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KR101106029B1 - test apparatus of vibration sensor - Google Patents

test apparatus of vibration sensor Download PDF

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KR101106029B1
KR101106029B1 KR1020090121849A KR20090121849A KR101106029B1 KR 101106029 B1 KR101106029 B1 KR 101106029B1 KR 1020090121849 A KR1020090121849 A KR 1020090121849A KR 20090121849 A KR20090121849 A KR 20090121849A KR 101106029 B1 KR101106029 B1 KR 101106029B1
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vibration
vibration sensor
test apparatus
piezoelectric
vibrating
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KR1020090121849A
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Korean (ko)
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KR20110065024A (en
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이흥엽
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주식회사 한국가스기술공사
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • G01M7/02Vibration-testing by means of a shake table
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001Type of application of the stress
    • G01N2203/0005Repeated or cyclic

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  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

인가되는 전계에 따라 물리적 변화를 일으켜 진동을 발생하는 압전소자의 진동 운동을 진동센서에 접속하여 진동센서에 진동을 가하는 압전 진동자를 이용한 진동센서 시험 장치에 관한 것이다.The present invention relates to a vibration sensor test apparatus using a piezoelectric vibrator for applying a vibration to a vibration sensor by connecting a vibration movement of a piezoelectric element that generates a physical change according to an applied electric field to a vibration sensor.

이 장치는 인가되는 전위에 의해 일어나는 물리적 변위에 따라 진동 운동하는 압전 진동소자(100)를 포함하는 진동부와; 진동소자(100)에서 발생된 진동이 상기 진동센서(200)에 전달되도록 진동센서(200)를 진동부에 결합시키는 결합수단을 구비한다.The apparatus includes a vibrating unit including a piezoelectric vibrating element 100 which vibrates in accordance with a physical displacement caused by an applied potential; It is provided with a coupling means for coupling the vibration sensor 200 to the vibration unit so that the vibration generated from the vibration device 100 is transmitted to the vibration sensor 200.

이와 같은 진동센서 시험장치는 진동 발생을 위해 기존의 방식인 유도코일에 전류를 흘려 자장을 영구자석과 쇄교하도록 하여 전자석에 의해 진동이 발생하는 마그네틱 진동 발생 방법보다 구동 전력이 현저히 작은 전력으로 작동시킬 수 있는 장점을 갖는다. Such a vibration sensor test device is to drive the magnetic field with the permanent magnet by passing a current through the induction coil, which is a conventional method for generating vibration, so that the driving power is operated with a significantly smaller power than the magnetic vibration generating method in which vibration is generated by the electromagnet. Has the advantage.

진동센서, 압전진동소자, 탄성부재, 전원부 Vibration sensor, piezoelectric vibrating element, elastic member, power supply

Description

진동센서 시험장치{test apparatus of vibration sensor} Test apparatus of vibration sensor

본 발명은 압전 진동자를 이용한 진동센서 시험장치에 관한 것으로서, 더욱 상세하게는 인가되는 전계에 따라 물리적 변화를 일으켜 진동을 발생하는 압전소자의 진동 운동을 진동센서에 접속하여 진동센서에 진동을 가하는 압전 진동자를 이용한 진동센서 시험 장치에 관한 것이다.The present invention relates to a vibration sensor test apparatus using a piezoelectric vibrator, and more particularly, piezoelectric for applying a vibration to the vibration sensor by connecting the vibration movement of the piezoelectric element generating a vibration by the physical change depending on the applied electric field to the vibration sensor The present invention relates to a vibration sensor test apparatus using an oscillator.

압전 진동자는 압전체의 압전현상을 이용하여 구동하는 진동자이다. 수정이나 로셀염 등의 결정에 압력을 가하면 전압이 발생하는데 이를 압전 직접효과라고 하며, 이와 반대로 전압을 인가하면 결정체가 변형을 일으키는 현상을 압전 역효과라 한다. 이러한 압전 직접효과 및 압전 역효과 모두를 압전효과(Piezoelectric effect)라 한다.A piezoelectric vibrator is a vibrator which drives using the piezoelectric phenomenon of a piezoelectric body. When pressure is applied to crystals such as crystals or roselle salts, voltage is generated. This is called the piezoelectric direct effect. In contrast, when a voltage is applied, the crystal is deformed. Both the piezoelectric direct effect and the piezoelectric inverse effect are called piezoelectric effects.

이러한 압전 효과를 나타내는 소자를 압전 소자라 하며, 현재에는 압전 세라믹(PZT)이 발견되어 가속도계 등 진동센서로 널리 사용되고 있다. PZT는 납(Pb), 아연(Zn), 티타늄(Ti)이 소정 비율로 혼합된 화합물이다.A device exhibiting such a piezoelectric effect is called a piezoelectric device. Currently, piezoelectric ceramics (PZTs) have been found and are widely used as vibration sensors such as accelerometers. PZT is a compound in which lead (Pb), zinc (Zn), and titanium (Ti) are mixed at a predetermined ratio.

이러한 압전 진동자는 종래의 마그네틱 전자석에 의한 진동에 비해서 소형으로서 작은 구동 전력으로 작동시킬 수 있는 장점이 있다. 이러한 압전 진동자는 초 음파 세척기, 초음파 가습기, 압전 모터, 음파 발생기 등의 진동용으로 사용되고 있다. 이러한 압전 진동자는 전자기기들이 초 소형화되고 있는 현재의 추세에 부응하여 지속적으로 개발되고 있는 분야이다.Such piezoelectric vibrators have advantages in that they are small in size and can be operated with small driving power, compared to the vibrations of the conventional magnetic electromagnet. Such piezoelectric vibrators are used for vibration of ultrasonic cleaners, ultrasonic humidifiers, piezoelectric motors, sound wave generators, and the like. Such piezoelectric vibrators are a field that is continuously developed in response to the current trend of miniaturization of electronic devices.

종래의 진동센서 시험용 진동 구동용으로는 마그네틱 영구자석에 전자석 기전력에 의한 진동자를 사용하고 있으며 진동센서에 일정한 진동을 가하도록 한 것이다.Conventional vibration sensor for vibration drive is to use a vibrator by electromotive force in the magnetic permanent magnet and to apply a constant vibration to the vibration sensor.

그러나 이와 같은 전자석 진동자는 전자석을 구동하기 위한 구동력이 크기 때문에 전력 소비가 많이 들어가며, 부피가 크고 무게가 무거운 단점이 있다.However, such an electromagnet vibrator has a large driving force for driving the electromagnet, and thus consumes a lot of power, and has a disadvantage of being bulky and heavy.

본 발명은 상기와 같은 문제점을 해결하기 위하여 창안된 것으로, 압전진동소자를 보호하면서 저전력 및 경량으로서 진동센서에 진동을 가할 수 있도록 한 진동센서 시험장치를 제공하는 데 그 목적이 있다.The present invention has been made to solve the above problems, and an object of the present invention is to provide a vibration sensor test apparatus that can apply vibration to the vibration sensor with low power and light weight while protecting the piezoelectric vibrating element.

본 발명의 다른 목적은 진동센서에 최대의 효율로 진동 구동력을 가하기 위하여 고정부를 중량으로 하고 진동부를 경량으로 한 진동센서 시험장치를 제공하는 데 있다.It is another object of the present invention to provide a vibration sensor test apparatus having a weight of a fixed part and a light weight of a vibration part in order to apply vibration driving force to the vibration sensor with maximum efficiency.

상기 목적을 달성하는 본 발명은 진동센서에 진동을 가하여 시험하는 진동센서 시험장치에 있어서,In the present invention to achieve the above object in the vibration sensor test apparatus for testing by applying vibration to the vibration sensor,

인가되는 전위에 의해 일어나는 물리적 변위에 따라 진동 운동하는 압전 진동소자를 포함하는 진동부와;A vibrating unit including a piezoelectric vibrating element vibrating according to a physical displacement caused by an applied potential;

상기 진동소자에서 발생된 진동이 상기 진동센서에 전달되도록 상기 진동센서를 상기 진동부에 결합시키는 결합수단을 구비하며,Coupling means for coupling the vibration sensor to the vibration unit so that the vibration generated from the vibration element is transmitted to the vibration sensor,

상기 진동부는 고정블럭과, 상기 고정블럭에 안착 고정되는 고정부재와, 상기 고정부재 상측에 마련되는 상기 진동소자와, 상기 진동소자의 상측에 마련되어 진동소자의 진동이 전달되는 진동전달부재를 구비한 것을 특징으로 한다.The vibrating unit includes a fixed block, a fixed member seated and fixed to the fixed block, the vibration device provided above the fixing member, and a vibration transmission member provided above the vibration device to transmit vibration of the vibration device. It is characterized by.

또한, 본 발명 장치는 상기 고정부재와 진동소자 사이에 탄성부재와 보조블 럭이 순차적으로 적층되고, 상기 진동전달부재와 보조블럭이 절연된 체결볼트에 의해 상호 체결된 것을 특징으로 한다.In addition, the device of the present invention is characterized in that the elastic member and the auxiliary block is sequentially stacked between the fixing member and the vibration element, the vibration transmission member and the auxiliary block is fastened to each other by an insulated fastening bolt.

또한, 상기 결합수단은 상기 진동센서의 저면에 수나사부가 형성되고, 상기 진동전달부재의 상면에 상기 수나사부가 나사결합되는 암나사부가 형성된 것을 특징으로 한다.In addition, the coupling means is characterized in that the male screw portion is formed on the bottom surface of the vibration sensor, the female screw portion is screwed on the upper surface of the vibration transmission member.

또한, 본 발명 장치는 상기 고정블럭에 전원부가 마련되고, 상기 전원부의 양극이 상기 보조블럭에 연결되고 음극이 상기 진동전달부재에 연결된 것을 특징으로 한다.In addition, the device of the present invention is characterized in that the power supply unit is provided in the fixed block, the positive electrode of the power supply unit is connected to the auxiliary block and the negative electrode is connected to the vibration transmission member.

본 발명에 따른 압전 진동소자를 이용한 진동센서 시험장치는 진동 발생을 위해 기존의 방식인 유도코일에 전류를 흘려 자장을 영구자석과 쇄교하도록 하여 전자석에 의해 진동이 발생하는 마그네틱 진동 발생 방법보다 구동 전력이 현저히 작은 전력으로 작동시킬 수 있는 장점을 갖는다. 이러한 압전 진동소자는 크기도 매우 작아 소형의 진동 시험장치를 제작할 수 있는 장점을 갖는다.Vibration sensor test apparatus using the piezoelectric vibrating device according to the present invention by driving a current to the induction coil of the existing method for the generation of vibration to link the magnetic field with the permanent magnet drive power than the magnetic vibration generating method of vibration generated by the electromagnet This has the advantage of being able to operate with significantly smaller power. The piezoelectric vibrating element is also very small in size and has the advantage of producing a small vibration test apparatus.

또한, 본 발명에 따른 압전 진동소자를 이용한 진동센서 시험장치는 진동 소자에 공급되는 전원 단자가 압전 소자에 직접 연결되지 않고 고정부 +극과 -극에 연결하는 단자를 가지므로 납땜이나 용접 등의 제작 절차가 간단해 진다. 또한, 압전 소자 극간 절연 와셔를 사용하여 고정하므로 소자의 물리적 파손이 없이 제작할 수 있는 장점을 갖는다. In addition, the vibration sensor test apparatus using the piezoelectric vibrating device according to the present invention has a terminal connected to the fixed part + pole and-pole, rather than directly connected to the piezoelectric element, the power supply terminal supplied to the vibration element, such as soldering or welding The production process is simplified. In addition, since the piezoelectric element is fixed by using the insulating washer between the poles has the advantage that can be manufactured without physical damage to the device.

또한, 고정부의 질량을 늘리고 진동부의 질량을 감소하도록 하는 재질을 사 용함으로써, 진동센서에 최대의 효율로 진동 구동력을 가할 수 있다.In addition, by using a material that increases the mass of the fixing portion and decreases the mass of the vibrating portion, it is possible to apply the vibration driving force to the vibration sensor with maximum efficiency.

진동센서에 진동을 가하여 시험하는 본 발명 실시예의 진동센서 시험장치를 나타낸 도 1 및 도 2를 참조하면, 이는 인가되는 전위에 의해 일어나는 물리적 변위에 따라 진동 운동하는 압전 진동소자(100)를 포함하는 진동부와; 상기 진동소자(100)에서 발생된 진동이 상기 진동센서(200)에 전달되도록 상기 진동센서(200)를 상기 진동부에 결합시키는 결합수단을 구비한다.1 and 2 showing the vibration sensor test apparatus of the embodiment of the present invention for testing by applying vibration to the vibration sensor, which includes a piezoelectric vibrating element 100 which vibrates in accordance with the physical displacement caused by the applied potential. A vibration unit; It is provided with a coupling means for coupling the vibration sensor 200 to the vibration unit so that the vibration generated in the vibration device 100 is transmitted to the vibration sensor 200.

상기 진동부는 고정블럭(103)과, 상기 고정블럭(103)에 안착 고정되는 고정부재(102)와, 상기 고정부재(102) 상측에 마련되는 상기 진동소자(100)와, 상기 진동소자(100)의 상측에 마련되어 진동소자(100)의 진동이 전달되는 진동전달부재(101)를 구비한다.The vibrating unit is a stationary block 103, a stationary member 102 seated and fixed to the stationary block 103, the vibration element 100 provided on the fixing member 102 and the vibration element 100 It is provided on the upper side of the vibration transmitting member 101 to which the vibration of the vibration device 100 is transmitted.

또한, 상기 고정부재(102)와 진동소자(100) 사이에는 실리콘과 같은 탄성부재(106)와 보조블럭(105)이 순차적으로 적층되고, 상기 진동전달부재(101)와 보조블럭(105)이 절연된 체결볼트(109)에 의해 상호 체결된다.In addition, between the fixing member 102 and the vibration device 100, an elastic member 106 such as silicon and the auxiliary block 105 are sequentially stacked, and the vibration transmitting member 101 and the auxiliary block 105 are They are fastened to each other by an insulated fastening bolt 109.

상기 체결볼트(109)는 보조블럭(105)과 전기적 절연을 위해 절연와셔(110)를 사용하여 절연이 되도록 구성된다.The fastening bolt 109 is configured to be insulated using the insulating washer 110 for electrical insulation with the auxiliary block 105.

상기 탄성부재(106)는 상기 고정부재(102)에 진동이 전달되는 것을 최소화시킨다.The elastic member 106 minimizes the transmission of vibration to the fixing member 102.

상기 결합수단은 상기 진동센서(200)의 저면에 수나사부(201)가 형성되고, 상기 진동전달부재(101)의 상면에 상기 수나사부(201)가 나사결합되는 암나사 부(104)가 형성된 구조를 가진다.The coupling means has a structure in which a male screw portion 201 is formed on a bottom surface of the vibration sensor 200, and a female screw portion 104 in which the male screw portion 201 is screwed on an upper surface of the vibration transmitting member 101. Has

또한, 상기 고정블럭(103)에는 전원부(300)가 마련되고, 상기 전원부(300)의 양극(108)이 상기 보조블럭(105)에 연결되고 음극(107)이 상기 진동전달부재(101)에 연결된다.In addition, the fixed block 103 is provided with a power supply unit 300, the positive electrode 108 of the power supply unit 300 is connected to the auxiliary block 105 and the negative electrode 107 to the vibration transmission member 101 Connected.

또한, 소형의 시험장치를 구성하기 위해 전원부(300)와 컨트롤러(301) 및 사용자에 맞게 키패드(302)를 통해 전위값을 입력시키는 LCD 표시부(303)를 일체화하였다.In addition, the LCD display unit 303 for inputting a potential value through the keypad 302 in accordance with the power supply unit 300, the controller 301, and the user is integrated to form a compact test apparatus.

또한, 진동센서(200)에 가장 효율적으로 진동을 가하기 위하여 진동전달부재(101) 및 보조블럭(105)은 질량이 적은 알루미늄을 사용하고, 고정부재(102)와 고정블럭(103)은 질량이 많은 스틸을 사용하였다. In addition, in order to apply the vibration to the vibration sensor 200 most efficiently, the vibration transmitting member 101 and the auxiliary block 105 use less aluminum, and the fixing member 102 and the fixing block 103 have a mass. Many steels were used.

상기와 같은 구성의 시험장치는 압전 진동소자(100)에 전원부(300)로부터의 전기 펄스가 인가되면 진동이 발생되고, 발생된 진동은 진동전달부재(101)를 통하여 진동센서(200)에 전달되어서 신호선 커넥터(202)를 통하여 진동센서를 시험할 수 있게 한다.In the test apparatus having the above configuration, vibration is generated when an electric pulse from the power supply unit 300 is applied to the piezoelectric vibrating device 100, and the generated vibration is transmitted to the vibration sensor 200 through the vibration transmitting member 101. To allow the vibration sensor to be tested through the signal line connector 202.

이와 같은 본 발명에 따른 압전 진동소자(100)를 이용한 진동센서 시험장치는 진동 발생을 위해 기존의 방식인 유도코일에 전류를 흘려 자장을 영구자석과 쇄교하도록 하여 전자석에 의해 진동이 발생하는 마그네틱 진동 발생 방법보다 구동 전력이 현저히 작은 전력으로 작동시킬 수 있는 장점을 갖는다. Such a vibration sensor test apparatus using the piezoelectric vibrating device 100 according to the present invention by flowing a current to the induction coil of the existing method for the generation of vibration to cause the magnetic field to be bridged with the permanent magnet magnetic vibration generated by the electromagnet It has the advantage that the driving power can be operated at a significantly smaller power than the generation method.

이러한 압전 진동소자는 크기도 매우 작아 소형의 진동 시험장치를 제작할 수 있는 장점을 갖는다.The piezoelectric vibrating element is also very small in size and has the advantage of producing a small vibration test apparatus.

또한, 본 발명에 따른 압전 진동소자를 이용한 진동센서 시험장치는 진동 소자에 공급되는 전원 단자가 압전 진동소자(100)에 직접 연결되지 않고 고정부 +극과 -극에 연결하는 단자를 가지므로 납땜이나 용접 등의 제작 절차가 간단해 진다.In addition, the vibration sensor test apparatus using the piezoelectric vibrating element according to the present invention is because the power supply terminal supplied to the vibrating element is not directly connected to the piezoelectric vibrating element 100, but has a terminal connected to the fixed part + pole and-pole The manufacturing procedure such as welding or welding is simplified.

또한, 압전 소자 극간 절연 와셔를 사용하여 고정하므로 소자의 물리적 파손이 없이 제작할 수 있는 장점을 갖는다. In addition, since the piezoelectric element is fixed by using the insulating washer between the poles has the advantage that can be manufactured without physical damage to the device.

도 1은 본 발명 실시예의 시험장치를 나타낸 개략도,1 is a schematic view showing a test apparatus of an embodiment of the present invention,

도 2는 도 1의 요부 발췌도이다.Figure 2 is an excerpt of the main portion of Figure 1;

Claims (5)

진동센서에 진동을 가하여 시험하는 진동센서 시험장치에 있어서,In the vibration sensor test apparatus for testing by applying vibration to the vibration sensor, 인가되는 전위에 의해 일어나는 물리적 변위에 따라 진동 운동하는 압전 진동소자(100)를 포함하는 진동부와;A vibrating part including a piezoelectric vibrating element 100 vibrating according to a physical displacement caused by an applied potential; 상기 진동소자(100)에서 발생된 진동이 상기 진동센서(200)에 전달되도록 상기 진동센서(200)를 상기 진동부에 결합시키는 결합수단을 구비하며,And coupling means for coupling the vibration sensor 200 to the vibration unit so that the vibration generated from the vibration device 100 is transmitted to the vibration sensor 200, 상기 진동부는 고정블럭(103)과, 상기 고정블럭(103)에 안착 고정되는 고정부재(102)와, 상기 고정부재(102) 상측에 마련되는 상기 진동소자(100)와, 상기 진동소자(100)의 상측에 마련되어 진동소자(100)의 진동이 전달되는 진동전달부재(101)를 구비한 것을 것을 특징으로 하는 진동센서 시험장치.The vibrating unit is a stationary block 103, a stationary member 102 seated and fixed to the stationary block 103, the vibration element 100 provided on the fixing member 102 and the vibration element 100 Vibration sensor test apparatus, characterized in that provided with a vibration transmitting member 101 is provided on the upper side of the vibration element 100 is transmitted. 삭제delete 제 1 항에 있어서, 상기 고정부재(102)와 진동소자(100) 사이에 탄성부재(106)와 보조블럭(105)이 순차적으로 적층되고,The method of claim 1, wherein the elastic member 106 and the auxiliary block 105 is sequentially stacked between the fixing member 102 and the vibration device 100, 상기 진동전달부재(101)와 보조블럭(105)이 절연된 체결볼트(109)에 의해 상호 체결된 것을 특징으로 하는 진동센서 시험장치.Vibration sensor test apparatus, characterized in that the vibration transmission member 101 and the auxiliary block 105 is mutually fastened by an insulated fastening bolt (109). 제 1 항 또는 제 3 항에 있어서, 상기 결합수단은 상기 진동센서(200)의 저면에 수나사부(201)가 형성되고, 상기 진동전달부재(101)의 상면에 상기 수나사부(201)가 나사결합되는 암나사부(104)가 형성된 것을 특징으로 하는 진동센서 시험장치. According to claim 1 or claim 3, The coupling means is a male screw portion 201 is formed on the bottom surface of the vibration sensor 200, the male screw portion 201 is screwed on the upper surface of the vibration transmission member 101 Vibration sensor test apparatus, characterized in that the female threaded portion 104 is formed to be coupled. 제 3 항에 있어서, 상기 고정블럭(103)에 전원부(300)가 마련되고, 상기 전원부(300)의 양극(108)이 상기 보조블럭(105)에 연결되고 음극(107)이 상기 진동전달부재(101)에 연결된 것을 특징으로 하는 진동센서 시험장치.The power supply unit 300 is provided in the fixed block 103, the anode 108 of the power supply unit 300 is connected to the auxiliary block 105, and the cathode 107 is the vibration transmitting member. Vibration sensor test apparatus, characterized in that connected to (101).
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