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KR101547340B9 - 기판 처리 시스템 - Google Patents

기판 처리 시스템

Info

Publication number
KR101547340B9
KR101547340B9 KR1020080105201A KR20080105201A KR101547340B9 KR 101547340 B9 KR101547340 B9 KR 101547340B9 KR 1020080105201 A KR1020080105201 A KR 1020080105201A KR 20080105201 A KR20080105201 A KR 20080105201A KR 101547340 B9 KR101547340 B9 KR 101547340B9
Authority
KR
South Korea
Prior art keywords
handling system
substrate handling
substrate
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020080105201A
Other languages
English (en)
Other versions
KR20100046382A (ko
KR101547340B1 (ko
Inventor
최재욱
황철주
Original Assignee
주성엔지니어링(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주성엔지니어링(주) filed Critical 주성엔지니어링(주)
Priority to KR1020080105201A priority Critical patent/KR101547340B1/ko
Publication of KR20100046382A publication Critical patent/KR20100046382A/ko
Application granted granted Critical
Publication of KR101547340B1 publication Critical patent/KR101547340B1/ko
Publication of KR101547340B9 publication Critical patent/KR101547340B9/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020080105201A 2008-10-27 2008-10-27 기판 처리 시스템 Active KR101547340B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080105201A KR101547340B1 (ko) 2008-10-27 2008-10-27 기판 처리 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080105201A KR101547340B1 (ko) 2008-10-27 2008-10-27 기판 처리 시스템

Publications (3)

Publication Number Publication Date
KR20100046382A KR20100046382A (ko) 2010-05-07
KR101547340B1 KR101547340B1 (ko) 2015-08-28
KR101547340B9 true KR101547340B9 (ko) 2024-12-20

Family

ID=42273650

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080105201A Active KR101547340B1 (ko) 2008-10-27 2008-10-27 기판 처리 시스템

Country Status (1)

Country Link
KR (1) KR101547340B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101294969B1 (ko) * 2011-10-21 2013-08-09 고대운 글래스 기판 로딩/언로딩 장치
KR101329481B1 (ko) * 2011-10-21 2013-11-13 고대운 글래스 기판 로딩/언로딩 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004131233A (ja) 2002-10-09 2004-04-30 Nakamura Tome Precision Ind Co Ltd ローラコンベア

Also Published As

Publication number Publication date
KR20100046382A (ko) 2010-05-07
KR101547340B1 (ko) 2015-08-28

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20081027

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20130917

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20081027

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20141126

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20150526

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20150819

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20150820

End annual number: 3

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PG1601 Publication of registration
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