KR101495459B1 - 액정 폴리머 솔더 마스크를 갖는 전자 디바이스 제조 방법 및 관련된 디바이스 - Google Patents
액정 폴리머 솔더 마스크를 갖는 전자 디바이스 제조 방법 및 관련된 디바이스 Download PDFInfo
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- KR101495459B1 KR101495459B1 KR1020137018793A KR20137018793A KR101495459B1 KR 101495459 B1 KR101495459 B1 KR 101495459B1 KR 1020137018793 A KR1020137018793 A KR 1020137018793A KR 20137018793 A KR20137018793 A KR 20137018793A KR 101495459 B1 KR101495459 B1 KR 101495459B1
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- lcp
- solder
- solder mask
- substrate
- mask
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- 229910000679 solder Inorganic materials 0.000 title claims abstract description 96
- 229920000106 Liquid crystal polymer Polymers 0.000 title claims abstract description 80
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 title claims abstract description 77
- 238000004519 manufacturing process Methods 0.000 title abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000010030 laminating Methods 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
도 2a-2f는 본 발명의 전자 디바이스의 순차적인 도식화된 횡단면도이다.
도 3은 본 발명에 따른 전자 디바이스를 제조하는 더 구체적인 방법의 흐름도이다.
Claims (10)
- 적어도 하나의 솔더 패드(15)를 포함하는 액정 폴리머(LCP) 기판(12) 상의 회로층(14)을 형성하는 단계(54);
LCP 솔더 마스크(16)의 LCP와 상기 LCP 기판(12)의 LCP는 일치되고, 상기 적어도 하나의 솔더 패드(15)와 정렬가능한 내부에 적어도 하나의 천공(17)을 갖는 상기 LCP 솔더 마스크(16)를 형성하는 단계(56);
상기 LCP 솔더 마스크(16)는 상기 LCP 기판(12)과 접촉하고 그리고 상기 적어도 하나의 천공(17)은 상기 적어도 하나의 솔더 패드(17)를 둘러싸서 위치되도록 상기 LCP 솔더 마스크(16)와 상기 LCP 기판(12)을 함께 정렬하는 단계(58);
상기 LCP 솔더 마스크(16)와 상기 LCP 기판(12)에 열과 압력을 가하는 단계를 포함하는, 상기 LCP 솔더 마스크(16)와 상기 LCP 기판(12)을 함께 라미네이트하는 단계(58);
상기 적어도 하나의 천공(17)에 솔더 페이스트(20)를 위치시키는 단계(60); 및
상기 솔더 페이스트(20)를 사용하여 상기 적어도 하나의 솔더 패드(15)에 적어도 하나의 회로 컴포넌트(22)를 부착하는 단계(62);를 포함하되,
상기 적어도 하나의 솔더 패드(15)는 어레이 패턴으로 배열된 복수의 솔더 패드를 포함하는 것을 특징으로 하는 전자 디바이스의 제조 방법.
- 삭제
- 제 1항에 있어서,
상기 솔더 페이스트(20)를 위치시키는 단계는 솔더 스텐실을 사용하여 상기 솔더 페이스트(20)를 위치시키는 단계를 포함하는 것을 특징으로 하는 전자 디바이스의 제조 방법. - 제 1항에 있어서,
상기 적어도 하나의 회로 컴포넌트(22)를 부착하는 단계는 상기 솔더 페이스트(20)를 가열하는 단계를 포함하는 것을 특징으로 하는 전자 디바이스의 제조 방법. - 제 1항, 제 3항 및 제 4항 중 어느 한 항에 있어서,
상기 열과 압력을 가하는 단계는 오토클레이브에서 수행되는 것을 특징으로 하는 전자 디바이스의 제조 방법.
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/007,003 US8844125B2 (en) | 2011-01-14 | 2011-01-14 | Method of making an electronic device having a liquid crystal polymer solder mask and related devices |
US13/007,003 | 2011-01-14 | ||
PCT/US2011/066144 WO2012096763A1 (en) | 2011-01-14 | 2011-12-20 | Method of making an electronic device having a liquid crystal polymer solder mask and related devices |
Publications (2)
Publication Number | Publication Date |
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KR20130105888A KR20130105888A (ko) | 2013-09-26 |
KR101495459B1 true KR101495459B1 (ko) | 2015-02-24 |
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KR1020137018793A Active KR101495459B1 (ko) | 2011-01-14 | 2011-12-20 | 액정 폴리머 솔더 마스크를 갖는 전자 디바이스 제조 방법 및 관련된 디바이스 |
Country Status (6)
Country | Link |
---|---|
US (3) | US8844125B2 (ko) |
EP (1) | EP2664222B1 (ko) |
KR (1) | KR101495459B1 (ko) |
CN (1) | CN103299721B (ko) |
TW (1) | TWI506747B (ko) |
WO (1) | WO2012096763A1 (ko) |
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- 2011-12-20 KR KR1020137018793A patent/KR101495459B1/ko active Active
- 2011-12-20 EP EP11817494.5A patent/EP2664222B1/en active Active
- 2011-12-20 CN CN201180064832.4A patent/CN103299721B/zh not_active Expired - Fee Related
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2014
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Also Published As
Publication number | Publication date |
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US10342126B2 (en) | 2019-07-02 |
EP2664222A1 (en) | 2013-11-20 |
US8844125B2 (en) | 2014-09-30 |
WO2012096763A1 (en) | 2012-07-19 |
TWI506747B (zh) | 2015-11-01 |
CN103299721A (zh) | 2013-09-11 |
CN103299721B (zh) | 2016-03-23 |
TW201246486A (en) | 2012-11-16 |
EP2664222B1 (en) | 2022-04-06 |
US20120182702A1 (en) | 2012-07-19 |
KR20130105888A (ko) | 2013-09-26 |
US20140321089A1 (en) | 2014-10-30 |
US9763324B2 (en) | 2017-09-12 |
US20170339785A1 (en) | 2017-11-23 |
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