KR101515877B1 - Apparatus foe fabricating solder ball - Google Patents

Abstract

The present invention relates to a metal ball manufacturing apparatus, and more particularly, to a metal ball manufacturing apparatus for manufacturing a metal ball by melting a predetermined material, comprising: a manufacturing section for manufacturing a metal ball; And a rejection unit for collecting the metal balls, wherein the manufacturing unit includes a chamber in which a material is supplied and stored, a heating device for applying a predetermined heat so that the material in the chamber is melted, An orifice disposed at a lower portion thereof, a piston disposed above the orifice so as to generate a metal ball droplet, and a clean system for removing foreign matter from the material.

Description

[0001] APPARATUS FOE FABRICATING SOLDER BALL [0002]

The present invention relates to a metal ball manufacturing apparatus, and more particularly, to a metal ball manufacturing apparatus for manufacturing a metal ball by melting a predetermined material, comprising: a manufacturing section for manufacturing a metal ball; And a rejection unit for collecting the metal balls, wherein the manufacturing unit includes a chamber in which a material is supplied and stored, a heating device for applying a predetermined heat so that the material in the chamber is melted, An orifice disposed at a lower portion thereof, a piston disposed above the orifice so as to generate a metal ball droplet, and a clean system for removing foreign matter from the material.

For the production of ultra-fine metal balls below 100 μm, an orifice having an inner diameter of 50 μm or less should be used, and the oxide of the molten solder may clog the orifice due to a small orifice inner diameter.

In order to improve this, cleaning of the raw materials in the alloy process is often performed, and the problem of closing the orifice has been improved.

However, the raw material of the mass produced in the alloying process may have a problem that the oxide is present on the surface of the mass, and the oxides are mixed in the molten solder again when put into the manufacturing equipment.

Therefore, it is necessary to improve the orifice closure phenomenon by incorporating the raw material purification system made in the alloy process into the metal ball production apparatus.

Patent No. 10-1179400

The present invention has been conceived to solve the above problems, and it is an object of the present invention to provide a metal ball manufacturing apparatus for manufacturing a metal ball by melting a predetermined material, And a rejection unit for collecting the metal balls, wherein the manufacturing unit includes a chamber in which a material is supplied and stored, a heating device for applying a predetermined heat so that the material in the chamber is melted, An orifice disposed at a lower portion of the orifice, a piston disposed at an upper portion of the orifice to generate a metal ball droplet, and a clean system for removing foreign matter from the material.

In order to accomplish the above object, a metal ball manufacturing apparatus according to the present invention is a metal ball manufacturing apparatus for manufacturing a metal ball by melting a predetermined material, comprising: a manufacturing unit for manufacturing a metal ball; And a rejection unit for collecting the metal balls, wherein the manufacturing unit includes a chamber in which a material is supplied and stored, a heating device for applying a predetermined heat so that the material in the chamber is melted, An orifice disposed at the bottom, a piston disposed above the orifice to create a metal ball droplet, and a clean system for removing foreign material from the material.

Preferably, the clean system comprises a discharge pump, wherein the discharge pump is configured to discharge vaporized foreign substances in a heating atmosphere.

Preferably, the clean system comprises a vacuum pump, wherein the vacuum pump controls the degree of vacuum in the chamber to from 0 to 2.0 x 10 < -2 > torr.

Preferably, the clean system includes a temperature control device, wherein the temperature control device controls the temperature of the heating atmosphere in the chamber to 500 ° C to 800 ° C.

Preferably, the piston and the orifice are spaced a distance of 0 to 0.5 mm.

Preferably, the manufacturing section includes a gap adjusting device for adjusting a distance between the piston and the orifice.

Preferably, the orifice comprises a graphite material.

Since the apparatus for manufacturing a metal ball according to the present invention has a configuration including a cleaning system in a manufacturing section, foreign materials of materials used for manufacturing a metal ball are removed and a metal ball can be manufactured from only pure materials. In addition, as the material is cleaned in the melting process for manufacturing, there is no need to provide a separate cleaning device independently, and it is prevented that the cleaned material is exposed to the outside and re-contaminated in the process of being supplied into the chamber .

Therefore, not only the metal ball of higher quality is produced, but also the closing of the orifice in which the metal ball droplet falls down can be prevented, the efficiency of the manufacturing process can be improved and the manufacturing cost can be reduced.

In addition, a gap adjusting device for adjusting the distance between the piston and the orifice may be provided to vary the distance between the orifice and the piston, and the size of the droplet of the metal ball may be appropriately varied. Accordingly, metal balls of various sizes can be manufactured according to applications and needs, and the versatility of the metal ball manufacturing apparatus according to the present invention can be improved.

In addition, since the orifice includes a graphite material, a stable and uniform metal ball droplet can be formed even though a small orifice is used.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a view showing the entire structure of a metal ball manufacturing apparatus according to the present invention; FIG.
2 is a view showing a manufacturing part of a metal ball manufacturing apparatus according to the present invention.
FIG. 3 and FIG. 4 are diagrams comparing wettability test results of the solder raw material before and after performing the cleaning using the cleaning system of the metal ball manufacturing apparatus according to the present invention.
FIG. 5 and FIG. 6 are diagrams comparing results of different cleaning temperatures when cleaning is performed using the cleaning system of the apparatus for manufacturing a metal ball according to the present invention.
FIGS. 7 and 8 are views comparing results of different degrees of vacuum when purifying using the purifying system of the apparatus for manufacturing a metal ball according to the present invention.
9 to 11 are views comparing the results of different materials of the orifices provided in the manufacturing section of the metal ball manufacturing apparatus according to the present invention.
FIG. 12 is a table comprehensively comparing the results of changing the vacuum degree, the cleaning temperature, and the manufacturing temperature
13 and 14 are diagrams comparing the uniformity of the metal ball size according to the distance between the orifice and the piston in the manufacturing section of the metal ball manufacturing apparatus according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The present embodiments are not intended to be limiting.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

The terms spatially relative, "below", "beneath", "lower", "above", "upper" May be used to readily describe an element or component and other element or components of the correlation. Spatially relative terms should be understood to include, in addition to the orientation shown in the drawings, terms that include different orientations of members during use or operation. For example, "upper" can be interpreted as "lower" when a member shown in the drawing is inverted. The members can also be oriented in different directions, so that spatially relative terms can be interpreted according to orientation.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. &Quot; comprises, "and / or" comprising ", as used herein, unless the recited element, step, operation and / Or additions.

Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.

2 is a view showing a manufacturing section 10 of the apparatus 1 for manufacturing a metal ball according to the present invention, and FIG. 3 is a cross- FIG. 4 is a graph comparing the wettability test results of the solder raw material before and after performing the cleaning using the cleaning system 30 of the metal ball manufacturing apparatus 1 according to the present invention, and FIGS. 5 and 6 are graphs FIGS. 7 and 8 are views for comparing the results of different cleaning temperatures when cleaning is performed using the cleaning system 30 of the metal ball manufacturing apparatus 1 according to the present invention. 9 through 11 are diagrams for comparing the results obtained when the cleaning is performed using the cleaning system 30 of the metal ball manufacturing apparatus 1 according to the present invention By comparing the results of different materials of the orifices 150 provided FIG. 12 is a table comprehensively comparing the results of changing the degree of vacuum, the cleaning temperature, and the manufacturing temperature, and FIGS. 13 and 14 are tables 10 is a graph comparing the uniformity of the sizes of the metal balls S according to the distances between the orifices 150 and the pistons 130. FIG.

In order to achieve the above object, a metal ball manufacturing apparatus (1) according to the present invention is a metal ball manufacturing apparatus (1) for manufacturing a metal ball (S) by melting a predetermined material, A manufacturing section 10 for manufacturing; And a rejection unit 20 for collecting the metal ball S. The manufacturing unit 10 includes a chamber 110 in which a material is supplied and stored, A orifice 150 disposed below the orifice 150 to drop a droplet of the metal ball S and a piston 150 disposed above the orifice 150 to generate a droplet of the metal ball S, (130), and a cleaning system (30) for removing foreign matter from the material.

A metal ball manufacturing apparatus (1) according to the present invention comprises a manufacturing section (10) and a rejection section (20).

The manufacturing section 10 includes various devices configured to produce a metal ball S by receiving a predetermined material as a raw material of the metal ball S and substantially constitutes the main body of the metal ball manufacturing apparatus 1 . The metal ball S may be a metal ball S used in a wire bonding package, and may be spherical, but is not limited thereto.

The material used for manufacturing the metal ball S may be, for example, an alloy including various metals such as Cu, Ni, Al and Co as a solder, and a predetermined chemical additive may be added, but is not limited thereto.

The material is stored in a predetermined chamber 110. The chamber 110 is configured to have a predetermined strength so as to withstand a high temperature and a high atmospheric pressure difference, and has a proper capacity.

A predetermined heating device 120 is provided to heat the material in the chamber 110. The heating device 120 may heat the chamber 110 by, for example, electrical resistance so that the material in the chamber 110 can be melted. The configuration and the form of the heating device 120 are not limited.

A predetermined orifice 150 is provided in the lower portion of the chamber 110 so that the material in the chamber 110 is heated and melted and the molten material falls into a droplet state. The orifice 150 is formed in a fine tube shape and has a predetermined shape and configuration so as to be suitable for formation of a metal ball S droplet having an appropriate size and control of a metal ball S droplet. Meanwhile, since the orifice 150 is susceptible to damage due to the drop of the molten metal ball S droplet, the orifice 150 may be detachable from the chamber 110 so as to be replaceable, Not limited. Preferably, the orifice 150 comprises a graphite material.

A piston 130 is disposed above the orifice 150. The piston 130 is spaced a predetermined distance from the orifice 150 and is configured to perform a piston motion, such that the molten material forms a droplet of a metal ball (S). The distance between the piston 130 and the orifice 150 and the period of motion of the piston 130 can be adjusted appropriately. Lt; / RTI > Meanwhile, a predetermined power application device 140 may be provided to allow the piston 130 to perform the piston movement.

The cleaning system 30 is provided to remove foreign matter of the material supplied into the chamber 110. [ The cleaning system 30 may be constituted by a predetermined device constituting a part of the manufacturing section 10 of the metal ball manufacturing apparatus 1 according to the present invention and may be any device capable of contributing to removing foreign matter Member and device, and is not a concept that refers to any particular member. In addition, the cleaning system 30 constitutes a part of the manufacturing section 10, meaning that the cleaning system 30 is incorporated in the manufacturing section 10 to remove foreign substances in the material during the manufacturing process . ≪ / RTI > The purification system 30 will be described later.

An inert gas injection device 160 for providing a predetermined inert gas so as to maintain an atmosphere suitable for manufacturing the metal ball S, various piping structures, and valve sections 162 and 172 , But is not limited thereto.

The droplet removing unit 20 is provided to collect the metal balls S manufactured by the manufacturing unit 10 and the droplets of the metal balls S falling down through the orifices 150 are cooled in the dropping process, A collection chamber 24, and a collection chamber 26. The collection chamber 26 may include a plurality of cooling chambers 22,

The cooling chamber 22 has a predetermined height in the vertical direction so that the droplet of the metal ball S can be cooled during the dropping process.

The collection chamber 24 is a predetermined member from which the dropped metal balls S are collected. The collection chamber 24 may be provided with a predetermined sheave so that the metal balls S can be placed thereon. The sheave may be drawn out by a predetermined conveying means so that the metal ball S can be taken out to the outside.

The rejection unit 20 may include various transport devices for collecting the metal balls S and predetermined valves contributing to the collection of the metal balls S, The configuration is not limited.

Hereinafter, the cleaning system 30 will be described in detail.

The purification system 30 is a concept encompassing various apparatuses capable of contributing to the removal of foreign matter in the material, and may be understood to include all apparatuses which can contribute to the removal of foreign matter in addition to the apparatuses used only for removing foreign matter.

For example, when heating the material to a predetermined temperature for removing foreign substances, the heating device 120 for heating the material may contribute to the removal of foreign matter, but is also used for melting the material for manufacturing the metal ball S . As a further example, certain pumps and gas injectors contributing to the evacuation of vaporized foreign substances can contribute to the removal of foreign substances and constitute a part of the purification system 30, but the atmosphere in the chamber 110 can be adjusted But also contributes to the melting of the material and the production of the metal balls S, it can be understood to be included in other elements than the purification system 30. [

Thus, the cleaning system 30 should not be understood to be limited to other devices and devices that are separate and distinct from the other components in the manufacturing portion 10, and may be understood as a part of making the manufacturing portion 10 comprehensively .

The purifying system 30 includes an exhaust pump 170, which is configured to exhaust foreign matter in a heating atmosphere.

When the chamber 110 is heated to a melting temperature or more in a predetermined atmosphere, the material in the chamber 110 is melted and converted into a liquid phase. At this time, foreign substances such as oxygen and various oxides contained in the liquid material float toward the surface, and the foreign matter can be removed according to the operation of the discharge pump 170. [

At this time, the atmosphere in the chamber 110 may be vacuum or an atmosphere close to a vacuum, and the discharge pump 170 may include a predetermined vacuum pump. As the discharge pump 170 is operated, the air in the chamber 110 flows toward the vacuum pump and can be discharged to the outside, while a relatively light foreign matter such as the oxide can be discharged according to the air flow. At this time, the vacuum degree in the chamber 110 is preferably as low as possible, and preferably, the vacuum pump can adjust the degree of vacuum in the chamber 110 to 2.0 × 10 -2 torr or less.

Preferably, the cleaning system 30 includes a temperature controller (not shown), and the temperature controller (not shown) controls the temperature of the heating atmosphere in the chamber 110 to 500 ° C to 900 ° C .

The temperature control device (not shown) may control the operation of the heating device 120 so that the temperature in the chamber 110 can be controlled to facilitate the separation of the foreign materials simultaneously with the melting of the material. At this time, the temperature controller (not shown) may adjust the temperature of the chamber 110 to 500 to 900 ° C. Preferably, the temperature controller (not shown) And the like. Accordingly, the temperature regulating device (not shown) may include a predetermined control device for controlling the operation of the heating device 120 and a temperature sensor.

The metal ball manufacturing apparatus 1 according to the present invention has a configuration in which the purification system 30 is included in the manufacturing section 10 so that the foreign materials of the materials used for manufacturing the metal balls are removed, (S) can be produced. In addition, as the material is cleaned in the melting process for manufacturing, there is no need to provide a separate cleaning device independently, and when the cleaned material is supplied into the chamber 110, Can be prevented.

Therefore, not only the metal ball S of higher quality is manufactured, but also the closing of the orifice 150 in which the droplet of the metal ball S drops is prevented, so that the efficiency of the manufacturing process can be improved and the manufacturing cost can be reduced.

Preferably, the piston 130 and the orifice 150 are spaced a distance of 0 to 0.5 mm.

The piston 130 has a predetermined distance from the orifice 150 and moves in a vertical direction to the piston 130 to allow the molten material to drop through the orifice 150 in a droplet state. At this time, the piston 130 and the orifice 150 have a predetermined separation distance so that a droplet of a metal ball S having an appropriate size can be formed. At this time, the separation distance between the piston 130 and the orifice 150 is 0 0.5 mm. Here, the spacing distance means the distance that the piston 130 is maximally advanced to the closest position to the orifice 150.

Preferably, a gap adjusting device 142 for adjusting a distance between the piston 130 and the orifice 150 may be provided.

The gap adjusting device 142 is provided to adjust the distance between the piston 130 and the orifice 150 and may be a device for varying the initial position of the piston 130, for example. The distance between the orifice 150 and the piston 130 may be varied and the size of the droplet of the metal ball S may be appropriately varied. Therefore, metal balls S having various sizes can be manufactured according to applications and needs, and the versatility of the metal ball manufacturing apparatus 1 according to the present invention can be improved.

Hereinafter, effects of the metal ball manufacturing apparatus 1 according to the present invention will be discussed with reference to the drawings.

3 and 4 are views comparing wettability test results of the solder raw material before and after performing the cleaning using the cleaning system 30 of the metal ball manufacturing apparatus 1 according to the present invention.

As shown in FIG. 3 and FIG. 4, when the wettability test results of the material before and after the cleaning are examined, it can be confirmed that the zero-cross time is reduced and the wetting force is increased after the cleaning is performed.

That is, the zero-cross time is the time required for the level of the solder to equilibrate. The shorter the zero-cross time, the better. In order to shorten the zero-cross time, the surface tension of the molten solder must be low. In general, as the number of predetermined openings in the molten metal increases, the surface tension increases and the zero-cross time becomes longer.

As can be seen in the present invention, the zero-cross time is shortened after the cleaning has been performed, which can be seen to improve the fluid flow, and thus the fluidity of the molten material passing through the orifice hole .

In addition, as the surface tension is lower, the wetting force is increased. As shown in FIG. 3-2, the increase of the weting force after the cleaning means that the surface tension is lowered, which means that the fluidity of the material is improved likewise .

FIGS. 5 and 6 are graphs comparing the results of different cleaning temperatures when cleaning is performed using the cleaning system 30 of the apparatus 1 for manufacturing a metal ball according to the present invention. FIG. 5 is a graph comparing results of different degrees of vacuum when purifying using the purifying system 30 of the metal ball manufacturing apparatus 1 according to the present invention. FIG.

FIG. 5 is a view showing the state of the material when the cleaning temperature is set to 300 ° C., and FIG. 6 is a view showing the state of the material when the cleaning temperature is 800 ° C. Comparing the both, it can be seen that the oxide film formed on the surface of the material is further reduced when the cleaning temperature is set to 800 ° C as compared with the case where the cleaning temperature is set to 300 ° C.

FIG. 7 is a view showing the state of the material when the degree of vacuum is 10 -1 torr, and FIG. 8 is a view showing the state of the material when the degree of vacuum is 10 -3 torr. In comparison, the oxide film formed on the surface of the material is further reduced when the degree of vacuum is set to 10 -3 torr, as compared with the case of 10 -1 torr.

As described above, when the material is melted in a state of maintaining a high temperature and a low degree of vacuum, it is confirmed that the oxide is removed and the material is further cleaned.

9 to 11 are views comparing the results of different materials of the orifices 150 provided in the manufacturing section 10 of the metal ball manufacturing apparatus 1 according to the present invention.

FIG. 10 shows the respective orifices 150, and FIG. 11 is a graph showing the uniformity of droplets generated through the respective orifices 150. FIG. It is a picture.

9 (a) shows a droplet when an orifice 150 made of a metal is used, (b) shows a droplet when an orifice 150 made of a ceramic is used, and (c) In which the orifice 150 is used.

9 to 11, it can be confirmed that when the orifice 150 is made of graphite having excellent slip characteristics, the most stable and uniform droplet formation can be achieved even though a small orifice 150 is used .

FIG. 12 is a table comprehensively comparing the results of changing the degree of vacuum, the cleaning temperature, and the manufacturing temperature. As shown in FIG. 12, it is confirmed that the manufacturing results are variable by changing the degree of vacuum, have.

13 and 14 illustrate the uniformity of the size of the metal ball S according to the distance between the orifice 150 and the piston 130 provided in the manufacturing section 10 of the metal ball manufacturing apparatus 1 according to the present invention Fig.

As shown in Figs. 8A and 8B, as the distance between the piston 130 and the orifice 150 increases in the piston motion having the same frequency, the size of the metal ball S to be manufactured increases, Is increased.

The gap between the piston 130 and the orifice 150 is adjusted by adjusting the gap between the piston 130 and the orifice 150 so that the gap between the piston 130 and the orifice 150 is adjusted. Since the piston 130 and the orifice 150 can be adjusted to have an optimum gap, the metal ball S can be manufactured with a uniform size.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It should be understood that various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention.

1: Metal ball manufacturing device
10: Manufacturing department
20: Rejection
22: cooling chamber
24: Collection valve
26: Collection chamber
30: Purification system
110: chamber
120: Heating device
130: Piston
140: Power application device
142: Spacer
160: inert gas injection device
162:
170: discharge pump
172:

Claims (7)

A metal ball manufacturing apparatus for manufacturing a metal ball by melting a predetermined material,
The metal ball manufacturing apparatus includes:
A manufacturing part for manufacturing a metal ball; And
And removing the metal balls,
In the manufacturing section,
A chamber in which the material is supplied and stored,
A heating device for applying a predetermined heat to melt the material in the chamber,
An orifice disposed at the bottom for dropping the metal ball droplet,
A piston disposed above the orifice to produce a metal ball droplet,
A cleaning system for removing foreign matter from the material, and
And a gap adjusting device,
The piston and the orifice
A distance of 0 to 0.5 mm,
And the distance between the piston and the orifice is adjusted by the gap adjusting device. The method according to claim 1,
The cleaning system includes a drain pump,
Wherein the discharge pump discharges vaporized foreign substances in a heating atmosphere. The method according to claim 1,
The cleaning system includes a vacuum pump,
Wherein the vacuum pump controls the degree of vacuum in the chamber to be 0 to 2.0 X 10 < -2 > torr. The method according to claim 1,
The cleaning system includes a temperature controller,
Wherein the temperature control device controls the temperature of the heating atmosphere in the chamber to 500 to 800 占 폚. delete delete The method according to claim 1,
The orifice
A metal ball manufacturing apparatus comprising graphite material.

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