KR100907134B1 - Deposition Device for Organic EL - Google Patents

Abstract

The present invention is evaporated at the inlet of the crucible due to the temperature gradient caused by the temperature drop caused by the crucible provided inside the heating block of the chamber and the body of the heating block in the deposition apparatus for organic electroluminescence (EL). In order to prevent the organic material from solidifying, the crucible is spaced apart from the heating block body in the chamber as far as possible, and the heater is provided to the upper side of the crucible. Therefore, by minimizing the temperature gradient of the crucible to prevent the solidification of the organic material by the temperature gradient to facilitate the organic film deposition process.

Description

Evaporation device for Organic electro-luminescence

1 is a cross-sectional view showing a heating block portion of a chamber according to the prior art.

2 is a cross-sectional perspective view of the heating block of FIG. 1.

3A-3D are color contour maps showing temperature gradients of heating blocks formed according to the prior art.

4A is a partial cross-sectional view of a heating block mounted with an insert according to another prior art.

4B and 4C are color contour maps showing temperature gradients of the heating block and insert of FIG. 4A.

5A is a partial sectional view of a heating block formed according to the first embodiment of the present invention;

5B and 5C are color contour maps showing temperature gradients of the heating block and crucible of FIG. 5A.

6A is a cross sectional view of a heating block formed in accordance with a second embodiment of the present invention;

6B is a color contour map showing a temperature gradient of a heating block formed in accordance with a second embodiment of the present invention.

7A is a cross sectional view of a heating block formed in accordance with a third embodiment of the present invention;                 

7B is a color contour map showing a temperature gradient of a heating block formed in accordance with a third embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

11 chamber 13 chamber inner wall

15, 41, 51, 61: heating block body 15a, 41a, 51a, 61a: inner wall of the heating block

17,31,47,57,67: Crucible 19,45,55,65: Heater

21,43,53,63: cooling groove 23,37: fin

33 insert 35

100,200,300,400: Heating Block

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deposition apparatus for organic EL, and in particular, to prevent deposition of a temperature caused by a crucible provided inside a heating block of a chamber and a body of the heating block, thereby easily depositing a predetermined organic film. It relates to a chamber to enable.

In general, organic EL devices have advantages such as low voltage driving, high luminous efficiency, wide viewing angle, fast response speed, and the like, and thus, technology development is actively progressed as one of the next-generation flat panel display technologies capable of displaying high-quality video.

Although not shown, the manufacturing process of the organic EL device will be described below.

First, an Indium Tin Oxide (ITO) pattern used as an anode is formed on a glass substrate.

An insulating film is deposited on the entire surface and the insulating film of the cell region is etched to electrically drive each cell formed by a subsequent process. In this case, the insulating film is formed of a photosensitive film or polyimide.

Next, a barrier rib in the form of a line / space pattern is formed on the entire surface. In this case, the partition wall is formed to be inclined in the form of a reverse inclination is wide and the bottom is narrow.

Here, the partition wall serves to facilitate the separation of the cathode (cathode) formed in a subsequent process.

Then, the glass substrate is pretreated. In this case, the pretreatment step is performed to prevent the oxygen escape of the surface of the ITO pattern and to suppress the residual of water and organic matter as much as possible.

Here, the pretreatment step is performed in the order of washing with pure water, washing with ultrasonic waves, drying with baking, washing with ozone, and plasma treatment.

Next, a hole injection layer (HIL), a hole transport layer (HTL), an EMitting layer (EML), an electron transport layer (ETL) and an electron injection layer (ETL) are formed on the entire surface. EIL is deposited an organic film formed of a laminated structure of an Electron Injection Layer (EIL).

In this case, the emission layer EML is an area where light emission occurs while electrons and holes supplied from a cathode and an anode are recombined.

The emission layer is a layer that implements various emission colors according to the intrinsic wavelength of the organic material used as a source, and adjusts the composition ratio of the host and the dopant during the deposition process to control the red (R), green (G), and green B It is formed with the same line width that can realize the color of (blue).

In a subsequent process, a metal film to be used as a cathode is deposited on the organic layer formed of the stacked structure.

In this case, the metal film is not deposited only on the sidewall of the partition due to the reverse slope provided on the sidewall of the partition.

Then, the partition wall is removed to electrically separate the metal film, and an encapsulation process is performed to form an organic EL element.

Here, the organic film deposition process is a process of evaporating the organic material contained in the crucible in the chamber having a heating block equipped with a crucible containing the organic material on the lower side and the glass substrate on the upper side to evaporate on the glass substrate (evaporation) To be carried out.

However, during the deposition process of the organic film, the fin of the crucible formed inside the chamber contacts the heating block body, which is partially inserted into the chamber, causing a temperature drop, whereby the organic material evaporated from the crucible is It is hard to proceed with the deposition process by solidifying to the inlet and clogging the inlet of the crucible.

1 and 2 are sectional views showing the deposition apparatus for organic EL according to the prior art.

1 is a cross-sectional view showing only a part of the lower side of the deposition apparatus for organic EL according to the prior art.

Referring to FIG. 1, the chamber 11 includes a heating block 100 formed of a heating block body 15 and a chamber outer wall 13.

In this case, the heating block 100 is a crucible (not shown) containing the organic material for the deposition of the organic film and a heater (not shown) that can heat it is shown.

2 is a cross-sectional perspective view illustrating the heating block 100 of FIG. 1 and a structure mounted thereon in a cylindrical shape.

Referring to FIG. 2, the heating block 100 has a crucible 17, a heater 19, an inner wall 15a of the heating block and a cooling groove 21 formed from the inside of the heating block body 15.

At this time, the crucible 17 and the heater 19 are in contact with each other, the heater 19 is formed in a structure surrounding the crucible 17.

The heater 19 and the cooling groove 21 are connected to the heating block body 15 and are formed between the inner wall 15a of the heating block.

The inner wall 15a of the heating block is formed so that the upper side of the cooling groove 21 is connected to the inner wall 15a of the heating block so that the coolant filling the cooling groove 21 is not injected into the chamber.                         

The cooling groove 21 is a cylindrical groove formed by the heating block body 15 and the inner wall 15a of the heating block. The cooling groove 21 is embedded by a coolant so as to heat the crucible 17 by the heater 19. The heating block body 15 serves to prevent the phenomenon of heating.

The crucible 17 is provided with a fin 23 exposed inside the chamber 11 and is formed to overlap the upper side of the heater 19 and the cooling groove 21.

The heater 19 is provided between the inner wall 15a of the heating block and the crucible 17 provided between the cooling groove 21 and serves to heat the organic material in which the crucible 17 is embedded.

3A to 3D are color contour maps showing a temperature gradient of a deposition apparatus for an organic EL according to the related art, which is illustrated by referring to the heating block 100 of FIG. 2.

Referring to FIG. 3A, a temperature gradient measured by heating the heating block 100 on which the crucible 17, the heater 19, and the cooling groove 21 are mounted is illustrated in color.

At this time, it can be seen that the temperature lower than the other part around the pin 23 of the crucible 17 is measured.

Referring to FIG. 3B, an enlarged cross-sectional view of the portion ⓐ of FIG. 3A is shown. At this time, the pin 23 portion of the crucible is shown at a lower temperature than the other portion.

Referring to FIG. 3C, the section ⓑ of FIG. 3B is enlarged to show the temperature gradient of the fin 23 portion more clearly.                         

3d, only the crucible 17 of FIG. 3b is shown.

At this time, it can be seen that the temperature of the part ⓒ provided with the pin 23 is lower than the other parts.

When the temperature of the crucible 17 is maintained at 350 ° C, the temperature of the pin 23 portion appears to be lowered by 7 ° C or more.

In addition, the temperature of the crucible 17 is a portion of the pin 23, which is in contact with the heating block body 15 falls, and the temperature of the inlet portion of the crucible 17 is generally dropped by about 19 ℃ due to the temperature loss of the portion. Able to know.

4A to 4C are cross-sectional views and color contour maps showing organic EL deposition apparatuses according to the related art, wherein an insert into a crucible insert having the same shape as that of FIG. It is mounted.

4A is a cross-sectional view showing that the insert 33 is mounted on the crucible 31 formed inside the heating block (not shown).

At this time, the insert 33 is formed in a cylindrical shape with the bottom blocked, the hole 35 is provided in the center of the bottom of the insert 33 is provided on the inner upper side of the crucible 31.

The insert 33 is intended to prevent spitting of organic substances contained in the crucible 31 when the crucible 31 is heated.

Here, the crucible 31 is provided with a pin 37 on the upper side.

4B is a color contour map showing a temperature gradient of a heated crucible in an organic film deposition process.

At this time, it can be seen that the portion ⓓ provided with the pin 37 maintains a lower temperature than the other portion.

4C is a color contour map showing the temperature gradient of the insert 33, which shows that the temperature of the upper side is about 15 ° C lower than the lower side.

As described above, the deposition apparatus for organic EL according to the related art has a temperature lower than the other parts by contacting the fin of the crucible containing the organic material and the surface of the heating block body inside the chamber, which solidifies the organic material evaporated from the crucible. By causing the phenomenon of blocking the entrance of the crucible, there is a problem in that the deposition process of the organic film is difficult.

The present invention is to overcome the problems of the prior art, by removing the fin portion of the crucible so that a low temperature gradient can be maintained in the heating block located inside the chamber to prevent the organic solidification at the inlet of the crucible The purpose is to provide a deposition apparatus for EL.

In order to achieve the above object, the organic EL deposition apparatus according to the present invention,

The cylindrical heating block is partially inserted into the interior from the outside of the chamber,

In the vapor deposition apparatus for organic EL provided with the cooling groove, the inner wall of a heating block, a heater, and a crucible from inside a heating block body,

The crucible is formed to be inclined at the same height as the heating block body in the heater spaced apart from the heating block body,

The heating block is provided with the inner wall of the heating block body and the heating block is connected to the upper portion of the heater and the cooling groove is provided,

The heater has a first feature that the heating block body of the upper side is removed and exposed to the inside of the chamber and provided to the end of the crucible.

Further, in order to achieve the above object, the organic EL deposition apparatus according to the present invention,

It is provided with a cylindrical heating block inserted into the chamber from the outside,

In the vapor deposition apparatus for organic EL provided with the cooling groove, the inner wall of a heating block, a heater, and a crucible from inside a heating block body,

To form the heating block inclined,

It is formed to be inclined inward from the upper side of the cooling groove to expose the inner upper portion of the heater,

The crucible is provided at the same height as the heater,

It is a 2nd characteristic that the said crucible is provided inclined inwardly from the height of a heater.

Further, in order to achieve the above object, the organic EL deposition apparatus according to the present invention,

It is provided with a cylindrical heating block inserted into the interior from the outside of the chamber,                     

The cooling groove, the inner wall of the heating block, the heater and the crucible are provided inward from the heating block body,

In the deposition apparatus for organic EL, the insert is mounted on the inside of the crucible,

The insert is cylindrical with a bottom and is provided with a heater outside the sidewall of the insert,

The heater is provided from the upper side to the lower side of the insert side wall,

The bottom of the insert has a third feature that one or more holes are provided.

Further, in order to achieve the above object, the organic EL deposition apparatus according to the present invention,

It is provided with a cylindrical heating block inserted into the interior from the outside of the chamber,

In the vapor deposition apparatus for organic EL provided with the cooling groove, the inner wall of a heating block, a heater, and a crucible from inside a heating block body,

A fourth feature is that the upper side of the heating block body and the structure provided therein is provided in a wide cylindrical shape and the lower side is narrow.

On the other hand, the principle of the present invention,

When the fins of the crucible provided in the heating block come into contact with the heating block body inside the chamber, the organic matter inside the crucible is solidified at the inlet of the crucible when the organic material inside the crucible evaporates into the chamber. In order to prevent the occurrence of clogging the entrance of the crucible,

By removing the pin of the crucible which is the contact surface of the crucible and the heating block body to suppress the contact by separating the crucible and the heating block body and at the same time having a heater to the upper end of the inlet of the crucible when the crucible is driven when the deposition apparatus is driven By maintaining the temperature of the to minimize the solidification phenomenon by eliminating the temperature gradient of the inlet and the other part of the crucible.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

5A to 5C show a cross-sectional view and a color contour map of the vapor deposition apparatus for the organic EL according to the first embodiment of the present invention.

Fig. 5A is a sectional view of a heating block formed into the inside of the deposition apparatus for organic EL.

The heating block 200 is a cooling groove 43, the inner wall 41a of the heating block, the heater 45 and the crucible 47 are shown inward from the heating block body 41 formed on the outside.

At this time, the crucible 47 removes the contact of the crucible 47 and the heating block body 41 by removing the pin 23 shown in FIG. 3d of the prior art.

The crucible 47 is formed to be inclined inward from the height of the heating block body 41 to form a distance from the heating block body 41.

FIG. 5B shows a color contour map according to the cross section of FIG. 5A above.

FIG. 5C shows a color contour map of the crucible according to the cross section of FIG. 5A above.

5B and 5C, it is observed that the temperature is lower in the ⓔ portion of FIG. 5B than the ⓑ portion of FIG. 3B.

At this time, it can be seen that the temperature gradient of the part ⓔ and the other part is lower than that of the conventional 4 ~ 5 ℃.

6A and 6B illustrate a cross-sectional view of a deposition apparatus for an organic EL according to a second embodiment of the present invention, and a color contour map of a heating block when the deposition apparatus for an organic EL is driven.

FIG. 6A is a cross-sectional view showing only a part of the upper side of the heating block 300 as shown in FIG. 3B. The heating block body 51, the cooling groove 53, the inner wall 51a of the heating block, the heater 55 and the outside from the outside. Crucible 57 is formed.

At this time, the crucible 57 is removed by the pin 23 of FIG. 3b, which is provided to overlap the upper side of the heating block body 51, and is inclined inward from the height of the heating block body 51. It is formed in the shape like FIG. 5A.

The heater 55 is provided at the height of the crucible 57 between the inner wall 51a of the heating block and the crucible 57 to be exposed to the inside of the chamber.

More specifically, in order to overcome the temperature drop phenomenon of the upper side of the crucible 57, the heater 55 is formed up to the upper end of the crucible 57 to increase the temperature of the upper side of the crucible 57 and at the same time the chamber. The heater 55 is exposed inside.

FIG. 6B is a color contour map showing the temperature gradient of FIG. 6A, and it can be observed that the temperature gradient of the inlet portion and the other portion of the crucible 57 is 0.6 to 1.0 ° C.

7A and 7B show a cross-sectional view and a color contour map of the vapor deposition apparatus for the organic EL according to the third embodiment of the present invention.

FIG. 7A is a cross-sectional view of only a portion of the upper side of the heating block 400 as shown in FIG. 6A, and the heating block body 61, the cooling groove 63, the inner wall 61a of the heating block, the heater 65, and the like from the outside. Crucible 67 is formed.

At this time, the heating block body 61 is the heating block body 61 of the cooling groove 63 and the heater 65 is exposed so that the heater 65 is exposed from the upper portion of the cooling groove 63 is provided. It is formed to be inclined.

The crucible 67 is formed to be inclined inward from the height of the heater 65 like the ⓕ portion or to be formed horizontally at the height of the heater 65.

In conclusion, the heating block 400 minimizes contact between the crucible 67 and the heating block body 61 and includes a heater 65 up to the top of the crucible 67 so as to have an upper side of the crucible 67. The temperature gradients in the other parts are minimized.

FIG. 7B is a color contour map showing a temperature gradient during driving of a heating block of the chamber according to the cross-sectional structure of FIG. 7A, in which temperature gradients of the upper side and the other part of the crucible 67 which are the inlets of the crucible 67 Almost none can be observed.

Although not shown, a fourth embodiment of the present invention will be described.

First, a cylindrical insert having a bottom portion as shown in FIG. 4B is mounted on a heating block of a deposition apparatus for an organic EL according to the first, second, third and third embodiments of the present invention. The coil is wound from the outer upper side to the lower side of the side wall and mounted in the form of a heater, thereby solving the problem of temperature gradient caused by the use of the insert.

Here, the insert is one or two or more holes formed in the bottom.

The fifth embodiment of the present invention is formed by forming a heating block of the organic EL deposition apparatus according to the first, second, third and fourth embodiments of the present invention and the prior art in a wide cylindrical shape with a narrow upper side. This is to facilitate the deposition process of the film.

As described above, the organic EL deposition apparatus according to the present invention,

Minimize contact between the crucible and the heating block body provided inside the chamber and minimize the temperature gradient between the crucible and the other part by providing a heater up to the upper end of the crucible to prevent organic matter from solidifying at the inlet of the crucible. It provides the effect of being able to easily deposit the organic thin film by preventing.

Claims (9)

The cylindrical heating block is partially inserted into the interior from the outside of the chamber, In the vapor deposition apparatus for organic EL provided with the cooling groove, the inner wall of a heating block, a heater, and a crucible from inside a heating block body, And the crucible is inclined at the same height as the heating block body inside the heater to be spaced apart from the heating block body. The method of claim 1, The heating block is a deposition apparatus for an organic EL, characterized in that the heating block body and the inner wall of the heating block is connected to the upper portion where the heater and the cooling groove is provided. The method of claim 2, The heater is an organic EL deposition apparatus, characterized in that the heating block body of the upper side is removed and exposed to the interior of the chamber until the end of the crucible. It is provided with a cylindrical heating block inserted into the chamber from the outside, In the vapor deposition apparatus for organic EL provided with the cooling groove, the inner wall of a heating block, a heater, and a crucible from inside a heating block body, To form the heating block inclined, It is formed to be inclined inward from the upper side of the cooling groove to expose the inner upper portion of the heater, And the crucible is provided at the same height as the heater. The method of claim 4, wherein And the crucible is formed to be inclined inward from the height of the heater. It is provided with a cylindrical heating block inserted into the interior from the outside of the chamber, The cooling groove, the inner wall of the heating block, the heater and the crucible are provided inward from the heating block body, In the deposition apparatus for organic EL, the insert is mounted on the inside of the crucible, And the insert is cylindrical having a bottom, and a heater is provided outside the sidewall of the insert. The method of claim 6, And the heater is provided from an upper side to a lower side of the sidewall of the insert. The method of claim 6, Evaporation apparatus for an organic EL, characterized in that the bottom of the insert is provided with one or more holes. It is provided with a cylindrical heating block inserted into the interior from the outside of the chamber, In the vapor deposition apparatus for organic EL provided with the cooling groove, the inner wall of a heating block, a heater, and a crucible from inside a heating block body, Evaporating apparatus for an organic EL, characterized in that the heating block body and the upper side of the structure provided in the inner side is provided in a wide cylindrical shape is narrow.

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