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KR101881779B1 - Filter for ion trap apparatus and designing method thereof - Google Patents

Filter for ion trap apparatus and designing method thereof Download PDF

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Publication number
KR101881779B1
KR101881779B1 KR1020170144292A KR20170144292A KR101881779B1 KR 101881779 B1 KR101881779 B1 KR 101881779B1 KR 1020170144292 A KR1020170144292 A KR 1020170144292A KR 20170144292 A KR20170144292 A KR 20170144292A KR 101881779 B1 KR101881779 B1 KR 101881779B1
Authority
KR
South Korea
Prior art keywords
filter
ion trap
designing method
trap apparatus
designing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020170144292A
Other languages
Korean (ko)
Inventor
권영대
김태현
조동일
이민재
홍석준
Original Assignee
에스케이 텔레콤주식회사
서울대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 에스케이 텔레콤주식회사, 서울대학교 산학협력단 filed Critical 에스케이 텔레콤주식회사
Priority to KR1020170144292A priority Critical patent/KR101881779B1/en
Priority to PCT/KR2018/008315 priority patent/WO2019088403A1/en
Application granted granted Critical
Publication of KR101881779B1 publication Critical patent/KR101881779B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/424—Three-dimensional ion traps, i.e. comprising end-cap and ring electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

본 발명의 실시예들은 종래의 RC 필터를 사용하되, RC 필터에 포함된 커패시터의 커패시턴스 크기에 반비례하는 감소 외에 추가적으로 RF 커플링으로 인해 유발된 서로 반대 방향의 전기장들을 상쇄시킴으로써 이온에 발생하는 미세진동을 억제하여 이온트랩의 집적도를 높일 수 있도록 하는 이온트랩 장치를 위한 필터 및 그 설계방법을 제공한다.Embodiments of the present invention use conventional RC filters to reduce the inverse electric fields induced by RF coupling in addition to the reduction in inverse proportion to the capacitance of the capacitors included in the RC filter, And a method for designing the filter for an ion trap device capable of increasing the degree of integration of the ion trap.

KR1020170144292A 2017-10-31 2017-10-31 Filter for ion trap apparatus and designing method thereof Expired - Fee Related KR101881779B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020170144292A KR101881779B1 (en) 2017-10-31 2017-10-31 Filter for ion trap apparatus and designing method thereof
PCT/KR2018/008315 WO2019088403A1 (en) 2017-10-31 2018-07-24 Filter for ion trap device and designing method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020170144292A KR101881779B1 (en) 2017-10-31 2017-10-31 Filter for ion trap apparatus and designing method thereof

Publications (1)

Publication Number Publication Date
KR101881779B1 true KR101881779B1 (en) 2018-07-25

Family

ID=63058743

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170144292A Expired - Fee Related KR101881779B1 (en) 2017-10-31 2017-10-31 Filter for ion trap apparatus and designing method thereof

Country Status (2)

Country Link
KR (1) KR101881779B1 (en)
WO (1) WO2019088403A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240404820A1 (en) * 2023-06-02 2024-12-05 Infineon Technologies Austria Ag Capacitive Coupling Compensation for Direct Current Electrodes in Ion Traps

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060169882A1 (en) * 2005-02-01 2006-08-03 Stanley Pau Integrated planar ion traps
KR20090083929A (en) * 2006-11-13 2009-08-04 브룩스 오토메이션, 인크. Electrostatic ion trap

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040118344A1 (en) * 2002-12-20 2004-06-24 Lam Research Corporation System and method for controlling plasma with an adjustable coupling to ground circuit
US8450635B2 (en) * 2007-03-30 2013-05-28 Lam Research Corporation Method and apparatus for inducing DC voltage on wafer-facing electrode

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060169882A1 (en) * 2005-02-01 2006-08-03 Stanley Pau Integrated planar ion traps
KR20090083929A (en) * 2006-11-13 2009-08-04 브룩스 오토메이션, 인크. Electrostatic ion trap

Also Published As

Publication number Publication date
WO2019088403A1 (en) 2019-05-09

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