KR101620639B1 - Alloy Deposition Apparatus - Google Patents

Abstract

There is provided an alloy coating apparatus for coating (depositing) an alloy film on an object.

The alloy coating apparatus includes a plurality of evaporation vessels for generating metal vapor and a plurality of evaporation vessels connected to the evaporation vessels, wherein the metal vapor inflow space and the metal vapor are mixed with each other to be deposited and formed as an alloy film of the object to be coated And a steam mixing unit configured such that at least a part of the steam mixing space discharged into the alloy steam is blocked and configured for steam mixing. Preferably, the steam mixing unit may include a slit for blocking the steam inlet space and the steam mixing space.

According to the present invention, it is possible to realize smooth mixing of vaporized metal vapor from two evaporation sources, and in particular to provide an improved coating material for preventing deposition deviation of an object to be coated and ultimately uniformizing the thickness or component distribution of the alloy coating Effect can be obtained.

Alloy film, mixed induction, deposition, uniform component distribution, uniform thickness distribution

Description

{Alloy Deposition Apparatus}

The present invention relates to an alloy coating apparatus for coating (depositing) an alloy coating film made of metals of different components on a coating object, more particularly, And more particularly to an alloy coating apparatus in which the longitudinal directional deposition deviation of an object to be coated is prevented and ultimately the thickness or the component distribution of the alloy coating is uniformly uniform.

Vacuum coating (vapor deposition) is one of physical vapor deposition techniques that use vacuum to coat materials such as zinc, aluminum, silver, gold, copper, and tin into materials such as metal, glass, and plastic. Since the physical vapor deposition technique does not affect the environment compared to the conventional wet plating, its application is gradually increasing to meet the trend of emphasizing the eco-friendly manufacturing environment.

As a method for producing a thin film by vacuum coating (vapor deposition), a resistance heating type vacuum deposition, an induction heating type vacuum deposition or an electron beam heating type vacuum deposition method and the like are known.

In contrast, when the alloy is used as compared with a single metal, the corrosion resistance is increased due to the unique properties of the alloy. In this case, after two evaporation sources are positioned close to each other so as to facilitate alloying, Thereby forming a film.

However, in the case of forming the alloy film by the above-described method, when the composition of the object to be coated, that is, the alloy of the alloy formed on the substrate is largely varied in the width or the longitudinal direction of the object, The distribution becomes larger.

Another method for forming an alloy film is to evaporate the parent alloy by using the parent alloy as a vaporizing material. This is to form a film on an object (substrate) to be coated by placing a parent alloy in which an alloy component is predetermined in an evaporation source, It is possible to coat easily. However, it is not easy to form an alloy film because of the difference in vapor pressure or the fact that two alloys are easily separated when they are melted.

Another problem that arises when the alloy coating is formed using vacuum deposition is that the evaporation mass adheres to the substrate or clusters are formed to deteriorate the surface appearance, and in particular, the evaporation instability of the metal vapor and The variation of the evaporation rate caused by the variation of the composition of the alloy forming the film as well as the variation of the thickness distribution.

In the meantime, Patent Application No. 2006-0135674, which includes a part of inventors of the present invention and applied for a patent in the Republic of Korea, discloses a method of controlling the composition and thickness distribution of an alloy by providing a nozzle type distribution slit for solving the above- There is a problem that clogging of the nozzle type distribution slit easily occurs.

That is, the clogging of the nozzle-shaped distribution slit is easily generated, the period of use of the evaporation source is shortened, and a coating failure occurs due to clogging of the nozzle.

Accordingly, the applicant of the present invention has proposed the present invention, which facilitates the formation of an alloy film not of a single metal, and in particular, prevents the length, the width direction component and the thickness variation of the object (substrate, steel plate, etc.).

It is an object of the present invention to solve the above-mentioned problems of the prior art, and it is an object of the present invention to provide a vapor deposition apparatus which can smoothly mix vaporized metal vapor from two evaporation sources, prevent deposition deviation of an object to be coated, And to provide an alloy coating apparatus in which the film thickness or the component distribution is made uniform.

According to an aspect of the present invention, there is provided an evaporation apparatus including: a plurality of evaporation vessels for generating different metal vapors; And

Wherein at least a part of the vapor mixing space discharged from the alloy vapor, which is mixed with the metal vapor inflow space and the metal vapor and is deposited as an alloy film of the object to be coated, is interrupted and mixed with the steam mixture unit;

And an alloy coating apparatus comprising the same.

Preferably, the apparatus further comprises a connection pipe connected between the evaporation vessel and the steam mixing unit, wherein the connection pipe further comprises a vapor uniform discharge means provided so as to realize a uniform discharge of the metal vapor.

More preferably, the steam mixing unit comprises: a unit body, which is connected to both sides of a lower portion of a connection pipe connected to the evaporation vessel; and at least a part of the steam introduction space and the steam mixing space, And a slit for separating and forming the slits.

At this time, the slits are arranged vertically apart from the unit body connection point of the coupling pipe while being spaced apart from each other in the unit body of the steam mixing unit, so that the steam passing gap is formed adjacent to the unit body surface so as to allow uniform discharge of the alloy vapor .

More preferably, the slit further includes a cut-off surface formed at both lower edges of the slit to control the steam flow.

The slit may be vertically installed on both sides of a lower portion of a slit mount through which an alloy vapor outlet is formed, mounted on an opening formed on a unit body of the steam mixing unit, and a sealing sheet may be interposed between the slit mount and the unit body. have.

In addition, the apparatus further includes an alloy vapor nozzle unit disposed on the alloy vapor outlet of the slit mount and equipped with a nozzle orifice for discharging alloy vapor deposited on the object to be coated.

Preferably, the apparatus further comprises a screen member interposed between the alloy vapor nozzle unit and the slit mounting member mounted on the steam mixing unit or the mixing unit.

More preferably, the apparatus further comprises a vapor guide unit interposed between the screen member and the nozzle unit and having a vapor passage opening.

At this time, the evaporation vessel, the connection pipe, the steam mixing unit, and the guide unit may be further provided with heating means disposed at least close to the evaporation vessel and the connection pipe.

More preferably, the cut length d of the slit cut surface is in the range of 1/6 - 1/12 of the slit length D.

According to the alloy coating apparatus of the present invention, in addition to uniformly inducing the supply of the metal vapor from the evaporation vessel to the vapor mixing unit (tank), the mixing ability of each metal vapor introduced into the vapor mixing unit is maximized, , It is possible to suppress the concentration of the film on the central portion of the object to be coated, thereby providing an effect of highly uniformizing the composition or the thickness distribution of the film formed on the object to be coated.

In addition, since it is deposited on the object to be coated after passing through the screen member provided on the lower side of the nozzle unit, the mixing ability of the metal vapor is further improved and the clogging of the nozzle by the vapor mass is prevented.

Therefore, in the case of the alloy coating apparatus of the present invention, it is possible to easily form a wide range of alloy coatings such as a steel sheet having a width, because a coating having a uniform component or thickness distribution is formed by vapor deposition. As a result, the present invention will improve the quality of the coating product.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 and 2, an overall configuration of an alloy coating apparatus 1 according to the present invention is shown in an assembled configuration and an exploded perspective view, respectively. Fig. 1 is an enlarged view of the assembling structure of Fig.

1 and 2, the alloy coating apparatus 1 of the present invention includes a plurality of evaporation vessels 30 that generate largely different metal vapors g1 and g2, An alloy vapor (G), which is in association with the evaporation vessel and is vapor-deposited on the alloy film (12) of the coating object (10) And a steam mixing unit (50) for separating and forming at least a part of the vapor mixing space (A2).

For example, in the alloy coating apparatus 1 of the present invention, when an alloy coating 12, for example, a Zn-Mg alloy is deposited on the coating object 10, that is, a substrate or a steel sheet, And the evaporation vessels 30 provided for a plurality of, for example, alloy numbers, in which the molten metal 32 (34) of the component is stored and maintained at a constant temperature, respectively.

The gaseous vapor (g1 ', g2' in FIG. 1) is mixed and discharged in a single steam mixing unit 50 associated with each of a plurality of evaporation vessels 30, Is deposited and formed on the surface of the object to be coated (10) with the alloy coating (12).

1, the object to be coated 10, for example, a substrate and the like are schematically shown in the drawings, but they are mounted on a substrate holder 14 (in a cylindrical shape) (G) that is evaporated as it evaporates can be deposited, and between the substrate and the apparatus of the present invention, the deposition of the unstable alloy vapor (G) Can be disposed.

Further, as shown by a dotted line in Fig. 1, it is preferable to form at least a region where the alloy vapor is deposited and coated on the surface of the object to be coated, in a vacuum atmosphere (vacuum chamber 4).

Needless to say, the size of the vacuum chamber 4 for the vacuum atmosphere is not limited as shown in FIG.

Therefore, in the alloy coating apparatus 1 of the present invention, the metal vapors g1 and g2 of the different components discharged from the evaporation vessel 30 are mixed in the vapor mixing unit 50, At least a portion of the vapor inflow space A1 into which the respective metal vapors are introduced and the vapor mixture space A2 into which the metal vapors are mixed is intercepted so as to separate them, thereby enhancing the vapor mixing property.

Preferably, a connection pipe 70 (which may be a tube or a duct) is connected between the evaporation vessel 30 and the steam mixing unit 50, and a uniform discharge of the metal vapor is provided to the connection pipe 70 Uniform discharge means 72 provided for implementation.

2 and 3, the steam uniform discharge means 72 is mounted on the upper side of the coupling pipe 72 to the coupling ring 72a provided in the pipe close to the steam mixing unit 50 Gt; ORIFICE < / RTI >

That is, when the metal vapor g1 (g2) generated by heating by the heating means 150 in the evaporation vessel 30 is supplied to the vapor mixing unit 50 through the connecting pipe 70, The discharge of the metal vapor generated in the process may not be uniform.

Therefore, in the present invention, as shown in FIG. 1, the metal vapor passes through the orifice, which is the steam uniform discharge means 72, immediately before flowing into the steam mixing unit 50 through the connection pipe 70, The metal vapor g1 discharged into the steam mixing unit is uniformly discharged and flows into the steam mixing unit 50. [

3, the ratio of the inner diameter S1 of the orifice which is the vapor uniform discharge means 72 to the inner diameter S2 of the connecting tube S2 is made smaller than 1/2.

For example, if the ratio of the inner diameter of the orifice to the inner diameter of the connecting tube is larger than 1/2, the effect of uniformly discharging the metal vapor is small, so that it is preferable to maintain the above ratio.

Next, as shown in Figs. 1 to 3, in the alloy coating apparatus 1 of the present invention, the vapor mixing unit 50 has a connecting pipe 70 connected to the vaporizing container 30, A unit body 52 having a planar elliptical shape and having a thickness to be connected to each of the unit bodies 52 and at least a part of the vapor inflow space A1 and the vapor mixing space A2 is disposed at both sides of the unit body 52, And a slit (54) for making the slit.

For example, the slits 54 may be in the form of a plate that is installed vertically inside the connection pipe 70, which is spaced apart from and connected to the bottom of the unit body 52 of the steam mixing unit 50 .

3, the slit 54 is in the form of a vertical plate, and the ends of the slit 54 are spaced apart from the bottom of the body 52 of the steam mixing unit 50, A phosphorus vapor passage gap A3 is formed.

3, vapors of Zn and Mg, which are generated in the evaporation vessel 30, for example, g1 and g2, are connected to the body 52 of the vapor mixing unit 50, And then flows into the inflow space A1 side by the slit 54 first.

Then, steam flows from the bottom of the inflow space A1 to the upper layer, and the steam collides with the inflow space and is mixed in the steam mixing space through the steam passage gap A3.

As a result, the slits 54 of the present invention are formed in such a manner that the metal vapors introduced into the steam mixing unit are remnantly flown in the inflow space and then discharged to the steam mixing space, A3), the central portion of the object to be coated 10 is prevented from concentrating the deposition of alloy vapor, thereby preventing the deposition deviation in the longitudinal direction or the width direction of the object to be coated .

In addition, steam mixing will be improved in the steam mixing space through intergranular collision and vortex during steam flow in the steam inflow space where a part is separated and blocked by the slit.

Even if the inflow amount of the metal vapor introduced into the vapor mixing space A1 formed by the slit is unstable, the metal vapor flows only through the narrow vapor passage gap A3 between the slit end and the unit body side and the bottom, So that the metal vapor always flows into the vapor mixing space at a constant rate and at a constant rate in a stable state, resulting in uniform distribution of the composition and thickness distribution of the coating film 12 deposited on the coating object.

2 and 3, the slit 54 of the present invention may further include a cut-away surface 56 provided at both lower edges thereof to control the flow of steam.

Therefore, as shown in FIG. 3, since the cut-off surface 56 provides a wide space by the cut-off portion A3 of the metal vapors g1 and g2 through which the metal vapor g2 passes, Since the position of the incision surface is located on both sides of the lower edge of the slit, the metal vapor is prevented from moving toward the center of the object to be coated, Is introduced into the mixing space (A2) from the outer periphery rather than from the peripheral portion, which prevents the formation of the pericardium in the central portion of the object to be coated.

In this case, when the cut area d * d (d is the cut length and width of the slit edge) of the slit cut-off surface 56, d is in the range of 1/6 to 1/12 of the length D of the slit 54 .

For example, when the cut area d * d of the slit cut surface 56 is excessively large, that is, when the cut length d of the slit 54 is 1 / 6, since the metal vapors are easily discharged through this portion, the role of the vapor passage gap A3 can not be expected, and conversely, the cut area d * d of the slit incision surface 56 is excessively large In other words, when the cut length (width) d of the slit 54 is smaller than 1/12 of the length D of the slit 54, the passage of the metal vapor through this portion is excessively limited, There is a problem that does not exist.

1 and 2, the slit 54 is mounted to an opening 58 formed on the unit body 52 of the steam mixing unit 50 and is connected to an alloy vapor outlet (not shown) 60 may be formed on the lower surface of the slit mounting hole 62.

That is, the slit can be attached and detached via a mounting hole on the steam mixing unit of the apparatus, and it is possible to adjust the size of the slit to adjust the cut-off area of the steam passage gap A3 and the cut- .

At this time, preferably, a sealing sheet 64 is interposed between the slit mounting hole 62 and the body 52 of the steam mixing unit to prevent leakage of the steam.

2, a nozzle hole (not shown) for discharging the alloy vapor G deposited on the substantially object 10 to be coated, which is disposed on the alloy vapor outlet 60 of the slit mount 62, And an alloy vapor nozzle unit 90 provided with a plurality of slits 92 (elongated slits).

The alloy vapor nozzle unit 90 is positioned such that the alloy vapors G ejected from the nozzles 92 are positioned close to the immediate lower portion of the object to be coated 10 on the lower face of the object 10 to be coated So that the deposition can be smoothly and uniformly formed.

That is, the nozzle orifice 92 will enable the alloy vapor to be finally discharged uniformly from the lower portion of the object to be coated.

Next, preferably, between the vapor nozzle unit 90 and the steam mixing unit 50 is provided a vapor passage opening (not shown) which provides a passage space for the alloy vaporizer to further provide a mixing space for the alloy vapor, And a steam guide unit 130 provided with a steam supply unit 132.

At this time, although the guide unit 130 is not shown in the drawing, it may have a flange portion on the upper and lower sides, and may be integrally assembled with the unit body portion of the nozzle unit and the slit mount on the mixing unit.

More preferably, the screen member 110 is interposed between the alloy vapor nozzle unit 90 and the slit mount 62 mounted on the steam mixing unit 50 or the mixing unit.

Accordingly, such a screen member 110 will solve the problem of clogging the nozzle opening portion by the vapor mass when the vapor is mixed with the nozzle and the nozzle is already provided.

That is, the alloy vapors collide with the screen member while passing through the screen member 110, thereby crushing the hammered metal lumps and inducing the alloy vapors to mix more uniformly.

Eventually, the alloy vapors passing through the screen member will be more uniformly mixed and deposited on the coating object to make the composition distribution or thickness distribution of the coating more uniform.

On the other hand, as shown in Figs. 1 and 2, in the alloy coating apparatus 1 of the present invention, the alloy vapor mixed with the metal vapor is deposited on the object to be coated to form a film, It is desirable that a heater or a heating means 150 such as a high frequency induction heater is disposed close to the evaporation vessels 30.

More preferably, the steam mixing unit 50 and the guide unit 130, through which the metal vapors g1 and g2 pass, and the metal vapors are mixed and discharged into the alloy vapor G, Means 150 are linked.

That is, it is preferable to maintain the temperature even during the movement of the vapor so as not to cause condensation of the vapor or the like due to the temperature drop.

On the other hand, FIG. 4 graphically shows the composition distribution of Mg and the thickness distribution when the Zn-Mg alloy is formed from the alloy film 12 on the object to be coated 10 using the apparatus of the present invention.

For example, as shown in Fig. 1, a Zn-Mg alloy film is formed on an electrogalvanized steel sheet. A galvanized steel sheet (film metabolite (10)) having a thickness of about 0.5 mm is stretched by 70 cm in length and 30 cm in width (Vacuum chamber 4) of FIG. 1 is placed in a vacuum-sealed state in which the vacuum chamber (vacuum chamber 4) is evacuated to vacuum Vacuum evacuation is performed using a pump (not shown) to form an alloy deposition region in a vacuum atmosphere.

At this time, the steam mixing unit 50, the steam guide unit 130 and the nozzle unit 90 are heated to about 700 ° C., and the connecting pipe 70 is heated to 750 ° C. to maintain the temperature constant. The evaporation vessel 30 is heated to 700 DEG C and the Mg evaporation vessel 30 is heated to 725 DEG C to vaporize Zn and Mg metals.

Then, the shutter 170 was disposed between the object to be coated and the vapor nozzle unit to block the alloy vapor for about 10 minutes, and then the shutter was moved to deposit the alloy vapor G on the object to be coated for 10 seconds, Of Zn-10% Mg alloy film is formed.

Therefore, when the Zn-Mg alloy film is formed, as shown in the graph of FIG. 4, when the apparatus of the present invention is used, the Mg content is uniform to 10.5% on average, %. ≪ / RTI >

As a result, the alloy coating apparatus 1 of the present invention makes it possible to uniformly distribute the composition and the thickness distribution of the alloy film of the object to be coated, such as a substrate or a steel sheet, and to maintain the alloy content constant, .

Particularly, such an alloy coating apparatus of the present invention is not structurally complicated, so that facility construction and operation will be convenient.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the following claims And can be changed. However, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

1 is a schematic view showing an alloy coating apparatus according to the present invention

Fig. 2 is an exploded perspective view of Fig.

FIG. 3 is a side view showing a slit of the alloy vapor unit viewed in the direction of 'T' in FIG. 1

4 is a graph showing the distribution of Mg component and the thickness distribution of the alloy coated on the steel sheet through the apparatus of the present invention

Description of the Related Art [0002]

1 .... Alloy coating device 10 .... Coating object

12 .... alloy film 30 .... evaporation vessel

50 .... steam mixing unit 52 .... unit body

54 .... slit 56 .... slit incision surface

62 .... Slit mounting hole 64 .... Sealing sheet

70 .... connector 72 .... steam uniform discharge means

90 .... alloy vapor nozzle unit 92 .... nozzle nozzle

110 .... screen member 130 .... guide unit

150 .... heating means

Claims (11)

A plurality of evaporation vessels (30) for generating metal vapor (g1) (g2); And And a vapor mixing unit (50) connected to each of the evaporation vessels and discharging the mixed metal vapor to an alloy vapor (G) which is mixed with the alloy coating (12) of the coating object (10) The steam mixing unit (50) A unit body (52) connected to both sides of a lower portion of the connection pipe (70) connected to the evaporation container; And The unit body is divided into a metal vapor inflow space A1 through which the metal vapor flows into the unit body and a vapor mixing space A2 into which the introduced metal vapor is mixed, A slit (54) formed in the bottom of the unit body to form a gap to discharge the metal vapor introduced into the metal vapor inflow space into the vapor mixing space; Wherein the alloy coating apparatus comprises: The method according to claim 1, And a connection pipe 70 connected between the evaporation vessel 30 and the steam mixing unit 50. The connection pipe 70 is connected to the steam uniform discharge means 72 provided for the uniform discharge of metal vapor, Further comprising: an alloy coating apparatus comprising: delete The method according to claim 1, The slits 54 are vertically disposed apart from the unit body connection point of the coupling pipe while being spaced apart from each other in the unit body of the steam mixing unit. The slits 54 are disposed adjacent to the unit body surface to allow uniform discharge of the introduced metal vapor. A3). ≪ / RTI > 5. The method of claim 4, Further comprising an incision surface (56) formed at both lower edges of the slit (54) to control the flow of steam. 5. The method of claim 4, The slit 54 is mounted on the opening 58 formed in the upper part of the unit body 52 of the steam mixing unit 50 and is provided with vertical , And a seal sheet (64) is interposed between the slit mount and the unit body. The method according to claim 6, Further comprising an alloy vapor nozzle unit (90) provided with a nozzle orifice (92) disposed on the alloy vapor outlet of the slit mount for discharging an alloy vapor (G) deposited on the object to be coated (10) Alloy coating device. The method according to claim 6, Further comprising a screen member (110) interposed between the alloy vapor nozzle unit (90) and a slit mount which is mounted on the steam mixing unit (50) or the mixing unit. 9. The method of claim 8, Further comprising a vapor guide unit (130) interposed between the screen member and the nozzle unit and having a vapor passage opening (132). The method according to any one of claims 1, 2, and 4 to 9, Further comprising a heating means (150) disposed at least in an evaporation vessel, a connecting pipe, a steam mixing unit, and a guide unit, at least in the evaporation vessel and the connecting pipe. 6. The method of claim 5, Wherein an incision length d of the slit incision surface (56) is in the range of 1/6 - 1/12 of the slit length (D).

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