KR102168313B1 - Fastening member for electrode plate of plasma chamber - Google Patents

Abstract

The present invention relates to an electrode fastening member of a plasma chamber, and the technical problem to be solved is when the cathode electrode is coupled with the electrode assembly module, the cathode electrode is coupled with the electrode assembly module even when the operator does not directly grip the fastening member. It is to provide a plasma chamber electrode fastening member that can be made.
Accordingly, the plasma chamber electrode fastening member of the present invention is an electrode fastening member of a plasma chamber that couples a cathode electrode of the plasma chamber to an upper electrode assembly module by fastening, comprising: an upper socket mounted on the upper electrode assembly module; A fitting screw for screwing with the upper socket; A resin coupler whose upper end is fitted with the fitting screw; A stud bush screwed to the cathode electrode; And a stud member having a lower portion fixed to the cathode electrode by the stud bush and disposed, and a portion of the upper portion fitted to the resin coupler. Includes.

Description

Plasma chamber electrode fastening member {FASTENING MEMBER FOR ELECTRODE PLATE OF PLASMA CHAMBER}

The present invention relates to an electrode fastening member of a plasma chamber, and more particularly, to a plasma chamber electrode fastening member that integrally fastens a cathode electrode in a plasma chamber with an electrode assembly module.

Plasma chambers used in semiconductor processes are widely used for etching or plasma chemical vapor deposition.

Looking at Patent Document 1, which is a prior art for an etching apparatus among such plasma chambers, Patent Document 1 of Korean Patent Publication No. 10-1514397 (registered on April 16, 2015) discloses technical details for a general plasma chamber. Looking at the general plasma chamber of Patent Document 1, the plasma chamber (reference numeral 10 of Patent Document 1) has a cathode electrode (reference numeral 20 of Patent Document 1) and an anode electrode (reference numeral 30 of Patent Document 1) on the inner upper and lower portions, respectively. ) Is installed, and a vacuum pump (reference numeral 14 of patent document 1) is installed at one side of the chamber (reference numeral 12 of patent document 1) of the plasma chamber (reference numeral 10 of patent document 1) , On the other side of the plasma chamber (reference numeral 10 of Patent Document 1), a gas injection port (reference numeral 16 of Patent Document 1) for injecting reaction gases such as fluorine and nitrogen into the chamber is installed, and the state of high temperature and high pressure For continuous cooling of the plasma chamber exposed to the cathode electrode (reference numeral 20 of Patent Document 1), a cooling water line (reference numeral 18 of Patent Document 1) capable of circulating cooling water is installed.

In such a conventional plasma chamber, a reaction gas is injected into the gas injection port in a vacuum state by the vacuum pump, and then a wafer disposed between the cathode electrode and the anode electrode is etched to perform a semiconductor process.

In such a conventional plasma chamber, since the process proceeds in a plasma state, the internal temperature rises to 300 degrees Celsius, and the reaction ions collide on the surface of the cathode electrode at a high temperature during the etching process, resulting in soldering of the cathode electrode. Contaminants of the same particulate matter are generated, resulting in non-uniform plasma.

Accordingly, the cathode electrode is periodically replaced. One of the various technical solutions for fixing the new cathode electrode is to use the bush assembly for a cathode electrode plate as disclosed in Patent Document 1.

Looking at the bush assembly for a cathode electrode plate of Patent Document 1, the bush assembly for a cathode electrode plate of Patent Document 1 includes a base plate (reference numeral 110 of Patent Document 1) and an upper portion of the base plate (reference numeral 110 of Patent Document 1). A bush (reference numeral 100 of patent document 1) having an extension portion (reference numeral 120 of patent document 1) formed with an inclined portion (reference numeral 122 of patent document 1) and the bush (reference numeral of patent document 1) 100) in the state inserted in the outer circumferential surface to be coupled with the first coupling portion (reference numeral 22a of Patent Document 1) formed in the fastening groove (patent document 1 reference numeral 22). A coupling ring with reference numeral 210) formed therein (reference numeral 200 in Patent Document 1); And an insertion ring (reference numeral 300 of patent document 1) positioned above the coupling ring (reference numeral 200 of patent document 1) and coupled to the bush (reference numeral 100 of patent document 1).

Such a bush assembly for a cathode electrode plate is, as disclosed in Patent Document 1, when the insertion ring (reference numeral 300 of Patent Document 1) is used, the insertion ring (a drawing of Patent Document 1 The reference numeral 300) should be locked to the inclined portion 122 of the bush (reference numeral 100 of Patent Document 1). In this case, since the insertion ring (reference numeral 300 of Patent Document 1) is pressed by the operator's finger during fitting and locking, the insertion ring (reference numeral 300 of Patent Document 1) is an opening (patent document 1 reference numeral 300). Reference numeral 301) opens and then retracts. Here, the insertion ring is manufactured using cerazole, a resin that has very little thermal expansion than metal. Therefore, the insertion ring (reference numeral 300 in Patent Document 1) has a characteristic of a resin having a high strain rate compared to the reference stress when compared to a metal, so that a certain portion of the region facing the opening (reference numeral 301 in Patent Document 1) is fired. Transformation occurs. Accordingly, when the insertion ring (reference numeral 300 of Patent Document 1) is re-inserted after the insertion ring is performed once, the insertion bonding force is weakened by the plastic deformation, so that the insertion ring must be replaced with a new insertion ring.

However, the insertion ring (reference numeral 300 of Patent Document 1), as disclosed in Patent Document 1, is engaged by the operator's hand, so if the fitting does not proceed at once, the operator proceeds to the fitting several times. Due to this, the insertion ring (reference numeral 300 of Patent Document 1) is engaged in a state in which plastic deformation has occurred, and thus the bush (reference numeral 100 of Patent Document 1) and the coupling force are weakened.

In this way, the insertion ring (reference numeral 300 of Patent Document 1) may be detached due to high temperature and vacuum conditions in the plasma chamber, and the insertion ring (reference numeral 300 of Patent document 1) is visually observed when detached. It is so insignificant that it cannot be confirmed, and accordingly, the coupling force between the cathode electrode, the graphite contact part (not shown) and the electrical contact is also slightly weakened, causing a problem in that plasma cannot be formed with the set power value when driving the plasma. do.

The reason for causing this problem is that, as described above, the insertion ring (reference numeral 300 of Patent Document 1) is gripped by an operator's hand and used by directly fitting.

Therefore, the fastening member for coupling the cathode electrode to the electrode assembly module (not shown) is a situation in which a technical solution capable of coupling the cathode electrode to the electrode assembly module even when not directly gripped by an operator's hand is required.

On the other hand, looking at Patent Document 2, which is a prior patent document relating to coupling the cathode electrode with the electrode assembly module as described above, the cam fixing electrode of Korean Patent Publication No. 10-1708060 (registered on February 13, 2017), which is Patent Document 2 The clamp inserts a camshaft (reference numeral 207 of Patent Document 2) into a backing plate borehole (patent document 2 reference numeral 211) formed laterally, and a hole in the camshaft (patent document 2 reference numeral 207) (patent document 2, the camshaft (not shown in Patent Document 2) in the state of inserting the upper rounded head (not shown in Patent Document 2) of the stud (reference numeral 205 of Patent Document 2) in the reference numerals R1 and R2. A technical solution is disclosed in which the upper round head of the stud (reference numeral 205 of Patent Document 2) is fixed by a camshaft (reference numeral 207 of Patent Document 2) by rotating the reference numeral 207 with a hexagon wrench.

As described above, in Patent Document 2, the camshaft (reference numeral 207 of Patent Document 2) is inserted in the state where the upper round head of the stud (reference numeral 205 of Patent Document 2) is inserted into the hole of the cam shaft (reference numeral 207 of Patent Document 2). ), the electrode (patent document 2 reference numeral 201) can be easily coupled to the backing plate (patent document 2 reference numeral 203).

Here, looking at the cross section of the camshaft (reference numeral 207 of Patent Document 2) with reference to Figure 4b of Patent Document 2, the camshaft (reference numeral 207 of Patent Document 2) is a stud (reference numeral of Patent Document 2) by rotation In order to be fastened with the upper round head of 205), processing must be made in the form of overlapping two radii, and it is manufactured with a processing error accordingly.

In addition, the camshaft (reference numeral 207 of Patent Document 2) and the stud (reference numeral 205 of Patent Document 2) are formed of a metal material such as stainless steel, as disclosed in Patent Document 2, and in a state in which metal to metal is in contact. As it slides, wear is essentially caused.

In this way, the camshaft (reference numeral 207 of Patent Document 2) and the stud (reference numeral 205 of Patent Document 2) have an inconsistent coupling precision due to the machining error and the wear, and thus the coupling force is not constant. Essentially, by compensating for a certain amount of the coupling force by using the disk spring stack (reference numeral 215 of Patent Document 2), the manufacturing cost and installation cost for the disk spring stack (reference numeral 215 of Patent Document 2) increase. have.

In addition, since the camshaft (reference numeral 207 of Patent Document 2) has the above processing error, it is necessary to inspect whether processing has been performed within the standard deviation after manufacturing. The shape is very complex and the method of measuring quality is also very Because of its complexity, there arises a problem that the manufacturing cost increases. Moreover, since the camshaft (reference numeral 207 of Patent Document 2) has to be discarded when used for a certain number of times or more due to the abrasion, the manufacturing cost increases accordingly.

Therefore, the fastening member for coupling the cathode electrode to the electrode assembly module (not shown) needs a technical solution capable of coupling the cathode electrode to the electrode assembly module without using a disk spring stack (reference numeral 215 in Patent Document 2). Do.

In addition, the fastening member that couples the cathode electrode with the electrode assembly module (not shown) combines the cathode electrode with the electrode assembly module without using a complicated processing method and quality measurement method such as a camshaft (patent document 2 reference numeral 207). There is a need for a technical solution that can be made.

Further, the fastening member that couples the cathode electrode to the electrode assembly module (not shown) needs a technical solution that prevents wear between metals so that the number of uses can be extended.

Korean Patent Publication No. 10-1514397 (registered on April 16, 2015) Korean Registered Patent Publication No. 10-1708060 (registered on February 13, 2017)

The technical problem of the present invention for solving the above problems is a plasma chamber electrode capable of combining the cathode electrode with the electrode assembly module even when the operator does not directly grip the fastening member when combining the cathode electrode with the electrode assembly module. It is to provide a fastening member.

In addition, another technical object of the present invention is to provide a plasma chamber electrode fastening member capable of coupling the cathode electrode to the electrode assembly module without using a disk spring stack when the cathode electrode is coupled to the electrode assembly module.

In addition, another technical problem of the present invention is a plasma chamber capable of coupling the cathode electrode to the electrode assembly module without using a complex processing method and a quality measurement method like a conventional camshaft when combining the cathode electrode with the electrode assembly module. It is to provide an electrode fastening member.

In addition, another technical problem of the present invention is to provide a plasma chamber electrode fastening member that prevents wear between metals and extends the number of uses when a cathode electrode is coupled with an electrode assembly module.

The plasma chamber electrode fastening member of the present invention for achieving the above technical problem is an electrode fastening member of the plasma chamber that couples the cathode electrode of the plasma chamber and the upper electrode assembly module by fastening, in a tubular shape in which a tube hole is formed. An upper socket formed and having a female threaded region formed in an upper portion of the tube hole, and seated on the upper electrode assembly module; A binding head formed in a cylindrical shape, and a male threaded region extending from the binding head to the lower end and screwed with the female threaded region of the upper socket is formed on the outer surface, and an insertion hole penetrating the upper surface from the lower surface A fitting screw including a threaded portion extending outward from an upper region of the insertion hole to form a first locking protrusion; A male fitting portion in which a first central hole penetrating in the longitudinal direction is formed, a first fitting jaw is formed at an upper end to be fitted with the first locking jaw, and a first incision groove is formed in a partial region, and the A second central hole is formed extending downward from the male fitting part and communicating with the first central hole, a second incision groove is formed in a partial area, and an upper partial area of the second central hole is extended outwardly and is caught. A resin coupler including a female fitting portion in which a jaw is formed; A stud bush having a stud hole penetrating in the longitudinal direction, a male threaded region formed on an outer surface thereof, screwed to the cathode electrode, and extending a portion of the lower region of the stud hole to form a second locking jaw; And, a round head that is fitted to the extension locking jaw of the resin coupler, a support portion extending downward from the round head, and protruding to a diameter larger than the outer diameter of the support portion and bound to the second locking jaw. A stud member including a stud engaging portion; Includes.

In this case, when the fitting screw is fitted with the resin coupler and rotates, the resin coupler may be moved in a direction above the tube hole of the upper socket so that the upper socket is in close contact with the upper electrode assembly module.

Here, the resin coupler may be formed such that a lower portion of the female fitting portion has a diameter larger than the diameter of the tubular hole so that a lower portion of the female fitting portion presses the round head when inserted into the tubular hole.

On the other hand, the resin coupler is Torlon, Vespel, Celcon, Delrin, Teflon, Arlon, fluoropolymer, aceta Is, polyamide, polyimide , Polytetrafluoroethylene, and polyether ether ketone, and the stud member is formed of stainless steel, so that the stud member and the resin coupler are fitted between different materials. Can be formed.

In the present invention, when the cathode electrode is coupled to the upper electrode assembly module, the cathode electrode is coupled to the cathode electrode upper electrode assembly module in a state in which the stud member is coupled to the cathode electrode, so that the cathode electrode is not directly gripped by the operator. It has the effect of being able to combine with the electrode assembly module.

In addition, according to the present invention, when the cathode electrode is coupled to the upper electrode assembly module, the cathode electrode can be coupled to the upper electrode assembly module without using a conventional disk spring stack, thereby reducing manufacturing cost.

In addition, in the present invention, when the cathode electrode is coupled to the upper electrode assembly module, the cathode electrode can be coupled to the electrode assembly module without using a complicated processing method and quality measurement method like a conventional camshaft, thereby reducing manufacturing cost. Will be displayed.

In addition, in the present invention, when the cathode electrode is coupled to the upper electrode assembly module, since the stud member is coupled to the resin coupler, the number of uses is extended by preventing metal wear due to contact between different materials. .

1 is a configuration diagram of a plasma chamber for etching in which a plasma chamber electrode fastening member is used according to an embodiment of the present invention.
FIG. 2 is a plan view of a cathode electrode in the upper electrode assembly shown in FIG. 1;
3 is an exploded perspective view of an electrode fastening member of a plasma chamber according to an embodiment of the present invention.
4 is an exploded cross-sectional view of an electrode fastening member of the plasma chamber shown in FIG. 3;
5 is a flow chart for an electrode assembly method using a plasma chamber electrode fastening member according to an embodiment of the present invention.
6 is a cross-sectional view of a state in which the stud bush and the stud member shown in FIG. 4 are coupled to the cathode electrode.
Figure 7 is a cross-sectional view of a state in which the fitting screw is screwed to the upper socket shown in Figure 4;
8 is a cross-sectional view of a state in which a resin coupler is fastened to the fitting screw shown in FIG. 7;
9 is a partial cross-sectional view showing a state in which the plasma chamber electrode fastening member is disposed under the backing plate while being coupled to the cathode electrode in order to couple the casing electrode shown in FIG. 3 to the backing plate.
10 is a partial cross-sectional view showing a state in which the stud member shown in FIG. 9 is fitted with the resin coupler so that the cased electrode is in close contact with the backing plate.
FIG. 11 is a partial cross-sectional view showing a state in which a cathode electrode and a backing plate are strongly coupled by rotating in a screwed state of the fitting screw shown in FIG. 10;

Hereinafter, embodiments for carrying out the present invention will be described with reference to the accompanying drawings. In this case, when it is said that a certain part "includes" a certain component throughout the specification, this is unless otherwise stated. It is considered to mean that other components may be further included rather than controlling other components. In addition, terms such as "... unit" described in the specification mean a unit that processes at least one function or operation when describing electronic hardware or electronic software, and when describing a mechanical device, one part, function, It is considered to mean a use, point or drive element. In addition, in the following, the same or similar configurations will be described using the same reference numerals, and overlapping descriptions of the same components will be omitted.

First, prior to describing the plasma chamber electrode fastening member according to an embodiment of the present invention, a plasma chamber in which the plasma chamber electrode fastening member according to an embodiment of the present invention is used will be described.

1 is a configuration diagram of a plasma chamber for etching in which a plasma chamber electrode fastening member is used according to an embodiment of the present invention. FIG. 2 is a plan view of a cathode electrode in the upper electrode assembly illustrated in FIG. 1.

1 and 2, the plasma chamber in which the plasma chamber electrode fastening member according to an embodiment of the present invention is used includes an upper electrode assembly module 1a and a wafer 1b to which the cathode electrode 2 is coupled. The lower electrode assembly module 1d is mounted and the anode electrode 1c is coupled, the chamber 1e for coupling the upper electrode assembly module 1a and the lower electrode assembly module 1d in a sealed state, and the chamber 1e ) And a vacuum pump (1f) for draining air from the chamber (1e), a gas inlet (1g) for injecting a reaction gas, and a cooling water line (1h) for cooling the upper electrode assembly module (1a). do.

In such a plasma chamber, the inside of the chamber 1e is vacuumed by the vacuum pump 1f, and the reaction gas is injected into the chamber 1e through the gas inlet 1g, and the cathode electrode 2 and the anode electrode ( After applying a high voltage to 1c) to form a plasma atmosphere, a process of etching the wafer 1b is performed while the upper electrode assembly module 1a is cooled through the cooling water line 1h.

In this case, the upper electrode assembly module 1a is formed by combining dozens of parts by function, and among these parts, the cathode electrode 2 of the upper electrode assembly module 1a is formed in a circular plate shape, A plurality of fine holes are formed to discharge reaction gas, and a plurality of fastening grooves 2a into which a plasma chamber electrode fastening member according to an embodiment of the present invention is inserted are formed along a circular outer periphery. In this case, the plasma chamber electrode fastening member according to an embodiment of the present invention is coupled to the fastening groove 2a of the cathode electrode 2 to enable fastening with the backing plate 1k of the upper electrode assembly module 1a. Will proceed.

Hereinafter, a description will be given of a plasma chamber electrode fastening member according to an embodiment of the present invention used when the upper electrode assembly module 1a and the cathode electrode 2 in the plasma chamber are coupled as described above.

3 is an exploded perspective view of an electrode fastening member of a plasma chamber according to an embodiment of the present invention. 4 is an exploded cross-sectional view of an electrode fastening member of the plasma chamber shown in FIG. 3. 5 is a flow chart illustrating an electrode assembly method using a plasma chamber electrode fastening member according to an embodiment of the present invention. 6 is a cross-sectional view of a state in which the stud bush and the stud member shown in FIG. 4 are coupled to the cathode electrode. 7 is a cross-sectional view of a state in which the fitting screw is screwed to the upper socket shown in FIG. 4. 8 is a cross-sectional view of a state in which a resin coupler is fastened to the fitting screw shown in FIG. 7. 9 is a partial cross-sectional view illustrating a state in which the plasma chamber electrode fastening member is disposed under the backing plate while being coupled to the cathode electrode in order to couple the casing electrode shown in FIG. 3 to the backing plate. 10 is a partial cross-sectional view showing a state in which the stud member shown in FIG. 9 is fitted with the resin coupler so that the cased electrode is in close contact with the backing plate. FIG. 11 is a partial cross-sectional view showing a state in which a cathode electrode and a backing plate are strongly coupled by rotating in a state in which the fitting screw shown in FIG. 10 is screwed.

3 to 11, the plasma chamber electrode fastening member according to an embodiment of the present invention includes an upper socket 10, a fitting screw 20, a resin coupler 30, a stud bush 40, and , And a stud member 50.

The upper socket 10 includes an upper nut part 11 and a tubular part 12.

The upper nut portion 11 is formed in a hexagonal nut shape, and a female threaded region 11a penetrating in the longitudinal direction is formed. Here, the female threaded region 11a is screwed with the male threaded region 22a of the fitting screw 20 to be described later. Here, it goes without saying that the shape of the upper nut part 11 is not limited to a hexagonal nut shape and may be modified into various shapes for fastening. This upper nut part 11 may be rotated by a female wrench tool (not shown) so that the upper socket 10 is pressed against the backing plate 1k.

The tubular portion 12 is formed extending downward from the upper nut portion 11, and a tubular hole 12a communicating with the female threaded region 11a is formed. Here, a resin coupler 30 to be described later is inserted into the tube hole 12a. In addition, the upper region of the tube hole 12a is formed by extending the female threaded region 11a.

The upper socket 10 is inserted into the bolt hole 1k1 of the backing plate 1k, presses the backing plate 1k, and provides a space in which the fitting screw 20, which will be described later, is screwed.

The fitting screw 20 includes a binding head 21 and a threaded portion 22.

The binding head 21 is formed in the same hexagonal cylindrical shape as the head of a hexagonal bolt. This binding head 21 is used in the case of rotating the fitting screw 20 by combining with the female wrench tool 3 to be described later. Here, it goes without saying that the shape of the binding head 21 is not limited to a hexagonal bolt shape, and may be variously modified into a straight shape, a cross shape, and a female shape.

The threaded portion 22 is formed extending from the binding head 21 to the lower end. In addition, the threaded portion 22 has a male threaded region 22a screwed with the female threaded region 11a of the upper socket 10 on the outer surface. In addition, the threaded portion 22 is formed with an insertion hole 22b penetrating the upper surface from the lower surface, and a first locking protrusion 22c extending outwardly in the upper region of the insertion hole 22b is formed. Here, the first engaging jaw (22c) is fitted with the first fitting jaw (31c) of the male fitting portion (31) to be described later to fit the fitting screw (20).

Such a fitting screw 20 provides a region in which the resin coupler 30 to be described later can be fitted in a state of being screwed with the upper socket 10 to be described later.

The resin coupler 30 includes a male fitting part 31 and a female fitting part 32.

In the male fitting portion 31, a first central hole 31a penetrating in the longitudinal direction is formed, and a first cutting groove 31b is formed in a partial region. In this case, the first central hole 31a and the first cutting groove 31b are bent inward when the male fitting portion 31 is fitted, so that they can be easily inserted during the fitting. In addition, the male fitting portion 31 is formed with a first fitting jaw (31c) protruding outward on the upper end. Here, the first fitting jaw (31c) is fitted with the first locking jaw (22c) of the screw portion 22, the resin coupler 30 is fitted with the fitting screw (20).

The female fitting portion 32 is formed extending downward from the male fitting portion 31. In this case, in the female fitting portion 32, a second central hole 32b communicating with the first central hole 31a of the male fitting portion 31 is formed, and a second incision groove 32c is formed in a partial region. . Here, in the second central hole 32b, the round head 51 of the stud member 50 to be described later is inserted, and the female fitting portion 32 is opened to the outside when it is fitted with the round head portion 51. This serves to facilitate the insertion of the round head 51. In addition, the female fitting portion 32 is further formed with an extension engaging jaw 32d that is fitted with a round head portion 51 to be described later by extending a portion of the upper portion of the second central hole 32b to the outside.

In addition, the female fitting portion 32 is formed to have a diameter larger than the diameter of the tubular hole 12a of the tubular portion 12 in a lower portion of the tubular portion 12, but is formed to increase the diameter toward the lower portion, so that the female fitting portion 32 is When inserted into the hole 12a, a portion of the lower portion of the female fitting portion 32 is formed to press the round head portion 51 of the stud member 50 to be described later. Therefore, when the stud member 50 is inserted into the inner expansion engaging jaw 32d of the female fitting portion 32, the case where the female fitting portion 32 is inserted into the inner region of the tubular portion 12 is strongly pressed. The fitting bond is formed in the state.

Here, the resin coupler 30 as described above is Torlon, Vespel, Celcon, Delrin, Teflon, Arlon, fluoropolymer, aceta Is , Polyamide, polyimide, polytetrafluoroethylene, and at least one material selected from polyetheretherketone. Therefore, when the round head 51 of the metal stud member 50 to be described later comes into contact, wear does not proceed due to the contact between the metal and the resin. In addition, since the resin coupler 30 is made of the above-described material, shape deformation by heat does not proceed when the etching process is performed at a temperature of 300 degrees Celsius.

The resin coupler 30 is fitted with the stud member 50 to be described later in a state of being fitted to the fitting screw 20, thereby constraining the stud member 50.

The stud bush 40 is formed with a stud hole 41 penetrating in the longitudinal direction, a male threaded region 42 is formed on the outer surface, and a part of the lower region of the stud hole 41 is expanded to form a second locking jaw ( 43) is formed. In addition, the stud bush 40 has a third locking tick 44 formed in the upper region, and the second locking jaw 44 provides a region in which the lower end of the resin coupler 30 can be seated.

The stud bush 40 is screwed to the cathode electrode 2, and the stud member 50, which will be described later, is integrally coupled to the cathode electrode 2.

The stud member 50 includes a round head portion 51, a support portion 52, and a stud engaging portion 53.

The round head 51 is formed in a ball shape. This round head 51 is fitted into the second central hole 32b of the resin coupler 30.

The support portion 52 extends downward from the round head portion 51. In this case, the support portion 52 may be formed to extend to a diameter smaller than the diameter of the round head portion 51.

The stud engaging portion 53 is formed to have a larger diameter than the outer diameter of the support portion 52 and is attached to the second engaging jaw 43 of the stud portion.

In such a stud member 50, in a state in which the stud engaging portion 53 is attached to the second engaging jaw 43 of the stud bush 40, the round head 51 is the second central hole of the resin coupler 30 ( By fitting to 32b), the cathode electrode 2 is coupled to the backing plate 1k.

Here, the stud member 50 is formed of stainless steel, so that wear does not occur when the resin coupler 30 made of a resin material and the resin coupler 30 made of a resin material are fitted by contact with each other.

Hereinafter, a flow chart for an electrode assembly method using a plasma chamber electrode fastening member according to an embodiment of the present invention.

As shown in Figure 5, the electrode assembly method using the plasma chamber electrode fastening member according to an embodiment of the present invention is a stud member and cathode electrode coupling step (S10), the upper socket and the fitting screw fastening step (S20), A resin coupler inserting step (S30), a backing plate close contacting step (S40), a stud member inserting step (S50), and a fitting screw adjustment step (S60).

First, in the coupling step (S10) of the stud member and the cathode electrode, as shown in FIG. 6, the stud bush 40 is screwed with the fastening groove 2a of the cathode electrode 2, the stud bush 40 Before screwing with the fastening groove 2a of the cathode electrode 2, the stud engaging portion 53 of the stud member 50 is coupled to the second engaging protrusion 43 of the stud bush 40. Then, the stud member 50 is integrally fixed with the cathode electrode 2 by the stud bush 40, and a plurality of fastening grooves formed in the cathode electrode 2 in the step S10 of combining the stud member and the cathode electrode. (2a) Each will be implemented.

Next, in the fastening step (S20) of the upper socket and the fitting screw, as shown in FIG. 7, the threaded portion 22 of the fitting screw 20 is screwed into the female screw region 11a of the upper socket 10. .

Next, in the resin coupler insertion step (S30), as shown in FIG. 8, the resin coupler 30 is inserted through the tube hole 12a of the upper socket 10, and the first fitting jaw of the resin coupler 30 (31c) is fitted to the first locking projection (22c) of the screw portion (22).

Next, in the backing plate close step (S40), as shown in FIG. 9, the upper socket 10 to which the fitting screw 20 and the resin coupler 30 are fitted is inserted into the hole of the backing plate 1k. After that, the operator puts the female wrench tool 3 in close contact with the binding head 21 of the fitting screw 20.

Next, in the stud member insertion step (S50), as shown in FIG. 10, the operator pushes the cathode electrode 2 on which the stud member 50 is mounted upward to the round head 51 of the stud member 50 It is fitted into the second central hole (32b) of the fitting screw (20). In this case, the fitting screw 20 is screwed with the upper socket 10, and the threaded portion 22 of the fitting screw 20 is screwed to the tube body 12 of the upper socket 10, The coupler 30 is disposed so as to be exposed to the lower side of the tube body 12 for a predetermined length.

Next, in the fitting screw adjustment step (S60), as shown in FIG. 11, in a state in which the operator puts the female wrench tool 3 in close contact with the binding head 21 of the fitting screw 20, the female wrench tool This is a step of moving the fitting screw 20 upward of the upper socket 10 by rotating the fitting screw 20 by rotating (3). Then, the upper socket 10 is strongly adhered to the backing plate 1k, and the resin coupler 30 fitted to the fitting screw 20 is exposed to the outside of the resin coupler 30. ), and the female fitting part 32 of the resin coupler 30 is inserted into the tube hole 12a while the female fitting part 32 of the resin coupler 30 has a larger diameter than the tube hole 12a. ) By strongly pressing the round head portion 51, the stud member 50 is strongly fitted and fixed with the female fitting portion 32. Accordingly, the cathode electrode 2 is maintained in a coupled state with the upper electrode assembly module 1a.

As described above, in the plasma chamber electrode fastening member according to an embodiment of the present invention, when the cathode electrode 2 is coupled to the upper electrode assembly module 1a, the stud member 50 is coupled to the cathode electrode 2 Since the cathode electrode 2 is coupled to the upper electrode assembly module 1a, the cathode electrode 2 can be coupled to the electrode assembly module even when the operator does not directly grip the fastening member.

In addition, in the plasma chamber electrode fastening member according to an embodiment of the present invention, when the cathode electrode 2 is coupled to the upper electrode assembly module 1a, the cathode electrode 2 is connected to the upper electrode without using a conventional disc spring stack. Since it can be coupled to the assembly module (1a), the effect of reducing the manufacturing cost is exhibited.

In addition, the plasma chamber electrode fastening member according to an embodiment of the present invention, when the cathode electrode 2 is coupled to the upper electrode assembly module 1a, without using a complicated processing method and quality measurement method like a conventional camshaft. Since the cathode electrode 2 can be coupled to the electrode assembly module, the manufacturing cost is reduced.

In addition, the plasma chamber electrode fastening member according to an embodiment of the present invention, when the cathode electrode 2 is coupled to the upper electrode assembly module, the stud member 50 is coupled to the resin coupler 30, so contact between different materials As a result, the number of times of use is extended by preventing the occurrence of intermetallic wear.

As described above, in the present invention, specific matters such as specific components, etc., and limited embodiments and drawings have been described, but this is provided only to help a more general understanding of the present invention, and the present invention is not limited to the above embodiments. , If a person of ordinary skill in the field to which the present invention belongs, various modifications and variations are possible from these descriptions.

Therefore, the spirit of the present invention is limited to the described embodiments and should not be defined, and all things that are equivalent or equivalent to the claims as well as the claims to be described later belong to the scope of the invention. .

1a: upper electrode assembly module 1b: wafer
1c: anode electrode 1d: lower electrode assembly module
1e: chamber 1f: vacuum pump
1f: gas inlet 1h: cooling water line
1k: backing plate 2: cathode electrode
2a: fastening groove 3: female wrench tool
10: upper socket 11: upper nut part
11a: female thread area 12: tube body
12a: pipe hole 20: fitting screw\
21: binding head 22: threaded portion
22a: male thread area 22b: insertion hole
22c: first locking jaw 30: resin coupler\
31: male fitting 31a: first central hall
31b: first incision groove 31c: first fitting jaw
32: female fitting part 32b: second central hole
32c: second incision groove 32d: extended jaw
40: stud bush 41: stud hole
42: male threaded region 43: second locking jaw
44: third jamming tick 50: stud member
51: round head 52: support base
53: stud locking part

Claims (4)

In the electrode fastening member of the plasma chamber for coupling the cathode electrode of the plasma chamber and the upper electrode assembly module by fastening,
An upper socket formed in a tubular shape in which a tubular hole is formed, a female threaded region is formed in an upper part of the tubular hole, and seated on the upper electrode assembly module;
A binding head formed in a cylindrical shape, and a male threaded region extending from the binding head to the lower end and screwed with the female threaded region of the upper socket is formed on the outer surface, and an insertion hole penetrating the upper surface from the lower surface A fitting screw including a threaded portion extending outward from an upper region of the insertion hole to form a first locking protrusion;
A male fitting portion in which a first central hole penetrating in the longitudinal direction is formed, a first fitting jaw is formed at an upper end to be fitted with the first locking jaw, and a first incision groove is formed in a partial region, and the A second central hole is formed extending downward from the male fitting part and communicating with the first central hole, a second incision groove is formed in a partial area, and an upper partial area of the second central hole is extended outwardly and is caught. A resin coupler including a female fitting portion in which a jaw is formed;
A stud bush having a stud hole penetrating in the longitudinal direction, a male threaded region formed on an outer surface thereof, screwed to the cathode electrode, and extending a portion of the lower region of the stud hole to form a second locking jaw; And,
A round head that is fitted to the upper extension jaw of the resin coupler, a support portion extending downward from the round head, and a stud protruding to a diameter larger than the outer diameter of the support portion and being bound to the second locking jaw A stud member including a locking portion; Plasma chamber electrode fastening member comprising a.
The method of claim 1,
Plasma chamber electrode, characterized in that when the fitting screw is fitted with the resin coupler and rotates, the resin coupler is moved in a direction above the tube hole of the upper socket so that the upper socket is in close contact with the upper electrode assembly module. Fastening member.
The method of claim 1,
The resin coupler is characterized in that the lower part of the female fitting part is formed to have a diameter larger than the diameter of the tubular hole, and when inserted into the tubular hole, the lower part of the female fitting part presses the round head. Chamber electrode fastening member.
The method of claim 1,
The resin coupler is Torlon, Vespel, Celcon, Delrin, Teflon, Arlon, fluoropolymer, aceta Is, polyamide, polyimide, poly It is formed by including at least one material selected from tetrafluoroethylene, and polyetheretherketone,
Wherein the stud member is formed of stainless steel, wherein the stud member and the resin coupler form a fitting bond between different materials.

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