KR101351807B1 - X-ray analysis apparatus having variable shield - Google Patents

Abstract

The present invention relates to an X-ray analyzing apparatus having a variable shield having a structure capable of effectively preventing leakage of X-rays, the table on which the subject is seated, the X-ray generating unit for emitting X-rays toward the subject, the subject A detection unit for detecting X-rays scattered from the object, the inspection object is accommodated therein to form an inspection space where the X-rays are scattered to perform the inspection, and the first open portion and the second open portion on the outer circumferential surface so that the X-ray generator and the detection unit are disposed. A shield formed with an open portion, the first flow portion coupled to the X-ray generating portion and covering the first open portion, the first flow portion slidable along the outer circumferential surface of the shield portion, and the second flow portion coupled to the detection portion and disposed to cover the second open portion. A second flow part slidably moved along an outer circumferential surface, wherein the first flow part and the second flow part are slidably moved along the outer circumferential surface of the shielding portion to generate X-rays The X-ray analysis apparatus having a variable shield for varying an angle of the line X, which is incident to X-rays emitted from the detecting section is provided. Therefore, accurate and diverse inspection of the inspected object is possible, and the shielding performance is excellent and the spatial advantage is improved.

Description

X-ray analyzer with variable shielding {X-RAY ANALYSIS APPARATUS HAVING VARIABLE SHIELD}

The present invention relates to an X-ray analyzing apparatus, and more particularly, to an X-ray analyzing apparatus having a variable shield having a structure capable of effectively preventing leakage of X-rays.

X-ray diffraction analysis (XRR), incineration X-ray scattering (SAXS) and X-ray diffraction (XRD)

X-ray reflection analysis (XRR) and small-angle X-ray scattering (SAXS) are mainly used as a technique for analyzing the thickness of the thin film layer deposited on the substrate, the density and the characteristics of nanomaterials or biomaterials.

X-ray diffraction analysis (XRD) is a technique for studying the crystal structure of the sample, the sample is irradiated with a monochromatic X-ray, the difference and lightness of the diffraction peak is measured by the detector. The characteristic scattering angle and the luminous intensity of the scattered light depend on the lattice plane of the sample to be studied and the number of atoms occupying the lattice plane. For a given wavelength λ and the interval d of the lattice planes, the X- = 2dsin [theta], n: scattering degree). The XRD spectra that can be tuned by stress, solid solution, or other conditions are deformed by the deformation of the lattice plane, so that the structure of the sample can be grasped.

For reference, in the context of the present invention, the term 'reflection' or 'scattering' is used to refer to any process emitted from the sample by irradiating the sample with X-ray, X-ray reflection analysis (XRR), incineration X It can be understood to include scattering in conventional X-ray fluorescence as well as ray scattering (SAXS) and X-ray diffraction analysis (XRD).

1 is a conceptual diagram briefly showing the configuration of an X-ray analyzer of the prior art.

The sample S is placed on a predetermined sample table and the X-ray generator 11 directs the X-ray converging beam 14 toward the surface of the sample S.

The detector 16 is arranged to detect the X-rays 15 scattered from the sample, and this configuration is common to the concept of X-ray diffraction analysis equipment or X-ray reflection analysis equipment.

In such an analysis apparatus, a problem of exposure due to leakage in X-rays is caused. In order to solve this problem, methods of providing the entire analysis apparatus in a predetermined shielding chamber or arranging predetermined shielding members in a portion thereof have been proposed.

However, when the shielding chamber is constructed, it is not only economically inconvenient but also inconvenient to operate, and when the shielding member is disposed in the parts of the apparatus, the productivity is notably reduced and the exposure of the X-ray path cannot be completely shielded. There is a problem that is likely to occur.

On the other hand, in the conventional X-ray material analysis apparatus, it is common to arrange and place an X-ray generator such as an X-ray tube and a detector at a predetermined angle with respect to the center axis of the sample table. It also caused problems of inefficiency of production process and increase of production cost.

Accordingly, an object of the present invention is to provide an X-ray analyzing apparatus having a variable shielding portion capable of effectively shielding X-ray leakage while having a simple structure.

In addition, the present invention provides a variable shielding portion capable of carrying out different X-ray scattering measurement for the inspected object, while being able to grasp the structure of the sample having various characteristics while effectively supporting the X-ray generating unit and the detecting unit and guiding the movement. The purpose is to provide an X-ray analyzer.

An X-ray analyzing apparatus having a variable shield according to the present invention includes a table on which an inspection object is seated, an X-ray generation unit emitting X-rays toward the inspection object, a detection unit detecting X-rays scattered from the inspection object, and an inside. A shielding part having a first open part and a second open part formed on an outer circumferential surface thereof so as to receive an object to be inspected so that X-rays are scattered to perform an examination, and the X-ray generator and the detector are disposed therein, and coupled with the X-ray generator. And a first flow part disposed to cover the first open part and slidably moved along the outer circumferential surface of the shield, and a second flow part coupled to the detection part and disposed to cover the second open part and slidable along the outer circumferential surface of the shield, The first flow part and the second flow part are slid along the outer circumferential surface of the shield to vary the angles of the X-rays radiated from the X-ray generator and the X-rays incident on the detector. Provides an X-ray analyzer having a variable shield. Therefore, accurate and diverse inspection of the inspected object is possible, and the shielding performance is excellent and the spatial advantage is improved.

In addition, the X-ray analysis apparatus having a variable shield according to the present invention, the outer peripheral surface of the shield is made of a cylindrical shape, the first flow portion and the second flow portion may be formed in an arc shape. Thus, accurate shielding and movement guides are possible.

In addition, the X-ray analysis apparatus having a variable shield according to the present invention, the center line is formed along the longitudinal direction of the first flow portion and the second flow portion relative to the reference line (C) formed along the circumferential direction of the shielding portion. It is preferable to arrange | position so that ((alpha), (beta)) may incline. Therefore, the possibility of interference in the vicinity of the X-ray generator and the detector can be minimized.

In addition, in the X-ray analyzer having a variable shield according to the present invention, the angle of the first flow portion and the second flow portion may be varied while the X-ray generator and the detector move along the outer circumferential surface of the shield. Therefore, accurate measurement is possible.

In addition, the X-ray analysis apparatus having a variable shield according to the present invention, the shielding portion is made of a portion of the outer peripheral surface of the spherical shape, the first flow portion and the second flow portion is formed in a shape corresponding to the outer peripheral surface of the shielding portion Can be. Thus, effective placement and movement guides are possible.

In addition, the X-ray generator and the detector may direct the center of the sphere of the shield.

The X-ray analysis apparatus having a variable shield according to the present invention can minimize the waste of space while optimizing the arrangement of the X-ray generator, the detector and the table so that the shield can be configured to effectively shield and improve productivity. It works.

In addition, the X-ray analysis device having a variable shield of the present invention is capable of moving the X-ray generator and the detection unit relative to the inspected object to enable effective inspection while preventing the degradation of shielding performance even when the X-ray generator and the detection unit are moved. There is an effect that can be.

In addition, there is an effect to ensure the maximum distance that can be moved to the X-ray generator and the detector.

1 is a conceptual diagram of an X-ray analyzing apparatus having a variable shield of the prior art.
2 is a conceptual diagram of an X-ray analyzing apparatus having a variable shield according to the concept of the present invention.
Figure 3 is a side cross-sectional view of the X-ray analysis instrument having a variable shield in accordance with a preferred embodiment of the present invention.
4 is a plan view of an X-ray analyzing apparatus having a variable shield according to a further concept of the present invention.
Figure 5 is a side cross-sectional view showing an operating state of the X-ray analyzer having a variable shield of FIG.

Hereinafter, with reference to the accompanying drawings will be described in detail an X-ray analyzer having a variable shield according to a preferred embodiment of the present invention.

1 is a side view showing an X-ray analyzing apparatus having a variable shield according to the concept of the present invention.

As in the prior art, the X-ray analysis apparatus having a variable shield according to the present invention is fixed from the table 300 to be fixed to the specimen (S), the X-ray generator 100 for irradiating X-rays and the sample The detector 200 detects scattered X-rays.

Here, the test object (S) may be understood to include an object requiring nondestructive testing, such as a sample, a sample of a substance, or various products.

The X-ray generator 100 is used for various types of equipment for emitting X-rays, X-ray tube having an electron gun and a target therein is used, preferably a closed type (closed type) having a substantially vacuum state and high power inside type) can be used.

When electrons generated from the electron gun collide with the target, the X-ray may be output and irradiated to the inspected object S seated on the table 300.

The detector 200 includes a detector capable of detecting scattered X-rays. The detector converts the detected X-rays into electrical signals and transmits them to a controller (not shown) Provide the data.

In the concept of the present invention, the X-ray generation unit 100 and the detection unit 200 provide a concept capable of precise shielding in the process of moving relative to the table 300 on which the test object is seated, respectively.

The X-ray generator 100 and the detector 200 may be moved along a predetermined virtual circumference with respect to the test object S or the table 300, and thus X reflected or scattered or diffracted by the test object. The direction of the line can be varied, so it should be noted that there is an advantage that a precise inspection is possible with a single inspection device.

In order to move the X-ray generator 100 and the detector 200, a plurality of arms (not shown) rotate about the table 300 side and combine the X-ray generator 100 and the detector 200, respectively. ) Can be arranged, the structure for such a rotation can be adopted a variety of configurations.

As described in the prior art, the X-ray analyzer having such a structure is difficult to shield the internal space and the structure may be complicated. In the structure in which the X-ray generator 100 and the detector 200 are variable, the outflow of X-rays is prevented. The problem becomes more difficult to block.

In order to solve this problem, in the present invention, the shield 400 is formed in a substantially cylindrical shape and combines the X-ray generator 100 and the detector 200 on a portion of the circumference while accommodating the table 300 therein. do.

Specifically, the shielding portion 400 accommodates the table 300 therein, and forms a predetermined inspection space 405 so that an X-ray path can be formed, as described below. Since the raw part 100 and the detection part 200 must move circumferentially, the raw part 100 and the detection part 200 may have a circular shape on the side cross section.

The shielding part 400 is preferably made of an alloy material including lead to prevent the X-rays from leaking to the outside of the inspection space 405, but is not necessarily limited thereto.

In addition, the shielding portion 400 is formed in a substantially cylindrical shape, but at least one opening portion (FIG. 3) so that a predetermined X-ray path is formed by combining the X-ray generator 100 and the detector 200 at a portion of the circumference. 401 and 402 may be formed, and the X-ray generator 100 and the detector 200 may be coupled to the opening. However, as will be described later, when the moving paths of the X-ray generator 100 and the detector 200 do not move along the same imaginary line, the outer circumferential surface of the shield 400 may be formed as a part of a sphere.

According to this concept, the X-ray generator 100 and the detector 200 may be moved along the outer circumferential surface of the shield 400 with respect to the table 300, respectively.

Here, the side where the detection unit 200 and the X-ray generating unit 100 of the shielding unit 400 is disposed is defined as the outer circumferential surface, and the opposite side is opposite to the rear side, which is viewed based on the illustrated state of FIG. 2. Define it and use it.

Since the X-ray generator 100 and the detector 200 have a structure that can be rotated around the table 300 or the inspection object S, the shield 400 does not necessarily have to be cylindrical. Care must be taken. In some cases, the site where the table 300 is disposed may be formed in a selected shape and may form a part of a circular or spherical shape at the site where the X-ray generator 100 and the detection unit 200 are disposed.

On the other hand, when an opening is formed in a part of the shielding part 400 and the X-ray generator 100 and the detector 200 move along the circumference, X-rays may leak to such a part, and leakage due to movement between the members may occur. A structure that can prevent this is required.

Hereinafter, leakage preventing structures according to various embodiments will be described in more detail.

3 is a side cross-sectional view of an X-ray analyzing apparatus having a variable shield according to a preferred embodiment of the present invention.

As described above, the shield 400 forms an inspection space 405 therein, and the X-ray generator 100 and the detector 200 are disposed in a portion of the circumference. Omit.

In an exemplary embodiment of the present invention, an open portion may be formed from an upper portion to both sides at a portion of the outer circumference of the shielding portion 400, more specifically, at a portion at which the table 300 is disposed. The opening may include a first open portion 401 on which the X-ray generator 100 is disposed, and a second open portion 402 on which the detection unit 200 is disposed, and leakage of X-rays when the member moves along the opening. The flow portion may be arranged in a manner to cover the opening to prevent the.

The flow portion is formed in a substantially arc shape on the side cross-section, it is disposed to cover the opening portion, the X-ray generator 100 and the detection unit 200 may be coupled to penetrate through the inside and the outside.

In detail, the first flow part 410 to which the X-ray generator 100 is coupled is disposed to cover the first open part 401, so that the first flow part 410 moves in the vertical direction of the X-ray generator 100. The opening part 401 is sealed and the second flow part 420 to which the detection part 200 is coupled is disposed to cover the second opening part 402 so that the movement of the detection part 200 in the vertical direction (b) occurs. The second open portion 402 is sealed.

Here, the closed means that the leakage of the X-ray to some extent, and does not mean a complete sealing between the inspection space 405 and the outside.

The first flow part 410 and the second flow part 420 may be moved in a sliding manner along the circumferential direction of the shielding part 400 in the first open part 401 and the second open part 402. Accordingly, the circumferential lengths of the first flow part 410 and the second flow part 420 may be longer than the opening part.

According to the above concept, the incident or scattering direction of the X-rays can be freely controlled with respect to the inspected object S disposed on the table 300, and in this process, the leakage of the X-rays can be effectively prevented. In this case, it should be noted that the shielding performance can be ensured as compared with the case in which a predetermined shielding structure is formed only in the X-ray generator or the detector.

4 is a plan view of an X-ray analyzing apparatus having a variable shield according to an additional concept of the present invention.

For example, the outer circumferential surface of the shielding portion 400 is formed in a cylindrical shape or a portion thereof, and the first flow portion 410 and the second flow portion 420 have a shape corresponding thereto, and a virtual circumference of each other. When moved along, it may occur that each upper end side is in contact.

This means a limitation of the moving distance of the X-ray generator 100 and the detector 200 coupled to the first flow unit 410 and the second flow unit 420, respectively, and in some cases perpendicular to the inspection object S. Problems can arise when irradiating and detecting X-rays close to.

An additional concept of the present invention proposes a concept in which the movement paths of the first flow part 410 and the second flow part 420 move along different lines.

When setting the reference line C in the circumferential direction of the shield 400, the center lines α and β in the longitudinal direction of the first flow part 410 and the first flow part 410 are the reference line C. ) May be arranged to shift. Here, the longitudinal direction means a direction substantially coinciding with the direction in which the flow portion is moved. In the case of such a shape, the first flow portion 410 and the second flow in three dimensions for close contact with the outer circumferential surface of the shielding portion 400. The flow part 420 is formed in a shape in which both sides are not symmetrical.

As another embodiment, the center lines (α, β) of the first flow portion 410 and the second flow portion 420 may be formed in parallel to be spaced apart from each other at a predetermined interval, in this case, if there is no space margin shielding portion There is a possibility that a problem that the width of the overall front and rear direction of the 400 is too large occurs.

Therefore, in a further embodiment of the present invention, the center lines α and β are preferably formed with a predetermined set angle θ with respect to the reference line C. Here, the angle may be understood to mean the angle between the tangent line at the point where the reference line (C) and the center line (α, β) meet.

In this case, interference between the movement path (a) of the first flow part 410 and the movement path (b) of the second flow part 420 may be minimized. This state is shown not to cross each other. As the X-ray generator 100 and the detector 200 are adjacent to each other, that is, as the angle with respect to the vertical axis of the table 300 decreases, the X-ray generator 100 and the detector 200 may be adjacent to each other. The distance that can be adjacent without being determined may be determined by the front and rear widths of the flow portion and the set angle θ.

Here, the width of the front and rear of the shield 400, the width of the flow portion and the set angle (θ) may be made in various cases.

5 is a side cross-sectional view showing an operating state in which the X-ray generator and the detector are adjacent to each other in a further embodiment of the present invention described above.

When the shield 400 on the side cross section is formed in a circular shape and the first flow part 410 and the second flow part 420 are formed in an arc shape so as to cover the opening part, the shield part 400 crosses each other in the front as the sliding part moves upward. The area is getting bigger.

According to this concept, it should be noted that the arrangement of the shield 400 and the detector 200 and the X-ray generator 100 have an advantage of maximizing the distance moved in the circumferential direction to the maximum.

On the other hand, as shown in the basic concept of the present invention, when the center line (α, β) coincides with the reference line (C), the angle of the X-ray irradiated from the X-ray generator 100 and the X-ray incident to the detector 200 Although there is no big problem in forming the, when the center line (α, β) and the reference line (C) is disposed with a set angle (θ) may need to adjust the direction of the X-rays to be irradiated and incident.

As a first embodiment for solving this problem, the outer circumferential surface of the shielding part 400 may be formed in the shape of a sphere, and the first flow part 410 and the second flow part 420 may be formed in the shape of a part of the sphere covering it. In this case, the sphere may be a sphere centered on a predetermined part of the table 300 or a predetermined part of the test object S, and the detection unit 200 may be moved while being guided along the outer surface of the sphere. And the incident direction may be directed toward the center.

However, in the case of the shape as described above, there is a concern that the productivity of the shielding part 400 and the flow part may be lowered. In order to solve this problem, the outer circumferential surface of the shielding part 400 has a cylindrical shape. The first flow part 410 and the second flow part 420 are formed in an arc shape covering the same, but the angle is relative to the center normal of the flow part so that the X-ray generator 100 and the detection part 200 can be directed to the center. Present concepts that can be varied.

That is, as the X-ray generator 100 and the detector 200 are adjacent to each other, the X-ray generator 100 and the detector 200 are eccentric with respect to the center lines α and β, so that the flow unit may be corrected. It is preferable that the tilting is further made.

On the other hand, the shield 400 may further include an opening and closing portion (not shown) that can open the inside on the front or rear, this opening and closing portion may be formed corresponding to the position where the table 300 is disposed.

Through the opening and closing part, the user can draw or move the inspected object into and out of the inspection space 405. The opening and closing part may be applied to various embodiments of the X-ray analyzing apparatus including the variable shielding part according to the concept of the present invention.

The X-ray analyzing apparatus including the variable shield according to the present invention as described above is optimized for the arrangement of the X-ray generator 100, the detector 200, and the table 300 while minimizing unnecessary waste of space. Since the part can be configured, effective shielding is possible and productivity is improved.

In addition, the X-ray analysis device having a variable shield of the present invention, while maintaining the shielding performance effectively even when the X-ray generator 100 and the detector 200 is moved, the maximum distance that the X-ray generator and the detector can be moved There is an advantage to be secured.

Meanwhile, since the X-ray generator 100 and the detector 200 may be supported on the outer circumferential surface of the shield 400, a member capable of guiding accurate movement such as an arm may be omitted.

In the foregoing, the present invention has been described in detail based on the embodiments and the accompanying drawings. However, the scope of the present invention is not limited by the above embodiments and drawings, and the scope of the present invention will be limited only by the content of the following claims.

100 ... X-ray generator 200 ... detector
300 ... table 400 ... shield
401 ... first open 402 ... second open
405 Inspection space 410 First flow section
420 ... Second Flow Section

Claims (6)

A table on which the test object is seated;
An X-ray generator for emitting X-rays toward the test object;
A detector for detecting X-rays scattered from the test object;
A shielding portion accommodated therein to form an inspection space in which X-rays are scattered to perform an inspection, and a first open portion and a second open portion formed on an outer circumferential surface of the X-ray generator and the detection portion;
A first flow unit coupled to the X-ray generator and disposed to cover a first open part and slidably moved along an outer circumferential surface of the shield; And
And a second flow unit coupled to the detection unit and disposed to cover the second open unit and slidable along the outer circumferential surface of the shield unit.
And the first and second flow units move along the outer circumferential surface of the shield to vary the angle of X-rays radiated from the X-ray generator and X-rays incident to the detector. The method of claim 1,
The shielding portion, the outer peripheral surface is made of a cylindrical shape,
The first flow portion and the second flow portion X-ray analysis device having a variable shield, characterized in that the arc shape. 3. The method of claim 2,
The variable shielding portion is arranged so that the center lines (α, β) formed along the longitudinal direction of the first flow portion and the second flow portion are inclined with respect to the reference line C formed along the circumferential direction of the shield. X-ray analyzer equipped. The method of claim 3,
The X-ray generating unit and the detection unit, X-ray analysis mechanism having a variable shield, characterized in that the angle with respect to the first flow section and the second flow section is moved along the outer peripheral surface of the shield. The method of claim 1,
The shield has an outer circumferential surface as part of a spherical shape,
The first flow portion and the second flow portion X-ray analysis device having a variable shield, characterized in that the shape corresponding to the outer peripheral surface of the shield. The method of claim 5,
And the X-ray generating unit and the detecting unit are directed to the center of the sphere of the shielding unit.

Images