KR100902561B1 - Transparent electrode manufacturing method - Google Patents

Abstract

The present invention (1) forming a carbon nanotube thin film on a solid substrate; (2) applying a precursor capable of forming a flexible transparent substrate on the carbon nanotube thin film; (3) curing the precursor to form a flexible transparent substrate to which the carbon nanotube thin film is immobilized; And (4) relates to a conductive transparent electrode manufacturing method comprising the step of removing the solid substrate and a transparent electrode produced thereby. According to the present invention, a large-area flexible transparent electrode showing excellent adhesion stability of a thin film can be obtained even after repeated bending, bending and the like. The transparent electrode manufactured according to the present invention can be used for a wide range of applications, for example, it can be used in various fields such as a display, an electronic device, a sensor, a memory.

Description

Transparent electrode manufacturing method {METHOD FOR MANUFACTURING TRANSPARENT ELECTRODE}

The present invention relates to a method for manufacturing a transparent electrode and a transparent electrode produced by the same, and more particularly, by forming a thin film on a flexible polymer substrate using carbon nanotubes, the action of repeated bending, bending, etc. The present invention relates to a large-area flexible transparent electrode manufacturing method showing excellent adhesion stability of a thin film and a transparent electrode produced thereby.

Recently, in the information age based on digital technology, the development of a new futuristic display is becoming important. In particular, development of next-generation displays is actively focused on research on high-performance of flat panel displays currently commercialized, such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and organic light emitting diodes (OLEDs). It's going on.

The flexibility of the display is one of the fundamental functions required for next-generation displays because it can be bent or folded for portability. A flexible display is a display that can be bendable, rollable, and also resistant to impact, without causing any loss of display characteristics, and is a replacement for conventional displays that use rigid glass substrates. In addition, it refers to a display that can be applied to e-paper technology that cannot be implemented with existing displays.

Technical Problem

As a method of manufacturing a flexible transparent electrode for implementing a flexible display, it is preferable to form a thin film of indium tin oxide (ITO) by sputtering on a plastic substrate such as polyimide, polyester or polycarbonate. Known in the art. However, ITO thin films have excellent conductivity and transparency, but due to their inherent brittleness and deformation due to differences in coefficient of thermal expansion with the substrate, the mechanical stability of the ITO thin film when applied to a touch screen or when bending or folding the thin film is low. The problem is falling. In addition, the production of ITO thin film requires expensive equipment such as a vacuum apparatus, and includes a high temperature process in the manufacturing process, there is a problem such as a change in sheet resistance due to thermal deformation of the plastic substrate.

Due to the problems of the ITO thin film, in order to replace the transparent ITO electrode, studies using conductive polymers such as polyacetylene, polypyrrole, polyaniline, polythiophene, and the like are being actively conducted. The advantage of this conductive polymer electrode is that it is much more flexible and less brittle than the ITO electrode, so that the mechanical stability when bent or folded is very good. However, since the conductive polymer itself absorbs light in the visible light region, when the conductive polymer film is thickly coated in order to obtain an appropriate sheet resistance, the visible light transmittance of the electrode is sharply deteriorated.

On the other hand, in recent years, a method of manufacturing a flexible and transparent electrode using carbon nanotubes having both excellent conductivity and mechanical properties has been proposed.

Carbon nanotubes have a structure in which a graphene sheet, which is crystalline graphite, is wound in a tube shape, and is a new material having a diameter of about several nanometers and almost no defects. Many related studies have been conducted. In such carbon nanotubes, since electrical characteristics are sensitively changed depending on the shape and diameter of the graphite sheet wound, it is reported that various properties such as semiconductors and metals can be exhibited from the insulator. In particular, metallic carbon nanotubes exhibit very good conductivity, having a resistivity of about 10 ⁻⁴ to 10 ⁻³ μm cm. In addition to these electrical properties, carbon nanotubes have excellent mechanical properties, are chemically stable, and in the case of thin films, they are transparent in the visible region, and thus, many studies using them as transparent electrode materials have been reported. Patent 2005-0001589 discloses a method for preparing a polymer copolymer containing carbon nanotubes and coating the same on a polyester substrate to produce a transparent electrode. However, when using this method, since the carbon nanotubes are dispersed in the polymer film, a relatively large amount of carbon nanotubes are required to obtain an appropriate sheet resistance value, and the coating of the conductive polymer film on the polyester substrate There is a further disadvantage that this is necessary.

Technical Solution

The present invention is to solve the problems of the prior art as described above, an object of the present invention, it is possible to obtain excellent electrical conductivity while using a very small amount of carbon nanotubes, has a very small percolation threshold (percolation threshold), The present invention provides a method for manufacturing a flexible transparent electrode, and a transparent electrode manufactured thereby, by which the adhesion stability of the carbon nanotube thin film is remarkably improved by the interdigitation phenomenon at the interface between the carbon nanotube thin film and the polymer substrate.

According to the present invention, (1) forming a carbon nanotube thin film on a solid substrate; (2) applying a precursor capable of forming a flexible transparent substrate on the carbon nanotube thin film; (3) curing the precursor to form a flexible transparent substrate to which the carbon nanotube thin film is immobilized; And (4) there is provided a conductive transparent electrode manufacturing method comprising the step of removing the solid substrate.

In the manufacturing method of the present invention, the solid substrate may be selected from a filtration membrane, a metal substrate, an opaque inorganic substrate, a transparent inorganic substrate, and a polymer substrate. In particular, among these, as the filtration membrane, those of a material selected from the group consisting of cellulose esters such as aluminum oxide, polycarbonate, polyethylene terephthalate, cellulose nitrate or cellulose acetate, nylon, polypropylene and polyether sulfone can be used. The diameter of the membrane pores is suitably 0.01 to 10 mu m.

In addition, in the production method of the present invention, the carbon nanotubes may be selected from the group consisting of single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes, carbon nanofibers or graphite, the present invention As long as the purpose of the present invention is not impaired, the production method is not particularly limited, and for example, chemical vapor deposition, arc discharge, and laser ablation may be selected. It can also be purchased and used.

In addition, the carbon nanotube thin film is preferably formed so that the thickness is 1nm to 100nm, if the thickness is less than 1nm, it is insufficient to obtain the desired conductivity, if it exceeds 100nm, there is a fear that the light transmittance of the electrode is lowered There is. In addition, the carbon nanotubes may be of a type substituted with metal nanoparticles such as gold, silver or copper in order to increase the electrical conductivity thereof.

In addition, in the manufacturing method of the present invention, the precursor capable of forming the flexible transparent substrate, polydimethylsiloxane (polydimethylsiloxane, PDMS), polyepoxide, polyacrylate, polyimide, polyester, polycarbonate, cellulose Precursors that can form transparent and flexible polymer-based materials or flexible glass materials, such as acetates, polystyrenes, polyolefins, polymethacrylates, polysulfones, polyethersulfones, polyvinylacetates, soft glass, etc., preferably poly Such as dimethylsiloxane (polydimethylsiloxane, PDMS), polyepoxide, polyacrylate, polyimide, polyester, polycarbonate, cellulose acetate, polystyrene, polyolefin, polymethacrylate, polysulfone, polyethersulfone or polyvinylacetate Thermoset, photocurable or thermoplastic poly Of the monomer.

On the other hand, in the manufacturing method of the present invention, the carbon nanotube thin film formed on the solid substrate in the step (1), vacuum filtration (vacuum filtration) method, self-assembly method, Langmuir-Bazette (Langmuir-Blodgett) method, solution casting method, bar coating method, dip coating method, spin coating method, spray coating method and roll-to-roll method It may be performed by a method selected from the group consisting of a roll-to-roll method.

In the manufacturing method of the present invention, in the step (2), the coating of the precursor capable of forming a flexible transparent substrate on the carbon nanotube thin film may be performed by a bar coating method or a dip coating method. ), A spin coating method, a spray coating method and a roll-to-roll method.

In addition, in the manufacturing method of the present invention, the curing of the precursor in the step (3), for example, may be carried out by cooling, by a curing agent, by heat, by ultraviolet irradiation, or by volatilization of the solvent. .

In addition, in the manufacturing method of the present invention, the removal of the solid substrate in step (4) may be performed by mechanical peeling or by dissolving the solid substrate with a suitable solvent.

According to a preferred embodiment of the present invention as shown in FIG. 1, in step (1), an aluminum oxide filtration membrane is used as the solid substrate, and a monomer of polydimethylsiloxane (PDMS) is used as a precursor of the flexible transparent substrate. In the case of use, the preparation of the transparent electrode is carried out as follows.

First, Triton X-100, sodium salt of dodecylbenzenesulfonic acid (Na-DDBS), cetyltrimethyl ammonium bromide (CTAB), or sodium dodecyl sulfate (SDS) Carbon nanotubes are added to an aqueous solution in which the surfactant is dissolved, and ultrasonic waves are added to prepare a 0.001 to 0.1% by weight aqueous carbon nanotube dispersion solution that maintains a stable dispersion state. Alternatively, in the same way, N-methylpyrrolidone (NMP, N-Methylpyrrolidone), o-dichlorodoenzene, dichloroethane, dimethylformamide (DMF), chloroform and the like It is also possible to prepare and use a carbon nanotube organic dispersion solution dispersed in a stable and tangled state using an organic solvent.

When the aqueous dispersion or organic dispersion solution of carbon nanotubes prepared as described above is filtered using a vacuum filtration device equipped with an aluminum oxide filtration membrane 1 as a solid substrate, a thin film of carbon nanotubes 2 is obtained. This is formed on the filtration membrane 1. The thickness of the thin film 2 to be formed can be easily adjusted by adjusting the amount of the carbon nanotube dispersion solution to be filtered. At this time, when a patterned object (for example, a TEM grid) is placed on the aluminum oxide filtration membrane 1, and the carbon nanotube dispersion solution is filtered, the flow of the dispersion is partially blocked, resulting in patterned carbon nanoparticles. Tube thin films may also be obtained on the filtration membrane.

After the filtration is completed, if an aqueous dispersion solution of carbon nanotubes is used, a thin film formed on the filtration membrane 1 using a sufficient amount of water to remove the surfactant remaining in the carbon nanotubes thin film 2 ( 2) is further cleaned. After filtration, the membrane on which the carbon nanotube thin film is formed is dried in an oven or the like.

Next, in order to transfer the carbon nanotube thin film 2 onto the flexible transparent PDMS substrate, a monomer of polydimethylsiloxane (PDMS) capable of thermosetting on top of the carbon nanotube thin film formed on the dried membrane (3) Is applied by a bar coating method, which is cured in an oven. At this time, the PDMS substrate may be manufactured according to a known method (eg, the method disclosed in Langmuir 1994, 10, 1498).

After the PDMS curing, the aluminum oxide filtration membrane 1 is removed in an aqueous NaOH solution, whereby a transparent electrode in which a thin film 2 of carbon nanotubes is formed on the PDMS flexible transparent substrate 3 can be obtained.

Meanwhile, according to another embodiment of the present invention, the method of the present invention, between the steps (1) and (2), polyacetylene by an electrochemical method on top of the carbon nanotube thin film formed on the solid substrate The method may further include growing a thin film of a conductive polymer such as polypyrrole, polyaniline, and polythiophene. In this embodiment, the carbon nanotube thin film having the thin film of the conductive polymer grown thereon as described above is immobilized on the flexible transparent substrate in a later step.

According to the present invention, in order to improve the electrical characteristics of the transparent electrode using the existing carbon nanotubes, first to form a thin film of carbon nanotubes on a solid substrate, the flexible transparent substrate can be formed on the carbon nanotube thin film After coating the precursor and curing the precursor, the solid substrate is peeled off or melted with an appropriate solvent to prepare a transparent electrode on which a thin film of carbon nanotubes is immobilized on a flexible transparent substrate.

In the present invention, since carbon nanotubes exist only on the surface of the transparent polymer substrate in the form of a film, a transparent electrode having an efficient conductivity can be manufactured even with a small amount of carbon nanotubes. In addition, as the precursor of the flexible transparent substrate is coated and cured while the solid substrate supports the carbon nanotube thin film, the carbon nanotube thin film may be formed by interdigitation at the interface of the carbon nanotube / flexible transparent substrate. There is an advantage that the adhesion stability is significantly improved.

Therefore, according to the present invention, in addition to minimizing the amount of carbon nanotubes used in the production of transparent carbon nanotube electrodes, it is possible to prevent a decrease in the conductivity generated when the carbon nanotubes are dispersed in the polymer, thereby providing additional conductivity. Good conductivity can be obtained without a coating of the polymer thin film.

Advantageous Effects

The main difference between the method according to the invention and the method according to the prior art is as follows. That is, the conventional method of coating the carbon nanotube dispersion solution on the polymer substrate has a problem that the thin film of the carbon nanotubes is not uniform and the adhesion stability of the thin film is very low, making it impossible to manufacture a large-area electrode substrate. there was.

However, in the present invention, first, a uniform thin film of carbon nanotubes is prepared on a solid substrate by a method such as vacuum filtration or Langmuir-Blozet method, and then a transparent polymer substrate is placed on top of the thin film of carbon nanotubes. By forming by curing, the adhesion stability of the thin film to the polymer substrate can be significantly increased. In addition, according to the present invention, since carbon nanotubes exist only on the surface of the transparent electrode, it is possible to manufacture a flexible transparent electrode having excellent electrical conductivity while using a very small amount of carbon nanotubes of about 1 µg / cm 2.

1 is a view schematically showing a method for manufacturing a transparent electrode according to an embodiment of the present invention.

2 is a photograph showing that in Example 1 of the present invention, the transparency of the transparent electrode can be easily adjusted by adjusting the amount of the carbon nanotube dispersion solution.

3 is a photograph showing the flexibility of the transparent electrode produced in Example 1 of the present invention.

4 is a photograph showing a pattern of a patterned transparent electrode prepared in Example 4 of the present invention.

[Description of Symbols in Drawing]

1: solid substrate

2: carbon nanotube thin film

3: precursor capable of forming a flexible transparent substrate

Mode for Invention

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. These examples are merely for illustrative purposes only to specifically describe the present invention, and it should be understood that the scope of the present invention is not limited to these examples.

Example 1

0.001% by weight of carbon nanotube dispersion, in which 10 mg of single-walled carbon nanotubes (manufactured by Iljin Nanotech) was added to a 1 L aqueous solution in which 1 g of Triton X-100 was dissolved as a surfactant and a 60 Hz ultrasonic wave was applied to maintain a stable dispersion state. An aqueous solution was prepared.

1 ml of the aqueous dispersion solution of carbon nanotubes prepared as described above was filtered using a vacuum filtration apparatus equipped with an aluminum oxide filtration membrane, thereby forming a uniform thin film of carbon nanotubes on the filtration membrane. The formed carbon nanotube thin film was washed with a sufficient amount of water, and the membrane on which the carbon nanotube thin film was formed was dried in an oven.

Next, according to the method disclosed in Langmuir 1994, 10, 1498, a monomer of polydimethylsiloxane (PDMS) is applied by the bar coating method on top of the carbon nanotube thin film formed on the dried membrane, and this in a 65 ℃ oven Cured.

After PDMS curing, the aluminum oxide filtration membrane was removed in 3M NaOH aqueous solution to obtain a transparent electrode on which a thin film of carbon nanotubes was formed on a PDMS flexible transparent substrate. In the obtained carbon nanotube thin film on the transparent electrode, the amount of carbon nanotubes per unit area was about 1 µg / cm 2.

For the transparent electrode produced as described above, the transmittance measured using an ultraviolet-visible spectrometer was about 90%. In addition, the sheet resistance of the transparent electrode measured using a surface resistance meter was less than 100 kHz / sq.

On the other hand, to determine the transparency of the transparent electrode according to the thickness of the carbon nanotube thin film, using the 0.5, 1.0, 1.5, 2.0 and 2.5ml of the water dispersion solution of the carbon nanotube, the transparent electrodes are prepared in the same manner as described above The photographs are arranged in order from the left side in FIG. 2. According to Figure 2, by controlling the amount of the carbon nanotube dispersion solution it is possible to control the thickness of the carbon nanotube thin film, it can be seen that the transparency of the transparent electrode can be easily adjusted accordingly.

In addition, the photo which shows the flexibility of the transparent electrode obtained by the present Example was shown in FIG. According to Figure 3, it can be seen that the transparent electrode obtained in this embodiment has very excellent flexibility.

As described above, it can be seen that the transparent electrode manufactured in this embodiment is very excellent in its transparency, conductivity, flexibility, and adhesion stability of the carbon nanotube thin film.

Example 2

A chloroform solution containing 0.001% by weight of carbon nanotubes was prepared, spread over a surface of water in Langmuir-Blodgett (LB) troughs, and after vaporizing the solvent, the surface of the surface of the surface was pushed by pushing the barrier. Gradually decrease to obtain a carbon nanotube Langmuir film, and transfer the Langmuir film to a silicon or glass substrate to obtain a carbon nanotube thin film using a Langmuir-Blodgett (LB) method Except for forming a thin film, a transparent electrode having a carbon nanotube thin film was prepared in the same manner as in Example 1. In the prepared transparent electrode, the thickness of the carbon nanotube thin film was about 30nm.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. As a result of the evaluation, the transmittance measured using an ultraviolet-visible spectrometer was about 95%, the sheet resistance was less than 200 mW / sq, and it was shown to have a similar level of flexibility as the electrode of Example 1.

Example 3

A transparent electrode on which a carbon nanotube thin film was formed in the same manner as in Example 1, except that a polyacrylate monomer was applied by spin coating to the upper portion of the carbon nanotube thin film formed on the membrane and cured by ultraviolet rays. Was prepared. In the prepared transparent electrode, the amount of carbon nanotubes per unit area of the carbon nanotube thin film was about 1 µg / cm 2.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. The evaluation resulted in a similar level of transparency, conductivity and flexibility as the electrode of Example 1.

Example 4

On the top of the carbon nanotube thin film formed on the membrane, polymethacrylate dissolved in chloroform was applied by spin coating, and the carbon nanotube was hardened by volatilization of the solvent. A transparent electrode on which a tube thin film was formed was prepared. In the prepared transparent electrode, the amount of carbon nanotubes per unit area of the carbon nanotube thin film was about 1 µg / cm 2.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. The evaluation resulted in a similar level of transparency, conductivity and flexibility as the electrode of Example 1.

Example 5

In order to obtain the patterned carbon nanotube thin film on the filtration membrane, the same method as in Example 1 was carried out except that the patterned 300 mesh TEM grid was placed on the aluminum oxide filtration membrane and the carbon nanotube dispersion solution was filtered. The transparent electrode on which the patterned carbon nanotube thin film was formed was prepared.

A photograph of the prepared patterned transparent electrode is shown in FIG. 4.

Example 6

Except that the conductive polymer thin film of polyaniline was further grown and dried on top of the carbon nanotube thin film formed on the filtration membrane by an electrochemical method known in Diamond and Related Materials, 2004, 13, 256, By the same method as in Example 1, a transparent electrode having a carbon nanotube thin film was prepared.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. As a result of the evaluation, the transmittance measured using an ultraviolet-visible spectrometer was about 85%, the sheet resistance was less than 50 mA / sq, and it was shown to have a similar level of flexibility as the electrode of Example 1. According to this embodiment, in the case of the carbon nanotube thin film additionally coated with a polyaniline conductive polymer, it can be seen that the electrical conductivity is improved without a significant decrease in the transmittance.

Example 7

The conductive polymer thin film of polyaniline was additionally grown on the carbon nanotube thin film formed by the Langmuir-Bloze method by an electrochemical method known in Diamond and Related Materials, 2004, 13, 256, and dried. By the same method as in Example 3, a transparent electrode on which a carbon nanotube thin film was formed was manufactured.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. As a result of the evaluation, the transmittance measured using an ultraviolet-visible spectrometer was about 85%, the sheet resistance was less than 50 mA / sq, and it was shown to have a similar level of flexibility as the electrode of Example 1. According to this embodiment, in the case of the carbon nanotube thin film additionally coated with a polyaniline conductive polymer, it can be seen that the electrical conductivity is improved without a significant decrease in the transmittance.

Example 8

Carbon nanotubes were substituted with nanoparticles of gold, silver or copper (certain required) using methods known to Langmuir 2000, 18, 3569. The shape of carbon nanotubes substituted with metal nanoparticles and the distribution of nanoparticles were confirmed by AFM (Atomic Force Microscope). Using the carbon nanotubes substituted with the metal nanoparticles prepared above, in the same manner as in Example 1, a transparent electrode having a carbon nanotube thin film substituted with metal nanoparticles was prepared.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. The evaluation resulted in a similar level of transparency, conductivity and flexibility as the electrode of Example 1.

Example 9

Carbon nanotubes were substituted with nanoparticles of gold, silver or copper (certain required) using methods known to Langmuir 2000, 18, 3569. The shape of carbon nanotubes substituted with metal nanoparticles and the distribution of nanoparticles were confirmed by AFM (Atomic Force Microscope). Using the carbon nanotubes substituted with the metal nanoparticles prepared above, in the same manner as in Example 2, a transparent electrode having a carbon nanotube thin film substituted with metal nanoparticles was prepared.

The transparency, conductivity and flexibility of the prepared transparent electrode were evaluated in the same manner as in Example 1. The evaluation resulted in similar level of transparency, conductivity and flexibility as the electrode of Example 2.

As described above, according to the present invention, a flexible and transparent large area electrode having excellent optical properties can be provided. The transparent electrode manufactured according to the present invention can be used for a wide range of purposes, for example, it can be used in various fields such as a display, an electronic device, a sensor, a memory, and specifically, a liquid crystal display (LCD), a plasma display Display devices such as a device panel (PDP), an organic EL display device (OELD), and a field emission display device (FED); Electronic devices such as electrostatic green substrates, photoelectric conversion devices, resistors, and thin film composite circuits; Sensors such as light sensors, infrared sensors, pressure sensors and biochemical sensors; Memory such as ferroelectric memory and thermoplastic recording; It can be applied to other antistatic, electromagnetic shielding, battery electrode, etc.

Claims (13)

(1) forming a carbon nanotube thin film on a solid substrate; (2) applying a precursor capable of forming a flexible transparent substrate on the carbon nanotube thin film; (3) curing the precursor to form a flexible transparent substrate to which the carbon nanotube thin film is immobilized; And (4) removing the solid substrate. The method of claim 1, wherein the solid substrate is selected from a filtration membrane, a metal substrate, an opaque inorganic substrate, a transparent inorganic substrate, and a polymer substrate. The filtration membrane of claim 2, wherein the filtration membrane is of a material selected from the group consisting of cellulose esters such as aluminum oxide, polycarbonate, polyethylene terephthalate, cellulose nitrate or cellulose acetate, nylon, polypropylene and polyethersulfone, and the filtration membrane The pore diameter of the conductive transparent electrode manufacturing method, characterized in that 0.01 to 10㎛. The method of claim 1, wherein the carbon nanotubes are at least one selected from the group consisting of single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes, carbon nanofibers, or graphite. . The method of claim 1, wherein the carbon nanotubes are substituted with nanoparticles of gold, silver, or copper metal. The method of claim 1, wherein the precursor capable of forming the flexible transparent substrate is polydimethylsiloxane, polyepoxide, polyacrylate, polyimide, polyester, polycarbonate, cellulose acetate, polystyrene, polyolefin, polymethacryl A method for producing a conductive transparent electrode, characterized in that the monomer capable of forming a rate, polysulfone, polyether sulfone or polyvinylacetate. The method of claim 1, wherein in the step (1), the carbon nanotube thin film is formed on the solid substrate by vacuum filtration, self-assembly, Langmuir-Blozet, solution casting, bar coating, dip coating, or spin. A method of manufacturing a conductive transparent electrode, characterized in that carried out by a method selected from the group consisting of a coating method, a spray coating method and a roll-to-roll method. The method of claim 1, wherein in the step (1), the carbon nanotube thin film is formed on the solid substrate by using Triton X-100, sodium salt of dodecylbenzenesulfonic acid, cetyl trimethyl ammonium bromide or sodium dodecyl sulfate as a surfactant. Containing, 0.001 to 0.1% by weight of a conductive transparent electrode manufacturing method characterized in that it is carried out using an aqueous solution in which carbon nanotubes are dispersed. The method of claim 1, wherein the formation of the carbon nanotube thin film on the solid substrate in the step (1) comprises N-methylpyrrolidone, o-dichlorobenzene, dichloroethane, dimethylformamide or chloroform as a solvent. Method for producing a conductive transparent electrode, characterized in that carried out using an organic solution in which 0.01 to 0.1% by weight of carbon nanotubes are dispersed. The method of claim 1, wherein the coating of the precursor capable of forming a flexible transparent substrate on the carbon nanotube thin film in the step (2) is performed by a bar coating method, an immersion coating method, a spin coating method, a spray coating method, and a roll-to-roll method. A method for producing a conductive transparent electrode, characterized in that carried out by a method selected from the group consisting of a roll method. The conductive transparent electrode of claim 1, wherein the curing of the precursor in step (3) is performed by cooling, by curing agent, by heat, by ultraviolet irradiation, or by volatilization of a solvent. Way. The method of claim 1, wherein the removing of the solid substrate in step (4) is performed by mechanical peeling or by dissolving the solid substrate by a solvent. delete

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