addition, in the mixing module, a plurality of source gas supply lines to which a plurality of different types of source gases are respectively supplied, and a plurality of different types of source gases supplied from the plurality of source gas supply lines are mixed to form the supply gas. It may include a mixing unit and a mixing gas supply line connecting the mixing unit and the tank.

In addition, the supply module may be configured to include a tank gas concentration analyzer for measuring the concentration of a supply gas flowing through a tank gas supply line connecting the tank module and the gas consumer.

In addition, the control unit, by comparing the concentration of the supply gas measured in the tank gas concentration analyzer with a preset reference concentration range may be configured to determine whether the supply gas supplied to the gas consumer is appropriate.

In addition, the supply module includes a tank gas supply line valve for opening and closing the tank gas supply line, a tank gas vent line branched from the tank gas supply line and connected to the outside, and a tank gas for opening and closing the tank gas vent line. It may be configured to include a vent line valve.

In addition, when the concentration of the supply gas measured by the tank gas concentration analyzer satisfies a preset reference concentration range, the control unit opens the tank gas supply line valve, closes the tank gas vent line valve, and analyzes the tank gas concentration If the concentration of the supply gas measured in the unit does not satisfy the reference concentration range, the tank gas supply line valve may be closed but the tank gas vent line valve may be opened.

In addition, the supply module may include a tank gas concentration analysis line branched from the tank gas supply line and connected to the outside, and a tank gas concentration analysis line valve for opening and closing the tank gas concentration analysis line.

In addition, the tank gas concentration analysis unit may be provided to measure the concentration of the supply gas when the supply gas flows from the tank gas supply line to the tank gas concentration analysis line.

In addition, the control unit may be configured to control the driving of the tank gas concentration analysis line valve to control whether the concentration of the supply gas is measured through the tank gas concentration analysis unit.

In addition, the first gas mixing and supplying device and the second gas mixing and supplying device may be modular devices in which the mixing module, the tank module, and the supply module are each independently configured to be coupled to each other.

According to the gas supply system according to the present invention, the supply gas can be more stably supplied by connecting a plurality of gas mixing and supplying devices in parallel to a gas demanding place and operating them complementary to each other.

In addition, in a plurality of gas mixing and supply devices connected in parallel, the supply gas can be more stably supplied by selectively communicating by complementary connecting modules corresponding to each other.

In addition, since the mixing module, the tank module, and the supply module are each configured independently, it is possible to receive and stably supply the supply gas of a larger capacity.

1 is a view schematically showing a gas supply device according to the prior art.
2 is a view schematically showing a gas supply system according to an embodiment of the present invention.

Hereinafter, the configuration and operation of the gas supply system according to the present invention will be described in detail with reference to the accompanying drawings.

Here, detailed descriptions of the contents and overlapping contents described in the prior art will be omitted, and will be mainly described with respect to the newly added components of the present invention.

2 shows a gas supply system according to an embodiment of the present invention.

The gas supply system according to an embodiment of the present invention includes a plurality of modules (100-1,200-1,300-1; 100-2,200-2,300-2) corresponding to each other and is connected in parallel to the gas consumer (S). A first gas mixing and supplying device 1000 and a second gas mixing and supplying device 2000 configured to respectively supply a supply gas in which a plurality of types of gases are mixed to a gas consumer (S), and the first gas mixing and supplying device ( 1000) and the second gas mixing supply device 2000 to connect the modules corresponding to each other among the plurality of modules 100-1,200-1,300-1; 100-2,200-2,300-2 complementary to each other. At least one connection line (510, 520, 530), the plurality of modules (100-1,200-1,300-1; 100-2,200-2,300-2) and the at least one connection line (510, 520, 530) by controlling whether the interconnection of each and a control unit (not shown) for selectively forming a supply passage of the supply gas.

The first gas mixing and supplying device 1000 and the second gas mixing and supplying device 2000 include a mixing module 100-1; 100-2 for mixing and supplying a plurality of types of gases, and the mixing module 100 A tank module (200-1; 200-2) for storing the supply gas supplied from -1; 100-2), and the supply gas stored in the tank module (200-1; 200-2) to the gas consumer ( It may be a modular device configured to include each of the supply modules 300-1; 300-2 supplied to S).

The mixing module (100-1; 100-2), the tank module (200-1; 200-2), and the supply module (300-1; 300-2) are each made of separate devices of independent configuration, but sequentially It may be combined to configure the first gas mixing and supplying device and the second gas mixing and supplying device, respectively.

According to the modular gas mixing supply device as described above, as compared to the integrated gas supply device according to the prior art consisting of a single device in which the mixing system, the tank and the supply module are connected, the restrictions depending on the installation location and the installation process can be significantly alleviated. can

Accordingly, the sizes of the mixing module 100-1,100-2, the tank module 200-1,200-2, and the supply module 300-1,300-2 can be configured to fit the required capacity, and thus more It is possible to accommodate the supply gas of the capacity and more stably supply the supply gas to the gas supplier.

The supply gas supplied through the supply module (300-1; 300-2) may be supplied to the gas consumer (S) through the gas consumer connection part (400-1; 400-2).

The mixing module 100-1; 100-2 and the tank module 200-1; 200-2 are connected to the first gas mixing supply device 1000 and the second gas mixing supply device 2000. a first connection part 610-1; 610-2, and a second connection part 620-1 to which the tank module 200-1; 200-2 and the supply module 300-1; 300-2 are connected. 620-2) and a third connection part (630-1; 630-2) to which the supply module (300-1; 300-2) and the gas consumer connection part (400-1; 400-2) are connected each can be formed.

The at least one connection line 510 , 520 , 530 includes a first connection part 610 - 1 of the first gas mixing and supplying device 1000 and a first connection part 610 - 2 of the second gas mixing and supplying device 2000 . A first connection line 510 for connecting the , a second connection part 620-1 of the first gas mixing supply device 1000, and a second connection part 620-2 of the second gas mixing supply device 2000 ), a second connection line 520 for connecting the , a third connection part 630-1 of the first gas mixing supply device 1000, and a third connection part 630- of the second gas mixing supply device 2000 2) may be configured to include at least one of the third connection lines 530 for connecting.

In addition, a first connection line valve 511 for opening and closing the first connection line 510, a second connection line valve 521 for opening and closing the second connection line 520, and the third connection line ( It may be configured to include a third connection line valve 531 that opens and closes 530 .

In addition, the mixing module side connection passage of the first connection part (610-1; 610-2) connected from the first connection part (610-1; 610-2) to the mixing module (100-1; 100-2) a first valve (710-1; 710-2) for opening and closing, and the first connection part connected to the tank module (200-1; 200-2) from the first connection part (610-1; 610-2) (610-1; 610-2) may be configured to further include a second valve (720-1; 720-2) for opening and closing the tank module side connection passage.

The first valves 710 - 1 and 710 - 2 may be replaced with a mixing gas supply line valve 141 to be described later.

In addition, the tank module side connection passage of the second connection part (620-1; 620-2) connected from the second connection part (620-1; 620-2) to the tank module (200-1; 200-2). a third valve 730-1; 730-2 that opens and closes, and the second connection part connected from the second connection part 620-1; 620-2 to the supply module 300-1; 300-2 It may be configured to further include a fourth valve (740-1; 740-2) for opening and closing the supply module side connection passage of (620-1; 620-2).

In addition, the supply module side connection passage of the third connection part (630-1; 630-2) connected to the supply module (200-1; 200-2) from the third connection part (630-1; 630-2) May be configured to further include a fifth valve (750-1; 750-2) for opening and closing, the fifth valve (750-1; 750-2), to be described later tank gas supply line valves (321-1, 321) -2) can be replaced.

The control unit includes the first connection line valve 511, the second connection line valve 521, the third connection line valve 531, the first valves 710-1; 710-2, and the second Valves 720-1; 720-2, the third valve 730-1; 730-2, the fourth valve 740-1; 740-2, and the fifth valve 750-1; 750- 2) may be controlled to selectively communicate the first gas mixing supply device 1000 and the second gas mixing supply device 2000 through the at least one connection line 510 , 520 , and 530 .

For example, the control unit opens the first valve 710 - 1 of the first gas mixing and supply device 1000 and closes the second valve 720 - 1 of the second gas mixing and supply device 2000 . Close the first valve 710-2 and open the second valve 720-2, so that the supply gas is supplied from the mixing module 100-1 of the first gas mixing supply device 1000 to the first connection line ( It is possible to control the flow to the tank module 200-2 of the second gas mixing and supplying device 2000 through 510).

In addition, the control unit opens the first valve 710 - 1 and the second valve 720 - 1 of the first gas mixing and supplying device 1000 , the first of the second gas mixing and supplying device 2000 . By closing the valve 710 - 2 and the second valve 720 - 2 , the supply gas is supplied from the mixing module 100 - 1 of the first gas mixing and supplying apparatus 1000 to the first gas mixing and supplying device 1000 . ) can be controlled to flow to the tank module 200-1.

As another example, the control unit opens the third valve 730 - 1 of the first gas mixing and supply device 1000 and closes the fourth valve 740 - 1 , and the second gas mixing and supply device 2000 . Close the third valve 730-2 of the and open the fourth valve 740-2, so that the supply gas is supplied from the tank module 200-1 of the first gas mixing and supply device 1000 to the second connection line It can be controlled to flow to the supply module 300 - 2 of the second gas mixing and supply device 2000 through 520 .

In addition, the control unit opens the third valve 730 - 1 and the fourth valve 740 - 1 of the first gas mixing and supplying device 1000 , and the third of the second gas mixing and supplying device 2000 is opened. By closing the valve 730 - 2 and the fourth valve 740 - 2 , the supply gas is supplied from the tank module 200 - 1 of the first gas mixing and supplying apparatus 1000 to the first gas mixing and supplying device 1000 . ) can be controlled to flow to the supply module 300-1.

As another example, the control unit, the first gas mixing and supply device 2000 and the first gas consumer (S) is connected to the first gas consumer connecting portion 400-1 is closed, the second gas mixing supply device ( 2000) and the second gas consumer connecting part 400-2 to which the gas consumer S is connected, open the fifth valve 750-1 of the first gas mixing supply device 1000 in an open state, and the By closing the fifth valve 750-2 of the second gas mixing and supplying device 2000, the supply gas is supplied from the supply module 300-1 of the first gas mixing and supplying device 1000 to the third connection line ( 530) can be controlled to be supplied to the gas consumer S through the second gas consumer connection part 400-2.

In addition, the control unit, the fifth valve of the first gas mixing and supply device 1000 in a state in which the first gas consumer connecting part 400-1 is opened and the second gas consumer connecting part 400-2 is closed. (750-1) is opened and the fifth valve (750-2) of the second gas mixing and supply device 2000 is closed, so that the supply gas is supplied to the supply module 300-1 of the first gas mixing and supply device (1000). ) can be controlled to be supplied to the gas consumer (S) through the first gas consumer connection part 400-1.

That is, the control unit, using at least one of the first connection line 510 , the second connection line 520 , and the third connection line 530 , the first gas mixing supply device 1000 and the Any one of a pair of modules respectively included in the second gas mixing and supplying device 2000 corresponding to each other, that is, any one of the pair of mixing modules 100-1; 100-2, and a pair of tanks Any one of the modules (200-1; 200-2) and one of the pair of supply modules (300-1; 300-3) can be selected and sequentially connected, so that the supply gas is the gas consumption A supply passage to be supplied to the store (S) may be selectively formed.

At this time, the control unit may select any one of a pair of modules corresponding to each other as described above according to whether each of the plurality of modules 100-1,200-1,300-1; 100-2,200-2,300-2 operates normally. Accordingly, it is possible to form a supply flow path composed of a module operating normally without any abnormality, thereby stably supplying the supply gas.

The mixing modules 100-1 and 100-2 are connected to the source gas supply tanks 101-1 and 102-1; 101-2 and 102-2, and a plurality of source gas supply lines 110 to which a plurality of different types of source gases are respectively supplied. -1,120-1; 110-2, 120-2) and mixing units 130-1 and 130 in which a plurality of types of source gases supplied from the plurality of source gas supply lines 110-1, 120-1; 110-2, 120-2 are mixed -2) and the mixing gas supply lines 140-1 and 140-2 for flowing the supply gas formed in the mixing units 130-1 and 130-2 to the tank module 200.

In the source gas supply lines 110-1, 120-1; 110-2, 120-2, at least one pressure control unit 111-1, 121-1; 111-2, 121 for adjusting the supply pressure of the plurality of different types of source gases, respectively. -2) and at least one flow rate control unit (112-1, 122-1; 112-2, 112-2) for respectively adjusting the supply flow rates of the plurality of different types of source gas may be provided, and the source gas supply line ( Source gas valves 113-1, 123-1; 113-2, 123-2 for opening and closing 110-1, 120-1; 110-2, and 120-2, respectively, are provided to control whether each source gas is supplied.

The pressure control units 111-1, 121-1; 111-2, 121-2, the flow rate control units 112-1, 122-1; 112-2, 122-2, and the source gas valves 113-1, 123-1; 113-2, 123 -2) may be controlled by the control unit.

The mixing module 100-1; 100-2 may further include a mixing gas supply line valve 141-1; 141-2 for opening and closing the mixing gas supply lines 140-1 and 140-2. have.

The control unit controls the driving of the mixing gas supply line valve (141-1; 141-2) to supply gas mixed in the mixing unit (130-1; 130-2) to the tank module (200-1); 200-2) can be controlled or not.

The mixing module 100-1; 100-2 includes a mixing gas vent line 150-1; 150-2 that is branched from the mixing gas supply lines 140-1 and 140-2 and connected to the outside, and the mixing It may be configured to further include a mixing gas vent line valve (151-1; 151-2) for opening and closing the gas vent line (150-1; 150-2).

The control unit controls the driving of the mixing gas vent line valves 151-1; 151-2 to supply gas mixed in the mixing unit 130-1; 130-2 to the mixing gas vent line 150- 1;150-2), it is possible to control whether or not to discharge to the outside.

The mixing module 100-1; 100-2 includes a mixing gas concentration analyzer 170-1; 170-2 that measures the concentration of the supply gas flowing through the mixing gas supply lines 140-1 and 140-2. and at least one of the mixing gas pressure measuring units 180-1 and 180-2 for measuring the pressure of the supply gas flowing through the mixing gas supply lines 140-1 and 140-2.

The control unit compares the concentration of the supply gas measured by the mixing gas concentration analyzer 170-1; 170-2 with a preset reference concentration range, and the mixing gas pressure measurement unit 180-1; 180-2 ) by comparing the pressure of the supply gas measured in the tank module (200-1; 200-2) with the pressure inside the tank module (200-1; 200-2), it is possible to determine whether the mixing module (100-1; 100-2) is normally operated.

The control unit, the concentration of the supply gas measured by the mixing gas concentration analyzer (170-1; 170-2) satisfies the reference concentration range, the mixing gas pressure measuring unit (180-1; 180-2) When the measured supply gas pressure is equal to or greater than the gas pressure inside the tank modules 200-1; 200-2, it may be determined that the mixing modules 100-1 and 100-2 are in a normal operating state.

In addition, the control unit, the concentration of the supply gas measured by the mixing gas concentration analyzer 170-1; 170-2 does not satisfy the reference concentration range, and the mixing gas pressure measurement unit 180-1; 180 If the pressure of the supply gas measured in -2) is less than the gas pressure inside the tank module (200-1; 200-2), it can be determined that the mixing module (100-1, 100-2) is not in a normal operating state. have.

The control unit selects any one of a pair of mixing modules 100-1; 100-2 corresponding to each other according to whether each of the mixing modules 100-1; 100-2 determined as described above operates normally. By forming the supply passage, the supply gas can be stably supplied.

In addition, the control unit, the concentration of the supply gas measured by the mixing gas concentration analyzer (170-1; 170-2) satisfies the reference concentration range, the mixing gas pressure measuring unit (180-1; 180-) When the pressure of the supply gas measured in 2) is equal to or greater than the gas pressure inside the tank module 200-1; 200-2, the mixing gas supply line valve 141-1; 141-2 is opened, but the mixing gas vent By closing the line valves (151-1; 151-2), the supply gas supplied from the mixing unit (130-1; 130-2) is not discharged to the outside, and the mixing gas supply line (140-1; 140-2) can be controlled to flow to and be stored in the tank modules 200-1; 200-2.

In addition, the control unit, the concentration of the supply gas measured by the mixing gas concentration analyzer 170-1; 170-2 does not satisfy a preset reference concentration range, or the mixing gas pressure measurement unit 180-1; When the pressure of the supply gas measured in 180-2) is less than the gas pressure inside the tank module 200-1; 200-2, the mixing gas supply line valve 141-1; 141-2 is closed but the mixing The gas vent line valves 151-1; 151-2 are opened to discharge the supply gas flowing through the mixing gas supply lines 140-1; 141-2 to the outside, and at the same time, the tank modules 200-1; 200- 2) can be controlled to cut off the supply gas supply.

Accordingly, the supply gas whose concentration and pressure do not satisfy the preset range is prevented from being stored in the tank module 200-1; 200-2, and is stored in the tank module 200-1; 200-2 within a certain range. It can stably store the supply gas at the concentration and pressure of

The mixing module 100-1; 100-2 includes a sensing and measuring line 160-1; 160-2 that is branched from the mixing gas supply lines 140-1 and 140-2 and connected to the outside, and the sensing and measuring line 160-1; It may be configured to further include a detection measurement line valve (161-1; 160-2) for opening and closing the lines (160-1; 160-2).

The mixing gas concentration analyzing unit 170-1; 170-2 and the mixing gas pressure measuring unit 180-1; 180-2 are configured to flow the mixing gas supply line 140-1; 140-2. When the supply gas flows into the sensing and measuring lines 160-1; 160-2, the concentration and pressure of the corresponding supply gas are measured, respectively.

Accordingly, the control unit controls the driving of the sensing and measuring line valves 161-1; 161-2 to control whether the supply gas is supplied to the sensing and measuring lines 160-1; 160-2. It is possible to control whether the concentration and pressure of the supply gas are measured through the mixing gas concentration analyzing unit 170-1; 170-2 and the mixing gas pressure measuring unit 180-1; 180-2.

The sensing and measuring lines 160-1; 160-2 may be provided with a smaller cross-sectional area than the mixing gas vent lines 150-1; 150-2, and the mixing gas concentration analyzer 170-1; 170-2) and the mixing gas pressure measuring unit 180-1; 180-2 may be configured such that a supply gas having a minimum flow rate required to measure the concentration and pressure of the gas flows.

That is, the sensing and measuring lines 160-1; 160-2 have a significantly lower flow rate than the mixing gas supply lines 140-1; 140-2 and the mixing gas vent lines 150-1; 150-2. The supply gas may be configured to flow.

Accordingly, the mixing gas supply line 140-1; 140-2 or the mixing gas vent line is measured by flowing the supply gas to the sensing and measuring line 160-1; 160-2 to measure the concentration and pressure. Compared with the case of measuring the concentration and pressure by flowing the supply gas to (150-1; 150-2), it is possible to reduce the amount of supply gas required and increase the efficiency of the apparatus.

The mixing module 100-1; 100-2 further includes a mixing gas vent flow rate adjusting unit 152-1; 152-2 for adjusting the opening degree of the mixing gas vent line 150-1; 150-2. may be included.

The control unit controls the mixing gas mixing gas vent flow rate control unit 152-1; 152-2 to adjust the amount of the supply gas discharged through the mixing gas vent line 150-1; 150-2. The pressure of the supply gas flowing to the tank module 200-1; 200-2 through the mixing gas supply line 140-1; 140-2 can be efficiently adjusted.

The tank module 200-1; 200-2 is made of a material having high rigidity, heat resistance and pressure resistance having a predetermined thickness to store high-temperature and high-pressure gas, and is stored due to deterioration or corrosion in response to gas. It is composed of a material having chemical resistance and corrosion resistance so as not to cause a change in the properties of the gas.

A material satisfying the above conditions is stainless steel (SUS). Stainless steel is one of the materials widely used in various fields because it has high rigidity, excellent heat resistance, corrosion resistance, chemical resistance, accessibility, and economical advantages.

The tank module 200-1; 200-2 may be configured as a batch type tank such that an internal pressure is formed between an upper pressure limit value and a lower pressure limit value.

The tank module (200-1; 200-2) may be provided with a tank pressure measuring unit (210-1; 210-2) for measuring the internal gas pressure.

The control unit compares the pressure of the supply gas measured by the tank pressure measuring unit (210-1; 210-2) with a preset reference pressure range, and the tank module (200-1; 200-2) is normally operated. can determine whether

The control unit, when the pressure of the supply gas measured by the tank pressure measuring unit (210-1; 210-2) satisfies the reference pressure range, determines the tank module (200-1, 200-2) as a normal operating state, , when the measured supply gas pressure does not satisfy the reference pressure range, it may be determined that the corresponding tank modules 200-1 and 200-2 are not in a normal operating state.

The control unit selects any one of the pair of tank modules 200-1; 200-2 corresponding to each other according to whether each tank module 200-1; 200-2 determined as described above operates normally. By forming the supply passage, the supply gas can be stably supplied.

The supply module (300-1; 300-2) is a tank gas supply line (320-1; 320-2) connecting the tank module (200-1; 200-2) and the gas consumer (S). And, a tank gas vent line (330-1; 330-2) branched from the tank gas supply line (320-1; 320-2) and connected to the outside, and the tank gas supply line (320-1; 320-) 2) may be configured to include a tank gas concentration analyzer (310-1; 310-2) for measuring the concentration of the supply gas flowing.

The control unit, by comparing the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) with a preset reference concentration range, whether the supply gas supplied to the gas consumer (S) is appropriate made to judge

The supply module (300-1; 300-2) further includes a tank gas supply line valve (321-1; 321-2) for opening and closing the tank gas supply line (320-1; 3---2) can be configured.

The control unit controls the operation of the tank gas supply line valves 321-1; 321-2 to determine whether the supply gas stored in the tank module 200-1; 200-2 is supplied to the gas consumer (S). You can control whether

The control unit, when the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) satisfies the reference concentration range, the tank gas supply line valve (321-1; 321-2) ) can be opened to control the supply gas stored in the tank module (200-1; 200-2) to be supplied to the gas consumer (S).

In addition, the control unit, when the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) does not satisfy the reference concentration range, the tank gas supply line valve (321-1; 321-2) can be controlled to close the supply gas supply to the gas consumer (S).

The supply module (300-1; 300-2), a tank gas vent line (330-1; 330-2) branched from the tank gas supply line (320-1; 320-2) and connected to the outside; It may be configured to further include a tank gas vent line valve (331-1; 331-2) for opening and closing the tank gas vent line (330-1; 330-2).

The control unit controls the operation of the tank gas vent line valves 331-1 and 331-2 to discharge the supply gas flowing through the tank gas supply line 320 to the outside through the tank gas vent line 330 . You can control whether or not

The control unit, when the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) satisfies the reference concentration range, the supply module (300-1, 300-2) to the normal operation state can judge

In addition, the control unit, when the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) does not satisfy the reference concentration range, the supply module (300-1, 300-2) It can be judged that it is not in a normal operating state.

The control unit selects any one of a pair of supply modules 300-1; 300-2 corresponding to each other according to whether each of the supply modules 300-1; 300-2 determined as described above operates normally. By forming the supply passage, the supply gas can be stably supplied.

In addition, the control unit, when the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) satisfies the reference concentration range, the tank gas supply line valve (321-1; 321) -2) is opened and the tank gas vent line valves 331-1; 331-2 are closed, so that the supply gas supplied from the tank module 200-1; 200-2 is not discharged to the outside and the tank gas is supplied. It can be controlled to flow to the gas consumer (S) along the lines (320-1; 320-2).

In addition, the control unit, when the concentration of the supply gas measured by the tank gas concentration analyzer (310-1; 310-2) does not satisfy the reference concentration range, the tank gas supply line valve (321-1; 321-2) is closed and the tank gas vent line valves 331-1; 331-2 are opened, so that the supply gas supplied from the tank module 200-1; 200-2 is transferred to the tank gas vent line 330- 1;330-2) can be controlled to be discharged to the outside.

The supply module (300-1; 300-2) includes a tank gas concentration analysis line (340-1; 340-2) branched from the tank gas supply line (320-1; 320-2) and the tank gas concentration Further comprising a tank gas concentration analysis line valve (341-1; 341-2) for opening and closing the analysis line (340-1; 340-2), the tank gas concentration analysis unit (310-1; 310-2) It may be configured to measure the concentration of the gas flowing along the tank gas concentration analysis line (340-1; 340-2).

The tank gas concentration analysis unit (310-1; 310-2), the supply gas flowing through the tank gas supply line (320-1; 320-2) is the tank gas concentration analysis line (340-1; 340-) 2), the concentration of the corresponding supply gas is measured.

Accordingly, the control unit controls the operation of the tank gas concentration analysis line valves 341-1; 341-2 to determine whether the supply gas is supplied to the tank gas concentration analysis lines 340-1; 340-2. By controlling , it is possible to control whether or not to measure the concentration of the supply gas through the tank gas concentration analyzer (310-1; 310-2).

The tank gas concentration analysis line (340-1; 340-2) may be provided to have a smaller cross-sectional area than the tank gas vent line (330-1; 330-2), and the tank gas concentration analysis unit (310-) 1;310-2) may be such that the minimum flow rate of the supply gas required to measure the concentration of the gas flows.

That is, the tank gas concentration analysis line (340-1; 340-2) is significantly smaller than the tank gas supply line (320-1; 320-2) and the tank gas vent line (330-1; 330-2). The flow rate of the supply gas may be configured to flow.

Accordingly, by flowing the supply gas to the tank gas concentration analysis line (340-1; 340-2) to measure the concentration and pressure, the tank gas supply line (320-1; 320-2) or the tank gas Compared with the case of measuring the concentration and pressure by flowing the supply gas through the vent lines 330 - 1 and 330 - 2 , it is possible to reduce the amount of the required supply gas and increase the efficiency of the apparatus.

As described above, according to the gas supply system according to the present invention, a plurality of gas mixing supply devices 1000 and 2000 are connected in parallel to the gas consuming place (S) and operated complementary to each other, thereby stably supplying gas. can supply

In addition, in the plurality of gas mixing and supply apparatuses 1000 and 2000 connected in parallel, the supply gas can be more stably supplied by selectively communicating by complementary connecting modules corresponding to each other.

In addition, the mixing module (100-1; 100-2), the tank module (200-1; 200-3), and the supply module (300-1; 300-2) are each composed of an independent configuration, so that a larger capacity of supply gas can be accommodated and supplied stably.

The present invention is not limited to the above-described embodiments, and obvious modifications can be made by those of ordinary skill in the art to which the invention pertains without departing from the technical spirit of the invention as claimed in the claims. The practice is within the scope of the present invention.

1000: first gas mixing supply device 2000: second gas mixing supply device
100-1,100-2: mixing module 130-1,130-2: mixing unit
140-1,140-2: mixing gas supply line 141-1, 141-2: mixing gas supply line valve
150-1,150-2: mixing gas vent line 151-1, 140-2: mixing gas vent line valve
152-1,152-2: mixing gas vent flow control unit
160-1,160-2: mixing gas detection and measurement line
161-1,160-2: mixing gas detection measurement line valve
170-1,170-2: mixing gas concentration analysis unit 180-1,180-2: mixing gas pressure measurement unit
200-1,200-2: tank module 210-1,210-2: tank pressure measurement unit
300-1,300-2: supply module 310-1,310-2: tank gas concentration analysis unit
321-1,320-2: tank gas supply line 321-1,321-2: tank gas supply line valve
330-1,330-2: tank gas vent line 331-1,331-2: tank gas vent line valve
340-1,340-2: Tank gas concentration analysis line
341-1,341-2: tank gas concentration analysis line valve
400-1: first gas consumer connection part 400-2: second gas consumer connection part
510: first connection line 511: first connection line valve
520: second connection line 521: second connection line valve
530: third connection line 531: third connection line valve
610-1,610-2: first connection part 620-1,620-2: second connection part
630-1,630-2: third connection part 710-1,710-2: first valve
720-1,720-2: 2nd valve 730-1,730-2: 3rd valve
740-1,740-2: 4th valve 750-1,750-2: 5th valve

Claims (21)

a first gas mixing supply device and a second gas mixing supply device including a plurality of modules corresponding to each other and connected in parallel to a gas consumer to supply a supply gas in which a plurality of types of gases are mixed to the gas consumer;
at least one connection line connecting the first gas mixing and supplying device and the second gas mixing and supplying device to complementarily connect the modules corresponding to each other among the plurality of modules;
at least one connection line valve for opening and closing the at least one connection line, respectively;
a control unit configured to selectively form a supply flow path of the supply gas by controlling the driving of the at least one connection line valve to control whether the first gas mixing supply device and the second gas mixing supply device communicate with each other;
A gas supply system comprising a. According to claim 1,
The first gas mixing and supplying device and the second gas mixing and supplying device include a mixing module for mixing and supplying a plurality of types of gases, a tank module for storing the supply gas supplied from the mixing module, and the storage in the tank module. It is configured to include a supply module for supplying the supply gas to the gas consumer, respectively,
a first connection part for connecting the mixing module and the tank module to the first gas mixing supply device and the second gas mixing supply device; a second connection part for connecting the tank module and the supply module to the supply module; A third connection part to which the gas consumer is connected is formed, respectively,
The at least one connection line includes a first connection line connecting the first connection part of the first gas mixing supply device and the first connection part of the second gas mixing supply device, and a second connection part of the first gas mixing supply device. a second connection line connecting the connecting portion and the second connecting portion of the second gas mixing and supplying device; and a third connecting portion connecting the third connecting portion of the first gas mixing and supplying device and the third connecting portion of the second gas mixing and supplying device. Gas supply system comprising at least one of the connection lines. 3. The method of claim 2,
The control unit, according to whether each of the plurality of modules is normally operated, any one of a pair of mixing modules included in the first gas mixing supply device and the second gas mixing supply device and corresponding to each other, and a pair Gas supply system, characterized in that configured to sequentially connect any one of the tank module and the pair of supply modules by selecting, respectively. 4. The method of claim 3,
The mixing module includes a mixing gas supply line for flowing the supply gas in which a plurality of types of gases are mixed to the tank module, and a mixing gas concentration analysis unit for measuring the concentration of the supply gas flowing through the mixing gas supply line composed,
The control unit is configured to determine whether the mixing module is normally operated by comparing the concentration of the supply gas measured by the mixing gas concentration analyzer with a preset reference concentration range. 4. The method of claim 3,
The mixing module includes a mixing gas supply line for flowing the supply gas in which a plurality of types of gas are mixed to the tank module, and a mixing gas pressure measuring unit for measuring the pressure of the supply gas flowing through the mixing gas supply line composed,
The control unit is configured to determine whether the mixing module is normally operated by comparing the pressure of the supply gas measured by the mixing gas pressure measuring unit with the pressure inside the tank module. 4. The method of claim 3,
The tank module is configured to include a tank module pressure measuring unit for measuring the gas pressure inside the tank module,
The control unit is configured to determine whether the tank module is normally operated by comparing the pressure of the supply gas measured by the tank module pressure measuring unit with a preset reference pressure range. 4. The method of claim 3,
The supply module is configured to include a tank gas supply line for flowing the supply gas stored in the tank module to the gas consumer, and a tank gas concentration analyzer for measuring the concentration of the supply gas flowing through the tank gas supply line,
The control unit is configured to determine whether the supply module is normally operated by comparing the concentration of the supply gas measured by the tank gas concentration analyzer with a preset reference concentration range. delete 3. The method of claim 2,
A first valve for opening and closing the mixing module side connection passage of the first connection portion and a second valve for opening and closing the tank module side connection passage of the first connection portion,
The control unit is
The first valve of the first gas mixing supply device is opened and the second valve is closed, and the first valve of the second gas mixing supply device is closed and the second valve is opened, so that the supply gas is supplied to the first gas mixing supply device. Controlling the flow from the mixing module to the tank module of the second gas mixing supply device through the first connection line,
The first and second valves of the first gas mixing and supply device are opened, and the first and second valves of the second gas mixing and supply device are closed, so that the supply gas is supplied to the mixing module of the first gas mixing and supply device. Gas supply system, characterized in that the control so as to flow from the first gas mixing and supply device to the tank module. 3. The method of claim 2,
a third valve for opening and closing the connection passage on the tank module side of the second connection portion; and a fourth valve for opening and closing the connection passage on the supply module side of the second connection portion;
The control unit is
The third valve of the first gas mixing supply device is opened and the fourth valve is closed, and the third valve of the second gas mixing supply device is closed and the fourth valve is opened, so that the supply gas is supplied to the first gas mixing supply device. Controlling the flow from the tank module to the supply module of the second gas mixing supply device through the second connection line,
The third and fourth valves of the first gas mixing and supply device are opened, and the third and fourth valves of the second gas mixing and supply device are closed, so that the supply gas is supplied to the tank module of the first gas mixing and supply device. Gas supply system, characterized in that the control to flow to the supply module of the first gas mixing and supply device. 3. The method of claim 2,
and a fifth valve for opening and closing the supply module side connection passage of the third connection part,
The control unit is
The first gas in a state in which the first gas consumer connection part to which the first gas mixing supply device and the gas consumer are connected is closed and the second gas consumer connection part to which the second gas mixing supply device and the gas consumer are connected is opened. By opening the fifth valve of the mixing and supplying device and closing the fifth valve of the second gas mixing and supplying device, the supply gas flows from the supply module of the first gas mixing and supplying device to the third connection line, and the second gas Control to be supplied to the gas consumer through the destination connection part,
When the first gas consumer connection part is opened and the second gas consumer connection part is closed, the fifth valve of the first gas mixing supply device is opened and the fifth valve of the second gas mixing supply device is closed, and the supply gas is Gas supply system, characterized in that the control so as to be supplied from the supply module of the first gas mixing and supply device to the gas consumer through the first gas consumer connection part. 5. The method of claim 4,
The mixing module includes a mixing gas supply line valve for opening and closing the mixing gas supply line, a mixing gas vent line branched from the mixing gas supply line and connected to the outside, and a mixing gas vent line for opening and closing the mixing gas vent line Consists of a valve,
When the concentration of the supply gas measured by the mixing gas concentration analyzer satisfies a preset reference concentration range, the control unit opens the mixing gas supply line valve and closes the mixing gas vent line valve, and in the mixing gas concentration analysis unit When the measured concentration of the supply gas does not satisfy the reference concentration range, the gas supply system, characterized in that the mixing gas supply line valve is closed but the mixing gas vent line valve is opened. 6. The method of claim 5,
The mixing module includes a mixing gas supply line valve for opening and closing the mixing gas supply line, a mixing gas vent line branched from the mixing gas supply line and connected to the outside, and a mixing gas vent line for opening and closing the mixing gas vent line Consists of a valve,
The control unit, when the pressure of the supply gas measured by the mixing gas pressure measurement unit is equal to or greater than the internal pressure of the tank module, opens the mixing gas supply line valve and closes the mixing gas vent line valve, and in the mixing gas pressure measurement unit When the measured supply gas pressure is less than the internal pressure of the tank module, the gas supply system is configured to close the mixing gas supply line valve and open the mixing gas vent line valve. 13. The method of claim 4 or 12,
The mixing module is configured to include a mixing gas concentration analysis line branched from the mixing gas supply line and connected to the outside, and a mixing gas concentration analysis line valve for opening and closing the mixing gas concentration analysis line,
The mixing gas concentration analysis unit is provided to measure the concentration of the supply gas when the supply gas flows from the mixing gas supply line to the mixing gas concentration analysis line,
The control unit controls whether to measure the concentration of the supply gas through the mixing gas concentration analysis unit by controlling whether the supply gas is supplied to the mixing gas concentration analysis line by controlling the driving of the mixing gas concentration analysis line valve Gas supply system, characterized in that made to. 14. The method of claim 5 or 13,
The mixing module is configured to include a mixing gas pressure measurement line branched from the mixing gas supply line and connected to the outside, and a mixing gas pressure measurement line valve for opening and closing the mixing gas pressure measurement line,
The mixing gas pressure measurement unit is provided to measure the pressure of the supply gas when the supply gas flows from the mixing gas supply line to the mixing gas pressure measurement line,
The control unit, the gas supply system, characterized in that configured to control the operation of the mixing gas pressure measurement line valve to control whether the pressure of the supply gas is measured through the mixing gas pressure measurement unit. 14. The method of claim 12 or 13,
The mixing module, gas supply system, characterized in that it further comprises a mixing gas vent flow rate control unit for controlling the amount of the supply gas discharged through the mixing gas vent line by adjusting the opening degree of the mixing gas vent line. 3. The method of claim 2,
The mixing module includes a plurality of source gas supply lines to which a plurality of different types of source gases are respectively supplied, and a mixing unit in which a plurality of different types of source gases supplied from the plurality of source gas supply lines are mixed to form the supply gas. and a mixing gas supply line connecting the mixing unit and the tank. 3. The method of claim 2,
The supply module is configured to include a tank gas concentration analysis unit for measuring the concentration of a supply gas flowing through a tank gas supply line connecting the tank module and the gas consumer,
The control unit, by comparing the concentration of the supply gas measured by the tank gas concentration analyzer with a preset reference concentration range to determine whether the supply gas supplied to the gas consumer is appropriate, the gas supply system. 8. The method of claim 7,
The supply module includes a tank gas supply line valve for opening and closing the tank gas supply line, a tank gas vent line branched from the tank gas supply line and connected to the outside, and a tank gas vent line for opening and closing the tank gas vent line. Consists of a valve,
When the concentration of the supply gas measured by the tank gas concentration analyzer satisfies a preset reference concentration range, the controller opens the tank gas supply line valve and closes the tank gas vent line valve, and in the tank gas concentration analyzer When the measured concentration of the supply gas does not satisfy the reference concentration range, the tank gas supply line valve is closed but the tank gas vent line valve is opened. 20. The method of claim 7 or 19,
The supply module is configured to include a tank gas concentration analysis line branched from the tank gas supply line and connected to the outside, and a tank gas concentration analysis line valve for opening and closing the tank gas concentration analysis line,
The tank gas concentration analysis unit is provided to measure the concentration of the supply gas when the supply gas flows from the tank gas supply line to the tank gas concentration analysis line,
The control unit is configured to control the operation of the tank gas concentration analysis line valve to control whether the concentration of the supply gas is measured through the tank gas concentration analysis unit. 3. The method of claim 2,
The first gas mixing and supplying device and the second gas mixing and supplying device are modular devices in which the mixing module, the tank module, and the supply module are configured independently and can be coupled to each other. system.

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