KR101999803B1 - 감광성 수지 조성물 및 이로부터 제조된 스페이서 - Google Patents
감광성 수지 조성물 및 이로부터 제조된 스페이서 Download PDFInfo
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- KR101999803B1 KR101999803B1 KR1020120123465A KR20120123465A KR101999803B1 KR 101999803 B1 KR101999803 B1 KR 101999803B1 KR 1020120123465 A KR1020120123465 A KR 1020120123465A KR 20120123465 A KR20120123465 A KR 20120123465A KR 101999803 B1 KR101999803 B1 KR 101999803B1
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- photosensitive resin
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
공중합체의 구성단위 함량(중량부) |
Mw |
|||||
N-페닐
말레이미드 |
4-HBAGE | 스티렌 |
메틸메타
크릴레이트 |
메타
크릴산 |
||
공중합체 A | 40 |
5 | 25 |
30 | 0 |
10,050 |
공중합체 B | 10 | 25 | 12,000 | |||
공중합체 C | 15 | 20 | 10,500 | |||
공중합체 D | 20 | 15 | 11,200 | |||
공중합체 E | 25 | 10 | 12,000 | |||
공중합체 F | 30 | 5 | 13,300 | |||
공중합체 G | 0 | 10 | 25 | 10,100 | ||
공중합체 H | 5 | 30 | 9,800 | |||
* 4-HBAGE :4-히드록시부틸아크릴레이트글리시딜에테르 |
공중합체 |
공중합체
함량 |
중합성
화합물 |
광중합 개시제 |
계면
활성제 |
실란
커플링제 |
착색제 | 용매 | |
실시예 1 | A | 1.195g |
DPHA 0.613g |
OXE-02 0.070g |
BYK 333 0.0042g |
KBE-9007 0.0084g |
착색 분산액 8.9g |
PGMEA 9.2094g |
실시예 2 | B | |||||||
실시예 3 | C | |||||||
실시예 4 | D | |||||||
실시예 5 | E | |||||||
실시예 6 | F | |||||||
비교예 1 | G | PGMEA 8.543g |
||||||
비교예 2 | H |
탄성
회복율 |
해상도 | 내화학성 |
패턴의
상/하부비 |
메인/서브
스페이서 단차 |
BP | ||
(%) | (㎛) | 패턴상태 | (%) | (%) | (Å) | (sec) | |
실시예1 | 99 | 10 | 이상없음 | 1.25 | 53 | 3500 | 60 |
실시예2 | 99 | 9 | 이상없음 | 1.01 | 61 | 4300 | 55 |
실시예3 | 99 | 9 | 이상없음 | 0.89 | 61 | 4200 | 51 |
실시예4 | 99 | 9 | 이상없음 | 0.67 | 63 | 5100 | 48 |
실시예5 | 99 | 8 | 이상없음 | 0.66 | 63 | 5200 | 46 |
실시예6 | 99 | 8 | 이상없음 | 0.43 | 71 | 5100 | 43 |
비교예1 | 92 | 15 | 이상없음 | 4.26 | 47 | 987 | 43 |
비교예2 | 92 | 15 | 이상없음 | 5.64 | 46 | 1300 | 40 |
Claims (8)
- (a-1) 4-히드록시부틸(메트)아크릴레이트글리시딜에테르로부터 유도되는 구성단위, (a-2) N-치환 말레이미드 화합물로부터 유도되는 구성단위, 및 (a-3) 방향족환 함유 에틸렌성 불포화 화합물로부터 유도되는 구성단위를 주쇄에 포함하는 공중합체를 포함하며,
상기 공중합체가 공중합체 총 중량에 대하여 상기 구성단위 (a-1) 내지 (a-3)를 각각 2 내지 50 중량%, 5 내지 55 중량% 및 2 내지 40 중량%로 포함하고,
상기 N-치환 말레이미드 화합물이 N-페닐말레이미드, N-시클로헥실말레이미드, 또는 이들의 조합인, 감광성 수지 조성물.
- 제 1 항에 있어서,
상기 공중합체가 추가로, (a-4) 상기 구성단위 (a-1) 내지 (a-3)와는 상이한 에틸렌성 불포화 화합물로부터 유도되는 구성단위를 0 내지 40 중량%로 포함하는 것을 특징으로 하는, 감광성 수지 조성물.
- 삭제
- 제 1 항에 있어서,
상기 방향족환 함유 에틸렌성 불포화 화합물이 스티렌계 화합물인 것을 특징으로 하는, 감광성 수지 조성물.
- 제 2 항에 있어서,
상기 공중합체가 상기 구성단위 (a-4)로서, 에틸렌성 불포화 카복실산, 에틸렌성 불포화 카복실산 무수물, 또는 이들의 조합으로부터 유도되는 구성단위를 상기 구성단위 (a-1) 100중량부에 대해서 30중량부 이하의 양으로 포함하는 것을 특징으로 하는, 감광성 수지 조성물.
- 제 1 항에 있어서,
상기 감광성 수지 조성물이,
상기 공중합체 외에도 중합성 화합물, 광중합 개시제 및 용매를 추가로 포함하는 것을 특징으로 하는, 감광성 수지 조성물.
- 제 6 항에 있어서,
상기 감광성 수지 조성물이, 감광성 수지 조성물 전체 중량(고형분 기준)을 기준으로, 상기 공중합체를 0.5 내지 60 중량%로 포함하고, 상기 중합성 화합물을 1 내지 50 중량%로 포함하며, 상기 광중합 개시제를 0.1 내지 10 중량%로 포함하는 것을 특징으로 하는, 감광성 수지 조성물.
- 제 6 항에 있어서,
상기 감광성 수지 조성물이 착색제를 더 포함하며,
상기 착색제의 함량이 감광성 수지 조성물 전체 중량(고형분 기준)에 대하여 5 내지 70 중량%인 것을 특징으로 하는, 감광성 수지 조성물.
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KR1020120123465A KR101999803B1 (ko) | 2012-11-02 | 2012-11-02 | 감광성 수지 조성물 및 이로부터 제조된 스페이서 |
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KR1020120123465A KR101999803B1 (ko) | 2012-11-02 | 2012-11-02 | 감광성 수지 조성물 및 이로부터 제조된 스페이서 |
Publications (2)
Publication Number | Publication Date |
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KR20140056955A KR20140056955A (ko) | 2014-05-12 |
KR101999803B1 true KR101999803B1 (ko) | 2019-07-12 |
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KR1020120123465A Active KR101999803B1 (ko) | 2012-11-02 | 2012-11-02 | 감광성 수지 조성물 및 이로부터 제조된 스페이서 |
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Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4561101B2 (ja) | 2003-03-06 | 2010-10-13 | Jsr株式会社 | カラーフィルタ用感放射線性組成物およびカラーフィルタ |
KR20060092092A (ko) * | 2005-02-17 | 2006-08-22 | 스미또모 가가꾸 가부시끼가이샤 | 감광성 수지 조성물 |
US8084545B2 (en) * | 2007-05-11 | 2011-12-27 | Daicel Chemical Industries, Ltd. | Photo- and/or thermo-curable copolymer, curable resin compositions, and cured articles |
JP5476758B2 (ja) | 2009-03-19 | 2014-04-23 | Jsr株式会社 | 感放射線性樹脂組成物、液晶表示素子の層間絶縁膜、保護膜及びスペーサーとその形成方法 |
KR101795815B1 (ko) * | 2010-10-05 | 2017-11-08 | 스미또모 가가꾸 가부시끼가이샤 | 착색 감광성 조성물 |
TWI570509B (zh) * | 2010-10-05 | 2017-02-11 | Sumitomo Chemical Co | Coloring the photosensitive resin composition |
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