KR101376190B1 - 전자 패키징용 비전도 폴리머 접합물질 및 이를 이용한 전자 패키징용 필름 - Google Patents
전자 패키징용 비전도 폴리머 접합물질 및 이를 이용한 전자 패키징용 필름 Download PDFInfo
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- KR101376190B1 KR101376190B1 KR1020120056496A KR20120056496A KR101376190B1 KR 101376190 B1 KR101376190 B1 KR 101376190B1 KR 1020120056496 A KR1020120056496 A KR 1020120056496A KR 20120056496 A KR20120056496 A KR 20120056496A KR 101376190 B1 KR101376190 B1 KR 101376190B1
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- 239000000463 material Substances 0.000 title claims abstract description 91
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- 239000000853 adhesive Substances 0.000 title abstract description 9
- 230000001070 adhesive effect Effects 0.000 title abstract description 9
- 238000004806 packaging method and process Methods 0.000 title description 4
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- 125000003342 alkenyl group Chemical group 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000000304 alkynyl group Chemical group 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 5
- -1 cyclo-alkynyl Chemical group 0.000 claims description 5
- 125000000392 cycloalkenyl group Chemical group 0.000 claims description 5
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 5
- 125000000524 functional group Chemical group 0.000 claims description 5
- 229920006280 packaging film Polymers 0.000 claims description 5
- 239000012785 packaging film Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 abstract description 33
- 229910052751 metal Inorganic materials 0.000 abstract description 33
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- 229920005989 resin Polymers 0.000 abstract description 20
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- OHHPZPDQZMUTCA-UHFFFAOYSA-N cyclohexyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OC1CCCCC1 OHHPZPDQZMUTCA-UHFFFAOYSA-N 0.000 description 14
- VRZVPALEJCLXPR-UHFFFAOYSA-N ethyl 4-methylbenzenesulfonate Chemical compound CCOS(=O)(=O)C1=CC=C(C)C=C1 VRZVPALEJCLXPR-UHFFFAOYSA-N 0.000 description 14
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 12
- 239000002841 Lewis acid Substances 0.000 description 9
- 150000007517 lewis acids Chemical class 0.000 description 9
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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- 239000007864 aqueous solution Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
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- RAXXELZNTBOGNW-UHFFFAOYSA-N 1H-imidazole Chemical class C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002879 Lewis base Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
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- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- IOMMMLWIABWRKL-WUTDNEBXSA-N nazartinib Chemical compound C1N(C(=O)/C=C/CN(C)C)CCCC[C@H]1N1C2=C(Cl)C=CC=C2N=C1NC(=O)C1=CC=NC(C)=C1 IOMMMLWIABWRKL-WUTDNEBXSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/564—Details not otherwise provided for, e.g. protection against moisture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/07—Structure, shape, material or disposition of the bonding areas after the connecting process
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
- C09J2301/41—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the carrier layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
도 2는 열경화성수지에 산발생제(TAG)를 혼합하여 온도에 따른 열류량을 측정한 그래프이다.
도 3은 열경화성수지와 잠재성경화제의 혼합물질에 산발생제(TAG)를 혼합하지 않은 접합물질과 산발생제(TAG)를 혼합한 접합물질의 온도에 따른 열류량을 측정하여 비교한 그래프이다.
도 4는 본 발명의 실시예들과 관련된 산발생제(TAG)의 기본 구조식을 도시한 도면이다.
도 5는 본 발명의 일실시예인 산발생제(TAG)의 구조식을 도시한 도면이다.
도 6은 본 발명의 다른 실시예인 산발생제(TAG)의 구조식을 도시한 도면이다.
도 7은 실시예1과 실시예2를 각각 열경화성수지에 혼합시킨 후 온도에 따른 열류량을 측정하여 나타낸 그래프이다.
도 8은 산발생제(TAG)의 함량별로 온도에 따른 pH 값을 나타낸 그래프이다.
도 9는 잠재성경화제(DICY)의 함량별로 온도에 따른 pH 값을 나타낸 그래프이다.
도 10은 산발생제(TAG)를 포함하지 않는 폴리머 접합물질을 사용하여 전자소자를 접합시킨 상태를 보여주기 위한 단면 SEM(주사전자현미경) 사진이다.
도 11은 산발생제(TAG)를 포함하는 폴리머 접합물질을 사용하여 전자소자를 접합시킨 상태를 보여주기 위한 단면 SEM(주사전자현미경) 사진이다.
도 12는 도 10의 접합소자를 150℃에서 500 시간동안 열처리 한 후의 접합 상태를 보여주기 위한 단면 SEM(주사전자현미경) 사진이다.
도 13은 도 11의 접합소자를 150℃에서 500 시간동안 열처리 한 후의 접합 상태를 보여주기 위한 단면 SEM(주사전자현미경) 사진이다.
도 14는 도 12의 접합소자를 강제 분리하여 전기소자의 전극과 인쇄회로기판의 접속단자의 표면 상태를 확인하기 위한 SEM(주사전자현미경) 사진이다.
도 15는 도 13의 접합소자를 강제 분리하여 전기소자의 전극과 인쇄회로기판의 접속단자의 표면 상태를 확인하기 위한 SEM(주사전자현미경) 사진이다.
도 16은 산발생제(TAG)를 포함하지 않는 폴리머 접합물질에 의하여 접착된 전자소자의 신뢰성 테스트(PCT; Pressure Cooker Test) 결과이다.
도 17은 산발생제(TAG)를 포함하는 폴리머 접합물질에 의하여 접착된 전자소자의 신뢰성 테스트(PCT; Pressure Cooker Test) 결과이다.
21: 전극 25: 금속솔더
27: 산화층 30: 인쇄회로기판
31: 접속단자 40: 접착부분
45: 화합물층 47: 화합물
Claims (9)
- 청구항 1에 있어서,
상기 폴리머 접합물질은 충전제를 더 포함하는 전자 패키징용 비전도 폴리머 접합물질.
- 청구항 2에 있어서,
상기 충전제는 세라믹 분말, 및 비전도성 분말 중 적어도 어느 하나를 포함하는 전자 패키징용 비전도 폴리머 접합물질.
- 청구항 1에 있어서,
상기 산발생제(TAG)는 전체 폴리머 접합물질의 중량을 기준으로 0.5 내지 50wt%가 포함되는 전자 패키징용 비전도 폴리머 접합물질. - 삭제
- 전자 패키징 공정에 사용되는 필름으로써,
상기 필름은 베이스 필름; 및
상기 베이스 필름의 어느 일면 또는 양면에 형성된 하나 이상의 접착제층;을 포함하되,
상기 접착제층은 전자 패키징을 위한 폴리머 접합물질로 이루어지고, 상기 폴리머 접합물질에는 하기 구조식으로 표시되는 화합물로 이루어진 군에서 선택되는 산발생제(TAG)가 추가 성분으로 함유되는 것을 특징으로 하는 전자 패키징용 필름.
여기서, R1 및 R2는 alkyl, alkenyl, alkynyl, cyclo-alkyl, cyclo-alkenyl, cyclo-alkynyl, 및 aryl 그룹에서 선택되는 작용기임.
- 청구항 6에 있어서,
상기 접착제층은 충전제가 더 포함되는 전자 패키징용 필름.
- 청구항 6에 있어서,
상기 산발생제(TAG)는 전체 접착제층의 중량을 기준으로 0.5 내지 50 wt%가 포함되는 전자 패키징용 필름.
- 삭제
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Citations (3)
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KR20000030037A (ko) * | 1999-03-10 | 2000-06-05 | 윤덕용 | 플라스틱 기판의 플립 칩 접속용 이방성 전도성 접착제의 제조방법 |
JP2009302164A (ja) * | 2008-06-11 | 2009-12-24 | Mitsubishi Chemicals Corp | 半導体発光装置用部材形成液、硬化物、半導体発光装置、半導体発光装置の製造方法、照明装置、および画像表示装置 |
KR20110001927A (ko) * | 2009-06-30 | 2011-01-06 | 도오꾜오까고오교 가부시끼가이샤 | 접착제 조성물 및 접착 필름 |
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KR20000030037A (ko) * | 1999-03-10 | 2000-06-05 | 윤덕용 | 플라스틱 기판의 플립 칩 접속용 이방성 전도성 접착제의 제조방법 |
JP2009302164A (ja) * | 2008-06-11 | 2009-12-24 | Mitsubishi Chemicals Corp | 半導体発光装置用部材形成液、硬化物、半導体発光装置、半導体発光装置の製造方法、照明装置、および画像表示装置 |
KR20110001927A (ko) * | 2009-06-30 | 2011-01-06 | 도오꾜오까고오교 가부시끼가이샤 | 접착제 조성물 및 접착 필름 |
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