KR101286530B1 - A apparatus for testing a substrate of liquid crystal display device and a method for the substrate using the apparatus - Google Patents

Abstract

The present invention relates to a substrate inspection apparatus for a liquid crystal display device and a method for inspecting a substrate for a liquid crystal display device using the same, which can shorten the inspection time of the substrate and increase the efficiency of production. A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And, characterized in that it comprises a plurality of supports formed on any one of the facing surfaces between the substrate and the modulator.

LCD, Modulator, Camera, Pixel, Support

Description

A device for testing a substrate of liquid crystal display device and a method for the substrate using the apparatus}

1 is a view showing a method for inspecting a defect of a TFT array substrate using a conventional inspection device.

2 is a view for explaining a problem that may occur when increasing the size of the modulator

3 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display device according to a first embodiment of the present invention.

4 shows the configuration of a TFT array substrate.

5 is a cross-sectional view taken along line II of FIG. 4.

6 illustrates a method of inspecting a TFT array substrate using the inspection apparatus of FIG. 3.

7 illustrates a method of inspecting a plurality of TFT array substrates formed on a parent substrate using the modulator of FIG. 3.

8 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display device according to a second embodiment of the present invention.

9 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display according to a third embodiment of the present invention.

10 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display according to a fourth embodiment of the present invention.

* Explanation of symbols on the main parts of the drawings

101: light source 102a: first polarizing plate

102b: second polarizing plate 103: mounting portion

104: TFT array substrate 105: Modulator

106: camera 111a: lower substrate

111b: upper substrate 222a: first alignment layer

222b: second alignment layer 654: column spacer

510: liquid crystal layer 244: common electrode

PE: pixel electrode 450: support

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate inspection apparatus for a liquid crystal display device, and more particularly, to a substrate inspection apparatus for a liquid crystal display device and a method for inspecting a substrate for a liquid crystal display device using the same. .

In general, a liquid crystal display (LCD) displays an image corresponding to a video signal on a liquid crystal substrate on which liquid crystal cells are arranged in a matrix by adjusting light transmittance of liquid crystal cells according to a video signal.

Such a liquid crystal display device includes two substrates bonded to each other, and a liquid crystal layer formed between the two substrates. A thin film transistor and a pixel electrode are formed on the lower substrate among the two substrates, and a color filter and a common electrode are formed on the upper substrate.

The TFT array substrate and the color filter array substrate are completed through independent manufacturing processes, and then bonded to each other through a bonding process.

On the other hand, an inspection process for determining whether or not the thin film transistors of the pixels provided in the TFT array substrate is operating properly before the bonding process is performed.

This inspection process is performed using an inspection apparatus. The inspection apparatus inspects all the pixel electrodes formed on the front surface of the TFT array substrate while moving horizontally and vertically on the TFT array substrate.

The inspection apparatus includes a modulator and a camera, wherein the modulator includes a common electrode for generating an electric field together with a pixel electrode provided on the TFT substrate, and an electric field generated by the pixel electrode and the common electrode. It has a liquid crystal layer whose transmittance changes.

1 is a view showing a method for inspecting a defect of a TFT array substrate using a conventional inspection apparatus. As shown in FIG. 1, a single substrate is provided with a plurality of TFT array substrates.

In order to inspect each TFT array substrate, the inspection apparatus 22 inspects the first TFT array substrate 1 and then moves horizontally to inspect the second TFT array substrate 2 and again moves diagonally to the third The TFT array substrate 3 is inspected. In this way, the first to sixth TFT array substrates 1 to 6 are sequentially inspected.

The modulator does not have an area large enough to cover all of one TFT array substrate. Therefore, in order to inspect all the pixels formed on the front surface of the one TFT array substrate, the operation of first dividing the TFT array substrate into a plurality of regions and placing the modulator in each region must be preceded.

For this purpose, in order to inspect all the pixels formed on one substrate, an alignment operation for precisely aligning the modulator and the corresponding area is required after moving the modulator to each area. This alignment is a task that must be performed every time the pixels of each region are inspected. As the number of regions increases, the number of alignment operations also increases, resulting in an increase in overall processing time.

In order to solve this problem, there may be a method of making the size of the modulator as large as at least one TFT array substrate, but in this case, the following problems occur.

FIG. 2 is a view for explaining a problem that may occur when the size of the modulator is increased. As shown in FIG. 2, when the area of the modulator 30 is increased, the weight of the modulator 30 is increased. The phenomenon occurs that the center of the modulator 30 sags downward. The degree of deflection of the modulator 30 is increased as the area of the modulator 30 increases.

In this case, the center of the modulator 30 may be in contact with the TFT array substrate 1. Since the pixel electrode is exposed on the TFT array substrate 1, the pixel electrode may be damaged when there is a pixel electrode in a portion where the TFT array substrate 1 is in contact with the modulator 30. .

Of course, even if the center portion of the modulator 30 sags downward, the distance between the modulator 30 and the TFT array substrate 1 is further increased in consideration of the degree of deflection so as to increase the modulator 30 and the TFT array substrate. (1) may be prevented, but in this case, since the center of the TFT array substrate 1 is located closer to the modulator 30 than the edge of the TFT array substrate 1, A large difference occurs between the transmittance of light passing through the center portion and the transmittance of light passing through the edge. Then, accurate image quality inspection on the front surface of the TFT array substrate 1 cannot be carried out due to the deviation between the transmittances.

For this reason, the size of the modulator 30 provided in the conventional inspection apparatus 22 can not be limited, and as a result of this limitation, the process time increases as described above.

The present invention has been made to solve the above problems, by installing a plurality of supports on one surface of the modulator corresponding to the portion except the pixel area of the TFT array substrate to prevent contact between the TFT array substrate and the modulator The purpose of the present invention is to provide a substrate inspection apparatus for a liquid crystal display device and a substrate inspection method using the same, which can eventually have a modulator of a larger size than the conventional art.

Liquid crystal display substrate inspection apparatus according to the present invention for achieving the above object, the mounting portion on which the substrate; A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And, characterized in that it comprises a plurality of supports formed on any one of the facing surfaces between the substrate and the modulator.

In addition, the liquid crystal display substrate inspection apparatus according to the present invention for achieving the above object, the mounting portion is placed; A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And a protective layer formed on any one of the facing surfaces between the substrate and the modulator.

In addition, a substrate inspection method using a liquid crystal display substrate inspection apparatus according to the present invention for achieving the above object, the mounting portion on which the substrate is placed; A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And a substrate inspection apparatus for a liquid crystal display device including a plurality of supports formed on one surface of the modulator facing the substrate, the method comprising: mounting a substrate on the seating part; Aligning the substrate with the modulator, and moving the modulator toward the substrate such that the supports are in contact with the substrate.

In addition, a substrate inspection method using a liquid crystal display substrate inspection apparatus according to the present invention for achieving the above object, the mounting portion on which the substrate is placed; A modulator positioned on an upper side of the seating part to face the substrate and inspecting whether the pixels of the substrate are defective; And a protective layer formed on one surface of the modulator facing the substrate, comprising: mounting a substrate on the seating part; Aligning the substrate with the modulator, and moving the modulator toward the substrate such that the protective layer contacts the substrate.

Hereinafter, a liquid crystal display substrate inspection apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1st Example

3 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display device according to a first embodiment of the present invention.

The liquid crystal display substrate inspection apparatus according to the first embodiment of the present invention, as shown in Figure 3, the mounting portion 103, the TFT array substrate 104 is placed; A modulator (105) positioned above the seating portion (103) to face the TFT array substrate (104) and inspecting whether the pixels formed on the TFT array substrate (104) are defective; A plurality of supports 450 formed on one surface of the modulator 105 facing the TFT array substrate 104; A light source 101 positioned below the seating portion 103; The light emitted from the light source 101 and sequentially passed through the first polarizing plate 102a, the seating portion 103, the TFT array substrate 104, the modulator 105, and the second polarizing plate 102b are analyzed. And a camera 106 for converting the pixels.

The first polarizing plate 102a is located between the light source 101 and the seating part 103, and the second polarizing plate 102b is located between the camera 106 and the modulator 105. The light transmission axis formed on the first polarizing plate 102a and the light transmission axis formed on the second polarizing plate 102b cross each other.

The TFT array substrate 104 includes a plurality of gate lines arranged in one direction, a plurality of data lines arranged to intersect the gate lines, and a thin film transistor formed near the intersection of the gate lines and the data lines. Contains jitter

The pixel electrode PE is formed in each pixel defined by the gate line and the data line.

The camera 106 may use a Charge Couple Display (CCD) camera 106.

The modulator 105 includes an upper substrate 111b, a lower substrate 111a, a liquid crystal layer 510, a first alignment layer 222a, a second alignment layer 222b, and a common electrode 244.

A first alignment layer 222a is formed on the upper side surface of the lower substrate 111a, and a plurality of support members 450 are formed on the lower side surface of the lower substrate 111a. The height of the support 450 may be formed to 3 ~ 20㎛.

The lower substrate 111a and the upper substrate 111b having the above structure are bonded to each other such that the first alignment layer 222a and the second alignment layer 222b face each other, and the lower substrate 111a and the upper substrate 111b are bonded to each other. The liquid crystal layer 510 is formed therebetween. The liquid crystal layer 510 includes a twisted nematic liquid crystal, in which liquid crystal molecules are surrounded by a capsule made of organic material.

The common electrode 244 and the second alignment layer 222b are sequentially formed on the lower surface of the upper substrate 111b. The first and second alignment layers 222b serve to orient the liquid crystal molecules of the liquid crystal layer 510 in one direction.

A plurality of column spacers 654 are formed between the upper substrate 111b and the lower substrate 111a. The column spacer 654 serves to maintain a constant gap between the upper substrate 111b and the lower substrate 111a. The column spacer 654 and the support 450 may be manufactured using a resin.

Each column spacer 654 and each support 450 may be located at positions corresponding to each other, as shown in FIG. 3.

An electric field is generated between the common electrode 244 of the upper substrate 111b and each pixel electrode PE of the TFT array substrate 104. The electric field is generated between the pixel electrode PE and the common electrode 244 by the electric field. The transmittance of the liquid crystal layer 510 positioned changes.

The support members 450 are formed on the lower surface of the lower substrate 111a. In this case, the support members 450 are formed on the lower side surface of the lower substrate 111a to correspond to portions except the pixels. In detail, the supporters 450 may not be in contact with the pixel electrode PE when the TFT array substrate 104 and the modulator 105 are aligned with each other. It is formed on the lower side of the lower substrate 111a that does not correspond to where the PE is located.

To this end, the support members 450 are formed on the lower side of the lower substrate 111a corresponding to the gate line or the data line, or the lower substrate 111a corresponding to the point where the gate line and the data line cross each other. It is formed on the side.

4 is a diagram showing the configuration of a TFT array substrate, and FIG. 5 is a cross-sectional view taken along the line I-I of FIG. 4.

As shown in FIGS. 4 and 5, the support members 450 are positioned near the pixel electrodes PE so as not to contact the pixel electrodes PE. 4 and 5 illustrate that the supporters 450 are positioned at the intersection of the gate line GL and the data line DL. In addition to the above configuration, the supporters 450 may include the gate line GL. It may be formed at the location or may be formed at the location of the data line DL.

On the other hand, the thin film transistor TFT includes a gate electrode GE formed on the TFT array substrate 104, as shown in FIG. A gate insulating film GI formed on the entire surface of the TFT array substrate 104 including the gate electrode GE; A semiconductor layer 740 formed on the gate insulating layer GI to overlap the gate electrode GE; An ohmic contact layer 741 formed on both sides of the semiconductor layer 740 so as to overlap both edges of the gate electrode GE; Source / drain electrodes SE and DE are formed on the ohmic contact layer 741. Here, reference numeral 740, which has not been described, is a protective layer.

As described above, in the present invention, the plurality of supports 450 support the modulator 105, so that the center of the modulator 105 may be prevented from sagging downward even if the area of the modulator 105 increases.

On the other hand, in consideration of the phenomenon that the central portion of the modulator 105 sag, the height of the support 450 positioned in the center of the modulator 105 is formed higher than the height of the support 450 positioned at the edge of the modulator 105. You may.

A method of inspecting the TFT array substrate 104 using the liquid crystal display substrate inspection apparatus configured as described above is as follows.

FIG. 6 is a diagram illustrating a method of inspecting a TFT array substrate using the inspection apparatus of FIG. 3.

First, the TFT array substrate 104 on which the thin film transistor TFT and the pixel electrode PE are formed is prepared, and the TFT array substrate 104 is mounted on the mounting portion 103.

Next, the modulator 105 is positioned on the TFT array substrate 104, and the modulator 105 is aligned with the TFT array substrate 104. Here, assume that the size of the modulator 105 is the same as the size of one TFT array substrate 104.

The supporters 450 installed in the modulator 105 through the alignment operation are positioned at portions of the TFT array substrate 104 except for pixels.

Next, the modulator 105 is lowered toward the TFT array substrate 104 until the supports 450 contact the TFT array substrate 104. At this time, the lowering operation of the modulator 105 is stopped at the moment when the supports 450 contact the TFT array substrate 104.

Here, since the support members 450 support the modulator 105, the phenomenon that the central portion of the modulator 105 sags downward does not occur.

Subsequently, scan pulses (test pulses for test) are sequentially supplied to the gate lines GL of the TFT array substrate 104 so that the thin film transistors TFTs connected to the gate lines GL may be connected to the gate lines GL. Turn on in units. When a scan pulse is supplied to each of the gate lines GL, a data voltage (test data voltage) is supplied to the data lines DL, thereby supplying the data voltage to all pixels. At the same time, a common voltage (common voltage for test) is supplied to the common electrode 244 of the modulator 105.

Then, an electric field is generated between each pixel electrode PE and the common electrode 244, and the light transmittance of the liquid crystal layer 510 positioned between the pixel electrode PE and the common electrode 244 is changed by the electric field. do.

The light from the light source 101 positioned below the seating part 103 may be formed by the first polarizing plate 102a, the seating part 103, the TFT array substrate 104, the second polarizing plate 102b, and the modulator ( Passed through 105 in order to enter the camera 106. Then, the camera 106 receives the light and analyzes it to determine whether the pixels are defective.

In this case, the front surface of the modulator 105 and the TFT array substrate 104 is divided into a plurality of shooting areas D1 to D9, and the camera 106 moves each of the shooting areas D1 to D9. The TFT array substrate 104 is photographed by dividing the entire surface of the TFT array substrate several times.

For example, FIG. 6 illustrates a modulator 105 and a TFT array substrate 104 divided into nine imaging areas D1 to D9.

Of course, the lens of the camera 106 may be made large so as to correspond to the area of the TFT array substrate 104 so that the entire surface of the TFT array substrate 104 may be photographed at a time without dividing the photographing areas D1 to D9. . However, when the lens is enlarged in this way, there may be a disadvantage that the resolution of the lens must be considerably high.

Therefore, in the present invention, only the size of the modulator 105 is vaporized so as to correspond to the size of one TFT array substrate 104, so that only one alignment operation per TFT array substrate 104 is performed. (104) Align the space.

FIG. 7 illustrates a method of inspecting a plurality of TFT array substrates formed on a parent substrate using the modulator of FIG. 3.

As shown in FIG. 7, in order to inspect all the pixels in one mother substrate 800 on which the plurality of TFT array substrates 104 are formed using the inspection apparatus of the present invention, each TFT array substrate 801 to FIG. Alignment between 806 and modulator 105 must be preceded. In this case, since six TFT array substrates 801 to 806 are formed on one mother substrate 800, a total of six TFT array substrates 801 to 806 are inspected in order to inspect all the pixels formed on the six TFT array substrates 801 to 806. Conference alignment is required.

Meanwhile, the size of the modulator 105 may have a size corresponding to the parent substrate 800, that is, the parent substrate 800 on which the plurality of TFT array substrates 801 to 806 are formed. In such a case, it is possible to align the modulator 105 and the six TFT array substrates 801 to 806 with only one alignment operation.

To inspect each TFT array substrate 801 to 806, the camera 106 inspects the first TFT array substrate 801 and then moves horizontally to inspect the second TFT array substrate 802 and again in a diagonal direction. Move to inspect the third TFT array substrate 803. In this manner, the first to sixth TFT array substrates 801 to 806 are sequentially inspected.

The camera 106 analyzes the light passing through the TFT array substrates 801 to 806 to determine whether the pixels are good or bad for all the pixels formed on the TFT array substrates 801 to 806.

Specifically, the camera 106 determines whether the light transmittance of each pixel is within an allowable range by using a predetermined transmittance-voltage characteristic curve (TV (Transmitance-Voltage) curve) and according to the determination result, the amount of each pixel Determine if there is a defect. That is, the camera 106 determines that the pixel is a normal pixel when the transmittance of light passing through a pixel is within the allowable range of the light transmittance defined in the characteristic curve, and the pixel is regarded as a bad pixel when it is out of the allowable range. Judging by.

Second Example

8 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display according to a second embodiment of the present invention.

According to a second exemplary embodiment of the present invention, a substrate inspection apparatus for a liquid crystal display device includes: a mounting portion 103 on which a TFT array substrate 104 is placed; A modulator (105) positioned above the seating portion (103) to face the TFT array substrate (104), for inspecting whether the pixels formed on the TFT array substrate (104) are defective; A plurality of supports 450 formed on one surface of the modulator 105 facing the TFT array substrate 104; A light source 101 for emitting light; A first polarizing plate (102a) for polarizing light from the light source (101); A reflector (199) for changing a path of light from the first polarizing plate (102a); A beam splitter (188) for changing the light from the reflector (199) toward the seat (103) and transmitting the light reflected from the seat (103); A phase difference plate (177) for changing a phase of light from the beam splitter (188); A second polarizing plate (102b) for polarizing light from the retardation plate (177); In addition, the camera 106 includes a camera 106 for determining whether the pixels are formed on the TFT array substrate 104 by receiving and analyzing light from the second polarizing plate 102b.

The modulator 105, the first polarizing plate 102a, the second polarizing plate 102b, and the camera 106 are the modulator 105, the first polarizing plate 102a, and the second polarizing plate 102b described in the first embodiment. And the same as the camera 106, the description thereof will be omitted.

The surface of the seating part 103 is coated with a reflective material, so that the light provided from the beam splitter 188 to the seating part 103 is reflected by the reflective material and is then returned to the beam splitter 188. Is provided. In this case, the light reflected from the seating part 103 passes through the beam splitter 188 and sequentially passes through the retardation plate 177 and the second polarizing plate 102b.

The modulator 105 provided in the second embodiment has the same structure as the modulator 105 in the first embodiment and exhibits the same effect.

Third Example

9 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display device according to a third embodiment of the present invention.

The substrate inspection apparatus for a liquid crystal display device according to the third embodiment of the present invention is almost the same as the first embodiment described above, and as shown in FIG. 9, the protective layer 123 is used instead of the supports 450. Include.

The protective layer 123 is formed on the entire lower surface of the lower substrate 111a provided in the modulator 105.

Unlike the support 450 described above, the protective layer 123 is in physical contact with the pixel electrode PE. The protective layer 123 may be in contact with all the pixel electrodes PE formed on the TFT array substrate 104 according to its size, and some pixel electrodes PE formed on the TFT array substrate 104 may be in contact with each other. It may also come in contact with.

The protective layer 123 may include polyethylene tere phthalate (PET), poly propylene (polypropylene), low density polyethylene (LDPE), high density polyethylene (HDPE), and polystyrene (PS). Polystyrene), PVC (Polyvinyl Chloride Polyvinyl Chloride), and nanofibers, or any combination of two or more of the elements listed above.

Since the protective layer 123 contacts the pixel electrodes PE, even if the size of the modulator 105 is increased, the central portion of the modulator 105 may be prevented from sagging downward.

Fourth Example

10 is a cross-sectional view of a substrate inspection apparatus for a liquid crystal display according to a fourth embodiment of the present invention.

The substrate inspection apparatus for a liquid crystal display device according to the fourth embodiment of the present invention is almost the same as the second embodiment described above, and as shown in FIG. 10, the protective layer 123 is used instead of the supports 450. Include.

The protective layer 123 provided in the fourth embodiment of the present invention is the same as the protective layer 123 described in the third embodiment.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. Will be clear to those who have knowledge of.

As described above, the liquid crystal display substrate inspection apparatus according to the present invention has the following effects.

In the present invention, by forming a support or a protective layer on the lower side of the modulator to prevent the center of the modulator from sagging downward, the area of the modulator can be formed larger than before, so that the modulator and the TFT array substrate are aligned. Reduce work time

In addition, the sensing capability of the modulator may be improved by reducing an air gap between the modulator and the substrate.

Claims (20)

A mounting portion on which the substrate is placed; A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And A plurality of supports formed on one of the opposing faces between the substrate and the modulator; The modulator, An upper substrate on which a common electrode is formed; A lower substrate positioned between the upper substrate and the substrate and bonded to the upper substrate; And And a liquid crystal layer formed between the upper substrate and the lower substrate, the liquid crystal layer of which transmittance of light is changed by an electric field formed between the pixel electrode and the common electrode of the substrate. The method of claim 1, The substrate further includes a pixel electrode formed in the pixel, a plurality of gate lines and a plurality of data lines crossing each other; And the supports are formed on any one of the surfaces so as to be positioned at a portion other than the pixel. The method of claim 2, And the supports are formed on any one of the surfaces to be positioned on the gate line and the data line. The method of claim 1, And the supports are formed on one surface of the modulator. delete The method of claim 1, And the supports are formed on a surface of the lower substrate among the surfaces of the lower substrate and the upper substrate facing each other. The method of claim 1, The modulator, A plurality of spacers formed between the upper substrate and the lower substrate to maintain a gap between the upper substrate and the lower substrate; And And a sealing material for bonding between the upper substrate and the lower substrate; And the supports are made of the same material as that of the spacer or the sealing material. The method of claim 1, A light source unit emitting light; A first polarizing plate for polarizing light from the light source unit; A second polarizing plate which is emitted from the light source unit and is polarized by receiving the light passing through the first polarizing plate, the seating unit, the substrate, and the modulator in turn; And a camera for analyzing light from the second polarizing plate to determine whether the pixels formed on the TFT array substrate are defective. The method of claim 1, A light source unit emitting light; A first polarizing plate for polarizing light from the light source unit; A reflector for changing a path of light from the first polarizing plate; A beam splitter for changing the light from the reflector toward the seat and transmitting the light reflected from the seat; A phase difference plate for changing a phase difference of light from the beam splitter; A second polarizing plate for polarizing light from the retardation plate; And And a camera for analyzing light from the second polarizing plate to determine whether the pixels formed on the TFT array substrate are defective. 10. The method according to claim 8 or 9, One surface of the inspection unit facing the substrate has a size that can cover the entire area of the substrate; The area of the substrate that the camera can take at one time is smaller than the total area of the substrate; And, And the inspection unit maintains a fixed state when the camera moves to photograph all parts of the substrate. 10. The method according to claim 8 or 9, And the camera is a CCD (Charged Couple Display) camera. The method of claim 1, And a height between the supports is different. 13. The method of claim 12, And a height of the support located at the center of the modulator is higher than a height of the support located at the edge of the modulator. The method of claim 1, The height of the support is 3 ~ 20㎛ substrate inspection apparatus for a liquid crystal display device. A mounting portion on which the substrate is placed; A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And And a protective layer formed on one of the facing surfaces between the substrate and the modulator. 16. The method of claim 15, The protective layer includes PET (Polyethylene Tere phthalate, polyethylene terephthalate), PP (Poly propylene, polypropylene), LDPE (Low Density Polyethylene, low density polyethylene), HDPE (High Density Polyethylene, high density polyethylene), PS (Polystyrene, polystyrene) And PVC (Polyvinyl Chloride, polyvinyl chloride), and nanofibers, or a substrate inspection device for a liquid crystal display device, characterized in that it is made of any two or more of the above-listed elements. 16. The method of claim 15, And the protective layer is formed on one surface of a modulator facing the substrate. A mounting portion on which the substrate is placed; A modulator positioned on an upper side of the seating portion facing the substrate and inspecting whether the pixels formed on the substrate are defective; And a liquid crystal display substrate inspection apparatus including a plurality of supports formed on one surface of the modulator facing the substrate. Mounting a substrate on the seating portion; Aligning the substrate with the modulator: Moving the modulator toward the substrate such that the supports are in contact with the substrate; Securing the modulator; And And photographing the light passing through the substrate and the modulator while moving the camera on the modulator. A mounting portion on which the substrate is placed; A modulator positioned on an upper side of the seating part to face the substrate and inspecting whether the pixels of the substrate are defective; And a protective layer formed on one surface of the modulator facing the substrate, wherein the substrate inspection method for a liquid crystal display device using the substrate inspection device for a liquid crystal display device, Mounting a substrate on the seating portion; Aligning the substrate with the modulator: and And moving the modulator toward the substrate such that the protective layer is in contact with the substrate. 20. The method of claim 19, Securing the modulator; And And photographing the light passing through the substrate and the modulator while moving the camera on the modulator.

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