KR102132212B1 - Method and Apparatus for Determining of Plasma State - Google Patents

Abstract

The present invention relates to a method and a device for diagnosing a plasma state. The method comprises the steps of: obtaining optical emission spectroscopy (OES) data from an OES device; extracting OES data converged to a selection condition from the obtained OES data and combining the extracted OES data; converting the combined OES data into image data; and diagnosing a plasma state through analysis of the image data. Other embodiments of the present invention may also be applied.

Description

Method and apparatus for diagnosing plasma state{Method and Apparatus for Determining of Plasma State}

The present invention relates to a method and apparatus for diagnosing plasma conditions.

In order to monitor plasma processes such as semiconductor processes and display processes, optical emission spectroscopy (OES) sensing devices are generally used. The optical emission analysis sensing device acquires OES data having a pair of wavelength values and intensity values for a spectrum of unique light generated in a plasma process.

The plasma condition diagnosis apparatus monitors the plasma process using only the spectral data of some wavelengths from the obtained OES data. However, when only the spectral data of some wavelengths is used as described above, a change in data other than the selected spectral data of some wavelengths cannot be sensed, resulting in inaccurate monitoring results of the plasma process.

Embodiments of the present invention for solving such a conventional problem relates to a plasma state diagnosis method and apparatus capable of converting at least one OES data into image data and diagnosing a plasma state using RGB values of the image data .

Plasma state diagnosis method according to an embodiment of the present invention, receiving OES data obtained from an optical emission spectroscopy (OES) device, extracting OES data converging to a selection condition from the OES data, and extracting the extracted OES data And a step of combining, converting the combined OES data into image data, and diagnosing a plasma state through analysis of the image data.

In addition, the step of converting to image data is characterized in that the step of converting the combined OES data to the image data having a RGB (Red, Green, Blue) value.

In addition, after the step of receiving the OES data, it is characterized in that it further comprises the step of determining whether or not the selection condition has been set, and setting the selection condition if the selection condition is not set.

In addition, the step of combining OES data includes: checking the wavelength and intensity values of the spectrum included in the OES data, grouping the OES data in units of wavelengths set based on the wavelength value, and the spectrum by group And calculating the combined value of the OES data included in each group by combining the intensity values of.

In addition, the step of calculating the combined value of the OES data is characterized in that the step of calculating any one of the sum, average value, median value, maximum value and minimum value of the intensity value for each group as the combination value.

In addition, it characterized in that it further comprises the step of calculating the mutual ratio value of the combination value calculated for each group.

In addition, the step of converting the image data comprises the steps of: setting the RGB value to a value derived by sequentially normalizing the mutual ratio values, and generating the image data based on the set RGB values. Is done.

In addition, the step of converting to image data includes the steps of setting the RGB value to a value derived by normalizing the mutual ratio value for each wavelength for a spectrum and generating the image data based on the set RGB value. It is characterized by.

In addition, the plasma state diagnostic apparatus according to an embodiment of the present invention, the communication unit for performing communication with the optical emission spectroscopy (OES) device and the OES data received from the OES device to extract the OES data converging to the selection condition, the It characterized in that it comprises a control unit for diagnosing the plasma state after converting the extracted OES data into image data by combining.

In addition, the control unit is characterized in that for converting the combined OES data to the image data having an RGB (Red, Green, Blue) value.

In addition, the control unit is characterized in that if the selection condition is not set, the selection condition is set.

In addition, the control unit checks the wavelength value and intensity value of the spectrum included in the OES data, groups the OES data in a wavelength unit set based on the wavelength value, and combines the intensity values of the spectrum for each group. It is characterized in that a combination value of the OES data included in the group is calculated.

In addition, the control unit is characterized in that for each group, the sum of the intensity value, the average value, the median value, the maximum value and the minimum value of any one of the value to calculate the combination value.

In addition, the controller calculates the mutual ratio value of the combination value calculated for each group, and generates the image data based on the RGB value set as a value derived by sequentially normalizing the mutual ratio value. do.

In addition, the control unit calculates a mutual ratio value of the combination value calculated for each group, and normalizes the mutual ratio value for each wavelength for a spectrum to generate the image data based on the RGB value set as a derived value. It is characterized by.

As described above, the method and apparatus for diagnosing plasma conditions according to the present invention converts at least one OES data into image data, and checks changes in the entire wavelength data in real time using RGB values of the image data, thereby reducing data of a small capacity. There is an effect that can diagnose the plasma state.

1 is a view showing a plasma state diagnosis system according to an embodiment of the present invention.
2 is a view showing a main configuration of a diagnostic device for diagnosing a plasma condition according to an embodiment of the present invention.
3 is a flowchart illustrating a method of diagnosing a plasma condition according to an embodiment of the present invention.
4 is a screen example showing a result of analyzing OES data corresponding to a set condition according to an embodiment of the present invention.
5 to 8 are screen example views illustrating a method of combining OES data according to an embodiment of the present invention.
9 is a screen example for explaining a method of converting the combined OES data into image data according to an embodiment of the present invention.
10 is a screen example showing image data converted from OES data according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION The detailed description set forth below, in conjunction with the accompanying drawings, is intended to describe exemplary embodiments of the invention, and is not intended to represent the only embodiments in which the invention may be practiced. In the drawings, parts not related to the description may be omitted to clearly describe the present invention, and the same reference numerals may be used for the same or similar elements throughout the specification.

In an embodiment of the present invention, expressions such as “or” and “at least one” may represent one of the words listed together, or a combination of two or more. For example, “A or B”, “at least one of A and B” may include only one of A or B, and may include both A and B.

1 is a view showing a plasma state diagnosis system according to an embodiment of the present invention.

Referring to FIG. 1, the system 10 according to the present invention includes a plasma device 100, an optical emission spectroscopy (OES) device 150, and a diagnostic device 200.

The plasma device 100 is a device that uses a gas such as argon gas, oxygen gas, or hydrogen gas for forming plasma, and performs a plasma process such as etching a semiconductor substrate by injecting a gas at a predetermined flow rate into a chamber (not shown). do.

The OES apparatus 150 is connected to the plasma apparatus 100 and acquires an optical signal spectrum from plasma formed inside the chamber while the plasma process is performed by the gas injected into the plasma apparatus 100. The OES device 150 acquires a pair of wavelength and intensity values for the obtained spectrum as OES data. The OES device 150 transmits the acquired OES data to the diagnosis device 200.

The diagnostic device 200 checks the wavelength and intensity values for the optical signal spectrum through analysis of OES data. The main operation of the diagnostic apparatus 200 will be described in detail with reference to FIG. 2 below. 2 is a view showing a main configuration of a diagnostic device for diagnosing a plasma condition according to an embodiment of the present invention.

Referring to FIG. 2, the diagnostic apparatus 200 according to the present invention includes a communication unit 210, an input unit 220, a display unit 230, a memory 240, and a control unit 250.

The communication unit 210 communicates with the OES device 150. To this end, the communication unit 210 5G (5 ^th generation communication), LTE-A (long term evolution-advanced), LTE (long term evolution), Bluetooth, BLE (bluetooth low energy), NFC (near field communication), etc. Can perform wireless communication, and can perform wired communication such as cable communication.

The input unit 220 generates input data in response to a user input of the diagnostic device 200. The input unit 220 includes at least one input means. Input unit 220 is a keyboard (key board), keypad (key pad), dome switch (dome switch), touch panel (touch panel), touch key (touch key), mouse (mouse), menu button (menu button), etc. It may include.

The display unit 230 displays display data according to the operation of the diagnostic device 200. The display 230 includes a liquid crystal display (LCD), a light emitting diode (LED) display, an organic LED (OLED) display, and a micro electromechanical systems (MEMS) display. Ray and electronic paper displays. The display unit 230 may be combined with the input unit 220 and implemented as a touch screen.

The memory 240 stores operation programs of the diagnostic device 200. The memory 240 stores selection conditions for OES data for selectively acquiring OES data necessary for diagnosing plasma conditions among OES data received from the OES device 150. The memory 240 stores an algorithm for combining OES data selected according to selection conditions and converting it into image data.

The control unit 250 receives the OES data obtained from the OES device 150, and extracts the OES data converging to the selection condition from the OES data. The control unit 250 combines the extracted OES data, and converts the combined OES data into image data. The controller 250 diagnoses the plasma state through analysis of the converted image data.

More specifically, the controller 250 selectively selects OES data necessary for diagnosing the state of plasma among OES data composed of a pair of wavelength and intensity values for a spectrum received from the OES device 150 through the communication unit 210. To acquire. To this end, the control unit 250 checks the selection conditions for the OES data previously stored in the memory 240. At this time, if the selection condition is not stored in the memory 240, the control unit 250 may receive the selection condition through the input unit 220 and store it in the memory 240. In addition, the control unit 250 may change a pre-stored selection condition by a change signal received through the input unit 200.

The control unit 250 extracts OES data converging to a selection condition from the OES data received from the OES device 150. At this time, if the selection condition is the entire wavelength that the OES data can have, the selection condition selects all OES data received from the OES device 150. In addition, the control unit 250, if the individual wavelength value, such as 451.09nm, 751.49nm or a range of wavelength values, such as 400 ~ 500nm, is a selection condition, OES data corresponding to the selection condition among the OES data received from the OES device 150 Only the bay is extracted. If the intensity value is a selection condition, such as Intensive> 3, the controller 250 extracts only OES data having an intensity value of 3 or more from the OES data received from the OES device 150. If the argon gas among the gases used in the plasma process is a selection condition, the control unit 250 extracts only OES data related to argon gas from the OES data received from the ES device 150. In addition, the selection conditions may be set to single or plural.

The control unit 250 digitizes the extracted OES data. For example, since the OES data includes a wavelength value and an intensity value of the spectrum, the controller 250 digitizes and maps the wavelength value and intensity value of the spectrum for each extracted OES data, and generates and maps an identifier. At this time, the identifier is an identifier generated by deleting the decimal point of the wavelength value of each OES data and using only an integer value, and is an identifier for facilitating the processing of the OES data.

Subsequently, the control unit 250 combines the OES data and converts the combined OES data into image data. For example, the OES data may be reduced by merging the extracted OES data in a certain wavelength unit to improve the speed of data processing. That is, the control unit 250 may set a wavelength unit (eg, 1 nm) for merging OES data, and set a merging method of OES data. At this time, the merging method means a method for combining the intensity values included in the OES data grouped based on the wavelength unit into one of the sum of the intensity values, the average value, the median value, the maximum value and the minimum value.

The controller 250 groups the OES data extracted in units of wavelengths, and uses the intensity values of the spectrum for the OES data included in the group, to the OES data as one of the sum of the intensity values, the average value, the median value, the maximum value, and the minimum value. Produces a combination value for The control unit 250 calculates a mutual ratio value for two combination values from each generated combination value.

The control unit 250 normalizes the calculated mutual ratio values and converts them into RGB values having values between 0 and 255 to generate image data. In this case, the control unit 250 may sequentially normalize the mutual ratio values, and may normalize the mutual ratio values for each wavelength of the related spectrum, such as a wavelength generated in the same gas or a wavelength generated in the same ion energy level. have.

3 is a flowchart illustrating a method of diagnosing a plasma condition according to an embodiment of the present invention.

Referring to FIG. 3, in step 301, the control unit 250 checks whether or not the OES data consisting of a pair of wavelength and intensity values for the optical signal spectrum of plasma is received from the OES device 150 through the communication unit 210. . As a result of the check in step 301, when the OES data is received, the control unit 250 performs step 303, and if the OES data is not received, the control unit 250 waits to receive the OES data.

In step 303, the control unit 250 checks whether the selection condition exists in the memory 240. At this time, the selection condition means a condition for selectively obtaining OES data necessary for diagnosing the plasma state among the received OES data. As a result of the check in step 303, if the selection condition is stored in the memory 240, the control unit 250 performs step 307, and if the selection condition is not stored, the control unit 250 performs step 305. In step 305, the control unit 250 sets a selection condition according to the input of the input unit 220 and performs step 307.

In step 307, the control unit 250 checks whether the OES data converging to the selection condition among the received OES data exists. In step 309, the controller 250 extracts OES data converging on the selection condition. Conversely, if there is no OES data converging on the selection condition, the controller 250 may end the process. Although not shown, if the OES data converging in the selection condition does not exist, the controller 250 may change the selection condition to extract the OES data converging in the selection condition. More specifically, if the entire wavelength that the OES data can have is a selection condition, in step 309, the controller 250 selects all OES data received from the OES device 150. In addition, if the range of individual wavelength values, such as 451.09nm, 751.49nm, or the range of wavelength values, such as 400 to 500nm, is a selection condition, the controller 250 in step 309 corresponds to the selection condition among the OES data received from the OES device 150. Only extracted OES data is extracted. If the intensity value is a selection condition, such as Intensive>3, in step 309, the controller 250 extracts only OES data having an intensity value of 3 or higher from the OES data received from the OES device 150. If the argon gas used in the plasma process is a selection condition, in step 309, the controller 250 extracts only the OES data corresponding to the selection condition from the received OES data. In addition, the selection conditions may be set to single or plural. In addition, the control unit 250 digitizes the extracted OES data. This will be described in more detail with reference to FIG. 4 below. 4 is a screen example showing a result of analyzing OES data corresponding to a set condition according to an embodiment of the present invention.

Referring to FIG. 4, FIG. 4(a) is a graph showing OES data received through the communication unit 210, and FIG. 4(b) is a table quantifying a plurality of extracted OES data converging to a selection condition. to be. As such, each OES data includes a wavelength value and an intensity value for the spectrum. The controller 250 maps the wavelength and intensity values of the graph for each extracted OES data as shown in FIG. 4(b), and generates and maps the identifier. At this time, the identifier is an identifier generated by deleting the decimal point of the wavelength value of each OES data and using only an integer value, and is an identifier for facilitating the processing of the OES data.

Subsequently, the control unit 250 performs step 311. In step 311, the controller 250 combines the OES data, and in step 313, the controller 250 performs step 315 when the combination of the OES data is completed. Conversely, in step 313, if the combination of OES data is not completed, the control unit 250 returns to step 311 to continuously perform the combination of OES data. The method of combining the OES data will be described with reference to FIGS. 5 to 8 below. 5 to 8 are screen example views illustrating a method of combining OES data according to an embodiment of the present invention.

First, referring to FIGS. 5 and 6, when there is a large amount of OES data converging on a selection condition, the controller 250 reduces the OES data by merging the OES data in a certain wavelength unit to improve the speed of the OES data processing. can do. More specifically, the controller 250 may set a wavelength unit for merging OES data and may set a merging method of OES data. At this time, the merging method means a method for combining the intensity values included in the OES data grouped based on the wavelength unit into one of the sum of the intensity values, the average value, the median value, the maximum value and the minimum value.

FIG. 5 shows a method of merging OES data in a state in which a merging method is set so that OES data is grouped in units of 1 nm with a wavelength unit set to 1 nm, and OES data is combined as a sum of intensity values included in each group. The control unit 250 groups OES data according to a wavelength unit having an interval of 1 nm from a plurality of OES data as shown in FIG. 5(a). For example, when the wavelength value is 768.48, 768,66, 768.84, 769.02, 769.2, 769.38, 769.56, 769.75, 769.93 as shown in (a) of FIG. 5, the control unit 250 as shown in FIG. 768.48, 768, 66, and 768.84 are grouped to have the first combination identifier I768, and 769.02, 769.2, 769.38, 769.56, 769.75, and 769.93 are grouped to have the first combination identifier I769 as shown in FIG. Then, the controller 250 calculates the sum of the intensity values of the OES data having the first combination identifier of I768 as a combination value, and calculates the sum of the intensity values of the OES data having the first combination identifier of I769 as the combination value. At this time, the equation for calculating the combined value as the sum of the intensity values is as shown in Equation 1 below.

(However, Ix means the first combination identifier, and x means the integer value in the wavelength value.)

로, 49.66+180.73+125.44의 단순 총합인 355.83가 된다. 또한, 수학식 1을 이용한 제1 조합식별자가 I769인 OES데이터들의 조합값은

로, 141.82+145.92+174.59+59.9+66.05+168.45의 단순 총합인 756.73이 된다. 이와 같이, 수학식 1을 이용한 조합값은 I768=355.83, I769=756.73, I770=412.15, I771=457.72, I772=27034.22 등이 된다. When using Equation 1, the combination value of the OES data with the first combination identifier I768 is as shown in FIG. 5(b).

This is 355.83, which is a simple sum of 49.66+180.73+125.44. In addition, the combination value of the OES data with the first combination identifier I769 using Equation 1 is

This is 756.73, which is a simple sum of 141.82+145.92+174.59+59.9+66.05+168.45. In this way, the combined values using Equation 1 are I768=355.83, I769=756.73, I770=412.15, I771=457.72, I772=27034.22, and the like.

In addition, FIG. 6 is a method for merging OES data in a state in which a merging method is set to group OES data in a 1 nm unit with a wavelength unit set to 1 nm, and to combine OES data with a maximum value of intensity values included in each group. Indicates. The control unit 250 groups OES data according to a wavelength unit having an interval of 1 nm from a plurality of OES data as shown in FIG. 6(a). For example, when the wavelength value is 768.48, 768,66, 768.84, 769.02, 769.2, 769.38, 769.56, 769.75, 769.93 as shown in (a) of FIG. 6, the control unit 250, as shown in FIG. , 768,66, 768.84 are grouped to have the first combination identifier I768 as shown in FIG. 6(b), and 769.02, 769.2, 769.38, 769.56, 769.75, 769.93 are grouped to have the first combination identifier I769. Then, the controller 250 calculates the maximum value of the intensity values of the OES data whose first combination identifier is I768 as a combination value, and calculates the maximum value of the intensity values of the OES data whose first combination identifier is I769 as a combination value. . At this time, the equation for calculating the maximum value of the intensity value as a combination value is as shown in Equation 2 below.

(However, Ix means the first combination identifier, and x means the integer value in the wavelength value.)

로, 49.66, 180.73, 125.44 중에서 최대값인 180.73이 된다. 또한, 제1 조합식별자가 I769인 OES데이터들의 조합값은

로, 141.82, 145.92, 174.59, 59.9, 66.05, 168.45 중에서 최대값인 174.59이 된다. 이와 같이, 수학식 2를 이용한 조합값은 I768=180.73 I769=174.59, I770=131.58, I771=164.385, I772=7555.47 등이 된다. When using Equation 2, the combination value of the OES data with the first combination identifier I768 is as shown in FIG. 6(b).

It is the maximum value of 49.66, 180.73, and 125.44, which is 180.73. In addition, the combination value of the OES data of which the first combination identifier is I769 is

The maximum value of 141.82, 145.92, 174.59, 59.9, 66.05, and 168.45 is 174.59. As described above, the combined values using Equation 2 are I768=180.73 I769=174.59, I770=131.58, I771=164.385, I772=7555.47, and the like.

Subsequently, the control unit 250 calculates the combined value calculated by merging based on the merge method set as shown in FIG. 5 or FIG. 6, and after performing the reduction of the OES data, the mutual ratio of the OES data as shown in FIGS. Calculate the value.

Referring to FIG. 7, the control unit 250 applies OES data as shown in (a) of FIG. 7 to Equation 1, reduces it as shown in FIG. 7 (b), and then combines each as shown in FIG. 7 (c). Calculate the mutual ratio value of the values. At this time, in the embodiment of the present invention, for convenience of description, FIGS. 7A and 7B are the same as those of FIGS. 5A and 5B, but must be It is not limited. That is, the combination value calculated by the merge method selected to combine any one of the sum, average value, median value, maximum value, and minimum value of the intensity values included in the OES data may be applied to FIG. 7B.

More specifically, the control unit 250 generates a second combination identifier using two first combination identifiers as shown in FIG. 7(c) to calculate the mutual ratio value of the combination value corresponding to the first combination identifier. Then, the mutual ratio value of the combination value corresponding to the two first combination identifiers is calculated as the combination value. For example, the controller 250 generates a second combination identifier by applying I768 to I772 to I768, and a second combination identifier by applying I768 to I772 to I769, respectively. As described above, the control unit 250 generates a second combination identifier by applying I768 to I772 to I770, I768 to I772 to I771, and applying I768 to I772 to I772, respectively. The control unit 250 calculates a mutual ratio value of a combination value corresponding to two first combination identifiers included in the second combination identifier. The combined value of I768 and I768 is 355.83/355.83, as shown in Fig. 7(c), and becomes 1. The mutual ratio value of I768 and I769 is 355.83/756.73, which is 0.47022055.

Referring to FIG. 8, the control unit 250 applies OES data as shown in FIG. 8(a) to Equation 2, reduces it as shown in FIG. 8(b), and then combines each as shown in FIG. 8(c). Calculate the mutual ratio value of the values. At this time, FIGS. 8A and 8B may be the same as FIGS. 6A and 6B.

More specifically, the control unit 250 generates a second combination identifier by using the two first combination identifiers and in FIG. 8(c) to calculate the mutual ratio value of the combination value corresponding to the first combination identifier, and , The mutual ratio value of the combination values corresponding to the two first combination identifiers is calculated as the combination value. For example, the controller 250 generates a second combination identifier by applying I768 to I772 to I768, and a second combination identifier by applying I768 to I772 to I769, respectively. As described above, the control unit 250 generates a second combination identifier by applying I768 to I772 to I770, I768 to I772 to I771, and applying I768 to I772 to I772, respectively. The control unit 250 calculates a mutual ratio value of a combination value corresponding to two first combination identifiers included in the second combination identifier. The combined value of I768 and I768 is 180.73/180.73, as shown in Fig. 8(c), and becomes 1. The mutual ratio value of I768 and I769 is 170.73/174.59, which is 1.03516811.

As described above, when the combination of OES data is completed, in step 315, the controller 250 converts the OES data to image data using the calculated combination values as shown in FIG. 7(c) or 8(c). A method of converting OES data into image data will be described in detail with reference to FIG. 9 below. 9 is a screen example for explaining a method of converting the combined OES data into image data according to an embodiment of the present invention.

Referring to FIG. 9, the controller 250 applies a combination value to Equation 3 below to normalize the combination value corresponding to the second combination identifier and the second combination identifier as shown in FIG. RGB values are sequentially converted to have values between 0 and 255. Through this, the control unit 250 may convert the OES data into image data as shown in FIG. 9B. At this time, the image data is composed of a plurality of pixels, and one pixel has RGB (red, green, blue) values between 0 and 255, respectively. In addition, FIG. 9(a) will be described as the same as that of FIG. 7(c).

은 이미지 데이터에서 첫 번째 픽셀의 RGB값을 각각 나타낸다.) (At this time,

Indicates the RGB value of the first pixel in the image data.)

In general, the equation used for normalization is as shown in Equation 4 below.

(At this time, min(x) represents the minimum value in all data, and max(x) represents the maximum value in all data.)

However, in order to convert the OES data to image data, it is necessary to convert to an RGB value having a value between 0 and 255. Therefore, Equation 5 below is applied in the present invention.

In addition, when the controller 250 wants to convert relevant OES data, such as a wavelength generated in the same gas or a wavelength generated in the same ion energy level, into image data, the controller 250 is combined in Equation 6 below. Apply the value to convert the combination value to have a value between 0 and 255. Through this, the control unit 250 may convert the OES data into image data as shown in FIG. 9B.

은 이미지 데이터에서 첫 번째 픽셀의 RGB값을 각각 나타낸다.) (At this time,

Indicates the RGB value of the first pixel in the image data.)

When conversion to image data is completed as shown in FIG. 10 through the above-described operation, the control unit 250 performs step 317. In step 317, the controller 250 analyzes the image data and performs step 319. In step 319, the control unit 250 may diagnose the plasma state using the analysis result of the image data, and display the diagnosis result on the display unit 230.

The embodiments of the present invention disclosed in the present specification and drawings are merely to provide a specific example to easily explain the technical content of the present invention and to understand the present invention, and are not intended to limit the scope of the present invention. Therefore, the scope of the present invention should be interpreted as including all the modified or modified forms derived on the basis of the technical spirit of the present invention in addition to the embodiments disclosed herein.

Claims (15)

Receiving OES data obtained from an optical emission spectroscopy (OES) device;
Extracting OES data converging to a selection condition from the OES data, and combining the extracted OES data;
Converting the combined OES data to image data; And
Diagnosing a plasma state through analysis of the image data;
Including,
Combining the OES data,
Check the wavelength and intensity values of the spectrum included in the OES data, group the OES data based on the wavelength value, and combine the intensity values of the spectrum for each group to combine the OES data included in each group Plasma state diagnosis method characterized in that the step of calculating the mutual ratio value for the two combinations of the values. According to claim 1,
The step of converting the image data,
And converting the combined OES data into the image data having RGB (Red, Green, Blue) values. According to claim 2,
After the step of receiving the OES data,
Determining whether or not the selection condition is previously set; And
Setting the selection condition if the selection condition is not in a preset state;
Plasma state diagnosis method further comprising a. delete According to claim 3,
The combined value of the OES data is,
Plasma state diagnosis method, characterized in that any one of the sum, average value, median value, maximum value and minimum value of the intensity value for each group. delete According to claim 3,
The step of converting the image data,
Setting the RGB values to values derived by sequentially normalizing the mutual ratio values; And
Generating the image data based on the set RGB value;
Plasma condition diagnosis method comprising a. According to claim 3,
The step of converting the image data,
Setting the RGB value to a value derived by normalizing the mutual ratio value for each wavelength for a spectrum; And
Generating the image data based on the set RGB value;
Plasma condition diagnosis method comprising a. A communication unit performing communication with an optical emission spectroscopy (OES) device; And
Extracting OES data converging to a selection condition from OES data received from the OES device, checking the wavelength and intensity values of the spectrum included in the OES data, and grouping the OES data based on the wavelength value, Plasma state after converting the extracted OES data into image data by calculating the mutual ratio value of two combination values among the combination values of the OES data included in each group by combining the intensity values of the spectrum for each group Control unit for diagnosing;
Plasma condition diagnosis apparatus comprising a. The method of claim 9,
The control unit,
And converting the combined OES data into the image data having RGB (Red, Green, Blue) values. The method of claim 10,
The control unit,
If the selection condition is not a predetermined condition, the plasma condition diagnosis apparatus, characterized in that to set the selection condition. The method of claim 11,
The control unit,
The wavelength values and intensity values of the spectrum included in the OES data are checked, and the OES data is grouped in units of wavelengths set based on the wavelength values, and the intensity values of the spectrum are combined for each group to be included in each group. A plasma condition diagnosis apparatus characterized by calculating a combination value of OES data. The method of claim 12,
The control unit,
Plasma diagnosis apparatus, characterized in that for calculating the sum of the intensity value, average value, median value, maximum value and minimum value for each group as the combination value. delete The method of claim 12,
The control unit,
Plasma state diagnosis apparatus, characterized in that for generating the image data based on the RGB value set to a value derived by normalizing the mutual ratio value for each wavelength for the spectrum.

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