KR100840154B1 - Magnetic circuit measuring device and magnetic circuit measuring method using the same - Google Patents

Abstract

A magnetic circuit measuring device and a magnetic circuit measuring method using the same are provided to obtain a precise measurement result by measuring the whole range of a magnetic circuit and to shorten the measuring time by measuring the position and size of the magnetic circuit and a Gauss value at the same time. In a magnetic circuit measuring device, a stage(100) places a magnetic circuit(600). A horizontally and vertically moving unit(700) is installed on the stage and moved on the stage in the directions of X, Y, and Z axes. A laser displacement sensor is installed at the horizontally and vertically moving unit to measure the position and size of the magnetic circuit. A three-axis measuring Gauss meter measures the magnetic flux density and a magnetic field generated in the magnetic circuit in the directions of vectors of X, Y, and Z axes.

Description

Magnetic circuit measuring device and magnetic circuit measuring method using same {GAUSS SCANNER AND METHOD USING THE SAME}

1 is a perspective view showing a magnetic circuit measuring apparatus according to the present invention.

2 is a front view showing a magnetic circuit measuring apparatus according to the present invention.

3 is a left side view showing a magnetic circuit measuring apparatus according to the present invention.

4 is a plan view showing a magnetic circuit measuring apparatus according to the present invention.

FIG. 5 is an enlarged view of a portion A shown in FIG. 3 and shows a measuring unit installed in the Z-axis moving unit.

FIG. 6 is a partial cross-sectional enlarged view of a portion B shown in FIG. 3 and illustrates a linear driving unit.

FIG. 7 is an enlarged view of a portion C shown in FIG. 2, illustrating an assembly state of the Y-axis moving unit and the Z-axis moving unit.

<Description of Symbols for Main Parts of Drawing>

100: stage 110: table

120: fixed block 130: position adjustment block

200: X axis moving unit 210: gantry

220: linear drive unit 222: first guide rail

224: X axis moving block 300: Y axis moving unit

310: first rotating drive unit 320: Y-axis moving block

330: second guide rail 400: Z-axis moving unit

410: second rotary drive unit 420: third guide rail

430: Z-axis moving block 500: measuring unit

510: laser displacement sensor 520: Gauss meter

600: magnetic circuit 700: horizontal vertical moving part

The present invention relates to a magnetic circuit measuring apparatus and a magnetic circuit measuring method using the same, and more particularly, by measuring a Gaussian based on the actual position or size of the measurement target and measuring the Gaussian based on the actual measurement to improve the reliability and measurement time The present invention relates to a magnetic circuit measuring apparatus capable of shortening a circuit and a magnetic circuit measuring method using the same.

In general, in the case of forming a thin film on a glass substrate of a display panel, a magnetron sputtering apparatus is used for advantages such as a high film formation speed. In the magnetron sputtering apparatus, a magnetic circuit composed of an assembly composed of a plurality of magnets is alternately alternately polarized at the rear of the target, and the magnetic circuit forms a magnetic flux in front of the target to capture electrons from the front of the target. Sputtering by increasing the electron density and increasing the probability of collision between these electrons and the gas supplied into the vacuum chamber.

The magnetic circuit installed in the magnetron sputtering device needs to have a constant magnetic flux density and magnetic field, and a device for measuring magnetic flux density and magnetic field of the magnetic circuit is a Gaussian meter.

The Gaussian meter is for measuring the magnetic flux density and the magnetic field of the magnetic application, and the magnetic flux density and the magnetic field of the measurement target are measured, including a probe inserted into the magnetic field of the measurement target using a hall effect. Such a Gaussian meter is usually miniaturized / lightweighted so that a measurer can carry it to measure a Gaussian value by placing a probe in a magnetic field of an object to be measured. That is, the measurer carries a Gaussian meter, moves along the circumference of the magnetic circuit, and measures only a predetermined section.

However, as the glass substrate of the display device has grown in recent years, the magnetron sputtering device has also grown in size, and the magnetic circuit has also grown in size. When a large magnetic circuit is measured by a conventional Gaussian meter, the measurer holds the probe in his hand, positions the probe at a predetermined distance from the surface of the magnetic circuit, and measures magnetic flux density and magnetic field. There is a problem that the magnetic flux density of the circuit and the measured value of the magnetic field are different.

That is, when the magnetic flux density and magnetic field of the magnetic circuit are manually measured by the measurer, the magnetic flux density and the magnetic field measured by the Gauss meter show different measurement values every time according to the position of the probe at a distance from the surface of the magnetic circuit. Very low reliability

In addition, the magnetic flux density and magnetic field vary greatly depending on the actual size and shape of the magnetic circuit, and if the measurer does not fully understand this, the magnetic flux density and magnetic field of the magnetic circuit are repeatedly measured several times using a conventional Gaussian meter. It takes much time and effort to measure magnetic flux density and magnetic field.

Also, in the related art, a measurer carries a Gaussian meter, moves along a circumference of a magnetic circuit, and measures only a magnetic flux density and a magnetic field of a predetermined section, so that magnetic flux density and magnetic field generated on the entire surface of the magnetic circuit cannot be measured. Accordingly, there is a problem in that it is not possible to determine whether or not the magnet inside the magnetic circuit is broken.

The present invention is to solve the above problems, by measuring the actual position or size of the magnetic circuit and by measuring the magnetic flux density and magnetic field generated on the entire surface of the magnetic circuit based on the actual measurement to improve the reliability of the magnetic circuit measurement An object of the present invention is to provide a magnetic circuit measuring apparatus capable of shortening a measuring time and a magnetic circuit measuring method using the same.

According to the technical idea of the present invention for achieving the above object, a stage in which a magnetic circuit is located, a horizontal vertical moving unit installed on the stage and moving in the X, Y, Z axis directions on the stage, and the horizontal It is achieved by a magnetic circuit measuring device including a laser displacement sensor installed in the vertical moving unit and a measuring unit having a Gaussian meter.

Here, the stage preferably includes a surface plate having a flat surface, a plurality of fixed blocks provided on the flat surface of the surface plate and on which a magnetic circuit is placed, and a positioning block moving in the Y-axis direction on the fixed block. .

In addition, it is preferable to include a measurement scale formed in the Y-axis direction on the upper surface of the fixed block provided with the positioning block.

In addition, the horizontal vertical moving unit, the X-axis moving unit installed on the stage and moved in the X-axis direction on the stage, the Y-axis moving unit installed in the X-axis moving unit and moved in the Y-axis direction, the Y It is preferable to include a Z-axis moving unit which is installed in the axis moving unit and moves in the Z-axis direction.

The X-axis moving unit preferably includes a gantry including vertical beams and horizontal beams installed on the stage, and a linear driving unit for horizontally moving the gantry in the X-axis direction on the stage.

The linear drive unit preferably includes a first guide rail installed in the X-axis direction on the stage, and an X-axis moving block mounted on the first guide rail and supporting the vertical beam of the gantry.

The Y-axis moving unit may further include a first rotational drive unit including a first screw shaft installed in parallel with the horizontal beam of the gantry and a first servo motor installed at the first screw shaft end, and the screw of the first rotational drive unit. It is preferable to include a Y-axis moving block that is engaged to the shaft and mounted to the second guide rail formed on the horizontal beam of the gantry.

In addition, the Z-axis moving unit is installed on the third guide rail fixed to the Y-axis moving block to be orthogonal to the second guide rail, the second screw shaft and parallel to the third guide rail and the second screw shaft end It is preferable to include a second rotation drive unit including a second servo motor, and a Z-axis moving block meshed with a screw shaft of the second rotation drive unit and mounted on a third guide rail.

And it is preferable to include a frame provided with a moving means on the bottom, and a dust-proof rubber is installed on the upper surface of the frame and installed between the upper surface of the frame and the bottom of the stage.

In addition, it is preferable that irregularities are formed on the upper surface of the anti-vibration rubber in contact with the bottom of the stage.

In addition, the Gaussian meter is preferably a three-axis Gaussian meter for measuring the magnetic flux density and the magnetic field generated in the vector direction of the X, Y, Z in the magnetic circuit.

On the other hand, another technical idea of the present invention for achieving the above object, the step of loading the magnetic circuit in the stage, the step of obtaining the measurement data by measuring the position and size of the magnetic circuit loaded in the stage, It is achieved by a magnetic circuit measuring method comprising the step of obtaining the magnetic flux density and magnetic field data of the magnetic circuit based on the measured data.

The obtaining of the measured data may include measuring a position and a size of a magnetic circuit loaded in the stage with a laser displacement sensor.

In addition, the step of obtaining the data of the magnetic flux density and the magnetic field, it is preferable to include the step of measuring the magnetic flux density and the magnetic field by moving the circumference of the magnetic circuit of the Gaussian meter based on the measured data.

In addition, it is preferable to include an output step of graphically displaying the magnetic flux density and magnetic field generated in the magnetic circuit based on the measured magnetic flux density and the magnetic field data.

Hereinafter, embodiments according to the present invention will be described in more detail with reference to the accompanying drawings.

1 is a perspective view showing a magnetic circuit measuring apparatus according to the present invention, Figure 2 is a front view showing a magnetic circuit measuring apparatus according to the present invention, Figure 3 is a left side view showing a magnetic circuit measuring apparatus according to the present invention, 4 is a plan view showing a magnetic circuit measuring apparatus according to the present invention.

Referring to the drawings, the magnetic circuit measuring apparatus includes a frame 102, a stage 100 installed on an upper surface of the frame 102, and an X axis moving in the X-axis direction on the stage 100. The horizontal vertical moving unit 700 and the Z-axis moving unit including the moving unit 200 and the Y-axis moving unit 300 moving in the Y-axis direction, and the Z-axis moving unit 400 moving in the Z-axis direction. It is composed of a measuring unit 500 installed in (400).

The frame 102 is formed of a structure having a predetermined area and capable of sufficiently enduring the load of the stage 100 to be installed on the upper surface, and a caster on the bottom surface of the frame 102 to facilitate the transport and fixing of the frame 102. The same wheel unit 104 is installed.

On the upper surface of the frame 102 is provided a stage 100 having an area in which the magnetic circuit 600 can be located, the stage 100 is largely the surface 110 and the flat surface of the surface 100 It is composed of a plurality of fixed blocks 120 located on the surface, and the positioning block 130 to move horizontally on the fixed block 120.

In addition, a dustproof pad 106 is installed between the upper surface of the frame 102 and the bottom surface of the stage 100. An unevenness 106a (see FIG. 2) is formed on the upper surface of the dustproof pad 106 to prevent the dustproof pad. The dustproof pad 106 absorbs rocking of the ground, which may occur unexpectedly by minimizing a contact area between the bottom surface of the stage 100 and the bottom surface of the surface plate 100, that is, the stage 100 and the stage ( It protects the X, Y, Z axis moving unit (200, 300, 400) and the measuring unit 500 is installed on the 100.

The surface plate 110 is formed in a rectangular shape having a predetermined thickness is installed on the upper surface of the frame 102, the upper surface of the surface plate 110 is formed with a flat surface of which the flatness is adjusted. In addition, a plurality of fixing blocks 120 are positioned on the flat surface of the surface plate 110, and each of the fixing blocks 120 is formed in a rectangle having a predetermined thickness, and the flatness of the surface plate 110 is similar to that of the surface surface of the surface plate 110. The adjusted flat surface is formed on the upper and lower surfaces of the fixing block 120.

In addition, the upper surface of the fixing block 120 is provided with a positioning block 130 installed to move horizontally in the Y-axis direction to provide and adjust the reference position of the magnetic circuit 600 placed on the fixing block 120.

The positioning block 130 is a horizontal portion 132 horizontally moved in the Y-axis direction from the upper surface of the fixed block 120 and the vertical portion bent vertically upward of the fixed block 120 in the horizontal portion 132 134. In addition, the upper surface of the fixing block 120 is formed with a slot 122 for guiding the horizontal portion 132 of the positioning block 130 in the Y-axis direction so that the horizontal portion 132 is seated in the slot 122. It slides in the finished state.

In addition, a measurement scale 124 is formed along the slot 122 in the slot 122 formed in the Y-axis direction so as to determine the position of the positioning block 130, and the fixed block 120 in the horizontal portion 132. It includes a fastener 136 that can be fixed so that the horizontal portion 132 sliding along the slot 122 of the). For example, the fastener 136 may be a bolt (not shown) fastening to secure the horizontal portion 132 to the slot 122 by pressing.

On the stage 100 having the configuration described above, a horizontal vertical moving unit 700 moving in the X, Y, and Z axis directions is installed, and the horizontal vertical moving unit 700 is in the X axis direction on the stage 100. To the X-axis moving unit 200 to move horizontally, the Y-axis moving unit 300 installed in the X-axis moving unit 200 and horizontally moved in the Y-axis direction, and the Y-axis moving unit 300 And a Z-axis moving unit 400 moving in the Z-axis direction.

The X-axis moving unit 200 is an X-axis on the stage 100 for the linear drive unit 220 and the linear drive unit 220 installed in the X-axis direction on both sides of the upper surface of the surface plate 110 of the stage 100. It consists of a gantry 210 to move horizontally in the direction.

Referring to FIG. 6, the linear drive unit 220 includes a stator 222a having a plurality of magnets arranged in a line so as to convert electrical energy into linear kinetic energy. The first guide rail 222 having a first guide rail 222 and the X-axis moving block 224 is mounted so as to slide along the first guide rail 222 and the mover 224a is built-in. An electric current is applied to the X-axis moving block 224 to slide on the first guide rail 222 by generating a thrust between the mover 224a and the stator 222a.

The linear driving unit 220 may be, for example, any one of a linear induction motor, a linear DC motor, a linear pulse motor, a linear hybrid motor, and a linear synchronous motor.

In addition, the upper surface of the first guide rail 222, a guide cap 226 that is supported on the front end and the proximal end of the first guide rail 222 is installed, the guide cap 226 is the X-axis moving block 224 Through the inside of the X-axis moving block 224 to prevent the arbitrary departure from the first guide rail 222 and to block the foreign material flow into the first guide rail 222. Here, the bottom of the guide cap 226 is in contact with the drive roller 228 installed in the X-axis moving block 224.

And the front end and the base end of the first guide rail 222 is provided with a shock absorbing unit 230 to cushion the collision caused by excessive sliding of the X-axis moving block 224. The shock absorbing unit 230 may be, for example, a member having an elastic force or a hydraulic cylinder and a coil spring so as to absorb and extinguish an impact.

The gantry 210 supported by the X-axis moving block 224 of the linear drive unit 220 installed in the X-axis direction on both sides of the upper surface of the surface 110 and moving in the X-axis direction on the stage 100 is a surface plate ( 110 is formed of a vertical beam 212 fixed to each of the upper surface of the X-axis moving block 224 installed on both sides of the upper surface and a horizontal beam 214 connecting the vertical beams 212 integrally to move in the X-axis direction. In particular, the gantry 210 has a structure that can withstand the load of the Y, Z-axis moving unit (300, 400) and the measurement unit 500, in particular, to be installed on the horizontal beam (214).

As described above, the gantry 210 installed on the stage 100 and moving in the X-axis direction moves the Y-axis moving unit 300 and the Z-axis to move the measurement unit 500 in the Y-axis direction and the Z-axis direction. The unit 400 is installed.

FIG. 7 is an enlarged view of a portion C shown in FIG. 2, illustrating an assembly state of the Y-axis moving unit and the Z-axis moving unit. Referring to the drawings, the Y-axis moving unit 300 is installed on the horizontal beam 214 of the gantry 210 moving in the X-axis direction on the stage 100.

The Y-axis moving unit 300 is mounted on the second guide rail 330 fixed to the horizontal beam 214, the Y-axis moving block 320 to slide in the Y-axis direction, and the second guide rail ( 330 is installed in parallel with the second guide rail 330 and the first screw shaft 312 and the first screw shaft 312 to be engaged with the Y-axis moving block 320 and the first screw shaft 312 end It is composed of a first rotational drive 310 including a servo motor 314.

Here, the coupling of the first screw shaft 312 and the first servo motor 314 of the first rotary drive unit 310 is formed at the front end or the proximal end of the first screw shaft 312 as shown in FIG. The drive shaft of the first servo motor 314 may be a series connection directly connected, and in some cases, the drive shaft of the first servo motor 314 is located in parallel or cross with the first screw shaft 312, the first A reduction gear box (not shown) may be installed between the drive shaft of the first servo motor 314 and the first screw shaft 312 in which each gear having a different rotation ratio is installed.

And, the Z-axis moving unit 400 is installed to be orthogonal to the Y-axis moving unit 300, the Z-axis moving unit 400 is orthogonal to the second guide rail 330, Y-axis moving block 320 The third guide rail 420 is fixed to the), the Z-axis moving block 430 is mounted to the third guide rail 420 and slides in the Z-axis direction, and the third guide rail 420 in the interior The second screw shaft 412 installed in parallel with the third guide rail 420 and engaged with the Z-axis moving block 430 and the second servo motor 414 installed at the second screw shaft 412 end are provided. It consists of a second rotary drive unit 410 including.

Here, the coupling of the second screw shaft 412 and the second servo motor 414 is made like the coupling of the first screw shaft 312 and the first servo motor 314 of the Y-axis moving unit 300 described above. The driving shaft of the second servo motor 414 may be directly connected to the front end or the proximal end of the two screw shaft 412, and the driving shaft of the second servo motor 414 is positioned parallel to or crossing the second screw shaft 412. In the meantime, a reduction gear box (not shown) may be installed.

Double, each of the second guide rail 330 and the third guide rail 420 is provided with a limit sensor 108 for limiting the slide section of the Y-axis moving block 320 and Z-axis moving block 430.

FIG. 5 is an enlarged view of a portion A shown in FIG. 3 and illustrates a measurement unit installed in the Z-axis moving block. Referring to the drawings, the Z-axis moving block 430 is provided with a measuring unit 500 having a laser displacement sensor 510 and a Gaussian meter (520).

As described above, the laser displacement sensor 510 is fixed to the Z-axis moving block 430 so that the laser displacement sensor 510 is positioned at a predetermined height from an upper surface of the magnetic circuit 600 placed on the fixed block 120. The laser displacement sensor 510 includes a light emitting unit (not shown) for emitting a laser beam on the upper surface of the magnetic circuit 600 and a light receiving unit (light receiving unit) that is received by the laser beam reflected from the upper surface of the magnetic circuit 600. .

In addition, a Gaussian meter 520 fixed to the Z-axis moving block 430 adjacent to the laser displacement sensor 510 is inserted into a magnetic field generated by the magnetic circuit 600 to adjust the magnetic flux density and the magnetic field of the magnetic circuit 600. It includes a probe to measure. In particular, the Gaussian meter 520 preferably includes a three-axis Gaussian meter capable of measuring the magnetic flux density and magnetic field generated in the vector direction of the X, Y, Z in the magnetic circuit 600.

In addition, a cover 440 is fastened to the Z-axis moving block 430 so as to protect the laser displacement sensor 510 and the Gauss meter 520 installed on the Z-axis moving block 430.

The cover 440 has a substantially box shape to cover the laser displacement sensor 510 and the Gaussian meter 520, the cover 440 is the laser displacement sensor 510 and the Gaussian meter 520 is a magnetic circuit 600. In order to maintain the laser displacement sensor 510 and the gauss meter 520, the cover 440 may be opened and closed at the Z-axis moving block 430. It may be fastened by a hinge (not shown).

Here, the horizontal vertical moving unit for measuring the position and size of the magnetic circuit and moving the measuring unit for measuring the magnetic flux density and the magnetic field in the X, Y, and Z directions on the stage is not limited to the above-described configuration, but is variously modified. Can be implemented. For example, a measuring unit may be installed in the articulated robot instead of the horizontal vertical moving unit, and in some cases, the articulated robot may be installed to move in the X axis direction on the stage.

In addition, the laser displacement sensor and the Gauss meter installed in the measurement unit is not limited to the above-described configuration, the laser displacement sensor finds the origin of the magnetic circuit located on the stage, the size / height of the magnetic circuit based on the origin It would be sufficient if the sensor can measure. In addition, the Gaussian meter may also be a sensor capable of measuring the magnetic flux density and magnetic field generated in the magnetic circuit. In some cases, the laser displacement sensor and the gauss meter may be integrally formed.

Referring to the operation of the magnetic circuit measuring apparatus having the configuration described above, the step of loading the magnetic circuit 600 on the stage 100, and the magnetic circuit in which the laser displacement sensor 510 is located on the stage 100 Measuring the position and size of the 600 and the Gaussian meter 520 is divided into the step of measuring the magnetic flux density and the magnetic field around the magnetic circuit 600 located on the stage (100).

The loading of the magnetic circuit 600 on the stage 100 may include the fixing block 120 so that the magnetic circuit 600 may be aligned at a predetermined position when the magnetic circuit 600 is placed on the fixing block 120. Position adjustment block 130 installed in the Y-axis direction to match the vertical scale 134 of the set measurement scale 124 and the positioning block 130 and then fixed the positioning block 130 does not move Let's do it.

The magnetic circuit 600 is positioned on the upper surface of the fixed block 120 of the stage 100 by a heavy load carrying unit (not shown) such as a ceiling crane or a stacker, wherein the side of the magnetic circuit 600 is positioned in the position adjusting block. The magnetic circuit 600 is aligned with the vertical portion 134 of the 130 at a predetermined position of the fixing block 130.

After the magnetic circuit 600 is loaded onto the stage 100, the measurement unit 500 moves on the stage 100 in the X, Y, and Z directions to position the magnetic circuit 600 loaded on the stage 100. And it measures the size, and based on the measured data to measure the magnetic flux density and magnetic field generated in the magnetic circuit 600 and output the measured results.

The step of measuring the position and size of the magnetic circuit 600 located on the stage 100 may include a horizontal vertical moving unit (H) to measure the position and size of the magnetic circuit 600 loaded on the stage 100. 700 moves in the X-axis direction and the Y-axis direction so that the laser beam point emitted from the laser displacement sensor 510 of the measuring unit 500 can be located at the origin of the magnetic circuit 600. Here, the origin of the magnetic circuit is a starting point for the laser displacement sensor 510 or the gauss meter 520 to measure the magnetic circuit 600.

That is, since the linear drive unit 220 is operated to horizontally move the gantry 210 in the X-axis direction on the stage 100, the X-axis moving block 224 supporting the gantry 210 is a stage ( The gantry 210 is horizontally moved by a predetermined distance along the first guide rail 222 installed in the X-axis direction on the X-axis direction, and thus the point of the laser displacement sensor 510 of the measurement unit 500 is the origin of the magnetic circuit 600. From the X-axis direction.

In the above state, the Y-axis moving unit 300 installed in the gantry 210 operates to approach the point of the laser displacement sensor 510 in the Y-axis direction so that the origin of the magnetic circuit 600 and the laser displacement sensor 510 are operated. The first servo motor 314 of the first rotational drive 310 rotates to rotate the first screw shaft 312.

When the first screw shaft 312 rotates, the Y-axis moving block 320 is engaged with the first screw shaft 312 and is mounted on the second guide rail 330 formed on the horizontal beam 214 of the gantry 210. ) Moves the laser displacement sensor 510 horizontally in the Y-axis direction so that the origin of the magnetic circuit 600 coincides with the point of the laser displacement sensor 510.

When the origin of the magnetic circuit 600 coincides with the point of the laser displacement sensor 510 as described above, the Z-axis moving unit 400 installed in the Y-axis moving block 320 operates to operate the laser displacement sensor 510 magnetically. The second servo motor 414 of the second rotation driver 410 rotates to rotate the second screw shaft 412 by being operated to be positioned at a predetermined height from the upper surface of the circuit 600.

When the second screw shaft 412 is rotated is meshed with the second screw shaft 412, the third guide rail 420 fixed to the Y-axis moving block 320 to be orthogonal to the second guide rail 330 The Z-axis moving block 430 mounted at the position moves the laser displacement sensor 510 vertically in the Z-axis direction to position the laser displacement sensor 510 at a predetermined height.

When the laser displacement sensor 510 finds the origin of the magnetic circuit 600 as described above, the laser displacement sensor 510 measures the size of the magnetic circuit 600 such as the width and the height of the magnetic circuit 600. The horizontal and vertical moving unit 700 repeatedly moves the laser displacement sensor 510 horizontally in the X and Y axis directions on the stage 100. The movement of the laser displacement sensor 510 in the X and Y axis directions is a laser displacement sensor. The point of 510 is repeated until it coincides with the end point of the magnetic circuit 600.

When the position and size of the magnetic circuit 600 loaded on the stage 100 are measured by the laser displacement sensor 510 of the measuring unit 500 as described above, the Gauss meter 520 of the magnetic circuit 600 As we go around, we measure magnetic flux density and magnetic field.

Measuring the magnetic flux density and the magnetic field of the magnetic circuit 600, the horizontal vertical moving unit 700 so that the probe of the Gaussian meter 520 can be located at the origin of the magnetic circuit 600 obtained in the magnetic circuit measurement step. The Gaussian meter 520 is moved in the X-axis direction and the Y-axis direction.

When the probe of the gauss meter 520 is located at the origin of the magnetic circuit 600, the Gauss meter 520 rotates around the measured magnetic circuit 600 to measure the magnetic flux density and the magnetic field of the magnetic circuit 600. The horizontal vertical moving unit 700 moves the Gauss meter 520 of the measuring unit 500 in the X-axis direction and the Y-axis direction so that the magnetic flux density and the magnetic field data measured by the Gauss meter 520 may be The laser displacement sensor 510 is visually output to the measurer in connection with the measured data. For example, the magnetic flux density and the magnetic field may be simultaneously displayed on the graph or 3D graphic of the magnetic circuit.

On the other hand, the present invention is not limited only to the above-described embodiment, but can be modified and modified within the scope not departing from the gist of the present invention, it should be seen that such modifications and variations are included in the technical idea of the present invention. do.

For example, the laser displacement sensor and the Gauss meter of the measurement unit may measure the entire period of the magnetic circuit loaded on the stage, or may measure only a predetermined section.

In some cases, a plurality of magnetic circuits may be loaded on the stage, the laser displacement sensor may measure the position and size of each magnetic circuit, and each magnetic flux density and magnetic field may be measured based on the measured data. will be.

The measured data of the magnetic circuit loaded on the stage, the magnetic flux density and the magnetic field data may be compared with the basic data, and the abnormality of the measured magnetic circuit may be determined through the comparison data.

According to the magnetic circuit measuring apparatus and the magnetic circuit measuring method using the same according to the present invention, the magnetic flux density and the magnetic field can be measured based on the actual position and size of the magnetic circuit, and the measurement is possible for the entire section of the magnetic circuit. Can be obtained.

In addition, since each magnetic circuit can be measured under the same conditions, the reliability is improved, and since the actual measurement and the Gaussian value of the magnetic circuit can be simultaneously measured by the magnetic circuit measuring apparatus, the measurement time of the magnetic circuit can be shortened.

Claims (15)

The stage where the magnetic circuit is located, A horizontal vertical moving part installed on the stage and moving in the X, Y, and Z directions on the stage; A laser displacement sensor installed in the horizontal vertical moving unit and measuring a position and size of a magnetic circuit, and a three-axis measuring gauss meter for measuring magnetic flux density and magnetic field generated in the vector, X, Y, and Z directions of the magnetic circuit. Magnetic circuit measuring device comprising a measuring unit. The method of claim 1, wherein the stage A surface plate having a flat surface, A plurality of fixing blocks installed on a flat surface of the surface plate and on which magnetic circuits are placed; Magnetic circuit measuring device comprising a positioning block to move in the Y-axis direction on the fixed block. The method according to claim 2, Magnetic circuit measuring device comprising a measurement scale formed in the Y-axis direction on the upper surface of the fixed block is installed the position adjusting block. The method of claim 1, wherein the horizontal vertical moving unit An X-axis moving unit installed on the stage and moving in the X-axis direction on the stage; A Y-axis moving unit installed in the X-axis moving unit and moving in the Y-axis direction; Magnetic circuit measuring device is installed on the Y-axis moving unit and comprises a Z-axis moving unit moving in the Z-axis direction. The method of claim 4, wherein the X-axis moving unit A gantry including vertical beams and horizontal beams installed on the stage; Magnetic circuit measuring apparatus comprising a linear drive unit for horizontally moving the gantry in the X-axis direction on the stage. The method of claim 5, wherein the linear drive unit A first guide rail installed in the X-axis direction on the stage; Magnetic circuit measuring device mounted on the first guide rail and including an X-axis moving block for supporting the vertical beam of the gantry. According to any one of claims 4 to 6, wherein the Y-axis moving unit A first rotational drive unit including a first screw shaft installed in parallel with the horizontal beam of the gantry and a first servo motor installed at the first screw shaft end; And a Y-axis moving block fitted to a screw shaft of the first rotary drive unit and mounted to a second guide rail formed on a horizontal beam of a gantry. The method according to claim 7, wherein the Z-axis moving unit A third guide rail fixed to the Y-axis moving block to be orthogonal to the second guide rail, A second rotary drive unit including a second screw shaft installed in parallel with the third guide rail and a second servo motor installed at the second screw shaft end; Magnetic circuit measuring device including a Z-axis moving block is engaged with the screw shaft of the second rotary drive unit and mounted to the third guide rail. The method according to claim 1, The frame is provided with a moving means on the bottom, Magnetic circuit measuring device is provided on the upper surface of the frame and the dust-proof rubber is installed between the upper surface of the frame and the bottom surface of the stage. 10. The magnetic circuit measuring apparatus of claim 9, wherein irregularities are formed on an upper surface of the anti-vibration rubber in contact with the bottom of the stage. delete Loading a magnetic circuit on the stage, Obtaining measured data by measuring the position and size of the magnetic circuit loaded in the stage; And obtaining data of magnetic flux density and magnetic field generated in the vector direction of X, Y, and Z in the magnetic circuit based on the measured data. The method of claim 12, wherein the obtaining of the measured data comprises: And measuring the position and size of the magnetic circuit loaded in the stage with a laser displacement sensor. The method of claim 12, wherein the obtaining of the magnetic flux density and the magnetic field comprises: And measuring a magnetic flux density and a magnetic field by moving a three-axis measuring gauss meter around the magnetic circuit based on the measured data. The method according to claim 12, And an output step of graphically displaying the magnetic flux density and the magnetic field generated in the magnetic circuit based on the measured magnetic flux density and the magnetic field data.

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