KR101374668B1 - Robot for transporting weight and substrate - Google Patents

Abstract

In accordance with an embodiment of the present invention, the transfer robot combined with a heavy object and a substrate includes: a plurality of fingers coupled to a robot hand and supporting at least one of the substrate and the heavy object from below to support the substrate and the heavy object; And a weight adsorbing unit provided on the finger to adsorb the substrate, and a weight support unit supporting the weight while guiding the weight to a predetermined position.

Description

Robot for transporting weight and substrate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heavy object and a transfer robot for both substrates, and more particularly, to a heavy object and a substrate transfer robot including fingers capable of transporting each or both of the heavy objects as well as the substrate.

In general, a substrate is a flat panel display device such as a plasma display panel (PDP), a liquid crystal display (LCD), and an organic light emitting diode (OLED). It refers to a display, a wafer for semiconductors, a glass for photomasks, and the like.

Although a substrate as a flat panel display (FPD) and a substrate as a wafer for a semiconductor are different from each other in terms of material, use, and the like, a series of processing steps such as exposure, development, etching, stripping, rinsing, Cleaning and the like are substantially similar to each other, and the substrates are produced by sequentially progressing these processes.

Thus, the substrates described below may be considered to be all-inclusive terms. However, for convenience of description, the OLED substrate will be described as an example among flat panel display devices (FPD).

OLED substrates are largely released as products through a pattern forming process, an organic thin film deposition process, an encapsulation process, and a bonding process for attaching a substrate on which an organic thin film is deposited and a substrate that has undergone an encapsulation process.

A substrate transfer device or a substrate transfer robot for receiving a substrate from a previous process and transferring the substrate to a subsequent process is provided between the lines connecting the processes so that the processes or the processes in the processes can be sequentially performed. do.

On the other hand, in recent years, as the substrate is enlarged, a substrate protection capsule has been used to prevent deformation of the substrate and to prevent foreign substances from adsorbing on the surface of the substrate. Such substrate protective capsules may also be transported on the process line corresponding to the substrate.

By the way, the capsule for protecting the substrate is an aluminum material that is relatively bulky and heavier in weight than the substrate, and has a problem in structural stability in transferring the same using a substrate transfer robot that transfers only a conventional substrate. Accordingly, there is a demand for a structurally stable transfer device that can simultaneously transfer the substrate and the heavy material.

Korean Patent Publication No. 10-2008-0067490 Jusung Engineering Co., Ltd. 2008.07.21

Therefore, the technical problem to be achieved by the present invention is to provide a transport robot combined with a heavy material and substrate that can be structurally stable and can handle the substrate and the heavy material in combination to improve the efficiency of the process.

According to an aspect of the invention, coupled to the robot hand (hand), a plurality of fingers supporting at least any one of the substrate and the weight from below to support the substrate and the weight in combination; A substrate adsorption unit provided at the finger to adsorb the substrate; And a heavy weight substrate and a transfer robot including a heavy weight support unit supporting the heavy weight while guiding the heavy weight to a predetermined position.

The weight support unit includes a support pad for supporting one end of the weight; An inclined surface that forms an inclined surface with respect to the support pad and guides the heavy material to be seated on the support pad; And it is provided on the support pad, may include a seat leaving blocking portion for stopping the seat out of the weight.

The inclined surface of the inclined guide portion forms a discontinuous line in which some sections are broken, and the seat deviation preventing part is provided to protrude upward from an upper surface of the support pad at a position corresponding to the broken section of the inclined surface. It may be a movement limiting pin inserted into at least one groove formed.

The limiting pin may be hemispherical.

The weight support unit may further include a particle suction part for sucking particles generated due to friction with the weight object.

The particle suction part may be a plurality of suction holes disposed on an inclined surface of the inclined guide part.

The support pad may form an engraved surface to emboss a grid pattern.

The support pad and the inclined guide may be integrally formed and bolted to the finger.

The weight support unit may be arranged in a rectangular composition at different positions of the fingers.

The substrate adsorption unit may include: a vacuum adsorption pad provided along a longitudinal direction of the finger to vacuum adsorption of the substrate; And a vacuum tube tube inserted into the finger to communicate with the vacuum suction pad to form a vacuum flow path.

It may further include an air pump connected to the vacuum tube tube to discharge the heat of the vacuum tube tube to the outside of the finger.

The finger may be formed as a hollow body.

The finger is made of any one of ceramic and carbon fiber reinforced plastic, and the weight may be a plate-shaped body made of aluminum, which is made relatively larger in size than the substrate.

According to an embodiment of the present invention, it is possible to provide a heavy material and substrate transfer robot that can be structurally stable and can handle the substrate and the heavy material in combination to improve the efficiency of the process.

1 is a schematic perspective view of a heavy object and a substrate transfer robot according to an embodiment of the present invention.
FIG. 2 is an enlarged perspective view of the substrate adsorption unit of FIG. 1.
3 is an exploded perspective view of the substrate adsorption unit of FIG. 3.
4 is a cross-sectional view of Fig.
5 is an enlarged perspective view of the weight support unit of FIG. 1.
6 is a view showing a state in which the substrate is supported on the finger of the transfer robot combined with the heavy object according to an embodiment of the present invention.
FIG. 7 is a view showing a state in which a heavy object is supported by a finger of a heavy object and a substrate transfer robot according to an embodiment of the present invention.
8 is a view showing that the substrate and the weight are sequentially supported by the fingers of the heavy object and the substrate transfer robot according to an embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

Prior to the description, a substrate to be described later includes a flat panel display device such as a liquid crystal display (LCD), a plasma display panel (PDP), and an organic light emitting diode (OLED). Although it may refer to a flat panel display (FPD), a wafer for a semiconductor, a glass for a photo mask, and the like, the following description refers to a large LCD or OLED substrate.

In addition, the weight M to be described later may be a capsule for protecting a substrate that protects the appearance of the substrate G with an aluminum plate having a relatively large volume and weight compared to the substrate G. However, since the scope of the present invention is not limited thereto, the weight is not necessarily limited to the capsule for protecting the substrate.

1 is a schematic perspective view of a heavy object and a substrate transfer robot according to an embodiment of the present invention, Figure 2 is an enlarged perspective view of the substrate adsorption portion of Figure 1, Figure 3 is an exploded perspective view of the substrate adsorption portion of Figure 3, Figure 4 3 is a cross-sectional view of Figure 3, Figure 5 is an enlarged perspective view of the heavy weight support unit of Figure 1, Figure 6 is a view showing a state in which the substrate is supported on the finger of the transfer robot combined with the heavy object according to an embodiment of the present invention 7 is a view showing a state in which the heavy material is supported on the finger of the heavy object and the substrate transfer robot according to an embodiment of the present invention, Figure 8 is a heavy object and substrate transfer robot according to an embodiment of the present invention A diagram showing that the substrate and the heavy material are sequentially supported by the fingers of the.

As shown in these figures, the heavy object and substrate transfer robot 10 according to the present embodiment is a robot hand 13 having a cantilever structure, and one end of the robot hand 13 is coupled to the heavy object M and the substrate A plurality of fingers 14 supporting at least one of the substrate G and the weight M in order to support (G) in combination, and provided on the finger 14 to adsorb the substrate (G) The substrate adsorption unit 100 and a weight support unit 200 supporting the weight M while guiding the weight M to a predetermined position.

The robot hand 13 is coupled to an arm 11 capable of rotating, going straight, and lifting in at least one direction. And the arm 11 is connected to the support part 12 fixedly supported on the ground or a separate structure. Thus, the arm 11 rotates, goes straight, and moves up and down with respect to the support 12 so that the plurality of fingers 14 including the robot hand 13 can be placed at a desired position, for example, a cassette for storing the substrate G or the corresponding. It can be pulled into and out of the process chamber.

 One end of the plurality of fingers 14 is coupled to the robot hand 13 to support the heavy material M and the substrate G in the form of a cantilever beam, and to be able to cope with the high load and the high temperature because the plurality of fingers 14 move in and out of the high temperature process chamber. do.

To this end, in the present embodiment, the finger 14 and the robot hand 13 may be made of carbon fiber reinforced plastic having high strength, excellent restoring force against external force, and low thermal conductivity compared to metal. Reinforcing plate 15 may be provided at the coupling portion of the 14 and the robot hand 13 to reinforce the coupling force.

The reinforcement plate 15 is a plate-shaped body partially extended in the longitudinal direction of the finger 14, is placed between the robot hand 13 and the finger 14 to be bolted together, or is integrally manufactured with the robot hand 13 to be fingered. It may be combined with (14).

In addition, the finger 14 has a predetermined distance between the portion where the substrate G is supported and the robot hand 13. This interval is to prevent the heat of the substrate G and the portion of the finger 14 supporting the substrate G from being passed to the robot hand 13 and the robot body through the corresponding process at a high temperature.

In the present embodiment, the plurality of fingers 14 are two in total, and are arranged at predetermined intervals from each other. However, since the scope of the present invention is not limited thereto, the plurality of fingers 14 may be made of ceramic or metal composite according to the working environment, and the weights M to the substrate G may be Depending on the shape, the number of fingers 14 may be more than two in order to transfer more effectively. For convenience of description, the two fingers 14 are given the same reference numerals.

The plurality of fingers 14 have a weight support unit 200 and a substrate adsorption unit for holding at least one of the weight M and the substrate G in order to support both the weight M and the substrate G. 100) is provided.

The substrate adsorption part 100 serves to grip the substrate G so as not to be separated from the plurality of fingers 14. The substrate adsorption part 100 is provided along the longitudinal direction of the finger 14 to vacuum adsorption of the substrate G. The pad 110 and the vacuum tube 120 is inserted into the finger 14 to communicate with the vacuum suction pad 110 to form a vacuum flow path.

1 to 4, a plurality of vacuum adsorption pads 110 may be arranged one by one at predetermined intervals along the length direction of each finger 14. The vacuum suction pad 110 has an annular suction member 111 that vacuum-adsorbs the substrate G, and the suction member that is exposed on the upper surface of the finger 14 through the through hole H formed in the finger 14. (111) and the connecting member 112 for interconnecting the vacuum tube 120 inside the finger (14). In addition, the suction member 111 of the vacuum suction pad 110 may be coupled to the upper surface of the finger 14 by the bracket 113.

Specifically, the adsorption member 111 has a structure in which the lower end 111a which contacts the upper surface of the finger 14 protrudes in the circumferential direction than the upper end 111b which adsorbs the substrate G. In addition, the bracket 113 is provided as a plate-shaped body having a central portion penetrated by a diameter capable of covering the lower end 111a of the adsorption member 111. The adsorption member 111 is seated on the upper end of the finger 14 and the bracket 113 is fitted to the adsorption member 111 so as to cover the lower end of the adsorption member 111, and then the edge of the bracket 113 is finger 14. ), The adsorption member 111 may be fixed to the finger 14 by bolting.

The vacuum adsorption pad 110 may be made of a synthetic resin material having good airtightness and flexibility.

The vacuum tube tube 120 is a portion forming a vacuum flow path, which is embedded along the longitudinal direction of the finger 14 and connected to the connection member 112 of each vacuum suction pad 110.

Although not shown in detail, such a vacuum tube tube 120 may be connected to a vacuum device (not shown) that extends outside the finger 14 to form a vacuum provided in the robot body. The vacuum apparatus is operated when the substrate G is placed on the plurality of fingers 14 to create a vacuum state in the plurality of vacuum adsorption pads 110 connected to each other through the vacuum tube tube 120. As a result, the substrate G held by the plurality of fingers 14 is vacuum-adsorbed by the vacuum adsorption pad 110 and is prevented from being separated from the fingers 14.

In the present embodiment, the substrate adsorption unit 100 includes a vacuum tube tube 120 embedded in the finger 14 in order to increase the degree of vacuum of the vacuum adsorption pad 110. The finger 14 may be provided as a hollow body to replace the 120 to form a vacuum flow path. In this case, the substrate G may be adsorbed through the through hole H of the finger 14 described above. However, the through hole (H) is smaller than the vacuum adsorption pad 110, the adsorption surface is smaller, since the airtightness may be lowered, it is preferable to apply the vacuum adsorption pad 110.

On the other hand, the finger 14 according to the present embodiment is an air (air leak) when the temperature is increased by repeatedly entering and exiting the relevant chamber of the high temperature, so that the vacuum adsorption pad 110 or the vacuum tube tube 120 connected thereto is thermally expanded ) May occur. If the aerobic is excessive, the adsorption force of the substrate G is lowered, and a disturbance occurs in the transfer of the substrate G.

Therefore, the transfer robot 10 for both the heavy material and the substrate according to the present embodiment further includes an air pump for discharging the heat remaining in the vacuum tube tube 120 to the outside in order to prevent the air phenomenon. Although not shown for convenience of illustration, the air pump is provided in the robot body and is connected to the air discharge tube connected in a bypass form to the vacuum tube tube 120 extending to the outside of the finger 14.

On the other hand, the weight support unit 200 is responsible for holding the weight (M) loaded on the finger (14).

5 to 8, the weight support unit 200 forms a support pad 210 for supporting one end of the weight M, and an inclined surface 222 with respect to the support pad 210, and includes a weight ( The inclined guide portion 220 for guiding the M to be seated on the support pad 210, the seat release preventing unit 230 provided on the support pad 210 to prevent the seat from being separated from the weight M, and the heavy material ( Particle suction unit 240 for sucking the particles (particle) generated by the friction with M).

The weight support unit 200 may be arranged in a rectangular composition at different positions of the fingers (14). That is, in the present embodiment, a total of four weight support units 200 are supported by the pair of two weight support units 200 per finger 14 to support both ends of the weight M. Are spaced apart from each other on the top of each other.

The support pad 210 is a portion having a plate surface that substantially supports one end of the weight M so that the plate surface of the support pad 210 is at least higher than the plate surface of the substrate G adsorbed to the substrate adsorption unit 100. Has a predetermined thickness. This is to prevent the weight of the weight M from being transferred to the substrate G disposed under the weight M when the substrate G and the weight M are simultaneously transferred.

Although not shown in detail, the surface of the support pad 210 may be engraved to have a rhombus or a monarch pattern. The surface of the engraved support pad 210 is advantageous to prevent the sliding of the weight (M). However, the scope of the present invention is not necessarily limited to these matters. That is, the support pad 210 may be made of a high temperature rubber compound in order to prevent slippage or slippage of the weight M, or may be further provided with a stoppage stop portion 230 to be described later.

The inclined guide part 220 forms an inclined surface 222 with respect to the support pad 210 and guides the weight M to be seated on the support pad 210. In the present embodiment, the heavy support unit 200 disposed in pairs for each finger 14 is disposed in a direction in which the inclined surfaces 222 of the inclined guide part 220 face each other. The inclined guide portion 220 is inclined surface 222 even when the weight M is loaded on the finger 14, even if one end of the weight M is slightly off the plate surface of the support pad 210. Guide the weight (M) to the plate surface of the support pad (210) through.

The inclined guide portion 220 and the support pad 210 may be integrally formed, and the top surface 221 and the support pad 210 of the inclined guide portion 220 forming a plate surface parallel to the support pad 210. A bolt fastening hole (S) is provided and may be fixed by bolts fastened to the finger (14).

On the other hand, the seat departure blocking portion 230 plays a role in preventing the weight (M) seated on the support pad 210 is separated from the support pad 210 during transport. The restraining stopper 230 in this embodiment is provided to protrude on the upper surface of the support pad 210, the movement limiting pin is inserted into the weight (M) is formed with at least one groove (not shown) in both end regions 230.

The movement limiting pin 230 may be provided in a hemispherical shape protruding upward from the support pad 210, and the material may be a high heat resistance peak (PEEK, polyetheretherketon) material. The movement limiting pin 230 is easy to insert into the groove of the weight (M), there is an advantage that can reduce the particles due to friction with the weight (M) in the insertion process.

The movement limiting pin 230 according to the present exemplary embodiment may be disposed in an area where the inclined surface 222 of the inclined guide part 220 and the plate surface of the support pad 210 come into contact with each other. Specifically, the inclined surface 222 of the inclined guide portion 220 forms a discontinuous line in which some sections are broken, and the inclined guide portion 220 supports the pad 210 inwardly between the broken inclined surfaces 222. A bent portion 223 is further provided to form a space that is bent with respect to. In addition, the movement limiting pin 230 is disposed in and out of the bent portion 223 based on a virtual line in which the inclined surface 222 of the inclined guide portion 220 and the plate surface of the support pad 210 are in contact with each other. Accordingly, the weight M loaded on the finger 14 may be inserted into the movement limiting pin 230 while descending down the inclined surface 222 of the inclined guide part 220.

However, the scope of the present invention should not be limited to these matters, and according to the number and position of the grooves formed in the weight (M), the number of the movement limiting pin 230 disposed on the plate surface of the support pad 210 and The location may vary.

On the other hand, the particles generated in the weight (M) to be transported with the substrate (G) may adversely affect the work process should be able to minimize the particles during the transport of the weight (M).

To this end, the heavy-duty substrate transfer robot 10 according to the present embodiment has a particle suction unit 240 that sucks particles generated due to friction when remaining on the weight M itself or loading the weight M on the finger 14. ).

The particle suction part 240 may be a plurality of suction holes 240 disposed on the inclined surface 222 of the inclined guide part 220. In the present embodiment, the suction hole 240 is disposed one by one on both sides of the inclined surface 222 of the inclined guide portion 220, and the inclined surface 222 of the inclined guide portion 220 when the heavy material (M) is loaded, the movement restriction. Particles generated by the friction between the pin 230 and the support pad 210 and the weight (M) is sucked. The sucked particles are not shown in detail, but may be discharged to the outside through suction tubes (not shown) connected to the suction holes 240 and disposed inside and outside the finger 14. The suction tube may be connected to the vacuum device described above.

Of course, unlike the present embodiment, the plurality of suction holes 240 may be disposed on the upper surface of the support pad 210 or the upper surface 221 of the inclined guide part 220 by varying the number and positions.

As described above, the heavy object and the substrate transfer robot 10 according to the present embodiment may include a substrate adsorption unit 100 capable of holding the substrate G and a heavy object supporting unit capable of holding the heavy object M ( 200). In addition, the support pad on which the heavy material is seated is provided with a plate surface higher than the plate surface of the substrate G adsorbed to the substrate adsorption unit 100 so that the heavy material M loaded on the finger 14 and the substrate G do not interfere with each other. Are not placed. The heavy object of the present invention and the substrate transfer robot 10 having such a configuration can handle the substrate (G) and the weight (M) in combination to reduce the tact time of the process and improve productivity. .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

10: transfer robot for heavy and substrate
11: Arm 12: Supporting Part
13: hand 14: finger
100: substrate adsorption unit 110: vacuum adsorption pad
111: adsorption member 112: connection member
120: vacuum tube tube 200: weight support unit
210: support pad 220: inclined guide
221: top surface 222: inclined surface
223: bend portion 230: stop deviation seat
240: particle suction

Claims (13)

A plurality of fingers coupled to a robot hand and supporting at least one of the substrate and the weight below to support the substrate and the weight in a combined manner;
A substrate adsorption unit provided at the finger to adsorb the substrate; And
It includes a weight support unit for supporting the weight while guiding the weight to a predetermined position,
The weight support unit,
A support pad for supporting one end of the heavy material;
An inclined surface that forms an inclined surface with respect to the support pad and guides the heavy material to be seated on the support pad; And
It is provided on the support pad, and includes a seat escape blocking unit for stopping the seat off of the weight,
The inclined surface of the inclined guide portion forms a discontinuous line in which some sections are broken,
The out of seat stopper,
Combination with the heavy material and the substrate, characterized in that it is provided to protrude upward from the upper surface of the support pad at a position corresponding to the break section of the inclined surface, inserted into at least one groove formed in the heavy material Transport robot. delete delete The method of claim 1,
The transfer restriction pin is a heavier object and a substrate transfer robot, characterized in that the hemispherical shape. The method of claim 1,
The weight support unit,
And a particle suction part for sucking particles generated by friction with the heavy object. 6. The method of claim 5,
The particle suction unit is a heavy object and substrate transfer robot, characterized in that the plurality of suction holes disposed on the inclined surface of the inclined guide portion. The method of claim 1,
The support pad has a heavy object and substrate transfer robot, characterized in that it has an engraved surface to emboss a grid pattern. The method of claim 1,
The support pad and the inclined guide unit is integrally formed, the transfer robot for both heavy and substrate, characterized in that the bolt is coupled to the finger. The method of claim 1,
The heavy material support unit is a heavy object and substrate transfer robot, characterized in that arranged in a rectangular composition at different positions of the fingers. The method of claim 1,
The substrate adsorption unit,
A vacuum adsorption pad provided along the longitudinal direction of the finger to vacuum adsorb the substrate; And
A transfer robot for both a heavy material and a substrate comprising a vacuum tube tube inserted into the finger to communicate with the vacuum suction pad and forming a vacuum flow path. 11. The method of claim 10,
The transfer robot combined with the heavy material and the substrate further comprises an air pump connected to the vacuum tube tube to discharge the heat of the vacuum tube tube to the outside of the finger. 11. The method of claim 10,
The finger is a transfer robot for both the heavy material and the substrate, characterized in that formed inside the hollow hollow body. The method of claim 1,
The finger is made of any one of ceramic and carbon fiber reinforced plastic,
The heavy material and the transfer robot combined with the heavy material and the substrate, characterized in that the plate-shaped body made of aluminum material is made relatively larger (size) than the substrate.

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