KR100905898B1 - Scribing device and substrate cutting device and method using same - Google Patents

Abstract

The present invention discloses a scribing apparatus and a substrate cutting apparatus and method using the same, wherein the plurality of scribing units are arranged side by side in a direction perpendicular to the linear movement direction of the supporting member on which the mother substrate is placed The distance between the scribing units according to the size of the substrate is characterized in that it is adjusted.

According to this aspect, the present invention provides a scribing apparatus and a substrate cutting apparatus and method using the same, which can shorten the scribing process time and improve productivity by simultaneously forming a plurality of scribe lines through one scribing process. can do.

Board, Scribing

Description

Scribing device and substrate cutting device and method using same {SCRIBING APPARATUS, APPARATUS AND METHOD FOR CUTTING SUBSTRATE USING THE SAME}

The present invention relates to an apparatus and method for use in the manufacture of a flat panel display panel, and more particularly, to a scribing apparatus for forming a scribe line on a mother substrate formed with a plurality of unit substrates and an apparatus for cutting the mother substrate using the same. And to a method.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such information processing apparatus has a display for displaying the activated information. Conventionally, a cathode ray tube monitor is mainly used as a display, but recently, a light and space-saving thin film transistor-liquid crystal display panel or organic light emitting diodes display The use of such flat panel displays is greatly increasing.

In general, a panel used for a flat panel display or the like is usually manufactured using a brittle substrate, and the panel is roughly classified into a single plate substrate composed of one sheet or a bonded substrate bonded to two substrates.

Since the bonded substrate is processed into small and various sizes, such as a panel for a liquid crystal display of a mobile phone, to a large size such as a panel such as a TV or a display, the bonded substrate is cut into a unit substrate having a predetermined size from a large parent substrate, Used as a panel.

As a method of cutting a mother substrate, there are a method of cutting using a scribe wheel (Scribe Wheel) in which fine diamonds are embedded, and a method of cutting using a laser beam.

A method of cutting a mother substrate using a scribe wheel includes a scribing process of contacting a scribe wheel with a cutting target line of the mother substrate and forming a scribe line having a predetermined depth along the cutting target line, and a mother substrate. A cracking process propagates along a scribe line by applying a physical impact to the breaker to break the parent substrate into a unit substrate.

A method of cutting a mother substrate using a laser beam includes a scribing process of irradiating a scribe laser beam along a cutting line of the mother substrate to form a scribe line and quenching the heated scribe line, and a brake along the scribe line. It is made of a braking step of cutting the parent substrate into a unit substrate by irradiating a laser beam for.

The present invention provides a scribing apparatus capable of simultaneously forming a plurality of scribe lines through a single scribing process, and a substrate cutting apparatus and method using the same.

In addition, the present invention is to provide a scribing apparatus that can adjust the spacing of the scribing lines formed on the parent substrate, and a substrate cutting apparatus and method using the same.

The object of the present invention is not limited thereto, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, in the scribing apparatus according to the present invention, in a device for performing a scribing process for separating a mother substrate on which a plurality of unit substrates are formed, the unit substrate, the mother substrate is placed and straight A movable support member; And a plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member.

In the scribing apparatus according to the present invention having the configuration as described above, a spacing adjusting unit for adjusting the spacing between the scribing units in a direction perpendicular to the linear movement direction of the support member; have.

The support member includes a table on which the mother substrate is placed; It may include; a first drive member for linearly moving the table.

The support member may further include a rotation drive member for rotating the table.

The gap adjusting unit includes a second drive member for linearly moving each of the scribing units in a direction perpendicular to the linear movement direction of the support member; And a guide member for guiding linear movement of the scribing units.

The second drive member includes brackets connected to the scribing units, respectively; Lead screws inserted into all of the brackets and arranged to be parallel to the guide member; Drive motors for rotating the lead screws, respectively; Including the female screw portion may be formed in the brackets to be screwed with any one of the lead screw of the lead screws.

The controller may further include a controller configured to control an operation of the second driving member to adjust the interval between the scribing units to a predetermined interval.

Each of the plurality of scribing units includes two scribers arranged side by side in a direction perpendicular to the linear movement direction of the support member, wherein the scribers have a direction parallel to the linear movement direction of the support member. Therefore, scribe lines can be formed in opposite directions to each other.

In order to achieve the above object, a substrate cutting apparatus according to the present invention includes a loading unit in which a mother substrate on which a plurality of unit substrates are formed is loaded; A scribing unit generating a scribe line along the arrangement direction of the unit substrates on the mother substrate received from the loading unit; Breaking unit for separating the parent substrate into a unit substrate along the scribe line generated in the parent substrate; And an unloading part for unloading the separated unit substrates, wherein the scribing part includes a support member on which the mother substrate is placed and which is linearly movable; And a plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member.

In the substrate cutting apparatus according to the present invention having the configuration as described above, a spacing adjustment unit for adjusting the spacing between the scribing units in a direction perpendicular to the linear movement direction of the support member; .

The support member includes a table on which the mother substrate is placed; And a first driving member for linearly moving the table.

The support member may further include a rotation drive member for rotating the table.

The gap adjusting unit includes a second drive member for linearly moving each of the scribing units in a direction perpendicular to the linear movement direction of the support member; And a guide member for guiding linear movement of the scribing units.

The second drive member includes brackets connected to the scribing units, respectively; Lead screws inserted into all of the brackets and arranged to be parallel to the guide member; Drive motors for rotating the lead screws, respectively; Including the female screw portion may be formed in the brackets to be screwed with any one of the lead screw of the lead screws.

The controller may further include a controller configured to control an operation of the second driving member to adjust the interval between the scribing units to a predetermined interval.

Each of the plurality of scribing units includes two scribers arranged side by side in a direction perpendicular to the linear movement direction of the support member, wherein the scribers have a direction parallel to the linear movement direction of the support member. Therefore, scribe lines can be formed in opposite directions to each other.

The parent substrate may be a flat panel display substrate.

In order to achieve the above object, a substrate cutting method according to the present invention includes providing a plurality of scribing units to separate a mother substrate on which unit substrates are formed into unit substrates. The plurality of scribing lines are arranged side by side in a direction perpendicular to the linear movement direction of the supporting member on which the mother substrate is placed, and simultaneously along any one direction of arrangement of the unit substrates of the mother substrate using the plurality of scribing units. Characterized in that form.

In the method of cutting a substrate according to the present invention having the characteristics as described above, a scribe line may be formed on the mother substrate by adjusting a distance between the plurality of scribing units.

In the generation of the scribe lines, the plurality of scribing units may be fixed and the parent substrate may be linearly moved.

The mother substrate may be rotated to simultaneously generate a plurality of scribing lines along another direction of the arrangement direction of the unit substrates, and adjust the spacing between the plurality of scribing units.

According to the present invention, a plurality of scribe lines can be simultaneously formed through one scribing process.

In addition, according to the present invention, the spacing of the scribing lines formed on the mother substrate can be adjusted.

In addition, according to the present invention, the productivity of the substrate manufacturing process can be improved by shortening the scribing process time.

Hereinafter, a scribing apparatus and a substrate cutting apparatus and method using the same according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

(Example)

1 is a diagram illustrating an example of a mother substrate.

Referring to FIG. 1, the mother substrate 1 may be a panel for a thin film transistor-liquid crystal display (TFT-LCD). The mother substrate 1 is composed of a first mother substrate 2 and a second mother substrate 3 having a generally rectangular plate shape. The first mother substrate 2 and the second mother substrate 3 are stacked up and down. A plurality of unit substrates 2a and 3a are formed on the first and second mother substrates 2 and 3, and the unit substrates 2a and 3a are planes of the first and second mother substrates 2 and 3. It may be arranged in a grid shape on the phase. The first mother substrate 2 is a substrate on which a thin film transistor substrate is formed, and the second mother substrate 3 is a substrate on which a color filter substrate is formed. The mother substrate 1 may be a panel for organic light emitting diodes (OLED) display, which is a kind of panel for a flat panel display.

2 is a view schematically showing the configuration of a substrate cutting device 10 according to the present invention.

Referring to FIG. 2, the substrate cutting apparatus 10 is for cutting a parent substrate (reference numeral 1 of FIG. 1) into a plurality of unit substrates, and includes a loading unit 11, a scribing unit 12, and a braking unit. The unit 13 and the unloading unit 14 is included. The loading unit 11, the scribing unit 12, the breaking unit 13, and the unloading unit 14 may be sequentially arranged in a line. The mother substrate 1 flows into the substrate cutting device 10 through the loading unit 11, and is separated into a plurality of unit substrates sequentially through the scribing unit 12 and the breaking unit 13. It flows out of the substrate cutting device 10 through the loading unit 14. The scribing unit 12 forms a scribe line along the arrangement direction of the unit substrates on the first mother substrate 2 or the second mother substrate 3 using the scribing apparatus 12a to be described later. do. The breaking part 13 cuts the unit substrates from the mother substrate 1 by applying a force to a scribe line portion formed in the mother substrate 1 using a break bar (not shown). Meanwhile, the inverting portion 15 may be disposed on one side of the scribing portion 12. The inverting unit 15 serves to change the position of one surface on which the scribe line is formed and the position of the other surface on which the scribe line is not formed. That is, when a scribe line is first formed on the first mother substrate 2 of the mother substrate 1, the first mother substrate 2 and the second mother substrate are formed to form a scribe line on the second mother substrate 3. Change the position of (3).

3 is a perspective view illustrating an example of a scribing apparatus according to the present invention provided in the scribing unit of FIG. 2, FIG. 4 is a plan view of the scribing apparatus of FIG. 3, and FIG. 5 is a support member of FIG. 3. Side view.

Hereinafter, the first direction I is a linear movement direction of the supporting member 100 to be described later, and the second direction II is a direction perpendicular to the first direction I in the planar arrangement structure of the scribing apparatus 12a. The third direction III is a direction perpendicular to the first direction I and the second direction II. The first direction I and the second direction II correspond to any one of the arrangement directions of the unit substrates 2a and 3a arranged in a lattice shape on the mother substrate 1, respectively.

3 to 5, the scribing apparatus 12a includes a support member 100, scribing units 200, and a gap adjusting unit 300. The support member 100 supports the mother substrate 1. The support member 100 linearly moves the mother substrate 1 along the first direction I and rotates the mother substrate 1 about a central axis perpendicular to the plane of the mother substrate 1. The scribing units 200 contact the mother substrate 1 on the support member 100 to form cracks on the mother substrate 1. The gap adjusting unit 300 adjusts the gap between the scribing units 200 by moving the scribing units 200 in the second direction (II). During the scribing process, the scribing units 200 are fixed, and the mother substrate 1 is linearly moved along the first direction I. FIG.

The support member 100 includes a table 120, a first driving member 140, and a rotation driving member 160. The mother substrate 1 is placed on the table 120. The first driving member 140 linearly moves the table 120 in the first direction I, and the rotation driving member 160 rotates the table 120 about a central axis perpendicular to the plane of the table 120. Let's do it.

Table 120 has an upper plate 122 and a lower plate 124. The upper plate 122 and the lower plate 124 are flat and generally rectangular in shape, and the upper plate 122 is located above the lower plate 124. The parent substrate 1 is placed on the upper plate 122. Top plate 122 has an area that is similar to or greater than the parent substrate 1. A plurality of holes (not shown) connected to a vacuum line (not shown) are formed on the upper surface of the upper plate 124, and the mother substrate 1 is fixed to the upper plate 124 by vacuum pressure. In addition, the upper plate 122 or the lower plate 124 may additionally be provided with a clamp (not shown) for fixing the parent substrate 1 to the upper plate 122.

The first driving member 140 linearly moves the table 120 in the first direction (I). The first driving member 140 has a guide 142, a bracket 144, and a driver (not shown). The guide 142 is elongated along the first direction I and is mounted at the center on the base B. The guide 142 has the same width along the longitudinal direction. The upper surface of the guide 142 is provided flat, and each side of the guide 142 is provided with a groove 141 elongated in the longitudinal direction.

The table 120 is coupled to the guide 142 by the bracket 144. The bracket 144 has a bottom plate 145, a support plate 147, and a coupling plate 149. The bottom plate 145 has a flat rectangular plate shape and is located on the guide 142. The support plate 147 is vertically fixed to the upper surface of the bottom plate 145 and fixedly coupled to the lower plate 124 of the table 120 to support the table 120. Two support plates 147 are provided, and are arranged side by side on both sides of the top surface of the bottom plate 145. The coupling plate 149 has a side plate 149a vertically coupled to the bottom of the bottom plate 145 and an insertion plate 149b extending vertically inwardly from the bottom of the side plate 149a. The insertion plate 149b is inserted into the groove 141 formed on the side of the guide 142. Two coupling plates 149 are provided to face each other.

The driver provides a driving force so that the table 120 is guided by the guide 142 to move linearly in the second direction (II). As a driver, an assembly including a motor and a screw can be used. Optionally an assembly comprising a combination of a motor, belt and pulley or an assembly including a linear motor can be used as the driver. Detailed configurations of the various assemblies described above are well known to those skilled in the art, and thus detailed descriptions thereof will be omitted.

The rotation drive member 160 rotates the table 120 supporting the parent substrate 1. As shown in FIG. 5, the rotation drive member 160 has a motor 162 and a rotation axis 164. The motor 162 is installed at the center of the bottom plate 145 of the bracket 144. The rotating shaft 164 connected to the output end of the motor 162 is coupled to the upper plate 122 through the lower plate 124 of the table 120. The lower plate 124 may be provided with a bearing member (not shown) for rotatably supporting the rotation shaft 164. By this configuration, the upper plate 122 of the table 120 on which the mother substrate 1 is placed can be rotated. The rotation angle of the upper plate 122 is 90 degrees. When the parent substrate 1 is rotated 90 degrees by the rotation of the upper plate 122, the scribe line along the first direction (I) or the second direction (II) on the mother substrate 1 can be generated. .

As shown in FIGS. 3 and 4, the scribing units 200 may include first scribing arranged in a direction perpendicular to the linear movement direction of the support member 100, that is, in a second direction II. Unit 200a and second scribing unit 200b. In the present embodiment, a case where two scribing units 200a and 200b are disposed will be described as an example, but two or more scribing units 200 may be disposed. Each of the first and second scribing units 200a and 200b is moved in the second direction II by the gap adjusting unit 300 to be described later to adjust the gap.

As shown in FIG. 6, the first scribing unit 200a has two scribers 220a and 240a arranged side by side in the second direction (II), and the second scribing unit 200b. ) Has two scribers 220b and 240b arranged side by side in the second direction (II). The scribers 220a, 240a, 220b, and 240b have the same configuration. Hereinafter, one of these scribers 220a will be described.

FIG. 8 is a perspective view of the scriber of FIG. 6, FIG. 9 is a partial cross-sectional view of the lower end of the scriber of FIG. 8, and FIG. 10 is a plan view of the scribing wheel of FIG. 9.

8 to 10, the scriber 220a has a scribing wheel 222, a support 224, a pressing member 226, and a vibrator 228. The scribing wheel 222 is rotated in contact with the mother substrate 1 during the scribing process to form a scribe line on the mother substrate 1. As the scribing wheel 222, a wheel made of diamond may be used. A circular through hole 222a is formed in the center of the scribing wheel 222, and the edge 222b of the scribing wheel 222 is sharply provided. The scribing wheel 222 is supported on the support 224. The support 224 has a body 224a and a shaft pin 224b. The lower surface of the body 224a is formed with a groove 225 penetrating the body 224a in one direction. The shaft pin 224b has a long rod shape having a circular cross section. The axial pin 224b is located in the groove 225 in a direction perpendicular to the longitudinal direction of the groove 225. Both ends of the shaft pin 224b are fixed to the body 224a. The shaft pin 224b passes through the through hole 222b formed in the scribing wheel 222. When the scribing wheel 222 is supported by the shaft pin 224b, the scribing wheel 222 is partly located in the groove 225, and part of it protrudes below the support 224. The pressing member 226 may press the scribing wheel 222 such that the scribing wheel 222 may press the mother substrate 1 with a predetermined force when the scribing wheel 222 contacts the mother substrate 1. Pressurize. In one example, the pressing member 226 is positioned above the support 224 and presses the scribing wheel 222 by pressing the support 224 downward using pneumatic pressure. The vibrator 228 applies vibration to the scribing wheel 222 during the scribing process. The vibrator 228 is mounted inside the body 224a, and an ultrasonic vibrator may be used as the vibrator 228.

Again, referring to FIGS. 3 to 5, the spacing adjusting unit 300 moves the scribing units 200a and 200b in the second direction II to scribing the units 200a and 200b. Adjust the space between).

The gap adjusting unit 300 includes vertical supports 310, a guide member 320, a bracket 330, and a second driving member 340. The vertical supports 310 are disposed to be spaced apart by a predetermined distance in the second direction II. The vertical supports 310 are disposed such that the parent substrate 1 may pass between the vertical supports 310 when the parent substrate 1 linearly moves along the first direction I. FIG. Guide member 320 is fixed to the top of the vertical support (310). The upper and lower surfaces of the guide member 320 are provided with grooves 322 extending along the length direction.

The first scribing unit 200a is coupled to the guide member 320 by the bracket 330, and the second scribing unit 200b is coupled to the guide member 320 by the bracket 330 ′. do. Since the bracket 330 and the bracket 330 'have the same structure, only the bracket 330 will be described below. The bracket 330 has a supporting plate 332 and a coupling plate 334, as shown in FIG. 6. The support plate 332 has a flat rectangular plate shape and is located on one side of the guide member 320. The coupling plate 334 includes a side plate 334a protruding perpendicularly to the support plate 332 from the upper side and the lower side of the support plate 332, and an insertion plate 334b inserted into the groove 322 formed in the guide member 320. Have

The second driving member 340 provides a driving force so that the brackets 330 and 330 'move linearly along the guide member 320. The second drive member 340 has a first lead screw 342 and a second lead screw 344 arranged to be parallel to the guide member 320. As illustrated in FIG. 7, the bracket 330 is mounted on the first lead screw 342 to be linearly movable, and the bracket 330 'is mounted on the second lead screw 344 to be linearly movable. That is, although the first lead screw 342 and the second lead screw 344 are inserted into the bracket 330, the first lead screw 342 is engaged with the female screw part 335 formed in the bracket 330. The second lead screw 344 penetrates without contacting the hole () formed in the bracket 330. Similarly, the first lead screw 342 and the second lead screw 344 are inserted into the bracket 330 ', but the first lead screw 342 is not in contact with the hole () formed in the bracket 330'. While penetrating in the state, the second lead screw 344 meshes with the female threaded portion 335 'formed in the bracket 330'. By this configuration, the bracket 330 is linearly moved when the first lead screw 342 is driven, but the bracket 330 'is not moved, and the bracket 330 is moved when the second lead screw 344 is driven. Although not shown, the bracket 330 'is linearly moved. By such a driving scheme, a distance between the first scribing unit 200a connected to the bracket 330 and the second scribing unit 200b connected to the bracket 330 'may be adjusted. One end of the first lead screw 342 is connected to the first driver 343 that provides rotational force, and one end of the second lead screw 344 is connected to the second driver 345 that provides the rotational force. As the first and second drivers 343 and 345, a driver such as a motor may be used. Although the assembly including the motor and the lead screw as the second driving member 340 has been described as an example, various drivers that can provide linear driving force to the brackets 330 and 330 ', such as a cylinder, may be used.

As shown in FIG. 6, the first scribing unit 200a is mounted to the support plate 332 of the bracket 330 so as to be movable upward and downward. In an embodiment, the support plate 332 is formed with guide grooves 331 having a slit shape in the third direction (III), and the scribers 220a and 240a of the first scribing unit 200a are guide grooves. It is coupled to the support shaft (not shown) inserted in the 331, respectively. The second scribing unit 200b is also connected to the bracket 330 'so as to be movable up and down, and since the connection structure is the same as that of the first scribing unit 200a, description thereof will be omitted.

The operation of the above-described gap adjusting unit 300 is controlled by the controller 400. The controller 400 controls the operations of the first and second drivers 343 and 345 of the gap adjusting unit 300 to control the first and second scribing units 200a and 200b in the second direction (II). To adjust the distance in the second direction II between the scribing units 200a and 200b.

Referring to the process of manufacturing a flat panel display panel using the substrate cutting device according to the present invention having the configuration as described above are as follows.

11 is a flowchart sequentially illustrating a process of manufacturing a flat panel display using a substrate cutting apparatus according to the present invention.

Referring to FIG. 11, the mother substrate 1 is loaded (S10), and then a scribing process is performed on the first mother substrate (S20). After forming a scribe line on the first mother substrate, The mother substrate is inverted (S30) to form a scribe line on the second mother substrate. (S40) As described above, after the scribing process is performed on the first and second mother substrates, the braking process is performed. S50). When the parent substrate 1 is separated into a plurality of unit substrates by the braking process, the unit substrates are unloaded (S60) and a cleaning process is performed on the unit substrates.

Next, a process of performing a scribing process on the mother substrate 1 using the scribing apparatus 12a according to the present invention will be described.

12 illustrates a process of generating a scribe line on a mother substrate using a scribing apparatus according to the present invention.

Referring to FIG. 12, the aligned first mother substrate 1 is placed on the upper plate 122 of the table 120. The table 120 is linearly moved in the first direction I by a driver (not shown). When the table 120 is moved to a preset position, the movement of the table 120 is stopped. Thereafter, the first and second scribing units 200a and 200b are linearly moved by driving the first and second drivers 343 and 345 of the gap adjusting unit 300. Adjust the distance in the second direction (II) between the (200a, 200b). As described above, the first and second scribing units 200a and 200b are moved to a predetermined position at predetermined intervals and then lowered to contact the mother substrate 1 placed on the table 120. When the table 120 on which the mother substrate 1 is placed is moved in the first direction I while the first and second scribing units 200a and 200b are in contact with the mother substrate 1, the mother substrate A scribe line is formed on (1).

By repeating these same processes, a desired number of scribing lines are formed on the mother substrate 1 in the first direction I. At this time, the scribers provided in the first and second scribing units 200a and 200b form scribe lines in opposite directions along the first direction (I).

After the scribe lines are formed in the first direction I on the mother substrate 1 through the processes described above, the scribe lines in the second direction II are formed on the mother substrate 1. To this end, the upper plate 122 of the table 120 on which the parent substrate 1 is placed is rotated 90 degrees with respect to the lower plate 124. Thereafter, the above-described processes may be repeatedly performed to form a scribe line in a direction perpendicular to the scribe line previously formed on the mother substrate 1.

As described above, the present invention is provided with a plurality of scribing units, by simultaneously forming a plurality of scribe lines in one scribing process, thereby reducing the time required for the scribing process and thereby making a substrate The productivity of the process can be improved. In addition, the present invention can adjust the spacing of the scribing lines formed on the parent substrate.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

1 is a view showing an example of a mother substrate,

2 is a view schematically showing the configuration of a substrate cutting device according to the present invention;

3 is a perspective view showing an example of a scribing apparatus according to the present invention provided in the scribing unit of FIG.

4 is a plan view of the scribing apparatus of FIG.

5 is a side view of the supporting member of FIG. 3, FIG.

6 is an enlarged view of a portion “A” of FIG. 3,

7 is a cross-sectional view showing a coupling relationship between the brackets and lead screws of FIG.

8 is a perspective view of the scriber of FIG.

9 is a partial cross-sectional view of the lower end of the scriber of FIG. 8, FIG.

10 is a plan view of the scribing wheel of FIG. 9;

11 is a flowchart sequentially illustrating a process of manufacturing a flat panel display using a substrate cutting apparatus according to the present invention;

12 illustrates a process of generating a scribe line on a mother substrate using a scribing apparatus according to the present invention.

<Description of Symbols for Main Parts of Drawings>

100: support member 120: table

200a, 200b: Scribing unit 320a, 320b: First moving unit

360: second mobile unit 400: control unit

Claims (21)

delete An apparatus for performing a scribing process for separating a parent substrate having a plurality of unit substrates formed into a unit substrate, A support member on which the mother substrate is placed and which is linearly movable; A plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member; And Including a gap adjusting unit for adjusting the gap between the scribing units in a direction perpendicular to the linear movement direction of the support member, The gap adjusting unit may include a second driving member for linearly moving each of the scribing units in a direction perpendicular to the linear movement direction of the support member; And a guide member for guiding linear movement of the scribing units, The second drive member may include brackets connected to the scribing units, respectively; Lead screws inserted into all of the brackets and arranged to be parallel to the guide member; And drive motors for rotating the lead screws, respectively. The bracket has a scribing device characterized in that the female screw portion is formed to be screwed with any one of the lead screw of the lead screw. The method of claim 2, The support member, A table on which the mother substrate is placed; And a first driving member for linearly moving the table. The method of claim 3, wherein The support member, And a rotation drive member for rotating the table. delete delete An apparatus for performing a scribing process for separating a parent substrate having a plurality of unit substrates formed into a unit substrate, A support member on which the mother substrate is placed and which is linearly movable; A plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member; And Including a gap adjusting unit for adjusting the gap between the scribing units in a direction perpendicular to the linear movement direction of the support member, The gap adjusting unit may include a second driving member for linearly moving each of the scribing units in a direction perpendicular to the linear movement direction of the support member; And a guide member for guiding linear movement of the scribing units, And the second driving member is controlled by the controller such that the interval between the scribing units is adjusted to a predetermined interval. An apparatus for performing a scribing process for separating a parent substrate having a plurality of unit substrates formed into a unit substrate, A support member on which the mother substrate is placed and which is linearly movable; Comprising a plurality of scribing units disposed side by side perpendicular to the linear movement direction of the support member, Each of the plurality of scribing units includes two scribers arranged side by side in a direction perpendicular to the linear movement direction of the support member, And the scribers form scribe lines in opposite directions along a direction parallel to the linear movement direction of the support member. delete A loading unit to which a mother substrate on which a plurality of unit substrates are formed is loaded; A scribing unit generating a scribe line along the arrangement direction of the unit substrates on the mother substrate received from the loading unit; Breaking unit for separating the parent substrate into a unit substrate along the scribe line generated in the parent substrate; Including; unloading unit for unloading the separated unit substrate, The scribing portion includes a support member on which the mother substrate is placed and which is linearly movable; A plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member; A gap adjusting unit for adjusting a gap between the scribing units in a direction perpendicular to the linear movement direction of the support member; The gap adjusting unit includes a second drive member for linearly moving each of the scribing units in a direction perpendicular to the linear movement direction of the support member; It includes a guide member for guiding the linear movement of the scribing units, The second drive member includes brackets connected to the scribing units, respectively; Lead screws inserted into all of the brackets and arranged to be parallel to the guide member; Drive motors for rotating the lead screws, respectively; The bracket is a substrate cutting device, characterized in that the female screw portion is formed to be screwed with any one of the lead screw of the lead screw. The method of claim 10, The support member, A table on which the mother substrate is placed; And a first driving member for linearly moving the table. The method of claim 11, The support member, And a rotation drive member for rotating the table. delete delete A loading unit to which a mother substrate on which a plurality of unit substrates are formed is loaded; A scribing unit generating a scribe line along the arrangement direction of the unit substrates on the mother substrate received from the loading unit; Breaking unit for separating the parent substrate into a unit substrate along the scribe line generated in the parent substrate; Including; unloading unit for unloading the separated unit substrate, The scribing portion includes a support member on which the mother substrate is placed and which is linearly movable; A plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member; A gap adjusting unit for adjusting a gap between the scribing units in a direction perpendicular to the linear movement direction of the support member; The gap adjusting unit includes a second drive member for linearly moving each of the scribing units in a direction perpendicular to the linear movement direction of the support member; It includes a guide member for guiding the linear movement of the scribing units, The second drive member includes brackets connected to the scribing units, respectively; Lead screws inserted into all of the brackets and arranged to be parallel to the guide member; Drive motors for rotating the lead screws, respectively; The second driving member is controlled by the controller so that the interval between the scribing units is adjusted to a predetermined interval, The bracket is a substrate cutting device, characterized in that the female screw portion is formed to be screwed with any one of the lead screw of the lead screw. A loading unit to which a mother substrate on which a plurality of unit substrates are formed is loaded; A scribing unit generating a scribe line along the arrangement direction of the unit substrates on the mother substrate received from the loading unit; Breaking unit for separating the parent substrate into a unit substrate along the scribe line generated in the parent substrate; Including; unloading unit for unloading the separated unit substrate, The scribing portion includes a support member on which the mother substrate is placed and which is linearly movable; A plurality of scribing units arranged side by side perpendicular to the linear movement direction of the support member, Each of the plurality of scribing units includes two scribers arranged side by side in a direction perpendicular to the linear movement direction of the support member, And the scribers form scribe lines in opposite directions along a direction parallel to the linear movement direction of the support member. delete delete delete delete delete

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