KR102050126B1 - Photosensitive composition and printed circuit board having hardened layer thereof - Google Patents
Photosensitive composition and printed circuit board having hardened layer thereof Download PDFInfo
- Publication number
- KR102050126B1 KR102050126B1 KR1020147036115A KR20147036115A KR102050126B1 KR 102050126 B1 KR102050126 B1 KR 102050126B1 KR 1020147036115 A KR1020147036115 A KR 1020147036115A KR 20147036115 A KR20147036115 A KR 20147036115A KR 102050126 B1 KR102050126 B1 KR 102050126B1
- Authority
- KR
- South Korea
- Prior art keywords
- compound
- carboxyl group
- photosensitive
- photosensitive composition
- equivalent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Polymerisation Methods In General (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Abstract
본 발명에서는 프린트 배선판 상에 양호하게 현상이 가능하고, 장시간 절연성을 유지할 수 있고, 기계 강도가 우수한 경화 피막을 형성할 수 있도록 하기 위해, 감광성 조성물은 (A) 카르복실기 함유 감광성 화합물, (B) 광중합 개시제, 및 (C) 에폭시 화합물을 함유하고, 또는 (D) 카르복실기를 갖지 않는 감광성 화합물을 더 함유하고, 해당 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상이다. 다른 형태에 있어서는, (A') 카르복실기 함유 화합물, (B) 광중합 개시제, 및 (C) 에폭시 화합물을 함유하는 감광성 조성물이며, 상기 (C) 에폭시 화합물의 에폭시기가 상기 (A') 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상 4당량 이하이고, 해당 감광성 조성물에 포함되는 액상 성분의 함유율이 유기 용제 및 충전제를 제외한 전체 성분에 대하여 5질량% 이상 30질량% 이하이다.In the present invention, the photosensitive composition includes (A) a carboxyl group-containing photosensitive compound and (B) photopolymerization in order to be able to develop well on a printed wiring board, to maintain insulation for a long time, and to form a cured film having excellent mechanical strength. The photosensitive compound which contains an initiator and (C) epoxy compound, or (D) does not have a carboxyl group is further contained, The double bond equivalent of this photosensitive composition is 400 or more in the state containing no organic solvent and a filler. In another aspect, it is a photosensitive composition containing (A ') carboxyl group-containing compound, (B) photoinitiator, and (C) epoxy compound, The epoxy group of the said (C) epoxy compound of the said (A') carboxyl group-containing compound It is 1.5 equivalent or more and 4 equivalent or less with respect to 1 equivalent of carboxyl groups, and the content rate of the liquid component contained in the said photosensitive composition is 5 mass% or more and 30 mass% or less with respect to the whole component except an organic solvent and a filler.
Description
본 발명은, 감광성 조성물 및 그의 경화층을 갖는 프린트 배선판에 관한 것이다.This invention relates to the printed wiring board which has a photosensitive composition and its hardened layer.
프린트 배선판에는, 회로 패턴의 도체층을 갖는 기재 상에 솔더 레지스트가 형성되어 있다. 이러한 솔더 레지스트의 재료로서는, 종래 다양한 감광성 조성물이 제안되어 있다. 예를 들어, 특허문헌 1에는 카르복실기를 갖는 중합체와, 에틸렌성 불포화 결합을 갖는 광중합성 화합물과, 광중합 개시제를 포함하는 영구 레지스트용 감광성 수지 조성물이 개시되어 있다.The soldering resist is formed in the printed wiring board on the base material which has a conductor layer of a circuit pattern. As a material of such a soldering resist, various photosensitive compositions are conventionally proposed. For example, Patent Document 1 discloses a photosensitive resin composition for permanent resist containing a polymer having a carboxyl group, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator.
그런데, 최근, 특히 솔더 레지스트 등의 감광성 조성물이 차량 탑재용의 프린트 배선판에 사용되는 경우, 고온 고습도 환경하에 있어서 장시간 절연성을 유지하는 것이나, 크랙이 발생하지 않는 기계 강도가 요구되고 있다.By the way, in recent years, especially when photosensitive compositions, such as a soldering resist, are used for the printed wiring board for vehicle mounting, maintaining insulation for a long time under high temperature, high humidity environment, and the mechanical strength which a crack does not produce is calculated | required.
그러나, 종래의 감광성 조성물에서는, 광중합성 단량체의 함유량이 많은 경우, 고온 고습도하에 있어서 절연성을 장시간 유지할 수 없거나, 크랙이 많이 발생한다는 문제가 발생하였다.However, in the conventional photosensitive composition, when there is much content of a photopolymerizable monomer, the problem that insulation cannot be maintained for a long time under high temperature, high humidity, or many cracks generate | occur | produced.
한편, 광중합성 단량체의 함유량을 감소시킨 경우, 감도가 내려가기 때문에 패턴 형성이 곤란해진다는 문제도 발생하였다.On the other hand, when content of a photopolymerizable monomer was reduced, since the sensitivity fell, the problem that pattern formation became difficult also occurred.
본 발명은, 상기한 바와 같은 종래 기술의 문제점을 감안하여 이루어진 것이며, 그의 기본적인 목적은 양호하게 패턴을 형성할 수 있고, 장시간 절연성을 유지할 수 있으며, 기계 강도가 우수한 경화 피막을 형성할 수 있는 감광성 조성물을 제공하는 것에 있다.This invention is made | formed in view of the above-mentioned problem of the prior art, The basic objective is the photosensitive which can form a pattern favorably, can maintain insulation for a long time, and can form the cured film excellent in mechanical strength. It is in providing a composition.
또한, 본 발명의 목적은, 이러한 우수한 특성을 갖는 감광성 조성물의 경화층을 갖는 장기 신뢰성이 높은 프린트 배선판을 제공하는 것에 있다.Moreover, the objective of this invention is providing the printed wiring board with high long-term reliability which has a hardened layer of the photosensitive composition which has such the outstanding characteristic.
상기 목적을 달성하기 위해, 본 발명의 제1 형태에 따르면, In order to achieve the above object, according to the first aspect of the present invention,
(A) 카르복실기 함유 감광성 화합물,(A) carboxyl group-containing photosensitive compound,
(B) 광중합 개시제, 및(B) photoinitiator, and
(C) 에폭시 화합물을 함유하는 감광성 조성물이며,(C) It is a photosensitive composition containing an epoxy compound,
상기 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상인 것을 특징으로 하는 감광성 조성물이 제공된다.There is provided a photosensitive composition, wherein the double bond equivalent of the photosensitive composition is 400 or more in a state containing no organic solvent and a filler.
다른 형태에 있어서는, 상기 각 성분 이외에 (D) 카르복실기를 갖지 않는 감광성 화합물을 더 함유하는 것을 특징으로 하는 감광성 조성물이 제공된다.In another aspect, the photosensitive composition which further contains the photosensitive compound which does not have a (D) carboxyl group other than each said component is provided.
적합한 형태에 따르면, 상기 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상 680 이하이고, 보다 바람직하게는 450 이상 650 이하이고, 더욱 바람직하게는 500 이상 650 이하이다. 또한 적합한 형태에 따르면, 상기 (A) 카르복실기 함유 감광성 화합물과 (D) 카르복실기를 갖지 않는 감광성 화합물의 혼합 성분에 있어서의 (D) 성분의 함유율이 30질량% 이하이다. 보다 적합한 형태에 따르면, 상기 (C) 에폭시 화합물의 에폭시기가 상기 (A) 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상이다.According to a suitable aspect, the double bond equivalent of the said photosensitive composition is 400 or more and 680 or less, More preferably, it is 450 or more and 650 or less, More preferably, it is 500 or more and 650 or less in the state containing no organic solvent and a filler. Moreover, according to a suitable aspect, the content rate of (D) component in the mixed component of the said (A) carboxyl group-containing photosensitive compound and the (D) photosensitive compound which does not have a carboxyl group is 30 mass% or less. According to a more suitable aspect, the epoxy group of the (C) epoxy compound is 1.5 equivalent or more relative to 1 equivalent of the carboxyl group of the (A) carboxyl group-containing compound.
또한 본 발명의 제2 형태에 따르면, Furthermore, according to the second aspect of the present invention,
(A') 카르복실기 함유 화합물, (A ') carboxyl group-containing compound,
(B) 광중합 개시제, 및 (B) photoinitiator, and
(C) 에폭시 화합물을 함유하는 감광성 조성물이며, (C) It is a photosensitive composition containing an epoxy compound,
상기 (C) 에폭시 화합물의 에폭시기가 상기 (A') 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상 4당량 이하이고, 해당 감광성 조성물에 포함되는 액상 성분의 함유율이 유기 용제 및 충전제를 제외한 전체 성분에 대하여, 5질량% 이상 30질량% 이하인 것을 특징으로 하는 감광성 조성물이 제공된다.The epoxy group of the above-mentioned (C) epoxy compound is 1.5 equivalent or more and 4 equivalents or less with respect to 1 equivalent of carboxyl group of the said (A ') carboxyl group-containing compound, and the content rate of the liquid component contained in the said photosensitive composition is the whole component except an organic solvent and a filler. It is 5 mass% or more and 30 mass% or less with respect to the photosensitive composition characterized by the above-mentioned.
적합한 형태에 따르면, 상기 (C) 에폭시 화합물의 에폭시기의 수가 2이다.According to a suitable aspect, the number of epoxy groups of the said (C) epoxy compound is two.
또한 본 발명에 따르면, 상기 감광성 조성물을 사용하여 형성되어 이루어지는 경화층을 갖는 것을 특징으로 하는 프린트 배선판도 제공된다.Moreover, according to this invention, the printed wiring board which has a hardened layer formed using the said photosensitive composition is also provided.
본 발명의 제1 형태의 감광성 조성물은, 상기한 바와 같이 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상이 되도록 함으로써, 양호하게 패턴을 형성할 수 있고, 고온 고습도하에 있어서도 장시간 절연성을 유지할 수 있으며, 크랙의 발생을 억제할 수 있다. 따라서, 이러한 우수한 특성을 갖는 감광성 조성물을 사용하여 솔더 레지스트나 층간 절연층 등의 경화층을 형성함으로써, 장기 신뢰성이 높은 프린트 배선판을 제공할 수 있다.The photosensitive composition of the first aspect of the present invention can form a pattern satisfactorily by making the double bond equivalent of the photosensitive composition to 400 or more in a state free of an organic solvent and a filler as described above, under high temperature and high humidity. Even if it can maintain insulation for a long time, generation | occurrence | production of a crack can be suppressed. Therefore, the printed wiring board with long-term reliability can be provided by forming hardening layers, such as a soldering resist and an interlayer insulation layer, using the photosensitive composition which has such the outstanding characteristic.
또한, 본 발명의 제2 형태의 감광성 조성물은, 상기한 바와 같이 (A') 카르복실기 함유 화합물, (B) 광중합 개시제, 및 (C) 에폭시 화합물을 함유하는 감광성 조성물이며, 상기 (C) 에폭시 화합물의 에폭시기가 상기 (A') 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상 4당량 이하이고, 해당 감광성 조성물에 포함되는 액상 성분의 함유율이 유기 용제 및 충전제를 제외한 전체 성분에 대하여 5질량% 이상 30질량% 이하가 되도록 함으로써, 양호하게 패턴을 형성할 수 있고, 고온 고습도하에 있어서도 장시간 절연성을 유지할 수 있으며, 크랙의 발생을 억제할 수 있다. 따라서, 이러한 우수한 특성을 갖는 감광성 조성물을 사용하여 솔더 레지스트나 층간 절연층 등의 경화층을 형성함으로써, 장기 신뢰성이 높은 프린트 배선판을 제공할 수 있다.Moreover, the photosensitive composition of the 2nd aspect of this invention is a photosensitive composition containing (A ') carboxyl group-containing compound, (B) photoinitiator, and (C) epoxy compound as above-mentioned, The said (C) epoxy compound The epoxy group of the compound (A ') is 1.5 equivalent or more and 4 equivalents or less with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing compound, and the content of the liquid component contained in the photosensitive composition is 5% by mass or more with respect to all components except the organic solvent and the filler. By setting it as 30 mass% or less, a pattern can be formed favorably, insulation can be maintained for a long time even under high temperature, high humidity, and generation | occurrence | production of a crack can be suppressed. Therefore, the printed wiring board with long-term reliability can be provided by forming hardening layers, such as a soldering resist and an interlayer insulation layer, using the photosensitive composition which has such the outstanding characteristic.
도 1은 실시예 및 비교예에 있어서의 액상 판정에 사용한 2개의 시험관을 도시하는 개략 측면도이다.1 is a schematic side view illustrating two test tubes used for liquid phase determination in Examples and Comparative Examples.
본 발명자들의 연구에 따르면, (A) 카르복실기 함유 감광성 화합물, (B) 광중합 개시제, 및 (C) 에폭시 화합물을 함유하는 감광성 조성물, 또는 (D) 카르복실기를 갖지 않는 감광성 화합물을 더 함유하는 감광성 조성물이며, 해당 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상인 경우, 본 발명의 과제를 해결할 수 있는 것을 발견하였다.According to the studies of the present inventors, the photosensitive composition containing (A) a carboxyl group-containing photosensitive compound, (B) photoinitiator, and (C) epoxy compound, or (D) a photosensitive compound which does not have a carboxyl group, When the double bond equivalent of the said photosensitive composition is 400 or more in the state which does not contain an organic solvent and a filler, it discovered that the subject of this invention can be solved.
상기 카르복실기를 갖지 않는 감광성 화합물, 즉 감광성 단량체(광중합성 단량체)의 함유량이 많은 경우, 고온 고습도하에 있어서 절연성을 장시간 유지할 수 없으며, 한편 감광성 단량체의 함유량을 감소시킨 경우, 감도가 내려가기 때문에 패턴 형성이 곤란해진다는 문제는, 감광성 조성물에 있어서의 유기 성분의 총량의 이중 결합 당량을 특정한 범위로 하는, 즉 상기 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상인 경우에 해결할 수 있는 것을 발견하여, 본 발명을 완성하기에 이른 것이다.When the content of the photosensitive compound which does not have the carboxyl group, that is, the photosensitive monomer (photopolymerizable monomer) is large, the insulation cannot be maintained for a long time under high temperature and high humidity, and when the content of the photosensitive monomer is reduced, the sensitivity is lowered to form a pattern. This problem of difficulty is solved when the double bond equivalent of the total amount of the organic components in the photosensitive composition is in a specific range, that is, the double bond equivalent of the photosensitive composition is 400 or more in a state that does not contain an organic solvent and a filler. It has been found that the present invention can be completed.
또한 본 발명자들의 연구에 따르면, (A') 카르복실기 함유 화합물, (B) 광중합 개시제, 및 (C) 에폭시 화합물을 함유하는 감광성 조성물이며, 상기 (C) 에폭시 화합물의 에폭시기가 상기 (A') 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상 4당량 이하이고, 해당 감광성 조성물에 포함되는 액상 성분의 함유율이 유기 용제 및 충전제를 제외한 전체 성분에 대하여 5질량% 이상 30질량% 이하인 경우, 본 발명의 과제를 해결할 수 있는 것을 발견하였다. 여기서, 「액상」인지의 여부의 판정은 20℃에서 행해진다.Moreover, according to the research of the present inventors, it is a photosensitive composition containing (A ') carboxyl group containing compound, (B) photoinitiator, and (C) epoxy compound, The epoxy group of the said (C) epoxy compound is said (A') carboxyl group 1.5 equivalent or more and 4 equivalent or less with respect to 1 equivalent of carboxyl groups of a containing compound, and when the content rate of the liquid component contained in the said photosensitive composition is 5 mass% or more and 30 mass% or less with respect to the whole component except an organic solvent and a filler, We found that we could solve the problem. Here, determination of whether it is "liquid phase" is performed at 20 degreeC.
상기한 바와 같이 카르복실기를 갖지 않는 감광성 화합물, 즉 감광성 단량체(광중합성 단량체)의 함유량이 많은 경우, 고온 고습도하에 있어서 절연성을 장시간 유지할 수 없다는 문제가 일어나기 쉽지만, 본 발명의 감광성 조성물에서는 감광성 단량체를 함유하지 않거나, 함유하는 경우여도 소량이기 때문에, 이러한 문제가 발생할 우려는 적다. 한편, 감광성 단량체의 함유량을 감소시킨 경우, 일반적으로 연화점이 올라가기 때문에 용해성이 저하되고, 패턴 형성이 곤란해진다는 문제는, 상기 (C) 에폭시 화합물의 에폭시기가 상기 (A') 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상 4당량 이하이고, 해당 감광성 조성물에 포함되는 액상 성분의 함유율이 유기 용제 및 충전제를 제외한 전체 성분에 대하여 5질량% 이상 30질량% 이하인 경우에 해결할 수 있는 것을 발견하여, 본 발명을 완성하기에 이른 것이다.As described above, when the content of the photosensitive compound having no carboxyl group, i.e., the photosensitive monomer (photopolymerizable monomer) is large, the problem that insulation cannot be maintained for a long time under high temperature and high humidity tends to occur, but the photosensitive composition of the present invention contains the photosensitive monomer. Even if it does not, or it contains, even if it contains a small quantity, there is little possibility that such a problem will arise. On the other hand, when content of the photosensitive monomer is reduced, since a softening point raises generally, solubility falls and pattern formation becomes difficult, the epoxy group of the said (C) epoxy compound of the said (A ') carboxyl group-containing compound Based on 1 equivalent of carboxyl group, it was found that it can be solved when the content of the liquid component contained in the photosensitive composition is 1.5 equivalent or more and 4 equivalent or less, and 5 mass% or more and 30 mass% or less with respect to all components except the organic solvent and the filler. The present invention has been completed.
이하, 본 발명의 감광성 조성물의 각 구성 성분에 대하여 설명한다.Hereinafter, each structural component of the photosensitive composition of this invention is demonstrated.
상기 카르복실기 함유 감광성 화합물 (A)에 있어서의 에틸렌성 불포화 이중 결합은, 아크릴산 또는 메타크릴산 또는 그들의 유도체 유래인 것이 바람직하다.It is preferable that the ethylenically unsaturated double bond in the said carboxyl group-containing photosensitive compound (A) is derived from acrylic acid, methacrylic acid, or derivatives thereof.
한편, 상기 카르복실기 함유 화합물 (A')로서는, 분자 중에 카르복실기를 갖는 공지 관용의 수지 화합물을 사용할 수 있다. 카르복실기 함유 수지로서는, 그 자체가 에틸렌성 불포화 이중 결합을 갖지 않는 카르복실기 함유 수지나, 에틸렌성 불포화 이중 결합을 갖는 카르복실기 함유 감광성 수지를 모두 사용할 수 있으며, 특정한 것으로 한정되지 않지만, 카르복실기 함유 감광성 수지가 광경화성이나 내현상성의 면에서 보다 바람직하다.In addition, as said carboxyl group-containing compound (A '), the well-known conventional resin compound which has a carboxyl group in a molecule | numerator can be used. As carboxyl group-containing resin, both the carboxyl group-containing resin which does not have ethylenically unsaturated double bond, and the carboxyl group-containing photosensitive resin which has ethylenically unsaturated double bond can be used, It is not limited to a specific thing, A carboxyl group-containing photosensitive resin is a sight It is more preferable in terms of chemical resistance and developability.
이러한 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물의 구체예로서는, 이하에 열거하는 바와 같은 화합물(올리고머 및 중합체 중 어느 것일 수도 있음)을 들 수 있다.As a specific example of such a carboxyl group-containing photosensitive compound or a carboxyl group-containing compound, the compound (which may be any of an oligomer and a polymer) listed below is mentioned.
(1) (메트)아크릴산 등의 불포화 카르복실산과, 스티렌, α-메틸스티렌 등의 불포화 이중 결합과 벤젠환을 갖는 화합물의 공중합에 의해 얻어지는 카르복실기 함유 수지.(1) Carboxyl group-containing resin obtained by copolymerization of unsaturated carboxylic acids, such as (meth) acrylic acid, and a compound which has unsaturated double bonds, such as styrene and (alpha) -methylstyrene, and a benzene ring.
(2) (메트)아크릴산 등의 불포화 카르복실산과, 스티렌, α-메틸스티렌 등의 불포화 이중 결합과 벤젠환을 갖는 화합물의 공중합에 의해 얻어지는 카르복실기 함유 수지에, 분자 내에 1개 이상의 에틸렌성 불포화기와 1개의 에폭시기를 갖는 화합물을 반응시켜 이루어지는 카르복실기 함유 감광성 수지.(2) To the carboxyl group-containing resin obtained by copolymerization of unsaturated carboxylic acids, such as (meth) acrylic acid, and unsaturated double bonds, such as styrene and (alpha) -methylstyrene, and a compound having a benzene ring, 1 or more ethylenically unsaturated groups in a molecule | numerator Carboxyl group containing photosensitive resin which makes the compound which has one epoxy group react.
(3) 방향족 디이소시아네이트와, 디메틸올프로피온산, 디메틸올부탄산 등의 카르복실기 함유 디알코올 화합물 및 폴리카르보네이트계 폴리올, 폴리에테르계 폴리올, 폴리에스테르계 폴리올, 폴리올레핀계 폴리올, 아크릴계 폴리올, 비스페놀 A계 알킬렌옥시드 부가체 디올, 페놀성 히드록실기 및 알코올성 히드록실기를 갖는 화합물 등의 디올 화합물의 중부가 반응에 의한 카르복실기 함유 우레탄 수지의 합성 중에, 히드록시알킬(메트)아크릴레이트 등의 분자 내에 1개의 수산기와 1개 이상의 (메트)아크릴기를 갖는 화합물을 가하고, 말단 (메트)아크릴화한 카르복실기 함유 감광성 우레탄 수지.(3) Aromatic diisocyanates, carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, and polycarbonate polyols, polyether polyols, polyester polyols, polyolefin polyols, acrylic polyols, and bisphenol A compounds. During synthesis of the carboxyl group-containing urethane resin by the polyaddition reaction of diol compounds such as alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group, in a molecule such as hydroxyalkyl (meth) acrylate The carboxyl group-containing photosensitive urethane resin which added the compound which has one hydroxyl group and one or more (meth) acryl groups, and was terminal (meth) acrylated.
(4) 지방족 디이소시아네이트, 분지 지방족 디이소시아네이트, 지환식 디이소시아네이트, 방향족 디이소시아네이트 등의 디이소시아네이트와, 비스페놀 A형 에폭시 수지, 비스페놀 F형 에폭시 수지, 비스페놀 S형 에폭시 수지, 비크실레놀형 에폭시 수지, 비페놀형 에폭시 수지 등의 벤젠환을 갖는 2관능 에폭시 수지의 (메트)아크릴레이트 또는 그의 부분 산 무수물 변성물, 카르복실기 함유 디알코올 화합물 및 디올 화합물의 중부가 반응에 의한 카르복실기 함유 감광성 우레탄 수지.(4) diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates and aromatic diisocyanates, bisphenol A type epoxy resins, bisphenol F type epoxy resins, bisphenol S type epoxy resins, and bixenol type epoxy resins; The carboxyl group-containing photosensitive urethane resin by the polyaddition reaction of the (meth) acrylate of the bifunctional epoxy resin which has a benzene ring, such as a biphenol type epoxy resin, or its partial acid anhydride modification, a carboxyl group-containing dialcohol compound, and a diol compound.
(5) 상기 (3)의 수지의 합성 중에, 히드록시알킬(메트)아크릴레이트 등의 분자 내에 1개의 수산기와 1개 이상의 (메트)아크릴기를 갖는 화합물이나, 이소포론 디이소시아네이트와 펜타에리트리톨트리아크릴레이트의 등몰 반응물 등, 분자 내에 1개의 이소시아네이트기와 1개 이상의 (메트)아크릴기를 갖는 화합물을 가하고, 말단 (메트)아크릴화한 카르복실기 함유 감광성 우레탄 수지.(5) A compound having one hydroxyl group and one or more (meth) acryl groups in a molecule such as hydroxyalkyl (meth) acrylate, or isophorone diisocyanate and pentaerythritol tree during the synthesis of the resin (3). The carboxyl group-containing photosensitive urethane resin which added the compound which has one isocyanate group and one or more (meth) acryl groups in a molecule | numerator, such as an equimolar reactant of an acrylate, and was terminal (meth) acrylated.
(6) 후술하는 바와 같은 벤젠환을 갖는 2관능 또는 그 이상의 다관능 에폭시 수지에 (메트)아크릴산을 반응시키고, 측쇄에 존재하는 수산기에 무수 프탈산, 테트라히드로 무수 프탈산, 헥사히드로 무수 프탈산 등의 2염기산 무수물을 부가시킨 카르복실기 함유 감광성 수지.(6) (meth) acrylic acid is made to react with the bifunctional or more than one polyfunctional epoxy resin which has a benzene ring as mentioned later, and 2, such as a phthalic anhydride, tetrahydro phthalic anhydride, hexahydro phthalic anhydride, is carried out by the hydroxyl group which exists in a side chain. Carboxyl group containing photosensitive resin which added basic acid anhydride.
(7) 후술하는 바와 같은 벤젠환을 갖는 2관능 에폭시 수지의 수산기를 추가로 에피클로로히드린으로 에폭시화한 다관능 에폭시 수지에 (메트)아크릴산을 반응시키고, 발생한 수산기에 2염기산 무수물을 부가시킨 카르복실기 함유 감광성 수지.(7) The hydroxyl group of the bifunctional epoxy resin which has a benzene ring as mentioned later is further reacted with (meth) acrylic acid to the polyfunctional epoxy resin epoxidized with epichlorohydrin, and the dibasic acid anhydride is added to the hydroxyl group which generate | occur | produced. Carboxyl group-containing photosensitive resin.
(8) 노볼락과 같은 다관능 페놀 화합물에 에틸렌옥시드 등의 환상 에테르 및/또는 프로필렌카르보네이트 등의 환상 카르보네이트를 부가시키고, 얻어진 수산기를 (메트)아크릴산으로 부분 에스테르화하고, 나머지 수산기에 무수 말레산, 테트라히드로 무수 프탈산, 무수 트리멜리트산, 무수 피로멜리트산 등의 다염기산 무수물을 반응시킨 카르복실기 함유 감광성 수지.(8) To the polyfunctional phenolic compounds, such as novolak, cyclic ethers, such as ethylene oxide, and / or cyclic carbonates, such as a propylene carbonate, are added, the hydroxyl group obtained is partially esterified with (meth) acrylic acid, and the remainder is The carboxyl group-containing photosensitive resin which made polybasic acid anhydrides, such as maleic anhydride, tetrahydro phthalic anhydride, trimellitic anhydride, a pyromellitic dianhydride, react with a hydroxyl group.
(9) 상기 (1) 내지 (8)의 수지에 추가로 글리시딜(메트)아크릴레이트, α-메틸글리시딜(메트)아크릴레이트 등의 분자 중에 1개의 에폭시기와 1개 이상의 (메트)아크릴로일기를 갖는 화합물을 부가하여 이루어지는 카르복실기 함유 감광성 수지.(9) In addition to the resins of the above (1) to (8), one epoxy group and at least one (meth) group in a molecule such as glycidyl (meth) acrylate and α-methylglycidyl (meth) acrylate. Carboxyl group containing photosensitive resin which adds the compound which has acryloyl group.
또한, 본 명세서에 있어서 (메트)아크릴레이트란, 아크릴레이트, 메타크릴레이트 및 그들의 혼합물을 총칭하는 용어이며, 다른 유사한 표현에 대해서도 마찬가지이다.In addition, in this specification, a (meth) acrylate is a term used generically for acrylate, methacrylate, and mixtures thereof, and the same also about other similar expression.
상기와 같은 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물은 백본·중합체의 측쇄에 다수의 카르복실기를 갖기 때문에, 희알칼리 수용액에 의한 현상이 가능해진다.Since the carboxyl group-containing photosensitive compound or the carboxyl group-containing compound as described above has a large number of carboxyl groups in the side chain of the backbone polymer, development with a rare alkali aqueous solution is possible.
또한, 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물의 산가는 30 내지 200mgKOH/g의 범위가 적당하고, 보다 바람직하게는 30 내지 150mgKOH/g, 특히 바람직하게는 45 내지 120mgKOH/g의 범위이다. 카르복실기 함유 감광성 화합물의 산가가 30mgKOH/g 미만이면 알칼리 현상이 곤란해지고, 한편 200mgKOH/g을 초과하면 현상액에 의한 노광부의 용해가 진행되기 때문에, 필요 이상으로 라인이 가늘어지거나, 경우에 따라서는 노광부와 미노광부의 구별 없이 현상액으로 용해 박리되어, 정상적인 레지스트 패턴의 묘화가 곤란해지기 때문에 바람직하지 않다.The acid value of the carboxyl group-containing photosensitive compound or the carboxyl group-containing compound is preferably in the range of 30 to 200 mgKOH / g, more preferably in the range of 30 to 150 mgKOH / g, particularly preferably in the range of 45 to 120 mgKOH / g. When the acid value of the carboxyl group-containing photosensitive compound is less than 30 mgKOH / g, alkali development becomes difficult. On the other hand, when the acid value exceeds 200 mgKOH / g, dissolution of the exposed portion by the developing solution proceeds, so that the line becomes thinner than necessary or, in some cases, the exposed portion. It is not preferable because it is dissolved and peeled off with a developer without distinction between the unexposed portion and the drawing of a normal resist pattern becomes difficult.
또한, 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물의, 예를 들어 겔·투과·크로마토그래피(GPC)로 측정한 경우의 중량 평균 분자량 Mw(폴리스티렌 환산의 중량 평균 분자량)는 수지 골격에 따라 상이하지만, 4,000보다도 크고 150,000 이하, 나아가 5,000 이상 100,000 이하의 범위에 있는 것이 바람직하다. 중량 평균 분자량이 4,000 이하이면, 무점착 성능이 떨어지는 경우가 있으며, 노광 후의 도막의 내습성이 나쁘고, 현상시에 막 감소가 발생하고, 해상도가 크게 떨어지는 경우가 있다. 한편, 중량 평균 분자량이 150,000을 초과하면, 현상성이 현저하게 나빠지는 경우가 있기 때문에 바람직하지 않다.In addition, although the weight average molecular weight Mw (weight average molecular weight in polystyrene conversion) of the said carboxyl group-containing photosensitive compound or carboxyl group-containing compound measured by gel permeation chromatography (GPC), for example, differs according to resin skeleton, It is preferable that it is larger than 4,000 and is 150,000 or less, Furthermore, it exists in the range of 5,000 or more and 100,000 or less. If the weight average molecular weight is 4,000 or less, the adhesion-free performance may be inferior, the moisture resistance of the coating film after exposure is poor, the film decreases at the time of image development, and the resolution may fall large. On the other hand, when a weight average molecular weight exceeds 150,000, developability may remarkably worsen and it is unpreferable.
카르복실기 함유 감광성 화합물은, 분자 중에 에틸렌성 불포화 이중 결합을 갖는 한 상기 열거한 것에 한하지 않고 사용할 수 있으며, 1종류일 수도 2종 이상을 혼합하여도 사용할 수 있다.The carboxyl group-containing photosensitive compound can be used without being limited to the above-mentioned as long as it has an ethylenically unsaturated double bond in a molecule | numerator, and can also be used even if it is one type or in mixture of 2 or more types.
본 발명에서 사용하는 광중합 개시제 (B)로서는, 옥심에스테르기를 갖는 옥심에스테르계 광중합 개시제, α-아미노아세토페논계 광중합 개시제, 아실포스핀옥시드계 광중합 개시제로 이루어지는 군으로부터 선택되는 적어도 1종의 광중합 개시제를 적절하게 사용할 수 있다.As a photoinitiator (B) used by this invention, at least 1 type of photoinitiator selected from the group which consists of an oxime ester photoinitiator which has an oxime ester group, the (alpha)-amino acetophenone type photoinitiator, and the acylphosphine oxide type photoinitiator. Can be used as appropriate.
상기 옥심에스테르계 광중합 개시제로서는, 분자 내에 2개의 옥심에스테르기를 갖는 광중합 개시제를 적절하게 사용할 수 있다.As said oxime ester system photoinitiator, the photoinitiator which has two oxime ester groups in a molecule can be used suitably.
이러한 옥심에스테르계 광중합 개시제의 배합량은, 조성물 전체량의 0.02 내지 10질량%로 하는 것이 바람직하다. 0.02질량% 미만이면 구리 상에서의 광경화성이 부족하고, 도막이 박리됨과 함께, 내약품성 등의 도막 특성이 저하된다. 한편, 10질량%를 초과하면 건조 도막 표면에서의 광흡수가 심해지고, 심부 경화성이 저하되는 경향이 있다.It is preferable that the compounding quantity of such an oxime ester system photoinitiator shall be 0.02-10 mass% of the whole composition amount. If it is less than 0.02 mass%, the photocurability on copper will run short, while a coating film will peel, and coating film characteristics, such as chemical-resistance, will fall. On the other hand, when it exceeds 10 mass%, there exists a tendency for the light absorption on the dry coating film surface to become severe, and deep-curing property falls.
상기 α-아미노아세토페논계 광중합 개시제로서는, 구체적으로는 2-메틸-1-[4-(메틸티오)페닐]-2-모르폴리노프로파논-1,2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)-부탄-1-온, 2-(디메틸아미노)-2-[(4-메틸페닐)메틸]-1-[4-(4-모르폴리닐)페닐]-1-부타논, N,N-디메틸아미노아세토페논 등을 들 수 있다.Specifically as said (alpha)-amino acetophenone type photoinitiator, 2-methyl-1- [4- (methylthio) phenyl] -2- morpholino propane 1, 2- benzyl-2- dimethylamino-1 -(4-morpholinophenyl) -butan-1-one, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1 -Butanone, N, N-dimethylaminoacetophenone, etc. are mentioned.
상기 아실포스핀옥시드계 광중합 개시제로서는, 구체적으로는 2,4,6-트리메틸벤조일디페닐포스핀옥시드, 비스(2,4,6-트리메틸벤조일)-페닐포스핀옥시드, 비스(2,6-디메톡시벤조일)-2,4,4-트리메틸-펜틸포스핀옥시드 등을 들 수 있다.Specifically as said acyl phosphine oxide type photoinitiator, 2,4,6- trimethyl benzoyl diphenyl phosphine oxide, bis (2,4, 6- trimethyl benzoyl)-phenylphosphine oxide, bis (2, 6-, Dimethoxybenzoyl) -2,4,4-trimethyl-pentylphosphine oxide and the like.
이들 α-아미노아세토페논계 광중합 개시제, 아실포스핀옥시드계 광중합 개시제의 배합량은, 조성물 전체량의 0.5 내지 15질량%로 하는 것이 바람직하다. 0.5질량% 미만이면 마찬가지로 구리 상에서의 광경화성이 부족하고, 도막이 박리됨과 함께, 내약품성 등의 도막 특성이 저하된다. 한편, 15질량%를 초과하면, 아웃 가스의 감소 효과가 얻어지지 않고, 나아가 건조 도막 표면에서의 광흡수가 심해지고, 심부 경화성이 저하되는 경향이 있다.It is preferable that the compounding quantity of these (alpha)-amino acetophenone series photoinitiators and an acyl phosphine oxide type photoinitiators shall be 0.5-15 mass% of the composition whole quantity. If it is less than 0.5 mass%, the photocurability on copper is similarly lacking, while a coating film peels, coating film characteristics, such as chemical-resistance, fall. On the other hand, when it exceeds 15 mass%, the effect of reducing outgas is not obtained, and further, the light absorption in the dry coating film surface becomes severe, and there exists a tendency for deep-curing property to fall.
그 이외에, 본 발명의 감광성 조성물에 적절하게 사용할 수 있는 광중합 개시제, 광개시 보조제 및 증감제로서는, 벤조인 화합물, 아세토페논 화합물, 안트라퀴논 화합물, 티오크산톤 화합물, 케탈 화합물, 벤조페논 화합물, 3급 아민 화합물 및 크산톤 화합물 등을 들 수 있다.In addition, as a photoinitiator, a photoinitiator, and a sensitizer which can be used suitably for the photosensitive composition of this invention, a benzoin compound, an acetophenone compound, an anthraquinone compound, a thioxanthone compound, a ketal compound, a benzophenone compound, 3 And higher amine compounds and xanthone compounds.
상기 벤조인 화합물로서는, 구체적으로는 예를 들어 벤조인, 벤조인메틸에테르, 벤조인에틸에테르, 벤조인이소프로필에테르 등을 들 수 있다.Specifically as said benzoin compound, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, etc. are mentioned, for example.
상기 아세토페논 화합물로서는, 구체적으로는 예를 들어 아세토페논, 2,2-디메톡시-2-페닐아세토페논, 2,2-디에톡시-2-페닐아세토페논, 1,1-디클로로아세토페논 등을 들 수 있다.Specific examples of the acetophenone compound include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, and the like. Can be mentioned.
상기 안트라퀴논 화합물로서는, 구체적으로는 예를 들어 2-메틸안트라퀴논, 2-에틸안트라퀴논, 2-t-부틸안트라퀴논, 1-클로로안트라퀴논 등을 들 수 있다.Specifically as said anthraquinone compound, 2-methyl anthraquinone, 2-ethyl anthraquinone, 2-t- butyl anthraquinone, 1-chloro anthraquinone, etc. are mentioned, for example.
상기 티오크산톤 화합물로서는, 구체적으로는 예를 들어 2,4-디메틸티오크산톤, 2,4-디에틸티오크산톤, 2-클로로티오크산톤, 2,4-디이소프로필티오크산톤 등을 들 수 있다.Specific examples of the thioxanthone compound include 2,4-dimethyl thioxanthone, 2,4-diethyl thioxanthone, 2-chloro thioxanthone, 2,4-diisopropyl thioxanthone, and the like. Can be mentioned.
상기 케탈 화합물로서는, 구체적으로는 예를 들어 아세토페논디메틸케탈, 벤질디메틸케탈 등을 들 수 있다.Specifically as said ketal compound, acetophenone dimethyl ketal, benzyl dimethyl ketal, etc. are mentioned, for example.
상기 벤조페논 화합물로서는, 구체적으로는 예를 들어 벤조페논, 4-벤조일디페닐술피드, 4-벤조일-4'-메틸디페닐술피드, 4-벤조일-4'-에틸디페닐술피드, 4-벤조일-4'-프로필디페닐술피드 등을 들 수 있다.Specific examples of the benzophenone compound include benzophenone, 4-benzoyldiphenyl sulfide, 4-benzoyl-4'-methyldiphenyl sulfide, 4-benzoyl-4'-ethyldiphenyl sulfide, 4 -Benzoyl-4'-propyldiphenyl sulfide, etc. are mentioned.
상기 3급 아민 화합물로서는, 구체적으로는 예를 들어 에탄올아민 화합물, 디알킬아미노벤젠 구조를 갖는 화합물, 예를 들어 4,4'-디메틸아미노벤조페논, 4,4'-디에틸아미노벤조페논 등의 디알킬아미노벤조페논, 7-(디에틸아미노)-4-메틸-2H-1-벤조피란-2-온(7-(디에틸아미노)-4-메틸쿠마린) 등의 디알킬아미노기 함유 쿠마린 화합물, 4-디메틸아미노벤조산에틸, 2-디메틸아미노벤조산에틸, 4-디메틸아미노벤조산(n-부톡시)에틸, p-디메틸아미노벤조산이소아밀에틸에스테르, 4-디메틸아미노벤조산2-에틸헥실 등을 들 수 있다.Specifically as said tertiary amine compound, For example, an ethanolamine compound, the compound which has a dialkylaminobenzene structure, for example, 4,4'- dimethylamino benzophenone, 4,4'- diethylamino benzophenone, etc. Dialkylamino group-containing coumarins such as dialkylaminobenzophenone and 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin) Compound, 4-dimethylaminobenzoic acid ethyl, 2-dimethylaminobenzoic acid ethyl, 4-dimethylaminobenzoic acid (n-butoxy) ethyl, p-dimethylaminobenzoic acid isoamyl ethyl ester, 4-dimethylaminobenzoic acid 2-ethylhexyl, etc. Can be mentioned.
상기 광중합 개시제, 광개시 보조제 및 증감제 중, 티오크산톤 화합물 및 3급 아민 화합물이 바람직하다. 특히, 티오크산톤 화합물이 포함되는 것이 심부 경화성의 면에서 바람직하다. 이 중에서도, 2,4-디메틸티오크산톤, 2,4-디에틸티오크산톤, 2-클로로티오크산톤, 2,4-디이소프로필티오크산톤 등의 티오크산톤 화합물을 포함하는 것이 바람직하다.Among the above photoinitiators, photoinitiators and sensitizers, thioxanthone compounds and tertiary amine compounds are preferred. In particular, it is preferable to contain a thioxanthone compound from the point of deep-hardening property. Especially, it is preferable to contain thioxanthone compounds, such as 2, 4- dimethyl thioxanthone, 2, 4- diethyl thioxanthone, 2-chloro thioxanthone, and 2, 4- diisopropyl thioxanthone. Do.
이러한 티오크산톤 화합물의 배합량으로서는, 조성물 전체량의 15질량% 이하인 것이 바람직하다. 티오크산톤 화합물의 배합량이 15질량%를 초과하면 후막 경화성이 저하됨과 함께, 제품의 비용 상승으로 이어진다. 보다 바람직하게는 10질량% 이하이다.As a compounding quantity of such a thioxanthone compound, it is preferable that it is 15 mass% or less of the composition whole quantity. When the compounding quantity of a thioxanthone compound exceeds 15 mass%, while thick film sclerosis | hardenability will fall, it will lead to the cost increase of a product. More preferably, it is 10 mass% or less.
또한, 3급 아민 화합물로서는, 디알킬아미노벤젠 구조를 갖는 화합물이 바람직하고, 그 중에서도 디알킬아미노벤조페논 화합물, 최대 흡수 파장이 350 내지 450nm에 있는 디알킬아미노기 함유 쿠마린 화합물 및 케토쿠마린류가 특히 바람직하다.Moreover, as a tertiary amine compound, the compound which has a dialkylaminobenzene structure is preferable, The dialkylamino benzophenone compound, the dialkylamino group containing coumarin compound and ketocoumarins in which the maximum absorption wavelength is 350-450 nm is especially preferable. Particularly preferred.
상기 디알킬아미노벤조페논 화합물로서는, 4,4'-디에틸아미노벤조페논이 독성도 낮아 바람직하다. 상기 디알킬아미노기 함유 쿠마린 화합물은, 최대 흡수 파장이 350 내지 410nm로 자외선 영역에 있기 때문에, 착색이 적고, 무색 투명한 감광성 조성물은 물론, 착색 안료를 사용하여, 착색 안료 자체의 색을 반영한 착색된 경화층을 제공하는 것이 가능해진다. 특히, 7-(디에틸아미노)-4-메틸-2H-1-벤조피란-2-온이, 파장 400 내지 410nm의 레이저광에 대하여 우수한 증감 효과를 나타내기 때문에 바람직하다.As said dialkylamino benzophenone compound, 4,4'- diethylamino benzophenone is preferable with low toxicity. Since the dialkylamino group-containing coumarin compound has a maximum absorption wavelength in the ultraviolet region at 350 to 410 nm, there is little coloration and colored curing that reflects the color of the color pigment itself using a color pigment as well as a colorless transparent photosensitive composition. It is possible to provide a layer. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferable because it exhibits an excellent sensitizing effect with respect to laser light having a wavelength of 400 to 410 nm.
이러한 3급 아민 화합물의 배합량으로서는, 조성물 전체량의 0.1 내지 15질량%로 하는 것이 바람직하다. 3급 아민 화합물의 배합량이 0.1질량% 미만이면 충분한 증감 효과를 얻을 수 없는 경향이 있다. 15질량%를 초과하면, 3급 아민 화합물에 의한 건조 도막의 표면에서의 광흡수가 심해지고, 심부 경화성이 저하되는 경향이 있다.As a compounding quantity of such a tertiary amine compound, it is preferable to set it as 0.1-15 mass% of the composition whole quantity. When the compounding quantity of a tertiary amine compound is less than 0.1 mass%, there exists a tendency for sufficient sensitization effect not to be acquired. When it exceeds 15 mass%, there exists a tendency for the light absorption on the surface of the dry coating film by a tertiary amine compound to become deep, and deep-curing property falls.
이들 광중합 개시제, 광개시 보조제 및 증감제는, 단독으로 또는 2종류 이상의 혼합물로서 사용할 수 있다.These photoinitiators, photoinitiator, and sensitizer can be used individually or as a mixture of 2 or more types.
이러한 광중합 개시제, 광개시 보조제 및 증감제의 총량은, 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물 100질량부에 대하여 35질량부 이하인 것이 바람직하다. 35질량부를 초과하면, 이들의 광흡수에 의해 심부 경화성이 저하되는 경향이 있다.It is preferable that the total amount of such a photoinitiator, a photoinitiation adjuvant, and a sensitizer is 35 mass parts or less with respect to 100 mass parts of said carboxyl group-containing photosensitive compound or carboxyl group-containing compound. When it exceeds 35 mass parts, there exists a tendency for deep-part sclerosis | hardenability to fall by these light absorption.
또한, 이들 광중합 개시제, 광개시 보조제 및 증감제는 특정한 파장을 흡수하기 때문에, 경우에 따라서는 감도가 낮아져, 자외선 흡수제로서 작용하는 경우가 있다. 그러나, 이들은 조성물의 감도를 향상시키는 것만의 목적으로 사용되는 것이 아니다. 필요에 따라 특정한 파장의 광을 흡수시켜, 표면의 광반응성을 높이고, 레지스트의 라인 형상 및 개구를 수직, 테이퍼상, 역테이퍼상으로 변화시킴과 함께, 라인 폭이나 개구 직경의 가공 정밀도를 향상시킬 수 있다.Moreover, since these photoinitiators, photoinitiation adjuvant, and a sensitizer absorb a specific wavelength, in some cases, a sensitivity becomes low and may act as a ultraviolet absorber. However, they are not used only for the purpose of improving the sensitivity of the composition. By absorbing light of a specific wavelength as needed, it improves the photoreactivity of the surface, changes the line shape and opening of the resist into vertical, tapered, and inverse tapered, and improves the processing accuracy of the line width and the opening diameter. Can be.
상기 에폭시 화합물 (C)로서는, 분자 중에 복수의 에폭시기를 갖는 다관능 에폭시 수지, 특히 벤젠환을 갖는 다관능 에폭시 수지가 바람직하다. 에폭시 수지의 구체예로서는, 비스페놀 A형 에폭시 수지, 브롬화 에폭시 수지, 노볼락형 에폭시 수지, 비스페놀 F형 에폭시 수지, 수소 첨가 비스페놀 A형 에폭시 수지, 글리시딜아민형 에폭시 수지, 히단토인형 에폭시 수지, 트리히드록시페닐메탄형 에폭시 수지, 비크실레놀형 또는 비페놀형 에폭시 수지 또는 그들의 혼합물, 테트라페닐올에탄형 에폭시 수지, 복소환식 에폭시 수지, 디글리시딜프탈레이트 수지, 테트라글리시딜크실레노일에탄 수지, 나프탈렌기 함유 에폭시 수지, 디시클로펜타디엔 골격을 갖는 에폭시 수지, 글리시딜메타크릴레이트 공중합계 에폭시 수지, 나아가 시클로헥실말레이미드와 글리시딜메타크릴레이트의 공중합 에폭시 수지, 에폭시 변성의 폴리부타디엔 고무 유도체, CTBN 변성 에폭시 수지 등을 들 수 있지만, 이들로 한정되는 것은 아니다. 이들 에폭시 수지는, 단독으로 또는 2종 이상을 조합하여 사용할 수 있다.As said epoxy compound (C), the polyfunctional epoxy resin which has a some epoxy group in a molecule | numerator, especially the polyfunctional epoxy resin which has a benzene ring is preferable. Specific examples of the epoxy resins include bisphenol A type epoxy resins, brominated epoxy resins, novolac type epoxy resins, bisphenol F type epoxy resins, hydrogenated bisphenol A type epoxy resins, glycidylamine type epoxy resins, hydantoin type epoxy resins, Trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or mixtures thereof, tetraphenylolethane type epoxy resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetraglycidyl xylenoylethane resin , Naphthalene group-containing epoxy resin, epoxy resin having a dicyclopentadiene skeleton, glycidyl methacrylate copolymer type epoxy resin, further copolymerization epoxy resin of cyclohexyl maleimide and glycidyl methacrylate, polymodified polybutadiene Rubber derivatives, CTBN modified epoxy resins, and the like. It is not. These epoxy resins can be used individually or in combination of 2 or more types.
상기 에폭시 화합물의 배합량은, 조성물 중의 카르복실기 1당량에 대하여 1.5당량 이상이 되는 범위가 바람직하고, 1.5당량 이상 5당량 이하가 되는 범위가 보다 바람직하고, 1.5당량 이상 4당량 이하가 되는 범위가 더욱 바람직하다. 에폭시 화합물의 배합량이 1.5당량 미만인 경우, 경화층의 절연성과 크랙 내성이 저하되기 때문에 바람직하지 않다. 한편, 에폭시 화합물의 배합량이 5당량을 초과하는 경우, 현상성이 저하되기 때문에 바람직하지 않다.As for the compounding quantity of the said epoxy compound, the range which becomes 1.5 equivalent or more with respect to 1 equivalent of carboxyl groups in a composition is preferable, The range which becomes 1.5 equivalent or more and 5 equivalent or less is more preferable, The range which becomes 1.5 equivalent or more and 4 equivalent or less is further more preferable. Do. When the compounding quantity of an epoxy compound is less than 1.5 equivalent, since the insulation and crack resistance of a hardened layer fall, it is unpreferable. On the other hand, when the compounding quantity of an epoxy compound exceeds 5 equivalent, since developability falls, it is not preferable.
본 발명의 감광성 조성물은, 경화 촉매로서, 예를 들어 이미다졸, 2-메틸이미다졸, 2-에틸이미다졸, 2-에틸-4-메틸이미다졸, 2-페닐이미다졸, 4-페닐이미다졸, 1-시아노에틸-2-페닐이미다졸, 1-(2-시아노에틸)-2-에틸-4-메틸이미다졸 등의 이미다졸 유도체: 디시안디아미드, 벤질디메틸아민, 4-(디메틸아미노)-N,N-디메틸벤질아민, 4-메톡시-N,N-디메틸벤질아민, 4-메틸-N,N-디메틸벤질아민 등의 아민 화합물: 아디프산히드라지드, 세박산히드라지드 등의 히드라진 화합물: 트리페닐포스핀 등의 인 화합물 등을 더 첨가할 수 있다. 특히, 환상 에테르기를 갖는 화합물과 카르복실기의 반응을 촉진하는 것이면, 이들로 한정되는 것은 아니다. 이들 촉매는, 단독으로 또는 2종 이상을 혼합하여 사용하여도 상관없다. 또한, 밀착성 부여제로서도 기능하는 구아나민, 아세토구아나민, 벤조구아나민, 멜라민, 2,4-디아미노-6-메타크릴로일옥시에틸-S-트리아진, 2-비닐-2,4-디아미노-S-트리아진, 2-비닐-4,6-디아미노-S-트리아진·이소시아누르산 부가물, 2,4-디아미노-6-메타크릴로일옥시에틸-S-트리아진·이소시아누르산 부가물 등의 S-트리아진 유도체를 사용할 수도 있고, 바람직하게는 이들 화합물을 상기 경화 촉매와 병용한다. 상기 경화 촉매의 배합량은 통상의 양적 비율로 충분하며, 예를 들어 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물 100질량부에 대하여 0.1 내지 20질량부, 바람직하게는 0.5 내지 15.0질량부의 비율이다.The photosensitive composition of this invention is a hardening catalyst, for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4 Imidazole derivatives such as -phenylimidazole, 1-cyanoethyl-2-phenylimidazole and 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole: dicyandiamide, benzyl Amine compounds such as dimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl-N, N-dimethylbenzylamine: adipic acid Hydrazine compounds, such as a hydrazide and a sebacic acid hydrazide: Phosphorus compounds, such as a triphenylphosphine, etc. can be further added. In particular, if it promotes reaction of the compound which has a cyclic ether group, and a carboxyl group, it is not limited to these. You may use these catalysts individually or in mixture of 2 or more types. In addition, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine and 2-vinyl-2,4-, which also function as an adhesion imparting agent Diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine-isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-tri S-triazine derivatives, such as azine and isocyanuric acid adduct, can also be used, Preferably these compounds are used together with the said curing catalyst. The compounding quantity of the said curing catalyst is sufficient in a normal quantitative ratio, For example, it is 0.1-20 mass parts with respect to 100 mass parts of said carboxyl group-containing photosensitive compound or carboxyl group-containing compound, Preferably it is the ratio of 0.5-15.0 mass part.
상기 카르복실기를 갖지 않는 감광성 화합물 (D), 즉 감광성 단량체로서는 분자 중에 1개 이상, 바람직하게는 2개 이상의 에틸렌성 불포화 이중 결합을 갖는 화합물을 사용할 수 있다. 감광성 단량체는, 활성 에너지선 조사에 의해 광경화되어, 상기 카르복실기 함유 감광성 화합물을 알칼리 수용액에 불용화하거나, 또는 불용화를 돕는 것이다. 이러한 화합물로서는, 관용 공지된 폴리에스테르(메트)아크릴레이트, 폴리에테르(메트)아크릴레이트, 우레탄(메트)아크릴레이트, 카르보네이트(메트)아크릴레이트, 에폭시(메트)아크릴레이트를 사용할 수 있으며, 구체적으로는 2-히드록시에틸아크릴레이트, 2-히드록시프로필아크릴레이트 등의 히드록시알킬아크릴레이트류; 에틸렌글리콜, 메톡시테트라에틸렌글리콜, 폴리에틸렌글리콜, 프로필렌글리콜 등의 글리콜의 디아크릴레이트류; N,N-디메틸아크릴아미드, N-메틸올아크릴아미드, N,N-디메틸아미노프로필아크릴아미드 등의 아크릴아미드류; N,N-디메틸아미노에틸아크릴레이트, N,N-디메틸아미노프로필아크릴레이트 등의 아미노알킬아크릴레이트류; 헥산디올, 트리메틸올프로판, 펜타에리트리톨, 디펜타에리트리톨, 트리스-히드록시에틸이소시아누레이트 등의 다가 알코올 또는 이들의 에틸렌옥시드 부가물, 프로필렌옥시드 부가물, 또는 ε-카프로락톤 부가물 등의 다가 아크릴레이트류; 페녹시아크릴레이트, 비스페놀 A 디아크릴레이트 및 이들의 페놀류의 에틸렌옥시드 부가물 또는 프로필렌옥시드 부가물 등의 다가 아크릴레이트류; 글리세린디글리시딜에테르, 글리세린트리글리시딜에테르, 트리메틸올프로판트리글리시딜에테르, 트리글리시딜이소시아누레이트 등의 글리시딜에테르의 다가 아크릴레이트류; 상기로 한정되지 않으며, 폴리에테르폴리올, 폴리카르보네이트디올, 수산기 말단 폴리부타디엔, 폴리에스테르폴리올 등의 폴리올을 직접 아크릴레이트화,또는 디이소시아네이트를 통해 우레탄아크릴레이트화한 아크릴레이트류 및 멜라민아크릴레이트, 및/또는 상기 아크릴레이트에 대응하는 각 메타크릴레이트류 등을 들 수 있다.As photosensitive compound (D) which does not have the said carboxyl group, ie, a photosensitive monomer, the compound which has 1 or more, preferably 2 or more ethylenically unsaturated double bond in a molecule | numerator can be used. A photosensitive monomer is photocured by active energy ray irradiation, and insolubilizes or insolubilizes the said carboxyl group-containing photosensitive compound in aqueous alkali solution. As such a compound, conventionally well-known polyester (meth) acrylate, polyether (meth) acrylate, urethane (meth) acrylate, carbonate (meth) acrylate, and epoxy (meth) acrylate can be used, Specifically, hydroxyalkyl acrylates, such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; Diacrylates of glycols such as ethylene glycol, methoxy tetraethylene glycol, polyethylene glycol and propylene glycol; Acrylamides such as N, N-dimethylacrylamide, N-methylolacrylamide and N, N-dimethylaminopropylacrylamide; Aminoalkyl acrylates such as N, N-dimethylaminoethyl acrylate and N, N-dimethylaminopropyl acrylate; Polyhydric alcohols such as hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethyl isocyanurate or ethylene oxide adducts thereof, propylene oxide adducts, or ε-caprolactone addition Polyvalent acrylates such as water; Polyhydric acrylates, such as ethylene oxide adduct or propylene oxide adduct of phenoxy acrylate, bisphenol A diacrylate and these phenols; Polyhydric acrylates of glycidyl ethers such as glycerin diglycidyl ether, glycerin triglycidyl ether, trimethylolpropane triglycidyl ether and triglycidyl isocyanurate; Not limited to the above, acrylates and melamine acrylates in which polyols such as polyether polyols, polycarbonate diols, hydroxyl-terminated polybutadienes, polyester polyols are directly acrylated or urethane acrylated through diisocyanates And / or each methacrylate corresponding to the said acrylate etc. are mentioned.
또한, 크레졸 노볼락형 에폭시 수지 등의 다관능 에폭시 수지에 아크릴산을 반응시킨 에폭시아크릴레이트 수지나, 나아가 이 에폭시아크릴레이트 수지의 수산기에 펜타에리트리톨트리아크릴레이트 등의 히드록시아크릴레이트와 이소포론디이소시아네이트 등의 디이소시아네이트의 하프 우레탄 화합물을 반응시킨 에폭시우레탄아크릴레이트 화합물 등을 들 수 있다. 이러한 에폭시아크릴레이트계 수지는 지촉 건조성을 저하시키지 않고, 광경화성을 향상시킬 수 있다.Moreover, hydroxyacrylates, such as pentaerythritol triacrylate, and isophorone di in the epoxy acrylate resin which made acrylic acid react with polyfunctional epoxy resins, such as a cresol novolak-type epoxy resin, and also the hydroxyl group of this epoxy acrylate resin. Epoxyurethane acrylate compounds etc. which reacted the half urethane compound of diisocyanate, such as an isocyanate, are mentioned. Such epoxy acrylate-based resin can improve photocurability without deteriorating the touch dryness.
상기와 같은 카르복실기를 갖지 않는 감광성 화합물은, 예를 들어 GPC 측정에 의한 중량 평균 분자량 Mw가 4000 이하인 화합물이다.The photosensitive compound which does not have the above carboxyl group is a compound whose weight average molecular weight Mw by GPC measurement is 4000 or less, for example.
또한, 카르복실기를 갖지 않는 감광성 화합물의 배합량은, 전체 감광성 성분(카르복실기 함유 감광성 화합물+카르복실기를 갖지 않는 감광성 화합물)의 30질량% 이하, 바람직하게는 1질량% 이상, 10질량% 이하, 더욱 바람직하게는 1질량% 이상, 5질량% 이하가 적당하다.In addition, the compounding quantity of the photosensitive compound which does not have a carboxyl group is 30 mass% or less, Preferably it is 1 mass% or more and 10 mass% or less of all the photosensitive components (photosensitive compound which does not have a carboxyl group-containing photosensitive compound + carboxyl group), More preferably, 1 mass% or more and 5 mass% or less are suitable.
본 발명의 감광성 조성물은, 필요에 따라 폴리이미드 등의 기재와의 밀착성을 향상시키기 위해, 공지 관용의 머캅토 화합물이나 밀착 촉진제를 함유할 수 있다. 머캅토 화합물로서는, 2-머캅토프로피온산, 트리메틸올프로판트리스(2-티오프로피오네이트), 2-머캅토에탄올, 2-아미노티오페놀, 3-머캅토-1,2,4-트리아졸, 3-머캅토-프로필트리메톡시실란 등의 머캅토기 함유 실란 커플링제 등을 들 수 있다. 밀착 촉진제로서는, 예를 들어 벤즈이미다졸, 벤즈옥사졸, 벤즈티아졸, 2-머캅토벤즈이미다졸, 2-머캅토벤즈옥사졸, 2-머캅토벤즈티아졸, 3-모르폴리노메틸-1-페닐-트리아졸-2-티온, 5-아미노-3-모르폴리노메틸-티아졸-2-티온, 2-머캅토-5-메틸티오-티아디아졸, 트리아졸, 테트라졸, 벤조트리아졸, 카르복시벤조트리아졸, 아미노기 함유 벤조트리아졸, 비닐트리아진 등이 있다. 이들은 각각 단독으로 사용할 수도 있고, 2종 이상 조합하여 사용할 수도 있다. 그의 배합량은, 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물 100질량부당 10질량부 이하의 범위가 적당하다. 이들 화합물의 배합량이 상기 범위를 초과한 경우, 가교 반응에 필요한 상기 에폭시 화합물의 에폭시기를 소비하여(에폭시기와 반응하여), 가교 밀도가 내려가기 때문에 바람직하지 않다.The photosensitive composition of this invention can contain a well-known conventional mercapto compound and an adhesion promoter, in order to improve adhesiveness with base materials, such as a polyimide, as needed. Examples of the mercapto compound include 2-mercaptopropionic acid, trimethylolpropane tris (2-thiopropionate), 2-mercaptoethanol, 2-aminothiophenol, 3-mercapto-1,2,4-triazole, Mercapto group containing silane coupling agents, such as 3-mercapto- propyl trimethoxysilane, etc. are mentioned. As an adhesion promoter, for example, benzimidazole, benzoxazole, benzthiazole, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzthiazole, 3-morpholinomethyl- 1-phenyl-triazole-2-thione, 5-amino-3-morpholinomethyl-thiazole-2-thione, 2-mercapto-5-methylthio-thiadiazole, triazole, tetrazole, benzo Triazole, carboxybenzotriazole, amino group-containing benzotriazole, vinyltriazine and the like. These may be used independently, respectively and may be used in combination of 2 or more type. As for the compounding quantity, the range of 10 mass parts or less per 100 mass parts of said carboxyl group-containing photosensitive compound or carboxyl group-containing compound is suitable. When the compounding quantity of these compounds exceeds the said range, since the epoxy group of the said epoxy compound required for a crosslinking reaction is consumed (reacts with an epoxy group), and a crosslinking density falls, it is unpreferable.
고분자 재료의 대부분은 한번 산화가 시작되면, 차례차례로 연쇄적으로 산화 열화가 일어나, 고분자 소재의 기능 저하를 초래하기 때문에, 본 발명의 감광성 조성물에는 산화를 방지하기 위해, (1) 발생한 라디칼을 무효화하는 라디칼 포착제 또는/및 (2) 발생한 과산화물을 무해한 물질에 분해하고, 새로운 라디칼이 발생하지 않도록 하는 과산화물 분해제 등의 산화 방지제를 첨가할 수 있다.Since most of the high molecular material is once oxidized, oxidative deterioration occurs in sequence, resulting in deterioration of the function of the high molecular material. Thus, in order to prevent oxidation in the photosensitive composition of the present invention, (1) the generated radicals are invalidated. (2) An antioxidant such as a peroxide decomposing agent which decomposes the generated radical scavenging agent and / or (2) the generated peroxide into a harmless substance and prevents generation of new radicals can be added.
라디칼 포착제로서 작용하는 산화 방지제로서는, 예를 들어 히드로퀴논, 4-t-부틸카테콜, 2-t-부틸히드로퀴논, 히드로퀴논모노메틸에테르, 2,6-디-t-부틸-p-크레졸, 2,2-메틸렌-비스(4-메틸-6-t-부틸페놀), 1,1,3-트리스(2-메틸-4-히드록시-5-t-부틸페닐)부탄, 1,3,5-트리메틸-2,4,6-트리스(3,5-디-t-부틸-4-히드록시벤질)벤젠, 1,3,5-트리스(3',5'-디-t-부틸-4-히드록시벤질)-S-트리아진-2,4,6-(1H,3H,5H)트리온 등의 페놀계, 메토퀴논, 벤조퀴논 등의 퀴논계 화합물, 비스(2,2,6,6-테트라메틸-4-피페리딜)-세바케이트, 페노티아진 등의 아민계 화합물 등을 들 수 있다.As antioxidant which acts as a radical trapping agent, for example, hydroquinone, 4-t-butylcatechol, 2-t-butylhydroquinone, hydroquinone monomethyl ether, 2,6-di-t-butyl-p-cresol, 2 , 2-methylene-bis (4-methyl-6-t-butylphenol), 1,1,3-tris (2-methyl-4-hydroxy-5-t-butylphenyl) butane, 1,3,5 -Trimethyl-2,4,6-tris (3,5-di-t-butyl-4-hydroxybenzyl) benzene, 1,3,5-tris (3 ', 5'-di-t-butyl-4 Phenol-based compounds such as -hydroxybenzyl) -S-triazine-2,4,6- (1H, 3H, 5H) trione, quinone-based compounds such as metoquinone and benzoquinone, bis (2,2,6, And amine compounds such as 6-tetramethyl-4-piperidyl) -sebacate and phenothiazine.
과산화물 분해제로서 작용하는 산화 방지제로서는, 예를 들어 트리페닐포스파이트 등의 인계 화합물, 펜타에리트리톨테트라라우릴티오프로피오네이트, 디라우릴티오디프로피오네이트, 디스테아릴3,3'-티오디프로피오네이트 등의 황계 화합물 등을 들 수 있다.As antioxidant which acts as a peroxide decomposer, For example, phosphorus compounds, such as a triphenyl phosphite, pentaerythritol tetralauryl thio propionate, a dilauryl thiodipropionate, distearyl 3,3'- tee Sulfur type compounds, such as an odys propionate, etc. are mentioned.
상기와 같은 산화 방지제는, 1종을 단독으로 또는 2종 이상을 조합하여 사용할 수 있다.Such antioxidant can be used individually by 1 type or in combination of 2 or more types.
본 발명의 감광성 조성물은 상기 산화 방지제 이외에, 자외선 흡수제를 사용할 수 있다.The photosensitive composition of this invention can use a ultraviolet absorber other than the said antioxidant.
이러한 자외선 흡수제로서는, 벤조페논 유도체, 벤조에이트 유도체, 벤조트리아졸 유도체, 트리아진 유도체, 벤조티아졸 유도체, 신나메이트 유도체, 안트라닐레이트 유도체, 디벤조일메탄 유도체 등을 들 수 있다.Examples of such ultraviolet absorbers include benzophenone derivatives, benzoate derivatives, benzotriazole derivatives, triazine derivatives, benzothiazole derivatives, cinnamate derivatives, anthranilate derivatives and dibenzoylmethane derivatives.
상기한 바와 같은 자외선 흡수제는, 1종을 단독으로 또는 2종 이상을 조합하여 사용할 수 있고, 산화 방지제와 병용함으로써 본 발명의 감광성 조성물로부터 얻어지는 성형물의 안정화를 도모할 수 있다.The above-mentioned ultraviolet absorber can be used individually by 1 type or in combination of 2 or more types, and can be stabilized the molding obtained from the photosensitive composition of this invention by using together with antioxidant.
또한, 본 발명의 감광성 조성물 중에는 본 발명의 효과를 손상시키지 않는 한, 상기 성분 이외의 다른 첨가제를 첨가할 수도 있다. 첨가제로서는, 공지 관용의 증점제, 실리콘계, 불소계, 고분자계 등의 소포제 및/또는 레벨링제, 프탈로시아닌·블루, 프탈로시아닌·그린, 디스아조 옐로우, 산화티타늄, 카본 블랙, 나프탈렌 블랙 등의 공지된 착색제 등을 들 수 있다. 또한, 필요에 따라, 공지 관용의 열중합 금지제, 이미다졸계, 티아졸계, 트리아졸계 등의 실란 커플링제, 가소제, 발포제, 난연제, 대전 방지제, 노화 예방제, 항균·방미제 등을 첨가할 수 있다.Moreover, in the photosensitive composition of this invention, other additives other than the said component can also be added unless the effect of this invention is impaired. As the additive, known conventional thickeners, antifoaming agents and / or leveling agents such as silicone-based, fluorine-based and polymer-based, known coloring agents such as phthalocyanine-blue, phthalocyanine-green, disazo yellow, titanium oxide, carbon black, naphthalene black and the like Can be mentioned. If necessary, silane coupling agents, plasticizers, foaming agents, flame retardants, antistatic agents, anti-aging agents, antibacterial and anti-corrosive agents, and the like can be added, such as known conventional thermal polymerization inhibitors, imidazole-based, thiazole-based, and triazole-based compounds. have.
[충전제] [Filler]
본 발명의 감광성 조성물에는, 필요에 따라 밀착성, 경도, 내열성 등의 특성을 향상시키는 목적으로 무기 충전제 및 유기 충전제로 이루어지는 군으로부터 선택된 적어도 1종의 충전제를 더 함유할 수 있다. 무기 충전제로서는, 황산바륨, 탄산칼슘, 티타늄산바륨, 산화규소, 무정형 실리카, 탈크, 클레이, 히드로탈사이트, 노이부르그 규토 입자, 운모 분말 등을 들 수 있으며, 유기 충전제로서는 실리콘 파우더, 나일론 파우더, 불소 파우더 등을 들 수 있다. 또한, 백색의 외관이나 난연성을 얻기 위해 산화티타늄이나 금속 산화물, 수산화알루미늄 등의 금속 수산화물을 체질 안료 충전제로서도 사용할 수 있다. 상기 충전제 중에서도, 저흡습성, 저부피 팽창성이 특히 우수한 것은 실리카이다. 실리카는 용융, 결정성을 막론하며, 이들의 혼합물이어도 상관없지만, 특히 커플링제 등으로 표면 처리한 실리카의 경우, 전기 절연성을 향상시킬 수 있기 때문에 바람직하다. 그 이외에, 상기 충전제로서는 유기 벤토나이트, 몬모릴로나이트, 유리 섬유, 탄소 섬유, 질화붕소 섬유 등의 섬유 강화재 등을 들 수 있다.The photosensitive composition of this invention may further contain at least 1 sort (s) of filler chosen from the group which consists of an inorganic filler and an organic filler for the purpose of improving characteristics, such as adhesiveness, hardness, heat resistance, etc. as needed. Examples of the inorganic fillers include barium sulfate, calcium carbonate, barium titanate, silicon oxide, amorphous silica, talc, clay, hydrotalcite, neuburgh silica particles, mica powder, and the like. The organic fillers include silicon powder, nylon powder, Fluorine powder and the like. In addition, in order to obtain a white appearance and flame retardancy, metal hydroxides such as titanium oxide, a metal oxide, and aluminum hydroxide can be used as the extender pigment filler. Among the fillers, silica is particularly excellent in low hygroscopicity and low volume expandability. Silica, regardless of melting and crystallinity, may be a mixture thereof, but silica is preferably surface-treated with a coupling agent or the like because the electrical insulation can be improved. In addition, fiber fillers, such as organic bentonite, montmorillonite, glass fiber, carbon fiber, and boron nitride fiber, etc. are mentioned as said filler.
충전제의 평균 입경(D50)은 25㎛ 이하, 보다 바람직하게는 10㎛ 이하, 더욱 바람직하게는 3㎛ 이하인 것이 바람직하다. 여기서, D50이란, 미(Mie) 산란 이론에 기초한 레이저 회절 산란식 입도 분포 측정법을 사용하여 얻어지는 부피 누적 50%에 있어서의 입경이다. 보다 구체적으로는, 레이저 회절 산란식 입도 분포 측정 장치에 의해 미립자의 입도 분포를 부피 기준으로 작성하고, 그의 메디안 직경을 평균 입경으로 함으로써 측정할 수 있다. 측정 샘플은, 미립자를 초음파에 의해 수중에 분산시킨 것을 바람직하게 사용할 수 있다. 레이저 회절식 입도 분포 측정 장치로서는, (주)호리바 세이사꾸쇼제 LA-500 등을 사용할 수 있다. 이들 무기 및/또는 유기 충전제의 배합량은, 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물 100질량부당 300질량부 이하가 적당하고, 바람직하게는 5 내지 150질량부의 비율이다. 충전제의 배합량이 상기 비율을 초과하면, 경화 피막의 내절성이 저하되어 바람직하지 않다.The average particle diameter (D 50) of the filler is preferably 25㎛ or less, more preferably 10㎛ or less, and more preferably not more than 3㎛. Here, the particle size of the D 50 is, US (Mie) obtained by using a laser diffraction scattering type particle size distribution measurement method based on scattering theory volume cumulative 50%. More specifically, it can measure by making a particle size distribution of microparticles | fine-particles by a laser diffraction scattering type particle size distribution measuring device, and making the median diameter into the average particle diameter. The measurement sample can use preferably what disperse | distributed microparticles in water by the ultrasonic wave. As a laser diffraction type particle size distribution measuring apparatus, LA-500 made by Horiba, Ltd. can be used. As for the compounding quantity of these inorganic and / or organic fillers, 300 mass parts or less are suitable per 100 mass parts of said carboxyl group-containing photosensitive compound or carboxyl group-containing compound, Preferably it is the ratio of 5-150 mass parts. When the compounding quantity of a filler exceeds the said ratio, the corrosion resistance of a cured film falls and it is unpreferable.
[유기 용제] [Organic Solvent]
본 발명의 감광성 조성물에 있어서는, 상기 카르복실기 함유 감광성 화합물이나 에폭시 화합물을 용이하게 용해 또는 분산시키기 위해, 또는 도공에 적합한 점도로 조정하기 위해 유기 용제를 사용할 수 있다. 이러한 유기 용제로서는, 케톤류, 방향족 탄화수소류, 글리콜에테르류, 글리콜에테르아세테이트류, 에스테르류, 알코올류, 지방족 탄화수소, 석유계 용제 등을 들 수 있다. 보다 구체적으로는, 메틸에틸케톤, 시클로헥사논 등의 케톤류; 톨루엔, 크실렌, 테트라메틸벤젠 등의 방향족 탄화수소류; 셀로솔브, 메틸셀로솔브, 부틸셀로솔브, 카르비톨, 메틸카르비톨, 부틸카르비톨, 프로필렌글리콜모노메틸에테르, 디프로필렌글리콜모노메틸에테르, 디프로필렌글리콜디에틸에테르, 트리에틸렌글리콜모노에틸에테르 등의 글리콜에테르류; 아세트산에틸, 아세트산부틸, 디프로필렌글리콜메틸에테르아세테이트, 프로필렌글리콜메틸에테르아세테이트, 프로필렌글리콜에틸에테르아세테이트, 프로필렌글리콜부틸에테르아세테이트, 2-히드록시이소부티르산메틸 등의 에스테르류; 에탄올, 프로판올, 에틸렌글리콜, 프로필렌글리콜 등의 알코올류; 옥탄, 데칸 등의 지방족 탄화수소; 석유 에테르, 석유 나프타, 수소 첨가 석유 나프타, 솔벤트 나프타 등의 석유계 용제 등이다. 이러한 유기 용제는, 단독으로 또는 2종 이상의 혼합물로서 사용된다. 유기 용제의 배합량은, 원하는 점도에 따라 적절히 설정할 수 있다.In the photosensitive composition of this invention, an organic solvent can be used in order to melt | dissolve or disperse the said carboxyl group-containing photosensitive compound and an epoxy compound easily, or to adjust to the viscosity suitable for coating. Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum solvents. More specifically, Ketones, such as methyl ethyl ketone and cyclohexanone; Aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; Cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether Glycol ethers such as these; Esters such as ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol butyl ether acetate and methyl 2-hydroxyisobutyrate; Alcohols such as ethanol, propanol, ethylene glycol and propylene glycol; Aliphatic hydrocarbons such as octane and decane; Petroleum solvents such as petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha. These organic solvents are used alone or as a mixture of two or more thereof. The compounding quantity of an organic solvent can be set suitably according to a desired viscosity.
본 발명의 감광성 조성물은, 예를 들어 상기 유기 용제로 도포 방법에 적합한 점도로 조정하고, 기재 상에 딥 코트법, 플로우 코트법, 롤 코트법, 바 코터법, 스크린 인쇄법, 커튼 코트법 등의 방법에 의해 도포하고, 약 60 내지 100℃의 온도에서 조성물 중에 포함되는 유기 용제를 휘발 건조(임시 건조)시킴으로써, 무점착성의 도막을 형성할 수 있다. 또한, 상기 조성물을 캐리어 필름 상에 도포하고, 건조시켜 필름으로서 권취한 것을 기재 상에 맞댐으로써, 건조 도막을 형성할 수 있다. 그 후 접촉식(또는 비접촉 방식)에 의해, 패턴을 형성한 포토마스크를 통해 선택적으로 활성 에너지선에 의해 노광 또는 레이저 다이렉트 노광기에 의해 직접 패턴 노광하고, 미노광부를 희알칼리 수용액(예를 들어 0.3 내지 3질량% 탄산소다 수용액)에 의해 현상하여 레지스트 패턴이 형성된다. 또한, 고압 수은등 등을 사용하여, 적산 노광량 500 내지 2000mJ/cm2가 되도록 자외선을 조사하여, 마무리 경화할 수 있다. 또한, 예를 들어 약 140 내지 180℃의 온도로 가열하여 열경화시킴으로써, 상기 카르복실기 함유 감광성 화합물 또는 카르복실기 함유 화합물의 카르복실기와 에폭시 화합물의 에폭시기가 반응하여, 내열성, 내약품성, 내흡습성, 밀착성, 전기 특성 등의 여러 특성이 우수한 경화 도막을 형성할 수 있다.The photosensitive composition of this invention is adjusted to the viscosity suitable for the application | coating method with the said organic solvent, for example, and can be dip-coated, a flow-coating method, a roll-coating method, a bar coater method, a screen printing method, a curtain coating method, etc. on a base material. By apply | coating by the method of, and volatile-drying (temporary drying) the organic solvent contained in a composition at the temperature of about 60-100 degreeC, a non-tacky coating film can be formed. Moreover, a dry coating film can be formed by apply | coating the said composition on a carrier film, drying, and a thing wound up as a film on a base material. Thereafter, by contact type (or non-contact method), the pattern is exposed directly by an active energy ray through a photomask on which a pattern is formed, or by direct pattern exposure by a laser direct exposure machine, and the unexposed portion is diluted with an aqueous alkali solution (for example, 0.3). To 3% by mass aqueous solution of sodium carbonate) to form a resist pattern. In addition, by using a high pressure mercury lamp or the like, ultraviolet rays can be irradiated so as to have an integrated exposure amount of 500 to 2000 mJ / cm 2 , followed by final curing. In addition, for example, by heating to a temperature of about 140 to 180 ° C and thermosetting, the carboxyl group-containing photosensitive compound or the carboxyl group of the carboxyl group-containing compound reacts with the epoxy group of the epoxy compound, heat resistance, chemical resistance, hygroscopicity, adhesion, electrical The cured coating film excellent in various characteristics, such as a characteristic, can be formed.
상기 기재로서는, 미리 회로 형성된 프린트 배선판이나 플렉시블 프린트 배선판 이외에, 종이-페놀 수지, 종이-에폭시 수지, 유리천-에폭시 수지, 유리-폴리이미드, 유리천/부직포-에폭시 수지, 유리천/종이-에폭시 수지, 합성 섬유-에폭시 수지, 불소 수지·폴리에틸렌·PPO·시아네이트에스테르 등의 복합재를 사용한 모든 그레이드(FR-4 등)의 동장 적층판, 폴리이미드 필름, PET 필름, 유리 기판, 세라믹 기판, 웨이퍼판 등을 사용할 수 있다.Examples of the substrate include paper-phenolic resin, paper-epoxy resin, glass cloth-epoxy resin, glass-polyimide, glass cloth / nonwoven fabric-epoxy resin, glass cloth / paper-epoxy, in addition to a printed wiring board or a flexible printed wiring board formed in advance. Copper clad laminates of all grades (FR-4, etc.) using composite materials such as resins, synthetic fiber-epoxy resins, fluororesins, polyethylene, PPO, cyanate esters, polyimide films, PET films, glass substrates, ceramic substrates, wafer boards Etc. can be used.
본 발명의 감광성 조성물을 도포한 후에 행하는 휘발 건조는, 열풍 순환식 건조로, IR로, 핫 플레이트, 컨백션 오븐 등(증기에 의한 공기 가열 방식의 열원을 구비한 것을 사용하여 건조기 내의 열풍을 향류 접촉시키는 방법 및 노즐로부터 지지체에 분사하는 방식)을 사용하여 행할 수 있다.Volatilization drying after applying the photosensitive composition of this invention is a hot-air circulation type drying furnace, and it uses a IR with a hotplate, a convection oven, etc. (The thing provided with the heat source of the air heating system by steam is counter-current. And a method of spraying from the nozzle to the support).
이상과 같이 본 발명의 감광성 조성물을 도포하고, 휘발 건조한 후, 얻어진 건조 도막에 대하여 노광(활성 에너지선의 조사)을 행한다. 건조 도막은, 노광부(활성 에너지선에 의해 조사된 부분)가 경화된다.As mentioned above, after apply | coating the photosensitive composition of this invention and carrying out volatilization drying, exposure (irradiation of an active energy ray) is performed with respect to the obtained dry coating film. An exposed part (part irradiated with an active energy ray) hardens | cures a dry coating film.
상기 활성 에너지선 조사에 사용되는 노광기로서는, 직접 묘화 장치(예를 들어 컴퓨터로부터의 CAD 데이터에 의해 직접 레이저로 화상을 그리는 레이저 다이렉트 이미징 장치), 메탈 할라이드 램프를 탑재한 노광기, (초)고압 수은 램프를 탑재한 노광기, 수은 쇼트 아크 램프를 탑재한 노광기, 또는 (초)고압 수은 램프 등의 자외선 램프를 사용한 직접 묘화 장치를 사용할 수 있다. 활성 에너지선으로서는, 최대 파장이 350 내지 410nm의 범위에 있는 레이저광을 사용하고 있으면 가스 레이저, 고체 레이저 중 어느 쪽일 수도 있다. 또한, 그의 노광량은 막 두께 등에 따라 상이하지만, 일반적으로는 5 내지 800mJ/cm2, 바람직하게는 5 내지 700mJ/cm2의 범위 내로 할 수 있다. 상기 직접 묘화 장치로서는, 예를 들어 닛본 오르보테크사제, 오크사제 등의 것을 사용할 수 있으며, 최대 파장이 350 내지 410nm인 레이저광을 발진하는 장치이면 어떠한 장치를 사용할 수도 있다.As an exposure machine used for the said active energy ray irradiation, a direct drawing apparatus (for example, the laser direct imaging apparatus which draws an image with a laser directly by CAD data from a computer), the exposure machine equipped with the metal halide lamp, (super) high pressure mercury A direct drawing apparatus using ultraviolet lamps such as an exposure machine equipped with a lamp, an exposure machine equipped with a mercury short arc lamp, or a (ultra) high pressure mercury lamp can be used. As the active energy ray, any one of a gas laser and a solid state laser may be used as long as laser light having a maximum wavelength in the range of 350 to 410 nm is used. Moreover, although the exposure amount changes with film thickness etc., it can generally be in the range of 5-800mJ / cm <2> , Preferably it is 5-700mJ / cm <2> . As the direct drawing device, for example, those made by Nippon Orbotech Co., Ltd., Oak Co., Ltd. can be used, and any device may be used as long as the device emits laser light having a maximum wavelength of 350 to 410 nm.
상기 현상 방법으로서는, 디핑법, 샤워법, 스프레이법, 브러시법 등에 의해 행할 수 있으며, 현상액으로서는 수산화칼륨, 수산화나트륨, 탄산나트륨, 탄산칼륨, 인산나트륨, 규산나트륨, 암모니아, 아민류 등의 알칼리 수용액을 사용할 수 있다.As the developing method, a dipping method, a shower method, a spray method, a brush method, or the like can be performed. As a developing solution, an aqueous alkali solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines or the like can be used. Can be.
본 발명의 감광성 조성물은, 액상으로 직접 기재에 도포하는 방법 이외에도, 미리 폴리에틸렌테레프탈레이트 등의 필름에 감광성 조성물을 도포, 건조하여 형성한 건조 도막을 갖는 드라이 필름의 형태로 사용할 수도 있다. 본 발명의 감광성 조성물을 드라이 필름으로서 사용하는 경우를 이하에 나타낸다.The photosensitive composition of the present invention can be used in the form of a dry film having a dry coating film formed by applying and drying the photosensitive composition to a film such as polyethylene terephthalate in advance, in addition to the method of directly applying the substrate to a liquid phase. The case where the photosensitive composition of this invention is used as a dry film is shown below.
드라이 필름은, 캐리어 필름과, 건조 도막과, 필요에 따라 사용되는 박리 가능한 커버 필름이 이 순서로 적층된 구조를 갖는 것이다. 건조 도막은, 예를 들어 알칼리 현상성의 감광성 조성물을 캐리어 필름 또는 커버 필름에 도포, 건조하여 얻어지는 층이다. 캐리어 필름에 건조 도막을 형성한 후에 커버 필름을 그 위에 적층하거나, 커버 필름에 건조 도막을 형성하고, 이 적층체를 캐리어 필름에 적층하면 드라이 필름이 얻어진다.A dry film has a structure which the carrier film, the dry coating film, and the peelable cover film used as needed are laminated | stacked in this order. A dry coating film is a layer obtained by apply | coating and drying alkali developable photosensitive composition to a carrier film or a cover film, for example. After forming a dry coating film in a carrier film, a cover film is laminated | stacked on it, or a dry coating film is formed in a cover film, and this laminated body is laminated | stacked on a carrier film, and a dry film is obtained.
캐리어 필름으로서는, 2 내지 150㎛ 두께의 폴리에스테르 필름 등의 열가소성 필름이 사용된다.As a carrier film, thermoplastic films, such as a polyester film of 2-150 micrometers thickness, are used.
건조 도막은, 알칼리 현상성의 감광성 조성물을 블레이드 코터, 립 코터, 콤마 코터, 필름 코터 등으로 캐리어 필름 또는 커버 필름에 10 내지 150㎛의 두께로 균일하게 도포하여 건조시켜 형성된다.The dry coating film is formed by uniformly applying an alkali developable photosensitive composition to a carrier film or cover film with a blade coater, a lip coater, a comma coater, a film coater and the like at a thickness of 10 to 150 µm and drying it.
커버 필름으로서는, 폴리에틸렌 필름, 폴리프로필렌 필름 등을 사용할 수 있지만, 건조 도막과의 접착력이 캐리어 필름보다도 작은 것이 바람직하다.Although a polyethylene film, a polypropylene film, etc. can be used as a cover film, It is preferable that adhesive force with a dry coating film is smaller than a carrier film.
드라이 필름을 사용하여 프린트 배선판 상에 보호막(영구 보호막)을 제작하기 위해서는, 커버 필름을 박리하고, 건조 도막과 회로 형성된 기재를 겹쳐, 라미네이터 등을 사용하여 맞대고, 회로 형성된 기재 상에 건조 도막을 형성한다. 형성된 건조 도막에 대하여, 상기와 마찬가지로 노광, 현상, 가열 경화하면 경화층을 형성할 수 있다. 캐리어 필름은, 노광 전 또는 노광 후 중 언제 박리하여도 상관없다.In order to produce a protective film (permanent protective film) on a printed wiring board using a dry film, a cover film is peeled off, the dry coating film and the circuit-formed substrate are piled up, it is matched using a laminator, etc., and a dry coating film is formed on the circuit-formed substrate. do. With respect to the formed dry coating film, when it exposes, develops, and heat-cures like the above, a hardened layer can be formed. The carrier film may be peeled off at any time before or after exposure.
또한, 본 발명의 감광성 조성물은 프린트 배선판의 영구 피막용 재료로서 적합하지만, 그 중에서도 솔더 레지스트용 재료, 층간 절연 재료로서 적합하다.Moreover, although the photosensitive composition of this invention is suitable as a permanent film material of a printed wiring board, it is especially suitable as a soldering resist material and an interlayer insulation material.
실시예 EXAMPLE
이하, 실시예 및 비교예를 나타내어 본 발명에 대하여 구체적으로 설명하지만, 본 발명이 하기 실시예로 한정되지 않는 것은 물론이다. 또한, 이하에 있어서 「%」 및 「부」라는 것은, 특별히 언급하지 않는 한 모두 질량 기준이다.Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, of course, this invention is not limited to the following Example. In addition, below, "%" and "part" are mass references | standards unless there is particular notice.
합성예 1 Synthesis Example 1
온도계, 질소 도입 장치 겸 알킬렌옥시드 도입 장치 및 교반 장치를 구비한 오토클레이브에 쇼와 고분시 가부시끼가이샤제 노볼락형 크레졸 수지(상품명 「쇼놀 CRG951」, OH 당량: 119.4) 119.4부, 수산화칼륨 1.19부, 톨루엔 119.4부를 투입하고, 교반하면서 계 내를 질소 치환하고, 가열 승온하였다. 이어서, 프로필렌옥시드 63.8부를 서서히 적하하고, 125 내지 132℃, 0 내지 4.8kg/cm2로 16시간 반응시켰다. 그 후, 실온까지 냉각하고, 이 반응 용액에 89% 인산 1.56부를 첨가 혼합하고, 수산화칼륨을 중화하여, 불휘발분 62.1%, 수산기값이 182.2g/eq.인 노볼락형 크레졸 수지의 프로필렌옥시드 부가 반응물의 용액을 얻었다. 이것은, 페놀성 수산기 1당량당 알킬렌옥시드가 평균 약 1.08몰 부가되어 있는 것이었다.119.4 parts of novolak-type cresol resin (trade name "Shonol CRG951", OH equivalence: 119.4) by Showa Kobunshi Kabushiki Kaisha in an autoclave equipped with a thermometer, a nitrogen introduction device, an alkylene oxide introduction device, and a stirring device. 1.19 parts and 119.4 parts of toluene were thrown in, the inside of the system was nitrogen-substituted and stirred, and it heated up. Next, 63.8 parts of propylene oxides were dripped gradually, and it was made to react at 125-132 degreeC and 0-4.8 kg / cm <2> for 16 hours. Thereafter, the mixture was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added and mixed with the reaction solution to neutralize potassium hydroxide, and the propylene oxide of the novolak-type cresol resin having a nonvolatile content of 62.1% and a hydroxyl value of 182.2 g / eq. A solution of the addition reactant was obtained. This was an average of about 1.08 mol of alkylene oxide added per equivalent of phenolic hydroxyl group.
얻어진 노볼락형 크레졸 수지의 알킬렌옥시드 부가 반응물의 용액 293.0부, 아크릴산 43.2부, 메탄술폰산 11.53부, 메틸히드로퀴논 0.18부, 톨루엔 252.9부를 교반기, 온도계, 공기 흡입관을 구비한 반응기에 투입하고, 공기를 10ml/분의 속도로 불어넣고, 교반하면서 110℃에서 12시간 반응시켰다. 반응에 의해 생성된 물은, 톨루엔과의 공비 혼합물로서 12.6부의 물이 유출되었다. 그 후, 실온까지 냉각하고, 얻어진 반응 용액을 15% 수산화나트륨 수용액 35.35부로 중화하고, 이어서 수세하였다. 그 후, 증발기로 톨루엔을 디에틸렌글리콜모노에틸에테르아세테이트 118.1부로 치환하면서 증류 제거하여, 노볼락형 아크릴레이트 수지 용액을 얻었다. 이어서, 얻어진 노볼락형 아크릴레이트 수지 용액 332.5부, 나프텐산크롬 0.8부, 나프텐산리튬 0.4부를 교반기, 온도계, 공기 흡입관을 구비한 반응기에 투입하고, 공기를 10ml/분의 속도로 불어넣고, 교반하면서 테트라히드로프탈산 무수물 60.8부를 서서히 가하고, 95 내지 101℃에서 6시간 반응시키고, 냉각 후, 취출하였다. 이와 같이 하여 얻어진 카르복실기 함유 감광성 화합물은, 불휘발분 70.9%, 고형분 산가 82.1mgKOH/g이었다.293.0 parts of the solution of the alkylene oxide addition reaction product of the obtained novolak-type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 parts of methylhydroquinone, and 252.9 parts of toluene were introduced into a reactor equipped with a stirrer, a thermometer, and an air suction tube, and air was supplied. It was blown at a rate of 10 ml / min and reacted at 110 ° C for 12 hours while stirring. As for the water produced | generated by reaction, 12.6 parts of water flowed out as an azeotropic mixture with toluene. Thereafter, the mixture was cooled to room temperature, and the obtained reaction solution was neutralized with 35.35 parts of 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while replacing toluene with 118.1 parts of diethylene glycol monoethyl ether acetate, to obtain a novolac acrylate resin solution. Subsequently, 332.5 parts of the obtained novolak-type acrylate resin solution, 0.8 part of chromium naphthenate, and 0.4 part of lithium naphthenate were introduced into a reactor equipped with a stirrer, a thermometer, and an air suction tube, and the air was blown at a rate of 10 ml / min, followed by stirring. 60.8 parts of tetrahydrophthalic anhydride were added gradually, making it react at 95-101 degreeC for 6 hours, and taken out after cooling. Thus obtained carboxyl group-containing photosensitive compound was 70.9% of non volatile matter and 82.1 mgKOH / g of solid content acid values.
실시예 1 내지 9 및 비교예 1 내지 3 Examples 1 to 9 and Comparative Examples 1 to 3
표 1 및 표 2에 나타내는 비율로 각 성분을 배합하고, 교반 후, 3축 롤밀로 분산시켜 감광성 조성물을 얻었다.Each component was mix | blended in the ratio shown in Table 1 and Table 2, and after stirring, it disperse | distributed with the triaxial roll mill and obtained the photosensitive composition.
상기 표 1 및 표 2 중의 산가, 에폭시 당량, 이중 결합 당량은 이하의 방법으로 측정하였다.The acid value, epoxy equivalent, and double bond equivalent in the said Table 1 and Table 2 were measured with the following method.
<유기 성분 총량에 대한 산가의 측정법> <Measurement of Acid Value for Total Amount of Organic Components>
감광성 조성물을 70℃, 24시간 건조시켜, 유기 용제를 제거하고, 고형분을 얻었다. 고형분에 아세톤을 첨가하여 용해·분산시키고, 원심 분리기에 의해 고형분으로부터 충전제를 분리하였다. 충전제를 분리한 유기 성분을 사용하여, JIS K2501에 따라 산가를 측정하였다. 이와 같이 하여 얻어진 산가가 유기 성분 총량에 대한 산가이다.The photosensitive composition was dried at 70 degreeC for 24 hours, the organic solvent was removed, and solid content was obtained. Acetone was added to the solid to dissolve and disperse, and the filler was separated from the solid by a centrifugal separator. The acid value was measured according to JIS K2501 using the organic component which separated the filler. The acid value obtained in this way is an acid value with respect to the organic component total amount.
<유기 성분 총량에 대한 에폭시 당량의 측정법> <Measurement method of epoxy equivalent to total amount of organic components>
산가를 측정하는 경우와 마찬가지로 하여, 충전제를 분리한 유기 성분을 얻었다. 이 유기 성분을 사용하여, JIS K7236에 따라 제1 당량을 측정하였다.In the same manner as in the case of measuring the acid value, an organic component obtained by separating the filler was obtained. Using this organic component, the first equivalent was measured according to JIS K7236.
한편, 브롬화테트라에틸암모늄을 사용하지 않은 것 이외에는, 제1 당량의 측정 방법과 마찬가지로 하여 제2 당량을 측정하였다.On the other hand, except having not used tetraethylammonium bromide, the 2nd equivalent was measured similarly to the measuring method of 1st equivalent.
제1 당량으로부터 제2 당량을 빼고, 「유기 성분 총량에 대한 에폭시 당량」을 산출하였다.The 2nd equivalent was subtracted from the 1st equivalent, and "epoxy equivalent with respect to the organic component total amount" was computed.
<이중 결합 당량의 측정 방법> <Measurement method of double bond equivalent>
산가를 측정하는 경우와 마찬가지로 하여, 충전제를 분리한 유기 성분을 얻었다. 이 유기 성분에 모르폴린을 반응시킨 후, 무수 아세트산을 가하여 미반응된 모르폴린과 반응시켰다. 유기 성분과 모르폴린의 반응체를 과염소산으로 적정함으로써, 제3 당량을 산출하였다.In the same manner as in the case of measuring the acid value, an organic component obtained by separating the filler was obtained. After reacting morpholine to this organic component, acetic anhydride was added to react with unreacted morpholine. The third equivalent was calculated by titrating the reactant of the organic component and morpholine with perchloric acid.
제3 당량으로부터 제1 당량을 빼고, 「유기 성분 총량에 대한 이중 결합 당량」을 산출하였다.The 1st equivalent was subtracted from the 3rd equivalent, and "double bond equivalent with respect to the organic component total amount" was computed.
<액상 성분의 판정 방법> <Method of Determining Liquid Components>
액상의 판정은, 위험물의 시험 및 성상에 관한 부령(1989년 자치 부령 제1호)의 별지 제2 「액상의 확인 방법」에 준하여 행하였다.The determination of the liquid phase was carried out in accordance with Attachment No. 2 "Method of Confirming Liquid Phase" of the Directive on the Test and Properties of Dangerous Goods (1989 Autonomous Directive No. 1).
(1) 장치 (1) device
항온 수조: 교반기, 히터, 온도계, 자동 온도 조절기(±0.1℃에서 온도 제어가 가능한 것)를 구비한 것이며 깊이 150mm 이상인 것을 사용한다.Constant temperature water bath: Agitator, heater, thermometer, thermostat (with temperature control at ± 0.1 ° C) and having a depth of at least 150 mm.
또한, 액상 성분의 판정에서는, 모두 야마토 가가꾸(주)제의 저온 항온 수조(형식 BU300)와 투입식 항온 장치 서모메이트(형식 BF500)의 조합을 사용하여, 수돗물 약 22리터를 저온 항온 수조(형식 BU300)에 넣고, 이것에 장착된 서모메이트(형식 BF500)의 전원을 넣어 설정 온도(20℃)로 설정하여, 수온을 설정 온도±0.1℃로 서모메이트(형식 BF500)로 미세 조정하였지만, 마찬가지의 조정이 가능한 장치이면 모두 사용할 수 있다.In addition, in the determination of a liquid component, all about 22 liters of tap water were made into a low temperature constant temperature water bath (combination of Yamato Kagaku Co., Ltd. low temperature constant temperature water tank (model BU300) and an input thermostat thermomate (model BF500)). Into the model BU300, the power supply of the thermomate (model BF500) attached thereto was turned on and set to the set temperature (20 ° C), and the water temperature was finely adjusted to the set temperature ± 0.1 ° C by the thermomate (model BF500). Any device that can be adjusted can be used.
시험관: examiner:
시험관으로서는, 도 1에 도시한 바와 같이 내경 30mm, 높이 120mm의 평저 원통형 투명 유리제인 것이며, 관저로부터 55mm 및 85mm의 높이의 부분에 각각 표선(2), (3)이 부여되고, 시험관의 입구를 고무 마개(4a)로 밀폐한 액상 판정용 시험관(1a)과, 동일한 사이즈로 마찬가지로 표선이 부여되고, 중앙에 온도계를 삽입·지지하기 위한 구멍이 뚫린 고무 마개(4b)로 시험관의 입구를 밀폐하고, 고무 마개(4b)에 온도계(5)를 삽입한 온도 측정용 시험관(1b)을 사용한다. 이하, 관저로부터 55mm의 높이의 표선을 「A선」, 관저로부터 85mm의 높이의 표선을 「B선」이라 한다.As a test tube, as shown in FIG. 1, it is a flat bottom cylindrical transparent glass of internal diameter 30mm and height 120mm, marking marks 2 and 3 are attached to the part of 55mm and 85mm height from a pipe bottom, respectively, The entrance of the test tube is sealed with a
온도계(5)로서는, JIS B7410(1982) 「석유류 시험용 유리제 온도계」에 규정된 응고점 측정용의 것(SOP-58 눈금 범위 20 내지 50℃)을 사용하지만, 0 내지 50℃의 온도 범위를 측정할 수 있는 것이면 된다.As the
(2) 시험의 실시 순서 (2) Test procedure
온도 20±5℃의 대기압하에서 24시간 이상 방치한 시료를 도 1(a)에 도시한 액상 판정용 시험관(1a)과 도 1(b)에 도시한 온도 측정용 시험관(1b)에 각각 A선까지 넣는다. 2개의 시험관(1a), (1b)을 저온 항온 수조에 B선이 수면 아래가 되도록 직립시켜 정치한다. 온도계는, 그의 하단부가 A선보다도 30mm 아래가 되도록 한다.A-line is placed in a
시료 온도가 설정 온도 20±0.1℃에 달한 후 10분간 그대로의 상태를 유지한다. 10분 후, 액상 판단용 시험관(1a)을 저온 항온 수조로부터 취출하고, 즉시 수평한 시험대 상에 수평으로 쓰러뜨려, 시험관 내의 액면의 선단이 A선부터 B선까지 이동한 시간을 스톱 워치로 측정하여 기록한다. 시료는, 설정 온도에 있어서 측정된 시간이 90초 이내인 것을 액상, 90초를 초과하는 것을 고체상으로 판정한다.After the sample temperature reaches the set temperature of 20 ± 0.1 ° C, it is maintained for 10 minutes. After 10 minutes, the
각 감광성 조성물에 대하여 이하와 같이 하여 시험 기판을 제작하고, 하기의 특성 평가를 행하였다. 결과를 표 3 및 표 4에 나타낸다.About each photosensitive composition, the test board | substrate was produced as follows and the following characteristic evaluation was performed. The results are shown in Tables 3 and 4.
<시험 기판의 제작> <Production of Test Board>
감광성 조성물을 스크린 인쇄법에 의해 100메쉬의 폴리에스테르 스크린을 사용하여 20 내지 30㎛의 두께가 되도록, 구리 패턴이 형성되어 있는 프린트 배선 기판에 전체면 도포하고, 도막을 80℃의 열풍 건조기를 사용하여 60분간 건조한 후, 레지스트 패턴을 갖는 네거티브 필름을 도막에 밀착시켜, 자외선 노광 장치((주)오크 세이사꾸쇼, 형식 HMW-680GW)를 사용하여, 노광량 500mJ/cm2의 자외선을 조사하였다. 이어서, 1%의 탄산나트륨 수용액으로 60초간, 2.5kg/cm2의 스프레이압으로 현상하였다. 이 후, 이 기판에 대하여 고압 수은등에 의해 적산 노광량 1000mJ/cm2가 되도록 자외선을 조사하여 마무리 경화하고, 160℃에서 1시간 가열하여 후경화하여, 평가 기판으로 하였다.The photosensitive composition was apply | coated whole surface to the printed wiring board in which the copper pattern was formed so that it might become 20-30 micrometers thickness using the 100-mesh polyester screen by the screen printing method, and a coating film was used for 80 degreeC hot air dryer. After drying for 60 minutes, the negative film having a resist pattern was brought into close contact with the coating film, and was irradiated with ultraviolet light having an exposure dose of 500 mJ / cm 2 using an ultraviolet exposure apparatus (Ok Seisakusho Co., Ltd., HMW-680GW). Subsequently, it developed with the spray pressure of 2.5 kg / cm <2> for 60 second with the 1% sodium carbonate aqueous solution. Thereafter, the substrate was irradiated with ultraviolet rays so as to have an integrated exposure amount of 1000 mJ / cm 2 with a high pressure mercury lamp, and finally cured. The substrate was heated at 160 ° C. for 1 hour to be post-cured to obtain an evaluation substrate.
절연성, 크랙성, 패턴 형성성(현상성) 및 점착성의 시험은 이하와 같이 하여 행하였다.Insulation, cracking, pattern formation (development) and adhesiveness were tested as follows.
<PCBT 중의 절연 저항> Insulation Resistance in PCBT
IPCB-25의 빗형 전극 B쿠폰을 사용하여 상기한 조건으로 평가 기판을 제작하고, 이 빗형 전극에 DC30V의 바이어스 전압을 인가하고, PCT 장치(에스펙 가부시끼가이샤제 HAST YSTEM TPC-412MD)를 사용하여 121℃, 습도 97%의 조건으로 처리하여, 저항값이 1.0×107Ω 이하로 저하되는 시간을 측정하였다. 300시간 이상을 필요로 한 경우에는 양호로 평가할 수 있다.The evaluation board | substrate was produced on the conditions mentioned above using the comb-shaped electrode B coupon of IPCB-25, the bias voltage of DC30V was applied to this comb-shaped electrode, and the PCT apparatus (HAST YSTEM TPC-412MD by an spec) is used. The process was performed under conditions of 121 ° C. and a humidity of 97%, and the time when the resistance value was lowered to 1.0 × 10 7 Ω or less was measured. When 300 hours or more are required, it can evaluate as favorable.
<TCT 코너 크랙> <TCT Corner Crack>
2mm의 구리 라인 패턴이 형성된 기판에 상기 감광성 조성물을 도포하고, 상기와 마찬가지로 하여 노광, 현상한 후, 자외선 조사, 열경화하여, 구리 라인 상에 각 변 3mm의 레지스트 패턴이 17개 형성된 평가 기판을 제작하였다. 이 평가 기판을 -65℃와 150℃의 사이에서 온도 사이클이 행해지는 냉열 사이클기에 넣고, TCT(Thermal Cycle Test)를 행하였다. 그리고, 1000 사이클시의 외관을 관찰하여, 크랙수를 계산하였다. 크랙수가 30/68 이하인 경우는 양호로 평가할 수 있다. 또한, 분모의 수치 「68」은 각 변 3mm의 레지스트 패턴의 4개의 모서리(4개)×17개이며, 68개소의 모서리를 의미하고, 분자의 수치 「30」은 크랙의 발생수를 나타낸다.The photosensitive composition was applied to a substrate on which a 2 mm copper line pattern was formed, exposed and developed in the same manner as above, and then irradiated with ultraviolet rays and thermoset to form an evaluation substrate on which 17 resist patterns of 3 mm on each side were formed on the copper line. Produced. This evaluation board | substrate was put into the cold heat cycle machine which temperature cycle is performed between -65 degreeC and 150 degreeC, and TCT (Thermal Cycle Test) was done. Then, the appearance at 1000 cycles was observed, and the number of cracks was calculated. When the number of cracks is 30/68 or less, it can be evaluated as good. In addition, the numerical value "68" of a denominator is four edge | corners (4 pieces) x 17 pieces of the resist pattern of 3 mm each side, and it means 68 edges, and the numerical value "30" of a molecule | numerator shows the generation number of a crack.
<패턴 형성성> <Pattern formability>
노광, 현상 후의 상태를 확대경으로 육안 판정하였다. 결과는 표 3 및 표 4와 같이 실시예 1 내지 9, 비교예 1 내지 3에서는 패턴의 형성이 가능하였다.The state after exposure and image development was visually determined with a magnifying glass. As a result, as in Tables 3 and 4, in Examples 1 to 9 and Comparative Examples 1 to 3, formation of patterns was possible.
<점착성> <Adhesiveness>
감광성 조성물을 각각 패턴 형성된 구리박 기판 상에 스크린 인쇄로 전체면 도포하고, 80℃의 열풍 순환식 건조로에서 30분간 건조시켜, 실온까지 방냉하였다. 이 기판에 PET제 네거티브 필름을 대고, ORC사제(HMW-GW20)로 1분간 감압 조건하에 압착시키고, 그 후 네거티브 필름을 박리했을 때의 필름의 달라붙음 상태를 평가하였다.The photosensitive composition was apply | coated whole surface by the screen printing on the patterned copper foil board | substrate, respectively, it dried for 30 minutes in 80 degreeC hot-air circulation type drying furnace, and cooled to room temperature. The negative film made from PET was put on this board | substrate, and it crimped | bonded by ORC company (HMW-GW20) for 1 minute under reduced pressure conditions, and the sticking state of the film at the time of peeling a negative film after that was evaluated.
양호: 필름을 박리할 때에 저항이 없고, 도막에 자국이 남지 않음.Good: When peeling off a film, there is no resistance and a mark is not left in a coating film.
불량: 필름을 박리할 때에 저항이 있고, 도막에 자국이 나있음.Poor: There is resistance when peeling off the film and marks on the coating film.
표 3에 나타낸 바와 같이, 실시예 1 내지 9에서는 양호하게 패턴을 형성할 수 있고, 고온 고습도하에 있어서도 장시간 절연성을 유지할 수 있으며, 크랙의 발생을 억제할 수 있었다. 그러나, 표 4에 나타낸 바와 같이, 감광성 조성물로부터 충전제를 제외한 조성물 전체의 이중 결합 당량이 400 미만인 비교예 1 내지 3에서는, 고온 고습도하에 있어서 절연성을 장시간 유지할 수 없고, 크랙의 발생도 많았다.As shown in Table 3, in Examples 1 to 9, a pattern could be formed satisfactorily, insulation could be maintained for a long time even under high temperature, high humidity, and generation | occurrence | production of a crack was suppressed. However, as shown in Table 4, in Comparative Examples 1 to 3 having a double bond equivalent weight of the whole composition excluding the filler from the photosensitive composition, which was less than 400, insulation was not maintained for a long time under high temperature and high humidity, and there were many cracks.
본 발명의 경화성 수지 조성물 또는 그의 드라이 필름은 프린트 배선판의 영구 피막용 재료로서 적합하지만, 그 중에서도 솔더 레지스트용 재료, 층간 절연 재료로서 유리하게 사용할 수 있다.Although the curable resin composition or its dry film of this invention is suitable as a permanent film material of a printed wiring board, it can use it especially advantageously as a soldering resist material and an interlayer insulation material.
1a 액상 판정용 시험관
1b 온도 측정용 시험관
2 표선(A선)
3 표선(B선)
4a, 4b 고무 마개
5 온도계1a Test tube for liquid phase determination
1b temperature test tube
2 mark (A line)
3 mark (B line)
4a, 4b rubber stopper
5 thermometer
Claims (7)
(B) 광중합 개시제, 및
(C) 에폭시 화합물
을 함유하고,
(D) 카르복실기를 갖지 않는 감광성 화합물을 더 함유할 수 있는 감광성 조성물이며,
해당 감광성 조성물의 이중 결합 당량이 유기 용제 및 충전제를 함유하지 않는 상태에서 400 이상 680이하이고,
해당 감광성 조성물에 포함되는 액상 성분의 함유율이 유기 용제 및 충전제를 제외한 전체 성분에 대하여, 5질량% 이상 30질량% 이하이며,
(D) 카르복실기를 갖지 않는 감광성 화합물의 배합량은 전체 감광성 성분(카르복실기 함유 감광성 화합물+카르복실기를 갖지 않는 감광성 화합물)에 대하여 0 내지 10질량%이며,
상기 (C) 에폭시 화합물의 에폭시기가 상기 (A) 카르복실기 함유 화합물의 카르복실기 1당량에 대하여 1.5당량 이상 4당량 이하인 것을 특징으로 하는 감광성 조성물.(A) carboxyl group-containing photosensitive compound,
(B) photoinitiator, and
(C) epoxy compound
Containing,
(D) It is a photosensitive composition which can further contain the photosensitive compound which does not have a carboxyl group,
The double bond equivalent of the said photosensitive composition is 400 or more and 680 or less in the state containing no organic solvent and a filler,
The content rate of the liquid component contained in the said photosensitive composition is 5 mass% or more and 30 mass% or less with respect to the all components except the organic solvent and a filler,
(D) The compounding quantity of the photosensitive compound which does not have a carboxyl group is 0-10 mass% with respect to the whole photosensitive component (photosensitive compound which does not have a carboxyl group-containing photosensitive compound + carboxyl group),
The epoxy group of the said (C) epoxy compound is 1.5 equivalent or more and 4 equivalent or less with respect to 1 equivalent of carboxyl groups of the said (A) carboxyl group-containing compound, The photosensitive composition characterized by the above-mentioned.
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JP2013085451A JP2014006499A (en) | 2012-05-29 | 2013-04-16 | Photosensitive composition and print wiring board having cured layer thereof |
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CN106916261B (en) * | 2015-12-25 | 2020-05-19 | 太阳油墨(苏州)有限公司 | Curable resin composition for filling holes, cured product thereof, and printed wiring board |
JP6112691B1 (en) | 2016-03-16 | 2017-04-12 | 互応化学工業株式会社 | Liquid solder resist composition and printed wiring board |
JP5997860B1 (en) | 2016-03-16 | 2016-09-28 | 互応化学工業株式会社 | Liquid solder resist composition and printed wiring board |
JP6967508B2 (en) * | 2016-03-31 | 2021-11-17 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product and printed wiring board |
JP6154942B1 (en) * | 2016-07-11 | 2017-06-28 | 互応化学工業株式会社 | Liquid solder resist composition and printed wiring board |
JP7013666B2 (en) * | 2017-03-29 | 2022-02-01 | 昭和電工マテリアルズ株式会社 | Manufacturing method of photosensitive resin composition, photosensitive element, printed wiring board and printed wiring board |
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