KR101362065B1 - 상변화 잉크를 이용한 플렉서블 컬러 필터 기판 및 그 제조방법 - Google Patents
상변화 잉크를 이용한 플렉서블 컬러 필터 기판 및 그 제조방법 Download PDFInfo
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- KR101362065B1 KR101362065B1 KR1020130087666A KR20130087666A KR101362065B1 KR 101362065 B1 KR101362065 B1 KR 101362065B1 KR 1020130087666 A KR1020130087666 A KR 1020130087666A KR 20130087666 A KR20130087666 A KR 20130087666A KR 101362065 B1 KR101362065 B1 KR 101362065B1
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Images
Classifications
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- G—PHYSICS
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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Abstract
Description
도 2는 본 발명의 일 실시예에 따른 플렉서블 컬러 필터 기판의 제조 방법을 나타낸 모식도이다.
도 3은 플렉서블 기판 상에 도트 피치를 변경해가면서 상변화 잉크를 토출한 후에 기판 상에 형성된 패턴 형상을 보여주는 광학 이미지이다.
도 4는 도 3의 패턴을 가압한 후의 패턴 형상을 보여주는 광학 이미지이다.
도 5는 도 3(c)의 패턴을 3D 뷰어로 관찰한 이미지이며, 도 6은 상기 도 5 이미지의 Y방향(Y axis)으로 절단한 면의 프로파일이다.
도 7은 도 4(c)의 패턴을 3D 뷰어로 관찰한 이미지이며, 도 8은 상기 도 7 이미지의 Y방향(Y axis)으로 절단한 면의 프로파일이다.
도 9는 실시예 1 및 4의 컬러 필터 기판의 내열성 테스트 결과를 보여주는 사진이다.
도트 피치(㎛) | 가압 전 | 가압 후 | ΔW(㎛) | ΔH(㎛) | |||
선폭(W) | 높이(H) | 선폭(W) | 높이(H) | ||||
실시예 1 | 40 | 46 | 14 | 100 | 4.5 | 54 | 7.5 |
실시예 2 | 20 | 70 | 20 | 130 | 9 | 60 | 11 |
실시예 3 | 10 | 90 | 28 | 150 | 12 | 60 | 16 |
20: 잉크젯 헤드
30: 플렉서블 기판
40: 가압롤
50: 광 조사장치
Claims (15)
- 플렉서블 기판 및 상기 플렉서블 기판 상에 형성된 R, G, B 패턴을 포함하고,
상기 R, G, B 패턴은 녹는점이 50℃ 내지 120℃인 상변화 잉크 조성물에 의해 형성되는 플렉서블 컬러 필터 기판.
- 제1항에 있어서,
상기 플렉서블 기판은 플라스틱, 박형 유리, 종이, 금속박 섬유로 강화된 플라스틱 또는 이들의 복합체로 이루어진 것인 플렉서블 컬러 필터 기판.
- 삭제
- 제1항에 있어서,
상기 R, G, B 패턴은 상부 표면의 산술평균거칠기가 패턴 높이의 0.1% 이상 5% 이하인 플렉서블 컬러 필터 기판.
- 제1항에 있어서,
상기 R, G, B 패턴은 패턴의 높이 대 폭의 비가 1 : 20 내지 1 : 200인 플렉서블 컬러 필터 기판.
- 플렉서블 기판 상에 상변화 잉크 조성물을 토출하여 R, G, B 패턴을 형성하는 단계; 및
상기 R, G, B 패턴을 (상변화 잉크의 녹는점-20)℃ 내지 (상변화 잉크의 녹는점+15)℃의 온도로 가압하는 단계를 포함하는 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 플렉서블 기판은 플렉서블 기판이 권취된 롤로부터 권출된 것인 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 토출은 (상변화 잉크 조성물의 녹는점 +5)℃ 내지 (상변화 잉크 조성물의 녹는점 +75)℃의 온도에서 수행되는 것인 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 토출은 70℃ 내지 125℃의 온도에서 수행되는 것인 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 가압하는 단계는 0.01 내지 50 MPa의 압력에서 수행되는 것인 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 가압하는 단계는 가압롤 또는 평판에 의해 수행되는 것인 플렉서블 컬러 필터 기판의 제조 방법.
- 제11항에 있어서,
상기 가압하는 단계는 가압롤과 상기 기판을 상대속도 1 내지 100m/s로 이동시키면서 수행되는 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 가압하는 단계 전에 상기 R, G, B, 패턴의 상부에 보호시트를 적층하는 단계를 추가로 포함하는 플렉서블 컬러 필터 기판의 제조 방법.
- 제6항에 있어서,
상기 가압된 R, G, B, 패턴을 고정시키는 단계를 더 포함하는 플렉서블 컬러 필터 기판의 제조 방법.
- 제14항에 있어서,
상기 고정시키는 단계는 광 경화에 의해 이루어지는 것인 플렉서블 컬러 필터 기판의 제조 방법.
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