KR100967709B1 - 실리콘 산화물 증착 도금강판 및 그 제조방법 - Google Patents
실리콘 산화물 증착 도금강판 및 그 제조방법 Download PDFInfo
- Publication number
- KR100967709B1 KR100967709B1 KR1020020083000A KR20020083000A KR100967709B1 KR 100967709 B1 KR100967709 B1 KR 100967709B1 KR 1020020083000 A KR1020020083000 A KR 1020020083000A KR 20020083000 A KR20020083000 A KR 20020083000A KR 100967709 B1 KR100967709 B1 KR 100967709B1
- Authority
- KR
- South Korea
- Prior art keywords
- steel sheet
- silicon oxide
- plated steel
- manufacturing
- corrosion resistance
- Prior art date
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910052814 silicon oxide Inorganic materials 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 30
- 239000010959 steel Substances 0.000 claims abstract description 30
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 17
- 239000001301 oxygen Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 15
- 239000000203 mixture Substances 0.000 claims abstract description 8
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 8
- 239000010703 silicon Substances 0.000 claims abstract description 8
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical group [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000001704 evaporation Methods 0.000 claims abstract description 7
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 5
- 230000008569 process Effects 0.000 claims description 6
- -1 Plated Steel Sheet Chemical compound 0.000 abstract description 2
- 238000005260 corrosion Methods 0.000 description 19
- 230000007797 corrosion Effects 0.000 description 19
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 17
- 238000011282 treatment Methods 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 13
- 238000000151 deposition Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 10
- 238000000576 coating method Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 229910001335 Galvanized steel Inorganic materials 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 239000008397 galvanized steel Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- JOPOVCBBYLSVDA-UHFFFAOYSA-N chromium(6+) Chemical compound [Cr+6] JOPOVCBBYLSVDA-UHFFFAOYSA-N 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
구분 | 증착 두께 (nm) |
산소농도 (at. %) |
증착 온도 (℃) |
내식성1)
(hours) |
가공성2) | 용접성3) |
실시예 1 | 10 | 11 | 240 | 50 | ◎ | ◎ |
실시예 2 | 80 | 25 | 100 | 80 | ◎ | ◎ |
실시예 3 | 150 | 14 | 115 | 240 | ◎ | ◎ |
실시예 4 | 200 | 20 | 45 | 520 | ◎ | ◎ |
실시예 5 | 350 | 45 | 295 | 650 | ◎ | ◎ |
실시예 6 | 500 | 32 | 80 | 980 | ◎ | ◎ |
실시예 7 | 680 | 48 | 170 | 1,200 | ◎ | ◎ |
실시예 8 | 870 | 27 | 280 | 1,450 | ◎ | ○ |
실시예 9 | 950 | 12 | 265 | 1,550 | ○ | ○ |
비교예 1 | 7 | 25 | 135 | 35 | ◎ | ◎ |
비교예 2 | 350 | 52 | 75 | 650 | ○ | △ |
비교예 3 | 520 | 74 | 150 | 1,020 | X | X |
비교예 4 | 550 | 40 | 325 | 35 | X | ○ |
비교예 5 | 750 | 25 | 360 | 35 | X | ○ |
비교예 6 | 1,100 | 34 | 250 | >1,800 | ○ | △ |
비교예 7 | 1,730 | 28 | 155 | >1,800 | X | X |
비교예 8 | 크로메이트 | - | - | 50 | ◎ | ◎ |
비교예 9 | 무처리 | - | - | 30 | - | ◎ |
Claims (4)
- 50 at.% 이하의 산소농도를 가지는 SiOx(x=0∼1)의 조성의 실리콘 산화물 피막을 포함하며, 상기 실리콘 산화물 피막의 두께는 10 nm 내지 1,000 nm 인 도금강판.
- 삭제
- 실리콘을 증발시키면서 분위기 중의 산소 분압을 제어함으로써 50 at.% 이하의 산소농도를 가지는 SiOx(x=0∼1)의 조성의 실리콘 산화물이 진공증착되어 10 nm 내지 1,000 nm 두께의 피막을 형성하는 공정을 포함하는, 도금강판의 제조방법.
- 제3항에 있어서, 상기 진공증착 공정에서 강판의 온도를 300℃ 이하로 조절하는, 도금강판의 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020083000A KR100967709B1 (ko) | 2002-12-24 | 2002-12-24 | 실리콘 산화물 증착 도금강판 및 그 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020083000A KR100967709B1 (ko) | 2002-12-24 | 2002-12-24 | 실리콘 산화물 증착 도금강판 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040056507A KR20040056507A (ko) | 2004-07-01 |
KR100967709B1 true KR100967709B1 (ko) | 2010-07-07 |
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KR1020020083000A KR100967709B1 (ko) | 2002-12-24 | 2002-12-24 | 실리콘 산화물 증착 도금강판 및 그 제조방법 |
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KR (1) | KR100967709B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023211245A1 (ko) * | 2022-04-28 | 2023-11-02 | 부산대학교 산학협력단 | 실리콘이 코팅된 산화방지용 철, 실리콘이 코팅된 산화방지용 니켈 및 이들의 제조방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014207447A1 (de) * | 2014-04-17 | 2015-10-22 | Magna International Inc. | Beschichtetes Stahlbauteil, Verfahren zur Herstellung des Stahlbauteils und Herstellungsanlage |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06158277A (ja) * | 1992-11-20 | 1994-06-07 | Nisshin Steel Co Ltd | 絶縁性および耐高温酸化性に優れた酸化Si被覆鉄材料 |
US5830579A (en) | 1994-01-07 | 1998-11-03 | Societe Anonyme De Traitment Des Metaux Et Alliages Company (Satma) | Strip based on coated aluminum, which is resistant to corrosion and is deformable |
JP2000192237A (ja) | 1998-12-25 | 2000-07-11 | Teijin Ltd | 高透明ガスバリア性フィルムの製造方法 |
KR20020051285A (ko) * | 2000-12-22 | 2002-06-28 | 신현준 | 실리콘 진공증착에 의한 내식성이 우수한 도금강판의제조방법 |
-
2002
- 2002-12-24 KR KR1020020083000A patent/KR100967709B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06158277A (ja) * | 1992-11-20 | 1994-06-07 | Nisshin Steel Co Ltd | 絶縁性および耐高温酸化性に優れた酸化Si被覆鉄材料 |
US5830579A (en) | 1994-01-07 | 1998-11-03 | Societe Anonyme De Traitment Des Metaux Et Alliages Company (Satma) | Strip based on coated aluminum, which is resistant to corrosion and is deformable |
JP2000192237A (ja) | 1998-12-25 | 2000-07-11 | Teijin Ltd | 高透明ガスバリア性フィルムの製造方法 |
KR20020051285A (ko) * | 2000-12-22 | 2002-06-28 | 신현준 | 실리콘 진공증착에 의한 내식성이 우수한 도금강판의제조방법 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023211245A1 (ko) * | 2022-04-28 | 2023-11-02 | 부산대학교 산학협력단 | 실리콘이 코팅된 산화방지용 철, 실리콘이 코팅된 산화방지용 니켈 및 이들의 제조방법 |
Also Published As
Publication number | Publication date |
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KR20040056507A (ko) | 2004-07-01 |
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