KR101171317B1 - Ceramic substrate with antistatic treatment and antistatic coating method on the ceramic substrate - Google Patents

Abstract

The present invention discloses an antistatic treated ceramic substrate and an antistatic treatment method of the ceramic substrate. The antistatic ceramic substrate according to the present invention includes a substrate base layer made of a ceramic material and an antistatic layer formed by coating an antistatic solution on the surface of the substrate base layer, and having a sheet resistance of 10 ⁶ to 10 ⁹ Ω / sq. In this case, the antistatic solution includes a carbon nanotube, a leveling agent made of a silicon material having a weight ratio of 0.01 to 10 wt% with respect to the solvent, and a dispersant having a weight ratio of 0.05 to 10 wt% with respect to the solvent.

Description

Ceramic substrate with antistatic treatment and antistatic coating method on the ceramic substrate

The present invention relates to an antistatic treatment of a ceramic substrate and an antistatic coating method on the ceramic substrate, and more particularly, to a ceramic substrate which is applied to various fields such as a display field and a semiconductor field and needs to prevent the generation of static electricity.

Ceramic substrates are excellent in hardness, chemically stable, and have no deformation at high temperatures, and thus are widely used as substrates for semiconductor and display processes.

However, the sheet resistance of the cera film substrate itself is 10 ¹⁰ Ω / sq or more and does not have any antistatic property.

Therefore, in the actual process, an additional device such as ionizer is installed to obtain an antistatic effect. However, the method has only a temporary static elimination effect, and when passing through an additional device such as an ionizer, there is a problem in that the static electricity is moved again.

In order to solve this problem, a method of applying a fluorine coating on the ceramic substrate may be considered, but in this case, even if the grounding or grounding separately, the problem that the static electricity is not easily released due to high resistance.

That is, in the case of fluorine coating, an item called leakage resistance is required, and grounding is separately required, and since a ceramic is an insulator, leakage resistance is hardly generated even when fluorine resistance is applied.

In addition, fluorine and the like have poor durability due to low hardness, and dust is likely to be generated due to in-process friction.

SUMMARY OF THE INVENTION The present invention has been made to solve various problems including the above problems, and an object thereof is to provide an antistatic ceramic substrate having an excellent antistatic effect on a ceramic substrate and a high hardness and an antistatic coating method on the ceramic substrate. .

Accordingly, the antistatic ceramic substrate according to the present invention comprises a substrate base layer made of a ceramic material and an antistatic layer coated on the surface of the substrate base layer with an antistatic solution, and having a sheet resistance of 10 ⁶ to 10 ⁹ Ω / sq. do. In this case, the antistatic solution includes a carbon nanotube, a leveling agent made of a silicon material having a weight ratio of 0.01 to 10 wt% with respect to the solvent, and a dispersant having a weight ratio of 0.05 to 10 wt% with respect to the solvent.

In this case, the dispersant NaDDBS (sodium dodecylbenzene sulfonate, C12H25C6H4SO3Na), SDS (sodium dodecyl sulfate, C12H25OSO3Na), Triton X-100 (C8H17C6H4 (OCH2CH2) 10OH), DTAB (dodecyltrimethylammonium bromide3, CH3) ), GA (Gum Arabic), starch (starch), PVP (polyvinyl pyrrolidone) may be at least one selected from the group consisting of.

In addition, the antistatic layer may have a thickness of 0.01 to 1000 μm.

On the other hand, the ceramic substrate antistatic treatment method in another aspect of the present invention comprises the steps of preparing a substrate base layer made of a ceramic material, and coating the antistatic solution on the surface of the substrate base layer. In this case, the antistatic solution comprises a carbon nanotube, a leveling agent made of a silicon material having a weight ratio of 0.01 to 10 wt% with respect to the solvent, and a dispersant having a weight ratio of 0.05 to 10 wt% with respect to the solvent, The dispersant is sodium dodecylbenzene sulfonate (C12H25C6H4SO3Na), SDS (sodium dodecyl sulfate, C12H25OSO3Na), Triton X-100 (C8H17C6H4 (OCH2CH2) 10OH), DTAB (dodecyltrimethylammonium bromide, CH3 (CH3) 3N3N3 (Gum Arabic), starch (starch), PVP (polyvinyl pyrrolidone) is one or more selected from the group consisting of.

On the other hand, the ceramic substrate antistatic treatment method according to another aspect of the present invention comprises the steps of preparing a substrate base layer made of a ceramic material, on the substrate base layer, acrylic resin, epoxy resin, silicone resin, ceramic, organic-inorganic mixing Coating a primer layer comprising one selected from binders, coating an antistatic solution comprising carbon nanotubes on the primer layer, and curing the antistatic solution after coating.

According to the present invention, the carbon nanotube is coated on the ceramic substrate, thereby providing an antistatic effect to the ceramic substrate. In addition, the adhesion between the ceramic substrate and the CNT coating is enhanced by the intermediate primer layer. In addition, the high temperature durability of the ceramic substrate enables high temperature processes, thereby increasing the rigidity against curing. In addition, by forming an antistatic layer using carbon nanotubes, the hardness is excellent, and there is no need for a separate process such as anodizing. In addition, since there is static elimination by corona discharge, there is no need for grounding separately.

1 is a cross-sectional view showing an antistatic ceramic substrate according to an embodiment of the present invention.
2 is a flowchart illustrating an antistatic treatment method of a ceramic substrate according to another exemplary embodiment of the present disclosure.
3 is a flowchart illustrating an antistatic treatment method of a ceramic substrate according to another embodiment of the present invention.
4 to 7 are cross-sectional views illustrating each step of the antistatic treatment method of the ceramic substrate of FIG. 3, and FIG. 4 is a cross-sectional view illustrating a step of preparing a substrate base layer.
5 is a cross-sectional view illustrating a step of forming a primer layer on a surface of a substrate base layer.
6 is a cross-sectional view showing a step of coating an antistatic layer on the surface of the primer layer.
7 is a cross-sectional view showing the step of curing the antistatic layer.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view showing an antistatic ceramic substrate according to a preferred embodiment of the present invention.

As shown in FIG. 1, the ceramic substrate 1 having the antistatic surface treatment according to an exemplary embodiment of the present invention may include a substrate base layer 10 and an antistatic layer 20 coated on the surface of the substrate base layer 10. ).

The substrate base layer 10 is made of a ceramic material. Examples of the ceramics include glass, porcelain, mica, stone, cement, clay, silica, feldspar, aluminum oxide (Al ₂ O ₃ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), and zirconia (ZrO ₂ ). It may be made of any one or more selected. The ceramic substrate is excellent in chemical resistance. Therefore, ITO, which is commonly used as an antistatic material, is not easily coated on the ceramic substrate surface.

An example of the substrate base layer 10 may be a wafer substrate or a display substrate. The present invention is not limited to this, but it is obvious that the present invention is applied to all substrates of the ceramic material which need antistatic.

The antistatic layer 20 is formed by coating an antistatic solution on the surface of the substrate base layer 10 and has a sheet resistance of 10 ⁶ to 10 ⁹ Ω / sq.

The antistatic solution includes a carbon nanotube 21, a leveling agent 23, and a dispersant 25.

The carbon nanotubes 21 form a tube by combining one carbon with a hexagonal honeycomb pattern with another carbon atom, and the diameter of the tube is extremely small, at a nanometer level, thereby exhibiting unique electrochemical characteristics. The carbon nanotubes have excellent mechanical properties, electrical selectivity, and excellent field emission characteristics. When the carbon nanotubes are formed in a thin conductive film on the substrate base layer 10, the carbon nanotubes have high conductivity and thus have an antistatic effect. In addition, since the carbon nanotubes each form a network in a tube shape instead of a spherical shape, there is little possibility of dust and excellent moisture resistance.

The carbon nanotubes 21 may be selected from single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes and bundled carbon nanotubes, and combinations thereof.

In addition, carbon nanotubes on which the surface of carbon nanotubes is modified by acid treatment, or carbon nanotubes having different properties such as metallicity and semiconductivity, may be selected.

The leveling agent 23 is used when a paint is applied to a material that originally requires a paint film. The leveling agent 23 is a material that forms an appearance by improving the flowability of the paint to make the coating film even and smooth.

When the leveling agent 23 is mixed with the carbon nanotubes 21, the adhesion between the ceramic substrate and the carbon nanotubes is improved, so that the carbon nanotubes can be easily coated on the substrate base layer 10. . In addition, the leveling agent 23 functions to improve thickness uniformity of the antistatic layer 20 and to improve roughness characteristics.

The leveling agent 23 preferably has a weight ratio of 0.01 to 10wt% relative to the solvent. This is because if the content of the leveling agent 23 is less than 0.01wt%, the coating properties are deteriorated, and if the content of the leveling agent 23 is more than 10wt%, the electrical properties are deteriorated.

In this case, the leveling agent 23 is preferably made of a silicon material. This is because, in the case of the leveling agent 23 of the silicon material, the molecular structure is the same or similar to that of the substrate base layer 10 of the ceramic material, and thus the adhesive force is excellent.

The dispersant 25 is a surfactant material, which lowers the interfacial free energy between the carbon nanotubes 21 so that the carbon nanotubes can be well dispersed in the antistatic solution.

As a specific example of the dispersant 25, sodium dodecylbenzene sulfonate (C ₁₂ H ₂₅ C ₆ H ₄ SO ₃ Na), sodium dodecyl sulfate, C ₁₂ H ₂₅ OSO ₃ Na (SDS), Triton X-100 (C ₈ H ₁₇ C ₆ H ₄ (OCH ₂ CH ₂ ) 10 OH), dodecyltrimethylammonium bromide, DT ₃ (CH ₂ ) 11 N (CH ₃ ) ₃ Br, GA (Gum Arabic), starch, PVP (polyvinyl pyrrolidone At least one selected from the group consisting of

The content of the dispersant 25 has a weight ratio of 0.05 to 10 wt% with respect to the solvent.

In this case, the solvent of the antistatic solution may be any one selected from DMF, NMP, DMAc, and NEP.

In this case, the coating thickness (D) of the antistatic layer 20 may be 0.01 to 1000μm. When the coating thickness is more than 1000μm, the coating cost is increased, and when the coating thickness is less than 0.01μm, durability and impact stability are lowered.

According to the present invention, the surface of the substrate base layer 10 made of a ceramic material may be coated with carbon nanotubes 21 to bring about an antistatic effect. In addition, the antistatic layer 20 has a high hardness as the carbon nanotubes 21 are mixed, so that an additional process such as anodizing is unnecessary. In addition, the antistatic layer has a high durability has the advantage that there is no characteristic change for a long time.

Here, in order to coat the antistatic layer 20 on the substrate base layer 10, since a separate primer layer is not interposed between the substrate base layer 10 and the antistatic layer 20, the coating cost is reduced. And, there is an advantage that the thickness of the coating layer can be lowered.

2 is a block diagram showing an embodiment of a ceramic substrate antistatic treatment method in another aspect of the present invention. As shown in Figure 2, the ceramic substrate antistatic treatment method according to an embodiment of the present invention, the step of preparing a substrate base layer made of a ceramic material (S110), and coating the antistatic solution on the substrate base layer surface Step S120 is included. After the coating step, the step of curing and washing the substrate base layer of the coating may be further roughened (S130).

Referring to FIG. 1, in detail, the step of preparing the substrate base layer 10 made of a ceramic material may be performed by washing the substrate base layer 10 with ultrapure water and acetone and then applying heat to dry the substrate base layer 10. . In this case, the cleaning may be performed after the substrate is washed with gauze or a clean cloth with ultrapure water and then subjected to a second wash with gauze or a clean cloth with acetone. In addition, a method of applying heat may use an oven, a heating plate, an IR heater and the like, and the heating temperature may be 100 ° C to 300 ° C.

The above step may also be further subjected to the surface treatment of the prepared substrate base layer 10. The surface treatment step is to improve the adhesion and coating properties of the substrate base layer (10) surface. The surface treatment method may be a known surface treatment method such as ozone treatment method, plasma treatment method, corona treatment method.

In the step of coating the antistatic solution on the surface of the substrate base layer 10, the antistatic solution is a carbon nanotube 21 and the leveling agent 23 made of a silicon material having a weight ratio of 0.01 to 10 wt% relative to the solvent And, it comprises a dispersant 25 having a weight ratio of 0.05 to 10 wt% relative to the solvent, the dispersant 25 is NaDDBS (sodium dodecylbenzene sulfonate, C ₁₂ H ₂₅ C ₆ H ₄ SO ₃ Na), SDS ( sodium dodecyl sulfate, C ₁₂ H ₂₅ OSO ₃ Na), Triton X-100 (C ₈ H ₁₇ C ₆ H ₄ (OCH ₂ CH ₂ ) 10 OH), DTAB (dodecyltrimethylammonium bromide, CH ₃ (CH ₂ ) 11 N (CH ₃ 3Br), GA (Gum Arabic), starch (starch), PVP (polyvinyl pyrrolidone) may be any one or more selected from the group consisting of.

Thereafter, the coated substrate base layer 10 may be cured and cleaned. The curing may be used, such as oven thermosetting, IR heater, wherein the curing temperature is used 50 to 300 ℃ and the curing time can be selected according to the situation of 30 to 120 minutes.

If using a curing temperature of 200 ℃ or more, it is necessary to proceed with curing in two stages to prevent damage to the substrate.In the initial stage 1, 10 to 60 minutes at 100 ℃ and 10 to 60 minutes at 200 ℃ or more in two stages. You can. After the curing is completed, it is necessary to gradually cool at room temperature so that the progress of cooling does not impair the substrate.

According to the present invention, in order to coat the antistatic layer 20 on the substrate base layer 10, preparing a substrate base layer 10 and then forming a separate primer layer before coating the antistatic layer 20. Is unnecessary. As a result, the antistatic treatment cost is reduced, and the treatment time is shortened.

Figure 3 is a block diagram showing another embodiment of the antistatic treatment method of the ceramic substrate in another aspect of the present invention.

As shown in Figure 3, the antistatic treatment method of the ceramic substrate according to another embodiment of the present invention, preparing a substrate base layer made of a ceramic material (S210), on the substrate base layer, acrylic resin, epoxy Coating a primer layer made of one selected from a resin, a silicone resin, a ceramic, and an organic-inorganic mixed binder (S220), and forming an antistatic layer by coating an antistatic solution including carbon nanotubes on the primer layer. (S230), and the step of curing the antistatic solution after coating (S240). After the curing step, the step 250 of washing the antistatic layer may be further roughened.

4 to 7 are cross-sectional views illustrating respective steps of the antistatic treatment method of the ceramic substrate of FIG. 3. 4 to 7, each step will be described in detail.

First, as shown in FIG. 4, the substrate base layer 110 made of a ceramic material is prepared. The substrate base layer 110 is made of a ceramic material. Examples of the ceramic may be made of any one or more selected from cement, concrete, glass, tiles, ceramics, gypsum board, mica, natural stone.

In this step, the substrate base layer 110 may be washed with ultrapure water and acetone and then dried by applying heat. In this case, the cleaning may be performed after the substrate is washed with gauze or a clean cloth with ultrapure water and then subjected to a second wash with gauze or a clean cloth with acetone.

In addition, a method of applying heat may use an oven, a heating plate, an IR heater and the like, and the heating temperature may be 100 ° C to 300 ° C.

Thereafter, as shown in FIG. 5, a primer layer 120 formed of one selected from an acrylic resin, an epoxy resin, a silicone resin, a ceramic, and an organic / inorganic mixed binder is coated on the substrate base layer 110. The primer layer 120 coating method may be a coating method such as spray coating, dip coating, deposition.

Between the preparation of the substrate base layer 110 and the coating of the primer layer 120, the surface treatment may be further performed. The surface treatment step is to improve the adhesion and coating properties of the substrate base layer (110) surface. The surface treatment method may be a known surface treatment method such as ozone treatment method, plasma treatment method, corona treatment method.

 Thereafter, as shown in FIG. 6, the antistatic layer 130 is coated. In this case, the antistatic layer 130 is a material of the antistatic solution in which the binder 135 and the carbon nanotubes 131 are uniformly dispersed in a solvent. The solvent may be DMF, NMP, DMAc, NEP and the like. The carbon nanotubes 131 may be selected from single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes and bundled carbon nanotubes, and combinations thereof. The carbon nanotubes may be manufactured by an arc method, a CVD method, a laser method, or the like. As the binder, an acrylic resin, an epoxy resin, a silicone resin, a ceramic, an organic-inorganic mixed binder, or the like may be used.

If necessary, a dispersant may be included in the antistatic solution. The dispersant is sodium dodecylbenzene sulfonate (C ₁₂ H ₂₅ C ₆ H ₄ SO ₃ Na), sodium dodecyl sulfate (C ₁₂ H ₂₅ OSO ₃ Na), Triton X-100 (C ₈ H ₁₇ C ₆ H ₄₎ (OCH ₂ CH ₂ ) 10OH), DTAB (dodecyltrimethylammonium bromide, CH ₃ (CH ₂ ) 11 N (CH ₃ ) ₃ Br), GA (Gum Arabic), starch, PVP (polyvinyl pyrrolidone) There may be more than one.

In this step, the substrate base layer 110 may be heated and coated to improve coating properties. The method of heating the substrate base layer 110 may be a method of raising the substrate base layer 110 on a heating plate, or immediately removing the substrate base layer 110 immediately after heating in an oven, coating the heat before cooling, or heating using an IR heater. have. In this case, the heating temperature can be widely used up to 30 ~ 300 ℃ depending on the situation.

Thereafter, as shown in FIG. 7, the step of curing the coated substrate base layer 110 may be performed. The curing may be used, such as oven thermosetting, IR heater, wherein the curing temperature is used 50 to 300 ℃ and the curing time can be selected according to the situation of 30 to 120 minutes.

If using a curing temperature of 200 ℃ or more, it is necessary to proceed with curing in two stages to prevent damage to the substrate.In the initial stage 1, 10 to 60 minutes at 100 ℃ and 10 to 60 minutes at 200 ℃ or more in two stages. You can. After the curing is completed, it is necessary to gradually cool at room temperature so that the progress of cooling does not impair the substrate.

On the other hand, after the curing step, the step of washing the antistatic layer 130 further. The washing step is to proceed to wash the remaining coating material or foreign matter with a solvent such as acetone. Defects can be measured after completion of the cleaning to re-coated.

According to the present invention, the carbon nanotube is coated on the ceramic substrate, thereby providing an antistatic effect to the ceramic substrate. In addition, adhesion between the ceramic substrate and the CNT coating is enhanced by the intermediate primer layer 120. In addition, the high temperature durability of the ceramic substrate enables high temperature processes, thereby increasing the rigidity against curing. In addition, by forming an antistatic layer using carbon nanotubes, the hardness is excellent, and there is no need for a separate process such as anodizing. In addition, since there is static elimination by corona discharge, there is no need for grounding separately.

As described above, although described with reference to the preferred embodiment of the present invention, those skilled in the art various modifications and variations of the present invention without departing from the spirit and scope of the invention described in the claims below I can understand that you can.

10, 100: substrate base layer
20, 130: antistatic layer
21: carbon nanotube
23: leveling agent
25: dispersant
120: primer layer

Claims (7)

delete delete delete Preparing a substrate base layer made of a ceramic material;
Coating an antistatic solution comprising a solvent, a carbon nanotube, a dispersant, and a leveling agent of a silicon material having a weight ratio of 0.01 to 10 wt% with respect to the solvent on the substrate base layer; And
Curing the coated antistatic solution in a state where the leveling agent is not removed to form an antistatic layer having a sheet resistance of 10 ⁶ to 10 ⁹ μs / sq on the substrate base layer.
And an antistatic layer comprising carbon nanotubes and a leveling agent on the ceramic substrate. The method of claim 4, wherein
Between the step of preparing the substrate base layer and the step of coating an antistatic solution on the substrate base layer, a primer consisting of one selected from acrylic resin, epoxy resin, silicone resin, ceramic resin, organic-inorganic mixed binder on the substrate base layer Ceramic substrate antistatic treatment method further comprising the step of coating a layer. delete The method of claim 4, wherein
Curing the coated substrate base layer without the leveling agent removed, wherein the coated substrate base layer is cured at a temperature of 50 ° C. to 200 ° C. for 30 to 120 minutes. Treatment method.

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