KR101986511B1 - high power ion beam profile measuring apparatus - Google Patents

Abstract

A proton beam or ion beam profile measurement device is provided. The beam profile apparatus includes a tubular body, which is installed on the beam transmission path and in which the interior is held in vacuum; A rotary disc assembly rotatably disposed within the tubular body; a rotary disc having one end fixed to the rotary disc and having a spiral shape that winds the virtual cylinder along an outer circumferential surface of a virtual cylinder; A rotation probe assembly including a beam measurement line comprised of a high melting point material; And a driving device coupled to one side of the outer circumferential surface of the tubular body and configured to transmit a rotational force to the rotating disk.

Description

TECHNICAL FIELD [0001] The present invention relates to a high power ion beam profile measuring apparatus,

The present invention relates to a device for measuring a high output ion beam profile, and more particularly to a device for measuring a shape of a beam at a specific position in a progress path of an accelerated proton or ion beam from a particle accelerator, that is, a horizontal or vertical cross- And more particularly to a high output ion beam profile measuring apparatus having improved structure.

Generally, cyclotron and proton linear accelerators are used as devices for generating and accelerating proton beams. These accelerators accelerate the proton beams of the required intensity according to the purpose of use, such as application research, neutron beam irradiation and radiation isotope production, and use ion sources and incident devices, vacuum devices, power devices, electromagnets, high frequency systems, And a transport system are interconnected.

Neutrons generated by colliding protons of a high energy energy generated from these accelerators to specific targets are used in medical applications for diagnosis and treatment. However, for medical applications, it is necessary to measure the shape of the accelerated proton beam at various locations during beam acceleration to transport the beam loss from the ion source to the target with less of the beam loss and provide the desired size and shape of the proton beam to the target . Since it is difficult to measure the shape of the proton beam from the outside with a photograph or the like, a conductive metal member (metal wire) is disposed on the path of the proton beam accelerated from the accelerator and is generated by a proton beam impinged on the metal member By measuring the current, the shape of the proton beam can be measured indirectly. However, the conventional measuring apparatus is capable of measuring the respective currents which are caused to flow by the beams impinged on the two metal members for the horizontal and vertical directions, and the amount and shape of the beam according to the specific position can not be accurately displayed . Meanwhile, the conventional sensor unit can be independently moved in the horizontal direction or the vertical direction, scanned (scanned) along its axes, and then the results are combined to determine the spatial distribution of the proton beam in the beam according to the position However, since an expensive scanning mechanism and a driving device are additionally required, the cost is increased, the structure is complicated, and the length of the beam transport system is also increased. In addition, in order to scan a high-power, high-density proton beam of 5 kW / cm ² or more, it is necessary to provide a fast scan (scanning) speed such that a high melting point scanning member such as a tungsten wire does not melt.

SUMMARY OF THE INVENTION The present invention has been devised to overcome the above problems, and it is an object of the present invention to provide a method and apparatus for measuring the shape of a charged particle beam, which is disposed on a traveling path of an accelerated proton beam, And to provide an apparatus for measuring a beam profile.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided an apparatus for measuring a beam profile, including: a tubular body installed on a proton or ion beam transmission path; A rotary disc assembly rotatably disposed within the tubular body; a rotary disc having one end fixed to the rotary disc and having a spiral shape that winds the virtual cylinder along an outer circumferential surface of a virtual cylinder; A rotation probe assembly including a beam measurement line comprised of a high melting point material; And a driving device coupled to one side of the outer circumferential surface of the tubular body and configured to transmit a rotational force to the rotating disk.

On the other hand, the beam measuring wire is arranged in a first direction when the rotating disk is in the first rotational angle range, and in a second direction perpendicular to the first direction when the rotating disk is in the second rotational angle range And is positioned outside the effective radius of the beam on the beam delivery path when the rotating disk is in the third rotational angle range to establish a free passage of the beam.

The rotating body further includes a rotational force transmitting assembly disposed between the tubular body and the driving device and transmitting rotational force generated in the driving device to the rotating probe assembly.

The rotating force transmitting assembly includes an upper magnet coupled to a driving shaft of the driving device. The rotating probe assembly includes a rotating shaft having one end connected to a center point of the rotating disk, And a lower magnet configured to rotate in synchronization with the rotation of the upper magnet.

The rotating force transmitting assembly includes an assembling frame, which is a hollow member at least partially penetrating the tubular body, and an upper magnet disposed between the upper magnet and the lower magnet at one end of the assembling frame, Further comprising a vacuum flange. By constituting the rotational force transmitting method using the magnetic force coupling between the magnets on both sides, the rotary shaft of the probe assembly can be rotated at a high speed and at a higher speed than the vacuum airtight type of the conventional rotary shaft itself, This is possible.

The probe further includes a probe disposed outside the tubular body and electrically connected to the probe assembly inside the tubular body.

The apparatus further includes a terminal connection assembly configured to electrically connect the probe to the rotation probe assembly, wherein the terminal connection assembly is coupled to one side of the assembly frame.

The rotating force transmission assembly may further include a bearing for rotatably supporting the rotation shaft in the assembly frame, and a first bearing fixing body and a second bearing fixing body for supporting the bearing inside the assembly frame, Wherein the transducer extends through an outer wall of the assembly frame so that one end of the probe is adjacent to the second bearing fixing body in the assembly frame and the terminal connection assembly is disposed at one end of the probe, And a contact spring for mediating the electrical connection of the probe.

On the other hand, the beam measuring line, the rotating disk, the rotating shaft, the bearing, the second bearing supporting body, the spring, and the probe are conductive metals.

Meanwhile, the second rotation angle range of the rotating disk has a phase difference of 180 degrees with respect to the first rotation angle range.

Other specific details of the invention are included in the detailed description and drawings.

1 is a perspective view of a beam profile measuring apparatus according to an embodiment of the present invention.
2 is a cross-sectional view of a beam profile measuring apparatus according to an embodiment of the present invention.
3 is a top perspective view of the shape of a rotating disc of a beam profile measuring apparatus and a beam measuring wire connected thereto according to an embodiment of the present invention.
4 is a side perspective view of a shape of a rotating disk and a beam measuring wire connected thereto of a beam profile measuring apparatus according to an embodiment of the present invention.
5 is a side view of the shape of a rotating disk of a beam profile measuring apparatus and a beam measuring wire connected thereto according to an embodiment of the present invention in one position.
FIG. 6 is a side view of another embodiment of a shape of a rotating disk and beam measuring wire connected thereto of a beam profile measuring apparatus according to an embodiment of the present invention. FIG.
FIG. 7 is a cross-sectional view illustrating a beam scanning (scanning) in the Y-axis direction using a beam profile measuring apparatus according to an embodiment of the present invention.
8 is a cross-sectional view illustrating the beam scanning in the X-axis direction using a beam profile measuring apparatus according to an embodiment of the present invention.
9 is a cross-sectional view illustrating a non-measurement state of a beam profile measuring apparatus according to an embodiment of the present invention.

Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. It should be noted that, in adding reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are shown in different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view of a beam profile measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a beam profile measuring apparatus according to an embodiment of the present invention includes a tubular body 100 installed on a beam transmission path in a beam extracting apparatus.

Flanges 110 may be formed on both ends of the tubular body 100 and the flanges 110 at both ends of the tubular body 100 may be connected to flanges of other vacuum tubes forming a beam- Respectively. In the operating state, the inside of the tubular body can be kept in vacuum.

The beam transmission path in the beam extracting apparatus can maintain a vacuum, so that the inside of the tubular body 100 can also be maintained in a vacuum state.

In addition, the beam profile measuring apparatus according to an embodiment of the present invention includes a driving device 200 coupled to the outer peripheral surface 102 of the tubular body 100.

The drive device 200 may be configured to transmit rotational force to the rotating probe assembly 500 (500 in FIG. 2). The driving device 200 may be an electric rotary member such as a motor, and may be, for example, a motor or a step motor rotated 360 degrees in all directions. The driving device 200 may be a controlled driving motor in which the rotational direction, the rotational speed, and the rotational direction are changed according to an external signal.

In addition, the apparatus for measuring a beam profile according to an embodiment of the present invention may further include an encoder 400 disposed on one side of the driving apparatus 200.

The encoder 400 may be coupled to the rotational driving shaft of the driving device 200 and may measure the period and angle of rotation of the driving device 200. [

In the illustrated embodiment of the present invention, the driving apparatus 200 measures the rotation period and the angle thereof through the encoder 400, and the rotation azimuth, the rotation speed and the rotation direction thereof are adjusted. However, the present invention is not limited to this, and the driving device 200 may be configured not to be coupled to an external encoder 400 but to have an encoder 400 embedded therein.

The beam profile measuring apparatus according to an exemplary embodiment of the present invention may include a sensing probe 500 disposed outside the tubular body 100 and electrically connected to the probe assembly 500 (500 in FIG. 2) Terminal 310 as shown in FIG.

The sensing terminal 310 may be a terminal for transmitting the current signal generated from the probe inside the tubular body 100 to the outside of the tubular body 100.

2 is a cross-sectional view of a beam profile measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 2, a beam profile measurement apparatus according to an embodiment of the present invention includes a rotation probe assembly 500.

The rotation probe assembly 500 may be installed inside the tubular body 100. The rotary probe assembly 500 includes a beam measurement line 510, a rotary disk 520, a rotary shaft 530 connected to the rotary disk 520, an assembly frame 540, a bearing 550, a first bearing fixing body 560, a second bearing fixation body 562, an insulating member 564, a vacuum spacing flange 570, a lower magnet 580, and a snap ring 590.

One end of the beam measuring wire 510 may be fixed to the rotating disk 520. One end of the beam measuring wire 510 may be fixed at a radially outer point of the rotating disk 520, and the other end thereof may be a free single end. In the illustrated embodiment, the beam measuring wire 510 is shown to include a straight line extension 516 that extends straight at one end thereof. However, the present invention is not limited thereto, and the length of the straight extension portion 516 may be changed or omitted depending on the characteristics of the apparatus to be manufactured.

The beam measuring wire 510 may be disposed on the ion beam transport path, strictly speaking, a hollow portion within the tubular body 100. The beam measuring line 510 may have a spiral shape that winds a virtual cylinder along an outer circumferential surface of a virtual cylinder. The beam measuring line may be composed of a high melting point material, and may be composed of, for example, tungsten.

The beam measuring line 510 can move in a second direction D2 perpendicular to the first direction D1 while being aligned in the first direction D1 as a whole on the cross section according to the rotation of the rotating disk 520, Also, in a state of being aligned in the second direction D2, it can be moved in the first direction D1 perpendicular to the second direction D2. Accordingly, the beam measuring line 510 can measure the profile (cross-section) of the ion beam measured along the first direction D1 on the cross section, and can measure the profile of the ion beam in the second direction Sectional profile) of the ion beam can be measured.

The beam measuring wire 510 may be a shape that maintains an angle of 100 to 150 degrees on a cross section and is wound to a degree of 0.4 rotation of a virtual cylinder.

The rotating disk 520 may be rotatably disposed within the tubular body 100.

The rotating disk 520 may be connected to the rotating shaft 530. One end of the rotating shaft 530 may be connected to the center point of the rotating disk 520 and the rotating disk 520 may be rotated in accordance with the rotation of the rotating shaft 530. The other end of the rotary shaft 530 may be fixed to the lower magnet 580.

The end of the beam measuring wire 510, that is, the end of the free end of the tubular body 100 (that is, the free end of the beam measuring wire 510) ) Can be periodically changed.

Further, in accordance with the rotation of the rotating disk 520, the shape of the beam measuring wire 510 shown on a section perpendicular to the beam transmission path, as shown in Fig. 2, can be periodically changed.

At this time, the shape of the beam measuring wire 510 shown on the cross section perpendicular to the beam transmission path can be interpreted as a probe line overlapping the transmitted beam.

The assembly frame 540 may be a hollow member having a penetrating member at least partly passing through the tubular body 100 and having an inner space therebetween.

Although the assembly frame 540 is illustrated as being coupled to the tubular body 100 through the tubular body 100 in the illustrated embodiment, the assembly frame 540 may be integrally formed with the tubular body 100 Or may refer to a portion of the tubular body 100 separately.

A first bearing fixing body 560 and a second bearing fixing body 562 may be disposed in an inner space of the assembly frame 540. [

The first bearing fixing body 560 and the second bearing fixing body 562 can support the bearing 550 therein. The bearing 550 can rotatably support the rotating shaft 530 therein.

The bearing 550 may be made of a conductive material, for example, a conductive metal, for example, non-magnetic stainless steel. The first bearing fixing body 560 may be made of an insulating material, for example, plastic. The bearing 550 can be held in position by the first bearing fixing body 560 and can be maintained in an electrically insulated state with the outer assembly frame 540 and the tubular body 100.

The second bearing fixing body 562 is positioned within the first bearing fixing body 560 and can at least partially contact the bearing 550 to support the bearing 550. [ The second bearing fixing body 562 may be made of a conductive metal, for example, non-magnetic stainless steel. The second bearing fixing body 562 and the bearing 550 can be electrically connected.

Further, the beam measuring wire 510, the rotating disk 520, and the rotating shaft 530 may also be made of a conductive metal, for example, non-magnetic stainless steel.

The vacuum spacing flange 570 is coupled to one end of the assembly frame 540. The vacuum spacing flange 570 cuts the inner space of the assembly frame 540 from the outside and can maintain the vacuum space inside the tubular body 100 and the inner space of the assembly frame 540.

The vacuum spacing flange 570 may be made of stainless steel, for example, non-magnetic stainless steel.

The lower magnet 580 may be fixed to the other end of the rotating shaft 530. The lower magnet 580 may be a multipolar permanent magnet. For example, the lower magnet 580 may be a bipolar, quadrupole, or hexapole permanent magnet in which N poles and S poles are alternately arranged along the circumference of the rotating shaft 530. For example, the lower magnet 580 may be a ferrite magnet.

An insulating member 564 may be disposed on top of the second bearing fixing body 562. The second bearing fixing body 562 is enclosed by an insulating member 564 and a first bearing fixing body 560 such that the second bearing fixing body 562 has a vacuum spacing flange 570, (540) and the tubular body (100).

A snap ring 590 is fixed to the rotating shaft 530 and a snap ring 590 is provided between the upper portion of the bearing 550 and the second bearing fixing body 562 and between the lower portion of the bearing 550 and the first bearing fixing body 560, As shown in FIG. The rotation shaft 530 can be rotatably supported by the first bearing fixing body 560, the bearing 550 and the second bearing fixing body 562 by the snap ring 590. [

In addition, the apparatus for measuring a beam profile according to an embodiment of the present invention may further include a rotational force transmitting assembly 600 installed on the top of the rotational probe assembly 500.

The rotational force transmitting assembly 600 may be disposed between the driving device 200 and the tubular body 100 and may transmit the rotational force transmitted from the driving device 200 to the rotational probe assembly 500.

The torque transfer assembly 600 may include an upper flange 610, a drive flange 620, and an upper magnet 630.

The upper flange 610 can include an upper containment space that can be coupled onto the vacuum spacing flange 570 and accommodates the upper magnet 630 therein.

The driving device flange 620 may be coupled to the upper flange 610 at one side and to the driving device 200 at the other side. In other words, the drive device 200 can be coupled to the assembly frame 540 and the tubular body 100 via the upper flange 610 and the vacuum spacing flange 570 via the drive device flange 620.

At least a portion of the drive shaft of the drive system 200 extends into the upper containment space with the upper flange 610. [ The end of the drive shaft is positioned at a free end and is not physically connected to the rotational axis 530 of the probe assembly 500. The drive shaft may be axially aligned with the rotational axis 530 of the rotating assembly.

The upper magnet 630 may be fixed to the end of the drive shaft. In accordance with the rotation of the driving device and thus the rotation of the rotary shaft 530, the upper magnet 630 can be rotated. Rotation of the upper magnet 630 may change the magnetic field profile of the surroundings. A magnetic force can be applied to the lower magnet 580 and the lower magnet 580 can be rotated according to the variation of the peripheral magnetic field profile. That is, the lower magnet 580 can be rotated in synchronization with the rotation of the upper magnet 630. That is, the beam profile apparatus according to an embodiment of the present invention may have a magnetic coupling drive system.

In accordance with one embodiment of the present invention, the assembly frame 540 and the interior of the tubular body 100 can be shielded from the outside and the vacuum inside thereof can be maintained by the vacuum spacing flange 570. The vacuum spacing flange 570 may also be disposed between the lower magnet 580 and the upper magnet 630 and the lower magnet 580 may be physically separated from the upper magnet 630 and magnetically coupled. Since the lower magnet 580 is rotated in synchronization with the upper magnet 630, the driving element necessary for rotating the lower magnet 580 does not need to be connected to the inside of the assembly frame 540 or the tubular body 100.

The beam profile measuring apparatus according to an embodiment of the present invention further includes a terminal connecting assembly 300 for electrically connecting the probe 310 to the probe assembly 500, for example, the beam measuring line 510, . ≪ / RTI >

The terminal connection assembly 300 may be coupled to one side of the assembly frame 540. The terminal connection assembly 300 may include an insulating bushing 320, an O-ring 330, a ring support bushing 340, a stationary cover 350 and a contact spring 360.

The insulating bushing 320 may include an internal insertion space into which the probe 310 is inserted. The insulating bushing 320 may be coupled to one side of the assembly frame 540. The sensing terminal 310 may be fixed to the insulating bushing 320 and one end of the probe 310 may penetrate the outer wall of the assembly frame 540 and may be connected to a second bearing fixing body 562 < / RTI >

The second bearing fixing body 562 can be electrically connected to the beam measuring line 510 through the bearing 550 and the rotating shaft 530 made of a conductive material and the probe 310 can also be electrically connected to the beam measuring line 510 And may be electrically connected to the wire 510. Thereby, the measurement signal transmission comprising the beam measuring line 510, the rotating disk 520, the rotating shaft 530, the bearing 550, the second bearing supporting body 562, the contact spring 360 and the probe 310 A path can be formed.

The O-ring 330 is in close contact with the outer circumferential surface of the probe 310 inside the insulating bushing 320 and can function as a sealing member for maintaining airtightness inside the assembly frame 540 and the tubular body 100 from the outside .

The ring support bushing 340 may be coupled to the stationary cover 350. Ring 330 so that the O-ring 330 is positioned inside the insulated bushing 320. The O- The fixed cover 350 may be fixed to the outer surface of the probe 310. [

At one end of the probe 310, a contact spring 360 may be disposed. The contact spring 360 may mediate the electrical connection between the second bearing fixing body 562 and the probe 310. The contact spring 360 can be elastically deformed. This allows the probe 310 and the second bearing fixing body 562 to simply contact the contact springs 310 and the second bearing fixing body 562 without requiring a precise dimensional margin for the electrical connection or contact between the probe 310 and the second bearing fixing body 562. [ (Not shown).

3 is a top perspective view of the shape of a rotating disk 520 of a beam profile measuring apparatus and a beam measuring wire 510 connected thereto according to an embodiment of the present invention.

4 is a side perspective view of a shape of a rotating disk 520 of a beam profile measuring apparatus and a beam measuring wire 510 connected thereto according to an embodiment of the present invention.

5 is a side view at one location of the shape of the rotating disk 520 of the beam profile measuring apparatus and the beam measuring wire 510 connected thereto according to an embodiment of the present invention.

6 is a side view at another position of the shape of the rotating disk 520 of the beam profile measuring apparatus and the beam measuring wire 510 connected thereto according to an embodiment of the present invention.

3 to 6, the beam measuring wire 510 may be coupled to the rotating disk 520 at one end.

The beam measuring wire 510 extends along the outer circumferential surface of the imaginary cylinder and can wind an imaginary cylinder about 0.4 times.

That is, when viewing the rotating disk 520 and looking at the beam measuring wire 510, the beam measuring wire 510 can be bent approximately at the curved angle Dg along the circumferential surface of the rotating disk 520, The curvature angle Dg can be, for example, 120 to 160 degrees, or for example, 144 degrees.

7 is a cross-sectional view illustrating a situation in which a beam is scanned in the Y-axis direction using a beam profile measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 7, the beam measuring line 510 of the beam profile measuring apparatus according to an embodiment of the present invention may be arranged in a first direction D1, that is, in the X-axis direction, as a whole. This is done by the inherent shape of the helical beam measurement line 510 when one end of the beam measurement line 510 is in a fixed angular range, e.g., the first rotational angle range, .

The beam measuring line 510 is generally aligned in the first direction D1 and the second direction D1, from A1 to B2 when the rotating disk 520 is rotated within a specified angular range, resulting from the spiral inherent shape of the beam measuring line 510. [ For example, it may be moved in the second direction D2 perpendicular to the first direction D1, for example, the Y axis direction, while being aligned in the X axis direction.

Accordingly, the beam profile measuring apparatus according to an embodiment of the present invention can measure the beam measurement line 510 in a specific direction, that is, by rotating the rotating disk 520 in the first rotation angle range without a linear movement device such as a linear motor, , It is possible to move in the second direction D2 perpendicular to the first direction D1 and to measure the beam profile in the second direction D2.

FIG. 8 is a cross-sectional view illustrating a beam scanning in the X-axis direction using a beam profile measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 8, the apparatus for measuring a beam profile according to an embodiment of the present invention may scan a beam profile in a direction perpendicular to the scanning direction described with reference to FIG.

This is because when the rotating disk 520 to which the one end of the beam measuring line 510 is fixed is in the specific angular range previously described in Fig. 8, that is, the angular range other than the first rotational angular range, that is, , And the inherent shape of the helical beam measuring line 510.

The second rotation angle range of the rotating disk 520 may have a phase difference of 180 degrees with respect to the first rotation angle range.

The beam measuring wire 510 generally extends in the second direction D2, for example, in the second direction D2 when the rotating disk 520 is rotated within the second rotational angle range, resulting from the spiral inherent shape of the beam measuring line 510. [ Can be moved in a first direction D1, for example, a horizontal (X) axis direction perpendicular to the second direction D2, from A2 to B2 while being aligned in the vertical (Y) axis direction.

Accordingly, the beam profile measuring apparatus according to an embodiment of the present invention can rotate the rotating disk 520 in the first rotation angle range and the second rotation angle range without a linear movement device such as a linear motor, , For example, line scanning can be performed in the X-axis direction and the Y-axis direction on the cross section. Further, line scanning of the beam profile along the X-axis and Y-axis directions can be performed with one device without changing the position and structure of the measuring device.

The measured beam profiles can be combined with each other, whereby information about the overall beam profile on the cross section can be obtained.

This can indicate information about the intensity of a specific position of the beam, the beam boundary shape and the beam density on the cross section.

9 is a cross-sectional view illustrating a non-measurement state of a beam profile measuring apparatus according to an embodiment of the present invention.

9, when the rotating disk 520 is in the third rotational angle range other than the first rotational angular range and the second rotational angular range, the helical beam measuring wire 510 has a radius of curvature of the effective radius of the beam Can be located outside. That is, the beam measuring wire 510, which is helical, can be disposed outside the effective radius, which is the path through which the used beam is mostly focused and transmitted.

Therefore, the beam profile measuring apparatus according to the embodiment of the present invention can be installed as it is in the beam transmission path, even in the state of use of the radiation medical device. Therefore, for the beam measurement, there is no need to separately turn off the radiological medical device to install the measuring device.

The user can measure the entire profile of the beam using a beam profile measuring device according to an embodiment of the present invention when needed or immediately, and can perform rapid anomaly detection or status monitoring on the beam profile have.

10 is a block diagram illustrating a measurement method of a beam profile measuring apparatus according to an embodiment of the present invention.

10, a beam profile measuring apparatus 10 according to an exemplary embodiment of the present invention may be configured to transmit a measured current signal SCS and a measured position signal SPS to a data acquisition system (DAQ system) . The data acquisition system 1000 can determine the position intensity, the two-dimensional distribution shape, and the like of the beam based on the measured current signal SCS corresponding to the measured position signal SPS.

Specifically, the position measuring encoder 400 of the beam profile measuring apparatus 10 can measure the rotational angle of the rotating disk 520 at which one end of the beam measuring line 510 is fixed, To the data acquisition system 1000 as a position signal SPS. The current measuring unit of the beam profile measuring apparatus 10, that is, the rotating probe assembly 500 or the terminal connecting assembly 300 further includes information on the current induced in the beam measuring line 510, (SCS) to the data acquisition system 1000.

For example, the measured position signal SPS may be a signal related to which value or angle the rotating disk is within the first rotation angle range, the second rotation angle range or the third rotation angle range. The measurement current and position signal analysis unit of the data acquisition system 1000 may match where the beam measurement line 510 is on a two-dimensional coordinate based on the measured position signal SPS, A beam profile representing the intensity of the position of the beam can be calculated based on the measured current signal SCS for each measured position signal SPS.

The data acquisition system 1000 can also transfer the motor control signal MCS to the beam profile measurement device 10 and adjust the rotation of the rotating disk 520 based on the beam profile transmitted motor control signal MCS .

11 is a flowchart illustrating a method of measuring a beam profile using a beam profile measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 11, a beam profile measuring method according to an embodiment of the present invention starts a current measurement according to a user's request or according to a start command of the system (S10).

First, rotation of the motor, that is, rotation of the rotating disk 520 is started (S20). The rotation of the motor may be based on the motor control signal (MCS) transmitted from the data acquisition system 1000, i.e., the external controller, described with reference to FIG.

The beam profile measuring device measures the current induced in the beam measuring line 510 by the angle of the rotating disk 520 and outputs the measured position signal SPS and the measured current signal SCS to an external controller, For example, to the data acquisition system 1000 (S30).

Then, the measurement of the current intensity by position is stopped, that is, terminated (S40).

Then, the rotating disk 520 returns to the origin by the motor, that is, is moved and stopped (S50).

The origin of the rotating disk 520 may be within the third rotational angle range, as described above. That is, at the time of shutdown, or at origin return, the helical beam measuring wire 510 may be located outside the effective radius of the beam.

The foregoing description is merely illustrative of the technical idea of the present embodiment, and various modifications and changes may be made to those skilled in the art without departing from the essential characteristics of the embodiments. Therefore, the present embodiments are to be construed as illustrative rather than restrictive, and the scope of the technical idea of the present embodiment is not limited by these embodiments. The scope of protection of the present embodiment should be construed according to the following claims, and all technical ideas within the scope of equivalents thereof should be construed as being included in the scope of the present invention.

100: tubular body 200: drive device
300: Terminal connection assembly 400: Encoder
500: Rotary Probe Assembly 600: Torque Transfer Assembly

Claims (11)

A tubular body disposed on the proton or ion beam delivery path;
A rotating disk disposed inside the tubular body and configured to measure a two-dimensional beam profile by one-axis rotation, the rotating probe comprising: a rotating disk rotatably disposed in the tubular body; and one end fixed to the rotating disk, And a beam measuring line made of a high-melting-point material having a spiral shape that winds the imaginary cylinder along the axis of the probe; And
And a driving device coupled to one side of the outer circumferential surface of the tubular body and configured to transmit a rotational force to the rotating disk.
Beam profile measuring device. A tubular body disposed on the proton or ion beam delivery path;
A rotating disk disposed inside the tubular body and configured to measure a two-dimensional beam profile by one-axis rotation, the rotating probe assembly comprising: a rotating disk rotatably disposed within the tubular body; and a beam having one end fixed to the rotating disk, A rotating probe assembly including a measurement line and
And a driving device coupled to one side of the outer circumferential surface of the tubular body and configured to transmit a rotational force to the rotating disk,
Wherein the beam measuring line is aligned in a first direction when the rotating disk is in a first rotational angle range and in a second direction perpendicular to the first direction when the rotating disk is in a second rotational angle range And a second rotating angle of the beam is set to be outside the effective radius of the beam on the beam delivery path when the rotating disk is in the third rotational angle range.
Beam profile measuring device. 3. The method according to claim 1 or 2,
Further comprising a rotational force transmission assembly disposed between the tubular body and the drive device for transmitting a rotational force generated in the drive device to the rotational probe assembly,
Beam profile measuring device. The method of claim 3,
Wherein the torque transmission assembly includes an upper magnet coupled to a drive shaft of the drive device,
Wherein the rotary probe assembly includes a rotary shaft having one end connected to a center point of the rotary disk and a lower magnet connected to the other end of the rotary shaft and configured to rotate in synchronism with the rotation of the upper magnet,
Beam profile measuring device. [5] The apparatus of claim 4, wherein the rotational force transmitting assembly comprises: an assembly frame, which is a hollow member at least partially penetrating the tubular body; and a pair of upper and lower magnets disposed at one end of the assembly frame, Further comprising a vacuum spacing flange that is shielded from the outside,
Beam profile measuring device. 6. The apparatus of claim 5, further comprising a probe disposed outside the tubular body and electrically coupled to the rotating probe assembly within the tubular body,
Beam profile measuring device. 7. The probe assembly of claim 6, further comprising a terminal connection assembly configured to electrically connect the probe to the probe assembly, wherein the terminal connection assembly is coupled to one side of the assembly frame,
Beam profile measuring device. [8] The apparatus of claim 7, wherein the rotational force transmitting assembly includes: a bearing for rotatably supporting the rotation shaft in the assembly frame; and a first bearing fixing body and a second bearing fixing body for supporting the bearing inside the assembly frame Further included,
Wherein the probe passes through an outer wall of the assembly frame so that one end of the probe extends so as to be adjacent to the second bearing fixing body in the assembly frame,
Wherein the terminal connection assembly includes a contact spring disposed at one end of the probe and mediating an electrical connection between the second bearing fixing body and the probe,
Beam profile measuring device. 9. The method of claim 8, wherein the beam measuring line, the rotating disk, the rotating shaft, the bearing, the second bearing support body, the spring,
Beam profile measuring device. 3. The method of claim 2, wherein the second rotational angle range of the rotating disc has a phase difference of 180 degrees with respect to the first rotational angle range,
Beam profile measuring device. 3. The method according to claim 1 or 2,
Further comprising an encoder (400) disposed on one side of the drive,
Wherein the encoder measures the rotation angle of the driving device of the driving device,
Measuring a beam profile based on the current induced in the beam measurement line corresponding to the measured rotation angle,
Beam profile measuring device.

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