KR101080481B1 - Thin Film Transistor Substrate of Transflective Type And Method for Fabricating The Same - Google Patents

Abstract

The present invention provides a semi-transmissive thin film transistor substrate capable of increasing the aperture ratio of the transmission region while simplifying the process, and a method of manufacturing the same.

To this end, the transflective thin film transistor substrate of the present invention includes a gate line having a dual structure in which a transparent first conductive layer and an opaque second conductive layer are stacked; A data line intersecting the gate line with a gate insulating layer interposed therebetween to define a pixel region having a transmission region and a reflection region; A thin film transistor connected to the gate line and the data line; A pixel electrode formed in the pixel region with the same transparent conductive material as the first conductive layer; A storage upper electrode overlapping the gate line and the gate insulating layer to form a storage capacitor; A transmission hole penetrating from the organic film covering the thin film transistor to the gate insulating film to expose the pixel electrode; And a reflective electrode formed in the reflective region and connecting the drain electrode and the storage upper electrode exposed through the edge of the transmission hole to the pixel electrode.

Description

Semi-transparent thin film transistor substrate and manufacturing method thereof {Thin Film Transistor Substrate of Transflective Type And Method for Fabricating The Same}             

1 is a cross-sectional view showing a portion of a conventional transflective liquid crystal panel.

2A to 2F are cross-sectional views for explaining a method of manufacturing the transflective thin film transistor substrate shown in FIG. 1 step by step.

3 is a plan view partially showing a transflective thin film transistor substrate according to an exemplary embodiment of the present invention.

4 is a cross-sectional view of the semi-transmissive thin film transistor substrate illustrated in FIG. 3 taken along lines II-II ', III-III', and IV-IV '.

5A and 5B are plan and cross-sectional views illustrating a first mask process of a transflective thin film transistor substrate according to an exemplary embodiment of the present invention.

6A to 6E are cross-sectional views illustrating in detail the first mask process of the present invention.

7A and 7B are plan and cross-sectional views illustrating a second mask process of a transflective thin film transistor substrate according to an exemplary embodiment of the present invention.

8A to 8E are cross-sectional views for describing a second mask process of the present invention in detail.

9A and 9B are plan and cross-sectional views illustrating a third mask process of a transflective thin film transistor substrate according to an exemplary embodiment of the present invention.

10A and 10B are plan and cross-sectional views illustrating a fourth mask process of a transflective thin film transistor substrate according to an exemplary embodiment of the present invention.

11A and 11B are plan and cross-sectional views illustrating a fifth mask process of a semi-transmissive thin film transistor substrate according to an embodiment of the present invention.

12 is a plan view schematically illustrating a transflective thin film transistor substrate according to an embodiment of the present invention, mainly around a periphery thereof.

FIG. 13 is a plan view specifically showing a contact region and an antistatic element region of the data lines and data links shown in FIG. 12; FIG.

FIG. 14 is a cross-sectional view of the transflective thin film transistor substrate illustrated in FIG. 13 taken along lines V-V ′ and VI-VI ′.

15A and 15B are a plan view and a sectional view for explaining a first mask process of the transflective thin film transistor substrate shown in FIG.

16A and 16B are a plan view and a sectional view for explaining a second mask process of the transflective thin film transistor substrate shown in FIG.

17A and 17B are a plan view and a sectional view for explaining a third mask process of the transflective thin film transistor substrate shown in FIG.

18A and 18B are a plan view and a sectional view for explaining a fourth mask process of the transflective thin film transistor substrate shown in FIG.

19A and 19B are a plan view and a sectional view for explaining a fifth mask process of the transflective thin film transistor substrate shown in FIG.

20 is a cross-sectional view illustrating a thin film transistor substrate according to another exemplary embodiment of the present invention.

21A to 21E are cross-sectional views for explaining a method of manufacturing the transflective thin film transistor substrate shown in FIG. 20 step by step.

 <Description of Symbols for Main Parts of Drawings>

2, 142: lower substrate 4, 102: gate line

6, 108, 302, 312, 322: gate electrode 8, 144: gate insulating film

10, 114: active layer 12, 116: ohmic contact layer

16, 110, 304, 314, 324: source electrode

18, 112, 306, 316, 326: drain electrode

20, 122: storage upper electrode

22, 26, 30, and 146: protective films 24 and 148: organic films

28, 152: reflective electrodes 32, 118: pixel electrodes

34, 38, 162, 340, 344, 348: contact holes

35, 37: opening

36, 154 through hole 52: upper substrate

54 color filter 56 common electrode                 

100 thin film transistor substrate 101 first conductive layer

103: second conductive layer 113: third conductive layer

106, 300, 310, 320: thin film transistor 115: semiconductor pattern

128: gate pad 136: data link

138: data pad 151: first reflective metal layer

160, 262, 332, 334, 336: contact electrode 180: sealing material

182: active region 190: antistatic element

210: diffraction exposure mask 212, 266: quartz substrate

214, 262: barrier layer 216: slit

219 and 167 photoresist 105 amorphous silicon layer

107 an impurity doped amorphous silicon layer 109 source / drain metal layer

168 and 220 photoresist pattern 153 second reflective metal layer

168A, 220A: first photoresist pattern 260: halftone mask

168B and 220B: second photoresist pattern 264: partially transparent layer

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film transistor substrate of a transflective liquid crystal display device, and more particularly, to a transflective thin film transistor substrate capable of simplifying a process and a manufacturing method thereof.

Liquid crystal displays are roughly classified into a transmission type for displaying an image using light incident from a back light unit and a reflection type for displaying an image by reflecting external light such as natural light. The transmissive type has a high power consumption of the backlight unit, and the reflective type has a problem in that an image cannot be displayed in a dark environment because it depends on external light.

In order to solve this problem, a semi-transmissive liquid crystal display device capable of selecting a transmission mode using a backlight unit and a reflection mode using external light has emerged. Since the transflective liquid crystal display operates in a reflective mode when sufficient external light is sufficient, and in a transmissive mode using a backlight unit when insufficient external light, power consumption can be reduced compared to the transmissive type, and unlike the reflective type, it is not subject to external light constraints.

In general, the transflective liquid crystal panel includes a color filter substrate and a thin film transistor substrate bonded to each other with a liquid crystal layer (not shown) as shown in FIG. 1, and a backlight unit 60 disposed behind the thin film transistor substrate. do. Each pixel of the transflective liquid crystal panel is divided into a reflection region in which the reflection electrode 28 is formed and a transmission region in which the reflection electrode 28 is not formed.

The color filter substrate is composed of a black matrix (not shown) and color filter 54 formed on the upper substrate 52, a common electrode 56 and an alignment film (not shown) stacked thereon.

The thin film transistor substrate is formed on the gate substrate 4 and the data line (not shown) formed on the lower substrate 2 and connected to the gate line 4 and the data line to define each pixel region. A pixel electrode 32 connected to the thin film transistor and a reflective electrode 28 formed in the reflective region of each pixel and overlapping the pixel electrode are provided.

The thin film transistor includes a gate electrode 6 connected to the gate line 4, a source electrode 16 connected to the data line, a drain electrode 18 facing the source electrode 16, a gate electrode 6, and a gate insulating film. An active layer 10 overlapping with (8) therebetween to form a channel between the source and drain electrodes 16 and 18, and an ohmic for ohmic contact between the active layer 10 and the source and drain electrodes 16 and 18 And a contact layer 12. This thin film transistor allows the video signal on the data line to remain charged in the pixel electrode 32 in response to the scan signal of the gate line 4.

The reflective electrode 28 reflects external light incident through the color filter substrate toward the color filter substrate. At this time, the surface of the organic film 24 formed below the reflective electrode 28 has an embossing shape, and the reflective electrode 28 thereon also has an embossing shape, so that the reflection efficiency is increased by the scattering effect. Is increased.

The pixel electrode 32 generates a potential difference with the common electrode 56 by the pixel signal supplied through the thin film transistor. Due to the potential difference, the liquid crystal having dielectric anisotropy rotates to adjust the transmittance of light passing through the liquid crystal layer of each of the reflective and transmissive regions, thereby changing the luminance according to the video signal.

In this case, the transmission hole 36 is formed in the relatively thick organic film 24 in the transmission region so that the length of the light path through the liquid crystal layer is the same in the reflection region and the transmission region. As a result, the path of the ambient light incident on the reflective region, that is, the reflected light RL, passes through the liquid crystal layer-> reflective electrode 28-> liquid crystal layer in the liquid crystal layer, and the backlight unit 60 is incident on the transmissive region. Since the length of the path through which the transmitted light TL passes through the liquid crystal layer is the same, the transmission efficiency of the reflection mode and the transmission mode becomes the same.

The thin film transistor substrate further includes a storage capacitor connected to the pixel electrode 32 in order to stably maintain the video signal supplied to the pixel electrode 32. The storage capacitor is formed by overlapping the storage upper electrode 20 connected with the pixel electrode 32 with the gate line 4 and the gate insulating film 8 interposed therebetween. Under the storage upper electrode 20, an ohmic contact layer 12 and an active layer 10 overlap each other in the process.

In addition, the thin film transistor substrate includes a first passivation layer 22 between the thin film transistor and the organic layer 24, a second passivation layer 26 between the organic layer 24 and the reflection electrode 28, a reflection electrode 28, and a pixel. A third passivation film 30 is further provided between the electrodes 32. As a result, the pixel electrode 32 may pass through the first to third passivation layers 22, 26, and 30, the first and second contact holes 34 and 38, which penetrate the organic layer 24 and the reflective electrode 28, respectively. It is connected to the drain electrode 18 and the storage upper electrode 20 through the.

In such a semi-transmissive liquid crystal panel, the thin film transistor substrate includes a semiconductor process and requires a plurality of mask processes, and thus, the manufacturing process is complicated, thereby increasing the manufacturing cost of the liquid crystal panel. Hereinafter, a method of manufacturing a transflective thin film transistor substrate will be described with reference to FIGS. 2A to 2F.                         

Referring to FIG. 2A, a gate pattern including the gate line 2 and the gate electrode 6 is formed on the lower substrate 2 using the first mask process.

The gate metal layer is formed on the lower substrate 2 through a deposition method such as a sputtering method. Subsequently, a gate pattern including the gate line 2 and the gate electrode 8 is formed by patterning the gate metal layer through a photolithography process and an etching process using a first mask. As the gate metal layer, a single layer or double layer structure of a metal such as Al, Mo, Cr, or the like is used.

2B, a semiconductor pattern including a gate insulating layer 8 formed on a substrate 2 having a gate pattern formed thereon, including an active layer 10 and an ohmic contact layer 12 in a second mask process; A source / drain pattern including a data line, a source electrode 16, a drain electrode 18, and a storage upper electrode 20 is stacked.

A gate insulating film 8, an amorphous silicon layer, an amorphous silicon layer doped with impurities, and a source / drain metal layer are sequentially formed on the lower substrate 2 on which the gate pattern is formed through a deposition method such as PECVD or sputtering. As the gate insulating film 8, an inorganic insulating material such as silicon oxide (SiOx) or silicon nitride (SiNx) is used. As the source / drain metal layer, a single layer or a double layer structure of a metal such as Al, Mo, Cr or the like is used.

The photoresist pattern is formed on the source / drain metal layer by a photolithography process using a second mask. In this case, by using a diffraction exposure mask having a diffraction exposure portion in the channel portion of the thin film transistor, the photoresist pattern of the channel portion has a lower height than other source / drain pattern portions.                         

Subsequently, the source / drain metal layer is patterned by a wet etching process using a photoresist pattern to include a data line, a source electrode 16, a drain electrode 18 integrated with the source electrode 16, and a storage electrode 20. Source / drain patterns are formed.

Then, the ohmic contact layer 12 and the active layer 10 are formed by simultaneously patterning the amorphous silicon layer and the amorphous silicon layer doped with impurities by a dry etching process using the same photoresist pattern.

The photoresist pattern having a relatively low height is removed from the channel portion by an ashing process, and then the source / drain pattern and the ohmic contact layer 12 of the channel portion are etched by a dry etching process. Accordingly, the active layer 10 of the channel portion is exposed and the source electrode 16 and the drain electrode 18 are separated.

The photoresist pattern remaining on the source / drain pattern is then removed by a stripping process.

Referring to FIG. 2C, the first passivation layer 22 is formed on the gate insulating layer 8 on which the source / drain patterns are formed, and the first and second initial contact holes 35 and 37 are formed thereon by a third mask process. An organic film 24 having a transmission hole 36 and having an embossed surface is formed.

The first passivation layer 22 and the organic layer 24 are sequentially formed on the gate insulating layer 8 on which the source / drain patterns are formed. An inorganic insulating material such as the gate insulating film 8 is used as the first protective film 22, and a photosensitive organic material such as acrylic is used as the organic film 24.

Next, the organic layer 24 is patterned by a photolithography process using a third mask, so that the first and second open holes 35 and 37 penetrate the organic layer 24 corresponding to the transmission portion of the third mask. The through hole 36 is formed. At this time, the third mask has a structure in which the remaining portion except for the transmissive portion repeats the blocking portion and the diffraction exposure portion, and the remaining organic layer 24 corresponds to the blocking region (projection portion) and the diffraction exposure region (groove) having a step difference. This is patterned into a repeating structure. Subsequently, by firing the organic film 24 in which the protrusions and the grooves are repeated, the surface of the organic film 24 has an embossed shape.

Referring to FIG. 2D, the second passivation layer 26 is formed on the organic layer 24 having an embossed shape, and the reflective electrode 28 is formed thereon by a fourth mask process.

The second protective film 26 and the reflective metal layer are laminated on the organic film 24 having the embossed surface while maintaining the embossed shape. An inorganic insulating material such as the first protective film 22 is used as the second protective film 26, and a metal having high reflectance such as AlNd is used as the reflective metal layer.

Subsequently, the reflective metal layer is patterned by a photolithography process and an etching process using a fourth mask to be independent for each pixel and open in the first and second open holes 35 and 37 and the transmission hole 36 of the organic layer 24. Reflective electrode 28 is formed.

Referring to FIG. 2E, a third passivation layer 30 covering the reflective electrode 28 is formed by a fifth mask process, and the first and second contacts penetrating through the first to third passivation layers 22, 26, and 30. Holes 34 and 38 are formed.

A third passivation layer 30 covering the reflective electrode 28 is formed, and the first through second open holes 35 and 37 of the organic layer 24 are formed by a photolithography process and an etching process using a fifth mask. First and second contact holes 34 and 38 penetrating the third passivation layers 22, 26 and 30 are formed. The first and second contact holes 34 and 38 expose the drain electrode 18 and the storage upper electrode 20, respectively. As the third passivation layer 30, an inorganic insulating material is used as in the second passivation layer 26.

Referring to FIG. 2F, the pixel electrode 32 is formed on the third passivation layer 30 by using a fifth mask process.

The transparent conductive layer is formed on the third passivation layer 30 by a deposition method such as sputtering, and the transparent conductive layer is patterned by an photolithography process and an etching process using a sixth mask, thereby forming pixel electrodes 32 in each pixel region. Is formed. The pixel electrode 32 is connected to the drain electrode 18 and the storage upper electrode 20 through the first and second contact holes 34 and 38. Indium tin oxide (ITO) or the like is used as the transparent conductive layer.

As described above, the conventional semi-transmissive thin film transistor substrate is formed in a six mask process, and thus, a manufacturing process is complicated. In addition, in the conventional transflective thin film transistor substrate, margins of the first and second contact holes 34 and 38 are connected to connect the pixel electrode 32, the drain electrode 18, and the storage upper electrode 20, respectively. You must secure enough. For this reason, there is a disadvantage that the aperture ratio of the transmission region is reduced.

Accordingly, it is an object of the present invention to provide a semi-transmissive thin film transistor substrate capable of increasing the aperture ratio of a transmission region while simplifying the process, and a method of manufacturing the same.

In order to achieve the above object, a semi-transmissive thin film transistor substrate according to an embodiment of the present invention comprises a gate line of a dual structure in which a transparent first conductive layer and an opaque second conductive layer is stacked; A data line intersecting the gate line with a gate insulating layer interposed therebetween to define a pixel region having a transmission region and a reflection region; A thin film transistor connected to the gate line and the data line; A pixel electrode formed in the pixel region with the same transparent conductive material as the first conductive layer; A storage upper electrode overlapping the gate line and the gate insulating layer to form a storage capacitor; A transmission hole penetrating from the organic film covering the thin film transistor to the gate insulating film to expose the pixel electrode; And a reflective electrode formed in the reflective region and connecting the drain electrode and the storage upper electrode exposed through the edge of the transmission hole to the pixel electrode.

A method of manufacturing a semi-transmissive thin film transistor substrate according to an exemplary embodiment of the present invention includes a gate line and a gate electrode having a double structure of a transparent first conductive layer and an opaque second conductive layer using a first mask, and the first conductive layer. Forming a pixel electrode having only a layer; Forming a gate insulating film covering the electrodes using a second mask, a semiconductor pattern thereon, and a source / drain pattern including a data line, a source electrode, a drain electrode, and a storage upper electrode overlying the semiconductor pattern; ; Forming a transmission hole exposing the pixel electrode in a transmission region overlapping the pixel electrode using a third mask; Forming an organic layer in which the transmission hole extends while covering the source / drain pattern using a fourth mask; Forming a reflective electrode in the reflective region adjacent to the transmission region by using a fifth mask to connect the drain electrode and the storage electrode exposed through the transmission hole with the pixel electrode.

According to another exemplary embodiment of the present disclosure, a method of manufacturing a transflective thin film transistor substrate includes a gate line and a gate electrode having a double structure of a transparent first conductive layer and an opaque second conductive layer using a first mask, and the first Forming a gate pattern including a pixel electrode having only a conductive layer; Forming a source / drain pattern including a gate insulating layer covering the gate pattern using a second mask, a semiconductor pattern thereon, and a data line, a source electrode, a drain electrode, and a storage upper electrode overlying the semiconductor pattern; ; Forming an organic layer having a transmission hole in a transmission region overlapping the pixel electrode while covering the source / drain pattern using a third mask; Exposing the pixel electrode by extending the transmission hole to the gate insulating layer using a fourth mask; Forming a reflective electrode in the reflective region adjacent to the transmission region by using a fifth mask to connect the drain electrode and the storage electrode exposed through the transmission hole with the pixel electrode.

Other objects and advantages of the present invention in addition to the above object will be apparent from the description of the preferred embodiment of the present invention with reference to the accompanying drawings.

3 is a plan view of a transflective thin film transistor substrate according to an exemplary embodiment of the present invention, and FIG. 4 is a line II-II ', III-III', and IV-IV 'of the transflective thin film transistor substrate shown in FIG. It is a cross-sectional view cut along the.

3 and 4 may include a gate line 102 and a data line 104 crossing the gate insulating layer 144 on the lower substrate 142 to define a pixel region, and a gate thereof. The thin film transistor 106 connected to the line 102 and the data line 104, the reflective electrode 152 formed in the reflective region of each pixel, and the thin film transistor 106 formed in each pixel region and the reflective electrode 152. And a pixel electrode 118 connected to it. In addition, the transflective thin film transistor substrate includes a storage capacitor 120 and a gate line 102 formed by overlapping the storage upper electrode 122 and the front gate line 102 connected to the pixel electrode 118 through the reflective electrode 152. ) And a gate pad 128 connected to the data line and a data pad 138 connected to the data line 104. In the transflective thin film transistor substrate, each pixel area is divided into a reflection area in which the reflection electrode 152 is formed and a transmission area in which the reflection electrode 152 is not formed.

The thin film transistor 106 may include a gate electrode 108 connected to the gate line 102, a source electrode 110 connected to the data line 104, and a pixel electrode 118 facing the source electrode 110. The active layer 114 and the source electrode 110 overlapping the gate electrode 108 with the drain electrode 112 and the gate insulating layer 144 therebetween to form a channel between the source electrode 110 and the drain electrode 112. And an ohmic contact layer 116 formed on the active layer 114 except for the channel portion for ohmic contact with the drain electrode 112. The thin film transistor 106 allows the video signal on the data line 104 to remain charged in the pixel electrode 118 in response to the scan signal of the gate line 102.                     

Here, the gate line 102 and the gate electrode 108 have a double structure in which a first conductive layer 101 made of a transparent conductive layer and a second conductive layer 103 made of a metal layer are stacked thereon.

The semiconductor pattern 115 including the active layer 114 and the ohmic contact layer 116 is also formed to overlap the data line 104.

The reflective electrode 152 is formed in the reflective region of each pixel to reflect external light. The reflective electrode 152 has an embossed shape along the shape of the organic film 148 thereunder, thereby increasing reflection efficiency due to a scattering effect. The reflective electrode 152 has a dual structure in which the first and second reflective metal layers 151 and 152 are stacked. The first reflective metal layer 151 uses a metal such as Mo that can reduce contact resistance with the pixel electrode 118 that is a transparent conductive layer, and the second reflective metal layer 153 uses a metal having high reflectance such as AlNd.

The pixel electrode 118 is formed in each pixel area and is connected to the drain electrode 112 through the reflective electrode 152 via the edge portion of the transmission hole 154. The pixel electrode 118 is formed of a transparent conductive layer such as the first conductive layer 101 of the gate line 102, and is exposed through the transmission hole 154 in the transmission region. The pixel electrode 118 generates a potential difference with a common electrode of a color filter substrate (not shown) by the pixel signal supplied through the thin film transistor. Due to the potential difference, the liquid crystal having dielectric anisotropy rotates to adjust the transmittance of the light passing through the liquid crystal layer of each of the reflection region and the transmission region, so that the luminance varies according to the video signal.

The transmission hole 154 is formed through the gate insulating layer 144 on the pixel electrode 118, the passivation layer 146 on the thin film transistor 106, and the organic layer 148 in the transmission region. As a result, the lengths of the optical paths through the liquid crystal layer in the reflective and transmissive regions become the same, so that the transmission efficiency of the reflective and transmissive modes is the same.

The storage capacitor 120 is formed by the storage upper electrode 122 connected to the pixel electrode 118 overlapping the front gate line 102 with the gate insulating layer 144 therebetween. The storage upper electrode 122 is connected to the pixel electrode 118 through the reflective electrode 152 via the edge of the transmission hole 154, and the semiconductor pattern 115 further overlaps the storage upper electrode 122. do.

The gate line 102 is connected to a gate driver (not shown) through the gate pad 128. The gate pad 128 extends from the first conductive layer 101 of the gate line 102 and is exposed through the first contact hole 130 passing through the passivation layer 146 and the gate insulating layer 144.

The data line 104 is connected to a data driver (not shown) through the data pad 138. The data pad 138 is formed of only the first conductive layer 101, that is, the transparent conductive layer, like the gate pad 128, and passes through the passivation layer 146 and the gate insulating layer 144. Exposed through. The data pad 138 is connected to the data line 104 through a separate contact electrode (not shown).

As described above, in the transflective thin film transistor substrate according to the exemplary embodiment of the present invention, the pixel electrode 118 is the drain electrode 112 and the storage upper electrode 122 through the reflective electrode 152 via the edge portion of the transmission hole 154. ) Is connected. Accordingly, a separate contact hole for the connection between the pixel electrode 118, the drain electrode 112, and the storage upper electrode 122 is not required, so that the opening ratio of the transmission region can be increased accordingly.

The first reflective metal layer 151 having the small contact resistance with the transparent conductive layer among the reflective electrodes 152 is connected to the pixel electrode 118. Accordingly, when Al is used as the first reflective metal layer 151, AlNd is used as the second reflective metal layer 153, and ITO is used as the pixel electrode 118, AlNd and ITO are connected only through Mo, thereby generating Al ₂ O _3. It is possible to prevent the increase in contact resistance between AlNd and ITO.

The thin film transistor substrate according to the embodiment of the present invention having such a configuration is formed in a five mask process as follows.

5A and 5B are plan views and cross-sectional views illustrating a first mask process in a method of manufacturing a transflective thin film transistor substrate according to an exemplary embodiment of the present invention, and FIGS. 6A to 6E illustrate the first mask process in detail. Cross-sectional views are shown.

A gate pattern including a gate line 102 and a gate electrode 108 connected to the gate line 102 on the lower substrate 142 by a first mask process, a gate pad 128, a data pad 138, A transparent conductive pattern including the pixel electrode 118 is formed. The gate pattern has a dual structure in which the first and second conductive layers 101 and 103 are stacked, and the transparent conductive pattern is formed of the same single layer as the first conductive layer 101 of the gate pattern. Thus, the gate pattern having a double structure and the transparent conductive pattern having a single layer structure are formed in one mask process by using a half tone mask or a diffraction mask. Hereinafter, only a case of using a halftone mask will be described.

Specifically, as shown in FIG. 6A, the first and second conductive layers 101 and 103 are stacked on the lower substrate 142 through a deposition method such as a sputtering method, and a photoresist 167 is formed thereon. do. As the first conductive layer 101, a transparent conductive material such as ITO, TO, IZO, or the like, and as the second conductive layer 103, a metal material such as Mo, Ti, Cu, Al (Nd), or the like is used.

Next, the photoresist 167 is exposed and developed by a photolithography process using the halftone mask 260 to form a photoresist pattern 168 having a step as shown in FIG. 6B.

It includes a substrate 266, a barrier layer 262 and the part-transmitting layer 264 formed thereon; halftone mask 260 includes a transparent quartz (Quartz SiO _2). The blocking layer 262 overlapping the partial transmission layer 264 is positioned in a region where the gate pattern is to be formed to block ultraviolet rays (UV) to leave the first photoresist pattern 268A after development. The second layer, which is thinner than the first photoresist pattern 268A, is developed by partially blocking the blocking layer 262 and the non-overlapping partial transmissive layer 264 in a region where the transparent conductive pattern is to be formed and partially transmitting ultraviolet rays (UV). The resist pattern 268B is left. To this end, the blocking layer 262 is made of metal such as Cr, CrOx, or the like, and the partial transmission layer 264 is made of MoSix or the like.

Subsequently, the first and second conductive layers 101 and 103 are patterned by an etching process using the photoresist pattern 268 having a step, and the gate pattern having a double layer structure as shown in FIG. 6C, and the second conductive layer thereon. A transparent conductive pattern in which 103 remains is formed.

Next, by ashing the photoresist pattern 268 by an ashing process using an oxygen (O ₂ ) plasma, the first photoresist pattern 268A is thinned as shown in FIG. 6D, and the second photoresist pattern is formed. 268B is removed. The second conductive layer 103 on the transparent conductive pattern is removed by an etching process using the ashed first photoresist pattern 268A. At this time, both sides of the second conductive layer 103 patterned along the ashed first photoresist pattern 268A are etched once more, so that the first and second conductive layers 101 and 103 of the gate pattern are uniform in a step shape. You will have a step. Accordingly, when side surfaces of the first and second conductive layers 101 and 103 have a high steep slope, it is possible to prevent a disconnection failure of the source / drain metal layer that may be generated thereon.

In addition, the first photoresist pattern 268A remaining on the gate pattern by the strip process is removed as shown in FIG. 6E.

7A and 7B illustrate a plan view and a cross-sectional view for describing a second mask process in a method of manufacturing a thin film transistor substrate according to an exemplary embodiment of the present invention, and FIGS. 8A to 8E illustrate the second mask process in detail. Figures below are shown.

A gate insulating layer 144 is formed on the lower substrate 142 on which the gate pattern and the pixel electrode 118 are formed, and the data line 104, the source electrode 110, and the drain electrode 112 are formed thereon by a second mask process. The semiconductor pattern 115 includes a source / drain pattern including the storage upper electrode 122, and an active layer 114 and an ohmic contact layer 116 overlapping the back surface of the source / drain pattern. The semiconductor pattern 115 and the source / drain pattern are formed by one mask process using a diffraction exposure mask.

Specifically, as shown in FIG. 8A, the gate insulating layer 144, the amorphous silicon layer 105, the amorphous silicon layer 107 doped with impurities (n + or p +) and the source / drain are formed on the lower substrate 142 on which the gate pattern is formed. The metal layer 109 is formed sequentially. For example, the gate insulating layer 144, the amorphous silicon layer 105, and the amorphous silicon layer 107 doped with impurities are formed by a PECVD method, and the source / drain metal layer 109 is formed by a sputtering method. An inorganic insulating material such as silicon oxide (SiOx), silicon nitride (SiNx), or the like is used for the gate insulating layer 144, and Cr, Mo, MoW, Al / Cr, Cu, Al (Nd) is used for the source / drain metal layer 109. , Al / Mo, Al (Nd) / Al, Al (Nd) / Cr, Mo / Al (Nd) / Mo, Cu / Mo, Ti / Al (Nd) / Ti, and the like are used. In the case of Al / Cr, Cr is formed first and then Al is formed.

Then, the photoresist 219 is applied on the source / drain metal layer 109, and then the photoresist 219 is exposed and developed by a photolithography process using the diffraction exposure mask 210, as shown in FIG. 8B. A photoresist pattern 220 is formed.

The diffraction exposure mask 210 includes a transparent quartz substrate 212, a blocking layer 214 formed of a metal layer such as Cr, CrOx, or the like, and a slit 216 for diffraction exposure. The blocking layer 214 is positioned in a region where the semiconductor pattern and the source / drain pattern are to be formed to block ultraviolet rays so that the first photoresist pattern 220A remains after development. The diffraction exposure slit 216 is positioned in a region where a channel of the thin film transistor is to be formed to diffract ultraviolet rays, thereby leaving a second photoresist pattern 220B thinner than the first photoresist pattern 220A after development.

Subsequently, the source / drain metal layer 105 is patterned by an etching process using the photoresist pattern 220 having a step, thereby forming a source / drain pattern and a semiconductor pattern 115 below it, as shown in FIG. 8C. . In this case, the source electrode 110 and the drain electrode 112 of the source / drain pattern have an integrated structure.

Then, by ashing the photoresist pattern 220 by an ashing process using an oxygen (O ₂ ) plasma, as shown in FIG. 8D, the first photoresist pattern 220A is thinned and the second photoresist pattern 220B is used. ) Is removed. The source / drain pattern exposed by the removal of the second photoresist pattern 220B and the ohmic contact layer 116 below are removed by an etching process using the ashed first photoresist pattern 220A. The 110 and the drain electrode 112 are separated and the active layer 114 is exposed. Accordingly, a channel formed of the active layer 114 is formed between the source electrode 110 and the drain electrode 112. At this time, since both sides of the source / drain pattern are etched once again along the ashed first photoresist pattern 220A, the source / drain pattern and the semiconductor pattern 115 have a constant step in a step shape.

Then, the first photoresist pattern 220A remaining on the source / drain pattern by the strip process is removed as shown in FIG. 8E.                     

9A and 9B illustrate a plan view and a cross-sectional view for describing a third mask process in a method of manufacturing a thin film transistor substrate according to an exemplary embodiment of the present invention.

The passivation layer 146 is formed on the gate insulating layer 144 on which the source / drain patterns are formed, and the through hole 154 and the first and second contact holes 130 penetrating the passivation layer 146 and the gate insulating layer 144. 140 is formed.

Specifically, the protective film 146 covering the source / drain pattern is formed by a deposition method such as PECVD. As the passivation layer 146, an inorganic insulating material such as the gate insulating layer 144 is used. Subsequently, through the photolithography process and the etching process using the third mask, the through hole 154 exposing the pixel electrode 118 in the transmissive region of each pixel, and the gate pad 128 and the data pad 138 in the pad region, respectively. First and second contact holes 130 and 140 are formed to expose the first and second contact holes 130 and 140. In addition, the through hole 154 exposes the edge portion of the drain electrode 112 and the storage upper electrode 122 through the edge portion thereof.

10A and 10B illustrate a plan view and a cross-sectional view for describing a fourth mask process in a method of manufacturing a thin film transistor substrate according to an exemplary embodiment of the present invention.

In the fourth mask process, an organic layer 148 having an embossed surface is formed on the protective layer 146 in the reflective region, and the transmission hole 154 extends to the organic layer 148.

Specifically, the organic film 148 is formed on the protective film 146 by spin coating or the like. As the organic film 148, a photosensitive organic material such as acryl is used. Then, the organic layer 148 is patterned by a photolithography process using a third mask, so that the transmission hole 154 extends to the organic layer 148 corresponding to the transmission portion of the third mask, and the gate pad 128 and the data. The organic layer 148 is removed from the pad region where the pad 138 is formed. In this case, the permeation hole 154 extends to the organic layer 148 and becomes wider so that the edge portions of the drain electrode 122 and the storage upper electrode 122 may protrude toward the permeation hole 154. In addition, the remaining portion of the third mask except for the transmissive portion has a structure in which the blocking portion and the diffractive exposure portion (or semi-transmissive portion) are repeated. ) And the diffraction exposure area (groove) are patterned in a repeating structure. Subsequently, by firing the organic film 148 in which the protrusions and the grooves are repeated, the surface of the organic film 148 in the reflection region has an embossed shape.

11A and 11B illustrate a plan view and a cross-sectional view for describing a fifth mask process in a method of manufacturing a thin film transistor substrate according to an exemplary embodiment of the present invention.

The reflective electrode 152 is formed in the reflective region of each pixel by the fifth mask process.

Specifically, a reflective metal layer is formed on the organic film 148 having the embossed surface while maintaining the embossed shape. The reflective metal layer is formed in a double structure in which a first reflective metal layer 151 having a small contact resistance with the pixel electrode 118 such as Mo and a second reflective metal layer 153 having a high reflectance such as AlNd are stacked. Subsequently, the first and second reflective metal layers 151 and 153 are patterned by a photolithography process and an etching process using a fifth mask to form the reflective electrode 152 for each reflective region of each pixel. The reflective electrode 152 connects the drain electrode 112 and the pixel electrode 118 via the edge portion of the transmission hole 154, and connects the storage upper electrode 122 and the pixel electrode 118. As a result, a separate contact hole for connecting the pixel electrode 118, the drain electrode 112, and the storage upper electrode 122 is not required, thereby increasing the aperture ratio of the transmission region. In addition, since the first reflective metal layer 151 of the reflective electrode 152 is connected to the pixel electrode 118 which is a transparent conductive layer, the contact resistance can be reduced.

As described above, in the method of manufacturing the transflective thin film transistor substrate according to the exemplary embodiment of the present invention, the pixel electrode 118 is formed like a gate pattern by using a halftone or a diffraction mask, and the pixel electrode 118 is formed as the reflective electrode 152. ), One mask process can be reduced by connecting the drain electrode 112 and the storage upper electrode 122.

12 schematically illustrates a periphery of a transflective thin film transistor substrate according to an embodiment of the present invention.

The transflective thin film transistor substrate 100 illustrated in FIG. 12 includes a contact electrode 160 for connecting the data pad 138 formed on the same layer as the gate pad 128 to the data line 104. In other words, the contact electrode 160 connects the data link 136 and the data line 104 extended from the data pad 138. Here, the contact electrode 160 is formed of the same metal layer (AlNd, AlNd / Mo) as the reflective electrode 152 formed in the active region 182. Since the contact electrode 160 may be corroded by an oxidizing action when exposed to the outside, the contact electrode 160 may be located between an area sealed by the sealing material 180, that is, between the sealing material 180 and the active area 182 to prevent corrosion. have.

In addition, the thin film transistor substrate 100 includes an antistatic device 190 for blocking static electricity flowing into the active region 182. The antistatic device 190 is composed of a plurality of thin film transistors 300, 310, 320 connected to the data line 104 or the gate line 102 and having an interconnection relationship. The antistatic device 190 blocks the inflow of static electricity by having a low impedance in a high voltage region caused by static electricity or the like to discharge the overcurrent, and in a normal driving environment, the antistatic device 190 has a high impedance and is supplied through the data line 104 or the gate line 102. It does not affect the driving signal. This antistatic device 190 requires a plurality of contact electrodes to interconnect the thin film transistors 300, 310, 320. These contact electrodes are also formed of the same metal layer (AlNd, AlNd / Mo) as the reflective electrode 152. Accordingly, the antistatic element 190 is also formed between the region sealed by the sealing member 180, that is, between the sealing member 180 and the active region 182.

FIG. 13 is a plan view specifically illustrating a contact electrode 160 and an antistatic device 190 connected to the data line 104 illustrated in FIG. 12, and FIG. 14 is a V-V of the thin film transistor substrate illustrated in FIG. 13. It is sectional drawing cut along the lines V 'and VI-VI'.

The data link 136 shown in FIGS. 13 and 14 overlaps the end of the data line 104 which extends from the data pad 138 and is located in the area to be sealed with the sealing material 180. The data link 136 has a double structure in which a first conductive layer 101 extending from the data pad 138 and a second conductive layer 103 are stacked thereon, that is, a double structure such as the gate pattern described above.

The first contact electrode 160 is formed over the third contact hole 162 formed at the overlapping portion of the data link 136 and the data line 104 to connect the data line 104 and the data link 136. The third contact hole 162 is a second conductive layer of the data link 136 from the organic layer 148 via the passivation layer 146, the data line 104, the semiconductor pattern 115, and the gate insulating layer 144. It penetrates up to 103 to expose the first conductive layer 101 of the data link 136. Accordingly, the first contact electrode 160 is laterally connected to the first conductive layer 103 of the data line 104 and the data link 136 exposed through the third contact hole 162 and the data link 136. Surface-connected with the first conductive layer 103.

The antistatic device connected to the data line 104 includes second to fourth thin film transistors 300, 310, and 320.

The second thin film transistor 300 includes a second source electrode 304 connected to the data line 104, a second drain electrode 306 facing the second source electrode 304, a second source and a drain. The second gate electrode 302 overlaps the electrodes 304 and 306 with the semiconductor pattern 115 and the gate insulating layer 144 therebetween. Here, the second gate electrode 302 has a double structure of the first and second conductive layers 101 and 103.

The third thin film transistor 310 is diode-connected between the second source electrode 304 and the second gate electrode 302 of the second thin film transistor. To this end, the third thin film transistor 310 may include a third source electrode 314 connected to the second source electrode 304, a third drain electrode 316 facing the third source electrode 314, and And a third gate electrode 312 overlapping the third source and drain electrodes 314 and 316, the semiconductor pattern 115, and the gate insulating layer 144 therebetween. Here, the third gate electrode 312 has a double structure of the first and second conductive layers 101 and 103. The third gate electrode 312 is connected to the third source electrode 314 through the second contact electrode 332 formed over the fourth contact hole 340. The fourth contact hole 340 has a second conductivity of the organic layer 148, the passivation layer 146, the third source electrode 314, the semiconductor pattern 115, the gate insulating layer 144, and the third gate electrode 312. The first conductive layer 101 of the third gate electrode 312 is exposed through the layer 103.

The fourth thin film transistor 320 is diode-connected between the second drain electrode 306 and the second gate electrode 302 of the second thin film transistor. To this end, the fourth thin film transistor 320 may include a fourth source electrode 324 connected to the second drain electrode 306, a fourth drain electrode 326 facing the fourth source electrode 324, and And a fourth gate electrode 322 overlapping the fourth source and drain electrodes 324 and 326 with the semiconductor pattern 115 and the gate insulating layer 144 therebetween. Here, the fourth gate electrode 322 has a double structure of the first and second conductive layers 101 and 103. The fourth drain electrode 326 is connected to the third drain electrode 316 and is connected to the second gate electrode 302 through the third contact electrode 334 formed over the fifth contact hole 344. In addition, the fourth gate electrode 322 is connected to the fourth source electrode 324 through a fourth contact electrode 336 formed over the sixth contact hole 348. The fifth contact hole 344 is the first conductive layer of the organic layer 148, the passivation layer 146, the fourth drain electrode 326, the semiconductor pattern 115, the gate insulating layer 144, and the second gate electrode 302. The sixth contact hole 348 is formed through the layer 103, and the sixth contact hole 348 is formed of the organic layer 148, the passivation layer 146, the fourth source electrode 324, the semiconductor pattern 115, the gate insulating layer 144, and the first contact hole 348. It is formed through the first conductive layer 103 of the four gate electrode 322.

Here, the first to fourth contact electrodes 160, 332, 334, and 336 have a double structure in which the first and second reflective metal layers 151 and 152 are stacked in the same manner as the reflective electrode 152 as described above. . Accordingly, the first reflective metal layer 151 of the first to fourth contact electrodes 160, 332, 334, and 336 is connected to the first conductive layer 103, which is a transparent conductive layer, thereby reducing contact resistance. .

The semi-transmissive thin film transistor substrate having this structure is formed in a five mask process as described above. This will be described with reference to FIGS. 15A to 19B.

15A and 15B, the first mask process includes a data link 136 and second to fourth gate electrodes 302, 312, and 322 on the lower substrate 142 together with the data pad 138. A gate pattern is formed. As described above, the data pad 138 is formed of only the transparent conductive layer that is the first conductive layer 101, and includes the data link 136 and the second to fourth gate electrodes 302, 312, and 322. The gate pattern has a double structure in which the first and second conductive layers 101 and 103 are stacked. This first mask process uses a halftone mask (or diffraction mask) as described above in FIGS. 5A-6E.

16A and 16B, a semiconductor pattern 115 including a gate insulating layer 144, an active layer 114, and an ohmic contact layer 116, a data line 104, and a second may be formed by a second mask process. A source / drain pattern including the fourth to fourth source electrodes 304, 314, and 324 and the second to fourth drain electrodes 306, 316, and 326 is formed. This second mask process is as described above with reference to FIGS. 7A to 8E.

17A and 17B, a passivation layer 146 is formed through a third mask process, and the data link 136, the third gate electrode 312, the second gate electrode 302, and the passivation layer 146 are formed from the passivation layer 146. Third to sixth contact holes 162, 340, 344, and 348 penetrating to the second conductive layer 103 of each of the fourth gate electrodes 322 are formed. This third mask process is as described above with reference to FIGS. 9A and 9B.

18A and 18B, an organic layer 148 extending from the third to sixth contact holes 162, 340, 344, and 348 is formed by a fourth mask process. This fourth mask process is as described above with reference to FIGS. 10A and 10B. However, the organic layer 148 does not have an embossed surface in a portion where the reflective electrode 152 is not formed, such as a pixel region.

19A and 19B, the first to fourth contact electrodes 160, 332, 334, and 336 having the same dual structure as the reflective electrode 152 are formed by forming and patterning the reflective electrode layer through a fifth mask process. do. This fifth mask process is as described above with reference to FIGS. 11A and 11B.

20 is a view illustrating a pixel area along a line II-II ', a contact between a data line 104 and a data link 136 along a line V-V' in a semi-transmissive thin film transistor substrate according to a second embodiment of the present invention. It is sectional drawing which shows an area.

The transflective thin film transistor substrate illustrated in FIG. 20 may have the same components except that the second passivation layer 150 is further formed on the organic layer 148 as compared to the transflective thin film transistor substrate illustrated in FIGS. 4 and 14. Equipped. Therefore, description of overlapping components will be omitted.

The second passivation layer 150 illustrated in FIG. 20 is used to enhance adhesion between the organic layer 148 and the reflective electrode 152. The second passivation layer 150 is formed of an inorganic insulating material such as the gate insulating layer 144 and the first passivation layer 146. do. As such, when the second passivation layer 150 is further formed, the transmission holes 154 and the first to third contact holes 130, 140, and 162 should be formed after the second passivation layer 150 is formed. The manufacturing method of the transflective thin film transistor substrate which has such a structure is as follows.

21A to 21E are cross-sectional views for explaining a method of manufacturing the transflective thin film transistor substrate illustrated in FIG. 20 step by step.

Referring to FIG. 21A, a gate pattern including a gate line 102, a gate electrode 108, a data link 136, and the like, and a pixel electrode 118 are formed on a lower substrate 142 in a first mask process. The transparent conductive pattern containing is formed. The gate pattern is formed in a double structure in which the first conductive layer 101 and the second conductive layer 103 are stacked, and the transparent conductive pattern is formed only of the transparent conductive layer. This first mask process is as described above with reference to FIGS. 5A through 6E.

Referring to FIG. 21B, a semiconductor pattern 115 including a gate insulating layer 144, an active layer 114, and an ohmic contact layer 116, a data line 104, and a source electrode 110 may be formed in a second mask process. A source / drain pattern including the drain electrode 112 and the storage upper electrode 122 is formed. This second mask process is as described above with reference to FIGS. 7A to 8E.

Referring to FIG. 21C, a first passivation layer 146 covering a source / drain pattern is formed through a third mask process, and a transmission hole 154 overlapping the pixel electrode 118, a data link 136, and the like. An organic film 148 having a contact hole 160 overlapping the overlapping portion of the data line 104 and having an embossed surface in the reflective region is formed. This third mask process is the same as the fourth mask process of the first embodiment shown in FIGS. 10A and 10B.

Referring to FIG. 21D, a second passivation layer 150 covering the organic layer 148 is formed by a fourth mask process, and the transmission hole 154 extends from the second passivation layer 150 to the gate insulating layer 144. The hole 160 extends from the second passivation layer 150 to the second conductive layer 103 of the data link 136.

Referring to FIG. 21E, a reflective electrode 152 and a contact electrode 160 having a dual structure are formed in a fifth mask process. This fifth mask process is as described above with reference to FIGS. 11A and 11B.

As described above, the semi-transmissive thin film transistor substrate according to the present invention and a method of manufacturing the same are used in one mask process by using a half-tone mask (or a diffraction mask) by using a gate pattern having a double structure and a transparent conductive pattern having a single layer structure. By forming, the process can be simplified. In addition, the halftone mask (or diffraction mask) process causes the first and second conductive layers of the double (or triple) structure gate pattern to have a constant step in the form of a step so that the source / Disconnection of the drain pattern can be prevented.

In addition, the semi-transmissive thin film transistor substrate and the method of manufacturing the same according to the present invention connect the drain electrode and the storage upper electrode to the pixel electrode through the reflective electrode via the edge of the transmission hole. Accordingly, not only the process can be simplified, but also separate contact holes for connecting the drain electrode and the storage upper electrode to the pixel electrode are not required, thereby increasing the aperture ratio of the transmission region.

In addition, the semi-transmissive thin film transistor substrate and the method of manufacturing the same according to the present invention connect the data link and the data line formed in different layers with the contact electrode of the same metal as the reflective electrode, and interconnect the thin film transistors of the antistatic element. . Accordingly, the process can be simplified to a five mask process.

In addition, the semi-transmissive thin film transistor substrate and the method of manufacturing the same according to the present invention further reduce the contact resistance by forming the reflective electrode and the contact electrode in a double structure and allowing the first reflective metal layer having a low contact resistance to be connected with the transparent conductive layer. You can do it.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (28)

A gate line having a dual structure in which a transparent first conductive layer and an opaque second conductive layer are stacked; A data line intersecting the gate line with a gate insulating layer interposed therebetween to define a pixel region having a transmission region and a reflection region; A thin film transistor connected to the gate line and the data line; A pixel electrode formed in the pixel region with the same transparent conductive material as the first conductive layer; A storage upper electrode overlapping the gate line and the gate insulating layer to form a storage capacitor; A through hole penetrating from the organic layer covering the thin film transistor to the gate insulating film to expose the pixel electrode, expose a drain electrode side of the thin film transistor, and expose a side surface of the storage upper electrode; And a reflective electrode formed in the reflective region and connecting the drain electrode and the storage upper electrode exposed through the edge portion of the transmission hole to the pixel electrode. The method of claim 1, Further comprising a gate pad extending from the first conductive layer of the gate line, The gate pad may be exposed through a first contact hole penetrating through the gate insulating layer. The method of claim 2, And a data pad connected to the data line and formed of a first conductive layer such as the gate pad. The data pad may be exposed through a second contact hole penetrating through the gate insulating layer. The method of claim 3, wherein And the organic layer is removed from a pad region in which the gate pad and the data pad are formed. The method of claim 4, wherein And a passivation layer formed between the thin film transistor and the organic layer, wherein the passivation hole and the inorganic insulator having the first and second contact holes are further provided. The method of claim 5, And a second passivation layer formed between the organic layer and the reflective electrode, wherein the second passivation layer of the inorganic insulator having the transmission hole and the first and second contact holes is further provided. The method of claim 3, wherein A data link connected to the data pad and overlapping an end of the data line; A third contact hole penetrating the data line and the gate insulating layer from the organic layer to expose the data link; And a contact electrode formed of the same metal as the reflective electrode and side-connected with the data line through the third contact hole and surface-connected with the data link. The method of claim 7, wherein The data link is formed in a dual structure such as the gate line, And the third contact hole penetrates to the second conductive layer of the data link. The method of claim 1, A first contact electrode connecting the data link and the data line, and further comprising an antistatic element connected to any one of the data line and the gate line; The antistatic element, A second thin film transistor connected to any one of the data line and the gate line; A third thin film transistor connected in a diode form between the gate electrode and the source electrode of the second thin film transistor; A fourth thin film transistor connected in a diode form between the gate electrode and the drain electrode of the second thin film transistor; A second contact electrode connecting the source electrode and the gate electrode of the third thin film transistor through a fourth contact hole; A third contact electrode connecting the drain electrode of the third or fourth thin film transistor and the gate electrode of the second thin film transistor through a fifth contact hole; A fourth contact electrode connecting the source electrode and the gate electrode of the fourth thin film transistor through a sixth contact hole; The semi-transmissive thin film transistor substrate of claim 2, wherein the gate electrodes of the second to fourth thin film transistors are formed in the double structure, and the second to fourth contact electrodes are formed of the same metal layer as the reflective electrode. The method of claim 9, The fourth to sixth contact holes And a first conductive layer of the gate electrode exposed through the source or drain electrode, the semiconductor pattern, the gate insulating film, and the second conductive layer of the gate electrode. The method of claim 9, The first through fourth contact electrodes are formed in a region to be sealed by a sealing material. The method of claim 9, The reflective electrode and the first to fourth contact electrode is a semi-transmissive thin film transistor substrate, characterized in that formed in a dual structure of AlNd / Mo. The method of claim 1, And the organic film has an embossed surface such that the reflective electrode has an embossed surface. Forming a gate line and a gate electrode having a double structure of a transparent first conductive layer and an opaque second conductive layer using a first mask, and a pixel electrode having only the first conductive layer; Forming a gate insulating film covering the electrodes using a second mask, a semiconductor pattern thereon, and a source / drain pattern including a data line, a source electrode, a drain electrode, and a storage upper electrode overlying the semiconductor pattern; ; Forming a transmission hole exposing the side surface of the pixel electrode, the drain electrode and the side surface of the storage upper electrode in a transmission region overlapping the pixel electrode by using a third mask; Forming an organic layer covering the source / drain pattern except for the through hole using a fourth mask; And forming a reflective electrode in the reflective region adjacent to the transmission region by using a fifth mask to connect the drain electrode and the storage electrode exposed through the transmission hole with the pixel electrode. Method of manufacturing a thin film transistor substrate. The method of claim 14, Forming the through hole is Forming a passivation layer covering the source / drain pattern; The transmission hole is a method of manufacturing a semi-transmissive thin film transistor substrate, characterized in that formed to pass through the protective film. The method of claim 14, Forming a gate pad extending from the first conductive layer of the gate line using the first mask and a data pad having a structure similar to that of the gate pad to be connected to the data line; Forming first and second contact holes using the third mask to expose the gate pad and the data pad, respectively; And removing the organic layer of the pad region in which the gate pad and the data pad are formed by using the fourth mask. The method of claim 16, Using the first mask to form a data link having the dual structure and connected to the data pad and overlapping an end of the data line; Forming a third contact hole penetrating the data line and exposing the data link using the third mask; Etching the organic layer in a region corresponding to the third contact hole by using the fourth mask; And forming a first contact electrode connecting the data line and the data link exposed through the third contact hole by using the fifth mask. The method of claim 17, A second thin film transistor connected to any one of the data line and the gate line, a third thin film transistor diode-connected between a gate electrode and a source electrode of the second thin film transistor, a gate electrode and a drain of the second thin film transistor A method for manufacturing a semi-transmissive thin film transistor substrate, further comprising the step of forming an antistatic element comprising a fourth thin film transistor connected in a diode form between the electrodes. The method of claim 18, Forming the antistatic element is Forming a gate electrode of each of the second to fourth thin film transistors having the dual structure by using the first mask; Forming a semiconductor pattern, a source electrode, and a drain electrode of each of the second to fourth thin film transistors on the gate insulating layer using the second mask; The overlapping portion of the source electrode and the gate electrode of the third thin film transistor, the overlapping portion of the drain electrode of the third or fourth thin film transistor and the gate electrode of the second thin film transistor using the third mask, and the fourth thin film Forming fourth to sixth contact holes formed in each of the overlapping portions of the source electrode and the gate electrode of the transistor; Etching the organic layer in a region corresponding to the fourth to sixth contact holes using the fourth mask; A second contact electrode connecting the source electrode and the gate electrode of the third thin film transistor exposed through the fourth contact hole using the fifth mask, the third or fourth exposed through the fifth contact hole A third contact electrode connecting the drain electrode of the thin film transistor and the gate electrode of the second thin film transistor, a fourth contact electrode connecting the source electrode and the gate electrode of the fourth thin film transistor exposed through the sixth contact hole; Method for manufacturing a semi-transmissive thin film transistor substrate comprising the step of forming. Forming a gate pattern including a gate line and a gate electrode having a double structure of a transparent first conductive layer and an opaque second conductive layer using a first mask, and a pixel electrode having only the first conductive layer; Forming a source / drain pattern including a gate insulating layer covering the gate pattern using a second mask, a semiconductor pattern thereon, and a data line, a source electrode, a drain electrode, and a storage upper electrode overlying the semiconductor pattern; ; Forming an organic layer having a transmission hole in a transmission region overlapping the pixel electrode while covering the source / drain pattern using a third mask; Etching to the gate insulating layer using a fourth mask to expose the pixel electrode, the side surface of the drain electrode, and the side surface of the storage upper electrode; And forming a reflective electrode in the reflective region adjacent to the transmission region by using a fifth mask to connect the drain electrode and the storage electrode exposed through the transmission hole with the pixel electrode. Method of manufacturing a thin film transistor substrate. The method of claim 20, Forming the organic film And forming a passivation layer covering the source / drain pattern. The method of claim 21, Forming the through hole is Forming a second passivation layer covering the organic layer; The transmissive hole is formed to penetrate from the second passivation layer to the gate insulating film. The method of claim 20, Forming a gate pad extending from the first conductive layer of the gate line using the first mask and a data pad having a structure similar to that of the gate pad to be connected to the data line; Removing the organic layer in the pad region in which the gate pad and the data pad are formed using the third mask; And forming first and second contact holes exposing the gate pad and the data pad, respectively, by using the fourth mask. The method of claim 23, wherein Using the first mask to form a data link connected to the data pad in the dual structure and overlapping with an end of the data line; Forming a third contact hole in the organic layer overlapping the data line and the data link by using the third mask; Exposing the data link by extending the third contact hole to the data line and the gate insulating layer using the fourth mask; And forming a first contact electrode to connect the data line and the data link through the third contact hole using the fifth mask. The method according to any one of claims 14 and 20, Forming the gate line, gate electrode, and pixel electrode Stacking a first conductive layer, which is a transparent conductive layer, and a second conductive layer on the substrate; Forming first and second photoresist patterns having different thicknesses on the second conductive layer by a photolithography process using a halftone mask or a diffraction mask; Patterning the first and second conductive layers by an etching process using the first and second photoresist patterns to form a gate line and a gate electrode of the dual structure, and the pixel electrode in which the second conductive layer remains. Steps; Thinning the first photoresist pattern and removing the second photoresist pattern by an ashing process; Removing the second conductive layer on the pixel electrode by an etching process using the ashed first photoresist pattern; And removing the ashed first photoresist pattern. The method of claim 19, The first to fourth contact electrodes are formed in a region to be sealed by a sealing material. The method of claim 19, The reflective electrode and the first to fourth contact electrode is a method of manufacturing a semi-transmissive thin film transistor substrate, characterized in that formed in a double structure of AlNd / Mo. The method according to any one of claims 14 and 20, And the organic film is formed to have an embossed surface such that the reflective electrode has an embossed surface.

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