KR100855070B1 - Roll patterning device - Google Patents

Abstract

A roll patterning apparatus is provided to align correctly a roll and a mask by moving a supporting plate including the mask and a light source lamp to a stage. A roll(100) as a patterning target is loaded into a chuck(10). A roll motor(20) is formed to rotate the roll. A supporting plate(30) is formed at one side of the roll to support a mask(200). A light source lamp(300) is installed at the supporting plate. The light source lamp is installed at an opposite side of the roll on the basis of the mask. A stage(40) is formed to move the mask in x, y, and z axis directions with respect to the roll. The chuck includes a first and second chucks(11,12) which are positioned at both ends of a longitudinal direction of the roll.

Description

Roll Patterning Device {ROLL PATTERING DEVICE}

The present invention relates to a roll patterning apparatus, and more particularly, to a roll patterning apparatus for patterning the curved surface of the rolls in the case of repeatedly patterning by replacing a plurality of rolls.

Lithography is a method of patterning a semiconductor substrate. Lithographic methods are techniques for forming fine patterns in integrated circuits.

For example, lithography methods are classified into photolithography methods using light, electron beam lithography methods using electron beams, and X-ray lithography methods using X-rays.

The photolithography method uses ultraviolet light as an exposure source and optionally uses a photo mask that transmits ultraviolet light.

The photolithography method includes a process of forming a photoresist film by applying a photoresist to a substrate, exposing the photoresist film by passing ultraviolet rays through a mask on which a pattern is drawn, and developing a exposed portion of the photoresist film. .

The substrate targeted for pattern formation is formed in a plane such as a wafer or LCD glass. Therefore, the conventional exposure apparatus is configured to expose a planar substrate and was not suitable for patterning curved surfaces.

Recent technological trends, however, are printing patterned flexible substrates or printing in roll-to-roll continuous processes for mass production. For this reason, the roll which formed the fine pattern in the curved surface is needed, and the apparatus which patterns the curved surface of a roll is calculated | required.

The conventional exposure apparatus forms a narrow gap between the mask and the substrate, making it difficult to mount a roll having a curved surface with a diameter larger than the thickness of the planar substrate under the mask. In addition, since a roll is fixed even if a roll is mounted under a mask, only a part of roll is patterned.

In addition, when the roll is mounted and manually rotated, the curved surface of the roll is unevenly patterned due to the nonuniformity of the rotational speed of the roll. Even if accidentally patterning one roll uniformly, when repeatedly patterning while replacing the plurality of rolls, curved surfaces of the plurality of rolls are not patterned identically.

The present invention relates to a roll patterning device for patterning the curved surface of the rolls in the case of repeatedly patterning by replacing a plurality of rolls.

Roll patterning device according to an embodiment of the present invention, the interlocking chuck for mounting the patterning target roll, the roll motor for rotating the roll, support the mask on one side of the roll, on the opposite side of the roll on the basis of the mask It may include a support for mounting the light source lamp provided, and a stage for moving the mask in the x, y, z-axis direction with respect to the roll.

The linkage chuck may include a first linkage chuck and a second linkage chuck provided at both ends of the roll in the longitudinal direction to hold both ends of the roll.

The support may include a first support member forming a through portion at a center thereof to support the mask while passing ultraviolet rays of the light source lamp through the mask, and a second support member for mounting the light source lamp while supporting the first support member. It may include.

The first support member and the second support member may be coupled to a slide rail for moving the first support member in the y-axis direction on the second support member.

The second support member may include a lamp guide for mounting the light source lamp for irradiating ultraviolet rays toward the mask.

The support may include a vision camera to check the alignment of the roll and the mask.

The stage is connected to the support and the z stage for elevating the support in the z-axis direction, the x stage is connected to the z stage to move the z stage in the x-axis direction, and the x stage is connected to the x It may include a y stage for moving the stage in the y-axis direction.

The z stage is a first z-axis member installed on the x stage in the z-axis direction, a second z-axis member coupled to the first z-axis member by a slide rail, and a z spiral on the first z-axis member. A z lead screw coupled to the groove, and a z motor for driving the z lead screw.

The x stage, the first x-axis member installed in the x-axis direction between the z stage and the y stage, the second x-axis member coupled to the first x-axis member by a slide rail, the first x-axis member An x lead screw coupled to the x helix groove, and the x motor for driving the x lead screw.

The y stage is a first y-axis member installed in the y-axis direction under the x stage, a second y-axis member coupled to the first y-axis member by a slide rail, and a y spiral groove in the first y-axis member. It may include a y lead screw coupled to, and a y motor for driving the y lead screw.

The second x-axis member and the first y-axis member may be integrally formed or integrally coupled.

The mask may be installed under the roll. The support may be installed under the mask, and the stage may be installed under the support.

As described above, according to one embodiment of the present invention, since the support on which the mask and the light source lamp are mounted is moved to the stage while the roll to be patterned is mounted by the interlocking chuck and rotated by the roll motor, the roll and the mask are aligned correctly. In addition, even in the case of repeatedly patterning while replacing the rolls, there is an effect of equally patterning the curved surface of the plurality of rolls.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like elements throughout the specification.

1 is an exploded perspective view of a roll patterning device according to an embodiment of the present invention, Figure 2 is a cross-sectional view of the roll patterning device of FIG.

1 and 2, the roll patterning apparatus may transfer the pattern of the mask 200 to the curved surface of the roll 100, and also in case of repeatedly patterning the plurality of rolls 100, each roll 100. It is configured to form the pattern on the curved surface of the same).

For example, the roll patterning apparatus according to the embodiment includes a linkage chuck 10, a roll motor 20, a light source lamp 300, a support 30, and a stage 40. The interlock chuck 10 mounts and rotates a roll 100 having a curved surface to be patterned, and facilitates centering of the roll 100 to be rotated.

The roll 100 has a diameter and a length, and is mounted to the interlock chuck 10, and when rotating together with the interlock chuck 10, sagging at one end is prevented to enable precise patterning. To this end, the interlock chuck 10 is formed of a first interlock chuck 11 and a second interlock chuck 12 disposed to face each other.

The first linkage chuck 11 and the second linkage chuck 12 are provided at both ends of the length direction of the roll 100 to hold both ends of the roll 100, respectively, and rotate together with the roll 100.

The roll motor 20 is provided on one side of the roll 100 and is connected to one of the first interlock chuck 11 and the second interlock chuck 12, and rotates the linked interlock chuck 100. In this embodiment, the roll motor 20 is connected to the first link chuck 11 to rotate the first link chuck 11. As the roll motor 20 is driven, the first link chuck 11, the second link chuck 12, and the rolls 100 mounted thereon rotate integrally.

The first interlocking chuck 11 and the second interlocking chuck 12 are rotatably mounted to a frame (not shown) provided separately, and the roll motor 20 can rotate the first interlocking chuck 11. It is mounted on the frame.

The mask 200 and the light source lamp 300 may be installed above, below, or before and after the roll 100, but in the present embodiment, the mask 200 and the light source lamp 300 may be installed below the roll 100.

Therefore, the support 30 for supporting the mask 200 and the light source lamp 300 is installed under the mask 200, and the stage 40 for moving the support 30 is installed under the support 30.

The roll patterning apparatus is installed in the vertical direction, that is, the mask 200 and the light source lamp 300 and the support 30 and the stage 40 for supporting and moving the mask 200 are installed under the patterning target roll 100. In the overall vibration is reduced, a stable structure can be formed.

The support 30 is installed parallel to the roll 100 under the roll 100, and supports the mask 200 provided in close proximity to the bottom of the roll 100. In addition, the support 30 mounts the light source lamp 300 provided on the opposite side of the roll 100 based on the mask 200.

Therefore, the ultraviolet rays emitted from the light source lamp 300 are irradiated onto the roll 100 through the pattern of the mask 200 to expose the curved surface of the roll 100 in the same pattern as the mask 200 pattern.

For example, the support 30 may include a first support member 31 for supporting the mask 200 in response to the mask 200, and a second support for the light source lamp 300 in response to the light source lamp 300. It is composed of a support member (32).

The first support member 31 forms a through portion 31a at the center thereof to support the mask 200. The penetrating portion 31a passes the ultraviolet rays emitted from the light source lamp 300 through the first support member 31 to reach the mask 200.

The first support member 31 has a position fixing member 33 formed outside the through part 31a. The position fixing member 33 fixes the position of the mask 200 placed on the first supporting member 31 with respect to the penetrating portion 31a.

The second support member 32 supports the light source lamp 300 to correspond to the penetrating portion 31a while supporting the light source lamp 300.

3 is a perspective view of a light source lamp and a lamp guide, and FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 3.

3 and 4, the second support member 32 includes a lamp guide 34 for mounting a light source lamp 300 for irradiating ultraviolet rays toward the mask 200. The lamp guide 34 is formed to have a structure that is open upward to focus the ultraviolet light emitted from the light source lamp 300 in a straight state to irradiate the mask 200.

Ultraviolet rays irradiated from the light source lamp 300 and irradiated to the mask 200 through the lamp guide 34 are formed in a straight state to be irradiated in a straight line along the longitudinal direction to the curved surface of the roll 100, The curved surface is exposed in a straight line state.

Therefore, the ultraviolet light emitted from the light source lamp 300 through the lamp guide 34 and passing through the mask 200 is not diffracted at the curved surface of the roll 100.

The first support member 31 and the second support member 32 may be coupled to the slide rail 35 to be relatively moved in a direction orthogonal to the length direction (x-axis direction) of the roll 100 (y-axis direction). have.

The slide rail 35 facilitates alignment of the light source lamp 300 with respect to the mask 200 by moving the first support member 31 in the y-axis direction on the second support member 32.

The stage 40 is formed to move the mask 200 in the x, y, and z axis directions with respect to the roll 100. The z-axis direction means the height direction with respect to the roll 100.

For example, the stage 40 is connected to the support 30 so that the mask 200 and the light source lamp 300 can be aligned with respect to the roll 100 as the support 30 moves. do.

The stage 40 is formed including the z stage 41, the x stage 42 and the y stage 43. The z stage 41 is connected to the support 30 to raise and lower the support 30 in the z-axis direction. The x stage 42 is connected to the z stage 41 to move the z stage 41 in the x axis direction. The y stage 43 is connected to the x stage 42 to move the x stage 42 in the y axis direction.

FIG. 5 is a cross-sectional view taken along the line VV of the z stage in the stage of FIG. 1, and FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG.

5 and 6, the z stage 41 includes a first z axis member 411, a second z axis member 412, a z lead screw 413, and a z motor 414.

The first z-axis member 411 is installed in the z-axis direction on the x stage 42 and connected to the second support member 32 of the support 30. As the first z-axis member 411 moves up and down, the second support member 32 and the support stand 30 move up and down in the z-axis direction to adjust the gap between the mask 200 and the roll 100.

The second z-axis member 412 is coupled to the slide rail 415 to the first z-axis member 411. The second z-axis member 412 supports the lifting of the first z-axis member 411. The second z-axis member 412 is fixed to the x-stage 42 and moved integrally with the x-stage 42 in the x-axis direction.

The z lead screw 413 is coupled to the z spiral groove 411 a of the first z axis member 411, and the z motor 414 is connected to the z lead screw 413. As the z motor 414 is driven, the z lead screw 413 is driven, and the first z axis member 411 coupled to the z spiral groove 411 a is lifted.

FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 1, and FIG. 8 is a cross sectional view taken along the line VII-VII of FIG.

7 and 8, the x stage 42 includes a first x axis member 421, a second x axis member 422, an x lead screw 423, and an x motor 424.

The first x-axis member 421 is installed in the x-axis direction between the z stage 41 and the y stage 43. The first x-axis member 421 is fixedly connected to the second z-axis member 412 of the z stage 41. As the first x-axis member 421 moves in the x-axis direction, the second z-axis member 412 is moved in the x-axis direction so that the mask 200 and the roll 100 are aligned in the x-axis direction.

The second x-axis member 422 is coupled to the first x-axis member 421 as a slide rail 425. The second x-axis member 422 supports the movement of the first x-axis member 421. The second x-axis member 422 is coupled to the y stage 43.

The x lead screw 423 is coupled to the x spiral groove 421 a of the first x axis member 421, and the x motor 424 is connected to the x lead screw 423. As the x motor 424 is driven, the x lead screw 423 is driven, and the first x axis member 421 coupled to the x spiral groove 421 a is moved.

FIG. 9 is a cross-sectional view taken along the line VII-VII of the y stage of FIG. 1, and FIG. 10 is a cross sectional view taken along the line VII-VII of FIG.

9 and 10, the y stage 43 includes a first y-axis member 431, a second y-axis member 432, a y lead screw 433, and a y motor 434.

The first y-axis member 431 is installed in the y-axis direction below the x stage 42. The first y-axis member 431 is fixedly connected to the second x-axis member 422. As the first y-axis member 431 moves in the y-axis direction, the second x-axis member 422 is moved in the y-axis direction so that the mask 200 and the roll 100 are aligned in the y-axis direction.

The second y-axis member 432 is coupled to the first y-axis member 431 as a slide rail 435. The second y-axis member 432 supports the movement of the first y-axis member 431. The second y-axis member 432 is placed on the bottom and forms the base of the roll patterning device.

The y lead screw 433 is coupled to the y helix groove 431a of the first y axis member 431, and the y motor 434 is connected to the y lead screw 433. As the y motor 434 is driven, the y lead screw 433 is driven, and the first y axis member 431 coupled to the y spiral groove 431a is moved.

In the stage 40, the second x-axis member 422 and the first y-axis member 431 may be integrally formed or separately formed and combined.

On the other hand, the support 30 may be provided with a vision camera 50 for checking the alignment of the roll 100 and the mask 200. The vision camera 50 is mounted on both sides of the fluorescent lamp 300 on the second support member 32, respectively.

When the mask 200 is placed on the support 30 and the stage 40 is moved in the x, y, z axis directions to align the mask 200 with respect to the roll 100, the vision camera 50 rolls. Alignment is enabled while checking the position of the mask 200 relative to 100.

FIG. 11 is a block diagram of controlling the roll patterning apparatus of FIG. 1.

Referring to FIG. 11, the vision camera 50 is connected to a controller 51 provided separately. The signal of the vision camera 50 automatically controls the stage 40 connected to the control unit 51 to enable alignment of the mask 200 with respect to the roll 100, and to control the roll motor 20. To control the rotational speed of the roll 100.

In addition, the signal of the vision camera 50 is displayed on the display device 52, and while performing the manual operation of the stage 40, the alignment of the mask 200 with respect to the roll 100 is possible.

As described above, the roll patterning apparatus according to the embodiment mounts the patterning target roll 100 on the linkage chuck 10, moves the mask 200 and the light source lamp 300 to the stage 40, and the roll motor. The roll 100 is patterned while rotating the roll 100 by 20.

Therefore, the stage 40 is controlled by the control unit 51 to make the interval between the roll 100 and the mask 200 constant, and control the rotational speed of the roll 100 by the roll motor 20 to replace the plurality The rolls 100 may be repeatedly transferred to the curved surface in the same manner as the pattern of the mask 200.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

1 is an exploded perspective view of a roll patterning device according to an embodiment of the present invention.

2 is a cross-sectional view of the roll patterning device of FIG.

3 is a perspective view of a light source lamp and a lamp guide;

4 is a cross-sectional view taken along line IV-IV of FIG. 3.

5 is a cross-sectional view taken along the line VV of the z stage in the stage of FIG.

FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 5.

FIG. 7 is a cross-sectional view taken along line VII-VII of the x stage of FIG.

8 is a cross-sectional view taken along the line VII-VII of FIG. 7.

9 is a cross-sectional view taken along the line VII-VII of the y stage of FIG.

10 is a cross-sectional view taken along the line VII-VII of FIG. 9.

FIG. 11 is a block diagram of controlling the roll patterning apparatus of FIG. 1.

<Explanation of symbols for the main parts of the drawings>

100: roll 200: mask

300: light source lamp 10: interlock chuck

11, 12: 1st, 2nd interlock chuck 20: roll motor

30: support 40: stage

31, 32: 1st, 2nd support member 31a: Through part

33: position fixing member 34: lamp guide

35: slide rails 41, 42, 43: z, x, y stage

411, 412: First and second z-axis members 411a, 421a, 431a: z, x, y spiral groove

413, 423, 433: z, x, y lead screw 414, 424, 434: z, x, y motor

415, 425, 435: slide rails 421, 422: first and second x-axis members

431, 432: first and second y-axis member 50: vision camera

51 control unit 52 display device

Claims (13)

An interlock chuck for mounting a patterning target roll; A roll motor for rotating the roll; A support for supporting a mask on one side of the roll and mounting a light source lamp provided on an opposite side of the roll with respect to the mask; And And a stage for moving said mask in x, y, z-axis directions relative to said roll. According to claim 1, The interlock chuck, Roll patterning device comprising a first linkage chuck and a second linkage chuck provided on both ends of the roll in the longitudinal direction to hold both ends of the roll. According to claim 1, The support is, A first support member forming a through portion at a center thereof to support the mask while passing ultraviolet rays of the light source lamp through the mask; And a second support member for mounting the light source lamp while supporting the first support member. The method of claim 3, wherein The first support member and the second support member, Roll patterning device coupled to the slide rail for moving the first support member in the y-axis direction on the second support member. The method of claim 3, wherein The second support member, And a lamp guide for mounting the light source lamp for irradiating ultraviolet rays toward the mask. According to claim 1, The support is, Roll patterning device comprising a vision camera for checking the alignment of the roll and the mask. According to claim 1, The stage, A z stage connected to the support for elevating the support in the z-axis direction; An x stage connected to the z stage to move the z stage in the x-axis direction, and And a y stage connected to the x stage to move the x stage in the y-axis direction. The method of claim 7, wherein The z stage, A first z-axis member installed in the z-axis direction on the x stage; A second z-axis member coupled to the first z-axis member by a slide rail; A z-lead screw coupled to a z spiral groove on the first z-axis member, and Roll patterning device comprising a z motor for driving the z lead screw. The method of claim 7, wherein The x stage, A first x-axis member installed in the x-axis direction between the z stage and the y stage, A second x-axis member coupled to the first x-axis member by a slide rail; An x-lead screw coupled to the x spiral groove on the first x-axis member, and Roll patterning device comprising a x motor for driving the x lead screw. The method of claim 7, wherein The y stage, A first y-axis member installed in the y-axis direction under the x stage; A second y-axis member coupled to the first y-axis member by a slide rail, A y lead screw coupled to the y spiral groove on the first y axis member, and Roll patterning device comprising a y motor for driving the y lead screw. The method of claim 7, wherein The x stage, A first x-axis member installed in the x-axis direction between the z stage and the y stage, A second x-axis member coupled to the first x-axis member by a slide rail; An x-lead screw coupled to the x spiral groove on the first x-axis member, and It includes an x motor for driving the x lead screw, The y stage, A first y-axis member installed in the y-axis direction under the x stage; A second y-axis member coupled to the first y-axis member by a slide rail, A y lead screw coupled to the y spiral groove on the first y axis member, and It includes a y motor for driving the y lead screw, And the second x-axis member and the first y-axis member are integrally formed or integrally coupled. According to claim 1, And the mask is installed under the roll. According to claim 1, The support is installed under the mask, The stage is roll patterning device is installed under the support.

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