KR101808419B1 - Apparatus of exposure for scan type using LED light source having cooling parts and optical partition wall - Google Patents

Abstract

A scan type exposure apparatus using a LED light source including a cooling unit and an optical partition wall for preventing deformation of a component and preventing a decrease in luminous efficiency of the LED light source and for making the distribution of luminous intensity emitted by the LED light source constant. The apparatus includes an optical module array in which a plurality of optical module units each including a plurality of LED light sources mounted on a printed circuit board and an optical partition wall in which each of the plurality of LED light sources is located at the center and the LED light sources are arranged in a staggered arrangement, Cooling cooling unit for cooling the LED light source and the printed circuit board in contact with the printed circuit board and a first flow path communicating with the outside of the optical module array and connected to the space d of the optical module units and air- .

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a scanning type exposure apparatus using an LED light source including a cooling unit and an optical barrier,

The present invention relates to a scan type exposure apparatus, and more particularly, to a scan type exposure apparatus which uses a cooling unit to heat heat emitted from an LED light source and light emitted from an LED light source, And a cooling system for cooling the substrate.

The scan type exposure apparatus using an LED light source includes a LED light source and a structure for making parallel light in accordance with the purpose of exposure and a parallel light source transferred from a light source module composed of an optical system including a lens, The parallel light is irradiated onto the mask at the upper part of the mask located at the upper end on the possible flat stage so that the pattern of the mask is directly transferred to the substrate. The scan exposure is a method of exposing an optical module or a stage on which a mask and an exposed plate are moved in a relatively opposite direction to increase the area of the exposed plate on the substrate with an increase in time. Halogen lamps are mainly used as a light source for scan exposure, but their life spans are short and their power consumption is high. Recently, semi-permanent LEDs with high environmental efficiency and energy efficiency have been adopted as light sources.

Referring to FIG. 1, a conventional scan exposure apparatus forms an optical barrier 104 to prevent light generated from each LED light source 102 from being interfered with by another LED light source 102. The optical barrier 104 has an equilateral triangular structure, a rhombus structure, a regular hexagonal structure, and the like. The triangular structures of the optical barrier ribs 104 are aligned so as to arrange the LED light sources 102 in a zigzag manner in a plan view. Each LED light source 102 is located at the center of the corresponding optical barrier 104. If there is no optical barrier 104, the maximum area of light available for actual scan exposure is the area of the circle C. When the optical barrier rib 104 is present, the light used for the scan exposure is limited to the inner region (a) of the optical barrier 104 and the light traveling to the outer region (b) And blocked to prevent interference with the light source 102. The optical module including the optical partition 104 is fixed to the fixing portion 106.

2, the conventional scan exposure apparatus applies a water cooling block 112 to cool the heat emitted from the LED light source 102 mounted on the metal substrate 108. However, in the conventional device, even if the heat is not sufficiently transferred by the water-cooling block 112 or heat emitted from the LED light source is sufficiently transmitted to the water-cooling block, The cooling is not properly performed due to the structural problem that the heat generated from the lens can not be directly emitted. If the cooling is not sufficient, the heat modifies components such as the plastic lens 110, and the heat accumulated near the LED light source 102 lowers the efficiency of the LED light source 102. [ In addition, the LED light source 102 has a non-uniform temperature distribution due to accumulated heat, and the LED light source 102 exhibits a non-uniform luminance distribution.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an LED light source that includes a cooling unit and an optical partition wall for preventing deformation of components and reducing the luminous efficiency of the LED light source, Type exposure apparatus.

In order to achieve the above object, according to one aspect of the present invention, there is provided a scan type exposure apparatus using an LED light source including a cooling unit and an optical barrier, comprising: a plurality of LED light sources mounted on a printed circuit board; Wherein the LED light source and the printed circuit board are cooled by water cooling-type cooling in which the LED light source and the printed circuit board are cooled in contact with the printed circuit board, the optical module array including a plurality of optical module units each including an optical partition wall for arranging the LED light sources in a staggered arrangement, And a first flow path communicating with the outside of the optical module array, connected to the space (d) of the optical module units, and air-cooled by the gas.

In the apparatus of the present invention, the optical module array may be one in which any one of the optical barrier ribs selected from among an equilateral triangle, a square (rhombus) or a regular hexagon is aligned and arranged. The first flow path is preferably forcibly circulating the gas. The first flow path may be a closed flow path or a part thereof may be opened. The first flow path passes through the water-cooled cooling part, and a second flow path for flowing the gas into the space d may be branched. The gas introduced from the second flow path joins the first flow path across the LED light source, or joins the first flow path through the space (d).

In the preferred apparatus of the present invention, the second flow path may include a first exhaust pipe for discharging the gas in the space (d) to the outside. The first flow path may be a third flow path through which the gas flows into the space (d), and the second exhaust pipe of the third flow path may be connected to the exhaust path. An exhaust fan may be installed on at least one end of the exhaust passage. The optical module units may be provided with fans for performing air-cooling on both sides of the set in at least two sets.

According to the cooling unit of the scan type exposure apparatus using the LED light source including the cooling unit and the optical partition wall of the present invention, the air cooling type cooling unit is added to the existing water cooling type cooling unit, And the distribution of luminous intensity emitted by the LED light source is made constant.

1 is a view for explaining an optical barrier applied to a conventional scan exposure apparatus.
2 is a cross-sectional view illustrating a process of cooling a conventional scan exposure apparatus.
FIGS. 3 to 5 are plan views for explaining the first to third optical module arrays applied to the scanning type exposure apparatus using the LED light source according to the present invention.
6 is a cross-sectional view illustrating an example of a process of cooling the scan exposure apparatus according to the present invention.
7 is a cross-sectional view for explaining another example of a process of cooling the scan exposure apparatus according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments described below can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. The embodiments of the present invention are provided to enable those skilled in the art to more fully understand the present invention.

The embodiment of the present invention is characterized in that an air cooling type cooling unit is added to an existing water cooling type cooling unit to prevent deformation of components and to reduce the luminous efficiency of the LED light source, . To this end, the air-cooling type cooling unit added to the water-cooled cooling unit in the scan exposure apparatus will be described in detail, and the operation of the air-cooling type cooling unit in the scan exposure apparatus will be described in detail. The embodiments of the present invention will be described mainly with respect to a scan exposure apparatus in which an optical module unit to which a general optical lens including a plastic lens such as a Fresnel lens is applied constitutes an array. That is, the air-cooled cooling unit applied to the apparatus will be described in detail after the optical module array to which the cooling unit of the present invention is applied.

<Optical module array>

There are various methods for optimizing the arrangement of the optical module units 10 in order to increase the light efficiency of the scan exposure apparatus. FIGS. 3 to 5 are plan views for explaining the first to third optical module arrays 10a, 10b, and 10c applied to the exposure apparatus using the LED light source according to the embodiment of the present invention. Here, the first to third optical module arrays 10a, 10b, and 10c each have an LED light source 12 placed at the center of a regular triangular structure, a square (rhombus) structure, and a regular hexagonal structure. The first to third optical module arrays 10a, 10b, and 10c are fixed to the optical module fixing portion 20, respectively. Accordingly, a detailed description of the duplicate description will be omitted.

Referring to Figs. 3 to 5, the first to third optical module arrays 10a, 10b, and 10c have n columns (n is a positive integer). The first optical module array 10a has a regular triangular partition wall 22, the second optical module array 10b has a square partition wall 23 and the third optical module array 10c has a hexagonal partition wall 24, Respectively. The process of improving the light efficiency in the first to third optical module arrays 10a, 10b, and 10c is substantially the same. The optical barrier ribs 22, 23, 24 arrange the LED light sources located in the center of each of the optical barrier ribs 22, 23, 24 in a zigzag manner. The light used for the scan exposure is limited to the area inside the optical barrier ribs 22, 23 and 24 and the light traveling to the area outside the optical barrier ribs 22, 23 and 24 Is interrupted to prevent interference with the neighboring LED light sources 12.

For example, the optical barrier ribs 22 having a regular triangle structure are formed by the n columns, and each row is formed by a plurality of equilateral triangles of LED light sources 12 corresponding to the central portion and having no margins deviating from each other. Structure optical module. Here, when scanning is performed in the scan direction, the optical power of the portion passing through the LED light source 12 is relatively strong (S). On the other hand, the light power passing through the space between the LED light sources 12 is relatively weak (W; weak). At this time, the first column and the second column mutually reinforce the optical power. That is, with respect to the scanning direction, the stronger portion of the first row is aligned with the weaker portion of the second row, and the weaker portion of the first row is aligned with the stronger portion of the second row. In this manner, the complementary relationship between the optical powers is referred to as a complementary relationship.

Since the first to third optical module arrays 10a, 10b, and 10c according to the embodiment of the present invention are in a complementary relationship, the optical power of the scan exposure is uniform over the whole of the object to be exposed. In the conventional optical module having one row, the strong part S and the weak part W are fixed so that the optical power is inhomogeneous. However, the embodiment of the present invention solves this problem by using the complementary relation. By using the complementary relationship more efficiently, the homogeneity of the optical power transmitted to the object can be further enhanced. In other words, if the optical module units are arranged in n rows, the exposure speed is increased and the exposure efficiency is increased.

On the other hand, the n columns constituting the first to third optical module arrays 10a, 10b and 10c are two adjacent columns, for example, one row and two columns. , (n-1), and n columns. 23 and 24 are not aligned with the direction in which the linear axes of the partitions 22, 23 and 24 are scanned by the LED light source 12 as shown in the figure, It is possible to eliminate the influence of the direction of the axis of rotation. If the direction of the linear axis coincides with the scanning direction, a shadow is left on a subject (for example, a photomask) where exposure occurs. Since the sides of the optical barrier ribs 22, 23, and 24 according to the embodiment of the present invention do not have a portion that coincides with the direction of the linear axis, no shadow is left on the subject.

&Lt; Cooling section of optical module array >

6 is a cross-sectional view for explaining an example of a process of cooling a scan exposure apparatus according to an embodiment of the present invention. At this time, the first to third optical module arrays are all applied to the scan exposure apparatus, and the arrays are denoted by the optical module unit 10 for convenience of explanation. Accordingly, the same reference numerals will not be described in detail.

According to Fig. 6, the printed optical module unit 10 of the arrayed optical module unit 10 is preferably a metal substrate, and is accommodated in a case 33 containing the remainder of the exposed surface. The printed circuit board 11 is cooled by the fluid flowing in contact with the water-cooled cooling unit 30. [ In the embodiment of the present invention, in addition to the water-cooled cooling unit 30, an air-cooled cooling unit 35 is added. The air-cooled first cooling section 35 is cooled by the circulation of gas and is located outside the water-cooled cooling section 30 with respect to the optical module unit 10. The first air cooling type cooling section 35 includes a first flow path 31 through which the gas flows through the optical module unit 10 and a second flow path 31 branched from the first flow path 31, And a second flow path 32 passing through the first flow path 11.

It is preferable that the first flow path 31 circulates the gas forcibly, and it is preferable to restrict the flow of the gas to the first flow path 31 as shown in the figure. A part of the first flow path 31 may be opened so that the gas can be discharged to the outside through the optical module unit 10 without circulating through the first flow path 31. [ The second flow path 32 injects the gas branched from the first flow path 31 into the space d between the printed circuit board 11, the optical barrier 13 and the lens 14. Here, the optical barrier ribs 13 collectively refer to the barrier ribs 22, 23, and 24 described with reference to FIGS. The injected gas may merge into the first flow path 31 again through the LED light source 12 or through the space d to be merged with the first flow path 31 at f2.

The second flow path 32 is divided into a power supply pipe 32a for supplying the gas of the first flow path 31 to the space d and a first exhaust pipe 32b for discharging the gas of the space d to the outside. The second flow path 32 can effectively cool the LED light source 12 having a relatively large heating value. Specifically, the second flow path 32 flows into the space d via the water-cooled cooling part 30, so that the gas is further cooled than the first flow path 31. In particular, the flow f1 across the LED light source 12 can further increase the cooling efficiency of the LED light source 12. The second flow path 32 prevents heat from accumulating near the LED light source 12 in the flows f1 and f2. The second flow path 32 can cool the optical module unit 10 including the lens 14 together with the LED light source 12 and the printed circuit board 11 more effectively.

In addition, at least two optical module units 10 may be set as one set, and fans 36 and 37 for performing air cooling on both sides of the set may be provided. For example, on one side of the set, there is a supply fan 36 for supplying gas, and on the other side is a suction fan 37 for sucking the gas. Since the supply and suction are relative to each other, they can be suitably modified according to the set of the present invention. The fans 36 and 37 on both sides of the set can more reliably cool the vicinity of the LED light source 12, which has a particularly large heat generation, and can eliminate accumulation of heat.

The first cooling portion 35 of the embodiment of the present invention causes the flow of gas in the space d surrounded by the optical partition wall 13 so that the heat emitted from the LED light source 12 is absorbed by the water cooling cooling portion 30 sufficiently . As a result, the cooling efficiency by the water-cooled cooling unit 30 is increased. As described above, the air-cooling type cooling unit 35 serves to further improve the cooling effect. Since the scan exposure apparatus of the present invention sufficiently cools the heat emitted from the LED light source 12, it is possible to prevent the components such as the lens 14 from being deformed by the heat. Heat is not accumulated in the vicinity of the LED light source 12, so that light radiated without deteriorating the luminous efficiency exhibits a uniform luminous intensity distribution.

7 is a cross-sectional view for explaining another example of a process of cooling a scan exposure apparatus according to an embodiment of the present invention. At this time, the first to third optical module arrays are all applied to the scan exposure apparatus, and the arrays are denoted by the optical module unit 10 for convenience of explanation. The air-cooled second cooling section 40 of the other example is the same as the air-cooled first cooling section 35 of FIG. 6 except that the third flow path 38 and the exhaust path 39 are different. Accordingly, the same reference numerals will not be described in detail.

7, the air-cooled second cooling section 40 is connected to the exhaust passage 39 by the second exhaust pipe 32c in which the first exhaust pipe 32b of the air-cooling type first cooling section 40 is extended. That is, the gas injected into the space (d) is discharged to the outside through the second exhaust pipe (32c) and the exhaust passage (39). In some cases, an exhaust fan 41 is provided at one end of the exhaust passage 39, so that exhaust of the gas can be smoothly performed. The air-cooled second cooling section 40 is capable of regulating the flow of the exhausted gas, thereby making it possible to appropriately flow the gas in the space d.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but many variations and modifications may be made without departing from the spirit and scope of the invention. It is possible.

10; An optical module unit 11; Printed circuit board
12; LED light source 20; The optical module fixing section
13, 22, 23, 24; septum
30; Cooling water cooling unit
31, 32, 38; The first to third euros
33; case
35, 40; The air-cooled first and second cooling units
36; Supply fan 37; Suction fan
41; Exhaust fan

Claims (10)

A plurality of LED light sources respectively mounted on the printed circuit board; And
An optical module array including a plurality of optical module units each including an optical barrier disposed at the center of each of the plurality of LED light sources and arranged to stagger the LED light sources,
A cooling unit for cooling the LED light source and the printed circuit board in contact with the printed circuit board; And
And a first flow path communicating with the outside of the optical module array, connected to the space (d) of the optical module units, and air-cooled by the gas,
Wherein the first flow path is communicated with the space (d) through the water-cooled cooling part and the printed circuit board, and a second flow path for flowing the gas into the space (d) is branched. A scanning type exposure apparatus using an LED light source including an optical barrier rib. 2. The optical module according to claim 1, wherein the optical module array is configured such that any one of the optical barrier ribs selected from among a regular triangle, square (rhombus) An exposure apparatus using a scanning method. 2. The exposure apparatus of claim 1, wherein the first flow path forcibly circulates the gas, and an optical partition wall. The apparatus of claim 1, wherein the first flow path is a closed flow path or a part of the flow path is opened. delete 2. The cooling device according to claim 1, wherein the gas introduced from the second flow path joins the first flow path across the LED light source, or joins the first flow path through the space (d) And an optical barrier rib. 2. The apparatus according to claim 1, wherein the second flow path includes a first exhaust pipe for discharging the gas in the space (d) to the outside. . A plurality of LED light sources respectively mounted on the printed circuit board; And
An optical module array including a plurality of optical module units each including an optical barrier disposed at the center of each of the plurality of LED light sources and arranged to stagger the LED light sources,
A cooling unit for cooling the LED light source and the printed circuit board in contact with the printed circuit board; And
And a first flow path communicating with the outside of the optical module array, connected to the space (d) of the optical module units, and air-cooled by the gas,
Wherein the first flow path communicates with the space d through the water cooling type cooling unit and the printed circuit board and a third flow path through which the gas flows into the space d is branched, And the second exhaust pipe is connected to an exhaust passage. The exposure apparatus of claim 1, wherein the second exhaust pipe is connected to an exhaust passage. The exposure apparatus of claim 8, wherein an exhaust fan is installed on at least one end of the exhaust passage. 9. The optical module unit according to any one of claims 1 to 8, wherein the optical module units are provided with fans for performing air-cooling on both sides of at least two sets of the optical module units, A scan type exposure apparatus using an LED light source.

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