KR101308751B1 - Overlay key of liquid crystal display device and method of forming the same - Google Patents

Abstract

The present invention relates to a method of manufacturing a liquid crystal display device, the method of forming an overlay key of the liquid crystal display device according to the present invention comprises the steps of providing a color filter overlay key (overlay key) area divided into three rows and nine columns; Placing three black matrix overlay keys in rows 1, 5, and 9 for each row; Arranging three red color filter overlay keys in rows 1, 4, and 7; Arranging three green color filter overlay keys in two rows in two, five, and eight columns; And arranging three blue color filter overlay keys in three rows in three, six, and nine columns, and applying overlay and dummy keys through an RGB mask mixed design. It is possible to reliably measure and manage the data that was measured at the same time.

 Overlay Key, Black Matrix Ski, Color Filter Key

Description

OVERLAY KEY OF LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FORMING THE SAME}

1 is a layout view of overlay keys of a black matrix and a color filter layer on a substrate in a method of manufacturing a liquid crystal display device according to the related art.

2 is a layout view schematically illustrating a mask in which a pattern region is formed in the method of manufacturing a liquid crystal display device according to the related art.

3 is a layout view schematically illustrating a substrate on which R, G, and B color filter layer overlay keys are formed in a method of manufacturing a liquid crystal display device according to the related art.

FIG. 4 is a layout view schematically illustrating a state in which a mask having a pattern region is disposed on a substrate on which R, G, and B color filter layer overlay keys are formed in a method of manufacturing a liquid crystal display device according to the related art. FIG.

5 is a photo showing a phenomenon in which a pattern overlaps when mixing overlay keys in a method of manufacturing a liquid crystal display device according to the related art.

FIG. 6 is a schematic view of a method of manufacturing a liquid crystal display device according to an embodiment of the present invention, in which a mask on which a black matrix overlay key is formed diagonally on a substrate on which R, G, and B color filter layers are formed;

FIG. 7 is an enlarged plan view illustrating a state in which R, G, and B color filter overlay keys and a black matrix overlay key are disposed in a method of manufacturing a liquid crystal display device according to an embodiment of the present invention; FIG.

8 is a plan view of a state in which a black matrix overlay key and a color filter overlay key are disposed in a vertical direction on a mask in a method of manufacturing a liquid crystal display device according to another exemplary embodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS -

100: substrate 115: black matrix overlay key

120a, 120b, 120c: R, G, B color filter overlay keys

300: substrate 315: black matrix overlay key

320a, 320b, 320c: R, G, B color filter overlay keys

The present invention relates to a method of manufacturing a liquid crystal display device, and more particularly, a design capable of mixing RGB masks, stably regardless of whether or not the data measured when applying an overlay or a dummy key is mixed. An overlay key of a liquid crystal display device capable of measuring and managing the same, and a method of forming the same.

In order to drive the device, various patterns such as transistors and capacitors are required. To form such a pattern, a film is deposited, a photoresist pattern is formed on the film by photo-lithography, and then a photoresist pattern. The process of etching the film is required.

Specifically, photolithography includes sequentially applying a photoresist on a substrate on which a film is formed, an exposure step of reacting the photoresist with light using an ultraviolet wavelength, and developing the exposed photoresist to expose the photo. Patterning the resist, and then inspecting the alignment of the photoresist pattern (step).

In the double exposure step, the mask is irradiated with light such as ultraviolet rays by using a mask in which a pattern to be implanted on the film is imprinted. The mask is positioned between the substrate and the light source to print the pattern on the substrate, and can be accurately aligned with the substrate. So that it contains a number of alignment keys.

In particular, as the substrate becomes larger and the pattern becomes smaller, more accurate alignment is required, and accordingly, the number and types of alignment keys are diversified.

As a method of exposing, there is a method of exposing the entire substrate by dividing the substrate into several zones and performing several photo shots.

However, as the substrate is enlarged, it is inconvenient to perform several shots by dividing into several zones instead of exposing the entire substrate with one photo shot. That is, the inconvenience of using a mask in which a different pattern is imprinted for each position of the substrate, and there is a problem in that a stitching defect occurs at the boundary between the photo shot and the photo shot, resulting in stitching unevenness when the device is driven.

In order to solve this problem, it is recently replaced by a batch exposure method of a scanner method.

In this regard, a method of manufacturing a liquid crystal display device using an overlay key according to the prior art will be described with reference to the accompanying drawings.

1 is a layout view of overlay keys of a black matrix and a color filter layer on a substrate in a method of manufacturing a liquid crystal display device according to the related art.

2 is a layout view schematically illustrating a mask in which a pattern region is formed in the method of manufacturing a liquid crystal display device according to the related art.

3 is a layout view schematically illustrating a substrate on which R, G, and B color filter overlay keys are formed in the method of manufacturing a liquid crystal display device according to the related art.

4 is a layout view schematically illustrating a state in which a mask in which a pattern region is formed is disposed on a substrate on which R, G, and B color filter overlay keys are formed in the method of manufacturing a liquid crystal display device according to the related art.

FIG. 5 is a photograph showing a phenomenon in which a pattern overlaps when an overlay key is mixed in the method of manufacturing a liquid crystal display device according to the related art.

Referring to FIG. 1, R, G, and B color filter overlay keys 20 are formed at predetermined intervals along edges of the substrate, and R, G, and B color filter overlay keys 20 are formed on the outside of the R, G, and B color filter overlay keys 20. A black matrix overlay key 15 is formed to surround the G and B color filter overlay keys 20.

In addition, black matrix overlay keys 15 are alternately formed at portions adjacent to the edges of the substrate, and R, G, and B color filter overlay keys 20 are formed inside the black matrix overlay keys 15. It is.

2, mask patterns 35a, 35b, and 35c are formed in a diagonal direction in the mask 30.

3, black matrix keys 45a, 45b, and 45c are formed in the substrate 40 at regular intervals in one direction.

Referring to FIG. 4, mask patterns 35a, 35b, and 35c are formed on a substrate 40 on which black matrix keys 45a, 45b, and 45c are formed.

At this time, the mask pattern 35c of the mask is correctly aligned on the black matrix key 45c. However, the mask patterns 35a and 35b are not properly aligned with the black matrix keys 45a and 45b.

In addition, the mask patterns 35a, 35b, and 35c are spaced apart by one pixel interval.

As described above, referring to FIG. 1, the existing color filter layer overlay keys are designed without considering R, G, and B masks.

Currently, R, G, and B forming processes frequently use a mixture of R, G, and B masks when mask contamination or mask defects occur.

In this case, the current color filter overlay key or dummy key, as shown in Figure 5, when the pattern overlap or when the pattern is moved, even if the overlay measurement is impossible or can be measured when the position is moved to apply the mass production A measurement error may occur.

On the other hand, in the current overlay structure, it is impossible to continuously obtain the overlay data because the measurement is impossible when the R, G, and B masks are mixed.

That is, a disadvantage arises that the pre-filtering function and the monitoring function through overlay management cannot be performed.

Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, the object of the present invention is to apply an overlay key or a dummy key through the R, G, B mask mixed design The present invention provides an overlay key of a liquid crystal display device and a method of forming the same, which can stably measure and manage data measured or not.

Another object of the present invention is to provide an overlay key of a liquid crystal display device capable of quantifying management data for each color filter layer, and to steadily manage and confirm the state of a process, and a method of forming the same.

In addition, another object of the present invention is to overlay the color filter layer to predict and monitor the liquid crystal margin fluctuations due to the volume fluctuations caused by the fluctuations of the step due to the variation of the steps of R, G, and B and the deviation of the control value. In this case, an overlay key of a liquid crystal display device capable of minimizing gravity / unfilled occurrence and a method of forming the same are provided.

The overlay key structure of the liquid crystal display device according to the present invention for achieving the above object is a color filter overlay key (overlay key) divided at intervals of 1 to 3 rows × 1 to 9 columns; A black matrix overlay key with three patterns arranged in rows 1, 5, and 9 for each row; A red color filter overlay key in which three patterns are arranged in rows 1, 4, and 7 in one row; A green color filter overlay key with three patterns arranged in two rows in two, five, and eight columns; And a blue color filter overlay key having three patterns arranged in three rows in three, six, and nine rows in three rows.

According to an aspect of the present invention, there is provided a method of forming an overlay key of a liquid crystal display device, the method including: providing a color filter overlay key region divided at intervals of 1 to 3 rows x 1 to 9 columns; Placing the black matrix overlay keys in three rows of 1, 5, and 9 columns for each row; Arranging three patterns in one row of red color filter overlay keys in rows 1, 4, and 7; Placing three patterns in two rows of green color filter overlay keys in two, five, and eight columns; And arranging three patterns in three rows of three, six, and nine columns of blue color filter overlay keys.

The overlay key of the liquid crystal display device according to the present invention for achieving the above object is formed with a plurality of R, G, B color filter overlay keys in a vertical and horizontal direction at a predetermined interval on the substrate; Aligned on the plurality of R, G, B color filter overlay keys, it characterized in that it comprises at least one black matrix overlay key region is formed at a predetermined interval in the diagonal direction.

Hereinafter, an overlay key of a liquid crystal display according to the present invention and a method of forming the same will be described in detail with reference to the accompanying drawings.

6 is a schematic diagram of a mask in which a black matrix overlay key is formed in a diagonal direction on a substrate on which R, G, and B color filter layers are formed in a method of manufacturing a liquid crystal display device according to an exemplary embodiment of the present invention.

FIG. 7 is an enlarged plan view illustrating a state in which R, G, and B color filter overlay keys and a black matrix overlay key are disposed in a method of manufacturing a liquid crystal display according to an exemplary embodiment of the present invention.

8 is a plan view of a state in which a black matrix overlay key and a color filter overlay key formed in a vertical direction on a mask are disposed in a method of manufacturing a liquid crystal display device according to another exemplary embodiment of the present invention.

Referring to FIG. 6, in the liquid crystal display device manufacturing method according to an exemplary embodiment of the present invention, the black matrix overlay key 115 and the R, G, and B color filters have a R, G, B mask mixed principle having a distance of 1 pixel shortening direction. The overlay keys 120a, 120b, and 120c are aligned.

When applied to the overlay key, the current pattern is large in size, so interference occurs in the horizontal array.

Therefore, in order to prevent interference in consideration of the size of the pattern, the overlay key arrangement is made by combining the principle of horizontal arrangement and the principle of vertical arrangement.

On the other hand, referring to Figure 7, the setting for the size and spacing in the pattern is as follows.

Overlay measurements are X shift = (a-b) / 2 and Y shift = (c-d) / 2. In addition, the distance difference is obtained by providing the contrast within the rectangle.

In addition, the size (W1) of the black matrix overlay key 115 is about 30 μm or more, W2 represents a short interval of one pixel.

In one embodiment of the present invention, when the mask is mixed, it is possible to check the R, G, and B overlay, but constraints may occur according to the pattern size.

That is, minimizing the overlay area is ideal when the 1 pixel short interval W2 is sufficiently secured, but otherwise, inter-pattern interference may occur and measurement constraints may occur regardless of whether a mask is mixed.

Meanwhile, a method of manufacturing a liquid crystal display device using an overlay key according to another embodiment of the present invention will be described with reference to FIG. 8.

When the color filter overlay key area is divided into intervals of 1 to 3 rows x 1 to 9 columns, the position of the black matrix overlay key 315 is divided into three black matrix overlay keys 315 for each row. Place them in the first row, the fifth row, and the ninth row.

First, the red color filter overlay keys 320a place three color filter overlay keys 320a in one row, four columns, and seven columns in a row, with one row as A, four columns as B, and seven rows. When C is normal, A of the red color filter overlay key 320a is disposed in the black matrix overlay key 315 of 1 row x 1 column, and the black matrix overlay key 315 is used when mixed with green. B of the red color filter overlay key 320a is disposed in the pattern of 1 row x 5 columns of the < RTI ID = 0.0 > and < / RTI > C of key 320a is disposed.

In addition, the green color filter overlay key 320b has three color filter overlay keys 320b arranged in two rows, five columns, and eight columns in two rows, and two rows A, five columns, B and eight rows. When C is normal, B of the green color filter overlay key 320b is disposed in the black matrix overlay key 315 of 2 rows x 5 columns, and the black matrix of 2 rows x 1 column when red is mixed. A of the green color filter overlay key 320b is disposed in the overlay key 315, and when mixed with blue, the green color filter overlay key 320b is placed in the black matrix overlay key 315 of 2 rows x 9 columns. C is placed.

When the blue color filter overlay keys 320c are arranged in three rows, three blue color filter overlay keys 320c are arranged in three columns, six columns, and nine columns, and the third column is A, six columns, and C is normal. In this case, the C of the blue color filter overlay key 320c is disposed in the black matrix overlay key 315 of 3 rows x 9 columns, and the black matrix overlay key 315 of 3 rows x 5 columns when mixed with green. B of the blue color filter overlay key 320c is disposed, and when mixed with red, A of the blue color filter overlay key 320c is disposed on the black matrix overlay key 315 of 3 rows x 1 column.

There is no problem in mass production because it is smaller than the overlay key area when testing the existing horizontal array.

In addition, since the size of the pixel is different according to the model, when the first and second embodiments of the present invention are applied according to the size of one pixel shortening, overlay data can be continuously and stably measured regardless of mixing R, G, and B. .

On the other hand, while described above with reference to a preferred embodiment of the present invention, those skilled in the art various modifications of the present invention without departing from the spirit and scope of the invention described in the claims below And can be changed.

As described above, according to the overlay key and the method of forming the liquid crystal display device according to the present invention has the following effects.

The overlay key of the liquid crystal display according to the present invention and a method of forming the same may be used to mix data measured when an overlay key or a dummy key is applied through an R, G, and B mask design. It can be measured and managed reliably regardless.

In addition, the overlay key of the liquid crystal display device and the method of forming the liquid crystal display device according to the present invention can quantify the management data for each color filter layer, and can continuously manage and confirm the state of the process.

In addition, the overlay key of the liquid crystal display device and the method for forming the same according to the present invention predict the liquid crystal margin variation due to the volume variation caused by the step difference caused by the step difference variation of R, G, and B as the overlay for each color filter layer. And monitoring, minimizing the occurrence of gravity / unfilled when out of control.

Claims (11)

A plurality of red, green and blue color filter overlay keys partitioned on the substrate at intervals of 1 to 3 rows x 1 to 9 columns; And And black matrix overlay keys arranged in one, five, and nine columns of the first row, the second row, and the third row, respectively. Among the plurality of red, green and blue color filter overlay keys, The red color filter overlay keys are arranged in the first row, the fourth row and the seventh column of the first row, respectively; The green color filter overlay keys are arranged in two rows, five columns and eight columns of the two rows, respectively; And the blue color filter overlay keys are arranged in three columns, six columns, and nine columns of the three rows, respectively. 2. The red color filter overlay key of claim 1, wherein the red color filter overlay key is one row A, four columns B, and seven columns C, and when it is normal, the red color filter overlay key is red within the pattern of one row x one column of the black matrix overlay key. A red is placed, and red B is arranged in a pattern of 1 row x 5 columns of the black matrix overlay key when mixed with green, and black matrix overlay when mixed with blue. An overlay key of a liquid crystal display element, wherein red C is disposed in a pattern of one row by nine columns of keys. 2. The green color filter overlay key of claim 1, wherein the green color filter overlay key is 2 rows A, 5 columns B, 8 columns C, and if it is normal, the green color filter overlay key is green in the pattern of 2 rows x 5 columns of the black matrix overlay key. (green) B is arranged, when red is mixed, green A is arranged in the pattern of 2 rows x 1 column of the black matrix overlay key, and when mixed with blue, the black matrix overlay key is used. An overlay key of a liquid crystal display device, wherein green C is disposed in a pattern of 2 rows x 9 columns of?. The method of claim 1, wherein the blue color filter overlay key has three patterns arranged in three rows in three, six, and nine rows, and three columns in A, six columns, and C. Blue C is arranged in a pattern of 3 rows x 9 columns, blue B is arranged in a pattern of 3 rows 5 columns of the black matrix when mixed with green, and mixed with red. And blue A in a pattern of three rows by one column of the black matrix overlay key. Providing a substrate with a plurality of red, green, and blue color filter overlay keys divided at intervals of one to three rows by one to nine columns; And And arranging the black matrix overlay keys in the 1st, 5th and 9th columns of the 1st, 2nd and 3rd rows, respectively. Among the plurality of red, green and blue color filter overlay keys, The plurality of red color filter overlay keys are arranged in one column, four columns, and seven columns of the first row, respectively; The plurality of green color filter overlay keys are arranged in two rows, five columns and eight columns of the two rows, respectively; And the plurality of blue color filter overlay keys are arranged in three columns, six columns, and nine columns of the three rows, respectively. 6. The method of claim 5, wherein the red color filter overlay key is one column A, four columns B, and seven columns C, and in the normal case, the red color filter overlay key is red within the pattern of one row x one column of the black matrix overlay key. A red is placed, and red B is arranged in a pattern of 1 row x 5 columns of the black matrix overlay key when mixed with green, and black matrix overlay when mixed with blue. A red C is arranged in a pattern of 1 row x 9 columns of keys. 6. The method of claim 5, wherein the green color filter overlay key is green in a pattern of 2 rows x 5 columns of the black matrix overlay key when it is normal when 2 columns are A, 5 columns B, and 8 columns C. (green) B is arranged, when red is mixed, green A is arranged in the pattern of 2 rows x 1 column of the black matrix overlay key, and when mixed with blue, the black matrix overlay key is used. A green C is disposed in a pattern of two rows by nine columns of?. 6. The method of claim 5, wherein the blue color filter overlay keys are arranged in three rows of three, six, and nine rows in three rows, and the three columns of A, six columns, and C. Blue C is arranged in a pattern of 3 rows x 9 columns, blue B is arranged in a pattern of 3 rows x 5 columns of the black matrix overlay key when mixed with green. ) And blue A is arranged in a pattern of three rows by one column of the black matrix overlay key. delete delete delete

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