KR101903712B1 - Forming apparatus for pattern line - Google Patents

Abstract

The present invention relates to a nozzle unit, a nozzle unit, and a nozzle unit. The nozzle unit includes a fin unit disposed inside the nozzle unit, a connector unit connected to the fin unit to supply power, and a tab unit supporting the fin unit, And a pattern line forming apparatus capable of improving the lifetime of the nozzle unit in forming a pattern line by discharging a solution using an electrohydraulic phenomenon is presented.

Description

Forming apparatus for pattern line < RTI ID = 0.0 >

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a pattern line forming apparatus, and more particularly, to a pattern line forming apparatus capable of improving the service life of a nozzle unit capable of discharging a solution using an electrohydraulic phenomenon.

Recently, various electronic products are equipped with semiconductor devices which perform various functions inside. Semiconductor devices are becoming lighter and thinner, and line widths of pattern lines connecting semiconductor elements are becoming thinner.

In addition, in the case of FPD (Flat Panel Display) of a liquid crystal display (LCD), an organic light emitting diode (OLED) or a light emitting diode (LED) type, The elements are becoming smaller, and the line width of the pattern lines connecting the circuit elements is becoming thinner.

In addition, as the displays of mobile devices such as smart phones and laptops are made lighter and smaller, pattern lines of PCBs (Printed Circuit Boards) that drive displays of these devices are being formed finely and complicatedly.

In accordance with this trend, various devices for manufacturing semiconductors, FPDs, PCBs, and the like are equipped with a repair device capable of forming a pattern line with a width of several micrometers while ejecting conductive ink from the nozzles into fine droplets by utilizing electrohydrodynamic (EHD) And the repair device is provided with a nozzle for discharging the conductive ink using electrohydraulic.

In order to discharge a very small amount of conductive ink from a nozzle using electrohydraulic, an electric field should be formed on the lower side of the nozzle by the nozzle acting as an electrode. Therefore, the nozzle should be made of metal or at least a metal film should be provided on the outer circumferential surface.

For example, Korean Patent Laid-Open Publication No. 10-2010-0027842 discloses a nozzle constituted by a conductive material as a constituent part of a patterning apparatus, and Korean Patent Laid-Open Publication No. 10-2014-0079288 discloses a nozzle made of glass, Is presented as a constituent part of a printing apparatus that utilizes the electro-hydrodynamic phenomenon.

However, when the nozzle is made of metal, it is difficult to form the tip area as small as desired because of difficult processing. Therefore, the nozzle is made of glass and the metal film is coated on the outer surface. In this case, the nozzle can be easily machined, so that the end area can be made as small as desired, and the electric field can be uniformly formed on the lower side of the nozzle by the metal film uniformly coated on the outer peripheral surface of the nozzle.

On the other hand, a nozzle made of glass and coated with a metal film has a problem that the metal film is detached from the outer circumferential surface as the use time increases. When the metal film is detached from the outer circumferential surface of the nozzle, the voltage to be applied to the metal film must be gradually increased for the duration of discharge of the nozzle. However, since it is difficult to precisely control the voltage applied to the metal film so as to correspond to the degree of dropping of the metal film, it is difficult to uniformly form the electric field to the lower side of the nozzle. In addition, even if the voltage applied to the metal film is precisely controlled in accordance with the degree of the metal film falling off, the shape of the metal film is irregular, and it is difficult to uniformly form the electric field below the nozzle. Accordingly, there is a problem that it is difficult to precisely control the discharge amount of the conductive ink as the use time of the nozzle becomes longer.

KR 10-2010-0027842 A KR 10-2014-0079288 A KR 10-2015-0146080 A

The present invention provides a pattern line forming apparatus capable of improving the lifetime of a nozzle unit which is provided so as to be able to form a pattern line by discharging a solution using an electrohydraulic phenomenon.

A pattern line forming apparatus according to an embodiment of the present invention is an apparatus for discharging a solution by using an electrohydraulic phenomenon, comprising: a nozzle unit positioned to face a processed object; A fin portion disposed inside the nozzle portion and aligned with a central axis of the nozzle portion; And a connector portion electrically connected to the fin portion to supply power.

And a tab portion capable of supporting the fin portion to be aligned with a central axis of the nozzle portion.

A luer part connected to the nozzle part and the connector part; And a syringe portion mounted to the connector portion and connected to the nozzle portion, wherein at least a part of the tab portion can be inserted and fixed in the luer portion.

The fin portion may be mounted on the tab portion and fixed, and may be spaced from the inner circumferential surface of the nozzle portion.

The connector portion may be mounted on the luer portion on the opposite side of the nozzle portion with respect to the luer portion, and a part of the inner surface may be electrically connected to the tab portion.

The tab portion may be fixed in one direction and in a direction crossing one direction by contacting one end of the tab portion with the inner surface of the luer portion and the other end portion of the tab portion being in contact with the inner surface of the connector portion.

The syringe portion may be mounted to the connector portion.

The nozzle portion, the luer portion, the connector portion, and the syringe portion may be aligned with the center axis of the nozzle portion, and the inside can communicate with each other.

At least one passage is formed in the inner or outer peripheral surface of the tab portion to allow the solution to pass therethrough so that one side communicates with the inside of the nozzle portion or the luer portion and the other side communicates with the inside of the connector portion or the cylinder portion have.

At least one hole is formed through the tab portion in a direction crossing the center axis of the nozzle portion, and the hole can communicate with the passage of the tab portion.

The nozzle unit may include at least one of a glass and a sapphire.

The fin portion includes at least one electrically conductive material selected from the group consisting of tungsten, gold, silver, and copper, and the tab portion and the connector portion may include an electrically conductive material.

The solution includes a conductive ink, and the nozzle portion is formed with a cone tip at an end thereof, and the cone tip can be internally routed so that the conductive ink can be discharged by electrohydraulic pressure.

The fin portion may have a tapered tip formed at an end thereof, and the tapered tip may be located inside the tip of the cone formed at the end of the nozzle portion and extend to the vicinity of the solution outlet of the cone tip.

According to the embodiment of the present invention, it is possible to remarkably improve the lifetime of the nozzle unit, which is provided to form a pattern line on various substrates, by using electrohydraulics, for example, three times or more heretofore. Therefore, the replacing period of the nozzle unit can be longer than that of the related art, and the time and cost consumed in the conventional replacement of the nozzle unit can be saved. Further, the state of the nozzle unit can be maintained well until the nozzle unit is replaced, so that the reliability of the apparatus can be improved, and the productivity of the process and the quality of the product manufactured in the process can be improved.

For example, when an open defect of a pattern line formed on one side of a substrate is applied to an apparatus for repairing an ink using an electrohydraulic phenomenon during or after manufacturing an FPD, a fin portion is provided on an inner central axis of the nozzle portion to be used as an electrode Accordingly, it is possible to simplify the structure of the apparatus, to protect the fin within the nozzle unit, to stably maintain the apparatus, to uniformly form the electric field on the lower side of the nozzle unit, The ink can be accurately ejected.

1 is a schematic view showing a pattern line forming apparatus according to an embodiment of the present invention.
2 and 3 are schematic diagrams showing a pattern line forming apparatus according to an embodiment of the present invention.
4 is an exploded view illustrating a pattern line forming apparatus according to an embodiment of the present invention.
5 is a photograph of a nozzle part according to a comparative example of the present invention.
6 is a photograph of the nozzle unit according to the embodiment of the present invention.
7 is a photograph of a pattern line formation result according to an experimental example of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described below, but may be embodied in various forms. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. In the meantime, the drawings may be exaggerated to illustrate embodiments of the present invention, wherein like reference numerals refer to like elements throughout.

Hereinafter, embodiments of the present invention will be described in detail with reference to an ink repair process and facilities of a flat panel display (FPD) manufacturing sector. However, the present invention can be applied to various processes and facilities for discharging various liquid phase materials using electrohydraulic phenomena.

1 is a schematic view of a pattern line forming apparatus according to an embodiment of the present invention. Referring to FIG. 1, a pattern line forming apparatus according to an embodiment of the present invention will be described.

The apparatus for forming a pattern line according to an embodiment of the present invention is an apparatus for discharging a solution by using an electrohydraulic phenomenon. The apparatus includes a support unit 100 capable of supporting a processed product 10, A nozzle unit 200 provided at one side of the support unit 100 and a power unit 300 connected to the nozzle unit 200 and capable of applying power.

The pattern line forming apparatus includes a pneumatic unit 400 configured to provide pneumatic pressure to the nozzle unit 200, a pneumatic unit 400 configured to generate light for photographing the pattern line, An illumination unit 510, and an optical unit 520 provided at one side of the support unit 100 and capable of capturing an image of a pattern line. The operation of the support unit 100, the nozzle unit 200, the power supply unit 300, the pneumatic unit 400, the illumination unit 510 and the optical unit 520 can be controlled by the control unit 600.

The processed product 10 may include various substrates on which a process of manufacturing an electronic device and a conductive pattern line is ongoing or a process is completed. For example, the processed product 10 may include a glass or silicon or plastic substrate having a predetermined pattern line formed on one surface thereof. The treated product 10 can be supported by the supporting unit 100.

The solution may comprise a conductive ink for the formation of a pattern line. The conductive ink may include ink particles and a solvent. The conductive ink may contain metal particles such as gold, silver, platinum, chromium, alloys or oxides thereof, and may contain ions. On the other hand, the solvent may be a volatile substance, a water-soluble substance or a lipid-soluble substance. The solution is not limited to those described above, and may include various solutions capable of forming conductive pattern lines by, for example, spraying onto a substrate by electrohydrodynamic development.

The supporting unit 100 may include a stage glass which is formed to be capable of supporting the processing object 10 on one side, for example, the upper side. An alignment member (not shown) may be provided in the vicinity of the edge of the support unit 100 to align the position of the processing object 10 to a desired position while moving in the horizontal direction. A lift pin (not shown) may be provided on one side surface, for example, the upper surface of the support unit 100 so as to be able to support the processing object 10 while moving in the vertical direction, (Not shown) may be provided.

The support unit 100 may be installed on one side of a table (not shown) and fixed on the table, and may be installed on the table so as to be movable in at least one of a horizontal direction and a vertical direction.

A mounting unit (not shown) may be provided at one side of the table. The mounting unit may be installed on the table so as to be movable in at least one of the horizontal direction and the vertical direction, or may be installed on the table and fixed in position. The nozzle unit 200 may be mounted on and supported by the mounting unit. The mounting unit can be precisely operated to position the nozzle unit 200 at a position that is several to several hundred [mu] m apart from one side of the processing object 10 supported by the supporting unit 100. [

The nozzle unit 200 according to the embodiment of the present invention may be located on one side of the support unit 100, for example, on the upper side. The nozzle unit 200 discharges a minute amount of the solution by using an electrohydraulic phenomenon and precisely forms a very thin pattern line on one side of the processed product 10 or repairs defects in the pattern line .

Figs. 2 and 3 are schematic diagrams showing an enlarged view of a portion A and a portion B in Fig. 1, respectively. 4 is an exploded view of a pattern line forming apparatus according to an embodiment of the present invention. 4A is an exploded view of the nozzle unit of the pattern line forming apparatus according to the embodiment of the present invention. FIG. 4B is a cross-sectional view of the nozzle unit shown in FIG. Only the tab portion and the pin portion are shown separately.

1 to 4, a nozzle unit of a pattern line forming apparatus according to an embodiment of the present invention will be described in detail.

The nozzle unit 200 includes a nozzle unit 210 positioned to face the processing object 10, a nozzle unit 210 disposed inside the nozzle unit 210, aligned with the central axis of the nozzle unit 210, And a connector unit 240 connected to the fin unit 220 to supply power.

The nozzle unit 200 includes a tab portion 250 for supporting the fin portion 220 so that the fin portion 220 is aligned with the center axis of the nozzle portion 210, a nozzle portion 210 and a connector portion 240 A syringe 230 attached to the connector unit 240 and connected to the nozzle unit 210 to supply the solution and a nozzle unit 210 for the processed product 10 For example, a distance adjuster 270 that is finely adjustable in the vertical direction.

The nozzle unit 210 is disposed on the upper side of the support unit 100 and can be positioned to face the processing object 10. The nozzle part 210 extends in one direction, e.g., a longitudinal direction, and a path through which the solution passes is provided through the nozzle part 210 in one direction. The nozzle unit 210 may include a hollow cylindrical body such as a capillary tube, and a cone tip 211 may be formed at an end thereof. The cone tip 211 may be formed in a taylor cone shape having a smaller outer diameter and an inner diameter toward the end portion. At this time, a path formed by penetrating the inside of the cone tip 211 in one direction so that the solution can pass through the electrohydraulic phenomenon may be formed to have an inner circumferential width, for example, an inner diameter of several μm or less. That is, the cone tip 211 can be formed with a predetermined inner circumferential surface shape and width so that the conductive ink can be discharged by electrohydraulic pressure.

The nozzle unit 210 can be made of a material containing at least one of glass and sapphire so that the shape and size of the nozzle unit 210 can be smoothly formed to a desired shape and size, The formed solution discharge port (referred to as the end of the path through which the solution is passed) can be formed to a desired size, for example, a few μm or less. Of course, the material of the nozzle part 210 may include various non-conductive materials that can be precisely processed to a size of several micrometers or less.

The nozzle unit 210 is mounted through the luer part 260 in one direction and can communicate with the inside of the luer part 260. The fin portion 220 may be located inside the nozzle portion 210.

The fin portion 220 may be disposed inside the nozzle portion 210. The fin portion 220 may be electrically connected to the connector portion 240 through the tab portion 250 and may be operated as an electrode by receiving power. The fin part 220 serves as an electrode and an electric field can be formed between the fin part 220 and the processed product 10 by the fin part 220. The solution contained in the nozzle part 210 by the electric field can be precisely .

The fin portion 220 may be a thin fin-shaped member that is elongated by several tens mm in one direction so as to have a diameter smaller than the inner circumferential surface width of the nozzle portion 210, such as a diameter of several tens to several hundreds of microns. At this time, the cross-sectional shape of the fin portion 220 may be circular, oval, square, polygonal, or the like. For example, the cross-sectional shape of the fin portion 220 may be determined depending on the shape of the inner circumferential surface of the nozzle portion 210, the characteristics of the electric field formed by the fin portion 220, the effective sectional area shape of the inner space of the nozzle portion 210 by the fin portion 220, Can be appropriately selected.

The fin portion 220 may be mounted through the tab portion 250 in one direction, for example, in the longitudinal direction, may be aligned with the longitudinal center axis of the nozzle portion 210, and may be spaced from the inner peripheral surface of the nozzle portion 210. As the pin unit 220 is aligned with the center axis of the nozzle unit 210 and fixed in position, an electric field can be uniformly formed below the nozzle unit 210 and uniform force can be applied to ions formed in the solution have. Therefore, the discharge amount of the solution can be controlled very precisely.

For example, when the fin portion 220 is bent inside the nozzle portion 210 or contacts the inner circumferential surface of the nozzle portion 210, it is difficult to form a uniform electric field, so that the solution discharge can not be precisely controlled. In contrast, in the embodiment of the present invention, since the fin portion 220 is arranged on the central axis in the nozzle portion 210 by the tab portion 250 and is arranged straight in one direction without bending, The electric field can be uniformly formed, and the solution can be discharged precisely.

The fin portion 220 may have a tapered tip 221 at an end thereof. The tapered tip 221 may be located inside the cone tip 211 formed at the end of the nozzle unit 210 and may extend in one direction with the diameter gradually decreasing to the vicinity of the solution outlet of the cone tip 211 . The power can be applied to the vicinity of the solution discharge port of the nozzle unit 210 by the tapered tip 221. The outer peripheral surface shape of the tapered tip 221 may be formed in the same or similar shape corresponding to the inner surface shape of the cone tip 211 and may be spaced from the inner surface of the cone tip 211, for example.

The fin part 220 is made of an electrically conductive material such as various metals or alloys which can be formed by applying an electric power and has a rigidity enough to prevent warping due to its own weight and solution pressure when formed with a diameter of several tens or several hundreds of micrometers And may contain at least one metal or alloy. For example, the fin portion 220 may be made of a metal or an alloy containing at least one or more of tungsten, gold, silver, platinum, copper and aluminum.

The tip of the taper tip 211 of the fin unit 220 may be positioned at a distance of 1 mm to 5 mm from the tip of the cone tip 211 of the nozzle unit 210. The outer circumferential surface of the taper tip 211 can be spaced apart from the inner surface of the cone tip 211 by a desired distance so that when the power is applied to the fin portion 220, And can be precisely discharged.

The syringe 230 may be positioned on the opposite side of the luer part 260 with the connector part 240 as a center. The syringe 230 is connected to the nozzle unit 210 to supply a solution, for example, a conductive ink. The syringe portion 230 extends in one direction, for example, in the longitudinal direction, and has a space in which the solution can be received. For example, the syringe 230 is formed in a cylindrical shape, and the solution can be stored therein. The syringe 230 can be mounted to connect between the nozzle unit 210 and the pneumatic unit 400 and can transmit the pneumatic pressure applied from the pneumatic unit 400 to the nozzle unit 210. To this end, the syringe 230 may be connected to the pneumatic unit 400 to receive pneumatic pressure.

The syringe unit 230 is mounted on the connector unit 240 and communicates with the nozzle unit 210 by the connector unit 240 and the luer part 260. Therefore, the syringe 230 can be made of an electrically insulative material so as to be electrically insulated from the connector 240. At this time, the syringe 230 may be formed integrally with the connector 240.

On the other hand, when the amount of the solution required for pattern line formation is larger than the volume of the syringe 230, the syringe 230 can be connected to the solution storage unit (not shown) to receive the solution.

Alternatively, when the amount of the solution required for forming the pattern line is equal to or smaller than the volume of the nozzle part 210, the syringe part 230 may be in a state in which no solution is contained therein have. At this time, the solution may be provided inside the nozzle unit 210. For example, when the nozzle unit 200 is assembled, the solution may be previously injected into the nozzle unit 210, or the solution may be supplied to the nozzle unit 210 in various other ways It can be provided inside.

The connector portion 240 may be mounted on the luer portion 260 on the opposite side of the nozzle portion 210 with the luer portion 260 as a center. That is, the connector unit 240 can be mounted by connecting the syringe unit 230 and the luer unit 260. The connector portion 240 may be formed in a hollow cylindrical shape and a portion of the inner surface may protrude into contact with the tab portion 250 and may be electrically connected to the tab portion 250, 220, respectively. At this time, the connector portion 240 can closely contact the tab portion 250 to the luer portion 260 side by using the protruded portion of the inner circumferential surface, for example, the protrusion 241, so that the tab portion 250 can be more stably fixed .

The connector portion 240 may extend in one direction and may include a predetermined space that passes through the connector portion 240 in one direction. The connector portion 240 may be mounted such that one end of the connector portion 240 facing the luer portion 260 surrounds the outer circumferential surface of the luer portion 260. The other end portion of the connector portion 240 facing the syringe portion 230 contacts the outer circumferential surface of the syringe portion 230 As shown in FIG. At this time, the manner in which they are mounted is not particularly limited.

A portion of the outer circumferential surface of the connector portion 240 may be recessed toward the inside of the connector portion 240 to form a predetermined plane, for example, a plane. The connector unit 240 may be connected to the power unit 300 using the plane of the outer circumferential surface. The power supply unit 300 may be provided with a U-shaped clip member 310 and may be easily connected to the clip member 310 in such a manner that the clip member 310 is fitted to a plane formed to face the outer circumferential surface of the connector unit 240 , And the power can be supplied through it. The connector unit 240 may be formed of a material containing at least one electrically conductive material such as various metals or alloys so that the connector unit 240 can transmit power to the tab unit 250. For example, the connector portion may be formed of the same or similar material as the fin portion 220, but is not limited thereto.

The tab portion 250 may be positioned on the opposite side of the nozzle portion 210 with respect to the luer portion 260. At this time, at least a part of the tab 250 can be inserted and fixed in the luer part 260. The tab portion 250 can support the fin portion 220 inside the luer portion 260 so that the fin portion 220 is aligned with the longitudinal center axis of the nozzle portion 210. [

The tab portion 250 may be formed in a cylindrical shape, for example. However, the tab portion 250 can be modified in various ways as long as it is supported by the inner surface of the luer portion 260 and can be fixed in position. The tab portion 250 may be formed to have a diameter so as to be in close contact with the inner surface of the luer portion 260 and may be formed to be spaced apart from the inner surface of the luer portion 260.

The tab portion 250 extends in one direction and has one end portion facing the nozzle portion 210 contacting the inner surface of the luer portion 260 and the other end portion facing the syringe portion 230 contacting the connector portion 240. [ So that the position can be fixed in a direction crossing one direction and one direction. The outer peripheral surface of one end portion of the tab portion 250 can be in close contact with the contact surface 261 of the other inner surface of the luer portion 260 described later and the other end portion of the tab portion 250 can be in contact with the inner surface projection 241 of the connector portion 240. [ And its position can be fixed.

At least one hole 252 may be formed through the tab portion 250 in a direction crossing the one direction. The holes 252 formed through the tabs 250 can be used as a passage through which the solution in the luer part 260 is moved.

At least one passage 251 is formed in the inner or outer peripheral surface of the tab 250 to allow the solution to pass therethrough. For example, the passage 251 may include at least one groove or slot formed in one direction along the outer circumferential surface of the tab portion 250. One side of the passage 251 is exposed or opened to the inside of the nozzle unit 210 or the luer part 260 and the other side is exposed or opened inside the connector part 240 or the syringe part 230 Can communicate with each other. At this time, when a plurality of passages 251 are formed, the plurality of passages 251 may be connected to each other through the holes 252. That is, the holes 252 formed through the tabs 250 serve to connect the passages 251, so that the solution can be passed more uniformly.

The tab portion 250 may be formed of a material containing at least one electrically conductive material such as various metals or alloys so as to be transmitted to the fin portion 220 by receiving power from the connector portion 240. For example, The materials may be similar or identical.

The nozzle portion 210 may be mounted on the luer portion 260. The luer part 260 serves to support the nozzle part 210 and serves to connect the nozzle part 210 and the connector part 240. The luer part 260 extends in one direction and the shape of the inner surface of the luer part 260 about the central axis of the nozzle part 210 can be rotationally symmetrical. At least one step may be formed on the outer surface of the luer part 260, and handling such as assembling or transporting the device may be facilitated.

The nozzle unit 210 may be inserted through the inner surface of the luer part 260 and the connector part 240 may be inserted into the outer surface of the other part of the luer part 260. A tab portion 250 is positioned on the other inner surface of the luer portion 260 and a contact surface 261 may be provided on the other inner surface of the luer portion 260 that is in close contact with one end portion of the tab portion 250.

At this time, the contact surface 261 of the luer part 260 may be formed as an inclined surface whose inner diameter narrows in one direction toward the nozzle part 210, and may be rotationally symmetric about the central axis of the nozzle part 210. The tab portion 250 may be aligned with the central axis of the nozzle portion 210 while the one end of the tab portion 250 is closely attached to the sloped surface of the luer portion 260,

Alternatively, the contact surface 261 of the luer part 260 may be provided with a step (not shown) in which the inner diameter of the luer part 260 is narrowed in one direction toward the nozzle part 210, and the step is formed around the central axis of the nozzle part 210 And can be rotationally symmetrical. The tab portion 250 may be aligned with the center axis of the nozzle portion 210 and fixed in position as one end of the tab portion 250 is closely attached to the step of the luer portion 260. Meanwhile, the luer part 260 may be formed of a nonconductive material such as plastic.

The nozzle part 210, the luer part 260, the connector part 240 and the syringe part can be aligned with the central axis of the nozzle part 210, and the inside thereof can communicate with each other. The clip member 310 of the power unit 300 coupled to the outer circumferential surface of the connector unit 240 can be electrically connected to the pin unit 220, the tab unit 250 and the connector unit 240, .

The distance adjusting unit 270 may be configured to finely adjust the position of the nozzle unit 210 with respect to the object to be processed 10 in the vertical direction, and the specific structure thereof is not particularly limited. For example, various motors, gears, or mechanisms having a positional accuracy of several mu m.

Since the nozzle unit 200 according to the embodiment of the present invention is configured as described above, since the coating layer is not formed on the outer circumferential surface of the nozzle unit as in the conventional art, the apparatus can be configured more simply. In addition, since the fin unit 220 serving as an electrode can be protected in the nozzle unit 210, the apparatus can be stably maintained, and even when the use time is increased, Discharge can be performed, electric fields can be uniformly formed, and a minute amount of the solution, for example, the conductive ink can be precisely discharged.

Referring to Figs. 1 and 4, a power unit, a pneumatic unit, a lighting unit, an optical unit and a control unit of the pattern line forming apparatus according to the embodiment of the present invention will be described.

The power unit 300 can be connected to the nozzle unit 200 and is capable of applying power to the nozzle unit 200 for spraying the solution. The power supply unit 300 may be connected to the connector unit 240 of the nozzle unit 200 and the power supplied from the power supply unit 300 may be connected to the pin unit 220 through the connector unit 240, Can be supplied.

The nozzle unit 200 can have a predetermined potential with respect to the processing object 10 by the power source unit 300 and an electric field due to the potential difference can be formed between the nozzle unit 200 and the processing object 10 . The ions present in the solution can be ejected from the nozzle unit 210 by an electric field. The power supply unit 300 can apply a DC power or an AC power to the nozzle unit 200. At this time, when the power supply unit 300 supplies the DC power, electrodes can be connected to the processed matter. When the power unit 300 supplies AC power, for example, a sinusoidal waveform or a pulsed AC power can be applied in a predetermined voltage and frequency range.

The power supply unit 300 can control the discharge amount and the discharge form of the solution by controlling the intensity, frequency, and current amount of the applied power. For example, the ejection form may include a drop form and a spray form. For example, the solution discharged from the nozzle unit 200 can be changed from a droplet shape to a spray shape as the intensity of power applied from the power source unit 300 increases. Further, when the frequency of the power source applied to the power source unit 300 is changed, the amount of the solution discharged varies.

The pneumatic unit 400 may be connected to the nozzle unit 200 and may provide a pneumatic pressure to the nozzle unit 200 to assist spraying of the solution. For example, when the intensity of the air pressure supplied to the nozzle unit 200 is changed, the shape of the meniscus of the solution at the solution discharge port is changed, and the solution discharge amount can be adjusted. For example, as the air pressure increases, the meniscus becomes larger and the volume of the discharged solution becomes larger.

On the other hand, depending on the characteristics of the solution discharged from the nozzle unit 200, the power supplied to the nozzle unit 200 may be very high. In this case, there is a problem of safety, but it may become difficult to precisely control the discharge amount.

Therefore, in the embodiment of the present invention, the pneumatic unit 400 can be used to supply the nozzle unit 200 with a predetermined air pressure. That is, the pneumatic unit 400 can constantly provide pneumatic pressures of a desired size to the nozzle unit 210 and the syringe unit 230 connected thereto, so that the pressure inside them can be controlled to a desired pressure. Since the discharge of the solution can be assisted by the pneumatic pressure, the intensity of the power to be supplied to the nozzle unit 200 can be relatively reduced. From this, the safety of operation can be ensured and the amount of the solution discharged can be precisely controlled.

On the other hand, when the nozzle clogging occurs, the pneumatic unit 400 can pierce the clogged portion by providing a positive pressure to the nozzle portion 210 so that the clogged portion of the nozzle portion 210 passes again. When the solution discharge of the nozzle unit 200 is blocked, the pneumatic unit 400 applies a solid phase material hardened to the cone tip of the nozzle unit 210 in such a manner as to provide a negative pressure to the nozzle unit 200 It can be recovered to the inside of the nozzle unit 210 and dissolved and removed. By appropriately selecting and using the above-described methods, the nozzle clogging can be solved by the pneumatic unit 400.

The illumination unit 510 can be formed to be capable of generating illumination for photographing a pattern line formed on one side of the processing object 10, For example, the lower side of the supporting unit 100, and can supply illumination to the side of the processing object 10. [

The optical unit 520 can be formed so as to be capable of photographing a pattern line formed in the processing object 10 by the solution discharged from the nozzle unit 200. The optical unit 520 is provided on one side of the supporting unit 100, The shape of the line can be accurately photographed without distortion.

The control unit 600 includes a support unit 100, a nozzle unit 200, a power supply unit 300, and a pneumatic unit 400 so that a predetermined pattern line is accurately formed on one side of the processing object 10 , And can be configured to control overall the pattern line forming apparatus according to an embodiment of the present invention. The control unit 600 may include hardware such as an industrial computer and software for process control, and may include a display device and an input / output device for easy control. The control unit 600 need not be in the form of a computer so long as it can properly control the apparatus, and may include various types of interfaces such as PCBs for smooth connection with the apparatus.

Meanwhile, a pattern line forming apparatus according to an embodiment of the present invention may be provided with a laser beam irradiating unit (not shown). The laser beam irradiating unit can irradiate a pattern line formed in the processed product 10 with a laser beam for curing.

FIG. 5 is a photograph of a nozzle unit according to a comparative example of the present invention, FIG. 6 is a photograph of a nozzle unit according to an embodiment of the present invention, and FIG. 7 is a photograph of a pattern line formation result according to an experimental example of the present invention.

5 (a) to 5 (d) show a pattern line forming apparatus according to a comparative example of the present invention by depositing a metal film of a platinum (Pt) material on the outer peripheral surface of a nozzle part of a glass material in a conventional manner, A pattern line is formed by a nozzle portion using a metal film as an electrode, and a state of the nozzle portion is photographed with time.

FIG. 5 (a) shows that the metal film fell off at the nozzle portion when the nozzle portion was used for 10 to 13 hours, and FIG. 5 (b) shows the metal film at the nozzle portion when the nozzle portion was used for 40 to 50 hours. It shows that it has been dropped. 5 (c) shows a state in which the metal film is removed from the nozzle portion after using the nozzle portion for 98 hours to 100 hours. FIG. 5 (d) It shows that the film is missing. As shown in these drawings, in the conventional case (comparative example), it can be seen that the coating film is severely detached as the use time of the nozzle part increases.

6 is a photograph of the state of the nozzle unit after forming a pattern line with the pattern line forming apparatus according to the embodiment of the present invention and using about 300 hours. In the embodiment of the present invention, since the metal film is not coated on the outer circumferential surface of the nozzle portion as shown in FIG. 6, the state can be kept clean even if the use time is increased.

5 and 6, it can be seen that the lifetime of the nozzle unit can be improved as compared with the conventional one, in the pattern line forming apparatus according to the embodiment of the present invention.

FIG. 7 shows a pattern line formed by the pattern line forming apparatus according to an embodiment of the present invention, and the result is shown. 7 (a) to 7 (c), the pattern line forming apparatus according to the embodiment of the present invention is applied to a conventional process line for forming a pattern line with a discharge voltage of about 200 V, Respectively. Each of the pattern lines was formed to have a length of 80 mu m, 100 mu m, and 150 mu m, and the pattern lines were uniformly formed with a width of 2.71 mu m and a height of about 1800 to 2900 angstroms. Thus, it can be seen that a pattern line having a good wiring ability can be formed by using the pattern line forming apparatus according to the embodiment of the present invention.

It should be noted that the above-described embodiments of the present invention are for the purpose of illustrating the present invention and not for the purpose of limitation of the present invention. In addition, it should be noted that the configurations and the methods disclosed in the above embodiments of the present invention may be combined with each other or applied cross-over to form a variety of different forms, and these variations may be regarded as the scope of the present invention. As a result, the present invention may be embodied in various other forms without departing from the scope of the appended claims and equivalents thereof, and various modifications may be made within the scope of the technical idea of the present invention. .

100: support unit 200: nozzle unit
210: nozzle unit 220:
230: neck portion 240: connector portion
250: tab portion 260:
270: distance adjusting unit 300: power supply unit
400: Pneumatic unit 600: Control unit

Claims (13)

An apparatus for discharging a solution using an electrohydraulic phenomenon,
A nozzle unit positioned to face the processed object;
A fin portion disposed inside the nozzle portion;
A luer part to which the nozzle part is mounted on one side;
A connector portion mounted on the other side of the luer portion and connected to the fin portion to supply power;
And a tab portion inserted into the luer portion and aligned with the central axis of the nozzle portion and contacting the inner surface of the luer portion and the inner surface of the connector portion and supporting the fin portion such that the pin portion is aligned with the central axis The pattern line forming apparatus comprising: delete The method according to claim 1,
And a syringe connected to the nozzle unit. The method according to claim 1,
Wherein the pin portion is fixed to the tab portion and is spaced apart from the inner circumferential surface of the nozzle portion. The method according to claim 1,
Wherein the connector portion is mounted on the luer portion on the opposite side of the nozzle portion with respect to the luer portion, and a part of the inner surface is in contact with the tab portion. The method of claim 5,
Wherein the tab portion has one end contacting the inner surface of the luer portion and the other end contacting the inner surface of the connector portion to fix the position. The method of claim 3,
And the syringe portion is mounted to the connector portion. The method of claim 3,
At least one passage is formed in the inner or outer peripheral surface of the tab portion to allow the solution to pass therethrough,
Wherein the passage has one side communicating with the inside of the nozzle portion or the luer portion and the other side communicating with the inside of the connector portion or the syringe portion. The method of claim 8,
At least one hole is formed through the tab portion in a direction crossing the central axis of the nozzle portion,
And the hole communicates with the passage of the tab portion. The method according to claim 1,
Wherein the nozzle portion includes at least one of a glass and a sapphire. The method according to claim 1,
Wherein the fin portion comprises at least one electrically conductive material selected from tungsten, gold, silver and copper,
Wherein the tab portion and the connector portion comprise an electrically conductive material. The method according to claim 1,
Wherein the solution comprises a conductive ink,
Wherein the nozzle portion is formed with a cone tip at an end thereof,
Wherein the cone tip has a path formed therein so that the conductive ink can be discharged by electrohydraulic pressure. The method according to claim 1,
Wherein the fin portion is formed with a tapered tip at an end thereof,
Wherein the tapered tip is located inside a cone tip formed at an end of the nozzle portion.

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