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KR101020297B1 - Word line driving circuit - Google Patents

Word line driving circuit Download PDF

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KR101020297B1
KR101020297B1 KR1020090047150A KR20090047150A KR101020297B1 KR 101020297 B1 KR101020297 B1 KR 101020297B1 KR 1020090047150 A KR1020090047150 A KR 1020090047150A KR 20090047150 A KR20090047150 A KR 20090047150A KR 101020297 B1 KR101020297 B1 KR 101020297B1
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signal
word line
response
test mode
bank selection
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KR20100128642A (en
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황선영
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주식회사 하이닉스반도체
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C8/00Arrangements for selecting an address in a digital store
    • G11C8/08Word line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, for word lines
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/02Detection or location of defective auxiliary circuits, e.g. defective refresh counters
    • G11C29/022Detection or location of defective auxiliary circuits, e.g. defective refresh counters in I/O circuitry
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/02Detection or location of defective auxiliary circuits, e.g. defective refresh counters
    • G11C29/025Detection or location of defective auxiliary circuits, e.g. defective refresh counters in signal lines
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/14Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C8/00Arrangements for selecting an address in a digital store
    • G11C8/12Group selection circuits, e.g. for memory block selection, chip selection, array selection
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C8/00Arrangements for selecting an address in a digital store
    • G11C8/18Address timing or clocking circuits; Address control signal generation or management, e.g. for row address strobe [RAS] or column address strobe [CAS] signals

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dram (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)

Abstract

워드라인 구동회로는 테스트모드신호에 응답하여 뱅크선택신호를 소정 지연구간만큼 지연시켜 로우경로인에이블신호로 전달하는 선택지연부; 상기 로우경로인에이블신호에 응답하여 구동되어 워드라인구동신호를 생성하는 구동신호 생성부; 및 상기 워드라인구동신호를 공급받아, 메인워드라인신호에 응답하여 서브워드라인신호를 구동하는 서브워드라인신호 구동부를 포함한다. The word line driver circuit may include: a selection delay unit delaying the bank selection signal by a predetermined delay period in response to the test mode signal and transferring the bank selection signal as a low path enable signal; A driving signal generator configured to be driven in response to the low path enable signal to generate a word line driving signal; And a subword line signal driver configured to receive the word line driving signal and drive a subword line signal in response to a main word line signal.

워드라인 구동회로, 서브워드라인 Word line driver circuit, sub word line

Description

워드라인 구동회로{WORDLINE DRIVING CIRCUIT}Word Line Driving Circuit {WORDLINE DRIVING CIRCUIT}

본 발명은 반도체 메모리 장치에 관한 것으로, 더욱 구체적으로는 누설전류를 감소시킬 수 있도록 한 워드라인 구동회로에 관한 것이다.The present invention relates to a semiconductor memory device, and more particularly, to a word line driver circuit capable of reducing leakage current.

도 1은 종래기술에 따른 서브워드라인 구동회로의 회로도이다.1 is a circuit diagram of a subword line driving circuit according to the prior art.

도 1에 도시된 바와 같이, 종래기술의 서브워드라인 구동회로는 메인워드라인신호(MWLb)에 응답하여 서브워드라인신호(SWL)를 워드라인구동신호(FX)로 풀업구동하는 PMOS 트랜지스터(P1)와, 메인워드라인신호(MWLb)에 응답하여 서브워드라인신호(SWL)를 접지전압(Vss)으로 풀다운 구동하는 NMOS 트랜지스터(N1) 및 워드라인구동신호의 반전신호(FxB)에 응답하여 서브워드라인신호(SWL)를 접지전압(Vss)으로 풀다운 구동하는 NMOS 트랜지스터(N2)로 구성된다.As shown in FIG. 1, the conventional subword line driving circuit includes a PMOS transistor P1 that pulls up the subword line signal SWL to the word line driving signal FX in response to the main word line signal MWLb. And the NMOS transistor N1 which pulls down the subword line signal SWL to the ground voltage Vss in response to the main word line signal MWLb, and the inverted signal FxB of the word line driving signal. An NMOS transistor N2 that pulls down the word line signal SWL to the ground voltage Vss.

이와 같이 구성된 서브워드라인 구동회로는 선택된 워드라인구동신호(FX)가 고전압(VPP)으로 구동되는 상태에서 메인워드라인신호(MWLb)가 선택되어 로우레벨로 인에이블되는 경우 서브워드라인신호(SWL)를 고전압(VPP)레벨로 구동한다.The subword line driving circuit configured as described above has the subword line signal SWL when the main word line signal MWLb is selected and enabled at a low level while the selected word line driving signal FX is driven with the high voltage VPP. ) To the high voltage (VPP) level.

그런데, 종래기술의 서브워드라인 구동회로에서 메인워드라인신호(MWLb)가 선택되지 않은 상태에서 워드라인구동신호(FX)가 선택될 때 메인워드라인신호(MWLb) 및 워드라인구동신호(FX)는 모두 고전압(VPP)레벨로 구동된다. 이때, 도 2에 도시된 바와 같이, 워드라인구동신호(FX)가 메인워드라인신호(MWLb) 보다 빨리 고전압(VPP)레벨로 상승하는 경우 워드라인구동신호(FX)와 메인워드라인신호(MWLb)의 레벨차가 PMOS 트랜지스터(P1)의 문턱전압 이상인 경우가 발생할 수 있다. 이와 같은 경우 NMOS(N1)와 PMOS 트랜지스터(P1)이 동시에 턴온되어 워드라인구동신호(FX)에서 접지전압(Vss)으로 직접적인 누설전류(direct current)가 발생되는 문제가 있다.However, the main word line signal MWLb and the word line drive signal FX when the word line drive signal FX is selected in a state where the main word line signal MWLb is not selected in the conventional subword line driving circuit. Are all driven to a high voltage (VPP) level. At this time, as shown in FIG. 2, when the word line driving signal FX rises to the high voltage VPP level earlier than the main word line signal MWLb, the word line driving signal FX and the main word line signal MWLb are increased. ) May occur when the level difference is greater than or equal to the threshold voltage of the PMOS transistor P1. In this case, the NMOS N1 and the PMOS transistor P1 are turned on at the same time, so that a direct leakage current is generated from the word line driving signal FX to the ground voltage Vss.

본 발명은 워드라인구동신호의 구동구간을 늦출 수 있는 테스트모드를 제공하여 누설전류를 감소시킬 수 있도록 한 워드라인 구동회로를 개시한다.The present invention discloses a word line driving circuit which provides a test mode that can slow down the driving period of a word line driving signal to reduce leakage current.

이를 위해 본 발명은 테스트모드신호에 응답하여 뱅크선택신호를 소정 지연구간만큼 지연시켜 로우경로인에이블신호로 전달하는 선택지연부; 상기 로우경로인에이블신호에 응답하여 구동되어 워드라인구동신호를 생성하는 구동신호 생성부; 및 상기 워드라인구동신호를 공급받아, 메인워드라인신호에 응답하여 서브워드라인신호를 구동하는 서브워드라인신호 구동부를 포함하는 워드라인 구동회로를 제공한다.To this end, the present invention includes a selection delay unit for delaying the bank selection signal by a predetermined delay period in response to the test mode signal and transmitting the delayed bank selection signal as a low path enable signal; A driving signal generator configured to be driven in response to the low path enable signal to generate a word line driving signal; And a sub word line signal driver configured to receive the word line drive signal and drive a sub word line signal in response to a main word line signal.

또한, 본 발명은 테스트모드신호에 응답하여 뱅크선택신호를 소정 지연구간만큼 지연시켜 로우경로인에이블신호로 전달하는 선택지연부; 상기 로우경로인에이블신호에 응답하여 구동되어 워드라인구동신호를 생성하는 구동신호 생성부; 상기 테스트모드신호 및 인에이블신호에 응답하여 외부전압 또는 내부전압을 선택적으로 내부전원으로 전달하는 전원선택부; 상기 뱅크선택신호에 응답하여 제1 메인워드라인신호를 생성하는 메인워드라인신호 구동부; 상기 내부전원을 공급받아, 상기 제1 메인워드라인신호를 버퍼링하여 제2 메인워드라인신호를 생성하는 버퍼부; 및 상기 워드라인구동신호를 공급받아, 제2 메인워드라인신호에 응답하여 서브워드라인신호를 구동하는 서브워드라인신호 구동부를 포함하는 워드라인 구동회로를 제공한다.In addition, the present invention includes a selection delay unit for delaying the bank selection signal by a predetermined delay period in response to the test mode signal and transmitting the delayed bank selection signal as a low path enable signal; A driving signal generator configured to be driven in response to the low path enable signal to generate a word line driving signal; A power selector configured to selectively transfer an external voltage or an internal voltage to an internal power source in response to the test mode signal and the enable signal; A main word line signal driver to generate a first main word line signal in response to the bank selection signal; A buffer unit configured to receive the internal power and buffer the first main word line signal to generate a second main word line signal; And a sub word line signal driver configured to receive the word line drive signal and drive a sub word line signal in response to a second main word line signal.

이하, 실시예를 통하여 본 발명을 더욱 상세히 설명하기로 한다. 이들 실시예는 단지 본 발명을 예시하기 위한 것이며, 본 발명의 권리 보호 범위가 이들 실시예에 의해 제한되는 것은 아니다. Hereinafter, the present invention will be described in more detail with reference to Examples. These embodiments are only for illustrating the present invention, and the scope of rights of the present invention is not limited by these embodiments.

도 3은 본 발명의 일 실시예에 따른 워드라인 구동회로의 구성을 도시한 블럭도이다.3 is a block diagram illustrating a configuration of a word line driver circuit according to an exemplary embodiment of the present invention.

도 3에 도시된 바와 같이, 본 실시예에 따른 워드라인 구동회로는 선택지연부(1), 구동신호 생성부(2), 전원선택부(3), 메인워드라인신호 구동부(4), 버퍼부(5) 및 서브워드라인신호 구동부(6)로 구성된다.As shown in FIG. 3, the word line driver circuit according to the present embodiment includes a selection delay unit 1, a drive signal generator 2, a power selector 3, a main word line signal driver 4, and a buffer. And a sub word line signal driver 6.

선택지연부(1)는, 도 4에 도시된 바와 같이, 테스트모드신호(TMOFFB)에 응답하여 뱅크선택신호(BS)를 로우경로인에이블신호(XDECEN)로 전달하는 제1 전달게이트(T10)와, 뱅크선택신호(BS)를 소정 지연구간만큼 지연시키는 지연부(10)와, 테스트모드신호(TMOFFB)에 응답하여 지연부(10)의 출력신호를 로우경로인에이블신호(XDECEN)로 전달하는 제2 전달게이트(T11)로 구성된다. 여기서, 테스트모드신호(TMOFFB)는 메인워드라인신호를 고전압(VPP) 또는 외부전압(VDD)으로 선택적으로 구동하기 위해 로우레벨로 인가되는 신호이고, 뱅크선택신호(BS)는 워드라인 구동회로가 포함된 뱅크가 선택되는 경우 하이레벨로 인에이블되는 신호이다.As shown in FIG. 4, the selection delay unit 1 transmits the bank selection signal BS as the low path enable signal XDECEN in response to the test mode signal TMOFFB. The delay unit 10 delays the bank selection signal BS by a predetermined delay period, and the output signal of the delay unit 10 is transmitted as the low path enable signal XDECEN in response to the test mode signal TMOFFB. It is composed of a second transfer gate (T11). Here, the test mode signal TMOFFB is a signal applied at a low level to selectively drive the main word line signal to the high voltage VPP or the external voltage VDD, and the bank selection signal BS is a word line driving circuit. This signal is enabled at a high level when the included bank is selected.

이와 같이 구성된 선택지연부(1)는 테스트모드신호(TMOFFB)가 하이레벨로 인가되는 경우에는 뱅크선택신호(BS)를 로우경로인에이블신호(XDECEN)로 전달하고, 테스트모드신호(TMOFFB)가 로우레벨로 인가되는 경우에는 뱅크선택신호(BS)를 지연부(10)의 지연구간만큼 지연시킨 후 로우경로인에이블신호(XDECEN)로 전달한다.When the test mode signal TMOFFB is applied at the high level, the selection delay unit 1 configured as described above transmits the bank selection signal BS as the low path enable signal XDECEN, and the test mode signal TMOFFB is When applied at the low level, the bank selection signal BS is delayed by the delay period of the delay unit 10 and then transferred as the low path enable signal XDECEN.

구동신호 생성부(2)는 로우경로인에이블신호(XDECEN)가 하이레벨로 인가되는 경우 서브워드라인신호(SWL)를 구동하기 위한 워드라인구동신호(FxN)를 선택하여 고전압(VPP) 레벨로 구동한다. 구동신호 생성부(2)는 디코더를 포함하는 일반적인 워드라인구동신호 생성회로로 구현할 수 있다.When the low path enable signal XDECEN is applied at a high level, the driving signal generator 2 selects a word line driving signal FxN for driving the subword line signal SWL to a high voltage VPP level. Drive. The driving signal generator 2 may be implemented as a general word line driving signal generating circuit including a decoder.

전원선택부(3)는, 도 5에 도시된 바와 같이, 테스트모드신호(TMOFFB) 및 인에이블신호(VPPCEN)를 입력받아 부정논리합 연산을 수행하여 턴온신호(ON)를 생성하는 논리부(30)와, 턴온신호(ON)에 응답하여 턴온되어 고전압(VPP)을 내부전원(VPPC)으로 공급하는 스위치소자로 동작하는 PMOS 트랜지스터(P30)와, 외부전압(VDD)과 내부전원(VPPC) 사이에 연결된 다이오드소자로 동작하는 NMOS 트랜지스터(N30)로 구성된다. 여기서, 인에이블신호(VPPCEN)는 제1 메인워드라인신호(MWLb1)가 로우레벨로 구동되는 경우 하이레벨로 인에이블되는 신호이다.As shown in FIG. 5, the power selector 3 receives a test mode signal TMOFFB and an enable signal VPPCEN, and performs a logic logic operation to generate a turn-on signal ON. ), Between the PMOS transistor P30, which is turned on in response to the turn-on signal ON, and operates as a switch element for supplying the high voltage VPP to the internal power supply VPPC, between the external voltage VDD and the internal power supply VPPC. An NMOS transistor N30, which operates as a diode element connected to the transistor, is configured. The enable signal VPPCEN is a signal that is enabled at a high level when the first main word line signal MWLb1 is driven at a low level.

메인워드라인신호 구동부(4)는 하이레벨의 뱅크선택신호(BS)가 인가되는 경우 로우레벨로 인에이블된 제1 메인워드라인신호(MWLb1)를 생성한다. 메인워드라인신호 구동부(4)는 뱅크선택신호(BS)에 의해 구동되어 로우어드레스를 디코딩하여 제1 메인워드라인신호(MWLb1)를 선택적으로 인에이블시키는 디코더(미도시)로 용이하게 구현할 수 있다. The main word line signal driver 4 generates the first main word line signal MWLb1 enabled at a low level when the bank selection signal BS having a high level is applied. The main word line signal driver 4 may be easily implemented as a decoder (not shown) that is driven by the bank selection signal BS to decode the low address to selectively enable the first main word line signal MWLb1. .

버퍼부(5)는, 도 6에 도시된 바와 같이, 내부전원(VPPC)과 노드(nd50) 사이에 연결되어 제1 메인워드라인신호(MWLb1)에 응답하여 노드(nd50)를 풀업구동하는 풀업소자로 동작하는 PMOS 트랜지스터(P50)와, 노드(nd50)와 접지전압(Vss) 사이에 연결되어 제1 메인워드라인신호(MWLb1)에 응답하여 노드(nd50)를 풀다운구동하는 풀다운소자로 동작하는 NMOS 트랜지스터(N50)와, 노드(nd50)의 신호를 반전시켜 제2 메인워드라인신호(MWLb2)를 생성하는 인버터(IV50)로 구성된다.As shown in FIG. 6, the buffer unit 5 is connected between the internal power supply VPPC and the node nd50 to pull up and drive the node nd50 in response to the first main word line signal MWLb1. PMOS transistor P50, which operates as an element, is connected between node nd50 and ground voltage Vss, and operates as a pull-down element that pulls down node nd50 in response to the first main word line signal MWLb1. NMOS transistor N50 and inverter IV50 for inverting the signal of node nd50 to generate second main word line signal MWLb2.

서브워드라인신호 구동부(6)는, 도 7에 도시된 바와 같이, 워드라인구동신호(FxN)과 서브워드라인신호(SWL)가 출력되는 노드(nd60) 사이에 연결되어 제2 메인워드라인신호(MWLb2)에 응답하여 노드(nd60)를 풀업구동하는 풀업소자로 동작하는 PMOS 트랜지스터(P60)와, 노드(nd60)와 접지전압(Vss) 사이에 연결되어 제2 메인워드라인신호(MWLb2)에 응답하여 노드(nd60)를 풀다운구동하는 풀다운소자로 동작하는 NMOS 트랜지스터(N60)와, 노드(nd60)와 접지전압(Vss) 사이에 연결되어 워드라인구동신호의 반전신호(FxNB)에 응답하여 노드(nd60)를 풀다운구동하는 풀다운소자로 동작하는 NMOS 트랜지스터(N61)로 구성된다.As illustrated in FIG. 7, the subword line signal driver 6 is connected between the word line driving signal FxN and the node nd60 to which the subword line signal SWL is output, thereby providing a second main word line signal. The PMOS transistor P60, which operates as a pull-up device for pulling up the node nd60 in response to the MWLb2, is connected between the node nd60 and the ground voltage Vss to the second main word line signal MWbb2. NMOS transistor N60, which operates as a pull-down device that pulls-down node nd60 in response, is connected between node nd60 and ground voltage Vss and responds to the inversion signal FxNB of the word line driving signal. An NMOS transistor N61 that acts as a pull-down element for driving down nd60.

이와 같이 구성된 워드라인 구동회로의 동작을 설명하면 다음과 같다.The operation of the word line driver circuit configured as described above is as follows.

우선, 테스트모드신호(TMOFFB)가 로우레벨로 인가되고, 뱅크선택신호(BS)가 하이레벨로 인가되어 제1 메인워드라인신호(MWLb1)가 로우레벨로 인에이블되는 경우 인에이블신호(VPPCEN)는 하이레벨로 인에이블된다. First, when the test mode signal TMOFFB is applied at the low level and the bank selection signal BS is applied at the high level, the enable signal VPPCEN is enabled when the first main word line signal MWLb1 is enabled at the low level. Is enabled at a high level.

다음으로, 선택지연부(1)는 뱅크선택신호(BS)를 지연부(10)의 지연구간만큼 지연시켜 로우경로인에이블신호(XDECEN)를 생성하고, 구동신호 생성부(2)는 로우경로인에이블신호(XDECEN)가 하이레벨로 인가되는 구간에서 워드라인구동신호(FxN)를 고전압(VPP) 레벨로 구동한다. 워드라인구동신호(FxN)는 종래에 비해 지연부(10)의 지연구간만큼 늦게 구동이 개시된다.Next, the selection delay unit 1 generates the low path enable signal XDECEN by delaying the bank selection signal BS by the delay period of the delay unit 10, and the driving signal generation unit 2 generates the low path. The word line driving signal FxN is driven to the high voltage VPP level in the period where the enable signal XDECEN is applied to the high level. The word line drive signal FxN starts to be driven as late as the delay period of the delay unit 10 as compared with the prior art.

아울러, 전원선택부(3)는 로우레벨의 테스트모드신호(TMOFFB)와 하이레벨의 인에이블신호(VPPCEN)에 의해 생성된로우레벨의 턴온신호(ON)에 의해 고전압(VPP)을 내부전원(VPPC)으로 구동한다. 따라서, 버퍼부(5)는 내부전원(VPPC)을 공급받아 제1 메인워드라인신호(MWLb1)를 버퍼링하고, 제2 메인워드라인신호(MWLb2)를 생성한다. In addition, the power selector 3 receives the high voltage VPP by the low level turn-on signal ON generated by the low level test mode signal TMOFFB and the high level enable signal VPPCEN. VPPC). Accordingly, the buffer unit 5 receives the internal power supply VPPC to buffer the first main word line signal MWLb1 and generates the second main word line signal MWLb2.

다음으로, 서브워드라인신호 구동부(6)는 워드라인구동신호(FXN)를 공급받아, 제2 메인워드라인신호(MWLb2)에 응답하여 서브워드라인신호(SWL)를 구동한다.Next, the subword line signal driver 6 receives the word line drive signal FXN and drives the subword line signal SWL in response to the second main word line signal MWLb2.

이상 설명한 워드라인 구동회로의 특징은 제2 메인워드라인신호(MWLb2)를 고전압(VPP) 레벨을 갖는 내부전원(VPPC)으로 구동할 때 워드라인구동신호(FxN)의 구동 개시구간을 지연부(10)의 지연구간만큼 늦추는데 있다. 이와 같은 특징에 의해 제2 메인워드라인신호(MWLb2)가 선택되지 않은 상태에서 워드라인구동신호(FxN)가 선택되어, 제2 메인워드라인신호(MWLb2) 및 제2 메인워드라인신호(MWLb2)가 모두 고전압(VPP)레벨로 구동될 때 워드라인구동신호(FX)와 메인워드라인신호(MWLb)의 레벨차가 PMOS 트랜지스터(P60)의 문턱전압 이상인 경우가 발생되는 것을 방지할 수 있다.A characteristic of the word line driver circuit described above is a delay unit which delays the driving start section of the word line driver signal FxN when the second main word line signal MWLb2 is driven by an internal power supply VPPC having a high voltage VPP level. It is delayed as much as the delay section of 10). As a result, the word line driving signal FxN is selected while the second main word line signal MWLb2 is not selected, and thus the second main word line signal MWLb2 and the second main word line signal MWLb2 are selected. When both are driven to the high voltage VPP level, it is possible to prevent a case where the level difference between the word line driving signal FX and the main word line signal MWLb is greater than or equal to the threshold voltage of the PMOS transistor P60.

도 1은 종래기술에 따른 서브워드라인 구동회로의 회로도이다.1 is a circuit diagram of a subword line driving circuit according to the prior art.

도 2는 도 1에 도시된 서브워드라인 구동회로의 동작을 설명하기 위한 도면이다. FIG. 2 is a diagram for describing an operation of a subword line driver circuit shown in FIG. 1.

도 3은 본 발명의 일 실시예에 따른 워드라인 구동회로의 구성을 도시한 블럭도이다.3 is a block diagram illustrating a configuration of a word line driver circuit according to an exemplary embodiment of the present invention.

도 4는 도 3에 도시된 워드라인 구동회로에 포함된 선택지연부의 회로도이다.FIG. 4 is a circuit diagram of a selection delay unit included in the word line driver circuit shown in FIG. 3.

도 5는 도 3에 도시된 워드라인 구동회로에 포함된 전원선택부의 회로도이다.FIG. 5 is a circuit diagram of a power selector included in the word line driver circuit shown in FIG. 3.

도 6은 도 3에 도시된 워드라인 구동회로에 포함된 버퍼부의 회로도이다.6 is a circuit diagram of a buffer unit included in the word line driver circuit shown in FIG. 3.

도 7은 도 3에 도시된 워드라인 구동회로에 포함된 서브워드라인신호 구동부의 회로도이다.FIG. 7 is a circuit diagram of a subword line signal driver included in the word line driver circuit shown in FIG. 3.

Claims (10)

테스트모드신호에 응답하여 뱅크선택신호를 소정 지연구간만큼 지연시켜 로우경로인에이블신호로 전달하는 선택지연부;A selection delay unit delaying the bank selection signal by a predetermined delay period in response to the test mode signal and transferring the bank selection signal as a low path enable signal; 상기 로우경로인에이블신호에 응답하여 구동되어 워드라인구동신호를 생성하는 구동신호 생성부; 및A driving signal generator configured to be driven in response to the low path enable signal to generate a word line driving signal; And 상기 워드라인구동신호를 공급받아, 메인워드라인신호에 응답하여 서브워드라인신호를 구동하는 서브워드라인신호 구동부를 포함하는 워드라인 구동회로.And a sub word line signal driver configured to receive the word line drive signal and drive a sub word line signal in response to a main word line signal. 제 1 항에 있어서, 상기 선택지연부는The method of claim 1, wherein the selection delay unit 상기 테스트모드신호에 응답하여 상기 뱅크선택신호를 상기 로우경로인에이블신호로 전달하는 제1 전달게이트; A first transfer gate configured to transfer the bank selection signal as the low path enable signal in response to the test mode signal; 상기 뱅크선택신호를 상기 지연구간만큼 지연시키는 지연부; 및A delay unit delaying the bank selection signal by the delay period; And 상기 테스트모드신호에 응답하여 상기 지연부의 출력신호를 상기 로우경로인에이블신호로 전달하는 제2 전달게이트를 포함하는 워드라인 구동회로.And a second transfer gate configured to transfer the output signal of the delay unit as the low path enable signal in response to the test mode signal. 제 1 항에 있어서, 상기 구동신호 생성부는 상기 로우경로인에이블신호가 인에이블되는 경우 워드라인구동신호를 선택하여 구동하는 워드라인 구동회로.The word line driver circuit of claim 1, wherein the driving signal generation unit selects and drives a word line driving signal when the row path enable signal is enabled. 테스트모드신호에 응답하여 뱅크선택신호를 소정 지연구간만큼 지연시켜 로우경로인에이블신호로 전달하는 선택지연부;A selection delay unit delaying the bank selection signal by a predetermined delay period in response to the test mode signal and transferring the bank selection signal as a low path enable signal; 상기 로우경로인에이블신호에 응답하여 구동되어 워드라인구동신호를 생성하는 구동신호 생성부;A driving signal generator configured to be driven in response to the low path enable signal to generate a word line driving signal; 상기 테스트모드신호 및 인에이블신호에 응답하여 외부전압 또는 내부전압을 선택적으로 내부전원으로 전달하는 전원선택부;A power selector configured to selectively transfer an external voltage or an internal voltage to an internal power source in response to the test mode signal and the enable signal; 상기 뱅크선택신호에 응답하여 제1 메인워드라인신호를 생성하는 메인워드라인신호 구동부;A main word line signal driver to generate a first main word line signal in response to the bank selection signal; 상기 내부전원을 공급받아, 상기 제1 메인워드라인신호를 버퍼링하여 제2 메인워드라인신호를 생성하는 버퍼부; 및A buffer unit configured to receive the internal power and buffer the first main word line signal to generate a second main word line signal; And 상기 워드라인구동신호를 공급받아, 제2 메인워드라인신호에 응답하여 서브워드라인신호를 구동하는 서브워드라인신호 구동부를 포함하는 워드라인 구동회로.And a sub word line signal driver configured to receive the word line drive signal and drive a sub word line signal in response to a second main word line signal. 제 4 항에 있어서, 상기 선택지연부는The method of claim 4, wherein the selection delay unit 상기 테스트모드신호에 응답하여 상기 뱅크선택신호를 상기 로우경로인에이블신호로 전달하는 제1 전달게이트; A first transfer gate configured to transfer the bank selection signal as the low path enable signal in response to the test mode signal; 상기 뱅크선택신호를 상기 지연구간만큼 지연시키는 지연부; 및A delay unit delaying the bank selection signal by the delay period; And 상기 테스트모드신호에 응답하여 상기 지연부의 출력신호를 상기 로우경로인에이블신호로 전달하는 제2 전달게이트를 포함하는 워드라인 구동회로.And a second transfer gate configured to transfer the output signal of the delay unit as the low path enable signal in response to the test mode signal. 제 4 항에 있어서, 상기 구동신호 생성부는 상기 로우경로인에이블신호가 인에이블되는 경우 워드라인구동신호를 선택하여 구동하는 워드라인 구동회로.The word line driving circuit of claim 4, wherein the driving signal generator selects and drives a word line driving signal when the row path enable signal is enabled. 제 4 항에 있어서, 상기 전원선택부는 The method of claim 4, wherein the power selector 상기 테스트모드신호 및 인에이블신호를 입력받아 턴온신호를 생성하는 턴온신호 생성부;A turn-on signal generator for receiving the test mode signal and the enable signal and generating a turn-on signal; 상기 내부전압과 상기 내부전원 사이에 연결되어 상기 턴온신호에 응답하여 턴온되는 스위치소자; 및A switch device connected between the internal voltage and the internal power source and turned on in response to the turn-on signal; And 상기 외부전압과 상기 내부전원 사이에 연결된 다이오드소자를 포함하는 워드라인 구동회로.And a diode device connected between the external voltage and the internal power supply. 제 7 항에 있어서, 상기 턴온신호 생성부는 상기 테스트모드신호 및 인에이블신호를 입력받아 부정논리합 연산을 수행하는 워드라인 구동회로.The word line driver circuit of claim 7, wherein the turn-on signal generator receives the test mode signal and the enable signal and performs a negative logic sum operation. 제 4 항에 있어서, 상기 내부전압은 상기 외부전압보다 높은 레벨로 형성되는 워드라인 구동회로.The word line driver circuit of claim 4, wherein the internal voltage is formed at a level higher than the external voltage. 제 4 항에 있어서, 상기 버퍼부는The method of claim 4, wherein the buffer unit 상기 내부전원과 내부노드 사이에 연결되어, 상기 제1 메인워드라인신호에 응답하여 상기 내부노드를 풀업구동하는 풀업소자; 및A pull-up element connected between the internal power source and the internal node to pull up the internal node in response to the first main word line signal; And 상기 내부노드와 접지전압 사이에 연결되어, 상기 제1 메인워드라인신호에 응답하여 상기 내부노드를 풀다운구동하는 풀다운소자를 포함하는 워드라인 구동회로.And a pull-down element connected between the internal node and a ground voltage to pull down the internal node in response to the first main word line signal.
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