KR101794875B1 - Inspection apparatus for transparent plate, and inspection system including the same - Google Patents

Abstract

[Problem to be solved]
An object of the present invention is to provide a transparent plate inspection apparatus capable of inspecting a transparent plate in a state in which it is difficult for foreign matter to adhere to the transparent plate and performing accurate inspection.
[Solution]
The present invention relates to a transparent plate inspection apparatus for inspecting a transparent plate, comprising: a housing having an inlet and an outlet for the transparent plate; a conveying mechanism for conveying the transparent plate from the inlet to the exit, An inspection unit for inspecting the transparent plate to be transported, and a foreign substance adhesion preventing member for preventing foreign substances from adhering to the transparent plate in the interior of the housing. The foreign substance adhering blocking mechanism may have a pressing mechanism for increasing the internal pressure of the housing with respect to the external air pressure. The pressurizing mechanism may have a feeding mechanism for sending the air outside the housing to the inside of the housing and a filter for blocking the entry of foreign matter contained in the air sent by the feeding mechanism into the housing. The pressing mechanism may be provided on the upper portion of the housing.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a transparent plate inspection apparatus and a transparent plate cleaning inspection system,

The present invention relates to a transparent plate inspection apparatus and a transparent plate cleaning inspection system.

BACKGROUND ART [0002] Glass substrates have been used in mobile phones and smart phones. The glass substrate is manufactured by a manufacturing apparatus for a glass substrate. When a glass substrate is manufactured, glass powder or the like generated by cutting may adhere to the surface of the glass substrate. Further, there is a fear that dust or the like may adhere to the glass substrate even during transportation (transportation) of the glass substrate. It is necessary to clean the surface of the glass substrate in order to remove the glass powder, dust and the like. As a device for cleaning the surface of such a glass substrate, there has been proposed a cleaning device which wipes a contamination on the entire upper surface of a transparent plate with a cloth containing an alcohol by mounting a transparent plate on a clean cloth spread on a belt conveyor Patent Application Publication No. 102698988). The glass substrate thus cleaned may be inspected by an inspection apparatus to confirm that there is no scratch or flaw on the surface and no foreign matter adheres to the surface.

[Patent Document 1] Chinese Patent Application Publication No. 102698988

However, there is a possibility that foreign matter adheres to the glass substrate when the glass substrate is transported to the inspection apparatus after cleaning. In addition, since the transport mechanism (mechanism) of the glass substrate, the inspection mechanism and the like are operated in the inspection apparatus, the members used in these mechanisms are rubbed with each other, so that very minute foreign substances are adhered to the glass substrate inside the inspection apparatus There is a possibility. In such a case, it is determined that the glass substrate is determined to be defective only by the foreign matter adhered to the glass substrate, which may increase the defective product rate.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a transparent plate inspection apparatus and a transparent plate cleaning inspection system which can inspect a transparent plate in a state in which foreign substances are not easily attached to the transparent plate,

According to an aspect of the present invention,

A transparent plate inspection apparatus for inspecting a transparent plate,

A housing having an inlet port and an outlet port of the transparent plate,

A transport mechanism for transporting the transparent plate from the inlet to the exit,

An inspection unit for inspecting the transparent plate carried by the transport mechanism, and

And a foreign matter adhesion preventing mechanism for preventing foreign matter from adhering to the transparent plate inside the housing.

In the transparent plate inspection apparatus, the transparent plate conveyed by the conveying mechanism inside the housing is inspected by the inspection unit. In this inspection, the inside of the housing is reliably prevented from adhering foreign matter to the transparent plate by the foreign substance adhesion preventing mechanism, so that it is possible to perform an accurate inspection.

The foreign substance adhesion preventing mechanism may have a pressing mechanism for increasing the internal pressure of the housing. As a result, since the pressurizing mechanism increases the internal pressure of the housing, it is difficult for air to flow from the outside to the inside of the housing, and the infiltration of foreign matter from the outside to the inside of the housing can be reliably prevented. It can be reliably prevented from being attached.

The pressing mechanism includes a feeding mechanism for sending air outside the housing to the inside of the housing and a filter for blocking foreign matter contained in air sent by the feeding mechanism from entering the housing . As a result, the internal pressure of the housing can be increased by the air sent by the air supply mechanism, and the foreign matter of the air sent can be prevented from entering the interior of the housing by the filter. It is possible to prevent foreign matter from entering.

The feeding mechanism of the pressurizing mechanism may supply air on the transparent plate so that foreign substances adhered on the transparent plate conveyed by the conveying mechanism are poured. By supplying air onto the transparent plate by the feeding mechanism, adhesion of foreign matter to the transparent plate can be prevented.

The pressing mechanism may be provided on the upper portion of the housing. Thereby, the inner pressure of the housing can be increased by pressing the housing toward the inside, that is, the lower side by the pressing mechanism provided on the upper portion of the housing.

The foreign substance adhesion preventing mechanism may have a delivery mechanism provided inside the housing and discharging air from the inlet and / or outlet to the outside of the housing. As a result, the delivery mechanism causes the wind to flow from the inside of the housing to the outside in the vicinity of the inlet port, thereby making it possible to reliably prevent the entry of foreign matter from the inlet port.

The transport mechanism may transport the transparent plate without contacting the front surface and the back surface of the transparent plate. By transporting the transparent plate in a state in which the transport mechanism is not in contact with the surface of the transparent plate, contamination or foreign matter adhering to the front and back surfaces of the transparent plate can be reliably prevented by the transport mechanism, Lt; / RTI > The transport mechanism may hold the transparent plate by contacting the edge of the transparent plate. Thereby, the transparent plate is transported in a state in which the transport mechanism is not in contact with the front and back surfaces of the transparent plate, and it is possible to reliably prevent the contamination or foreign matter from adhering to the front and back surfaces of the transparent plate by the transport mechanism.

The transport mechanism includes a first transporting member for transporting while contacting the edge of the transparent plate, a lifting member for lifting and simultaneously lifting the transparent plate carried by the first transporting member in contact with the edge of the transparent plate, And a second conveying member which receives the transparent plate raised by the lifting member while contacting the edge of the transparent plate and conveys it to the inspection region of the inspection unit.

Thereby, the transparent plate is conveyed by the first conveying member, the transparent plate conveyed by the first conveying member is received by the ascending member, the transparent plate held by the ascending member is raised, The transparent plate conveyed by the second conveying member from the lifting member can be inspected by the inspection unit. As described above, the first conveying member, the ascending member, and the second conveying member come into contact with the edge of the transparent plate, and the transparent plate can be held without being in contact with the front and back surfaces of the transparent plate. , The rising member and the second carrying member can surely prevent the contamination or foreign matter from adhering to the front and back surfaces of the transparent plate. Further, in the inspection region of the inspection section, the transparent plate held by being contacted with the edge by the second transport member is transported, so that the other members on the upper surface side and the lower surface side of the transparent plate do not interfere with the inspection by the inspection section, Therefore, it is possible to improve the inspection accuracy.

      Wherein the lifting member comprises a suction unit for suctioning the upper surface of the transparent plate conveyed from the first conveying member and a plurality of guide plates for contacting the upper edge of the transparent plate to be sucked by the suction unit, And the plurality of positioning portions may have a tapered surface that contacts the edge of the transparent plate so as to prevent contact between the suction portion and the upper surface of the transparent plate. As a result, the transparent plate conveyed from the first carrying member is attracted to the upper surface by the suction unit, so that the edge contacts the tapered surfaces of the plurality of holding portions and is accurately held by the tapered surfaces of the holding portions and the edge contact .

The transport mechanism may have a pair of belt conveyors that contact the edge of the transparent plate and the contact surfaces of the pair of belt conveyors with the transparent plate may be inclined to the sides facing each other. As a result, the transparent plate can be mounted on the contact surfaces of the pair of belt conveyors that are inclined to the sides facing each other with the edge of the transparent plate in contact with the transparent plate, and the transparent plate is transported .

The transport mechanism may include at least a pair of grip portions which come into contact with the edges of the transparent plate and sandwich the transparent plate from both sides. This makes it possible to carry the transparent plate without touching the front and back surfaces of the transparent plate by bringing the edges of the transparent plate and the pair of grip portions into contact with each other and sandwiching the transparent plate from both sides by the pair of grip portions.

According to another aspect of the present invention,

A foreign matter removing mechanism for removing foreign matters attached to the transparent plate;

And a transparent plate inspection system comprising the transparent plate inspection system configured to inspect the transparent plate from which foreign substances have been removed by the foreign substance removal mechanism.

In the transparent plate cleaning inspection system, the transparent plate having foreign substances removed by the foreign material removal mechanism can be inspected by the transparent plate inspection apparatus, so that accurate inspection can be performed.

The transparent plate cleaning inspection system may further include a cleaning device for cleaning the surface and / or the back surface of the transparent plate. As a result, the transparent plate having the front surface and / or the back surface thereof cleaned by the cleaning device can be inspected by the transparent plate inspection device, so that accurate inspection can be performed.

According to another aspect of the present invention,

A cleaning device for cleaning the surface and / or the back surface of the transparent plate,

And a transparent plate inspection system comprising the transparent plate inspection apparatus configured to inspect the transparent plate cleaned by the cleaning apparatus.

In the transparent plate cleaning inspection system, the transparent plate having the front surface and / or the back surface cleaned by the cleaning device can be inspected by the transparent plate inspection apparatus, so that accurate inspection can be performed.

According to another aspect of the present invention,

A first cleaning device for cleaning the first surface of the transparent plate;

An inverting device for inverting the transparent plate carried out from the first cleaning device,

A second cleaning device for cleaning the second surface of the transparent plate while conveying the transparent plate inverted by the inverting device,

And the transparent plate inspection apparatus having the above-described configuration for inspecting the transparent plate whose both surfaces have been cleaned by the first cleaning apparatus and the second cleaning apparatus.

The transparent plate cleaning inspection system can efficiently clean both sides of the transparent plate by transferring the transparent plate cleaned by the first cleaning device to the second cleaning device while reversing the transparent plate, The transparent plate can be inspected by the transparent plate inspection apparatus.

The terms " front surface " and " back surface " of the transparent plate mean surfaces opposite to each other as planar portions of the transparent plate. The " edge " of the transparent plate means the peripheral edge of the transparent plate, and the " edge " includes the boundary portion between the plane portion and the peripheral edge of the transparent plate. The " upper surface " of the transparent plate means a surface of the front surface and the back surface that faces upward in the transporting state. Refers to one of the front side and the rear side, and the " second side " means the other side of the front side and the rear side, and means the side opposite to the first side.

INDUSTRIAL APPLICABILITY The transparent plate inspection apparatus and the transparent plate cleaning inspection system of the present invention can inspect the transparent plate in a state in which no foreign substance easily adheres to the transparent plate, so that accurate inspection can be performed.

1 is a schematic side view showing a transparent plate cleaning inspection system according to an embodiment of the present invention.
2 is a schematic side view of the first cleaning device of the transparent plate cleaning inspection system of FIG.
3 is a schematic side view of a pressing head of the first cleaning device of FIG.
4 is a schematic plan view showing a reversing device of the transparent plate cleaning inspection system of FIG.
5 is a schematic side view of the reversing device of FIG.
6 is a schematic side view of a transparent plate inspection apparatus of the transparent plate cleaning inspection system of FIG.
Fig. 7 is an explanatory diagram of a first conveying member of the conveying mechanism of the transparent plate inspection apparatus of Fig. 6, wherein (A) is a schematic front view, and Fig. 7 (B) is a schematic plan view.
FIG. 8 is an explanatory view of a lifting member of a transport mechanism of the transparent plate inspection apparatus of FIG. 6, wherein (A) is a schematic rear view, (B) is a schematic bottom view, and FIG.
FIG. 9 is an explanatory diagram of a second conveying member of the conveying mechanism of the transparent plate inspection apparatus of FIG. 6, wherein (A) is a schematic bottom view and (B) is a schematic front view.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate. First, a transparent plate cleaning inspection system 1 having a transparent plate inspection apparatus according to a first embodiment of the present invention will be described with reference to Figs. 1 to 9. Fig.

             [First Embodiment]

The transparent plate cleaning inspection system 1 of FIG. 1 is a system for cleaning and inspecting, for example, a transparent plate P such as a cover glass or a touch panel used in a smart phone. More specifically, the transparent plate cleaning inspection system 1 of the present embodiment automatically cleans both surfaces (the first surface p1 and the second surface p2 (cleaning surface)) of the transparent plate P At the same time, foreign matter attached to the transparent plate P is removed, and defects of the transparent plate P such as scratches and defects are inspected. In the present embodiment, the transparent plate is a thin plate-like object, and the cleaning surface is both surfaces of the thin plate-like object.

The transparent plate cleaning inspection system 1 includes a first cleaning device 10A for cleaning the first surface p1 of the transparent plate P while conveying the transparent plate P, And the second surface p2 of the transparent plate P is conveyed while the transparent plate P inverted by the inverting device 30 is conveyed. The reversing device 30 reverses the transparent plate P, A second cleaning device 10B for cleaning the first surface p1 of the transparent plate P and a second surface p2 of the transparent plate P taken out of the second cleaning device 10B, And a transparent plate inspecting device 70 for inspecting the transparent plate P discharged from the foreign substance removing device 50. The transparent plate inspection device 70 is a device for inspecting the transparent plate P, 1, the conveying direction X of the transparent plate P of the first cleaning device 10A and the conveying direction X of the transparent plate P of the second cleaning device 10B are in the same direction. Here, the carrying direction X is the direction from the first cleaning device 10A to the second cleaning device 10B. The transparent plate cleaning inspection system 1 of the present embodiment has a loader device 90 for supplying a transparent plate P to the first cleaning device 10A.

The transparent plate cleaning inspection system 1 of the present embodiment further includes a control device (not shown) for controlling the operation of various devices and the like.

<Cleaning device>

The first cleaning device 10A and the second cleaning device 10B are provided with a transport mechanism 11 for transporting the transparent plate P in one direction (transport direction X) And a feeding mechanism 25 for feeding a cleaning cloth to clean the cleaning surface by bringing a part of the long cleaning cloth C into contact with the cleaning surface of the transparent plate P to be cleaned. Specifically, as shown in Figs. 2 and 3, the first cleaning device 10A and the second cleaning device 10B (see Fig. 1) include a transport mechanism 11 for transporting the transparent plate P, A pair of pressing heads 13 for pressing the cleaning cloth C toward the transparent plate P and a feeding mechanism 25 for supplying the cleaning cloth C, (See FIG. 1), and a cleaning liquid supply mechanism 28 for supplying a cleaning liquid to the cleaning cloth C. The operation of the conveying mechanism 11, the pressure head 13, the feeding mechanism 25, and the cleaning liquid supply mechanism 28 is controlled by the control device. The first cleaning device 10A and the second cleaning device 10B are different from each other in some configurations (for example, a long sheet for mounting) as described later, and the other parts have the same configuration. The first cleaning device 10A and the second cleaning device 10B are provided with a conveying mechanism 11, a cleaning cloth C, a pressing head 13, a feeding mechanism 25, and a cleaning liquid supply mechanism 28 And a housing 10h. The housing 10h (see Fig. 1) has a semi-inlet and a semi-outlet (not shown) of the transparent plate P and is provided in a closed state except for the inlet and outlet, Cleaning of the transparent plate P in the cleaning apparatus 10A and the second cleaning apparatus 10B is performed in an almost closed state and dust or the like contained in the outside air is prevented from adhering to the transparent plate P. [ The housing 10h is provided with an opening / closing door (not shown) for maintenance or the like.

(Conveying mechanism)

The transport mechanism 11 is a mechanism for transporting the transparent plate P as an object to be cleaned in the transport direction X. The transport mechanism 11 transports the transparent plate P as a thin plate-like object in the plane direction of the transparent plate P. More specifically, in the present embodiment, the transport mechanism 11 transports the transparent plate P The cleaning surface (the first surface p1 and the second surface p2) is mounted in a state of upward, and is transported in one of the directions along the horizontal plane. The term &quot; carrying in the plane direction &quot; means carrying in the direction of one of the directions along the clean surface (the first surface p1 and the second surface p2) of the transparent plate P. [

The transport mechanism 11 of the first cleaning apparatus 10A is provided with a transparent plate P on which the transparent plate P is placed, that is, a surface located on the lower side of the transparent plate P (second surface p2 (The surface on the opposite side of the transparent plate P)). Thus, the transparent plate P is conveyed in a state in which the entire surface of the second surface is in contact with the surface of the transparent plate P, so that the transparent plate P is sandwiched all over the conveying mechanism 11 and the cleaning cloth C, )] Is cleaned. The conveying mechanism 11 of the first cleaning apparatus 10A can be constituted by, for example, a belt conveyor.

The transport mechanism 11 of the second cleaning device 10B is provided with a transparent plate P on which the transparent plate P is placed, that is, a surface located on the lower side of the transparent plate P (the first surface p1 (The surface on the opposite side of the transparent plate P)). The transparent plate P is conveyed in a state in which the first surface p1 is in contact with the transparent plate P so that the transparent plate P is sandwiched all over the conveying mechanism 11 and the cleaning cloth C and the second surface p2 is cleaned. As shown in Fig. 1, the conveying mechanism 11 of the second cleaning apparatus 10B includes, for example, a belt conveyor, and a conveyor belt 11, which is provided on the belt conveyor, It is possible to adopt those having the sheet 12. As described above, the conveying mechanism 11 of the second cleaning apparatus 10B has the mounting long sheet 12 to prevent the first surface p1 from being contaminated in the second cleaning apparatus 10B have.

The belt conveyor will be described in more detail. The belt conveyor includes a conveying belt 11a, a conveying driven roller 11b, and a conveying drive roller 11c. The conveyance belt 11a is composed of an endless belt member and the conveyance belt 11a extends over the conveyance driven roller 11b and the conveyance drive roller 11c, The conveying belt 11a is circulated in accordance with the rotation and the conveying roller 11b is also rotated. It is also possible to reverse the installation positions of the conveyance drive roller 11c and the conveyance driven roller 11b.

The transport mechanism 11 of the first cleaning device 10A receives the transparent plate P from the loader device 90 and removes the first receiving area A1 (See Fig. 5). The transport mechanism 11 of the second cleaning apparatus 10B receives the transparent plate P from the reversing device 30 in the second absorbed area A2 (see Fig. 5) P to the discharge region of the transparent plate P and discharges it.

(Cleaning cloth)

The cleaning cloth C is operated while being in contact with the transparent plate P at the cleaning position, thereby cleaning the cleaning surface (the surface located on the upper side) of the transparent plate P. [ The cleaning cloth C is supplied so that one surface of the cleaning cloth C faces the cleaning surface of the transparent plate P and is wiped by the pressing head 13 against the cleaning surface of the transparent plate P, Clean.

As the cleaning cloth (C), a fiber cloth is used, for example, a cloth is used. As the fiber, various kinds of fibers such as natural fibers and synthetic fibers can be employed. Here, a nonwoven fabric may be used as the cleaning cloth (C). When a nonwoven fabric is used, a nonwoven fabric having a fleece formed by a dry method, a wet method, or a melt blowing method may be used.

(Pressure head)

The two pressure heads 13 are arranged side by side in the carrying direction X. Each pressurizing head 13 includes a first cleaning member 14 for pressing a part of the cleaning cloth C toward the transparent plate P and a second cleaning member 14 for pressing a part of the cleaning cloth C toward the transparent plate P as shown in Fig. And a second cleaning member 15 for pressing the downstream side portion of the transfer direction X toward the transparent plate P, That is, in the present embodiment, the first cleaning device 10A and the second cleaning device 10B are arranged such that cleaning positions where the cleaning cloth C and the transparent plate P are in contact with each other are arranged in the conveying direction of the transparent plate P X is installed in four places in parallel. In the present embodiment, the two pressure heads 13 have the same configuration. The first cleaning member 14 and the second cleaning member 15 are made of, for example, pads formed of elastic members such as silicon.

Each pressurizing head 13 is provided with a cleaning member driving mechanism (not shown) for reciprocally moving the first cleaning member 14 and the second cleaning member 15 in the plane of the cleaning surface and in the direction orthogonal to the carrying direction X Not). Means that the first cleaning member 14 and the second cleaning member 15 are in contact with the cleaning surface of the transparent plate P so that the cleaning cloth C is in contact with the cleaning surface of the transparent plate P. [ Means a direction orthogonal to the conveying direction X in the plane where the conveying direction X is possible. Specifically, it means a direction perpendicular to the conveying direction X while being on a plane parallel to the cleaning surface.

(Feed mechanism)

The feeding mechanism 25 of the cleaning cloth C will be described with reference to Fig. The cleaning cloth C is supplied by the feeding mechanism 25 as described above. Here, the feeding mechanism 25 has a main roller 25a and a driven roller 25b. The cleaning cloth C is spread over the main roller 25a and the driven roller 25b and the portion of the cleaning cloth C after the transparent plate P is cleaned by the rotation of the main roller 25a is conveyed to the main roller 25a, . At this time, the unused cleaning cloth C is released from the driven roller 25b.

The feeding mechanism 25 is provided so as to feed the cleaning cloth C in the direction opposite to the conveying direction X of the transparent plate P (see FIG. 2). That is, in the cleaning cloth C, the cleaning cloth C is sent in the reverse direction (Y direction in FIG. 2) in the cleaning position (the portion in contact with the transparent plate P) .

The feeding mechanism 25 guides a part of the cleaning cloth C located between the two pressing heads 13 away from the transparent plate P. [ Specifically, the feeding mechanism 25 has a tension roller 26 disposed above the belt conveyor between the two pressure heads 13. The cleaning cloth C between the two pressing heads 13 is sandwiched between the two pressing heads 13 in the feeding mechanism 25 so that the cleaning cloth C between the two pressing heads 13 is separated from the transparent plate P .

(Cleaning liquid supply mechanism)

The cleaning liquid is supplied to the cleaning cloth (C) by the cleaning liquid supply mechanism (28) as described above. Therefore, the transparent plate P is cleaned by the cleaning cloth C impregnated with the cleaning liquid. The cleaning liquid supply mechanism 28 supplies the cleaning liquid to a part of the cleaning cloth C positioned between the first cleaning member 14 and the second cleaning member 15 in the carrying direction X , The cleaning liquid is also supplied to a part of the cleaning cloth C located on the downstream side of the pressing head 13 in the carrying direction X as described later.

The cleaning liquid supply mechanism 28 has a supply nozzle 28b provided between the first cleaning member 14 and the second cleaning member 15 as shown in Fig. The supply nozzle 28b is connected to a cleaning liquid storage tank (not shown). The supply nozzle 28b supplies the cleaning liquid upward. The cleaning liquid supplied from the supply nozzle 28b impregnates the cleaning cloth C and reaches the cleaning surface of the transparent plate P. [ The amount of the cleaning liquid supplied from the supply nozzle 28b is set such that the contamination adhered to the transparent plate P can be decomposed and even if a part of the cleaning cloth C is pressed by the pressing pad 15 to perform the cleaning operation The gold (line) is adjusted so as not to remain. The supply nozzle 28b is tapered. In this embodiment, the cleaning liquid C is supplied from the upper side to the lower side of the cleaning cloth C although the structure is as described above.

The washing liquid is not particularly limited, but alcohols are preferably used, and ethanol is particularly preferably used.

The transparent plate cleaning inspection system 1 further comprises a cleaning liquid supply mechanism 28 for supplying cleaning liquid C on the upstream side in the supplying direction of the cleaning cloth C of the pressing head 13 on the downstream side in the carrying direction X And further has a cleaning liquid supply portion 28a for supplying a cleaning liquid to a part (see Fig. 1).

<Reversing device>

The reversing device 30 will be described with reference to Figs. 1, 4, and 5. Fig. The reversing device 30 is a device for reversing the transparent plate P taken out from the first cleaning device 10A and supplying the inverted transparent plate P to the second cleaning device 10B as described above. Specifically, the transparent plate P, which is sequentially supplied from the first cleaning apparatus 10A (see Fig. 1) to the first to-be-received area A1, To the device 10B (see Fig. 1).

The reversing device 30 absorbs the second surface p2 of the transparent plate P in the first absorbing area A1 and absorbs the second absorbing surface of the transparent plate P in the second absorbing area A2. An arm 33 which is provided at one end side with a holding portion (suction portion 32) for releasing the arm 33 and a holding portion (suction portion 32) And a rotating portion 35 as shown in Fig. The reversing device 30 has a housing 30h (see Fig. 1) housing the suction portion 32, the arm 33, and the rotation portion 35 therein.

The reversing device 30 includes a provisional receiving member 31 provided in the first receiving area A1 and a temporary holding member 31 provided in the first receiving area A1 so that the arm 33 can be pivoted to the rotating part 35, And a protruding mechanism (34) for protruding or retracting in the suction direction. The reversing device 30 is provided with a temporary receiving member 31 for supporting one transparent plate P from the lower side in the first receiving area A1. More specifically, the temporary receiving member 31 is disposed on the second surface p2 of the transparent plate P discharged from the first cleaning device 10A (see Fig. 1) in the first receiving area A1 Temporarily support. The adsorption unit 32 adsorbs the second surface p2 of the transparent plate P supported by the temporary receiving member 31. [ The arm 33 is stretchable. Specifically, the arm 33 is stretchable in the direction toward the one end where the suction portion 32 is attached to the one end side and the other end supported by the rotation portion 35 is attached to the suction portion 32 . The protruding mechanism 34 is provided between the rotary part 35 and the arm 33 and is provided with a mechanism for projecting or retracting the arm 33 against the rotary part 35 in the suction direction of the suction part 32, to be. Specifically, the protruding mechanism 34 is formed of an air cylinder that supports the other end side of the arm 33. The projecting mechanism 34 is fixed to the rotating portion 35, thereby supporting the arm 33 as described above. The rotation part 35 is rotatable about a rotation axis located on a plane parallel to the transparent plate P that is attracted to the absorption part 32. [ Specifically, the rotary shaft is provided in a horizontal direction (a direction perpendicular to the direction in which the transparent plate P is conveyed) and in a direction perpendicular to the direction in which the suction unit 32 sucks. The reversing device 30 is provided with a plurality of the adsorption portions 32, the arms 33 and the projecting mechanism 34. The plurality of the adsorption portions 32, the arms 33, Each of the projecting mechanisms 34 is formed as a pair and the pair of the attracting portions 32, the arms 33 and the projecting mechanisms 34 are installed in a substantially rotationally symmetrical manner about the rotational axis of the rotating portion 35 . The term &quot; approximately rotational symmetry &quot; is used not only in the case of completely rotational symmetry but also in the case where the absorption of one transparent plate P in the first absorbed region A1 and the absorption of one transparent plate P in the second absorbed region A2 (P) can be performed at the same time.

&Lt;

The foreign substance removing apparatus 50 will be described with reference to Fig. The foreign substance removing device 50 is a device for removing foreign matter adhering to the first surface p1 and the second surface p2 of the transparent plate P taken out from the second cleaning device 10B as described above, to be. In the transparent plate cleaning inspection system 1, even if a foreign substance due to a cleaning cloth C of a fibrous material is adhered to the transparent plate P or foreign matter generated in the apparatus is adhered to the transparent plate P, . &Lt; / RTI &gt;

The foreign substance removing device 50 includes an adhesion roller 51 (an adhesive member) having an adhesion surface 51a contacting the first surface p1 and the second surface p2 of the transparent plate P, And an adhesive force recovery mechanism (52) capable of removing foreign matters adhering to the adhesive surface (51a) of the adhesive roller (51). In the present embodiment, the foreign substance removing apparatus 50 includes two adhesive rollers 51 which sandwich the transparent plate P and face each other. More specifically, the foreign substance removing apparatus 50 includes a pair of adhesive rollers 51 which are vertically opposed to each other with the transparent plate P sandwiched therebetween. The outer surface of the adhesive roller 51 is a transparent plate P ) To remove foreign substances adhering to the adhesive layer.

1, the foreign material removing device 50 has a free roller 50a on which the transparent plate P discharged by the second cleaning device 10B is mounted, and a pair of upper and lower adhesive rollers (Not shown), and the transparent plate P is conveyed to the downstream side by the rotation of the adhesion roller 51.

The adhesive force recovery mechanism 52 has an elongated adhesive tape 53 that can contact the adhesive surface 51a of the adhesive roller 51. [ The adhesive tape 53 is provided for each of the pair of upper and lower adhesive rollers 51.

The adhesive tape 53 has an adhesive surface 53a having an adhesive force stronger than the adhesive surface 51a (outer circumferential surface) of the adhesive roller 51. The adhesive surface 53a of the adhesive tape 53 Foreign matter adhered to the adhesive roller 51 can be removed by being adhered to the adhesive surface 51a of the adhesive roller 51 and peeled off.

The foreign substance removing unit 50 has a supply unit 55 for supplying the unused adhesive tape 53 and a discharge unit 56 for discharging the used adhesive tape 53. [ In the supply section 55, an unused adhesive tape 53 is wound in a roll shape. The supply unit 55 is disposed downstream of the adhesion roller 51 in the transport direction. The used adhesive tape 53 is wound in a roll shape on the discharge portion 56. That is, the discharge portion 56 is wound with the adhesive tape 53 used for removing the foreign substances from the adhesive roller 51. [ The discharge portion 56 is disposed upstream of the adhesion roller 51 in the conveying direction X.

The foreign material removing device 50 has an adhesive tape feeding and feeding mechanism 54 for feeding the adhesive tape 53. [ Here, the adhesive tape feeding / feeding mechanism 54 is provided so as to intermittently contact the adhesive tape 53 with the adhesive roller 51. For example, the adhesive tape feeding / feeding mechanism 54 brings the adhesive tape 53 into contact with the adhesive roller 51 every time the adhesive roller 51 removes the foreign substances from the five transparent plates P. More specifically, the adhesive tape feeding and feeding mechanism 54 is configured such that the adhesive tape roller 54 (adhesive tape feeding and conveying mechanism) facing the adhesive roller 51 while the adhesive tape 53 is being spanned approaches the adhesive roller 51 · It is installed to be able to be separated. The adhesive tape feeding and feeding mechanism 54 feeds the adhesive tape along with the rotation of the adhesive roller 51 by bringing the adhesive roller 51 and the adhesive tape 53 into contact with each other. The configuration in which the adhesive tape is fed and fed by the rotation of the adhesive roller 51 is adopted in this embodiment, but the present invention is not limited to this configuration, and the configuration in which the adhesive tape 53 is fed and fed by being wound around the discharge portion 56 is adopted You may.

The foreign substance removing device 50 has a housing 50h which houses the adhesion roller 51 and the adhesion force recovery mechanism 52 and the like. The housing 50h has a semi-inlet and an outlet for the transparent plate P, and is provided in a sealed state except for the semi-inlet and the outlet. Therefore, in the foreign substance removing apparatus 50, the above-described foreign matter removal is performed in an approximately closed state, and dust or the like included in the outside air is prevented from adhering to the transparent plate P. [ The inlet port of the housing 50h of the foreign material removal device 50 is hermetically connected to the exit port of the housing 10h of the second cleaning device 10B. The housing 50h of the foreign substance removing apparatus 50 is provided with an opening / closing door (not shown) for maintenance or the like.

<Transparent plate inspection system>

The transparent plate inspection apparatus 70 is a device for inspecting the presence or absence of scratches, defects and foreign substances on the cleaned surface (the first surface p1 and the second surface p2) of the cleaned transparent plate P as described above to be. 6, the transparent plate inspection apparatus 70 includes a housing 76 having an inlet port 76 and an outlet port 77 of the transparent plate P (see FIG. 6) A transfer mechanism 80 for transferring the transparent plate P from the transfer opening 76 to the transfer port 77 and a transfer mechanism 80 for transferring the transparent plate P in the housing 70h carried by the transfer mechanism 80 An inspection unit 72 for capturing an image and a foreign matter adhesion prevention mechanism 75 for preventing foreign substances from entering the interior of the housing 70h and preventing foreign matter from adhering to the transparent plate P. [

The transparent plate inspection apparatus 70 also has an illumination section 71 for irradiating a transparent plate P picked up by the inspection section 72 with a light beam. The transparent plate inspection apparatus 70 has a plurality of pairs of the illumination units 71 and the inspection units 72 and the transparent plates P , Reflection from the first surface p1 to the second surface p2 and reflection from the second surface p2 to the first surface p2 of the first surface p2, various images are picked up based on the respective rays transmitted through the light p1. In the transparent plate cleaning inspection system 1, the image is transmitted to the control device, and the control device determines whether the transparent plate P is good or bad. The inspection unit 72 can be constituted by a camera such as a CCD camera, for example.

The housing 70h houses the illumination unit 71, the inspection unit 72, the transport mechanism 80, and the like. The housing 70h is provided in an enclosed state except for the inlet port 76 and the outlet port 77. [ The housing 70h of the transparent plate inspection apparatus 70 is provided with an opening / closing door (not shown) for maintenance or the like.

On the upper portion of the housing 70h, the above-described foreign substance adhesion preventing mechanism 75 is provided. More specifically, as shown in Fig. 6, two foreign substance-adhering blocking mechanisms 75 are provided on the upper portion of the housing 70h in parallel with the carrying direction X. The foreign matter adhesion preventing mechanism 75 is a mechanism for increasing the internal pressure of the housing 70h. The foreign substance adhesion preventing mechanism 75 includes a feeding mechanism (not shown) for sending the air outside the housing 70h to the interior of the housing 70h, a housing 70h for housing the foreign substance contained in the air sent by the feeding mechanism, And a filter (not shown) for blocking intrusion into the inside. The foreign substance adhesion preventing mechanism 75 sends air on the transparent plate P conveyed by the conveying mechanism 80 and when the foreign substance adheres to the surface of the transparent plate P, I will. The foreign substance adhesion preventing mechanism 75 sends air from the upper side to the lower side. As the above-mentioned feeding mechanism, various kinds of blowing apparatuses can be used. For example, a blower such as a sirocco fan is used. As the filter, various kinds of filters can be used, but an air filter such as a filter for coarse dust, a medium / high performance filter, and a HEPA filter can be used.

The transport mechanism 80 of the transparent plate inspection apparatus 70 includes a first transport member 81 for transporting the transparent plate P carried in from the transport opening 76 in contact with the edge thereof, A lifting member 83 for lifting and simultaneously lifting the transparent plate P conveyed by the member 81 while being in contact with the edge and a transparent plate P raised by the lifting member 83 at its edge And a second conveying member (88) for conveying the image to the image sensing area of the inspection unit (72) while receiving the image. Specifically, the transparent plate inspection apparatus 70 conveys the transparent plate P from the inlet port 76 by the first conveying member 81 in the conveying direction X (see arrow S1 in FIG. 6) , And the transparent plate (P) conveyed by the first conveying member (81) is received by the lifting member (83). The raising member 83 raises the transparent plate P received by the raising member 83 (see arrow S2 in Fig. 6), and the raised transparent plate P is received by the second carrying member 88 . The second transporting member 88 transports the transparent plate P received by the second transporting member 88 in the horizontal direction (see the arrow of S3 in Fig. 6) The inspection unit 72 picks up the transparent plate P. [ Thereafter, the transparent plate P is taken out from the transfer port 77. In the present embodiment, since the transport direction of the transparent plate P by the first transporting member 81 and the second transporting member 88 is the same as the transporting direction of the first cleaning apparatus, The conveying direction of the first conveying member 81 and the second conveying member 88 is shown by using the same sign X as the conveying direction of the first cleaning device 10A (see Fig. 1) in Figs. 6 to 9 have. However, the transport direction of the transparent plate inspection apparatus 70 by the transport mechanism 80 is not limited to this, and may be, for example, a direction opposite to or perpendicular to the transport direction of the first cleaning apparatus 10A. The transporting of the transparent plate P after picking up to the dispensing opening 77 can be carried out using various transporting means and can be transported by the transporting means similar to that of the first transporting member 81, have.

The conveying mechanism 80 includes a pair of belt conveyors 81c (see Figs. 7 (A) and 7 (B)) which contact the edge of the transparent plate P as the first conveying member 81 Have. In order to distinguish the belt conveyor 81c in the transparent plate inspection apparatus 70 from the belt conveyor of the first cleaning apparatus 10A described above, there will hereinafter be described a case in which the belt conveyor 81c is described as an inspection belt conveyor 81c have. In addition, various operations of the transport mechanism 80 are controlled by the control device.

The pair of inspection belt conveyors 81c are inclined to the side where the contact surfaces (upper surfaces) with the transparent plate P are opposed to each other. Each inspection belt conveyor 81c includes a conveyor belt 81a, a conveying driven roller 81b, and a conveyance drive roller (not shown). The conveyor belt 81a is composed of an endless belt member and spans the conveying driven roller 81b and the conveying drive roller. In the inspection belt conveyor 81c, the conveying belt 81a is circulated in accordance with the rotation of the conveying drive roller, and the conveying driven roller 81b is also rotated. A pair of inspection belt conveyors 81c are provided so that the axes of the conveying driven rollers 81b are inclined relative to the horizontal direction. Specifically, as shown in Fig. 7 (A), a pair of inspection belt conveyors The conveying driven rollers 81b are disposed such that the side close to the conveying driven rollers 81b is located at the lower side and the side where the conveying driven rollers 81b are located at the upper side is inclined. In addition, like the conveying driven roller 81b, the conveying drive roller is provided so that its close side is located at the lower side and the separated side is located at the upper side. 7A, the lower side of the edges of the transparent plate P is in contact with the upper surface of the conveying belt 81a, and the lower surface thereof is not in contact with the conveying belt 81a By the inspection belt conveyor 81c.

8 (A), the lifting member 83 includes a suction portion 84 for suctioning the upper surface of the transparent plate P conveyed from the first conveying member 81, a suction portion 84 for suctioning the upper surface of the transparent plate P, And a position determining section 85 for determining the height position of the transparent plate P by making contact with the upper edge of the transparent plate P sucked by the transparent plate P. A plurality of positioning portions 85 has a tapered surface 85a contacting the transparent plate P so as to prevent the suction portion 84 from contacting the upper surface of the transparent plate P. [ The lifting member 83 further includes a contact portion 86 contacting the leading edge of the transparent plate P in the carrying direction X. [ 8 (B) and 8 (B), when the contact portion 86 comes into contact with the leading edge of the transparent plate P conveyed by the inspection belt conveyor 81c The edge of the transparent plate P is pressed against the tapered surface 85a of the positioning portion 85 by sucking the upper surface of the transparent plate P by the suction portion 84, The transparent plate P is sucked up until the upper end of the transparent plate P is brought into contact. The transparent plate P is positioned in the height direction by being brought into contact with the tapered surface 85a of the plurality of positioning portions 85 and is held by the lifting member 83 Reference]. That is, after the lower edge of the transparent plate P is conveyed in contact with the first conveying member 81, the transparent plate P is conveyed to the tapered surface 85a of the plurality of positioning portions 85 by suction of the suction portion 84 And is received by the lifting member 83 from the first conveying member 81. As shown in Fig.

The positioning portion 85 is composed of a plurality of pins protruding downward. This positioning portion 85 is provided with a plurality of pairs (two pairs in the illustrated example) so as to face each other on both sides of the transparent plate P (see Fig. 8 (B)). The positioning portion 85 has a conical shape whose tip (lower end) is thin. The conical peripheral surface of the positioning portion 85 constitutes the tapered surface 85a where the edge of the transparent plate P comes into contact. Further, the contact portion 86 is formed of a cylindrical pin protruding downward. The contact portion 86 is provided on the downstream side in the conveying direction X with respect to the fin constituting the positioning portion 85. In the present embodiment, a plurality of (two in the illustrated example) pins constituting the contact portion 86 are provided. The suction portion 84 is opened downward so that the suction port 84a faces the upper surface of the transparent plate P. [ The suction port 84a is provided above the positioning portion 85 and the contact portion 86 (the tapered surface 85a of the contact portion). In the present embodiment, a plurality of (four in the illustrated example) suction portions 84 are provided.

The ascending member 83 is vertically movable with respect to the housing 70h of the transparent plate inspection apparatus 70 and specifically includes a positioning portion 85, a suction portion 84, and a contact portion 86 And a body (not shown) of a lifting member 83 installed to be movable up and down with respect to the housing 70h. Therefore, after the transparent plate P is received from the first conveying member 81 as described above, the lifting member 83 is lifted up by the main body of the lifting member 83 with respect to the housing 70h, P is raised and the transparent plate P is received by the second conveying member 88 and then lowered to receive the next transparent plate P from the first conveying member 81 .

The second carrying member 88 receives the transparent plate P lifted by the lifting member 83 and conveys the transparent plate P to the imaging region of the inspection unit 72 as described above. 9 (B), the second carrying member 88 comes into contact with the upper part of the edge of the transparent plate P raised by the lifting member 83 to support the transparent plate P, P from the outside. The transparent plate P is sucked by the suction unit 84 when the second conveying member 88 receives the transparent plate P from the lifting member 83. [ The support portion 89 is composed of a plurality of fins protruding inward from the outside in the direction orthogonal to the carrying direction X, that is, protruding from the side toward the transparent plate P side. The support portions 89 are provided in a plurality of pairs (two pairs in the illustrated example) so as to face each other on both sides of the transparent plate P, and the opposing fins are provided so as to approach each other and to be spaced apart from each other. The supporting portion 89 has a conical shape with a thin distal end, and the conical peripheral surface 89a is in contact with the lower portion of the edge of the transparent plate P.

9 (A) and 9 (B), the second conveying member 88 is provided with a plurality of pairs (a plurality of pairs) for fitting the transparent plate P from both sides in contact with the edge of the transparent plate P (Two pairs in one example). The gripping portion 90 is provided so as to be able to move away from and contact with the edge of the raised transparent plate P while being movable in the carrying direction X. [ The gripper 90 grips the transparent plate P lifted by the lifting member 83 and then carries it in the carrying direction X. [ Specifically, the grip portion 90 is spaced from the transparent plate P when the lifting member 83 is lifted as described above. After lifted by the lifting member 83, the gripping member 90 is lifted by the lifting member 83, The transparent plate P is held by the supporting portion 89 and the suction portion 84 of the transparent plate P and then the transparent plate P is gripped by fitting it to the edge of the transparent plate P. [ Then, the gripper 90 moves in the transport direction to transport the gripped transparent plate P in the transport direction. The grip portion 90 preferably has at least a surface made of an elastic member, and may be made of, for example, rubber or silicone.

The supporting portion 89 is also provided so as to be movable in the carrying direction X in the same manner as the holding portion 90. In other words, the supporting portion 89 is moved from the receiving position of the transparent plate P to the lifting member 83 So that it can escape in the carrying direction X. The support portion 89 is coupled with the grip portion 90 so as to deviate from the take-in position of the transparent plate P with the lift member 83 after gripping the transparent plate P by the grip portion 90 The lifting member 83 is lowered to receive the next transparent plate P conveyed by the first conveying member 81. Then,

In the illustrated example, the second conveying member 88 has a pair of support portions 89 and 90, but a plurality of pairs (for example, two pairs) of support portions (89) and a grip portion (90). That is, when the receiving operation of the transparent plate P from the lifting member 83 is performed by the pair of the support portions 89 and 90 as described above, (For example, the carrying operation of the inspection section 72 to the image pickup area). When the plurality of pairs of support portions 89 and 90 are provided as described above, it is preferable that the height of the transparent plate P held by the grip portion 90 is constant, And the imaging operation by the inspection unit 72 can be performed with a predetermined vertical height. In order to make the vertical height of the plurality of grip portions 90 constant, for example, rails for moving the grip portions 90 in the transport direction are provided at different heights in the respective tanks, By making the installation height of the grip portions 90 different from each other in the traveling body, the vertical height of the grip portions 90 of each group can be made constant. Further, by providing the shapes of the traveling bodies so as not to overlap in the carrying direction, they do not interfere with each other when traveling in the carrying direction of the grip portions 90.

<Advantages>

According to the transparent plate cleaning inspection system 1, the transparent plate P cleaned by the first cleaning device 10A, the second cleaning device 10B and the foreign material removing device 50 is transferred to the transparent plate inspection device 70). &Lt; / RTI &gt; The transparent plate cleaning inspection system 1 can remove foreign matter even if foreign substances such as fibers are attached to the transparent plate P based on the cleaning cloth of the fibers of the first cleaning apparatus 10A and the second cleaning apparatus 10B It is possible to surely remove the foreign matter by the apparatus 50, so that it is less likely to be judged as a defect of the transparent plate P by the foreign substance in the transparent plate inspection apparatus 70.

In the inspection by the transparent plate inspection apparatus 70, since the internal pressure of the inside of the housing 70h of the transparent plate inspection apparatus 70 is raised by the pressurizing mechanism, the inside of the housing 70h Air is difficult to enter. Therefore, it is possible to reliably prevent foreign matter from entering the interior of the housing 70h from the outside, thereby preventing foreign substances from adhering to the transparent plate P inside the housing 70h, Can be performed.

The pressing mechanism includes a feeding mechanism for sending the air outside the housing 70h to the inside of the housing 70h and a foreign matter contained in the air sent by the feeding mechanism to the inside of the housing 70h The internal pressure of the housing 70h can be increased by the air supplied by the air supply mechanism and the foreign matter of the air to be supplied is prevented from entering the inside of the housing 70h by the filter It is possible to prevent foreign matter from entering the interior of the housing 70h by the feeding mechanism, thereby making it possible to perform an accurate inspection.

Also, the pressurizing mechanism is installed on the upper portion of the housing 70h, and air is supplied downward to increase the internal pressure of the housing 70h. Even if foreign matter intrudes into the housing 70h, The foreign matter flows downward and is easily discharged from the inlet port 76 or the outlet port 77 to facilitate an accurate inspection.

The transport mechanism 80 of the transparent plate inspection apparatus 70 is in a state in which it contacts the edge of the transparent plate P and does not contact the cleaned surface (first surface and second surface) of the transparent plate P It is possible to reliably prevent contamination or foreign matter from adhering to the cleaned surface of the transparent plate P by the transport mechanism 80, and to perform accurate inspection.

Particularly, the transporting mechanism 80 includes a second transporting member 88 for transporting the transparent plate P to the image pickup area of the inspection unit 72, and a gripping unit 90 for gripping the edge of the transparent plate P from both sides The other members on the upper surface side and the lower surface side of the transparent plate P in the imaging region of the inspection section 72 can perform various imaging without interfering with the imaging of the inspection section 72, Can be improved.

The transport mechanism 80 has a first transport member 81 for transporting the transparent plate P to the upstream side of the second transport member 88, that is, The degree of freedom in designing the first transporting member 81 and the second transporting member 88 is high and the processing speed can be increased while suppressing an increase in cost of the transparent plate inspection apparatus 70. [

Since the first conveying mechanism 80 uses a pair of inspection belt conveyors 81c whose contact surfaces with the transparent plate P are inclined toward each other, the contact surfaces of the belt conveyors 81c It is possible to smoothly transport the transparent plate P in a state in which the transparent plate P is in contact with the lower portion of the edge of the transparent plate P and is not in contact with the clean surface of the transparent plate P. [

Since the transport mechanism 80 has the lifting member 83 for transporting the transparent plate P from the first transporting member 81 to the second transporting member 88, the first transporting member 81 To the second conveying member 88 can be carried out very quickly and appropriately.

In particular, the lifting member 83 includes a suction portion 84 for suctioning the upper surface of the transparent plate P conveyed with the first conveying member 81 in contact with the lower portion of the edge, and a suction portion 84 And the plurality of positioning portions 85 for holding the transparent plate P by the tapered surface 85a contacting the upper portion of the edge of the transparent plate P sucked by the suction portion 84 The transparent plate P can be easily and surely received from the first conveying member 81 by the suction of the upper surface.

In the transparent plate cleaning inspection system 1, the first surface of the transparent plate P is cleaned by the first cleaning device 10A, and the transparent plate P after the first surface is cleaned, And the second surface of the inverted transparent plate P is cleaned by the second cleaning device 10B so that both surfaces of the transparent plate P can be cleaned without human intervention.

The first cleaning device 10A and the second cleaning device 10B are configured such that the transparent plate P is transported by the transport mechanism 11 and the cleaned surface of the transparent plate P is made into one long It is possible to perform a desired cleaning at a plurality of cleaning positions and to reliably clean both surfaces of the transparent plate P since the cleaning can be performed a plurality of times by one surface of the cleaning cloth C. [ In addition, since the cleaning surface is cleaned by one surface of the cleaning cloth C without reversing the cleaning cloth C at a plurality of cleaning portions, there is no need to provide an inverting means like the conventional cleaning device for the terminal portion, The maintenance complexity can be suppressed.

Since the cleaning cloth C is cleaned a plurality of times on one side of one cleaning cloth C and the cleaning cloth C is sent in the direction opposite to the carrying direction X as described above, (Not contacted) cleaning cloth C on the upstream side (the upstream side in the cleaning cloth feed direction) of the transparent cloth P and after use (contact completion) on the upstream side (downstream side in the cleaning cloth feeding direction) The transparent plate P can be cleaned by the cleaning cloth C of the transparent plate P. Therefore, each portion of the cleaning cloth C can be used for cleaning a plurality of times, and the transparent plate P can be cleaned with the cleaning cloth C in a state of less contamination along the carrying direction X. [

Since the first cleaning device 10A and the second cleaning device 10B are provided with the cleaning liquid supply mechanism for supplying the cleaning liquid C to the cleaning liquid C, the cleaning liquid C containing the cleaning liquid is supplied to the transparent plate P Can be preferably cleaned.

Since the first cleaning device 10A and the second cleaning device 10B are provided with the tension roller for adjusting the tension of the cleaning cloth C between the two pressure heads 13, Sufficient tension can be given to the cleaning cloth C, and more reliable cleaning can be performed.

The cleaning liquid supply mechanism 28 supplies a cleaning liquid in a small amount to the cleaning cloth C on the upstream side of the cleaning cloth supply direction of the pressing head 13 so that no fine line is left, By cleaning with the cleaning cloth C impregnated with the cleaning liquid a little more than that by the cleaning cloth C, the cleaning surface can be cleaned more cleanly and more reliable cleaning becomes possible.

Since the first pressing pad 14 and the second pressing pad 15 reciprocate in the plane direction of the cleaning surface in the direction perpendicular to the carrying direction X of the transparent plate P during cleaning, Is pressed against the cleaning surface of the transparent plate P by the first pressure pad 14 and the second pressure pad 15 and the cleaning cloth C which is in contact with the cleaning surface of the transparent plate P is perpendicular The cleaning surface C can clean the cleaning surface more reliably.

The transparent plate cleaning inspection system 1 may be configured such that the foreign matter attached to the first surface p1 and the second surface p2 of the transparent plate P taken out from the second cleaning device 10B, It is possible to prevent foreign materials such as a cleaning cloth C from being adhered to the transparent plate P from adhering to the transparent plate P in the cleaning step, Foreign matter can be surely removed by the foreign material removing device 50 even if it is attached.

The foreign matter removing device 50 is provided with the adhesive tape 53 capable of removing foreign matter adhering to the adhesive surface of the adhesive roller 51 so that the foreign matter adhered from the adhesive surface of the adhesive roller 51 is adhered to the adhesive tape 53, whereby the adhesive force of the adhesive surface of the adhesive roller 51 is restored, and the foreign matter removing device 50 can be operated in a desired state for a long period of time.

The foreign matter removing device 50 also has an adhesive tape feeding and feeding mechanism 54 for feeding the adhesive tape 53. The adhesive tape feeding and feeding mechanism 54 intermittently attaches the adhesive tape 53 to the pressure roller 51 , The amount of use of the adhesive tape can be reduced.

            [Other Embodiments]

The presently disclosed embodiments are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is not limited to the configuration of the above-described embodiments, but includes all changes (replacement, addition, and deletion of configuration) within the meaning and scope equivalent to the claims, Is intended.

That is, in the above embodiment, the transparent plate inspection apparatus is used in the transparent plate cleaning inspection system including the first cleaning apparatus, the reversing apparatus, the second cleaning apparatus, and the foreign matter removing apparatus. However, And it is within the scope of the present invention that the transparent plate inspection apparatus alone is used. Further, the present invention may be a system comprising only a transparent plate inspection apparatus and a foreign matter removal apparatus, or a system provided with a cleaning apparatus and a transparent plate inspection apparatus.

In the above embodiment, a description has been given of a case in which the semi-inlet of the housing of the second cleaning device is hermetically connected to the inlet of the housing of the foreign material removing device, but a loader is separately provided between the second cleaning device and the foreign material removing device Further, it is also possible to arrange the loader on the upstream side of the transparent plate inspection apparatus. It is also possible to dispose a laminating apparatus on the downstream side of the transparent plate inspecting apparatus and attach a protective film to both sides of the transparent plate after inspection.

In the above embodiment, the transparent plate inspection apparatus provided with the two foreign substance adhesion preventing mechanisms at the upper portion of the housing is explained. However, the present invention is not limited to this, and the transparent plate inspection apparatus provided with one or three or more foreign substance- Device.

In the above-described embodiment, a pressing mechanism for increasing the internal pressure of the housing is provided as the foreign substance adhesion preventing mechanism, but the present invention is not limited thereto. For example, it is possible to adopt a delivery mechanism which is provided inside the housing and discharges air to the outside of the housing from the inlet port as a foreign substance adhesion prevention mechanism. Specifically, the delivery mechanism may have a blower installed inside the vicinity of the inlet port, and the air inside the housing may be discharged through the inlet port to the outside by the blower. It is also possible to provide the above-described delivery mechanism on the discharge port side. When the delivery mechanism is provided, an air inlet may be provided in the housing, an air filter may be installed in the air inlet, and air may be introduced into the housing through the air filter. Furthermore, as the foreign substance adhesion preventing mechanism, it is also possible to provide the delivery mechanism together with the above-described pressing mechanism.

Further, the transport mechanism of the transparent plate inspection apparatus is not limited to the above-described embodiment. However, it is preferable that the transport mechanism holds the transparent plate by contacting the edge without touching the cleaned surface of the transparent plate, whereby it is possible to suppress adhesion of foreign matter to the cleaned surface of the transparent plate by the transport mechanism.

In the above embodiment, the transparent plate inspection apparatus uses the belt conveyor only when it is received from the foreign substance removal mechanism and is transported to the inspection section. However, when the inspection is finished and then discharged outside the transparent plate inspection apparatus, You can.

In the embodiment described above, the transparent plate inspection apparatuses have been inspected on the surface of the transparent plate P using a camera or the like, but the present invention is not limited to this and other inspection methods may be used.

In the above embodiment, the transparent plate inspecting apparatus inspects the surface of the transparent plate P using four cameras or the like, but the present invention is not limited to this, and it is possible to inspect the transparent plate P using three or less cameras You can.

In the foreign substance removing apparatus of the embodiment, the foreign substances on the surface of the pressure roller are intermittently removed by the adhesive tape. However, the present invention is not limited to this, and the foreign matter on the surface of the pressure roller may be always removed.

In the above embodiment, the cleaning apparatus is configured to clean using a cleaning cloth. However, the present invention is not limited to this, and another cleaning method such as a brush may be employed.

In the above-described embodiment, a configuration including two cleaning devices and an inverting device is adopted, but the present invention is not limited to this configuration, and a configuration capable of cleaning both surfaces simultaneously may be employed.

INDUSTRIAL APPLICABILITY The cleaning device and the transparent plate cleaning inspection system of the present invention can be suitably used for cleaning a transparent plate such as a glass substrate used in a display device of a portable device.

10A: First cleaning device
10B: Second cleaning device
30: Reversing device
50: foreign matter removing device
70: Transparent plate inspection device
70h: housing
72:
75: Stopper with foreign substance
80:
81: First conveying member
83: lifting member
84:
85:
85a: Tapered surface
88: second conveying member
89: Support
90:
P: Transparent plate
X: Transport direction of the transparent plate

Claims (16)

A transparent plate inspection apparatus for inspecting a transparent plate,
A housing having an inlet and an outlet for the transparent plate,
A transport mechanism for transporting the transparent plate from the refill inlet to the refill outlet,
An inspection unit for inspecting the transparent plate carried by the transport mechanism, and
And a foreign matter adhering member for preventing foreign matter from adhering to the transparent plate inside the housing
And,
Wherein the foreign substance adhering blocking mechanism has a pressing mechanism for increasing the internal pressure of the housing with respect to the external air pressure,
Wherein the pressure mechanism includes a feeding mechanism for sending air outside the housing to the inside of the housing and a filter for blocking foreign matter contained in air sent by the feeding mechanism from entering the housing,
Wherein the transport mechanism transports the transparent plate without touching the front and back surfaces of the transparent plate and contacts the edge of the transparent plate to hold the transparent plate,
Wherein,
A first conveying member for conveying while contacting the edge of the transparent plate;
A lifting member for lifting and lifting the transparent plate conveyed by the first conveying member while contacting the edge of the transparent plate,
And a second conveying member that receives the transparent plate raised by the lifting member while contacting the edge of the transparent plate and conveys the transparent plate to the inspection region of the inspection unit,
Wherein the lifting member comprises a suction portion for suctioning the upper surface of the transparent plate conveyed from the first conveying member and a suction portion for suctioning the upper edge of the transparent plate to be sucked by the suction portion, And a positioning unit
Wherein the plurality of positioning portions have a tapered surface contacting the edge of the transparent plate so as to prevent contact between the suction portion and the upper surface of the transparent plate,
Transparent plate inspection device. The method according to claim 1,
Wherein the feeding mechanism of the pressurizing mechanism feeds air on the transparent plate so as to flow foreign matter adhered on the transparent plate conveyed by the conveying mechanism. The method according to claim 1,
Wherein the pressing mechanism is provided on the upper portion of the housing. The method according to claim 1,
Wherein the foreign substance adhesion prevention mechanism has a delivery mechanism provided inside the housing and configured to discharge air from at least one of the inlet and outlet ports to the outside of the housing. The method according to claim 1,
Wherein the conveying mechanism has a pair of belt conveyors contacting the edge of the transparent plate and the contact surfaces of the pair of belt conveyors with the transparent plate are inclined to the sides facing each other. The method according to claim 1,
Wherein the transport mechanism includes at least a pair of grippers for contacting the edge of the transparent plate and sandwiching the transparent plate from both sides. A foreign matter removing mechanism for removing foreign substances adhered to the transparent plate, and
The transparent plate inspection apparatus according to claim 1, wherein the transparent plate having foreign substances removed by the foreign substance removing mechanism is inspected
And a transparent plate cleaning inspection system. 8. The method of claim 7,
Further comprising a cleaning device for cleaning at least one of a front surface and a rear surface of the transparent plate. A cleaning device for cleaning at least one of a front surface and a rear surface of the transparent plate, and
The transparent plate inspection device according to claim 1, wherein the transparent plate is cleaned by the cleaning device
And a transparent plate cleaning inspection system. A first cleaning device for cleaning the first surface of the transparent plate,
A reversing device for reversing the transparent plate taken out from the first cleaning device,
A second cleaning device for cleaning the second surface of the transparent plate while conveying the transparent plate inverted by the inverting device,
The transparent plate inspection apparatus according to claim 1, wherein the transparent plate inspection unit inspects the transparent plate whose both surfaces are cleaned by the first cleaning apparatus and the second cleaning apparatus
And a transparent plate cleaning inspection system. delete delete delete delete delete delete

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