KR101871914B1 - A high power ion beam fraction measuring device - Google Patents

Abstract

An ion beam fraction measuring apparatus is disclosed. The ion beam fraction measuring apparatus includes: a slit-shaped filter unit including a filter body, a slit passing through the filter body in a first direction, and a cooling conduit formed inside the filter body; A beam deflection permanent magnet unit disposed adjacent to the slit-shaped filter unit in the first direction; A beam scanning unit arranged to be spaced apart from the beam deflection permanent magnet in the first direction; A vertical moving mechanism for vertically moving the beam scanning unit in a second direction perpendicular to the first direction; And a control unit for controlling the vertical movement by the vertical movement mechanism and receiving and recording a scanning signal generated from the beam scanning unit.

Description

[0001] The present invention relates to a high power ion beam fraction measuring device,

The present invention relates to an ion beam fraction measuring apparatus, and more particularly, to a high output ion beam fraction measuring apparatus.

The contents described in this section merely provide background information on the present embodiment and do not constitute the prior art.

Boron Neutron Capture Therapy (BNCT) is a neutron capture therapy that kills cancer cells by neutron beam irradiation. In the case of BNCT, a boron-containing medicinal material is administered to a patient to accumulate boron at a site where cancer cells are present, and when the neutron beam is irradiated to the site where the boron is accumulated, the boron compound collected in the cancer cells intensively absorbs the neutron, Secondary radiation is used to kill cancer cells.

Such a neutron capture therapy device includes a proton beam generator, a beam line as a vacuum tube for guiding the proton to the subject to be examined, a collimator for focusing the proton and increasing the directivity of the proton, an electromagnet for controlling the traveling direction of the proton, And a neutron target system for the neutron target system.

The neutron beam can be drawn from the reactor, accelerator. Most of the reactors are thermal neutrons and have a disadvantage in that they have a low treatment depth in addition to harmful radiation exposure problems. Recently, BNCT studies using accelerators have been actively carried out. Especially, it is possible to produce a high-intensity epithermal neutron flux whose treatment depth is 7 ~ 8 cm deeper than 2 ~ 3 cm of thermal neutrons, Linear accelerators are attracting attention.

The ion source is installed at the front of the particle accelerator and serves to supply the accelerator with specific ions that meet the acceleration conditions. The linear particle accelerator is a device that generates high speed and large kinetic energy by accelerating the incident ions using electrostatic or high frequency electric field. It is a physics experiment for exploring the deep structure of matter about atomic nuclei or small particles, And the like. It is necessary to optimize the operating parameters of the ion source by measuring and analyzing the component and charge amount of ions and measuring how efficiently specific ions are drawn out for accelerating. . At this time, ion beam fraction measuring device is used as a core basic device of ion beam analysis.

Conventional ion beam fraction measuring apparatus is composed of a large and complex mass separating electromagnet, a slit and a Faraday cup. By regulating the current of the electromagnet driving power source, the magnetic field is changed to trap the electric charge in the Faraday cup Ion beam current was measured. However, the conventional ion beam deflecting apparatus is not only expensive, but also requires a separate space for installing the apparatus, and it is impossible to change the dimensions after the apparatus is installed, and a one-time characteristic And thus it is not widely used.

As a method for solving such a problem, an apparatus for measuring an ion fraction using a permanent magnet filter is disclosed in Korean Patent Registration No. 10-0716136 (2007.05.02).

However, it is difficult to measure the fraction of a beam having a high output of about 10 Watt / cm 2 or more in the conventional ion fraction measuring apparatus. This is because, in the conventional ion fraction measuring apparatus, most of the energy of the ion beam must be absorbed by the plate-type collimator or the filter having the slit, so that a great amount of heat is generated when the high output beam is irradiated. Therefore, the conventional ion fraction measuring apparatus should be used for beam measurement of only low power, and it is difficult to apply it to high power beam measurement.

Accordingly, a problem to be solved by the present invention is to provide a method and an apparatus for measuring an amount of charge and an amount of each ion contained in an ion beam extracted from an ion source, An output ion beam including a cooling function capable of measuring an ion beam fraction, and an apparatus for measuring a proton fraction in hydrogen ion.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided an apparatus for measuring an ion beam fraction comprising: a filter body; a slit passing through the filter body in a first direction; and a slit- A filter unit; A beam deflection permanent magnet unit disposed adjacent to the slit-shaped filter unit in the first direction; A beam scanning unit arranged to be spaced apart from the beam deflection permanent magnet in the first direction; A vertical moving mechanism for vertically moving the beam scanning unit in a second direction perpendicular to the first direction; And a control unit for controlling the vertical movement by the vertical movement mechanism and receiving and recording a scanning signal generated from the beam scanning unit.

On the other hand, the ion beam fraction measuring apparatus further includes a cooling fluid supply pipe connected to the cooling duct and a cooling fluid circulating device for circulating the cooling fluid into the cooling duct through the cooling fluid supply pipe.

On the other hand, the cooling conduit is a cavity-type conduit in which a part of the plate-shaped body is emptied, and the cooling conduit at least partially surrounds the slit.

On the other hand, the slit has a groove shape extending in a third direction perpendicular to the first direction and the second direction.

The beam deflection permanent magnet unit includes a permanent magnet unit body, a pair of permanent magnets, one side of which is attached to two opposite inner surfaces of the permanent magnet unit body, and a pair of permanent magnets attached to the other side of the pair of permanent magnets, Of the magnetic distribution plate.

The pair of permanent magnets include a first permanent magnet having one side attached to one inner surface of the permanent magnet unit body and a second permanent magnet having one side attached to the inner surface of the body of the permanent magnet unit, Wherein the pair of magnetic distribution plates include a first magnetic distribution plate attached to the other side of the first permanent magnet and a second magnetic distribution plate attached to the other side of the second permanent magnet, The length is longer than the longitudinal length of the first permanent magnet and the longitudinal length of the second magnetic distribution plate is longer than the longitudinal length of the second permanent magnet.

On the other hand, the first magnetic distribution plate and the second magnetic distribution plate are ferromagnetic, and the first permanent magnet is completely surrounded by the first magnetic distribution plate between one surface of the permanent magnet unit body and the first magnetic distribution plate. And the second permanent magnet is completely overlapped by the second magnetic distribution plate between the other surface of the permanent magnet unit body and the second magnetic distribution plate.

The beam scanning unit includes a metal probe, a vertical movement axis, and a metal support connecting the metal probe and the vertical movement axis, wherein the metal support has two ends bent in one direction from a center portion thereof, And are fixed to the two ends of the metal support.

On the other hand, the metal probe is a tungsten wire.

On the other hand, the ion beam fraction measuring apparatus includes a vacuum chamber including a first flange and a second flange formed on a first surface, and a third flange and a fourth flange provided on a second surface perpendicular to the first surface, Wherein the slit-shaped filter unit, the beam deflection permanent magnet unit, the beam scanning unit and the vertical movement mechanism are installed in at least one of a first flange and a second flange of the first surface of the vacuum chamber, And a third flange and a fourth flange on a second side of the vacuum enclosure.

Other specific details of the invention are included in the detailed description and drawings.

According to the exemplary embodiments of the present invention, it is possible to easily measure the state of the ion beam by simply attaching it to an arbitrary position of the ion beam transport path drawn out from the ion source.

In addition, it is possible to easily measure the fraction of the ion beam having a wide energy range from a low power beam to a high power beam.

The effects of the present invention described above are merely illustrative, and the effects of the present invention will be interpreted as including various other effects that can be generated and derived from the organic combination of the technical constructions included in the present invention.

1 is a block diagram of an apparatus for measuring an ion beam fraction according to an embodiment of the present invention.
2 is a graph showing the amount of current by an exemplary vertical position.
3 is a more detailed perspective view of an ion beam fraction measuring apparatus according to an embodiment of the present invention.
4 is a cross-sectional view of a beam deflection permanent magnet unit of an ion beam fraction measuring apparatus according to an embodiment of the present invention.
5 is a perspective cross-sectional view of a portion of a beam scanning unit according to an embodiment of the present invention.
6 is a perspective view illustrating an entire installation of the ion beam fraction measuring apparatus according to an embodiment of the present invention.
7 is a perspective view illustrating another measurement method of ion beam fraction measurement according to an embodiment of the present invention.

Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. It should be noted that, in adding reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are shown in different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

1 is a block diagram of an apparatus for measuring an ion beam fraction according to an embodiment of the present invention.

1, an apparatus for measuring an ion beam fraction according to an embodiment of the present invention includes a slit-shaped filter unit 100, a beam deflection permanent magnet unit 200, a beam scanning unit 300, a vertical movement mechanism 400, And a control unit 500.

The slit-shaped filter unit 100 may be a plate-shaped member including a slit 120 formed in the ion beam traveling direction and a cooling conduit 110 formed at least in a direction perpendicular to the ion beam traveling direction.

In this specification, the term " advancing direction " means a direction (x) parallel to the traveling direction of the ion beam irradiated from the ion source, and the term "vertical direction" means a direction (z) .

The slit 120 may have a vertical slit thickness t_S. An ion beam having a substantially vertical beam thickness t_B can be irradiated to the irradiation surface of the slit-shaped filter unit 100 and an ion beam having a vertical slit thickness t_S from the emission surface of the slit- The ion beam can be emitted through the slit 120.

The cooling conduit 110 may be formed at least in a vertical direction (z) perpendicular to the ion beam traveling direction. The cooling conduit 110 may be a hollow conduit in which a part of the interior of the slit-shaped filter unit 100 formed by the plate-like member is emptied. A cooling fluid such as cooling water can flow into the cooling conduit 110 and the heat generated in the slit type filter unit 100 can be discharged to the outside through the cooling fluid supply pipe 610. [

The ion beam fraction measuring apparatus according to an embodiment of the present invention may further include a cooling fluid circulating device 600 and a cooling fluid supply pipe 610.

The cooling conduit 110 may be connected to the cooling fluid supply pipe 610 and may be connected to the external cooling fluid circulation apparatus 600 through the cooling fluid supply pipe 610. The cooling fluid circulating device 600 can circulate the cooling fluid through the cooling fluid supply pipe 610 into the cooling conduit 110.

The beam deflection permanent magnet unit 200 may be disposed on one side of the slit-shaped filter unit 100 and adjacent to the slit-shaped filter unit 100 in the advancing direction x.

For example, the beam deflection permanent magnet may be disposed adjacent to the exit surface of the slit-shaped filter unit 100, and may be disposed on the slit 120 of the slit-shaped filter unit 100, May be disposed to surround the path.

The beam deflection permanent magnet unit 200 can apply a horizontal magnetic field to the advancing ion beam to induce vertical deflection of the ion beam.

The ion beam can be composed of different ion components and different ion components of the ion beam can be deflected to different degrees as they pass through the beam deflection permanent magnet unit 200. For example, each ion component may have a different mass, charge, or momentum, and the degree of deflection of the ion beam passing through the beam deflection permanent magnet unit 200, depending on the physical or electrical characteristics of each ion component, can do.

The beam scanning unit 300 is disposed apart from the beam deflection permanent magnet unit 200 in the moving direction x.

The beam scanning unit 300 may include a metal probe 310, a vertical movement axis 330 and a metal support 320 connecting the vertical movement axis 330 and the metal probe 310.

A portion of the ion beam passing through the beam deflection permanent magnet unit 200 and deflected differently may be incident on the metal probe 310. The metal probe 310 can generate a scanning signal corresponding to the incident energy of the ion beam incident on the metal probe 310.

For example, the scanning signal of the metal probe 310 may be a current intensity signal. That is, as the ion beam is incident on the metal probe 310, metal ionization can be performed inside the metal probe 310, and the metal probe 310 can be charged by ionization. The charge amount difference may occur between the charged metal probe 310 and the external terminal, for example, the ground terminal of the control unit 500, and the metal probe 310 and the metal support 320, So that a current intensity signal can be generated.

The vertical movement mechanism 400 moves the beam scanning unit 300 in the vertical direction z.

The vertical movement mechanism 400 may include, for example, a linear motor 420 that moves the vertical movement axis 330 in the vertical direction. As the vertical movement axis 330 moves, the metal support 320 and the metal probe 310 connected thereto can be moved in the vertical direction.

The control unit 500 controls the vertical movement of the vertical movement mechanism 400 and can receive and record a scanning signal generated from the beam scanning unit 300, for example, a current intensity signal.

The vertical movement mechanism 400 can move the metal probe 310 in the vertical direction by the control unit 500 and the metal probe 310 can detect the vertical direction z of the ion beam deflected differently in the vertical direction ) Position-specific scanning signals, for example, a current intensity signal for each position.

2 is a graph showing the amount of current by an exemplary vertical position.

2, the ion beam passing through the beam deflection permanent magnet unit 200 can be deflected differently in the vertical direction depending on the ion component. In one embodiment of the present invention, the beam scanning unit 300 can be moved in the vertical direction z by the vertical movement mechanism 400, moving in the vertical direction z and moving the scanning signal, The intensity signal can be probed.

The control unit 500 can record a scanning signal according to the vertical position of the beam scanning unit 300 moved by the vertical movement mechanism 400 and, as illustrated in FIG. 2, Distribution can be derived.

3 is a more detailed perspective view of an ion beam fraction measuring apparatus according to an embodiment of the present invention.

4 is a sectional view of a beam deflection permanent magnet unit 200 of an ion beam fraction measuring apparatus according to an embodiment of the present invention.

5 is a perspective cross-sectional view of a portion of a beam scanning unit 300 according to an embodiment of the present invention.

3, the slit-shaped filter unit 100 of the ion beam fraction measuring apparatus according to an embodiment of the present invention includes a filter body 130 which is a plate member and slits 120 And a cooling conduit 110. The cooling conduit < RTI ID = 0.0 > 110 < / RTI &

 As used herein, the term "plate-like member" may refer to a member having two opposite sides in comparison with other side surfaces, that is, a member having a thin side surface with respect to a relatively large surface. In the illustrated embodiment, the filter body 130 is illustrated as a generally planar shaped plate member. However, the present invention is not limited thereto. The shape of the filter body 130 constituting the slit-shaped filter unit 100 may be different from that of the other side in the ion beam irradiation surface having a relatively large area and another shape For example, a disk or a polygonal plate.

The filter body 130 may be made of a non-magnetic metal, for example, oxygen-free copper.

The filter body 130 may be formed with a predetermined thickness that is greater than the diameter of the cooling conduit 110 so that the cooling conduit 110 may be formed.

The slit 120 may be formed to penetrate the filter body 130 in such a manner that it penetrates the relatively large irradiation surface and the emission surface of the filter body 130, that is, in the advancing direction x of the ion beam. The slit 120 may have a groove shape formed at an intermediate point of a region irradiated with the ion beam on the irradiation surface.

Here, the term "horizontal direction (y)" is used to mean a direction perpendicular to both the "advancing direction (x)" of the ion beam and the "vertical direction (z) " do.

The slits 120 can be arranged in the horizontal direction perpendicular to the traveling direction of the ion beam, whereby the density of the beam passing through the slit 120 can be kept the same.

The cooling conduit 110 may be formed at the periphery of the slit 120 and may at least partially surround the slit 120. The cooling conduit 110 may be a conduit in which a part of the inside of the filter body 130 formed by the plate-shaped member is emptied. Cooling fluid, for example, cooling water may flow into the cooling conduit 110, and heat generated in the slit-shaped filter unit 100 may be discharged to the outside through the cooling fluid.

In one embodiment of the present invention, the slit-shaped filter unit 100 can be subjected to forced cooling using a cooling fluid, thereby performing partial shielding or filtering of a high-output ion beam without abrupt temperature rise. Thus, an apparatus for measuring an ion fraction for a high-power ion beam according to an embodiment of the present invention can be realized.

Referring to FIGS. 3 and 4, the beam deflection permanent magnet unit 200 may be disposed adjacent to the slit-shaped filter unit 100 in the direction of advance of the beam.

For example, the beam deflection permanent magnet unit 200 can be disposed adjacent to and adjacent to the exit surface of the slit-shaped filter unit 100, and passes through the slit 120 of the slit-shaped filter unit 100, And can be disposed so as to surround the path of the ion beam emitted through the ion beam.

In one embodiment of the present invention, the beam deflection permanent magnet unit 200 includes permanent magnet unit bodies 210, 212, and 214, a pair of permanent magnets 210, 212, and 214, one side of which is attached to two facing inner surfaces of the permanent magnet unit body, (220, 222) and a pair of magnetic distribution plates (230, 232) respectively attached to the other side of the pair of permanent magnets.

The permanent magnet unit body includes, for example, a first magnet support body 210 and a second magnet support body 212 extending in parallel in one direction, a first end of the first magnet support body 210, And a third magnet support body 214 connecting one end of the body 212. [

The permanent magnet unit body may further include a magnet support 216 extending parallel to a first direction in which the first magnet support body 210 and the second magnet support body 212 extend, (216) may be connected to the third magnet support body (214).

At least one of the first magnet support body 210, the second magnet support body 212 and the third magnet support body 214 may be formed of a ferromagnetic material, for example, soft iron.

The pair of permanent magnets includes a first permanent magnet 220 having one side attached to the first magnet supporting body 210 and a second permanent magnet 222 having one side attached to the second magnet supporting body 212 .

The pair of magnetic distribution plates includes a first magnetic distribution plate 230 attached to the other side of the first permanent magnet 220 and a second magnetic distribution plate 232 attached to the other side of the second permanent magnet 222 can do.

The first magnetic distribution plate 230 and the second magnetic distribution plate 232 may be made of a ferromagnetic material, for example, soft iron.

The longitudinal lengths of the first magnetic distribution plate 230 and the second magnetic distribution plate 232 are equal to the longitudinal lengths of the first permanent magnet 220 and the second permanent magnet 222, Can be longer. The first permanent magnet 220 may be completely overlapped by the first magnetic distribution plate 230 between the first magnetic distribution plate 230 and the first magnet support body 210, The first magnetic distribution plate 222 may be completely overlapped by the second magnetic distribution plate 232 between the second magnetic distribution plate 232 and the second magnet support body 212.

Generally, a magnetic field generally parallel to the normal direction will be formed on the facing surfaces of two plate-like permanent magnets between the two plate-like permanent magnets facing each other at a distance. However, in particular, the magnetic field of the corner portion of the two-plate permanent magnets may show a considerably distorted or curved aspect toward the outside. That is, the magnetic field at the center portion of the two plate-like permanent magnets facing each other can be relatively uniform, but the magnetic field at the corner portion can be relatively non-uniform. This non-uniformity of the magnetic field may cause the magnetic field to affect the outside, and may also cause the deviation of the deflection of the ion beam passing through the beam deflection permanent magnet unit 200 to become an error in the measurement of the ion beam fraction.

The first magnetic distribution plate 230 and the second magnetic distribution plate 232 may be formed of a ferromagnetic material between the first permanent magnet 220 and the second permanent magnet 222, The magnetic field radiated from the first permanent magnet 220 and the second permanent magnet 222 can be uniformly radiated through the first magnetic distribution plate 230 and the second magnetic distribution plate 232. [

In the embodiment of the present invention, the first magnetic distribution plate 230 and the second magnetic distribution plate 232 completely overlap the first permanent magnet 220 and the second permanent magnet 222, respectively, The imbalance of the magnetic field generated at the edges of the first permanent magnet 220 and the second permanent magnet 222 is solved to prevent the magnetic field from being lost and a uniform magnetic field can be formed.

3 and 5, the beam scanning unit 300 is disposed on one side of the beam-deflecting permanent magnet unit 200. The beam-

In one embodiment of the present invention, the beam scanning unit 300 includes a vertical translation axis 330, a first support fixture block 332, a second support fixture block 334, a metal support 320, Block 312, a second probe fixation block 314, and a metal probe 310.

The vertical movement shaft 330 can be connected to the vertical movement mechanism 400 and can be moved in the vertical direction by the vertical movement mechanism 400. The vertical movement axis 330 may be made of a non-magnetic metal, for example, stainless steel which is a non-magnetic material.

The metal support 320 may be composed of a resilient member which is curved in the one direction from the central portion and curved in a substantially U-shaped, V-shape. For example, the metal support 320 may be a conductive metal having heat resistance, oxidation resistance, and resilience, and may be made of, for example, Inconel.

The curved central head of the metal support 320 may be positioned between the first support fixture block 332 and the second support fixture block 334.

The first support block fixing block 332 can be coupled to the second support block fixing block 334 and the center head of the metal support 320 disposed therebetween can be firmly fixed.

The first support block fixing block 332 may be connected to the vertical movement axis 330. As the vertical movement axis 330 moves, the metal support 320 and the metal probe 310 connected thereto can be moved in the vertical direction.

A first probe fixing block 312 and a second probe fixing block 314 may be mounted on the two ends of the metal support 320, respectively.

The first probe fixing block 312 and the second probe fixing block 314 can fix the metal probe 310 disposed therebetween.

In one embodiment of the present invention, the metal probe 310 may be a metal wire extending in one direction, for example, a tungsten wire.

Here, the metal probe 310 will extend in the " horizontal direction y "and the" horizontal direction " It will be understood in one direction.

A predetermined tension is exerted on the metal probe 310 in a state where the metal probe 310 as a metal wire is fixed to the metal support 320 by the first probe fixing block 312 and the second probe fixing block 314 . For example, the metal probe 310, which is taut in a state in which the metal support 320 is slightly tilted, can be fixed to the first probe fixing block 312 and the second probe fixing block 314, A predetermined tension may be exerted on the elastic member 310.

When the ion beam fraction measuring apparatus according to an embodiment of the present invention is operated, the metal support 320 and the metal probe 310 can be heated by the continuous ion beam collision. Whereby the metal support 320 and the metal probe 310 are expected to thermally expand. If the metal probe 310, which is a metal wire, is thermally expanded and its length is increased, the loosened metal probe 310 may be bent in the gravitational direction. In this case, the metal probe 310 may be exposed to the ion beam incident at its lower position rather than the intended vertical position point, and the measurement reliability of the equipment may be lowered. However, according to one embodiment of the present invention, the metal support 320, which is an active metal, can also be thermally expanded and its length can be increased, so that the elasticity or tension applied to the metal probe 310 can be maintained have. That is, the metal probe 310 can be aligned to the intended vertical position even in the thermal expansion of the metal probe 310, and measurement reliability of the ion beam fraction measuring apparatus according to an embodiment of the present invention can be assured. Particularly, this effect will be more advantageous in a high output ion beam fraction measuring apparatus which is exposed to a high temperature environment.

6 is a perspective view illustrating an entire installation of the ion beam fraction measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 6, the apparatus for measuring an ion beam fraction according to an embodiment of the present invention may further include a vacuum chamber 700 installed on an ion beam movement path.

The vacuum enclosure 700 includes a first flange 712 and a second flange 714 formed on a first surface 710 and a third flange 714 formed on a second surface 720 perpendicular to the first surface 710. [ A second flange 722 and a fourth flange 724.

In the illustrated embodiment, although the vacuum chamber 700 is shown as partially open, in operation, the vacuum chamber 700 will be sealed by a flange lid (not shown) and other beam transport elements, Will remain.

In one embodiment of the present invention, the vertical movement mechanism 400 may be installed on the first flange 712.

The vertical movement mechanism 400 may be connected to the vertical movement axis 330 of the beam scanning unit 300 and may reciprocate the vertical movement axis 330 in the vertical direction.

The vertical movement mechanism 400 includes a linear motor 420, a lower connection flange 412 fixed to the linear motor 420 and coupled to the first flange 712, A first insulating flange 414 coupled to the upper connecting flange 422, a second insulating flange 416 coupled onto the first insulating flange 414, And a corrugated pipe 410 disposed between the lower connection flange 412 and the first insulation flange 414.

In one embodiment of the present invention, the vertical movement axis 330 can be fixed to the second insulating flange 416. The upper connecting flange 422 and the first insulating flange 414 are engaged and the first insulating flange 414 and the second insulating flange 416 are engaged so that the upper connecting flange 422 When linearly moving, the vertical movement axis 330 fixed to the second insulating flange 416 can be moved together. In addition, when linearly moving the vertical movement axis 330, the bellows pipe 410 can be extended or contracted, and the vacuum state inside the vacuum chamber 700 can be maintained.

The connection terminal 306 may be formed at one end of the vertical movement shaft 330 exposed to the outside of the second insulation flange 416 and the control unit 500 may be connected to the connection terminal 306 The scanning signal generated in the beam scanning unit 300 can be received. However, the present invention is not limited thereto, and the control unit 500 may supply a scanning signal generated in the beam scanning unit 300, for example, a current intensity signal, through a separate conductive line passing through the vacuum chamber 700 .

In one embodiment of the present invention, the slit-shaped filter unit 100 and the beam-deflecting permanent magnet unit 200 may be disposed within the vacuum chamber 700 through the second flange 714.

The filter and magnet support flange 612 can be coupled to the second flange 714. [ The cooling fluid supply pipe 610 and the magnet support 216 of the beam deflection permanent magnet unit 200 may be secured to the filter and the magnet support flange 612.

The cooling fluid supply pipe 610 may be exposed to the outside of the vacuum chamber 700 through the filter and the magnet support flange 612 and the exposed cooling fluid supply pipe 610 may be connected to the external cooling fluid circulator 600 (Not shown).

The cooling fluid supply pipe 610 may be, for example, a rigid metal conduit that is non-magnetic. The slit-shaped filter unit 100 can maintain its position inside the vacuum chamber 700 by a cooling fluid supply pipe 610 which is a rigid metal conduit without a separate support member.

7 is a perspective view illustrating another measurement method of ion beam fraction measurement according to an embodiment of the present invention.

Referring to FIG. 7, an apparatus for measuring an ion beam fraction according to an embodiment of the present invention includes a first flange 712 on a first surface 710 of a vacuum chamber 700, May be installed in the third flange 722 and the fourth flange 724 on the second side 720 of the vacuum chamber 700 rather than the flange 714.

Thereby, the ion beam can be deflected in the horizontal direction perpendicular to the traveling direction of the ion beam, and the scanning signal for each position of the deflected ion beam can be measured.

That is, according to the embodiments of the present invention, the fractions of the ion beam can be easily measured in the vertical direction and the horizontal direction in the two schemes shown in FIGS.

The foregoing description is merely illustrative of the technical idea of the present embodiment, and various modifications and changes may be made to those skilled in the art without departing from the essential characteristics of the embodiments. Therefore, the present embodiments are to be construed as illustrative rather than restrictive, and the scope of the technical idea of the present embodiment is not limited by these embodiments. The scope of protection of the present embodiment should be construed according to the following claims, and all technical ideas within the scope of equivalents thereof should be construed as being included in the scope of the present invention.

100: slit type filter unit 110: cooling conduit
120: slit 200: beam deflection permanent magnet unit
300: beam scanning unit 310: metal probe
320: metal support 400: vertical movement mechanism
500: controller 600: cooling fluid circulator

Claims (10)

A slit-shaped filter unit including a filter body, a slit passing through the filter body in a first direction, and a cooling conduit formed inside the filter body;
A beam deflection permanent magnet unit disposed adjacent to the slit-shaped filter unit in the first direction;
And a metal support which is spaced apart from the beam deflection permanent magnet in the first direction, the metal support including a metal probe, a vertical movement axis, and a metal support connecting the metal probe and the vertical movement axis, Wherein the metal probe is fixed in a tensioned state at the two ends of the metal support;
A vertical moving mechanism for vertically moving the beam scanning unit in a second direction perpendicular to the first direction;
A control unit for controlling the vertical movement by the vertical movement mechanism and receiving and recording a scanning signal generated from the beam scanning unit; And
A cooling fluid supply pipe connected to the cooling duct and a cooling fluid circulating device for circulating the cooling fluid into the cooling duct through the cooling fluid supply pipe;
/ RTI >
Ion beam fraction measuring device. delete 2. The apparatus of claim 1 wherein the cooling conduit is a cavity-type conduit in which a portion of the filter body is emptied, the cooling conduit at least partially surrounding the slit,
Ion beam fraction measuring device. The slit of claim 1, wherein the slit has a groove shape extending in a third direction perpendicular to the first direction and the second direction,
Ion beam fraction measuring device. The beam deflection permanent magnet unit according to claim 1, wherein the beam deflection permanent magnet unit comprises a permanent magnet unit body, a pair of permanent magnets, one side of which is attached to each of the two inner surfaces of the permanent magnet unit body facing each other, Comprising a pair of magnetic distribution plates to be attached,
Ion beam fraction measuring device. [6] The apparatus of claim 5, wherein the pair of permanent magnets includes a first permanent magnet having one side attached to one inner surface of the permanent magnet unit body and a second permanent magnet having one side attached to the inner surface of the body of the permanent magnet unit And the pair of magnetic distribution plates include a first magnetic distribution plate attached to the other side of the first permanent magnet and a second magnetic distribution plate attached to the other side of the second permanent magnet,
Wherein the second directional length of the first magnetic distribution plate is longer than the second directional length of the first permanent magnet and the second directional length of the second magnetic distribution plate is longer than the second directional length of the second permanent magnet Longer than the length,
Ion beam fraction measuring device. 7. The magnetic disk apparatus according to claim 6, wherein the first magnetic distribution plate and the second magnetic distribution plate are ferromagnetic, and the first permanent magnet is disposed between the first magnetic distribution plate and one surface of the permanent magnet unit body, Wherein the second permanent magnet is completely overlapped by the second magnetic distribution plate between the other surface of the permanent magnet unit body and the second magnetic distribution plate,
Ion beam fraction measuring device. delete The method of claim 1, wherein the metal probe is a tungsten wire.
Ion beam fraction measuring device. 3. The apparatus of claim 1, further comprising a vacuum enclosure comprising a first flange and a second flange formed on a first side and a third flange and a fourth flange on a second side perpendicular to the first side, Wherein the slit-shaped filter unit, the beam deflection permanent magnet unit, the beam scanning unit and the vertical movement mechanism are installed on at least one of the first flange and the second flange of the first surface of the vacuum chamber, A third flange of the face and a fourth flange of the flange,
Ion beam fraction measuring device.

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