KR101695287B1 - Touch Panel - Google Patents

Abstract

[0001] The present invention relates to a touch panel capable of increasing the touch sensing sensitivity by changing the electrode structure and increasing the capacitance difference between the touch capacities when the mutual capacitance method is applied for multi-touch, A plurality of scan lines and a plurality of lead-out lines each having a first projecting portion and a second projecting portion corresponding to the sensing portions, and a plurality of scan electrodes and a plurality of lead- A first capacitor formed between the first protrusion of the scan line and the sensing electrode, and a second capacitor formed between the second protrusion of the readout line and the sensing electrode.

Description

The touch panel {Touch Panel}

The present invention relates to a touch panel, and more particularly, to a touch panel capable of increasing the sensitivity of touch by changing the electrode structure and increasing the capacitance difference between before and after touch when applying the mutual capacitance method for multi-touch.

Specific examples of the flat panel display include a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display (FED), an electroluminescent display and a luminescence display device (ELD). These devices commonly use a flat panel display panel for realizing an image. The flat panel display panel has a pair of transparent insulation layers And has a structure in which substrates are bonded together.

Among them, the liquid crystal display device displays an image by adjusting the light transmittance of the liquid crystal using an electric field. To this end, the image display apparatus includes a display panel having a liquid crystal cell, a backlight unit for irradiating the display panel with light, and a drive circuit for driving the liquid crystal cell.

In recent years, there has been an increasing demand for a touch panel capable of recognizing a touch region through a human hand or a separate input means and delivering additional information in response to the touch region. Currently, such a touch panel is applied to the outer surface of a display device.

According to the touch sensing method, a resistance method, a capacitance method, and an infrared sensing prevention are categorized. Recently, in consideration of convenience of manufacturing method and sensing power, recently, a capacitance method is attracting attention.

Hereinafter, a conventional capacitive touch panel will be described with reference to the accompanying drawings.

FIGS. 1A and 1B are cross-sectional views showing a state in which an electric field is applied before and after a touch of a conventional capacitive touch panel, and FIGS. 2A and 2B are equivalent circuit diagrams of FIGS. 1A and 1B.

1A and FIG. 2A, a conventional capacitive touch panel adopts a mutual capacitance type, and includes a plurality of driving electrodes 13 (Tx) formed in different directions on a substrate 10, And an electrode 11 (Rx). An insulating layer 12 is formed between the driving electrode 13 and the sensing electrode 11.

Here, the driving electrode 13 and the sensing electrode 11 are disposed adjacent to each other in a plan view. Accordingly, if a voltage is sequentially applied to the driving electrodes 13 (Tx: Txn, Txn + 1), a fringe field is generated between the sensing electrode 11 (Rx) Whereby the electrostatic capacitor C0 is caught.

1B and 2B, when the touch object is touched by a touch object such as a finger or a pen, the touch object functions as a contact support, a contact capacitance Cf is formed with the sensing electrode 11, A change occurs in the fringe field formed between the driving electrode 11 and the driving electrode 13 so that the value of the electrostatic capacitor formed between the sensing electrode 11 and the driving electrode 13 changes to C0 '.

Accordingly, when a driving voltage is sequentially applied to the driving electrodes 13 at the time of touch, a sensing signal is output to the sensing electrode 11 in proportion to the amount of capacitance change C0-C0 'upon touch and the magnitude of the driving voltage .

In this case, in order to increase the output signal, the capacitance change (C0-C0 ') at the time of touch must be increased. However, in the conventional capacitance type touch panel structure shown in the figure, the fringe field between the sensing electrode and the driving electrode is used The mutual electrostatic capacitance value between the driving electrode and the sensing electrode in practice is small due to a small influence of the fringe field and a small capacitance value to be detected, resulting in low touch sensitivity.

In this way, when the touch sensitivity is low, the larger the distance from the application of the driving voltage of the electrode to the large touch panel where the driving electrode and the sensing electrode are long, the larger the load, The value of the change of the capacitance value is small and the reliability of the touch sensing is degraded.

The conventional capacitive touch panel has the following problems.

Recently, the capacitive method uses a mutual capacitance sensing method to recognize multi-touch.

In this case, when a driving voltage is applied to the driving electrode Tx, a sensing voltage at the time of touching is outputted to the sensing electrode Rx. The capacitance of the hand and each electrode is generated at the touch, and the initial capacitance C0 formed between the driving electrode and the sensing electrode is changed to the sensing capacitance C0 'by the change of the fringe field. Therefore, when a driving signal is applied to the driving electrode at the time of touch, a sensing signal is output to the sensing electrode in proportion to the capacitance change amount during touch and the magnitude of the driving voltage. Most of the currently used touch electrodes use a fringe field. The value of mutual capacitance formed at this time is small because the influence of the fringe field between the driving electrode and the adjacent portion between the sensing electrode is small, The sensitivity is lowered.

In addition, when the touch sensitivity is low, there is a problem that it is difficult to apply the reduction in touch reliability to a large touch panel in which the driving electrode and the sensing electrode are long.

The present invention has been devised to solve the problems described above, and it is an object of the present invention to provide a touch panel capable of increasing the touch detection sensitivity by changing the electrode structure and increasing the capacitance difference between touches when the mutual capacitance method is applied for multi- Well, that is the purpose.

According to an aspect of the present invention, there is provided a touch panel including a plurality of scan lines and a plurality of leads, each of which has a first protrusion and a second protrusion corresponding to each sensing unit, A sensing electrode formed to overlap the first and second protrusions on the sensing unit, a first capacitor formed between the first protrusion of the scan line and the sensing electrode, And a second capacitor formed between the second protrusion of the wiring and the sensing electrode.

The sensing electrode is located above the scan line and the lead-out line.

A first insulating layer may be formed between the sensing electrode and the lead-out wiring, and a second insulating layer may be formed on the sensing electrode. At this time, the scan wiring and the lead-out wiring are formed on the same layer, the first capacitor is formed between the first insulating film, the scan wiring, and the sensing electrode, and the second capacitor includes the first insulating film, And may be formed between the lead-out wiring and the sensing electrode.

Here, the first insulating film may be one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy), and an organic insulating film, and the second insulating film may be a silicon nitride film (SiNx) A nitride oxide film (SiN x O y) and an organic insulating film, or a polarizing plate.

Or may further include a third insulating film between the scan wiring and the lead-out wiring. In this case, the first capacitor is formed between the first insulating film and the third insulating film, the scan wiring and the sensing electrode, and the second capacitor is formed between the second insulating film and the lead-out wiring and the sensing electrode. At this time, the third insulating film is any one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy), and an organic insulating film.

The sensing electrode may be at least one of ITO, IZO, AZO, ZnO, and SnO2.

The scan lines and the lead-out lines may be formed of a transparent electrode conductor or a laminate of a transparent conductor and a metal.

The substrate is any one of a glass, a plastic film, and a metal film.

A scan driver connected to the ends of the plurality of scan lines through a first conductive connection film to sequentially supply scan signals to the plurality of scan lines; And a lead-out driver connected through the conductive connecting film to detect a voltage change or a charge change amount generated by the coupling capacitors of the first capacitor, the sensor capacitor, and the second capacitor when the scan signal is supplied . The first conductive connecting film and the second conductive connecting film are COG (Chip On Glass) or COF (Chip On Film).

The touch panel of the present invention as described above has the following effects.

First, a sensing electrode which overlaps with the scan wiring and the lead-out wiring is further provided between the scan wiring and the lead-out wiring, so that the electrodes are overlapped with each other in the form of a plate so that the capacitance value formed therebetween is large. The change of the capacitance when the same touch object is touched is large, and the touch sensitivity is excellent because it is easy to sense the change.

Second, even in a large-size touch panel in which the scan wiring and the lead-out wiring are long, the change in the capacitance value before and after the touch becomes larger than the load applied to the wirings. In this case, the load of the wiring only affects the delay, and the influence of the sensing on the lead-out wiring is small.

Third, it is easy to apply the on-cell method in which the touch panel is directly formed on the surface of the display panel. In this case, the control is easily performed in such a manner that the control of the scan driver is successively and sequentially applied, so that the drive circuit portion of the touch panel can be directly connected to one side of the display panel. When formed by such an on-cell method, interlocking operation with the signal of the display panel can be performed, which is effective for signal interference control of the display panel.

Fourth, even if multi-touch is performed by the active matrix method, the coupling capacitance applied to the intersection of the touched sensing electrode, the scan electrode, and the lead-out wiring can be individually sensed and detected without ghosting.

1A and 1B are cross-sectional views showing a state in which an electric field is applied before and after a touch of a conventional capacitive touch panel
Figs. 2A and 2B show equivalent circuit diagrams for Figs. 1A and 1B. Fig.
3 is a plan view showing a sensing portion of the touch panel according to the first embodiment of the present invention.
FIGS. 4A and 4B are cross-sectional views taken along lines I to I 'of the touch panel of FIG. 3 according to the first embodiment of the present invention,
FIGS. 5A and 5B are cross-sectional views of the touch panel taken along line I-I 'of FIG. 3 according to the first embodiment of the present invention and its equivalent circuit diagram
6 is an equivalent circuit diagram showing a sensing circuit portion of the touch panel according to the first embodiment of the present invention.
FIG. 7 is a timing chart for driving the sensing circuit portion of FIG.
8 is a graph showing the sensing output voltage according to the sensing electrode size in the touch panel of the present invention
9 is a graph showing the output characteristics of the sensing output voltage according to the capacitance of the capacitor Ccy in the touch panel of the present invention
10 is a block diagram showing a touch panel of the present invention
11 is a plan view showing a sensing portion of the touch panel according to the second embodiment of the present invention.
Figs. 12A and 12B are cross-sectional views illustrating touching on the touch panel along II-II 'line and touching according to the second embodiment of the present invention shown in Fig.

Hereinafter, the touch panel of the present invention will be described in detail with reference to the accompanying drawings.

The touch panel of the present invention is an electrostatic capacitive type in which electrostatic capacitance between electrodes adjacent to each other is sensed by a mutual electrostatic capacitance method, and the presence or absence of a touch is detected by a change in its electrostatic capacitance.

The electrostatic capacity type is largely divided into the self capacitance type and the mutual capacitance type according to the sensing method. The two electrodes are arranged in a direction intersecting with each other, and the capacitance is sensed at the overlapping portion of the two electrodes to sense the sensing of capacitance at the time of touch. There is a problem that the intersections on the line are sensed and the ghost touch is recognized together with the actual touch area. To improve this, the touch panel of the present invention applies a mutual capacitance method so as to sense touch regions by region.

* First Embodiment *

FIG. 3 is a plan view showing a sensing part of the touch panel according to the first embodiment of the present invention. FIG. 4A and FIG. 4B are cross- And FIGS. 5A and 5B are cross-sectional views taken along lines I to I 'of the touch panel of the first embodiment of the present invention shown in FIG. 3, and equivalent circuit diagrams thereof.

3 to 4B, the touch panel according to the first embodiment of the present invention defines a sensing part intersecting each other on a substrate 100, and has a first protrusion 110a and a second protrusion 110b corresponding to the respective sensing parts, A plurality of scan lines 110 and a plurality of lead-out wirings 120 each having a protrusion 120a and a plurality of scan lines 110 formed on the sensing portions, A first capacitor Ccx formed between the first protrusion 110a of the scan line 110 and the sensing electrode 130 and a second capacitor Ccx formed between the second protrusion 120a of the lead- And a second capacitor Ccy formed between the sensing electrode 130 and the sensing electrode 130.

The sensing electrode 130 is positioned above the scan line and the lead-out line. This is for sensing a contact capacitor Css (see FIGS. 5A and 5B) formed between a touch object such as a finger or a pen and the sensing electrode 130 when the touch object is touched.

The scan lines 110 and the lead-out lines 120 are formed on the same layer (formed directly on the substrate in the drawing) on the substrate 100 and are electrically connected to the scan lines 110 and the lead- A first insulating layer 115 is further formed on the first insulating layer 115 and the first insulating layer 115 so as to be sandwiched between the sensing electrode 130 and the first protrusions 110a of the scan wiring 110, 1 capacitor Ccx and a second capacitor Ccy between the sensing electrode 130 and the second protrusion 120a of the lead-out wiring 120 are formed.

The sensing electrode 130 is formed on the first insulating layer 115 and the second insulating layer 125 is formed to protect the sensing electrode 130.

Here, the first insulating layer 115 may be one of a silicon nitride (SiNx), a silicon oxide (SiOx), a silicon nitride (SiNxOy), and an organic insulating layer and the second insulating layer may be a silicon nitride (SiNx) ), A silicon nitride oxide film (SiN x O y), and an organic insulating film, or a polarizing plate that performs a polarizing function of a display panel formed integrally with the touch panel. In the latter case, the polarizing plate formed on the upper side of the display panel may be omitted.

The scan line 110 and the lead-out line 120 are each formed in a line shape in one direction and the sensing electrode 130 is electrically connected to the sensing portion between the scan line 110 and the lead- Since the area of the sensing electrode 130 occupies most of the area on the substrate 100, the sensing electrode 130 is formed of a transparent conductor. That is, when the touch panel according to the second embodiment of the present invention is applied to the upper side of the display panel, the sensing electrode 130 prevents the aperture ratio from lowering. In this case, the sensing electrode 130 is at least one of ITO (indium tin oxide), IZO (indium zinc oxide), AZO (antimony zinc oxide), ZnO, and SnO2.

For example, when a touch is performed using a finger, the threshold value of the sensing electrode 130 is about 0.7 cm or less .

The scan line 110 and the lead-out line 120 may be formed of a transparent electrode conductor or may be a laminate of a transparent conductor and a metal.

In the touch panel according to the first embodiment of the present invention, the scan wiring 110 and the lead-out wiring 120 are formed on the same layer. In a portion where the two wirings cross each other, The lead-out wiring 120 is formed by separating the wiring 110 from the top and the bottom of the wiring 110 and the connection pattern 140 formed on the same layer as the sensing electrode 130 is formed on the separated upper and lower lead- And connects the connection pattern 140 and the separated upper and lower lead-out wirings 120 through the contact holes 150. [ In this case, the contact hole 150 may be formed in the first insulating layer 115.

On the other hand, the substrate 100 is one of a glass, a plastic film, and a metal film. For example, in the case of glass, it is possible to form the structure of the touch panel (structure of the scan wiring or more) by omitting a separate substrate on the surface of a liquid crystal display panel or other display panel in an on-cell manner will be. Of course, it is also possible to form the touch panel by an add-on method other than the on-cell method other than the display panel, in an attaching manner separately from the display panel.

The operation of the touch panel according to the first embodiment is as follows.

4A and 4B, capacitors of the first capacitor Ccx and the second capacitor Ccy are formed between the scan line 110 and the lead-out line 120, and a touch is applied 5A and 5B, a contact capacitor Css is additionally formed between the touch object and the sensing electrode 130. In this case, That is, when there is no touch, the sensing electrode 130 acts as a kind of resistance, and when there is a touch, a contact capacitor Css is formed between the sensing electrode 130 and the touch object.

Therefore, as shown in FIGS. 5A and 5B, when the scan signal is applied to the corresponding scan wiring, the voltage at the node A shows a lower voltage in the case where there is no touch by the contact capacitor Css at the time of touch.

FIG. 6 is an equivalent circuit diagram showing a sensing circuit portion of the touch panel according to the first embodiment of the present invention, and FIG. 7 is a timing chart for driving the sensing circuit portion of FIG.

6, a sensing circuit for detecting a signal from the lead-out wiring includes an amplifier Amp for receiving a signal of the lead-out wiring and a reference voltage at an input terminal, and an output terminal of the amplifier First and second switches sw1 and sw2 connected in parallel to an output terminal of the amplifier and connected to the amplifier switch sr in parallel with the amplifier switch sr, And first and second reference capacitors C1 and C2 having one ends connected to the first and second switches sw1 and sw2 and the other end grounded.

The operation of the sensing circuit is as follows.

7, the amplifier switch sr is first turned on for t1, the readout wiring 120 maintains the value of the reference voltage Vref, and the signal stored in the amplifier capacitor Cro is reset (reset).

Then, at time t2, a signal is applied to the first switch sw1 after a while after the amplifier switch sr is turned off. At this time, the voltage signal V1 is stored in the first reference capacitor C1 on the side of the lead-out wiring 120 of the above-described touch panel. When the scan signal Sn is applied to the scan line of the n-th line, the voltage Va at the node A between the first and second capacitors of the sensing unit of the touch panel rises, and depending on the presence or absence of the contact capacitor Css The voltage applied to the lead-out wiring 120 is changed. The voltage at this time is stored in the amplifier capacitor (Cro), and the on-state voltage V2 of the switch second switch (sw2) is stored in the second reference capacitor (C2).

After the second switch sw2 is turned off, the scan voltage falls to a low level.

The signals stored in the first and second reference capacitors C1 and C2 are then transferred to an analog-to-digital converter (ADC). On / during off, the scan voltage, respectively Vsh, Vsl when the (Vsl is a low voltage applied to the scanning wiring, Vsh at a high voltage applied to the scanning wiring) sensing the output voltage _{ΔVout (= V 1 - V 2} ) are: same.

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8 is a graph showing a sensed output voltage according to sensing electrode size in the touch panel of the present invention.

FIG. 8 shows the result of calculating the voltage output from the equivalent circuit of the sensing circuit portion of FIG.

For example, the first and second capacitors Ccx and Ccy and the amplifier capacitor Cro are both set to 1 pF, and the row scan voltage Vsl applied to the scan line is 0V.

8, the output characteristic of the sensing circuit portion is proportional to the value of the capacitance of the sensing electrode 130 and increases in proportion to the magnitude of the high voltage Vsh applied to the scan wiring Able to know.

9 is a graph showing the output characteristics of the sensing output voltage according to the capacitance of the capacitor Ccy in the touch panel of the present invention.

As shown in FIG. 9, the output characteristics according to the capacitance of the second capacitor Ccy between the sensing electrode and the lead-out wiring are compared as follows.

In this case, the high scan voltage Vsh and the low scan voltage Vsl are 5 V and 0 V, respectively, and the capacitance of the contact capacitor Css is 1 pF.

According to the graph of FIG. 9, when the capacitances of the first and second capacitors Ccx and Ccy are the same, the value of the sensing output voltage (.DELTA.Vout) output from the sensing circuit portion can be detected most effectively .

10 is a block diagram showing a touch panel of the present invention.

10, the touch panel of the present invention is connected to the ends of the plurality of scan wirings 110 through a first conductive connection film (not shown) for driving the plurality of scan wirings 110 The scan driver 210 is connected to the ends of the plurality of lead-out wirings 120 through a second conductive connecting film (not shown) A readout driver 220 for detecting a voltage change or a charge change amount generated by the coupling capacitance between the first capacitor Ccx and the second capacitor Ccy and the scan driver 210 and the lead- And a controller 230 for controlling them.

The sensing circuit portion and the analog-to-digital converter (ADC) may be formed on the lead-out driver 220 side.

Here, the first conductive connecting film and the second conductive connecting film are COG (Chip On Glass) or COF (Chip On Film).

The touch panel shown in Fig. 10 is an equivalent circuit applied to the second embodiment, which will be described later, including the above-described first embodiment. The touch panel includes a scan line 110 and a lead- A wiring 120 and a sensing electrode 130 are formed between the scan wiring and the lead-out wiring and the first and second sensing electrodes 130 and 130 are formed between the sensing electrode 130 and the scan wiring 110 and the lead- 2 capacitors Ccx and Ccy.

The scan driver 210 sequentially applies a driving signal to a plurality of scan lines 110. When a scan signal is applied, a sensing signal sensed by each lead-out line 120 is applied to the lead-out driver 120, . ≪ / RTI > The scan driver 210 and the lead-out driver 120 are driven by the controller 230. The controller 230 controls the drive IC 210 including an algorithm for coordinate detection and an interface for transmitting a coordinate signal to the system. .

The touch panel according to the first embodiment described above shows an example in which the scan wiring and the lead-out wiring are formed on the same layer in order to reduce the number of masks. In this case, however, there is a possibility that the load becomes large at the intersection and the delay of the signal becomes large.

In order to prevent this, an example in which the scan wiring and the lead-out wiring are formed on different layers will be described.

* Second Embodiment *

FIG. 11 is a plan view of a sensing unit of a touch panel according to a second embodiment of the present invention. FIG. 12A and FIG. 12B are views showing touch and touch of a touch panel according to a second embodiment of the present invention, Sectional view taken along line II of FIG.

The touch panel according to the second embodiment of the present invention includes a plurality of scan lines 310 having a first protrusion portion and a second protrusion portion corresponding to the respective sensing portions, And a plurality of lead-out wirings 320, a sensing electrode 330 formed to overlap the first and second protrusions on the sensing portions, And a second capacitor Ccy formed between the second protrusion 320a of the lead-out wiring 320 and the sensing electrode 330. The first capacitor Ccx is formed between the sensing electrode 330 and the second capacitor Ccx.

The scan line 310 is formed on the substrate 300 and a first insulating layer 305 is formed to cover the scan line 310. The first insulating layer 305 is formed with the lead- A wiring 320 is formed and a second insulating layer 315 is further formed to cover the lead-out wiring 320. The sensing electrode 330 is formed on the second insulating layer 315, A third insulating layer 325 is formed on the second insulating layer 315 including the sensing electrode 330 so as to protect the first insulating layer 330.

As described in the first embodiment, the first and second insulating films 305 and 315 are any one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy), and an organic insulating film, The third insulating film 325 may be any one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy) and an organic insulating film, or a polarizing plate that performs a polarizing function of a display panel formed integrally with the touch panel . In the latter case, the polarizing plate formed on the upper side of the display panel may be omitted.

The second embodiment is different from the first embodiment in that the second insulating film is replaced with a third insulating film and the first insulating film is formed to have a first interlayer difference between the lead- And the second insulating film. The remaining features except for these structural features, for example, the planar arrangement of the scan wiring, the lead-out wiring, the sensing electrode, or their components are the same as those of the first embodiment And description of the same portions will be omitted.

100, 300: substrate 110, 310: scan wiring
120, 320: lead-out wiring 130, 330: sensing electrode
140: connection pattern 150: contact hole
115, 305: first insulating film 125, 315: second insulating film
210: Scan driver IC 220: Lead-out driver IC
230: controller 325: third insulating film

Claims (14)

A plurality of scan lines and a plurality of lead-out lines each having a first protrusion and a second protrusion corresponding to the respective sensing portions,
A sensing electrode formed on each of the sensing units to overlap the first and second protrusions;
A first capacitor formed by a first protrusion of the scan line, a sensing electrode, and a layer between the first protrusion and the sensing electrode;
And a second capacitor formed by a second protrusion of the lead-out wiring and a layer between the sensing electrode and the second protrusion and the sensing electrode. The method according to claim 1,
Wherein the sensing electrode is positioned above the scan wiring and the lead-out wiring. 3. The method of claim 2,
A first insulating film between the sensing electrode and the lead-out wiring,
And a second insulating layer on the sensing electrode. The method of claim 3,
Wherein the scan wiring and the lead-out wiring are formed on the same layer,
Wherein the first capacitor includes a first protrusion and a sensing electrode of the scan line overlapped with each other and the first insulation film between the scan line and the sensing electrode,
Wherein the second capacitor includes the first insulating film between the second projecting portion of the lead-out wiring and the sensing electrode overlapping each other, and between the lead-out wiring and the sensing electrode. The method of claim 3,
Wherein the first insulating film is made of any one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy), and an organic insulating film. The method of claim 3,
Wherein the second insulating film is any one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy), and an organic insulating film or a polarizing plate. The method of claim 3,
Further comprising a third insulating film between the scan wiring and the lead-out wiring. 8. The method of claim 7,
Wherein the first capacitor includes a first protrusion and a sensing electrode of the scan wiring superimposed on each other and the first insulation film and the third insulation film between the scan wiring and the sensing electrode,
Wherein the second capacitor includes the second insulating film between the second projecting portion and the sensing electrode of the lead-out wiring overlapping each other, and between the lead-out wiring and the sensing electrode. 8. The method of claim 7,
Wherein the third insulating film is any one of a silicon nitride film (SiNx), a silicon oxide film (SiOx), a silicon nitride oxide film (SiNxOy), and an organic insulating film. The method according to claim 1,
Wherein the sensing electrode comprises at least one of ITO, IZO, AZO, ZnO, and SnO2. The method according to claim 1,
Wherein the scan wiring and the lead-out wiring are formed of a transparent electrode conductor or a laminate of a transparent conductor and a metal, respectively. The method according to claim 1,
Wherein the substrate is one of a glass, a plastic film, and a metal film. The method according to claim 1,
A scan driver connected to the ends of the plurality of scan lines through a first conductive connection film and sequentially supplying a scan signal to the plurality of scan lines;
A plurality of lead-out wires connected to the ends of the plurality of lead-out wirings through a second conductive connecting film to detect a voltage change or a charge change amount generated by the coupling capacitors of the first capacitor and the second capacitor at the time of supplying the scan signal And a lead-out driver. 14. The method of claim 13,
Wherein the first conductive connecting film and the second conductive connecting film are COG (Chip On Glass) or COF (Chip On Film).

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