KR101554223B1 - Continuous supply apparatus of ingot raw material - Google Patents

Abstract

The present invention relates to an ingot raw material continuous feeder for continuously feeding raw materials in a constant amount by using a raw material feed roller rotated by a drive source and a power transmitting means by a predetermined interval in a constant section, A hopper 22 into which a large amount of the raw material 21 is introduced; an auxiliary hopper 24 which is downwardly biased by a spring 23 below the hopper 22; A supply hole 27 formed in the raw material supply roller 26 and provided on the raw material supply roller 26 so as to be in contact with the bottom surface 25 of the auxiliary hopper 24, And a controller 29. The ingot raw material 21 continuously discharged in a constant amount by the raw material feed roller 26 rotating in the interval is fed to the discharge guiding means (30), and a plurality of guide tubes (31, 32, 33) Is fed continuously quantitatively by the crucible (2).

Description

TECHNICAL FIELD [0001] The present invention relates to an ingot raw material continuous feeder,

The present invention relates to an ingot raw material continuous feeder for continuously feeding an ingot growth raw material in a constant quantitative manner, wherein a raw material feed roller having a feed hole of an ""

Generally, an ingot growing apparatus by the Czochralski crystal growth method is a method of growing a silicon ingot (hereinafter referred to as a 'growth furnace'), for example, a crucible provided in a hot zone region A solid material such as polysilicon (or gallium arsenide) and impurities is supplied (supplied), heated and melted by an electric heater to form a silicon melt (Hot Melt), and then a single crystal seed is contacted with the silicon melt A silicon ingot having a predetermined length and a predetermined diameter is obtained.

Stacking for filling the quartz crucible with polysilicon and dopant, Vacuum for maintaining the growth furnace at a high vacuum, Melting for melting the polysilicon, Dipping to bring the melt into contact with the seed → Necking to raise the diameter as much as possible to avoid defects → Shouldering to increase the diameter of the ingot → Body to grow the length of the ingot Growth) → Tailing to reduce the diameter of the ingot → Cool down to cool the ingot. Ingot is grown through various processes.

Chunk poly and / or granule poly are used for the ingot growth raw material, and a predetermined amount of boron or phosphorus is used as the dopant. The boron is used for P-type ingot growth, and phosphorus is used for N-type ingot growth.

Since the raw materials are in a solid state, in order to melt them to form a silicon melt (hot melt), impurities are added to the crucible and the polysilicon masses are stacked in the form of a dome to be stacked and the polysilicon mass, Is filled in the crucible and melted, the volume of the gap formed between the silicon ingot and the lump is reduced.

Further, when the level of the silicon melt is gradually consumed as the ingot grows, and the level (liquid level) is lowered, the level displacement is detected using the distance measuring means while the crucible is elevated by the elevating means so that the silicon melt surface is kept constant However, since it is difficult to precisely control and it is not easy to supply the raw material in a fixed amount, the diameter of the ingot is not uniform, and the concentration of the impurity changes in the direction in which the ingot is pulled up, And the like.

Therefore, in order to grow the ingot uniformly while keeping the quality of the ingot uniform, it is necessary to quantitatively continue the ingot raw material (polysilicon and impurities) by the volume (or the required volume) reduced by the ingot growth You need a continuous supply to make up.

Korean Patent Laid-Open Publication No. 10-2012-0122563 (entitled "Raw material dispenser," issued on Nov. 07, 2012) Korean Patent Registration No. 10-0811989 (entitled "Intermittent Feeding Technique for Increasing Melt Speed of Polysilicon," published on Mar. 10, 2008)

It is an object of the present invention to provide an ingot raw material continuous feeder for continuously feeding ingot raw materials as much as the volume reduced for growing an ingot.

Another object of the present invention is to provide an ingot raw material continuous feeding device for continuously feeding ingot raw materials in a constant amount while rotating a raw material feed roller in which a feed hole having an ""

It is still another object of the present invention to provide a continuous feeding device for an ingot raw material which continuously feeds granule poly, which is mainly used in recent years, at a higher melting rate than that of a poly silicon (Chunk Poly) There is a purpose.

The continuous ingot raw material feeder of the present invention comprises a hopper 22 into which a large amount of the raw material 21 is introduced, an auxiliary hopper 24 which is downwardly biased by a spring 23 under the hopper 22, A raw material supply roller 26 which is provided at the lower portion of the raw material supply roller 26 and is in surface contact with the bottom surface 25 of the auxiliary hopper 24, a supply hole 27 formed in the raw material supply roller 26, A servomotor 28 for rotating the feed roller 26 forward and backward in a predetermined section, and a power transmitting means and a controller 29.

The feed hole 27 is formed in a direction perpendicular to the imaginary axis of the raw material feed roller 26 and has an inlet 27a formed at an upper portion thereof and an outlet 27b formed at a side portion thereof have.

The raw material feed roller 26 is columnar and may further include an arcuate bottom surface 25 of an auxiliary hopper 24 in surface contact with the circumferential surface.

The power transmission means includes a shaft rod 57 projected to both sides of the shaft support member 56, a disk 58 fixed to the inner end of the shaft rod 57, And one end of the link 59 is fixed to the outer end of the shaft rod 57. The other end of the link 59 is fixed to the outer end of the shaft rod 57, A timing pulley 63 fixed to the rotary shaft of the servo motor 28 and a timing belt 64 connecting the timing pulleys 62 and 63 to each other.

A hook body 68 protruding from the timing pulley 62 and a proximity sensor 69 for detecting the hook body 68. [

The raw material supply roller 26 includes shaft members 49 and 50 provided on both sides of the shaft member 49 and 50, shaft rods 51 and 52 projecting from both sides of the shaft members 49 and 50, 51 and 52 are mounted on the shaft support members 54 and 55, respectively.

A part of the inlet 27a flows through the gap 45 formed over the hollow portion 39 of the auxiliary hopper 24 when the ingot raw material 21 flowing into the supply hole 27 of the raw material feed roller 26 flows out ). ≪ / RTI >

A protrusion 40 formed on an outer surface of the auxiliary hopper 24 and a spring 23 coupled to an upper surface of the protrusion 40 and a bottom surface of the hopper support 41, And a step portion 43 of the housing 42 provided at the bottom of the hopper support 41 to which the hopper support 40 is hooked.

The present invention has the effect of continuously supplying a predetermined amount of raw material while rotating the raw material supply roller in which the ""

In order to grow the ingot, the ingot raw material is continuously supplied in a reduced volume, and since the ingot growing raw material is continuously supplied in a constant amount, the productivity of the ingot is greatly improved and the quality is uniformly effected .

The present invention is a very useful invention having an effect of adjusting the size (diameter and / or length) of an ingot by continuously supplying a raw material necessary for ingot growth.

1 is a front view showing an example of the present invention.
2 is a cross-sectional view showing an example of the present invention.
Fig. 3 is a cross-sectional view of the main part shown as one example of the present invention. Fig.
Fig. 4 is a louver perspective view showing an example of the present invention. Fig.
Fig. 5 is an outline diagram of the section rotation of the raw material feed roller shown as one example of the present invention.
6 is a cross-sectional view of a state in which raw materials are introduced into a supply hole of a raw material supply roller shown in an example of the present invention.
7 is a cross-sectional view of a state in which the raw material continues to flow into the supply hole of the raw material supply roller shown in one example of the present invention.
8 is a cross-sectional view of a state in which a raw material having flowed in a predetermined amount flows out through a supply hole of the raw material supply roller shown in the embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following description of the embodiments of the present invention, the same components as in the drawings are denoted by the same reference numerals as possible, and detailed descriptions of known configurations and functions are omitted so as not to obscure the gist of the present invention.

Fig. 1 shows an example of a Czochralski method ingot growing apparatus to which an ingot raw material continuous feeder 20 of the present invention for continuously feeding an ingot raw material in a constant quantity is added.

The ingot growing apparatus comprises a main chamber 1 provided with a cooling means, an inner crucible 2 and an outer crucible 3 installed inside the main chamber 1 for melting polysilicon, A pedestal 5 for supporting the inner and outer crucibles 2 and 3 and a pedestal 5 for supporting the inner and outer crucibles 2 and 3, A power supply means for supplying a large electric power to the electrothermal heater 6 and a power supply means for supplying power to the internal and external crucibles 2 and 3 and the pedestal 5, A dome chamber 9 provided above the main chamber 1, a gate valve and a viewport provided in the dome chamber 9, and a dome chamber (not shown) A pulling means 12 installed on the pulling means 10 and pulling up the ingot 11 and a pulling means 12 provided on the pulling means 10 for pulling up the ingot 11 ) Of the load cell A CCD camera and a distance measuring device for picking up the surface of the melt of the silicon melt M through a view port, a vacuum means, a cooling means , A sensing means, a control means, and a measuring means. In the present invention, an ingot raw material continuous feeder 20 is installed on one side of the upper side of the ingot growing apparatus, as shown in FIG.

Fig. 2 is a front view of an ingot raw material continuous feeder 20 shown in an example of the present invention. Figs. 3 and 4 are sectional views showing a hopper 22 in which a large amount of the ingot raw material 21 is charged (filled) An auxiliary hopper 24 which is lowered to the lower portion of the auxiliary hopper 24 by a spring 23 and a raw material feed roller 26 which is provided below the auxiliary hopper 24 and is in surface contact with the bottom surface 25 of the auxiliary hopper 24 A supply hole 27 formed in the raw material supply roller 26 and a servo motor 28 for rotating the raw material supply roller 26 forward and backward And the ingot raw material 21 continuously discharged in a constant amount by the rotation of the raw material feed roller 26 is discharged through the discharge guiding means 30 and the plurality of guide pipes 31, 2).

The hopper 22 has a storage space 34 of a predetermined volume so that a large amount of the ingot material 21 can be charged and filled. A large amount of the ingot material 21 is introduced into the hopper 22, And a sealing member 71 such as an O-ring holds the airtightness of the storage space 34 and is isolated from the outside (outside). Reference numeral 37 in FIG. 2 is an example of a feed limit line of the ingot raw material 21.

The ingot raw material 21 is granule poly having a particle size of 2 to 10 mm in diameter, elliptical shape, polygonal shape, or a deformed shape thereof, which has a high melting rate and is easy to supply and continuously feed in a constant amount.

An auxiliary hopper 24 having upper and lower hollow portions 39 is provided at an outlet 38 of the hopper 22 through which the ingot raw material 21 is discharged and an outer surface of the auxiliary hopper 24 is provided with a protrusion 40 A spring 23 is engaged with the upper surface of the protrusion 40 and the lower surface of the hopper support base 41 to lower the auxiliary hopper 24 downward.

The protruding frame 40 is prevented from being separated from the step portion 43 of the housing 42 installed at the bottom of the hopper support 41 and the lower protruding portion 48 of the auxiliary hopper 24 is inserted into the housing 42, And is always in surface contact with the surface of the raw material feed roller 26 located at the bottom since it is in contact with the surface of the raw material feed roller 26 and is downwardly biased by the spring 23.

The raw material supply roller 26 is columnar and has shaft members 49 and 50 provided on both sides thereof and shaft rods 51 and 52 protruding from both sides of the shaft members 49 and 50 are connected to the case 53 on both sides of the shaft support members 54, 55, respectively.

A shaft rod 57 is provided on both sides of the shaft support member 56 provided on the lower side of the case 53 and a circular plate 58 having a predetermined diameter is provided on an end of the shaft rod 57 protruded into the case 53. [ And one end of the link 59 is mounted on the disk 58 so as to be eccentric by the shaft pin 60. The other end of the link 59 is connected to the shaft pin 49 on one side shaft member 49, A timing pulley 62 is fixed to a portion of the shaft rod 57 protruding out of the case 53 and a wristwatch 28 is provided on the outside of the case 53. A timing belt A timing pulley 63 is fixed to the rotation shaft and the timing pulleys 62 and 63 are connected to the timing belt 64 so that the rotation force is transmitted to the shaft rod 57. The rotational force transmitted to the shaft rod 57 is eccentrically And is converted into a swinging motion on the shaft-mounted link 59, and the swing motion causes the material feed roller 26 to rotate in a normal or normal direction over a predetermined interval.

6 is a state in which the ingot raw material 21 flows into the feed hole 27 of the raw material feed roller 26 and FIG. 7 shows a state where the ingot raw material 21 is fed into the feed hole 27 of the raw material feed roller 26. FIG. 8 shows a state in which the ingot raw material 21 flowed in a predetermined amount into the supply hole 27 flows out while being dropped.

The supply holes 27 formed in the raw material supply roller 26 are formed in a direction orthogonal to a virtual axis of the raw material supply roller 26 (a virtual line connecting the center lines of the side shaft rods 51 and 52) The inlet 27a positioned at the upper portion is located in the hollow portion 39 of the auxiliary hopper 24 and the ingot raw material 21 is introduced and the outlet 27b located at the side is connected to the auxiliary hopper 24 A predetermined amount of the ingot material 21 is discharged (discharged) into the inner space 65 of the case 53. The discharge guiding means 30 and the plurality of And is supplied to the crucible 2 along the guide pipes 31, 32,

The volume (volume) of the supply hole 27 becomes the supply volume. That is, the amount of the ingot raw material 21 flowing into the supply hole 27 is the supply amount of the raw material supplied once, and is always the same amount, so that it is supplied in a fixed amount.

4 and 5, when the shaft rod 57 is rotated in the clockwise direction (direction A) by the servo motor 28 and the power transmitting means, the raw material supply roller 26 is rotated clockwise One side of the link 59 provided eccentrically with the shaft pin 60 rotates along the imaginary circle C1 at one side edge portion of the disk 58 and the shaft 59 is rotated by the shaft pin 61 The other side of the eccentrically installed link 59 is pivoted by a predetermined distance along the virtual circle C2 and the raw material supply roller 26 reciprocates within a predetermined section of the virtual circle C3. Therefore, the link 59 is reciprocally rotated in the D↔E direction of Fig. 4 or the predetermined angle [ theta] 1 of Fig. 5 by the orbital movement along the imaginary circles C1 and C2, 21) is supplied in a fixed amount.

The imaginary circle C1 is a rotation orbit of the axis pin 60 rotating along the disk 58. The imaginary circle C2 is a orbit of the other axis pin 61 about the axis pin 60, (C3) is a turning trajectory of the other axial pin 61.

The turning orbit section of the shaft pin 61 and the feed roller 26 corresponds to the diameter of the imaginary circle C1 so that the feed roller 26 reciprocates at a predetermined angle ? .

An inclined portion 44 is formed in the hollow portion 39 of the auxiliary hopper 24 to guide the ingot raw material 21 of the auxiliary hopper 24 into the inlet 27a. The bottom surface 25 of the auxiliary hopper 24 is not only circularly shaped so that the surface of the raw material supply roller 26 is in surface contact with the bottom surface 25 of the auxiliary hopper 24, So that the ingot raw material 21 can not escape through the rollers 26. The spring 23 is an elastic force to such an extent that the bottom surface 25 of the auxiliary hopper 24 is hardly worn even if it touches the surface of the raw material supply roller 26.

6 shows an example in which the inlet 27a of the supply hole 27 formed in the raw material feed roller 26 rotating in the forward and reverse directions is positioned in the hollow portion 39 of the auxiliary hopper 24 and the ingot raw material 21 7 shows a state in which the inlet 27a of the raw material feed roller 26 rotating in the forward and reverse rotations does not deviate from the hollow portion 39 of the auxiliary hopper 24 so that the ingot raw material 21 continues to flow 8 shows a state in which the inlet 27a of the raw material feed roller 26 is released from the hollow portion 39 of the auxiliary hopper 24 and the flow of the ingot raw material 21 is stopped and the ingot The raw material 21 is in a state of being dropped while flowing out of the raw material supply roller 26.

6 shows a state in which the outlet 27b of the supply hole 27 is inclined upward at a predetermined angle ? 2 from the lowest horizontal line of the supply hole 27 so that the ingot raw material 21 does not flow out, The outlet 27b of the supply hole 27 is inclined downward at a predetermined angle ? 3 from the horizontal line of FIG. 6, so that the ingot raw material 21 flows out.

8, when the ingot raw material 21 introduced into the supply hole 27 is discharged, a gap 45 is formed so that a part of the inlet 27a extends over the hollow portion 39 of the auxiliary hopper 24 The edge portion of the inlet 27a and the edge portion of the slope portion 44 can not meet with each other, so that the ingot raw material 21 is caught between them and the corner portion is damaged or the operation failure of the raw material feed roller 26 is prevented . If the size of the gap 45 is 2/3 to 3/4 of the average size of the ingot raw material 21, it is satisfied.

In the present invention, the inner space 65 of the case 53 isolated by the case 53 is vacuum, the outer space 67 is in a normal standby state, and the shaft support member 56 has a plurality of o-rings or packing The airtightness is maintained by the same sealing member 71.

A hook 68 protruding outward is provided at the edge of the timing pulley 62 and rotates along the timing pulley 62. The shaft support member 56 is provided with a proximity sensor A sensor (69) is installed and input to the controller (29) to detect the number of revolutions and the position.

A gate (73) opened and closed by an opening / closing means (72) is provided under the discharge guide means (30).

The shaft supporting members 54, 55 and 56 are formed with bearings for supporting the shaft rods 51, 52 and 57 and a plurality of sealing members 71, 53, respectively. The sealing member 71 may be an o-ring or a packing having excellent wear resistance and air tightness (air tightness).

A gate (not shown) which is opened or closed around the shaft by manual, automatic or mechanical opening / closing means (not shown) is installed in the upper portion of the inlet 35 of the hopper 22 instead of the lid 36, And may be structured such that when the raw material 21 is charged, the airtightness of the charging port 35 is closed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, It is self-evident to those of ordinary skill.

(1) - main chamber (2) - internal crucible
(3) - outer crucible (4) - heat shield member
(6) - electric heater (10) - lifting means
(11) - ingot (12) - impression cable
(13) - load cell (20) - continuous feeder
(21) - ingot raw material (22) - hopper
(23) - Spring (24) - Secondary hopper
(25) -lower surface (26) -Raw feed roller
(27) - Supply hole (27a) - Inlet
(27b) - Outlet (28) - Servo motor
(29) - controller (30) - discharge guide means
(31) (32) (33) - Guide tube (34) - Storage space
(35) - inlet (36) - cover
(39) - hollow portion (40) - protruding portion
(41) - hopper support (42) - housing
(43) - step portion (44) - inclined portion
(45) - Clearance (48) - Protrusion
(49) (50) -shaft members (51) (52) (57) -shaft
(53) - case (54) (55) (56) - shaft supporting member
(58) - Disc (59) - Link
(60) (61) - Axial pin (62) (63) - Timing pulley
(64) - timing belt (65) - inner space
(66) -outlet (67) -outside space
(68) - Loop (69) - Proximity sensor
(71) - Sealing member (C1) (C2) (C3) - Virtual circle
(M) -silicon melt

Claims (8)

A hopper 22 into which a large amount of the raw material 21 is fed;
An auxiliary hopper 24 which is lowered below the hopper 22 by a spring 23;
A raw material feed roller 26 axially installed under the auxiliary hopper 24 and in surface contact with the bottom surface 25 of the auxiliary hopper 24;
A servomotor 28 for rotating the raw material feed roller 26 in a predetermined section in normal and reverse directions, a power transmitting means and a controller 29;
A supply hole 27 formed in a direction perpendicular to the imaginary axis of the raw material supply roller 26 and having an inlet 27a formed at an upper portion thereof and an outlet 27b formed at a side portion thereof; ≪ / RTI >
The power transmitting means includes:
A shaft rod 57 projecting on both sides of the shaft supporting member 56;
A disk 58 fixed to an inner end of the shaft rod 57;
One end of a link (59) axially mounted on the disk (58) so as to be eccentric by an axial pin (60);
One side shaft member (49) on the other side of which the link (59) is provided with a shaft pin (61);
A timing pulley 62 fixed to an outer end of the shaft rod 57;
A timing pulley 63 fixed to the rotary shaft of the servo motor 28;
A timing belt 64 connecting the timing pulleys 62 and 63;
And the continuous ingot raw material supply device. delete delete delete The method of claim 1,
A hook body 68 protruding from the timing pulley 62;
A proximity sensor 69 for sensing the hook 68;
Further comprising: a feeder for continuously feeding the ingot raw material. delete The method of claim 1,
A part of the inlet 27a flows into the gap 45 formed over the hollow portion 39 of the auxiliary hopper 24 when the ingot raw material 21 flowing into the supply hole 27 of the raw material supply roller 26 flows out. ;
Further comprising the step of feeding the ingot raw material continuously. The method of claim 1,
A protrusion 40 formed on an outer surface of the auxiliary hopper 24;
A spring 23 coupled to an upper surface of the protrusion 40 and a lower surface of the hopper support 41;
A step portion 43 of the housing 42 installed at the bottom of the hopper support 41 to which the protruding frame 40 is hooked;
And the continuous ingot raw material supply device.

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