KR102052257B1 - Ultrasound system capable of transmitting/receiving and the method thereof - Google Patents

Abstract

The present invention relates to a semiconductor ultrasonic system and a method thereof for a non-contact switch, and to minimize the effects of transmission residual vibration by separating the dedicated cell for transmission and reception, Due to the process error, the distance detection of the object can be performed by enabling transmission and reception in response to the variation of the center frequency.

Description

ULTRASOUND SYSTEM CAPABLE OF TRANSMITTING / RECEIVING AND THE METHOD THEREOF}

The present invention relates to an ultrasonic system capable of transmitting and receiving, and more particularly, to a semiconductor ultrasonic system and a method for a non-contact switch.

Recently, the interest in the contactless user interface has increased due to hygiene and security, and water conservation issues. For example, existing commercial technologies use ultra-low-power, passive infrared (PIR) sensors in toilet faucets or electronic doors for security, but there is a fundamental problem that PIR sensors are vulnerable to light environments. In order to realize low power by detecting natural infrared rays of the human body, there is a disadvantage that it may cause an error in performance due to the influence of light level in the surrounding environment, color / object surface texture and user's shadow. Since there is only a presence / absence, there is a limit to the lack of information to be measured.

Furthermore, since the conventional semiconductor ultrasonic technology uses a transmitting cell and a receiving cell jointly, there is a limit that affects transmission and reception due to the operation of the common cell.

US Patent No. 7,477,572 (January 13, 2009), "Microfabricated capacitive ultrasonic transducer for high frequency applications"

An object of the present invention is to provide a technique for minimizing the effects of transmission residual vibration by separating a compatibility cell for transmission and reception into a dedicated cell.

In addition, an object of the present invention is to provide a technique for performing the distance detection of the object by enabling the transmission and reception in response to the variation of the center frequency due to the process error of the MEMS ultrasonic waves according to the broadband voltage signal characteristics and broadband transducer characteristics. do.

In addition, an object of the present invention is to provide a technology that can control a variety of interface functions corresponding to the sensing operation after the standby mode and distance detection by low-power MEMS ultrasound.

Ultrasonic system capable of transmitting and receiving according to an embodiment of the present invention is a transmission unit for transmitting a transmission signal of the transmission pressure due to the center frequency fluctuation spectrum to the transmission voltage of the multi-frequency spectrum, heterogeneous resonant frequency spectrum arranged in parallel to the center frequency fluctuation spectrum of the echo pressure Receiving unit for detecting the received signal due to the control unit for controlling the interface function through the received signal.

The transmitter may use a single channel transmit cell, and the receiver may use a single channel receive cell separate from the transmit cell.

The transmitter may transmit the transmission signal of the transmission pressure by driving the transmission cells of the multiple frequencies arranged in parallel by applying the transmission voltage of a single frequency instead of the transmission voltage of the multiple frequencies.

The transmitting unit may drive a transmission cell array of heterogeneous resonant frequencies in parallel with the transmission voltage of multiple frequencies.

The receiving unit applies a wide band heterogeneous frequency spectrum to the center frequency spectrum of the narrow band due to the echo signal by using parallel receiving cells of heterogeneous resonant frequencies arranged in parallel, thereby receiving the received voltage due to variation in the center frequency of the receiving pressure. You can detect the signal.

The parallel receiving cells of the heterogeneous resonant frequencies may be formed to have different diameter sizes, and thin films having a relatively large diameter may exhibit low frequency resonance, and thin films having a relatively small diameter may exhibit high frequency resonance.

The controller may align a bandwidth of a multi-frequency transmission voltage by the transmitter and a bandwidth of a parallel receiver cell by the receiver.

The controller may drive an operating frequency to 200 kHz or less.

A cavity may be further included at an interface between the transmitter and the receiver to decoupling the transmitter and the receiver.

The cell may include a silicon thin film, a lower electrode on the silicon thin film, a piezoelectric material on the lower electrode, and an upper electrode on the piezoelectric material.

In addition, the ultrasonic system capable of transmitting and receiving according to an embodiment of the present invention may further include a waterproof membrane which is coated on the front of the transmitter to waterproof at least one or more of the transmitter, the receiver and the controller.

In the method of operation of a transceivable ultrasonic system according to an embodiment of the present invention, transmitting the transmission signal of the transmission pressure due to the center frequency fluctuation spectrum to the transmission voltage of the multi-frequency spectrum, parallel arrangement to the center frequency fluctuation spectrum of the echo pressure Detecting a received signal due to the heterogeneous resonant frequency spectrum, and controlling an interface function through the received signal.

According to the embodiment of the present invention, the effect of transmission residual vibration can be minimized by separating the combined cell for transmission and reception into a dedicated cell.

In addition, according to an embodiment of the present invention, the distance of the object can be detected by enabling transmission and reception in response to the variation of the center frequency due to the process error of the MEMS ultrasonic wave according to the broadband voltage signal characteristic and the broadband transducer characteristic. have.

In addition, according to an embodiment of the present invention, after the standby mode and the distance detection by the low-power MEMS ultrasound, it is possible to control various interface functions corresponding to the sensing operation.

In addition, according to an embodiment of the present invention, by applying to the automatic faucet, electronic door lock, Internet of Things (Internet of Things, IoT) devices, PC mouse, smart refrigerator, mobile and elevator switch to provide a contactless interface function according to the contactless gesture operation. can do.

1 is a block diagram illustrating a detailed configuration of a transceivable ultrasound system according to an embodiment of the present invention.
2A and 2B illustrate an example of a semiconductor ultrasonic chip according to an embodiment of the present invention.
3A and 3B illustrate an internal structure of a semiconductor ultrasonic chip according to an embodiment of the present invention.
4 and 5 illustrate examples of spectrums of a transmission signal and a reception signal according to an embodiment of the present invention.
6 is a flowchart of an ultrasonic method capable of transmitting and receiving according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments. Also, like reference numerals in the drawings denote like elements.

Also, the terminology used herein is a term used to properly express a preferred embodiment of the present invention, which may vary depending on a viewer, an operator's intention, or customs in the field to which the present invention belongs. Therefore, the definitions of the terms should be made based on the contents throughout the specification.

1 is a block diagram illustrating a detailed configuration of a transceivable ultrasound system according to an embodiment of the present invention.

Referring to FIG. 1, a transceivable ultrasonic system according to an exemplary embodiment of the present invention is a semiconductor ultrasonic system for a non-contact switch, and controls an interface function for a received signal by using a separate transmitting cell and a receiving cell.

To this end, the ultrasonic system 100 that can transmit and receive according to an embodiment of the present invention includes a transmitter 110, a receiver 120 and a controller 130.

The transmitter 110 transmits a transmission signal having a transmission pressure due to the center frequency variation spectrum to the transmission voltage of the multi-frequency spectrum.

For example, the transceivable ultrasonic system 100 according to the embodiment of the present invention may form a semiconductor ultrasonic chip (not shown) structure including a transmitting cell and a receiving cell, wherein the transmitting cell and the receiving cell Separate from each other, characterized in that using each single channel. The ultrasound system 100 capable of transmitting and receiving may separate the transmitting cell and the receiving cell to minimize the effect of the dedicated cell and the transmission residual vibration.

The transmitter 110 may transmit the transmission signal of the transmission pressure by driving the transmission cells of the multi-frequency arranged in parallel by applying the transmission voltage of a single frequency, instead of the transmission voltage of the multi-frequency. For example, the transmitter 110 transmits a transmission pressure spectrum obtained by intersection (or convolution) of a transmission voltage spectrum of a wide frequency multi-frequency due to multiple frequencies and a transmission cell spectrum of a single resonant frequency as a transmission signal of a single channel. can do. In this case, the transmitter 110 may transmit the transmission signal of the single channel by applying a transmission voltage or a chirp signal of multiple frequencies.

The transmitter 110 may drive the transmission cell array of the multi-frequency transmission voltage and the heterogeneous resonant frequency in parallel. For example, the transmission cells on the semiconductor ultrasonic chip may be arranged in parallel in any number of arrays, and the transmitter 110 drives the transmission cell array of the heterogeneous resonant frequency and the transmission voltage of the multi-frequency in parallel to transmit the transmission signal. Can be sent.

The receiver 120 detects a received signal due to a heterogeneous resonant frequency spectrum arranged in parallel to a center frequency spectrum according to an echo signal of an echo pressure (or receiving pressure).

The receiver 120 applies the wideband heterogeneous frequency spectrum to the center frequency spectrum of the narrow band due to the echo signal by using the parallel receiving cells of the heterogeneous resonant frequencies arranged in parallel, and thus the reception of the received voltage due to the variation of the center frequency of the receiving pressure. The received signal can be detected. For example, the receiver 120 may receive a received signal spectrum obtained by intersection (or convolution) of an echo pressure spectrum and a received cell spectrum of a heterogeneous resonance frequency.

At this time, each of the parallel receiving cells of the heterogeneous resonant frequency on the semiconductor ultrasonic chip may be formed with a different diameter size, the thin film of a relatively large diameter represents a low frequency resonance due to the different diameter size, the thin film of a relatively small diameter is a high frequency It may indicate resonance.

The controller 130 controls the interface function through the received signal. In addition, the controller 130 may control signal bandwidths and frequencies of the transmitter 110 and the receiver 120, respectively.

The controller 130 of the transceivable ultrasound system 100 according to an exemplary embodiment of the present invention may detect a distance of an object through a received signal, and control a non-contact interface function corresponding to the detected distance.

According to an embodiment, the controller 130 may determine the mode from the distance / lateral gesture of the user according to the echo signal detection. For example, the controller 130 may detect a non-contact gesture operation of the lateral motion, the lateral repeat motion, and the distance motion by using the received signal received through the receiver 120. According to the first exemplary embodiment, when the user's hand moves from the left to the right or the right to the left of the beam about the beam of the continuously transmitted transmission signal, the controller 130 may be configured to temporarily disconnect the beam. Lateral motion can be detected. According to the second embodiment, when the user's hand moves from the left side to the right side of the beam and back to the left side or the right side to the left side and back to the right side with respect to the beam of continuously transmitted transmission signal, The controller 130 may detect the transverse repetition motion according to the temporary disconnection of the beam and the repetition of the continuous phenomenon of the beam. According to the third exemplary embodiment, when the user's hand is close to or far from the user, the controller 130 may detect the distance motion and calculate the distance.

Thereafter, the controller 130 may control various contactless interface functions corresponding to the mode and the distance value by using the distance value calculated from at least one of the lateral motion, the lateral repetition motion, the distance motion, or the longitudinal motion.

According to an embodiment, the controller 130 may operate on / off, adjust the amount, change the mode, turn pages, zoom in / out based on the detected mode and distance value, At least one of the cursor control, the scroll control, the tab, the character control, the button input, the data transmission, the screen switching, and the data switching can be controlled.

As another example, the controller 130 may control a non-contact interface function such as hot water and cold water in the left direction according to the mode and distance value detected from the transmission signal and the received signal. The remote can also control non-contact interface functions such as low volume. However, the contactless interface function may be variously changed according to the apparatus and system to which the transmissible ultrasound system 100 according to the embodiment of the present invention is applied, and the present invention is not limited thereto.

The controller 130 of the transceivable ultrasound system 100 according to the embodiment of the present invention controls the bandwidth of the multi-frequency transmission voltage by the transmitter 110 and the bandwidth of each of the parallel receiving cells by the receiver 120. In addition, it is possible to control the multi-frequency according to the time difference between the transmitting cell and the receiving cell of a single cell. At this time, the controller 130 may drive the operating frequency to 200kHz or less.

In addition, the ultrasonic system 100 that can transmit and receive according to an embodiment of the present invention is a cavity (not shown) on the interface between the transmitter 110 including the transmission cell and the receiver 120 including the reception cell on the semiconductor ultrasonic chip. Decoupling the transmitter 110 and the receiver 120, including). For example, the cavity may be formed at a specific position between the transmitter 110 and the receiver 120. At this time, the size, area, shape, etc. of the cavity formed through the present process may be a design specification, a condition, an embodiment. And MEMS technology should be designed to have optimal characteristics.

As an example, the shape of the cavity may have a shape of a circle, an oval, a rectangle, a stripe, a triangle, and the like, and in addition, the cavity may have various shapes, sizes, and areas.

In addition, a cell in the transceivable ultrasound system 100 according to an embodiment of the present invention may be composed of a silicon thin film, a lower electrode on the silicon thin film, a piezoelectric material on the lower electrode, and an upper electrode on the piezoelectric material. Accordingly, the resistance of the air medium to the thin film against the deformation of the semiconductor ultrasonic chip to the lower side of the compressive force and the upper side of the tensile force may be low, and thus the frequency characteristic may exhibit a narrow band.

In addition, the ultrasonic system 100 that can transmit and receive according to an embodiment of the present invention is coated on the front of the transmitter 110, the waterproof membrane for waterproofing at least one or more of the transmitter 110, the receiver 120 and the controller 130. (Not shown). For example, a chemical vapor deposition or spin coating technique may be used to form a waterproof film on each of a transmitting cell and a receiving cell or a semiconductor ultrasonic chip including a transmitter 110, a receiver 120, and a controller 130. The waterproof film may be formed of Parylene C or PDMS, but the type and shape of the material are not limited thereto.

2A and 2B illustrate an example of a semiconductor ultrasonic chip according to an embodiment of the present invention.

2A and 2B, an ultrasound system capable of transmitting and receiving according to an embodiment of the present invention includes a semiconductor ultrasound chip 200 including a transmission cell 211 and a reception cell 221, and includes a plurality of transmission cells ( It may include a transmitter 210 including a 211, a receiver 220 including a plurality of receiving cells 221. At this time, the transmitting cell 211 and the receiving cell 221 may be arranged in parallel in an array (array), each array is set to any number, the number is not limited.

In this case, the semiconductor ultrasonic chip 200 may be for a non-contact switch. The semiconductor ultrasonic chip 200 may be controlled by the controller 230. According to an embodiment, the controller 230 may apply a low voltage to the transmitter 210, and may convert a current according to a signal received from the receiver 220 into a voltage through a TIA amplifier. . In addition, the controller 230 may detect the echo signal, determine the signal mode by the distance / lateral gesture, and calculate the distance using a digital algorithm.

As shown in FIG. 2A, the transmitting cell 211 and the receiving cell 221 are separated from each other, and each single channel is used. Accordingly, the transmitter 210 transmits a transmission signal by driving the array of heterogeneous resonant frequency transmission cells 211 in parallel with a transmission voltage of multiple frequencies, and the frequency in the transmission cell 211 is a single resonance frequency 212. Indicates the form of.

In addition, each of the plurality of receiving cells 221 may be formed to have a different diameter size, and each array 220 ₁ , 220 ₂ , 220 ₃ , 220 ₄ may be formed to have a predetermined diameter size. Accordingly, the receiving cell 221 may exhibit low frequency resonance due to different diameter sizes, and thin film of relatively small diameter may exhibit high frequency resonance.

Referring to FIG. 2A, narrow bands for the first receiving cell array 220 ₁ , the second receiving cell array 220 ₂ , the third receiving cell array 220 ₃ , and the fourth receiving cell array 220 ₄ , respectively. The heterogeneous resonant frequency 222 can be identified at different frequencies, and the heterogeneous resonant frequency parallel receiving cell for the narrow band heterogeneous resonant frequency 222 obtained in the plurality of receiving cell arrays represents the wideband transducer spectrum 223. You can check it.

Accordingly, the ultrasonic system capable of transmitting and receiving according to an embodiment of the present invention can minimize the effect of transmission residual vibration by driving a dedicated cell according to transmission and reception using the separate transmission cell 211 and the reception cell 221. In addition, due to the process error of the MEMS ultrasonic wave according to the characteristics of the wideband voltage signal and the wideband transducer, the distance of the object can be detected by enabling transmission and reception in response to the variation of the center frequency.

3A and 3B illustrate an internal structure of a semiconductor ultrasonic chip according to an embodiment of the present invention.

More specifically, FIG. 3A is a diagram illustrating a cell structure, and FIG. 3B is a diagram illustrating a cavity located at an interface between a transmitter and a receiver.

Referring to FIG. 3A, a cell (transmitting cell or receiving cell) in a semiconductor ultrasonic chip according to an exemplary embodiment of the present invention may be a silicon thin film 310, a lower electrode 320 on a silicon thin film 310, and a lower electrode 320. The piezoelectric material 330 and the upper electrode 340 on the piezoelectric material 330 may be formed. Due to the structure of the cell, the semiconductor ultrasonic chip has less air medium resistance to the deformation to the lower side of the compressive force and the deformation to the upper side of the tensile force, so that the frequency characteristics can exhibit a narrow band.

Referring to FIG. 3B, a semiconductor ultrasonic chip according to an embodiment of the present invention may include a cavity 350 at an interface between an internal transmitter and a receiver. The semiconductor ultrasonic chip according to an exemplary embodiment of the present invention may include a cavity 350 separating the transmitter and receiver, thereby decoupling the transmitter and the receiver.

In this case, as shown in FIG. 3B, the cavity 350 may be formed at a specific position between the transmitting cell array and the receiving cell array. In this case, the size, area, shape, etc. of the cavity formed through the present process may be used. May be designed to have optimal characteristics in consideration of design specifications, conditions, embodiments, and MEMS techniques.

As an example, the shape of the cavity may have a shape of a circle, an oval, a rectangle, a stripe, a triangle, and the like, and in addition, the cavity may have various shapes, sizes, and areas.

4 and 5 illustrate examples of spectrums of a transmission signal and a reception signal according to an embodiment of the present invention.

More specifically, FIG. 4 illustrates an example spectrum of a transmission signal according to an embodiment of the present invention, and FIG. 5 illustrates an example spectrum of a received signal according to an embodiment of the present invention.

Referring to FIG. 4, a transceivable ultrasound system according to an exemplary embodiment of the present invention transmits a wideband multi-frequency transmission voltage spectrum 410 and a narrow band single resonant frequency from a multi-frequency pulse voltage 411 sequentially generated in chronological order. The cell spectrum 420 may be intersectiond (or convolved) to obtain a narrow band transmission pressure spectrum 430. Accordingly, the ultrasonic system capable of transmitting and receiving according to the embodiment of the present invention may transmit the transmission signal 431 due to the pulse voltage 411 of the multi-frequency according to the time response.

Referring to FIG. 5, an ultrasonic system capable of transmitting and receiving according to an embodiment of the present invention alternates an echo pressure spectrum 510 of a narrow band and a heterogeneous resonant frequency receiving cell spectrum 520 of a wide band from a received echo signal 511 ( Or convolution) to obtain the received signal spectrum 530 of a narrow band. Accordingly, the ultrasonic system capable of transmitting and receiving according to the embodiment of the present invention may receive the reception signal 531 according to the time response from the echo signal 511 according to the time response.

That is, the ultrasonic system capable of transmitting and receiving according to the embodiment of the present invention transmits a multi-frequency transmission pressure as a transmission signal through a transmission cell by using a wideband signal, which is a pulse voltage of a multi-frequency, and a narrow band transducer due to a center frequency variation. In addition, by using a wideband transducer of a narrow band echo pressure and a heterogeneous resonant frequency parallel receiving cell due to a center frequency variation, a receiving signal due to a receiving voltage can be received through the receiving cell.

From this, the ultrasonic system capable of transmitting and receiving according to the embodiment of the present invention separates the compatible cells according to the transmission and reception into dedicated cells to minimize the effect of transmission residual vibration, and the process error of the MEMS ultrasonic wave according to the characteristics of the broadband voltage signal and the transducer. Due to the change in the center frequency, transmission and reception can be performed to detect the distance of an object.

6 is a flowchart of an ultrasonic method capable of transmitting and receiving according to an embodiment of the present invention.

The method shown in FIG. 6 is performed by an ultrasonic system capable of transmitting and receiving according to the embodiment of the present invention of FIG. 1.

Referring to FIG. 6, in step 610, a transmission signal having a transmission pressure due to a center frequency variation spectrum is transmitted to a transmission voltage of a multi-frequency spectrum.

Step 610 may be a step of transmitting a transmission signal of a transmission pressure by driving a transmission frequency of a single frequency in parallel by applying a transmission voltage of a single frequency, instead of the transmission voltage of the multi-frequency. For example, step 610 may transmit, as a single channel transmission signal, a transmission pressure spectrum obtained by alternating (or convolving) a transmission voltage spectrum of a wide frequency multi-frequency due to multiple frequencies and a transmission cell spectrum of a single resonant frequency. have. At this time, the transmitter 110 may be a step of transmitting the transmission signal of the single channel by applying a multi-frequency transmission voltage or chirp signal.

In operation 610, the transceivable ultrasonic method according to an embodiment of the present invention may drive the transmission voltage array of the multi-frequency and the heterogeneous resonant frequency in parallel. For example, the transmission cells on the semiconductor ultrasonic chip may be arranged in parallel in any number of arrays, and step 610 may be performed by driving the transmission voltage array of the multi-frequency and the heterogeneous resonant frequency in parallel to transmit the transmission signal. It may be a step.

In operation 620, the received signal due to the heterogeneous resonant frequency spectrum arranged in parallel to the center frequency spectrum according to the echo signal of the echo pressure is sensed.

At this time, the transmitting cell and the receiving cell are separated from each other, characterized in that each single channel is used. Furthermore, each of the parallel receiving cells of heterogeneous resonant frequencies on the semiconductor ultrasonic chip may be formed to have different diameter sizes. Due to the different diameter sizes, the relatively large diameter thin film exhibits low frequency resonance, and the relatively small diameter thin film has high frequency resonance. Can be represented.

Step 620 is to apply the wideband heterogeneous frequency spectrum to the center frequency spectrum of the narrow band by the echo signal using the parallel receiving cells of the heterogeneous resonant frequency arranged in parallel, so that the received signal of the received voltage due to the variation of the center frequency of the receiving pressure It may be a step of detecting. For example, step 620 may be a step of receiving a received signal spectrum obtained by intersection (or convolution) of the echo pressure spectrum and the received cell spectrum of the heterogeneous resonant frequency.

In operation 630, the interface function is controlled through the received signal. In addition, step 630 may be a step of controlling the signal bandwidth and frequency of each of the transmitting cell and the receiving cell.

Step 630 may be a step of sensing a distance of an object through a received signal and controlling a contactless interface function corresponding to the detection and the distance.

Step 630 of the ultrasonic method capable of transmitting and receiving according to an embodiment of the present invention can control the bandwidth of the multi-frequency transmission voltage by the transmitting cell and the bandwidth of each of the parallel receiving cells. It may be a step of controlling the multi-frequency according to the time difference. At this time, the operating frequency can be driven to 200 kHz or less.

The apparatus described above may be implemented as a hardware component, a software component, and / or a combination of hardware components and software components. For example, the devices and components described in the embodiments may be, for example, processors, controllers, arithmetic logic units (ALUs), digital signal processors, microcomputers, field programmable arrays (FPAs), It may be implemented using one or more general purpose or special purpose computers, such as a programmable logic unit (PLU), microprocessor, or any other device capable of executing and responding to instructions. The processing device may execute an operating system (OS) and one or more software applications running on the operating system. The processing device may also access, store, manipulate, process, and generate data in response to the execution of the software. For convenience of explanation, one processing device may be described as being used, but one of ordinary skill in the art will appreciate that the processing device includes a plurality of processing elements and / or a plurality of types of processing elements. It can be seen that it may include. For example, the processing device may include a plurality of processors or one processor and one controller. In addition, other processing configurations are possible, such as parallel processors.

The software may include a computer program, code, instructions, or a combination of one or more of the above, and configure the processing device to operate as desired, or process it independently or collectively. You can command the device. Software and / or data may be any type of machine, component, physical device, virtual equipment, computer storage medium or device in order to be interpreted by or to provide instructions or data to the processing device. Or may be permanently or temporarily embodied in a signal wave to be transmitted. The software may be distributed over networked computer systems so that they are stored or executed in a distributed manner. Software and data may be stored on one or more computer readable recording media.

The method according to the embodiment may be embodied in the form of program instructions that can be executed by various computer means and recorded in a computer readable medium. The computer readable medium may include program instructions, data files, data structures, and the like, alone or in combination. The program instructions recorded on the media may be those specially designed and constructed for the purposes of the embodiments, or they may be of the kind well-known and available to those having skill in the computer software arts. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tape, optical media such as CD-ROMs, DVDs, and magnetic disks, such as floppy disks. Magneto-optical media, and hardware devices specifically configured to store and execute program instructions, such as ROM, RAM, flash memory, and the like. Examples of program instructions include machine code, such as produced by a compiler, as well as high-level language code that can be executed by a computer using an interpreter or the like. The hardware device described above may be configured to operate as one or more software modules to perform the operations of the embodiments, and vice versa.

Although the embodiments have been described by the limited embodiments and the drawings as described above, various modifications and variations are possible to those skilled in the art from the above description. For example, the described techniques may be performed in a different order than the described method, and / or components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different form than the described method, or other components. Or even if replaced or substituted by equivalents, an appropriate result can be achieved.

Therefore, other implementations, other embodiments, and equivalents to the claims are within the scope of the claims that follow.

100: ultrasonic system capable of transmitting and receiving
200: semiconductor ultrasonic chip
210: transmitter
211: transmission cell
212: single resonant frequency
220: receiver
221: receiving cell
222: heterogeneous resonant frequency
223: wideband transducer spectrum
230: control unit
310: silicon thin film
320: lower electrode
330: piezoelectric material
340: upper electrode
350: cavity
410: multi-frequency transmit voltage spectrum
420: single resonant frequency transmission cell spectrum
430: transmission pressure spectrum
411: pulse voltage of multiple frequencies
431: transmission signal
510: echo pressure spectrum
520: heterogeneous resonant frequency receiving cell spectrum
530: received signal spectrum
511: echo signal
531: received signal

Claims (12)

A transmitter for transmitting a transmission signal having a narrow band transmission pressure spectrum obtained by convolving a transmission voltage of a multi-frequency spectrum and a center frequency fluctuation spectrum using a transmission channel of a single channel;
A receiver which detects a received signal having a narrow-band received signal spectrum by convolving a heterogeneous resonant frequency spectrum arranged in parallel with a center frequency fluctuation spectrum of echo pressure using a single channel receive cell separated from the transmit cell; And
Control unit for controlling the non-contact interface function corresponding to the object detection and the distance through the received signal
Transmissible ultrasound system comprising a. delete The method of claim 1,
The transmitting unit
And a transmission voltage of a single frequency spectrum instead of the transmission voltage of the multifrequency spectrum to drive the transmission cells of multiple frequencies arranged in parallel to transmit and receive the transmission signal. The method of claim 3,
The transmitting unit
And transmitting and transmitting the transmission signal in parallel by driving the transmission voltage array of the multi-frequency spectrum and the transmission cell array of the heterogeneous resonant frequency in parallel. The method of claim 1,
The receiving unit
Condensation of the wideband heterogeneous frequency spectrum to the narrow center frequency spectrum of the narrow band caused by echo signals using parallel receiving cells of heterogeneous resonant frequencies arranged in parallel to enable transmission and reception of sensing the received signal due to variation in the center frequency of the receiving pressure Ultrasound system. The method of claim 5,
The parallel receiving cell of the heterogeneous resonant frequency
Transmitted and received ultrasonic system, characterized in that formed in different diameter sizes, and exhibits a low frequency resonance or a high frequency resonance according to the diameter. The method of claim 1,
The control unit
And a transmission / reception system for aligning a bandwidth of a multi-frequency transmission voltage by the transmitter and a bandwidth of a parallel reception cell by the receiver. The method of claim 1,
The control unit
Transmittable and ultrasonic system that drives an operating frequency below 200 kHz. The method of claim 1,
And a cavity at an interface between the transmitter and the receiver to decoupling the transmitter and the receiver. The method of claim 1,
The transmitting cell and the receiving cell
Silicon thin film;
A lower electrode on the silicon thin film;
A piezoelectric material on the lower electrode; And
An upper electrode on the piezoelectric material
Ultrasonic system capable of transmitting and receiving. The method of claim 1,
Waterproof membrane to coat the front surface of at least one or more of the transmitter, the receiver and the control unit
Ultrasonic system capable of transmitting and receiving further comprising. In the operation method of the ultrasonic system capable of transmitting and receiving,
Transmitting a transmission signal having a narrow band transmission pressure spectrum obtained by convolving a transmission voltage of a multi-frequency spectrum and a center frequency fluctuation spectrum using a transmission channel of a single channel;
Detecting a received signal having a narrow-band received signal spectrum by convolving a heterogeneous resonant frequency spectrum arranged in parallel with a center frequency fluctuation spectrum of an echo pressure using a single channel receive cell separated from the transmitting cell; And
Controlling a non-contact interface function corresponding to an object detection and a distance through the received signal;
Transmittable and ultrasonic method comprising a.

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