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KR101628864B9 - 기판 이송 장치 - Google Patents

기판 이송 장치

Info

Publication number
KR101628864B9
KR101628864B9 KR1020140075800A KR20140075800A KR101628864B9 KR 101628864 B9 KR101628864 B9 KR 101628864B9 KR 1020140075800 A KR1020140075800 A KR 1020140075800A KR 20140075800 A KR20140075800 A KR 20140075800A KR 101628864 B9 KR101628864 B9 KR 101628864B9
Authority
KR
South Korea
Prior art keywords
transfer device
substrate transfer
substrate
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020140075800A
Other languages
English (en)
Other versions
KR20150146035A (ko
KR101628864B1 (ko
Inventor
김기범
장재환
황철주
Original Assignee
주성엔지니어링(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주성엔지니어링(주) filed Critical 주성엔지니어링(주)
Priority to KR1020140075800A priority Critical patent/KR101628864B1/ko
Publication of KR20150146035A publication Critical patent/KR20150146035A/ko
Application granted granted Critical
Publication of KR101628864B1 publication Critical patent/KR101628864B1/ko
Publication of KR101628864B9 publication Critical patent/KR101628864B9/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020140075800A 2014-06-20 2014-06-20 기판 이송 장치 Active KR101628864B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140075800A KR101628864B1 (ko) 2014-06-20 2014-06-20 기판 이송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140075800A KR101628864B1 (ko) 2014-06-20 2014-06-20 기판 이송 장치

Publications (3)

Publication Number Publication Date
KR20150146035A KR20150146035A (ko) 2015-12-31
KR101628864B1 KR101628864B1 (ko) 2016-06-10
KR101628864B9 true KR101628864B9 (ko) 2024-12-20

Family

ID=55128793

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140075800A Active KR101628864B1 (ko) 2014-06-20 2014-06-20 기판 이송 장치

Country Status (1)

Country Link
KR (1) KR101628864B1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101964208B1 (ko) * 2016-12-23 2019-04-02 무진전자 주식회사 웨이퍼 고정 장치의 상태를 검출하는 방법
KR101991268B1 (ko) * 2017-09-27 2019-06-20 주식회사 탑 엔지니어링 스크라이빙 장치 및 스크라이빙 방법
KR102383806B1 (ko) * 2020-04-17 2022-04-05 현대제철 주식회사 벨트컨베이어 사행 조정 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06312821A (ja) * 1993-04-28 1994-11-08 Yoshino Rubber Kogyo Kk ホース型コンベアベルト緊張装置
KR102019405B1 (ko) * 2012-08-13 2019-11-04 주성엔지니어링(주) 기판 처리 장치 및 기판 처리 방법

Also Published As

Publication number Publication date
KR20150146035A (ko) 2015-12-31
KR101628864B1 (ko) 2016-06-10

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