KR100839300B1 - Radiation-sensitive resin composition, spacer for display panel, and display panel - Google Patents
Radiation-sensitive resin composition, spacer for display panel, and display panel Download PDFInfo
- Publication number
- KR100839300B1 KR100839300B1 KR1020020013734A KR20020013734A KR100839300B1 KR 100839300 B1 KR100839300 B1 KR 100839300B1 KR 1020020013734 A KR1020020013734 A KR 1020020013734A KR 20020013734 A KR20020013734 A KR 20020013734A KR 100839300 B1 KR100839300 B1 KR 100839300B1
- Authority
- KR
- South Korea
- Prior art keywords
- group
- carbon atoms
- display panel
- resin composition
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 title claims abstract description 60
- 230000005855 radiation Effects 0.000 title claims abstract description 42
- 239000011342 resin composition Substances 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 30
- 229920001577 copolymer Polymers 0.000 claims description 63
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 56
- 125000004432 carbon atom Chemical group C* 0.000 claims description 51
- -1 trihalomethyl triazine Chemical compound 0.000 claims description 44
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 37
- KAKZBPTYRLMSJV-UHFFFAOYSA-N vinyl-ethylene Natural products C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 claims description 26
- 125000000217 alkyl group Chemical group 0.000 claims description 25
- 150000001875 compounds Chemical class 0.000 claims description 22
- LJZJMIZQMNDARW-UHFFFAOYSA-N decan-3-yl 2-methylprop-2-enoate Chemical compound CCCCCCCC(CC)OC(=O)C(C)=C LJZJMIZQMNDARW-UHFFFAOYSA-N 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 17
- 125000003118 aryl group Chemical group 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 125000003700 epoxy group Chemical group 0.000 claims description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 11
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 10
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 10
- 125000003277 amino group Chemical group 0.000 claims description 9
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 claims description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 125000003545 alkoxy group Chemical group 0.000 claims description 6
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 6
- 125000005196 alkyl carbonyloxy group Chemical group 0.000 claims description 6
- 125000004104 aryloxy group Chemical group 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- 239000003999 initiator Substances 0.000 claims description 6
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims description 5
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 5
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 125000004448 alkyl carbonyl group Chemical group 0.000 claims description 3
- 125000005129 aryl carbonyl group Chemical group 0.000 claims description 3
- 125000005110 aryl thio group Chemical group 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 125000004001 thioalkyl group Chemical group 0.000 claims description 3
- 125000005000 thioaryl group Chemical group 0.000 claims description 3
- 125000004414 alkyl thio group Chemical group 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 239000000243 solution Substances 0.000 description 28
- 239000000178 monomer Substances 0.000 description 18
- 239000000203 mixture Substances 0.000 description 17
- QTUVQQKHBMGYEH-UHFFFAOYSA-N 2-(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC=NC=N1 QTUVQQKHBMGYEH-UHFFFAOYSA-N 0.000 description 16
- 239000002904 solvent Substances 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 13
- 229910052802 copper Inorganic materials 0.000 description 13
- 239000010949 copper Substances 0.000 description 13
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 12
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 239000004094 surface-active agent Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000003513 alkali Substances 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 0 *c1nc(*)nc(*)n1 Chemical compound *c1nc(*)nc(*)n1 0.000 description 4
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 4
- 238000013329 compounding Methods 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 239000007870 radical polymerization initiator Substances 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 3
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 125000005907 alkyl ester group Chemical group 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000001588 bifunctional effect Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 238000007334 copolymerization reaction Methods 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- SSLASPHAKUVIRG-UHFFFAOYSA-N (2-methylcyclohexyl) prop-2-enoate Chemical compound CC1CCCCC1OC(=O)C=C SSLASPHAKUVIRG-UHFFFAOYSA-N 0.000 description 2
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 2
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- FVNIIPIYHHEXQA-UHFFFAOYSA-N 2-(4-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 FVNIIPIYHHEXQA-UHFFFAOYSA-N 0.000 description 2
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- NQXNYVAALXGLQT-UHFFFAOYSA-N 2-[4-[9-[4-(2-hydroxyethoxy)phenyl]fluoren-9-yl]phenoxy]ethanol Chemical compound C1=CC(OCCO)=CC=C1C1(C=2C=CC(OCCO)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 NQXNYVAALXGLQT-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- OWVMFLLVLFONOO-UHFFFAOYSA-N 3-butoxypropanoic acid Chemical compound CCCCOCCC(O)=O OWVMFLLVLFONOO-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- NTPLXRHDUXRPNE-UHFFFAOYSA-N 4-methoxyacetophenone Chemical compound COC1=CC=C(C(C)=O)C=C1 NTPLXRHDUXRPNE-UHFFFAOYSA-N 0.000 description 2
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000004342 Benzoyl peroxide Substances 0.000 description 2
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- AJQOASGWDCBKCJ-UHFFFAOYSA-N Butoxyacetic acid Chemical compound CCCCOCC(O)=O AJQOASGWDCBKCJ-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- 125000000041 C6-C10 aryl group Chemical group 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Natural products OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000002671 adjuvant Substances 0.000 description 2
- 150000001346 alkyl aryl ethers Chemical class 0.000 description 2
- 125000003710 aryl alkyl group Chemical group 0.000 description 2
- 150000007860 aryl ester derivatives Chemical class 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 235000019400 benzoyl peroxide Nutrition 0.000 description 2
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 2
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 210000001217 buttock Anatomy 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- 229960004275 glycolic acid Drugs 0.000 description 2
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 2
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- RVUYACAXXOCJAH-UHFFFAOYSA-N propyl ethaneperoxoate Chemical compound CCCOOC(C)=O RVUYACAXXOCJAH-UHFFFAOYSA-N 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 1
- KIJJAQMJSXOBIE-UHFFFAOYSA-N (2-methylcyclohexyl) 2-methylprop-2-enoate Chemical compound CC1CCCCC1OC(=O)C(C)=C KIJJAQMJSXOBIE-UHFFFAOYSA-N 0.000 description 1
- ARYIITVULFDIQB-UHFFFAOYSA-N (2-methyloxiran-2-yl)methyl prop-2-enoate Chemical compound C=CC(=O)OCC1(C)CO1 ARYIITVULFDIQB-UHFFFAOYSA-N 0.000 description 1
- FFJCNSLCJOQHKM-CLFAGFIQSA-N (z)-1-[(z)-octadec-9-enoxy]octadec-9-ene Chemical compound CCCCCCCC\C=C/CCCCCCCCOCCCCCCCC\C=C/CCCCCCCC FFJCNSLCJOQHKM-CLFAGFIQSA-N 0.000 description 1
- HSLFISVKRDQEBY-UHFFFAOYSA-N 1,1-bis(tert-butylperoxy)cyclohexane Chemical compound CC(C)(C)OOC1(OOC(C)(C)C)CCCCC1 HSLFISVKRDQEBY-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- HUDYANRNMZDQGA-UHFFFAOYSA-N 1-[4-(dimethylamino)phenyl]ethanone Chemical compound CN(C)C1=CC=C(C(C)=O)C=C1 HUDYANRNMZDQGA-UHFFFAOYSA-N 0.000 description 1
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 1
- FNBHVKBYRFDOJK-UHFFFAOYSA-N 1-butoxypropan-2-yl propanoate Chemical compound CCCCOCC(C)OC(=O)CC FNBHVKBYRFDOJK-UHFFFAOYSA-N 0.000 description 1
- JZHGRUMIRATHIU-UHFFFAOYSA-N 1-ethenyl-3-methylbenzene Chemical compound CC1=CC=CC(C=C)=C1 JZHGRUMIRATHIU-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- ODDDCGGSPAPBOS-UHFFFAOYSA-N 1-ethoxypropan-2-yl propanoate Chemical compound CCOCC(C)OC(=O)CC ODDDCGGSPAPBOS-UHFFFAOYSA-N 0.000 description 1
- BPIUIOXAFBGMNB-UHFFFAOYSA-N 1-hexoxyhexane Chemical compound CCCCCCOCCCCCC BPIUIOXAFBGMNB-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- AVFZOVWCLRSYKC-UHFFFAOYSA-N 1-methylpyrrolidine Chemical compound CN1CCCC1 AVFZOVWCLRSYKC-UHFFFAOYSA-N 0.000 description 1
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- RVNBCIQRFGXLRD-UHFFFAOYSA-N 1-propoxypropan-2-yl propanoate Chemical compound CCCOCC(C)OC(=O)CC RVNBCIQRFGXLRD-UHFFFAOYSA-N 0.000 description 1
- JHGGYGMFCRSWIZ-UHFFFAOYSA-N 2,2-dichloro-1-(4-phenoxyphenyl)ethanone Chemical compound C1=CC(C(=O)C(Cl)Cl)=CC=C1OC1=CC=CC=C1 JHGGYGMFCRSWIZ-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 1
- YFKISBDZEGWBML-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC1=CC=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 YFKISBDZEGWBML-UHFFFAOYSA-N 0.000 description 1
- WFTWWOCWRSUGAW-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl 2-methylprop-2-enoate Chemical compound CCOCCOCCOC(=O)C(C)=C WFTWWOCWRSUGAW-UHFFFAOYSA-N 0.000 description 1
- FTALTLPZDVFJSS-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl prop-2-enoate Chemical compound CCOCCOCCOC(=O)C=C FTALTLPZDVFJSS-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- VRBKTPNSKOSBLV-UHFFFAOYSA-N 2-(2-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound COC1=CC=C2C=CC=CC2=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 VRBKTPNSKOSBLV-UHFFFAOYSA-N 0.000 description 1
- LRPXBHSHSWJFGR-UHFFFAOYSA-N 2-(2-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound COC1=CC=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 LRPXBHSHSWJFGR-UHFFFAOYSA-N 0.000 description 1
- JMVZGKVGQDHWOI-UHFFFAOYSA-N 2-(2-methylpropoxy)-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC(C)C)C(=O)C1=CC=CC=C1 JMVZGKVGQDHWOI-UHFFFAOYSA-N 0.000 description 1
- MKPDVIWRVDRMAO-UHFFFAOYSA-N 2-(2-methylsulfanylphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound CSC1=CC=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 MKPDVIWRVDRMAO-UHFFFAOYSA-N 0.000 description 1
- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 1
- QNOLNVUUEJLNON-UHFFFAOYSA-N 2-(3-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC1=CC=CC(C=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)=C1 QNOLNVUUEJLNON-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- YEAPAVOPQLGVQU-UHFFFAOYSA-N 2-(3-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound COC1=CC=CC(C=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)=C1 YEAPAVOPQLGVQU-UHFFFAOYSA-N 0.000 description 1
- NMXMUBGAUMWPIC-UHFFFAOYSA-N 2-(3-methylsulfanylphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound CSC1=CC=CC(C=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)=C1 NMXMUBGAUMWPIC-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- WJKHYAJKIXYSHS-UHFFFAOYSA-N 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(Cl)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 WJKHYAJKIXYSHS-UHFFFAOYSA-N 0.000 description 1
- OZIUQIJHFBCZBX-UHFFFAOYSA-N 2-(4-methylsulfanylphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(SC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 OZIUQIJHFBCZBX-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RVGLEPQPVDUSOJ-UHFFFAOYSA-N 2-Methyl-3-hydroxypropanoate Chemical compound COC(=O)CCO RVGLEPQPVDUSOJ-UHFFFAOYSA-N 0.000 description 1
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 1
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 1
- VLJFHOQFPSGZPC-UHFFFAOYSA-N 2-[2-hydroxy-5-(2-methylprop-2-enoyloxy)pentoxy]carbonylbenzoic acid Chemical compound CC(=C)C(=O)OCCCC(O)COC(=O)C1=CC=CC=C1C(O)=O VLJFHOQFPSGZPC-UHFFFAOYSA-N 0.000 description 1
- YQZZHMXSIYMFDK-UHFFFAOYSA-N 2-[bis(2-prop-2-enoyloxyethoxy)phosphoryloxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOP(=O)(OCCOC(=O)C=C)OCCOC(=O)C=C YQZZHMXSIYMFDK-UHFFFAOYSA-N 0.000 description 1
- VVPLLZZDAKVSSO-UHFFFAOYSA-N 2-[bis[2-(2-methylprop-2-enoyloxy)ethoxy]phosphoryloxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOP(=O)(OCCOC(=O)C(C)=C)OCCOC(=O)C(C)=C VVPLLZZDAKVSSO-UHFFFAOYSA-N 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- IYVJUFDNYUMRAB-UHFFFAOYSA-N 2-butoxyethyl propanoate Chemical compound CCCCOCCOC(=O)CC IYVJUFDNYUMRAB-UHFFFAOYSA-N 0.000 description 1
- LXSVWFRZICUOLU-UHFFFAOYSA-N 2-butoxypropanoic acid Chemical compound CCCCOC(C)C(O)=O LXSVWFRZICUOLU-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- BYVKCQBOHJQWIO-UHFFFAOYSA-N 2-ethoxyethyl propanoate Chemical compound CCOCCOC(=O)CC BYVKCQBOHJQWIO-UHFFFAOYSA-N 0.000 description 1
- XBHQOMRKOUANQQ-UHFFFAOYSA-N 2-ethoxypropanoic acid Chemical compound CCOC(C)C(O)=O XBHQOMRKOUANQQ-UHFFFAOYSA-N 0.000 description 1
- WROUWQQRXUBECT-UHFFFAOYSA-N 2-ethylacrylic acid Chemical compound CCC(=C)C(O)=O WROUWQQRXUBECT-UHFFFAOYSA-N 0.000 description 1
- AISGCPJYLZUZOS-UHFFFAOYSA-N 2-hydroxy-1,2-bis(2-methylphenyl)ethanone Chemical compound CC1=CC=CC=C1C(O)C(=O)C1=CC=CC=C1C AISGCPJYLZUZOS-UHFFFAOYSA-N 0.000 description 1
- LRRQSCPPOIUNGX-UHFFFAOYSA-N 2-hydroxy-1,2-bis(4-methoxyphenyl)ethanone Chemical compound C1=CC(OC)=CC=C1C(O)C(=O)C1=CC=C(OC)C=C1 LRRQSCPPOIUNGX-UHFFFAOYSA-N 0.000 description 1
- NBYSFWKNMLCZLO-UHFFFAOYSA-N 2-hydroxy-1,2-bis(4-methylphenyl)ethanone Chemical compound C1=CC(C)=CC=C1C(O)C(=O)C1=CC=C(C)C=C1 NBYSFWKNMLCZLO-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- QKTWWGYCVXCKOJ-UHFFFAOYSA-N 2-methoxy-1-(2-methoxyphenyl)-2-phenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1OC QKTWWGYCVXCKOJ-UHFFFAOYSA-N 0.000 description 1
- VAHNPAMCADTGIO-UHFFFAOYSA-N 2-methoxyethyl propanoate Chemical compound CCC(=O)OCCOC VAHNPAMCADTGIO-UHFFFAOYSA-N 0.000 description 1
- ICPWFHKNYYRBSZ-UHFFFAOYSA-M 2-methoxypropanoate Chemical compound COC(C)C([O-])=O ICPWFHKNYYRBSZ-UHFFFAOYSA-M 0.000 description 1
- RIWRBSMFKVOJMN-UHFFFAOYSA-N 2-methyl-1-phenylpropan-2-ol Chemical compound CC(C)(O)CC1=CC=CC=C1 RIWRBSMFKVOJMN-UHFFFAOYSA-N 0.000 description 1
- QPVHULPZRJVGLT-UHFFFAOYSA-N 2-methyl-2-propoxypentanoic acid Chemical compound CCCOC(C)(C(O)=O)CCC QPVHULPZRJVGLT-UHFFFAOYSA-N 0.000 description 1
- NMUIIYJWWOPNIP-UHFFFAOYSA-N 2-pentan-3-ylidenebutanedioic acid Chemical compound CCC(CC)=C(C(O)=O)CC(O)=O NMUIIYJWWOPNIP-UHFFFAOYSA-N 0.000 description 1
- WHFKYDMBUMLWDA-UHFFFAOYSA-N 2-phenoxyethyl acetate Chemical compound CC(=O)OCCOC1=CC=CC=C1 WHFKYDMBUMLWDA-UHFFFAOYSA-N 0.000 description 1
- HAZQZUFYRLFOLC-UHFFFAOYSA-N 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C=CC=CC=2)=N1 HAZQZUFYRLFOLC-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- QMAQLCVJIYANPZ-UHFFFAOYSA-N 2-propoxyethyl acetate Chemical compound CCCOCCOC(C)=O QMAQLCVJIYANPZ-UHFFFAOYSA-N 0.000 description 1
- BTWSDELVRHNNLR-UHFFFAOYSA-N 2-propoxyethyl propanoate Chemical compound CCCOCCOC(=O)CC BTWSDELVRHNNLR-UHFFFAOYSA-N 0.000 description 1
- CPCVNVLTHQVAPE-UHFFFAOYSA-N 2-propoxypropanoic acid Chemical compound CCCOC(C)C(O)=O CPCVNVLTHQVAPE-UHFFFAOYSA-N 0.000 description 1
- WYYQKWASBLTRIW-UHFFFAOYSA-N 2-trimethoxysilylbenzoic acid Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1C(O)=O WYYQKWASBLTRIW-UHFFFAOYSA-N 0.000 description 1
- NTKBNCABAMQDIG-UHFFFAOYSA-N 3-butoxypropan-1-ol Chemical compound CCCCOCCCO NTKBNCABAMQDIG-UHFFFAOYSA-N 0.000 description 1
- UJTRCPVECIHPBG-UHFFFAOYSA-N 3-cyclohexylpyrrole-2,5-dione Chemical compound O=C1NC(=O)C(C2CCCCC2)=C1 UJTRCPVECIHPBG-UHFFFAOYSA-N 0.000 description 1
- NWKKCUWIMOZYOO-UHFFFAOYSA-N 3-methoxybutyl 2-methylprop-2-enoate Chemical compound COC(C)CCOC(=O)C(C)=C NWKKCUWIMOZYOO-UHFFFAOYSA-N 0.000 description 1
- NPYMXLXNEYZTMQ-UHFFFAOYSA-N 3-methoxybutyl prop-2-enoate Chemical compound COC(C)CCOC(=O)C=C NPYMXLXNEYZTMQ-UHFFFAOYSA-N 0.000 description 1
- IYMZEPRSPLASMS-UHFFFAOYSA-N 3-phenylpyrrole-2,5-dione Chemical compound O=C1NC(=O)C(C=2C=CC=CC=2)=C1 IYMZEPRSPLASMS-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- YDIYEOMDOWUDTJ-UHFFFAOYSA-N 4-(dimethylamino)benzoic acid Chemical compound CN(C)C1=CC=C(C(O)=O)C=C1 YDIYEOMDOWUDTJ-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- UNDXPKDBFOOQFC-UHFFFAOYSA-N 4-[2-nitro-4-(trifluoromethyl)phenyl]morpholine Chemical compound [O-][N+](=O)C1=CC(C(F)(F)F)=CC=C1N1CCOCC1 UNDXPKDBFOOQFC-UHFFFAOYSA-N 0.000 description 1
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 description 1
- ACQVEWFMUBXEMR-UHFFFAOYSA-N 4-bromo-2-fluoro-6-nitrophenol Chemical compound OC1=C(F)C=C(Br)C=C1[N+]([O-])=O ACQVEWFMUBXEMR-UHFFFAOYSA-N 0.000 description 1
- SAPGBCWOQLHKKZ-UHFFFAOYSA-N 6-(2-methylprop-2-enoyloxy)hexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCOC(=O)C(C)=C SAPGBCWOQLHKKZ-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- YJVIKVWFGPLAFS-UHFFFAOYSA-N 9-(2-methylprop-2-enoyloxy)nonyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCCCCOC(=O)C(C)=C YJVIKVWFGPLAFS-UHFFFAOYSA-N 0.000 description 1
- PGDIJTMOHORACQ-UHFFFAOYSA-N 9-prop-2-enoyloxynonyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCCCCOC(=O)C=C PGDIJTMOHORACQ-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- NSWYOPAFMZTCDO-UHFFFAOYSA-N C(C(=C)C)(=O)OC(COCCOCCOCCOC(C(=C)C)=O)(C(=O)C=C)C(=O)C=C.C(COCCOCCOCCO)O Chemical compound C(C(=C)C)(=O)OC(COCCOCCOCCOC(C(=C)C)=O)(C(=O)C=C)C(=O)C=C.C(COCCOCCOCCO)O NSWYOPAFMZTCDO-UHFFFAOYSA-N 0.000 description 1
- POTIYWUALSJREP-UHFFFAOYSA-N C(CC1)CC2C1NCCC2 Chemical compound C(CC1)CC2C1NCCC2 POTIYWUALSJREP-UHFFFAOYSA-N 0.000 description 1
- WMONOXOCMIPNNU-UHFFFAOYSA-N C=CC(=O)OCCCC(O)COC(=O)C1=CC=CC=C1C(O)=O Chemical compound C=CC(=O)OCCCC(O)COC(=O)C1=CC=CC=C1C(O)=O WMONOXOCMIPNNU-UHFFFAOYSA-N 0.000 description 1
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 1
- YIVJZNGAASQVEM-UHFFFAOYSA-N Lauroyl peroxide Chemical compound CCCCCCCCCCCC(=O)OOC(=O)CCCCCCCCCCC YIVJZNGAASQVEM-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 1
- GYCMBHHDWRMZGG-UHFFFAOYSA-N Methylacrylonitrile Chemical compound CC(=C)C#N GYCMBHHDWRMZGG-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- AHVYPIQETPWLSZ-UHFFFAOYSA-N N-methyl-pyrrolidine Natural products CN1CC=CC1 AHVYPIQETPWLSZ-UHFFFAOYSA-N 0.000 description 1
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- UAKWLVYMKBWHMX-UHFFFAOYSA-N SU4312 Chemical compound C1=CC(N(C)C)=CC=C1C=C1C2=CC=CC=C2NC1=O UAKWLVYMKBWHMX-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 244000269722 Thea sinensis Species 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- NOZAQBYNLKNDRT-UHFFFAOYSA-N [diacetyloxy(ethenyl)silyl] acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)C=C NOZAQBYNLKNDRT-UHFFFAOYSA-N 0.000 description 1
- GUCYFKSBFREPBC-UHFFFAOYSA-N [phenyl-(2,4,6-trimethylbenzoyl)phosphoryl]-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C(=O)C1=C(C)C=C(C)C=C1C GUCYFKSBFREPBC-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000005250 alkyl acrylate group Chemical group 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 150000008378 aryl ethers Chemical class 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- LFYJSSARVMHQJB-QIXNEVBVSA-N bakuchiol Chemical compound CC(C)=CCC[C@@](C)(C=C)\C=C\C1=CC=C(O)C=C1 LFYJSSARVMHQJB-QIXNEVBVSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 1
- 229940007550 benzyl acetate Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 1
- IKRARXXOLDCMCX-UHFFFAOYSA-N butyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCCC IKRARXXOLDCMCX-UHFFFAOYSA-N 0.000 description 1
- FYRUCHOYGVFKLZ-UHFFFAOYSA-N butyl 2-ethoxypropanoate Chemical compound CCCCOC(=O)C(C)OCC FYRUCHOYGVFKLZ-UHFFFAOYSA-N 0.000 description 1
- JDJWQETUMXXWPD-UHFFFAOYSA-N butyl 2-methoxypropanoate Chemical compound CCCCOC(=O)C(C)OC JDJWQETUMXXWPD-UHFFFAOYSA-N 0.000 description 1
- RRIRSNXZGJWTQM-UHFFFAOYSA-N butyl 3-methoxypropanoate Chemical compound CCCCOC(=O)CCOC RRIRSNXZGJWTQM-UHFFFAOYSA-N 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229930016866 coridine Natural products 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- NHAQFLFLZGBOBG-UHFFFAOYSA-N decan-3-yl prop-2-enoate Chemical compound CCCCCCCC(CC)OC(=O)C=C NHAQFLFLZGBOBG-UHFFFAOYSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- IEPRKVQEAMIZSS-AATRIKPKSA-N diethyl fumarate Chemical compound CCOC(=O)\C=C\C(=O)OCC IEPRKVQEAMIZSS-AATRIKPKSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- HPYNZHMRTTWQTB-UHFFFAOYSA-N dimethylpyridine Natural products CC1=CC=CN=C1C HPYNZHMRTTWQTB-UHFFFAOYSA-N 0.000 description 1
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000003754 ethoxycarbonyl group Chemical group C(=O)(OCC)* 0.000 description 1
- HMONIZCCNGYDDJ-UHFFFAOYSA-N ethyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCC HMONIZCCNGYDDJ-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
- JLEKJZUYWFJPMB-UHFFFAOYSA-N ethyl 2-methoxyacetate Chemical compound CCOC(=O)COC JLEKJZUYWFJPMB-UHFFFAOYSA-N 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- KGPIFKMWQYGTAU-UHFFFAOYSA-N ethyl 2-propoxypropanoate Chemical compound CCCOC(C)C(=O)OCC KGPIFKMWQYGTAU-UHFFFAOYSA-N 0.000 description 1
- GIRSHSVIZQASRJ-UHFFFAOYSA-N ethyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCC GIRSHSVIZQASRJ-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- UKDLORMZNPQILV-UHFFFAOYSA-N ethyl 3-hydroxypropanoate Chemical compound CCOC(=O)CCO UKDLORMZNPQILV-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- LLACVNYOVGHAKH-UHFFFAOYSA-N ethyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCC LLACVNYOVGHAKH-UHFFFAOYSA-N 0.000 description 1
- FKIRSCKRJJUCNI-UHFFFAOYSA-N ethyl 7-bromo-1h-indole-2-carboxylate Chemical compound C1=CC(Br)=C2NC(C(=O)OCC)=CC2=C1 FKIRSCKRJJUCNI-UHFFFAOYSA-N 0.000 description 1
- KNFXXAGQEUUZAZ-UHFFFAOYSA-N ethyl ethaneperoxoate Chemical compound CCOOC(C)=O KNFXXAGQEUUZAZ-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- 125000004672 ethylcarbonyl group Chemical group [H]C([H])([H])C([H])([H])C(*)=O 0.000 description 1
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N hydrogen peroxide Substances OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229940119545 isobornyl methacrylate Drugs 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- CDOSHBSSFJOMGT-UHFFFAOYSA-N linalool Chemical compound CC(C)=CCCC(C)(O)C=C CDOSHBSSFJOMGT-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 1
- YVWPDYFVVMNWDT-UHFFFAOYSA-N methyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OC YVWPDYFVVMNWDT-UHFFFAOYSA-N 0.000 description 1
- YSGBMDFJWFIEDF-UHFFFAOYSA-N methyl 2-hydroxy-3-methylbutanoate Chemical compound COC(=O)C(O)C(C)C YSGBMDFJWFIEDF-UHFFFAOYSA-N 0.000 description 1
- GSJFXBNYJCXDGI-UHFFFAOYSA-N methyl 2-hydroxyacetate Chemical compound COC(=O)CO GSJFXBNYJCXDGI-UHFFFAOYSA-N 0.000 description 1
- KSTORXDPAMPRFG-UHFFFAOYSA-N methyl 2-propoxypropanoate Chemical compound CCCOC(C)C(=O)OC KSTORXDPAMPRFG-UHFFFAOYSA-N 0.000 description 1
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- DMHHINXESLPPMV-UHFFFAOYSA-N methyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OC DMHHINXESLPPMV-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- 125000004674 methylcarbonyl group Chemical group CC(=O)* 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
- 229940017144 n-butyl lactate Drugs 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- JIKUXBYRTXDNIY-UHFFFAOYSA-N n-methyl-n-phenylformamide Chemical compound O=CN(C)C1=CC=CC=C1 JIKUXBYRTXDNIY-UHFFFAOYSA-N 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- ZDHCZVWCTKTBRY-UHFFFAOYSA-N omega-Hydroxydodecanoic acid Natural products OCCCCCCCCCCCC(O)=O ZDHCZVWCTKTBRY-UHFFFAOYSA-N 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- WKGDNXBDNLZSKC-UHFFFAOYSA-N oxido(phenyl)phosphanium Chemical compound O=[PH2]c1ccccc1 WKGDNXBDNLZSKC-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- IMACFCSSMIZSPP-UHFFFAOYSA-N phenacyl chloride Chemical compound ClCC(=O)C1=CC=CC=C1 IMACFCSSMIZSPP-UHFFFAOYSA-N 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- QIWKUEJZZCOPFV-UHFFFAOYSA-N phenyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=CC=CC=C1 QIWKUEJZZCOPFV-UHFFFAOYSA-N 0.000 description 1
- WRAQQYDMVSCOTE-UHFFFAOYSA-N phenyl prop-2-enoate Chemical compound C=CC(=O)OC1=CC=CC=C1 WRAQQYDMVSCOTE-UHFFFAOYSA-N 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- FKRCODPIKNYEAC-UHFFFAOYSA-N propionic acid ethyl ester Natural products CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 1
- 125000001501 propionyl group Chemical group O=C([*])C([H])([H])C([H])([H])[H] 0.000 description 1
- GYOCIFXDRJJHPF-UHFFFAOYSA-N propyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCC GYOCIFXDRJJHPF-UHFFFAOYSA-N 0.000 description 1
- CYIRLFJPTCUCJB-UHFFFAOYSA-N propyl 2-methoxypropanoate Chemical compound CCCOC(=O)C(C)OC CYIRLFJPTCUCJB-UHFFFAOYSA-N 0.000 description 1
- IYVPXMGWHZBPIR-UHFFFAOYSA-N propyl 3-ethoxypropanoate Chemical compound CCCOC(=O)CCOCC IYVPXMGWHZBPIR-UHFFFAOYSA-N 0.000 description 1
- JCMFJIHDWDKYIL-UHFFFAOYSA-N propyl 3-methoxypropanoate Chemical compound CCCOC(=O)CCOC JCMFJIHDWDKYIL-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- OPQYOFWUFGEMRZ-UHFFFAOYSA-N tert-butyl 2,2-dimethylpropaneperoxoate Chemical compound CC(C)(C)OOC(=O)C(C)(C)C OPQYOFWUFGEMRZ-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 229940096522 trimethylolpropane triacrylate Drugs 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/04—Acids; Metal salts or ammonium salts thereof
- C08F220/06—Acrylic acid; Methacrylic acid; Metal salts or ammonium salts thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/32—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
- C08F220/325—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals containing glycidyl radical, e.g. glycidyl (meth)acrylate
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
- Graft Or Block Polymers (AREA)
Abstract
본 발명은 감방사선성 수지 조성물, 표시 패널용 스페이서 및 표시 패널에 관한 것이며, 더욱 상세하게는 액정 패널 및 터치 패널 등의 표시 패널에 사용되는 스페이서를 형성하기 위한 재료로서 적합한 감방사선성 수지 조성물, 그것을 사용한 표시 패널용 스페이서의 형성 방법, 그로부터 형성된 표시 패널용 스페이서 및 그 표시 패널용 스페이서를 갖는 표시 패널에 관한 것이다. The present invention relates to a radiation-sensitive resin composition, a spacer for a display panel and a display panel, more particularly, a radiation-sensitive resin composition suitable as a material for forming a spacer used for display panels such as liquid crystal panels and touch panels, A method of forming a display panel spacer using the same, a display panel spacer formed therefrom, and a display panel having the display panel spacer.
감방사선성 수지 조성물, 표시 패널, 스페이서Radiation-sensitive resin composition, display panel, spacer
Description
본 발명은 감방사선성 수지 조성물, 표시 패널용 스페이서 및 표시 패널에 관한 것이며, 더욱 상세하게는 액정 패널 및 터치 패널 등의 표시 패널에 사용되는 스페이서를 형성하기 위한 재료로서 적합한 감방사선성 수지 조성물, 그것을 사용한 표시 패널용 스페이서의 형성 방법, 그로부터 형성된 표시 패널용 스페이서 및 그 표시 패널용 스페이서를 갖는 표시 패널에 관한 것이다. The present invention relates to a radiation-sensitive resin composition, a spacer for a display panel and a display panel, more particularly, a radiation-sensitive resin composition suitable as a material for forming a spacer used for display panels such as liquid crystal panels and touch panels, A method of forming a display panel spacer using the same, a display panel spacer formed therefrom, and a display panel having the display panel spacer.
액정 패널에는 종래부터 2장의 기판 간격이 일정하게 유지되게 하기 위해 소정의 입경을 갖는 유리 비드, 플라스틱 비드 등의 스페이서 입자가 사용되고 있지만, 이들 스페이서 입자는 유리 기판 등의 투명 기판상에 무작위하게 산포되어 있기 때문에, 화소 형성 영역에 스페이서 입자가 존재하면 스페이서 입자가 비치거나, 입사광이 산란되어 액정 패널의 콘트라스트가 저하되는 문제가 있었다. In the liquid crystal panel, spacer particles such as glass beads and plastic beads having a predetermined particle diameter have conventionally been used in order to keep the two substrate gaps constant, but these spacer particles are randomly scattered on transparent substrates such as glass substrates. Therefore, when the spacer particles exist in the pixel formation region, the spacer particles may be reflected, or incident light may be scattered and the contrast of the liquid crystal panel may be lowered.
그래서, 이들 문제를 해결하기 위해 스페이서를 포트리소그래피로 형성시키는 방법이 이용되었다. 이 방법은 감광성 수지 조성물을 기판 상에 도포하고 소정의 마스크를 통하여 자외선을 노광시킨 후 현상하여, 도트상 또는 스트라이프상의 스페이서를 형성시킬 수 있고, 화소 형성 영역 이외의 소정의 장소에만 스페이서를 형성할 수 있어 상기와 같은 문제를 기본적으로 해결할 수 있다. Thus, a method of photolithographically forming spacers has been used to solve these problems. In this method, the photosensitive resin composition is applied onto a substrate and exposed to ultraviolet rays through a predetermined mask and then developed to form a dot or stripe spacer, and the spacer is formed only at a predetermined place other than the pixel formation region. This can basically solve the above problems.
그런데, 실제의 스페이서 형성 공정, 예를 들면 컬러 필터 등에 사용되는 기판상에 포토리소그래피에 의해 스페이서를 형성할 경우에는 프록시미티 노광기를 사용하는 것이 많다. 이 프록시미티 노광의 경우, 마스크와 감광성 수지 조성물을 도포한 기판과의 사이에 일정한 갭을 설치하여 노광시킨다. 노광은, 마스크대로의 패턴으로 노광시키는 것이 이상적이지만, 상기 갭은 공기 또는 질소로 채워져 있고 마스크의 개구부(투명부)를 통과한 광이 이 갭부에서 확산하여 넓어지기 때문에, 마스크 패턴의 설계 크기보다 넓게 노광되게 된다. 그 때문에, 경화물의 치수가 마스크 개구부의 치수보다 커져 경화물의 치수 및 형상 제어에 문제점을 갖고 있었다. By the way, when forming a spacer by photolithography on the board | substrate used for an actual spacer formation process, for example, a color filter, etc., a proximity exposure machine is often used. In this proximity exposure, a constant gap is provided between a mask and the board | substrate which apply | coated the photosensitive resin composition, and it exposes. The exposure is ideally exposed in a pattern according to a mask, but since the gap is filled with air or nitrogen, and light passing through the opening (transparent portion) of the mask diffuses and widens in this gap portion, it is larger than the design size of the mask pattern. Wide exposure. Therefore, the dimension of hardened | cured material became larger than the dimension of a mask opening part, and there existed a problem in the dimension and shape control of hardened | cured material.
본 발명의 과제는, 프록시미티 노광에 의해 마스크 패턴의 설계 크기를 충실하게 재현할 수 있고, 또한 스페이서로서 필요한 강도, 내열성 등이 우수한 표시 패널용 스페이서를 형성할 수 있는 감방사선성 수지 조성물, 그것을 이용한 표시 패널용 스페이서의 형성 방법, 그로부터 형성된 표시 패널용 스페이서, 및 그 표시 패널용 스페이서를 갖는 신뢰성이 높은 표시 패널을 제공하는 것에 있다. The subject of this invention is a radiation sensitive resin composition which can faithfully reproduce the design size of a mask pattern by proximity exposure, and can form the spacer for display panels excellent in the strength, heat resistance, etc. which are required as a spacer, and The present invention provides a highly reliable display panel having a method for forming a display panel spacer, a display panel spacer formed therefrom, and a display panel spacer.
본 발명에 의하면 상기 과제는,According to the present invention,
[A] (a1) 에틸렌성 불포화 카르복실산 및(또는) 에틸렌성 불포화 카르복실산 무수물과 (a2) 에폭시기 함유 에틸렌성 불포화 화합물과 (a3) 다른 에틸렌성 불포화 화합물과의 공중합체, [A] a copolymer of (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic anhydride with (a2) an epoxy group-containing ethylenically unsaturated compound and (a3) another ethylenically unsaturated compound,
[B] 에틸렌성 불포화 결합을 갖는 중합성 화합물, 및[B] a polymerizable compound having an ethylenically unsaturated bond, and
[C] 하기 화학식 1로 표시되는 트리할로메틸트리아진류를 함유하는 광 중합 개시제를 함유하는 것을 특징으로 하는 감방사선성 수지 조성물에 의해서 달성된다.(C) It is achieved by the radiation sensitive resin composition characterized by containing the photoinitiator containing trihalomethyl triazine represented by following General formula (1).
식 중, X는 할로겐을 나타내고, In the formula, X represents a halogen,
A는 CX3 또는 하기 화학식으로 표시되는 기를 나타내고, A represents a group represented by CX 3 or the following formula,
여기서, B, D 및 E는 각각 독립적으로 수소, 탄소수 1 내지 10의 알킬기, 아릴기 또는 알콕시기, 아릴옥시기, 티오알킬기, 티오아릴기, 할로겐, 시아노기, 니트로기, 디(탄소수 1 내지 10의 알킬)아미노기, 카르복실기, 수산기, 탄소수 1 내지 10의 케토알킬기 또는 케토아릴기, 탄소수 2 내지 20의 알콕시카르보닐기 또는 알킬카르보닐옥시기를 나타내며, m은 1 내지 5의 정수를 나타낸다. Here, B, D and E are each independently hydrogen, alkyl group having 1 to 10 carbon atoms, aryl group or alkoxy group, aryloxy group, thioalkyl group, thioaryl group, halogen, cyano group, nitro group, di An alkyl) amino group of 10, a carboxyl group, a hydroxyl group, a ketoalkyl group or a ketoaryl group having 1 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms or an alkylcarbonyloxy group, and m represents an integer of 1 to 5.
또한, 본 발명의 제2의 과제는 적어도 Moreover, the 2nd subject of this invention is at least
① 상기한 감방사선성 수지 조성물의 도포막을 기판상에 형성하는 공정,① process of forming the coating film of said radiation sensitive resin composition on a board | substrate,
② 상기 도포막의 적어도 일부에 방사선을 조사하는 공정,② a step of irradiating at least a portion of the coating film with radiation,
③ 현상 공정,③ developing process,
④ 가열 처리 공정④ heat treatment process
을 포함하는 것을 특징으로 하는 표시 패널용 스페이서의 형성 방법에 의해 달성된다. It is achieved by a method for forming a spacer for a display panel comprising a.
또한 본 발명의 제3의 과제는 상기 감방사선성 수지 조성물로부터 형성된 표시 패널용 스페이서에 의해 달성된다. Moreover, the 3rd subject of this invention is achieved by the spacer for display panels formed from the said radiation sensitive resin composition.
본 발명의 제4의 과제는 상기 감방사선성 수지 조성물로부터 형성된 표시 패널용 스페이서를 갖는 표시 패널에 의해서 달성된다. The 4th subject of this invention is achieved by the display panel which has a display panel spacer formed from the said radiation sensitive resin composition.
이하, 본 발명의 감방사선성 수지 조성물의 각 성분에 대해서 상세하게 설명한다. Hereinafter, each component of the radiation sensitive resin composition of this invention is demonstrated in detail.
공중합체 [A] Copolymer [A]
본 발명에 있어서 [A] 성분은 (a1) 에틸렌성 불포화 카르복실산 및(또는) 에 틸렌성 불포화 카르복실산 무수물과 (a2) 에폭시기 함유 에틸렌성 불포화 화합물과 (a3) 다른 에틸렌성 불포화 화합물과의 공중합체(이하, "공중합체 [A]"라고 함)를 포함한다. In the present invention, the component [A] is composed of (a1) an ethylenically unsaturated carboxylic acid and / or an ethylene unsaturated carboxylic anhydride, (a2) an epoxy group-containing ethylenically unsaturated compound, and (a3) another ethylenically unsaturated compound. Copolymers (hereinafter referred to as "copolymer [A]").
공중합체 [A]를 구성하는 각 성분 중, (a1) 에틸렌성 불포화 카르복실산 및(또는) 에틸렌성 불포화 카르복실산 무수물(이하, 이들을 통합하여 "불포화 카르복실산계 단량체 (a1)"라고 함)로는, 예를 들어 아크릴산, 메타크릴산, 크로톤산 등의 모노카르복실산; 말레산, 푸마르산, 시트라콘산, 메사콘산, 이타콘산 등의 디카르복실산; 이들 디카르복실산 무수물, 숙신산 모노[2-(메타)아크릴로일옥시에틸], 프탈산 모노[2-(메타)아크릴로일옥시에틸] 등의 2가 이상의 다가 카르복실산의 모노[(메타)아크릴로일옥시알킬]에스테르류; 및 ω-카르복시폴리카프로락톤모노(메타)아크릴레이트 등의 양 말단에 카르복실기와 수산기를 갖는 중합체의 모노(메타)아크릴레이트류를 들 수 있다. Among the components constituting the copolymer [A], (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic anhydride (hereinafter, collectively referred to as "unsaturated carboxylic acid monomer (a1)") ), For example, monocarboxylic acids, such as acrylic acid, methacrylic acid, and crotonic acid; Dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid and itaconic acid; Mono [(meth) of divalent or more polyvalent carboxylic acids, such as these dicarboxylic anhydrides, succinic acid mono [2- (meth) acryloyloxyethyl], and phthalic acid mono [2- (meth) acryloyloxyethyl] ) Acryloyloxyalkyl] esters; And mono (meth) acrylates of polymers having a carboxyl group and a hydroxyl group at both terminals, such as? -Carboxypolycaprolactone mono (meth) acrylate.
이들 불포화 카르복실산계 단량체 (a1) 중, 공중합 반응성, 얻어지는 공중합체의 알칼리 수용액에 대한 용해성 및 입수가 용이한 점에서 아크릴산, 메타크릴산, 말레산 무수물 등이 바람직하다. Among these unsaturated carboxylic acid monomers (a1), acrylic acid, methacrylic acid, maleic anhydride, and the like are preferable from the viewpoint of copolymerization reactivity, solubility in an aqueous alkali solution, and availability of the copolymer obtained.
본 발명에 있어서 불포화 카르복실산계 단량체 (a1)는 단독으로 또는 2종 이상을 조합시켜 사용할 수 있다.In the present invention, the unsaturated carboxylic acid monomer (a1) can be used alone or in combination of two or more thereof.
공중합체 [A]에 있어서, 불포화 카르복실산계 단량체 (a1)에 유래하는 반복 단위의 함유율은 바람직하게는 5 내지 40 중량%, 특히 바람직하게는 10 내지 30 중량%이다. 이 경우, 불포화 카르복실산계 단량체 (a1)에 유래하는 반복 단위의 함유율이 5 중량% 미만이면, 알칼리 수용액에 대한 용해성이 저하되는 경향이 있고, 한편 40 중량%을 초과하면, 알칼리 수용액에 대한 용해성이 지나치게 커질 우려가 있다.In the copolymer [A], the content of the repeating unit derived from the unsaturated carboxylic acid monomer (a1) is preferably 5 to 40% by weight, particularly preferably 10 to 30% by weight. In this case, when the content rate of the repeating unit derived from an unsaturated carboxylic acid monomer (a1) is less than 5 weight%, there exists a tendency for the solubility to aqueous alkali solution to fall, and when it exceeds 40 weight%, it is solubility to aqueous alkali solution. This may grow too large.
또한, (a2) 에폭시기 함유 에틸렌성 불포화 화합물(이하, "에폭시기 함유 단량체 (a2)"라고 함)로는, 예를 들어 아크릴산글리시딜, 아크릴산2-메틸글리시딜, 아크릴산3,4-에폭시부틸, 아크릴산6,7-에폭시헵틸 등의 아크릴산에폭시알킬에스테르류; 메타크릴산글리시딜, 메타크릴산2-메틸글리시딜, 메타크릴산3,4-에폭시부틸, 메타크릴산6,7-에폭시헵틸 등의 메타크릴산 에폭시알킬에스테르류;α-에틸아크릴산글리시딜, α-n-프로필아크릴산글리시딜, α-n-부틸아크릴산글리시딜, α-에틸아크릴산6,7-에폭시헵틸 등의α-알킬아크릴산 에폭시알킬에스테르류; o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르 등의 글리시딜에테르류를 들 수 있다. Moreover, as (a2) epoxy group containing ethylenically unsaturated compound (henceforth "epoxy group containing monomer (a2)"), for example, glycidyl acrylate, 2-methyl glycidyl acrylate, 3, 4- epoxy butyl acrylate. Acrylic acid epoxy alkyl esters such as acrylic acid 6,7-epoxyheptyl; Methacrylic acid epoxy alkyl esters such as methacrylic acid glycidyl, methacrylic acid 2-methylglycidyl, methacrylic acid 3,4-epoxybutyl, methacrylic acid 6,7-epoxyheptyl; α-ethylacrylic acid Α-alkylacrylic acid epoxy alkyl esters such as glycidyl, α-n-propyl acrylate glycidyl, α-n-butyl acrylate glycidyl and α-ethyl acrylate 6,7-epoxyheptyl; and glycidyl ethers such as o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether and p-vinyl benzyl glycidyl ether.
이들 에폭시기 함유 단량체 (a2) 중, 공중합 반응성 및 스페이서의 강도의 점에서 메타크릴산글리시딜, 메타크릴산6,7-에폭시헵틸, o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르 등이 바람직하다. Among these epoxy group-containing monomers (a2), methacrylate glycidyl, methacrylic acid 6,7-epoxyheptyl, o-vinylbenzyl glycidyl ether and m-vinylbenzyl glycid in terms of copolymerization reactivity and the strength of the spacer Dyl ether, p-vinylbenzyl glycidyl ether, etc. are preferable.
본 발명에 있어서, 에폭시기 함유 단량체 (a2)는 단독으로 또는 2종 이상을 조합시켜 사용할 수 있다. In this invention, an epoxy group containing monomer (a2) can be used individually or in combination of 2 or more types.
공중합체 [A]에 있어서, 에폭시기 함유 단량체 (a2)에 유래하는 반복 단위의 함유율은 바람직하게는 10 내지 70 중량%, 특히 바람직하게는 20 내지 60 중량%이다. 이 경우, 에폭시기 함유 단량체 (a2)에 유래하는 반복 단위의 함유율이 10 중량% 미만이면 얻어지는 스페이서의 강도가 저하되는 경향이 있고, 한편 70 중량%을 초과하면 얻어지는 공중합체의 보존 안정성이 저하되는 경향이 있다. In the copolymer [A], the content rate of the repeating unit derived from an epoxy group containing monomer (a2) becomes like this. Preferably it is 10 to 70 weight%, Especially preferably, it is 20 to 60 weight%. In this case, when the content rate of the repeating unit derived from an epoxy group containing monomer (a2) is less than 10 weight%, there exists a tendency for the intensity | strength of the spacer obtained to fall, and when it exceeds 70 weight%, the storage stability of the copolymer obtained will fall. There is this.
또한, (a3)의 다른 에틸렌성 불포화 화합물(이하, "다른 단량체 (a3)"라고 함)로는, 예를 들어 아크릴산메틸, 아크릴산i-프로필 등의 아크릴산알킬에스테르류; 메타크릴산메틸, 메타크릴산에틸, 메타크릴산n-부틸, 메타크릴산sec-부틸, 메타크릴산t-부틸 등의 메타크릴산알킬에스테르류; 아크릴산시클로헥실, 아크릴산2-메틸시클로헥실, 아크릴산트리시클로[5.2.1.02,6]데칸-8-일, 아크릴산2-(트리시클로[5.2.1.02,6]데칸-8-일옥시)에틸, 아크릴산이소보로닐 등의 아크릴산 지환식 에스테르류; 메타크릴산시클로헥실, 메타크릴산2-메틸시클로헥실, 메타크릴산트리시클로[5.2.1.02,6]데칸-8-일, 메타크릴산2-(트리시클로[5.2.1.02, 6]데칸-8-일옥시)에틸, 메타크릴산이소보로닐 등의 메타크릴산 지환식 에스테르류; 아크릴산페닐, 아크릴산벤질 등의 아크릴산의 아릴에스테르 또는 아랄킬에스테르류; 메타크릴산페닐, 메타크릴산벤질 등의 메타크릴산의 아릴에스테르 또는 아랄킬에스테르류; 말레산디에틸, 푸마르산디에틸, 이타콘산디에틸 등의 디카르복실산디알킬에스테르류; 메타크릴산2-히드록시에틸, 메타크릴산2-히드록시프로필 등의 메타크릴산히드록시알킬에스테르류; 스티렌, α-메틸스티렌, m-메틸스티렌, p-메틸스티렌, p-메톡시스티렌 등의 비닐 방향족 화합물; 1,3-부타디엔, 이소프렌, 2,3-디메틸-1,3-부타디엔 등의 공액 디엔계 화합물 외에, 아크릴로니트릴, 메타크릴로니트릴, 아크릴아미드, 메타크릴아미드, 염화비닐, 염화비닐리덴, 아세트산비닐 등을 들 수 있다. Moreover, as another ethylenically unsaturated compound (henceforth "other monomer (a3)") of (a3), For example, alkyl acrylates, such as methyl acrylate and i-propyl acrylate; Alkyl methacrylates such as methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, sec-butyl methacrylate, and t-butyl methacrylate; Cyclohexyl acrylate, 2-methylcyclohexyl acrylate, tricyclo [5.2.1.0 2,6 ] decane-8-yl acrylate, 2- (tricyclo [5.2.1.0 2,6 ] decane-8-yloxy) ethyl acrylate Acrylic alicyclic esters such as isoboroyl acrylate; Cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, tricyclo methacrylate [5.2.1.0 2,6 ] decane-8-yl, 2-methacrylic acid (tricyclo [5.2.1.0 2, 6 ] Methacrylic acid alicyclic esters such as decan-8-yloxy) ethyl and isobornyl methacrylate; Aryl esters or aralkyl esters of acrylic acid such as phenyl acrylate and benzyl acrylate; Aryl esters or aralkyl esters of methacrylic acid such as phenyl methacrylate and benzyl methacrylate; Dicarboxylic acid dialkyl esters such as diethyl maleate, diethyl fumarate and diethyl itaconic acid; Methacrylic acid hydroxyalkyl esters such as methacrylic acid 2-hydroxyethyl and methacrylic acid 2-hydroxypropyl; Vinyl aromatic compounds such as styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, and p-methoxystyrene; In addition to conjugated diene-based compounds such as 1,3-butadiene, isoprene and 2,3-dimethyl-1,3-butadiene, acrylonitrile, methacrylonitrile, acrylamide, methacrylamide, vinyl chloride, vinylidene chloride, Vinyl acetate etc. are mentioned.
이들 다른 단량체 (a3) 중, 공중합 반응성 및 얻어지는 공중합체의 알칼리 수용액에 대한 용해성의 점에서, 아크릴산2-메틸시클로헥실, 메타크릴산 t-부틸, 메타크릴산트리시클로[5.2.1.02,6]데칸-8-일, 스티렌, p-메톡시스티렌, 1,3-부타디엔 등이 바람직하다. Among these other monomers (a3), 2-methylcyclohexyl acrylate, t-butyl methacrylate and tricyclo methacrylate [5.2.1.0 2,6] in terms of copolymerization reactivity and solubility in an aqueous alkali solution of the resulting copolymer. ] Decane-8-yl, styrene, p-methoxystyrene, 1,3-butadiene and the like are preferred.
본 발명에 있어서, 다른 단량체 (a3)는 단독으로 또는 2종 이상을 조합시켜 사용할 수 있다. In this invention, another monomer (a3) can be used individually or in combination of 2 or more types.
공중합체 [A]에 있어서, 다른 단량체 (a3)에 유래하는 반복 단위의 함유율은 바람직하게는 10 내지 70 중량%, 특히 바람직하게는 20 내지 50 중량%이다. 이 경우, 다른 단량체 (a3)에 유래하는 반복 단위의 함유율이 10 중량% 미만이면 얻어지는 공중합체의 보존 안정성이 저하되는 경향이 있고, 70 중량%을 초과하면 얻어지는 공중합체의 알칼리 수용액에 대한 용해성이 저하되는 경향이 있다. In the copolymer [A], the content rate of the repeating unit derived from another monomer (a3) becomes like this. Preferably it is 10 to 70 weight%, Especially preferably, it is 20 to 50 weight%. In this case, when the content rate of the repeating unit derived from another monomer (a3) is less than 10 weight%, the storage stability of the copolymer obtained tends to fall, and when it exceeds 70 weight%, the solubility with respect to the aqueous alkali solution of the copolymer obtained is It tends to be lowered.
본 발명에 사용되는 공중합체 [A]는 카르복실기 및(또는) 카르복실산 무수물기와 에폭시기를 갖고, 알칼리 수용액에 대해 알맞는 용해성을 가짐과 동시에, 특별한 경화제를 병용하지 않아도 가열에 의해 쉽게 경화시킬 수 있고, 이 공중합체를 함유하는 본 발명의 감방사선성 수지 조성물은, 현상할 때에 현상 찌꺼기 및 막 감소가 발생하지 않고 소정 패턴의 스페이서를 쉽게 형성할 수 있다.The copolymer [A] used in the present invention has a carboxyl group and / or a carboxylic anhydride group and an epoxy group, has moderate solubility in aqueous alkali solution, and can be easily cured by heating without using a special curing agent. In addition, the radiation sensitive resin composition of this invention containing this copolymer can form a spacer of a predetermined pattern easily, without developing waste and film | membrane reduction at the time of image development.
본 발명에서 바람직하게 사용할 수 있는 공중합체 [A]의 구체예로는, 예를 들어 메타크릴산/메타크릴산글리시딜/스티렌 공중합체, As a specific example of the copolymer [A] which can be preferably used by this invention, For example, methacrylic acid / glycidyl methacrylate / styrene copolymer,
메타크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Methacrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
메타크릴산/메타크릴산글리시딜/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Methacrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
메타크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/벤질메타크릴레이트/스티렌 공중합체, Methacrylic acid / methacrylate glycidyl / benzyl methacrylate / styrene copolymer,
메타크릴산/메타크릴산글리시딜/벤질메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / benzyl methacrylate / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/벤질메타크릴레이트/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / benzyl methacrylate / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/페닐말레이미드/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / phenylmaleimide / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/시클로헥실말레이미드/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / cyclohexylmaleimide / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/2-히드록시에틸메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylic acid glycidyl / 2-hydroxyethyl methacrylate / styrene / 1,3-butadiene copolymer,
메타크릴산/아크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Methacrylic acid / glycidyl acrylate / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
메타크릴산/아크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / glycidyl acrylate / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
메타크릴산/P-비닐벤질글리시딜에테르/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Methacrylic acid / P-vinylbenzylglycidylether / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
메타크릴산/P-비닐벤질글리시딜에테르/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / P-vinylbenzylglycidylether / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
아크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Acrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
아크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Acrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
아크릴산/아크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Acrylic acid / glycidyl acrylate / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
아크릴산/아크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/ 스티렌/1,3-부타디엔 공중합체를 들 수 있다.Acrylic acid / glycidyl acrylate / tricyclo [5.2.1.0 2,6 ] decan-8-yl methacrylate / styrene / 1, 3- butadiene copolymer is mentioned.
그 중에서도 메타크릴산/메타크릴산글리시딜/스티렌/1,3-부타디엔 공중합체, Among them, methacrylic acid / methacrylate glycidyl / styrene / 1,3-butadiene copolymer,
메타크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌 공중합체, Methacrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene copolymer,
메타크릴산/메타크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / methacrylate glycidyl / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
메타크릴산/아크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체, Methacrylic acid / glycidyl acrylate / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer,
아크릴산/아크릴산글리시딜/트리시클로[5.2.1.02,6]데칸-8-일메타크릴레이트/스티렌/1,3-부타디엔 공중합체를 바람직하게 사용할 수 있다. Acrylic acid / glycidyl acrylate / tricyclo [5.2.1.0 2,6 ] decane-8-ylmethacrylate / styrene / 1,3-butadiene copolymer can be preferably used.
공중합체 [A]는 예를 들면, 불포화 카르복실산계 단량체 (a1), 에폭시기 함유 단량체 (a2) 및 다른 단량체 (a3)를 적당한 용매 중, 라디칼 중합 개시제의 존재하에 중합함으로써 제조할 수 있다. Copolymer [A] can be produced, for example, by polymerizing an unsaturated carboxylic acid monomer (a1), an epoxy group-containing monomer (a2) and another monomer (a3) in a suitable solvent in the presence of a radical polymerization initiator.
상기 중합에 사용할 수 있는 용매로는 예를 들면, As a solvent which can be used for the said superposition | polymerization, for example,
메탄올, 에탄올, n-프로판올, i-프로판올 등의 알코올류; Alcohols such as methanol, ethanol, n-propanol and i-propanol;
테트라히드로푸란, 디옥산 등의 에테르류; Ethers such as tetrahydrofuran and dioxane;
에틸렌 글리콜모노메틸에테르, 에틸렌 글리콜모노에틸에테르, 에틸렌 글리콜모노-n-프로필에테르, 에티렌글리콜모노-n-부틸에테르 등의 에틸렌 글리콜모노알킬 에테르류;Ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether and ethylene glycol mono-n-butyl ether;
에틸렌 글리콜모노메틸에테르아세테이트, 에틸렌 글리콜모노에틸에테르, 에틸렌 글리콜모노-n-프로필에테르아세테이트, 에틸렌 글리콜모노-n-부틸에테르아세테이트 등의 에틸렌 글리콜모노알킬에테르아세테이트류; Ethylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether acetate, and ethylene glycol mono-n-butyl ether acetate;
에틸렌 글리콜모노메틸에테르프로피오네이트, 에틸렌 글리콜모노에틸에테르프로피오네이트, 에틸렌 글리콜모노-n-프로필에테르프로피오네이트, 에틸렌 글리콜모노-n-부틸에테르프로피오네이트 등의 에틸렌 글리콜모노알킬에테르프로피오네이트류; Ethylene glycol monoalkyl ether propionate, such as ethylene glycol monomethyl ether propionate, ethylene glycol monoethyl ether propionate, ethylene glycol mono-n-propyl ether propionate, and ethylene glycol mono-n-butyl ether propionate Nates;
디에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노에틸에테르, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜디에틸에테르, 디에틸렌글리콜메틸에틸에테르 등의 디에틸렌글리콜알킬에테르류;Diethylene glycol alkyl ethers such as diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether and diethylene glycol methyl ethyl ether;
프로필렌글리콜모노메틸에테르, 프로필렌글리콜모노에틸에테르, 프로필렌글리콜모노-n-프로필에테르, 프로필렌글리콜모노-n-부틸에테르 등의 프로필렌글리콜모노알킬에테르류; Propylene glycol monoalkyl ethers such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether and propylene glycol mono-n-butyl ether;
프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 프로필렌글리콜모노-n-프로필에테르아세테이트, 프로필렌글리콜모노-n-부틸에테르아세테이트 등의 프로필렌글리콜모노알킬에테르아세테이트류; Propylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol mono-n-propyl ether acetate, and propylene glycol mono-n-butyl ether acetate;
프로필렌글리콜모노메틸에테르프로피오네이트, 프로필렌글리콜모노에틸에테르프로피오네이트, 프로필렌글리콜모노-n-프로필에테르프로피오네이트, 프로필렌글리콜모노-n-부틸에테르프로피오네이트 등의 프로필렌글리콜모노알킬에테르프로피오 네이트류; Propylene glycol monoalkyl ether propionate, such as propylene glycol monoethyl ether propionate, propylene glycol mono-n-propyl ether propionate, and propylene glycol mono-n-butyl ether propionate Nates;
톨루엔, 크실렌 등의 방향족 탄화수소류;Aromatic hydrocarbons such as toluene and xylene;
메틸에틸케톤, 2-펜타논, 3-펜타논, 시클로헥사논, 4-히드록시-4-메틸-2-펜타논 등의 케톤류; Ketones such as methyl ethyl ketone, 2-pentanone, 3-pentanone, cyclohexanone, and 4-hydroxy-4-methyl-2-pentanone;
2-메톡시프로피온산메틸, 2-메톡시프로피온산에틸, 2-메톡시프로피온산n-프로필, 2-메톡시프로피온산n-부틸, 2-에톡시프로피온산메틸, 2-에톡시프로피온산에틸, 2-에톡시프로피온산n-프로필, 2-에톡시프로피온산n-부틸, 2-n-프로폭시프로피온산메틸, 2-n-프로폭시프로피온산에틸, 2-n-프로폭시프로피온산n-프로필, 2-n-프로폭시프로피온산n-부틸, 2-n-부톡시프로피온산메틸, 2-n-부톡시프로피온산에틸, 2-n-부톡시프로피온산n-프로필, 2-n-부톡시프로피온산n-부틸, 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-메톡시프로피온산n-프로필, 3-메톡시프로피온산n-부틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 3-에톡시프로피온산n-프로필, 3-에톡시프로피온산n-부틸, 3-n-프로폭시프로피온산메틸, 3-n-프로폭시프로피온산에틸, 3-n-프로폭시프로피온산n-프로필, 3-n-프로폭시프로피온산n-부틸, 3-n-부톡시프로피온산메틸, 3-n-부톡시프로피온산에틸, 3-n-부톡시프로피온산n-프로필, 3-n-부톡시프로피온산n-부틸 등의 알콕시프로피온산알킬류 또는 Methyl 2-methoxypropionate, 2-methoxy ethylpropionate, n-propyl 2-methoxypropionate, n-butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, 2-ethoxy N-propyl propionate, n-butyl 2-ethoxypropionate, methyl 2-n-propoxypropionate, ethyl 2-n-propoxypropionate, n-propyl 2-n-propoxypropionic acid, 2-n-propoxypropionic acid n-butyl, 2-n-butoxypropionate, ethyl 2-n-butoxypropionate, n-propyl 2-n-butoxypropionate, n-butyl 2-n-butoxypropionate, methyl 3-methoxypropionate , Ethyl 3-methoxypropionate, n-propyl 3-methoxypropionate, n-butyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, n-propyl 3-ethoxypropionate, 3 N-butyl ethoxypropionate, methyl 3-n-propoxypropionate, ethyl 3-n-propoxypropionate, n-propoxypropionate Lofil, 3-n-propoxypropionate n-butyl, 3-n-butoxypropionate, ethyl 3-n-butoxypropionate, 3-n-butoxypropionate n-propyl, 3-n-butoxypropionate n Alkyl alkoxypropionates such as butyl or
아세트산메틸, 아세트산에틸, 아세트산n-프로필, 아세트산n-부틸, 히드록시아세트산메틸, 히드록시아세트산에틸, 히드록시아세트산n-프로필, 히드록시아세트산n-부틸, 락트산메틸, 락트산에틸, 락트산n-프로필, 락트산n-부틸, 2-히드록시-2- 메틸프로피온산메틸, 2-히드록시-2-메틸프로피온산에틸, 3-히드록시프로피온산메틸, 3-히드록시프로피온산에틸, 3-히드록시프로피온산n-프로필, 3-히드록시프로피온산n-부틸, 2-히드록시-3-메틸부탄산메틸, 메톡시아세트산메틸, 메톡시아세트산에틸, 메톡시아세트산n-프로필, 메톡시아세트산n-부틸, 에톡시아세트산메틸, 에톡시아세트산에틸, 에톡시아세트산n-프로필, 에톡시아세트산n-부틸, n-프로폭시아세트산메틸, n-프로폭시아세트산에틸, n-프로폭시아세트산n-프로필, n-프로폭시아세트산n-부틸, n-부톡시아세트산메틸, n-부톡시아세트산에틸, n-부톡시아세트산n-프로필, n-부톡시아세트산n-부틸 등의 기타 에스테르류 등을 들 수 있다. Methyl acetate, ethyl acetate, n-propyl acetate, n-butyl acetate, methyl hydroxyacetate, ethyl hydroxyacetate, hydroxyacetic acid n-propyl, hydroxyacetic acid n-butyl, methyl lactate, ethyl lactate, n-propyl lactate N-butyl lactate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, n-propyl hydroxypropionate N-butyl 3-hydroxypropionate, methyl 2-hydroxy-3-methylbutyrate, methyl methoxyacetate, ethyl methoxyacetate, methoxyacetic acid n-propyl, methoxyacetic acid n-butyl, methyl ethoxyacetic acid , Ethoxy acetate, ethoxy acetate n-propyl, ethoxy acetate n-butyl, n-propoxy acetate, n-propoxy acetate, n-propoxy acetate n-propyl, n-propoxy acetate n- Butyl, n-butoxyacetic acid And other esters such as ethyl, n-butoxyacetate, n-butoxyacetate n-propyl, and n-butoxyacetate n-butyl.
이들 용매 중, 디에틸렌글리콜알킬에테르류, 프로필렌글리콜모노알킬에테르아세테이트류, 알콕시프로피온산알킬류 등이 바람직하다. Among these solvents, diethylene glycol alkyl ethers, propylene glycol monoalkyl ether acetates, alkyl alkoxypropionates and the like are preferable.
상기 용매는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said solvent can be used individually or in mixture of 2 or more types.
또한, 상기 중합에 사용되는 라디칼 중합 개시제로는, 특별히 한정되지 않지만 예를 들면, 2,2'-아조비스이소부티로니트릴, 2,2'-아조비스-(2,4-디메틸발레로니트릴), 2,2'-아조비스-(4-메톡시-2,4-디메틸발레로니트릴) 등의 아조 화합물; 벤조일퍼옥시드, 라우로일퍼옥시드, t-부틸퍼옥시피발레이트, 1,1-비스(t-부틸퍼옥시)시클로헥산 등의 유기 과산화물; 과산화수소 등을 들 수 있다. 또한, 라디칼 중합 개시제로서 과산화물을 사용할 경우에는 그것과 환원제를 병용하여, 레독스형으로 할 수도 있다. Moreover, as a radical polymerization initiator used for the said superposition | polymerization, although it does not specifically limit, For example, 2,2'- azobisisobutyronitrile, 2,2'- azobis- (2, 4- dimethylvaleronitrile ), Azo compounds such as 2,2'-azobis- (4-methoxy-2,4-dimethylvaleronitrile); Organic peroxides such as benzoyl peroxide, lauroyl peroxide, t-butylperoxy pivalate and 1,1-bis (t-butylperoxy) cyclohexane; Hydrogen peroxide and the like. In addition, when using a peroxide as a radical polymerization initiator, it can also be used together and a reducing agent to make it a redox type.
이들 라디칼 중합 개시제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These radical polymerization initiators can be used individually or in mixture of 2 or more types.
이와 같이 하여 얻어진 공중합체 [A]는 용액 그대로 감방사선성 수지 조성물의 제조에 이용되며 또한, 용액으로부터 분리되어 감방사선성 수지 조성물의 제조제에 이용될 수도 있다. The copolymer [A] obtained in this manner is used for the production of the radiation-sensitive resin composition as it is, or may be separated from the solution and used for the preparation of the radiation-sensitive resin composition.
공중합체 [A]의 겔 퍼미에이션 크로마토그래피(GPC)에 의한 폴리스티렌 환산 중량 평균 분자량(이하, "Mw"라고 함)은 통상 2,000 내지 100,000의 범위이며, 5,000 내지 50,000의 범위인 것이 바람직하다. 이 경우, Mw가 2,000 미만에서는 얻어지는 피막의 현상성, 잔막율 등이 저하되거나, 또한 패턴 형상, 내열성 등이 손상될 우려가 있고, 100,000을 초과하면 해상도가 저하되거나 패턴 형상이 손상될 우려가 있다.The polystyrene reduced weight average molecular weight (hereinafter referred to as "Mw") by gel permeation chromatography (GPC) of the copolymer [A] is usually in the range of 2,000 to 100,000, preferably in the range of 5,000 to 50,000. In this case, when Mw is less than 2,000, developability, residual film ratio, etc. of a film obtained may fall, or pattern shape, heat resistance, etc. may be impaired, and when it exceeds 100,000, resolution may fall or pattern shape may be damaged. .
중합성 화합물 [B]Polymeric compounds [B]
본 발명에 사용되는 [B] 성분은 에틸렌성 불포화 결합을 갖는 중합성 화합물(이하, "중합성 화합물 [B]"이라고 함.) Component [B] used in the present invention is a polymerizable compound having an ethylenically unsaturated bond (hereinafter referred to as "polymerizable compound [B]").
중합성 화합물 [B]는 특별히 한정되지 않지만, 단관능, 2관능 또는 3관능 이상의 (메타)아크릴산에스테르류가 중합성이 양호하고, 얻어지는 스페이서 강도가 향상되는 점에서 바람직하고, 특히 3관능 이상의 (메타)아크릴산에스테르류가 바람직하다. Although a polymeric compound [B] is not specifically limited, Monofunctional, bifunctional, or trifunctional or more (meth) acrylic acid esters are preferable at the point from which polymerization property is favorable and the spacer strength obtained improves, especially trifunctional or more ( Meta) acrylic acid esters are preferable.
상기 단관능(메타)아크릴산에스테르류로는, 예를 들어 2-히드록시에틸아크릴레이트, 2-히드록시에틸메타크릴레이트, 디에틸렌 글리콜모노에틸에테르아크릴레이트, 디에틸렌 글리콜모노에틸에테르메타크릴레이트, 이소보로닐아크릴레이트, 이소보로닐메타크릴레이트, 3-메톡시부틸아크릴레이트, 3-메톡시부틸메타크릴레이트, 2-아크릴로일옥시에틸-2-히드록시프로필프탈레이트, 2-메타크릴로일옥시에틸-2-히드록시프로필프탈레이트 등을 들 수 있고, 또한 시판품으로 예를 들면, 알로닉스 M-l01, 동 M-111, 동 M-114(도아 고세이(주) 제조); KAYARAD TC-110 S, 동 TC-120 S(니혼 가야꾸(주) 제조) ; 비스코트 158, 동 2311(오사까 유끼 가가꾸 고교(주) 제조) 등을 들 수 있다. As said monofunctional (meth) acrylic acid ester, for example, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, diethylene glycol monoethyl ether acrylate, diethylene glycol monoethyl ether methacrylate , Isoboroyl acrylate, isoboroyl methacrylate, 3-methoxybutyl acrylate, 3-methoxybutyl methacrylate, 2-acryloyloxyethyl-2-hydroxypropyl phthalate, 2- Methacryloyloxyethyl-2-hydroxypropyl phthalate etc. are mentioned, Furthermore, As a commercial item, For example, Alonics M-11, Copper M-111, Copper M-114 (made by Toagosei Co., Ltd.); KAYARAD TC-110S, TC-120S (manufactured by Nihon Kayaku Co., Ltd.); Biscoat 158, copper 2311 (manufactured by Osaka Yuki Chemical Co., Ltd.), and the like.
또한, 상기 2관능(메타)아크릴산에스테르류로는, 예를 들어 에틸렌 글리콜디아크릴레이트, 에틸렌 글리콜디메타크릴레이트, 디에틸렌글리콜디아크릴레이트, 디에틸렌글리콜디메타크릴레이트, 테트라에틸렌 글리콜디아크릴레이트, 테트라에틸렌 글리콜디메타크릴레이트, 1,6-헥산디올디아크릴레이트, 1,6-헥산디올디메타크릴레이트, 1,9-노난디올디아크릴레이트, 1,9-노난디올디메타크릴레이트, 비스페녹시에탄올플루오렌디아크릴레이트, 비스페녹시에탄올플루오렌디메타크릴레이트 등을 들 수 있고, 또한 시판품으로 예를 들면, 알로닉스 M-210, 동 M-240, 동 M-6200(도아 고세이(주) 제조), KAYARAD HDDA, 동 HX-220, 동 R-604(니혼 가야꾸(주) 제조), 비스코트 260, 동 312, 동 335 HP(오사까 유끼 가가꾸 고교(주) 제조) 등을 들 수 있다. Moreover, as said bifunctional (meth) acrylic acid ester, for example, ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, tetraethylene glycol diacryl Tetraethylene glycol dimethacrylate, 1,6-hexanedioldiacrylate, 1,6-hexanedioldimethacrylate, 1,9-nonanedioldiacrylate, 1,9-nonanedioldimethacrylate Bisphenoxy ethanol fluorene diacrylate, bisphenoxy ethanol fluorene dimethacrylate, etc. are mentioned, Also as a commercial item, it is Alonics M-210, copper M-240, copper M. -6200 (manufactured by Toa Kosei Co., Ltd.), KAYARAD HDDA, East HX-220, East R-604 (manufactured by Nihon Kayaku Co., Ltd.), Biscot 260, East 312, East 335 HP (Osaka Yuki Kagaku High School) Note) manufacture) etc. are mentioned.
또한, 상기 3관능 이상의(메타)아크릴산에스테르류로는, 예를 들면, 트리메틸올프로판트리아크릴레이트, 트리메틸올프로판트리메타크릴레이트, 펜타에리트리톨트리아크릴레이트, 펜타에리트리톨트리메타크릴레이트, 펜타에리트리톨테트라아크릴레이트, 펜타에리트리톨테트라메타크릴레이트, 디펜타에리트리톨펜타아크릴레이트, 디펜타에리트리톨펜타메타크릴레이트, 디펜타에리트리톨헥사아크릴레이트, 디펜타에리트리톨헥사메타크릴레이트, 트리(2-아크릴로일옥시에틸)포스페이트, 트리(2-메타크릴로일옥시에틸)포스페이트 등을 들 수 있고, 또한 시판품으로서 예를 들면, 알로닉스 M-309, 동 M-400, 동 M-405, 동 M-450, 동 M-7100, 동 M-8030, 동 M-8060, 동 TO-1450(도아 고세이(주) 제조), KAYARAD TMPTA, 동 DPHA, 동 DPCA-20, 동 DPCA-30, 동 DPCA-60, 동 DPCA-120(니혼 가야꾸(주) 제조), 비스코트 295, 동 300, 동 360, 동 GPT, 동 3PA, 동 400(오사까 유끼 가가꾸 고교(주) 제조) 등을 들 수 있다.Moreover, as said trifunctional or more (meth) acrylic acid ester, For example, trimethylol propane triacrylate, trimethylol propane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, penta Erythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, tri ( 2-acryloyloxyethyl) phosphate, tri (2-methacryloyloxyethyl) phosphate, etc. are mentioned, As a commercial item, for example, Alonics M-309, Copper M-400, Copper M-405 , M-450, M-7100, M-8030, M-8060, TO-1450 (manufactured by Toa Kosei Co., Ltd.), KAYARAD TMPTA, East DPHA, East DPCA-20, East DPCA-30, East DPCA-60, east DPCA-120 (Nihon Kayaku ( Co., Ltd.), biscoat 295, copper 300, copper 360, copper GPT, copper 3PA, copper 400 (manufactured by Osaka Yuka Kagaku Kogyo Co., Ltd.).
이들 단관능, 2관능 또는 3관능 이상의 (메타)아크릴산에스테르류는 단독으로 또는 2종 이상을 조합시켜 사용할 수 있다. These monofunctional, bifunctional or trifunctional or more (meth) acrylic acid esters can be used individually or in combination of 2 or more types.
본 발명에 있어서 중합성 화합물 [B]의 사용량은 공중합체 [A] 100 중량부당, 바람직하게는 50 내지 200 중량부, 더욱 바람직하게는 70 내지 140 중량부, 특히 바람직하게는 80 내지 120 중량부이다. 이 범위의 사용량에 있어서, 얻어지는 스페이서의 막 두께의 제어가 용이하고, 강도와 밀착성이 우수한 스페이서를 제공하는 감방사선성 수지 조성물로 할 수 있다.In the present invention, the amount of the polymerizable compound [B] is used per 100 parts by weight of the copolymer [A], preferably 50 to 200 parts by weight, more preferably 70 to 140 parts by weight, particularly preferably 80 to 120 parts by weight. to be. In the usage-amount of this range, it is easy to control the film thickness of the spacer obtained, and it can be set as the radiation sensitive resin composition which provides the spacer excellent in strength and adhesiveness.
광 중합 개시제 [C]Photoinitiator [C]
본 발명에서 광 중합 개시제란 가시광선, 자외선, 원자외선, 하전 입자선, X 선 등에 의한 노광에 의해, 중합성 화합물 [B]의 중합을 개시할 수 있는 활성 종류를 발생하는 것이고, 하기 화학식 1로 표시되는 트리할로메틸트리아진류를 함유하는 것이다. In the present invention, the photopolymerization initiator is to generate an active kind capable of initiating the polymerization of the polymerizable compound [B] by exposure to visible light, ultraviolet rays, far ultraviolet rays, charged particle beams, X-rays, and the like. It contains trihalomethyl triazine represented by.
<화학식 1><Formula 1>
식 중, X는 할로겐을 나타내고, In the formula, X represents a halogen,
A는 CX3 또는 하기 화학식으로 표시되는 기를 나타내고, A represents a group represented by CX 3 or the following formula,
여기서, B, D 및 E는 각각 독립적으로 수소, 탄소수 1 내지 10의 알킬기, 아릴기 또는 알콕시기, 아릴옥시기, 티오알킬기, 티오아릴기, 할로겐, 시아노기, 니트로기, 디(탄소수 1 내지 10의 알킬)아미노기, 카르복실기, 수산기, 탄소수 1 내지 10의 케토알킬기 또는 케토아릴기, 탄소수 2 내지 20의 알콕시카르보닐기 또는 알킬카르보닐옥시기를 나타내며, m은 1 내지 5의 정수를 나타낸다. Here, B, D and E are each independently hydrogen, alkyl group having 1 to 10 carbon atoms, aryl group or alkoxy group, aryloxy group, thioalkyl group, thioaryl group, halogen, cyano group, nitro group, di An alkyl) amino group of 10, a carboxyl group, a hydroxyl group, a ketoalkyl group or a ketoaryl group having 1 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 20 carbon atoms or an alkylcarbonyloxy group, and m represents an integer of 1 to 5.
화학식 1로 표시되는 트리할로메틸트리아진류로는, 예를 들면 2,4,6-트리스( 트리클로로메틸)-s-트리아진, 2-페닐-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-클로로페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3-클로로페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-클로로페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메틸티오페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3-메틸티오페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-메틸티오페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시나프틸)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3-메톡시나프틸)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-메톡시나프틸)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3-메톡시-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-메톡시-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3,4,5-트리메톡시-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메틸티오-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3-메틸티오-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-메틸티오-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 하기 화학식 2로 표시되는 화합물 등을 들 수 있다. Examples of the trihalomethyltriazines represented by the general formula (1) include 2,4,6-tris (trichloromethyl) -s-triazine and 2-phenyl-4,6-bis (trichloromethyl)- s-triazine, 2- (4-chlorophenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (3-chlorophenyl) -4,6-bis (trichloromethyl)- s-triazine, 2- (2-chlorophenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (3-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (2-methoxyphenyl) -4,6-bis (trichloro Methyl) -s-triazine, 2- (4-methylthiophenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (3-methylthiophenyl) -4,6-bis ( Trichloromethyl) -s-triazine, 2- (2-methylthiophenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxynaphthyl) -4,6 -Bis (trichloromethyl) -s-triazine, 2- (3-methoxynaphthyl) -4,6-bis (trichloromethyl) -s-tria Gin, 2- (2-methoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxy-β-styryl) -4,6-bis (trichloro Rhomethyl) -s-triazine, 2- (3-methoxy-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (2-methoxy-β-sty Reyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (3,4,5-trimethoxy-β-styryl) -4,6-bis (trichloromethyl) -s -Triazine, 2- (4-methylthio-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (3-methylthio-β-styryl) -4, 6-bis (trichloromethyl) -s-triazine, 2- (2-methylthio-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, represented by the following formula (2) Compounds and the like.
식 중, X는 할로겐 원자를 나타내며, 이들 할로겐 원자로는 예를 들어 불소, 염소, 브롬 등을 들 수 있고, In the formula, X represents a halogen atom, and examples of these halogen atoms include fluorine, chlorine and bromine.
R1, R4 및 R5는 각각 독립적으로 수소 원자, 할로겐 원자, 시아노기, 니트로기, 카르복실기, 수산기, 탄소수 1 내지 10의 알킬기, 탄소수 1 내지 10의 알콕실기, 탄소수 1 내지 10의 알킬티오기, 탄소수 6 내지 10의 아릴기, 탄소수 6 내지 10의 아릴옥시기, 탄소수 6 내지 10의 아릴티오기, 디(탄소수 1 내지 10의 알킬)아미노기, 디(탄소수 6 내지 10의 아릴)아미노기, 탄소수 2 내지 11의 알킬카르보닐기, 탄소수 7 내지 11의 아릴카르보닐기, 탄소수 2 내지 10의 알콕시카르보닐기 또는 탄소수 2 내지 10의 알킬카르보닐옥시기를 나타내고, R 1 , R 4 and R 5 each independently represent a hydrogen atom, a halogen atom, a cyano group, a nitro group, a carboxyl group, a hydroxyl group, an alkyl group having 1 to 10 carbon atoms, an alkoxyl group having 1 to 10 carbon atoms, and an alkyl tea having 1 to 10 carbon atoms. An aryl group having 6 to 10 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, an arylthio group having 6 to 10 carbon atoms, a di (alkyl having 1 to 10 carbon atoms) amino group, a di (aryl having 6 to 10 carbon atoms) amino group, An alkylcarbonyl group having 2 to 11 carbon atoms, an arylcarbonyl group having 7 to 11 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, or an alkylcarbonyloxy group having 2 to 10 carbon atoms,
R2 및 R3은 각각 독립적으로, 탄소수 1 내지 10의 알킬기 또는 탄소수 6 내지 10의 아릴기이고, R 2 and R 3 are each independently an alkyl group having 1 to 10 carbon atoms or an aryl group having 6 to 10 carbon atoms,
i는 1 내지 4의 정수이다. i is an integer from 1 to 4.
R1, R4 및 R5의 할로겐 원자로는 예를 들면 불소, 염소, 브롬을 들 수 있다. As a halogen atom of R <1> , R <4> and R <5> , a fluorine, chlorine, bromine is mentioned, for example.
여기에서, 탄소수 1 내지 10의 알킬기로는, 예를 들면 메틸, 에틸, 프로필, 부틸, 펜틸, 헥실, 옥틸 및 데실 등을 들 수 있다. 이들은 직쇄 또는 분지쇄일 수도 있다. Here, examples of the alkyl group having 1 to 10 carbon atoms include methyl, ethyl, propyl, butyl, pentyl, hexyl, octyl, decyl, and the like. These may be straight or branched chains.
탄소수 1 내지 10의 알콕실기 및 탄소수 1 내지 10의 알킬티오기로는, 탄소수 1 내지 10의 알킬기에 대하여 예시한 알킬기를 갖는 것에 상당하는 기, 예를 들면 메톡시기, 메틸티오기 등을 구체예로서 들 수 있다. Examples of the alkoxyl group having 1 to 10 carbon atoms and the alkylthio group having 1 to 10 carbon atoms include a group corresponding to an alkyl group exemplified for the alkyl group having 1 to 10 carbon atoms, for example, a methoxy group and a methylthio group. Can be mentioned.
탄소수 6 내지 10의 아릴기로는, 예를 들면 페닐, 톨릴, 나프틸 등을 들 수 있다. Examples of the aryl group having 6 to 10 carbon atoms include phenyl, tolyl, naphthyl and the like.
탄소수 6 내지 10의 아릴옥시기 및 탄소수 6 내지 10의 아릴티오기로는, 탄소수 6 내지 10의 아릴기에 대해서는 예시한 아릴기를 갖는 것에 상당하는 기, 예를 들면 페녹시기, 페닐티오기 등을 구체예로서 들 수 있다. As the aryloxy group having 6 to 10 carbon atoms and the arylthio group having 6 to 10 carbon atoms, examples of the aryl group having 6 to 10 carbon atoms include a group corresponding to the aryl group exemplified, for example, a phenoxy group and a phenylthio group. It can be mentioned as.
디(탄소수 1 내지 10의 알킬)아미노기로는, 탄소수 1 내지 10의 알킬기에 대하여 예시한 알킬기를 갖는 것에 상당하는 기, 예를 들면 디(메틸)아미노기 등을 구체예 로서 들 수 있다. 이 경우, 2개의 알킬기는 동일하거나 상이할 수 있다. As a di (C1-C10 alkyl) amino group, the group corresponded to having the alkyl group illustrated with respect to the C1-C10 alkyl group, for example, a di (methyl) amino group etc. are mentioned as a specific example. In this case, the two alkyl groups may be the same or different.
디(탄소수 6 내지 10의 아릴)아미노기로는, 탄소수 6 내지 10의 아릴기에 대하여 예시한 아릴기를 갖는 것에 상당하는 기, 예를 들면 디(페닐)아미노기 등을 구체예로서 들 수 있다. 이 경우, 2개의 아릴기는 동일하거나 상이할 수 있다.As a di (C6-C10 aryl) amino group, the group corresponded to having an aryl group illustrated with respect to a C6-C10 aryl group, for example, a di (phenyl) amino group etc. are mentioned as a specific example. In this case, the two aryl groups can be the same or different.
탄소수 2 내지 11의 알킬카르보닐기로는, 탄소수 1 내지 10의 알킬기에 대하여 예시한 알킬기를 갖는 것에 상당하는 기, 예를 들면 메틸카르보닐기(아세틸기), 에틸카르보닐기(프로피오닐기) 등을 구체예로서 예를 들 수 있다. Examples of the alkylcarbonyl group having 2 to 11 carbon atoms include groups corresponding to those having an alkyl group exemplified for the alkyl group having 1 to 10 carbon atoms, for example, methylcarbonyl group (acetyl group), ethylcarbonyl group (propionyl group) and the like. For example.
탄소수 7 내지 11의 아릴카르보닐기로는, 탄소수 6 내지 10의 아릴기에 대하여 예시한 아릴기를 갖는 것에 상당하는 기, 예를 들면 페닐카르보닐기 등을 들 수 있다. Examples of the arylcarbonyl group having 7 to 11 carbon atoms include groups corresponding to those having an aryl group exemplified for the aryl group having 6 to 10 carbon atoms, for example, a phenylcarbonyl group.
탄소수 2 내지 10의 알콕시카르보닐기 및 탄소수 2 내지 10의 알킬카르보닐옥시기로는, 탄소수 1 내지 10의 알킬기에 대하여 예시한 알킬기를 갖는 것에 상당하는 기, 예를 들면 메톡시카르보닐기, 에톡시카르보닐기 등 및 메틸카르보닐옥시기, 에틸카르보닐옥시기 등을 구체예로서 들 수 있다. Examples of the alkoxycarbonyl group having 2 to 10 carbon atoms and the alkylcarbonyloxy group having 2 to 10 carbon atoms include groups corresponding to those having an alkyl group exemplified for an alkyl group having 1 to 10 carbon atoms, for example, a methoxycarbonyl group, an ethoxycarbonyl group, and the like. A methylcarbonyloxy group, an ethylcarbonyloxy group, etc. are mentioned as a specific example.
이들 트리할로메틸트리아진류 중, 2-(4-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시나프틸)-4,6-비스(트리클로로메틸)-s-트리아진, 및 상기 화학식 2로 표시되는 화합물이 바람직하게 사용된다. Of these trihalomethyltriazines, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxynaphthyl) -4,6- Bis (trichloromethyl) -s-triazine and the compound represented by the formula (2) are preferably used.
상기 화학식 2로 나타내는 바람직한 트리할로메틸트리아진류로는, 예를 들면 2-(4-디에틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-디페닐아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-페닐아미노-4-메톡시-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-이소부틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-디메틸아미노-2-시아노-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(2-디에틸아미노-4-메틸티오-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진 등을 들 수 있다. As preferable trihalomethyl triazines represented by the said Formula (2), it is 2- (4-diethylamino-2-methyl- (beta) -styryl) -4,6-bis (trichloromethyl) -s-, for example. Triazine, 2- (4-diphenylamino-2-methyl-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (2-phenylamino-4-methoxy -β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-isobutylamino-2-methyl-β-styryl) -4,6-bis (trichloro Methyl) -s-triazine, 2- (4-dimethylamino-2-cyano-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (2-diethyl Amino-4-methylthio-β-styryl) -4,6-bis (trichloromethyl) -s-triazine and the like.
이들 화합물 중, 2-(4-디에틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-이소부틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메 틸)-s-트리아진, 2-(4-디페닐아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진 등을 특히 바람직하게 사용할 수 있다. Among these compounds, 2- (4-diethylamino-2-methyl-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-isobutylamino-2- Methyl-β-styryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-diphenylamino-2-methyl-β-styryl) -4,6-bis (trichloro Romethyl) -s-triazine and the like can be particularly preferably used.
본 발명에서 사용되는 광 중합 개시제 [C]의 첨가량은 공중합체 [A] 100 중량부에 대하여 바람직하게는 1 내지 15 중량부, 보다 바람직하게는 3 내지 10 중량부이다. 이 범위 내에서의 사용에 의해, 스페이서의 내열성 및 내용제성과 현상 후의 패턴 형상의 제어성과의 밸런스가 우수한 감방사선성 수지 조성물을 제공한다.The amount of the photopolymerization initiator [C] used in the present invention is preferably 1 to 15 parts by weight, more preferably 3 to 10 parts by weight based on 100 parts by weight of the copolymer [A]. By using within this range, the radiation sensitive resin composition excellent in the balance of the heat resistance of solvent and solvent resistance, and the controllability of the pattern shape after image development is provided.
광 중합 개시제 [C]는 경우에 따라, 다른 광 중합 개시제와 조합하여 사용할 수 있다. Photoinitiator [C] can be used in combination with another photoinitiator as needed.
이와 같은 기타 광 중합 개시제로는 예를 들어 벤질, 디아세틸 등의α-디케톤류; 벤조인, o-톨루오인, p-톨루오인, 아니소인 등의 아실로인류; 벤조인메틸에테르, 벤조인에틸에테르, 벤조인i-프로필에테르 등의 아실로인에테르류; 아세토페논, p-디메틸아미노아세토페논, α,α'-디메톡시아세톡시벤조페논, 2,2'-디메톡시-2-페닐아세토페논, p-메톡시아세토페논, 2-메틸-[4-(메틸티오)페닐]-2-모르폴리노-1-프로파논, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온 등의 아세토페논류; 안트라퀴논, 1,4-나프토퀴논 등의 퀴논류; 페나실클로라이드, 트리브로모메틸페닐술폰, 트리스(트리클로로메틸)-s-트리아진 등의 할로겐 화합물; 2,4,6-트리메틸벤조일디페닐포스핀옥시드, 비스(2,4,6-트리메틸벤조일)페닐포스핀옥시드 등의 아실포스핀옥시드류; 벤조일퍼옥시드, 디-t-부틸퍼옥시드 등의 과산화물 등을 들 수 있다. Such other photoinitiators include, for example, α-diketones such as benzyl and diacetyl; Acyloins, such as benzoin, o-toluoin, p-toluoin, and anisoin; Acyloin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin i-propyl ether; Acetophenone, p-dimethylaminoacetophenone, α, α'-dimethoxyacetoxybenzophenone, 2,2'-dimethoxy-2-phenylacetophenone, p-methoxyacetophenone, 2-methyl- [4- Acetophenones, such as (methylthio) phenyl] -2-morpholino-1-propaneone and 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) butan-1-one; Quinones such as anthraquinone and 1,4-naphthoquinone; Halogen compounds such as phenacyl chloride, tribromomethylphenyl sulfone and tris (trichloromethyl) -s-triazine; Acylphosphine oxides such as 2,4,6-trimethylbenzoyldiphenylphosphine oxide and bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide; Peroxides, such as benzoyl peroxide and di-t- butyl peroxide, etc. are mentioned.
또한, 다른 광 중합 개시제의 시판품으로 예를 들면, IRGACURE-184, 동 369, 동 500, 동 651, 동 907, 동 819, 동 1700, Darocur-1173, 동 1116, 동 2959, 동 1664, 동 4043(지바 스페셜티 케미컬즈사 제조), KAYACURE-DETX, 동 MBP, 동 DMBI, 동 EPA, 동 OA(니혼 가야꾸(주) 제조), VICURE-10, 동 55(STAUFFER Co. LTD사 제조), TRIGONALP1(AKZO Co. LTD사 제조), SANDORAY 1000(SANDOZ Co. LTD사 제조), DEAP(APJOHN Co. LTD사 제조), QUANTACURE-PDO, 동 ITX, 동 EPD(WARD BLEKINSOP Co. LTD사 제조) 등을 들 수 있다.In addition, as a commercial item of another photoinitiator, IRGACURE-184, 369, 500, 651, 907, 819, 1700, Darocur-1173, 1116, 2959, 1664, 4043, etc. (Chiba Specialty Chemicals Co., Ltd.), KAYACURE-DETX, East MBP, East DMBI, East EPA, East OA (manufactured by Nihon Kayaku Co., Ltd.), VICURE-10, East 55 (manufactured by STAUFFER Co. LTD.), TRIGONALP1 ( AKZO Co. LTD), SANDORAY 1000 (manufactured by SANDOZ Co. LTD), DEAP (manufactured by APJOHN Co. LTD), QUANTACURE-PDO, East ITX, East EPD (manufactured by WARD BLEKINSOP Co. LTD) Can be.
본 발명에서는 이들 다른 광 중합 개시제를 광 중합 개시제 [C]와 병용함으로써, 스페이서의 압축 강도, 기판과의 밀착성 등을 더욱 향상시키고 또한 패턴의 단면 형상을 제어하는 것도 가능해진다.In this invention, by using these other photoinitiators together with photoinitiator [C], it becomes possible to further improve the compressive strength of a spacer, adhesiveness with a board | substrate, etc., and to control the cross-sectional shape of a pattern.
상기 다른 광 중합 개시제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다.The said other photoinitiator can be used individually or in mixture of 2 or more types.
다른 광 중합 개시제의 사용 비율은 광 중합 개시제 [C] 100 중량부에 대하여, 바람직하게는 100 중량부 이하, 더욱 바람직하게는 50 중량부 이하, 특히 바람직하게는 30 중량부 이하이다. 이 경우, 다른 광 중합 개시제의 사용 비율이 100 중량부를 초과하면, 얻어지는 패턴의 크기가 마스크 패턴의 설계 크기보다 허용 범위를 초과하여 너무 커질 우려가 있다. The use ratio of another photoinitiator is 100 weight part or less with respect to 100 weight part of photoinitiators [C], More preferably, it is 50 weight part or less, Especially preferably, it is 30 weight part or less. In this case, when the use ratio of another photoinitiator exceeds 100 weight part, there exists a possibility that the magnitude | size of the pattern obtained may become too large beyond the allowable range rather than the design size of a mask pattern.
또한, 광 중합 개시제 [C]는, 다른 광 중합 개시제의 존재하 또는 부재하에서 증감제와 병용함으로써, 감도를 더욱 개선시키는 것도 가능하다. In addition, a photoinitiator [C] can also improve a sensitivity further by using together with a sensitizer in presence or absence of another photoinitiator.
상기 증감제로 예를 들면, N-메틸디에탄올아민, 4,4'-비스(디메틸아미노)벤 조페논, 4,4'-비스(디에틸아미노)벤조페논, p-디메틸아미노벤조산에틸, p-디메틸아미노벤조산i-아밀, 2,4-디에틸티옥산톤, 티옥산톤-4-술폰산 등을 들 수 있다. Examples of the sensitizer include N-methyldiethanolamine, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, ethyl p-dimethylaminobenzoate, p -Dimethylaminobenzoic acid i-amyl, 2, 4- diethyl thioxanthone, thioxanthone-4-sulfonic acid, etc. are mentioned.
이들 증감제 중, 4,4'-비스(디에틸아미노)벤조페논, 2,4-디에틸티옥산톤 등이 바람직하다. Among these sensitizers, 4,4'-bis (diethylamino) benzophenone, 2,4-diethyl thioxanthone and the like are preferable.
상기 증감제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다.The said sensitizer can be used individually or in mixture of 2 or more types.
증감제의 사용 비율은 광 중합 개시제 [C] 100 중량부에 대하여, 바람직하게는 40 중량부 이하, 더욱 바람직하게는 20 중량부 이하이다. 이 경우, 상기 증감제의 사용 비율이 40 중량부를 초과하면, 현상 찌꺼기가 발생하기 쉬운 경향이 있다.The use ratio of the sensitizer is preferably 40 parts by weight or less, and more preferably 20 parts by weight or less based on 100 parts by weight of the photopolymerization initiator [C]. In this case, when the use ratio of the said sensitizer exceeds 40 weight part, there exists a tendency for developing waste to occur easily.
그밖의 첨가제Other additives
본 발명의 감방사선성 수지 조성물은, 본 발명의 소기의 효과를 손상하지 않은 범위 내에서, 필요에 따라 상기 성분 이외의 첨가제를 함유할 수 있다. The radiation sensitive resin composition of this invention can contain additives other than the said component as needed in the range which does not impair the desired effect of this invention.
상기 첨가제로는 도포성을 향상시키기 위한 계면 활성제를 들 수 있다. The additives include a surfactant for improving the coatability.
상기 계면 활성제의 시판품으로 예를 들면, BM-1000, BM-1100(BM CHEMIE사 제조), 메가팩 F142D, 동 F172, 동 F173, 동 F183(다이 닛본 잉크 가가꾸 고교(주) 제조), 플로우라이드 FC-135, 동 FC-170C, 동 FC-430, 동 FC-431(스미또모 쓰리엠(주) 제조), 서프론 S-112, 동 S-113, 동 S-131, 동 S-141, 동 S-145, 동 S-382, 동 SC-101, 동 SC-102, 동 SC-103, 동 SC-104, 동 SC-105, 동 SC-106(아사히 글라스(주) 제조), 에프톱 EF301, 동 303, 동 352(신아끼다 가세이(주) 제조), SH-28 PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190(도레이 실리콘(주) 제조) 등의 불소계 또는 실리콘계 계면 활성제를 들 수 있다.As a commercial item of the said surfactant, for example, BM-1000, BM-1100 (made by BM CHEMIE company), Megapack F142D, copper F172, copper F173, copper F183 (made by Dai Nippon Ink Chemical Industries, Ltd.), flow Ride FC-135, East FC-170C, East FC-430, East FC-431 (manufactured by Sumitomo 3M Co., Ltd.), Supron S-112, East S-113, East S-131, East S-141, East S-145, East S-382, East SC-101, East SC-102, East SC-103, East SC-104, East SC-105, East SC-106 (Asahi Glass Co., Ltd.), F-Top EF301, copper 303, copper 352 (manufactured by Kasei Co., Ltd.), SH-28 PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190 (Toray Silicon Co., Ltd.) Fluorine-based or silicone-based surfactants such as ()).
또한, 상기 시판품 이외의 계면 활성제로는 예를 들면, 폴리옥시에틸렌라우릴에테르, 폴리옥시에틸렌스테아릴에테르, 폴리옥시에티렌올레일에테르 등의 폴리옥시에틸렌알킬에테르류; 폴리옥시에틸렌n-옥틸페닐에테르, 폴리옥시에틸렌n-노닐페닐에테르 등의 폴리옥시에틸렌아릴에테르류; 폴리옥시에틸렌디라우레이트, 폴리옥시에틸렌디스테아레이트 등의 폴리옥시에틸렌디알킬에스테르류 등의 비이온계 계면 활성제, 및 시판품으로서 KP341(신에쯔 가가꾸 고교(주) 제조), 폴리플로우 No.57, 95(교에이샤 가가꾸(주) 제조) 등을 들 수 있다.Moreover, as surfactant other than the said commercial item, For example, polyoxyethylene alkyl ether, such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxy ethylene oleyl ether; Polyoxyethylene aryl ethers such as polyoxyethylene n-octylphenyl ether and polyoxyethylene n-nonylphenyl ether; Nonionic surfactants, such as polyoxyethylene dialkyl esters, such as polyoxyethylene dilaurate and polyoxyethylene distearate, and KP341 (made by Shin-Etsu Chemical Co., Ltd.), polyflow No. as a commercial item .57, 95 (made by Kyoeisha Chemical Co., Ltd.), etc. are mentioned.
이들 계면 활성제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다.These surfactant can be used individually or in mixture of 2 or more types.
계면 활성제의 배합량은 공중합체 [A] 100 중량부에 대하여, 바람직하게는 5 중량부 이하, 더욱 바람직하게는 2 중량부 이하의 범위이다. 이 경우, 계면 활성제의 배합량이 5 중량부를 초과하면, 도포시에 막 거칠음이 발생되기 쉽다. The compounding quantity of surfactant is the range of 5 weight part or less, More preferably, it is 2 weight part or less with respect to 100 weight part of copolymers [A]. In this case, when the compounding quantity of surfactant exceeds 5 weight part, film roughness will arise easily at the time of application | coating.
또한, 기체와의 접착성을 향상시키기 위해서 접착조제를 사용할 수 있다. In addition, in order to improve the adhesiveness with the base, an adhesive aid can be used.
상기 접착조제로는 관능성 실란 커플링제가 바람직하고 그 예로는 카르복실기, 메타크릴로일기, 이소시아네이트기, 에폭시기 등의 반응성 관능기를 갖는 실란 커플링제를 들 수 있고, 보다 구체적으로는 트리메톡시실릴벤조산, γ-메타크릴로옥시프로필트리메톡시실란, 비닐트리아세톡시실란, 비닐트리메톡시실란, γ-이소시아네이트프로필트리에톡시실란, γ-글리시독시프로필트리메톡시실란, 2-(3',4'-에폭시시클로헥실)에틸트리메톡시실란 등을 들 수 있다. As said adhesion | attachment adjuvant, a functional silane coupling agent is preferable, The silane coupling agent which has reactive functional groups, such as a carboxyl group, a methacryloyl group, an isocyanate group, an epoxy group, is mentioned, More specifically, a trimethoxysilyl benzoic acid , γ-methacrylooxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatepropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, 2- (3 ' And 4'-epoxycyclohexyl) ethyltrimethoxysilane.
이들 접착조제는, 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These adhesion aids can be used individually or in mixture of 2 or more types.
접착조제의 배합량은 공중합체 [A] 100 중량부에 대하여, 바람직하게는 20 중량부 이하, 더욱 바람직하게는 10 중량부 이하이다. 이 경우, 접착조제의 배합량이 20 중량부를 초과하면, 현상 찌꺼기가 발생하기 쉬운 경향이 있다. The blending amount of the adhesion aid is preferably 20 parts by weight or less, more preferably 10 parts by weight or less based on 100 parts by weight of the copolymer [A]. In this case, when the compounding quantity of an adhesion | attachment adjuvant exceeds 20 weight part, there exists a tendency for image development waste to occur easily.
감방사선성 수지 조성물Radiation-sensitive resin composition
본 발명의 감방사선성 수지 조성물은 공중합체 [A], 중합성 화합물 [B] 및 광 중합 개시제 [C], 및 임의적으로 첨가되는 기타 첨가제를 포함하는 구성 성분을 균일하게 혼합함으로써 조제된다. The radiation sensitive resin composition of this invention is prepared by mixing uniformly the structural component containing a copolymer [A], a polymeric compound [B], a photoinitiator [C], and the other additive added arbitrarily.
감방사선성 수지 조성물을 조제할 때는, 통상 적당한 용제를 첨가하여 조성물 용액으로 한다. When preparing a radiation sensitive resin composition, a suitable solvent is added normally and it is set as a composition solution.
감방사선성 수지 조성물 용액의 조제에 사용되는 용제로는, 감방사선성 수지 조성물을 구성하는 각 성분을 균일하게 용해하고, 나아가 각 성분과 반응하지 않는 것이 사용되며 그 예로는, 공중합체 [A]를 제조하는 중합에 대해서 예시한 용매와 동일한 것을 들 수 있다.As a solvent used for preparation of a radiation sensitive resin composition solution, the thing which melt | dissolves each component which comprises a radiation sensitive resin composition uniformly and does not react with each component further is used, For example, copolymer [A] The same thing as the solvent illustrated about the superposition | polymerization which manufactures is mentioned.
이들 용제 중, 각 성분의 용해 능력, 각 성분과의 반응성 및 도포막 형성의 용이성의 점에서, 에틸렌 글리콜모노알킬에테르류, 에틸렌 글리콜모노알킬에테르아세테이트류, 디에틸렌글리콜알킬에테르류 및 프로필렌글리콜모노알킬에테르아세테이트류, 알콕시프로피온산알킬류 등이 바람직하다. Among these solvents, ethylene glycol monoalkyl ethers, ethylene glycol monoalkyl ether acetates, diethylene glycol alkyl ethers, and propylene glycol mono, in terms of dissolving ability of each component, reactivity with each component, and ease of forming a coating film. Alkyl ether acetates, alkyl alkoxypropionates, etc. are preferable.
상기 용제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다.The said solvent can be used individually or in mixture of 2 or more types.
또한, 감방사선성 수지 조성물 용액의 조제에 있어서는, 상기 용제와 동시에 고비점 용제를 병용할 수도 있다. Moreover, in preparation of a radiation sensitive resin composition solution, you may use together a high boiling point solvent simultaneously with the said solvent.
상기 고비점 용제로는, 예를 들면 N-메틸포름아미드, N,N-디메틸포름아미드, N-메틸포름아닐리드, N-메틸아세트아미드, N,N-디메틸아세트아미드, N-메틸피롤리돈, 디메틸술폭시드, 벤질에틸에테르, 디-n-헥실에테르, 아세토닐아세톤, 이소포론, 카푸론산, 카푸릴산, 1-옥탄올, 1-노난올, 벤질알코올, 아세트산벤질, 벤조산에틸, 옥살산디에틸, 말레산디에틸, γ-부티로락톤, 탄산에틸렌, 탄산프로필렌, 에틸렌 글리콜모노페닐에테르아세테이트 등을 들 수 있다. As the high boiling point solvent, for example, N-methylformamide, N, N-dimethylformamide, N-methylformanilide, N-methylacetamide, N, N-dimethylacetamide, N-methylpyrrolidone , Dimethyl sulfoxide, benzyl ethyl ether, di-n-hexyl ether, acetonyl acetone, isophorone, capuronic acid, caprylic acid, 1-octanol, 1-nonanol, benzyl alcohol, benzyl acetate, ethyl benzoate, oxalic acid di Ethyl, diethyl maleate, gamma -butyrolactone, ethylene carbonate, propylene carbonate, ethylene glycol monophenyl ether acetate, and the like.
이들 고비점 용제는, 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These high boiling point solvents can be used individually or in mixture of 2 or more types.
상기한 바와 같이 제조된 조성물 용액은 필요에 따라 공경이 예를 들면 0.2 내지 0.5 ㎛ 정도의 밀리포어 필터 등으로 여과하여, 사용할 수 있다. The composition solution prepared as described above may be used, if necessary, by filtering with a Millipore filter having a pore size of, for example, about 0.2 to 0.5 μm.
표시 패널용 스페이서의 형성Formation of spacers for display panels
본 발명의 감방사선성 수지 조성물은 특히, 액정 패널 또는 터치 패널 등의 표시 패널용 스페이서를 형성하기 위한 재료로서 바람직하다. The radiation sensitive resin composition of this invention is especially suitable as a material for forming the spacer for display panels, such as a liquid crystal panel or a touch panel.
본 발명의 표시 패널용 스페이서의 형성 방법은, 이하의 공정을 포함하는 것을 특징으로 한다. The formation method of the display panel spacer of this invention is characterized by including the following processes.
① 상기한 감방사선성 수지 조성물의 도포막을 기판상에 형성하는 공정. ① Process of forming the coating film of said radiation sensitive resin composition on a board | substrate.
② 상기 도포막의 적어도 일부에 방사선을 조사하는 공정. ② A step of irradiating at least a portion of the coating film with radiation.
③ 현상 공정. ③ developing process.
④ 가열 처리 공정. ④ heat treatment process.
이하, 상기한 각 공정에 관해서 설명한다. Hereinafter, each process mentioned above is demonstrated.
① 본 발명의 감방사선성 수지 조성물의 도포막을 기판상에 형성하는 공정① Process of forming the coating film of the radiation sensitive resin composition of this invention on a board | substrate
기판상에 본 발명의 감방사선성 수지 조성물의 도포막을 형성할 때에는 조성물 용액을 기판의 표면에 도포한 후, 프리베이킹하여 용제를 제거함으로써 행할 수 있다. When forming the coating film of the radiation sensitive resin composition of this invention on a board | substrate, after apply | coating a composition solution to the surface of a board | substrate, it can carry out by prebaking and removing a solvent.
조성물 용액의 도포 방법으로는 예를 들어 스프레이법, 롤 코팅법, 회전 도포법 등의 각종 방법을 이용할 수 있다. As a coating method of a composition solution, various methods, such as a spray method, a roll coating method, and a spin coating method, can be used, for example.
또한, 프리베이킹의 조건은 각 구성 성분의 종류, 배합 비율 등에 따라서도 다르지만, 통상 70 내지 90 ℃에서 1 내지 15 분간 정도이다. In addition, although the conditions of prebaking differ also with kinds, compounding ratio, etc. of each structural component, it is about 1 to 15 minutes at 70-90 degreeC normally.
② 상기 도포막의 적어도 일부에 방사선을 조사하는 공정② a step of irradiating at least a portion of the coating film with radiation
이어서, 상기한 바와 같이 하여 형성된 도포막에 소정 패턴의 마스크를 통하여 노광시켜 중합시킨 후, 현상액으로 현상하여, 불필요한 부분을 제거하고 패턴을 형성한다. Subsequently, the coating film formed as described above is exposed and polymerized through a mask of a predetermined pattern, and then developed by a developing solution to remove unnecessary portions to form a pattern.
노광에 사용되는 방사선으로는 가시광선, 자외선, 원자외선, 하전 입자선, X 선 등을 적절히 선택할 수 있지만, 자외선이 바람직하다. As radiation used for exposure, visible rays, ultraviolet rays, far ultraviolet rays, charged particle beams, X rays, and the like can be appropriately selected, but ultraviolet rays are preferred.
③ 현상 공정③ Development process
현상 방법으로 예를 들면 점착법, 침지법, 샤워법 중 어느 하나일 수 있고, 현상 시간은 통상 30 내지 180초 사이이다. As a developing method, it can be any of adhesion method, immersion method, and a shower method, for example, and developing time is normally 30 to 180 second.
상기 현상액으로 예를 들면, 수산화나트륨, 수산화칼륨, 탄산나트륨, 규산나트륨, 메타규산나트륨, 암모니아와 같은 무기 알칼리류; 에틸아민, n-프로필아민과 같은 1급 아민류; 디에틸아민, 디-n-프로필아민과 같은 2급 아민류; 트리메틸아민, 메틸디에틸아민, 에틸디메틸아민, 트리에틸아민과 같은 3급 아민류; 디메틸에탄올 아민, 메틸디에탄올아민, 트리에탄올아민과 같은 3급 알칸올 아민류; 피롤, 피페리딘, N-메틸피페리딘, N-메틸피롤리딘, 1,8-디아자비시클로[5.4.0]-7-운데센, 1,5-디아자비시클로[4.3.0]-5-노난과 같은 지환족 3급 아민류; 피리딘, 코리딘, 루티딘, 퀴놀린과 같은 방향족 3급 아민류; 테트라메틸암모늄히드록시드, 테트라에틸암모늄히드록시드와 같은 4급 암모늄염 등의 알칼리성 화합물의 수용액을 사용할 수 있다. Examples of the developer include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate and ammonia; Primary amines such as ethylamine and n-propylamine; Secondary amines such as diethylamine and di-n-propylamine; Tertiary amines such as trimethylamine, methyldiethylamine, ethyldimethylamine and triethylamine; Tertiary alkanol amines such as dimethylethanol amine, methyldiethanolamine and triethanolamine; Pyrrole, piperidine, N-methylpiperidine, N-methylpyrrolidine, 1,8-diazabicyclo [5.4.0] -7-undecene, 1,5-diazabicyclo [4.3.0] Alicyclic tertiary amines such as -5-nonane; Aromatic tertiary amines such as pyridine, coridine, lutidine and quinoline; Aqueous solutions of alkaline compounds, such as quaternary ammonium salts, such as tetramethylammonium hydroxide and tetraethylammonium hydroxide, can be used.
또한, 상기 알칼리성 화합물의 수용액에는 메탄올, 에탄올과 같은 수용성 유기용매 및(또는) 계면 활성제를 적당량 첨가할 수 있다.In addition, an appropriate amount of a water-soluble organic solvent such as methanol and ethanol and / or a surfactant may be added to the aqueous solution of the alkaline compound.
현상 후, 예를 들어 유수 세정 등으로 30 내지 90초간 세정하여 불필요한 부분을 제거한 후, 압축 공기 및 압축 질소를 건조시킴으로써 소정의 패턴이 형성된다. After development, it wash | cleans for 30 to 90 second, for example by running water etc., and removes an unnecessary part, and a predetermined pattern is formed by drying compressed air and compressed nitrogen.
④ 가열 처리 공정 ④ heat treatment process
이 후, 이 패턴을 핫 플레이트, 오븐 등의 가열 장치로 소정 온도, 예를 들어 150 내지 250 ℃에서 소정 시간, 핫 플레이트상으로는 예를 들어 5 내지 30 분간, 오븐 중에서는 예를 들면 30 내지 90분간, 가열 처리함으로써 목적한 스페이서를 얻을 수 있다. Thereafter, the pattern is heated for a predetermined time at a predetermined temperature, for example, 150 to 250 DEG C, for 5 to 30 minutes on a hot plate, for example, for 30 to 90 minutes in an oven, using a heating device such as a hot plate or an oven. By heating, the desired spacer can be obtained.
표시 패널Display panel
본 발명의 표시 패널은 본 발명의 감방사선 수지 조성물에 대해 상기한 바와 같이 하여 형성된 스페이서를 갖는다. The display panel of this invention has the spacer formed as mentioned above with respect to the radiation sensitive resin composition of this invention.
이와 같은 표시 패널로는 액정 표시 패널, 터치 패널 등을 들 수 있다. As such a display panel, a liquid crystal display panel, a touch panel, etc. are mentioned.
이하에 실시예 및 비교예에 의해 본 발명을 더욱 구체적으로 설명하지만, 본 발명은 이들 실시예로 한정되는 것은 아니다. Although an Example and a comparative example demonstrate this invention further more concretely below, this invention is not limited to these Examples.
<합성예 1> Synthesis Example 1
냉각관, 교반기가 구비된 플라스크에 2,2'-아조비스(2,4-디메틸발레로니트닐) 5 중량부, 디에틸렌글리콜메틸에틸에테르 200 중량부를 넣고, 메타크릴산 20 중량부, 메타크릴산글리시딜 45 중량부, 스티렌 10 중량부, 메타크릴산 트리시클로[5.2.1.02,6]데칸-8-일 25 중량부를 넣고 질소 치환한 후, 서서히 교반하면서 용액의 온도를 70 ℃로 상승시키고 이 온도를 5 시간 유지하며 중합시켜 공중합체 [A-1]의 용액을 얻었다. In a flask equipped with a cooling tube and a stirrer, 5 parts by weight of 2,2'-azobis (2,4-dimethylvaleronitrile), 200 parts by weight of diethylene glycol methylethyl ether, 20 parts by weight of methacrylic acid, meta 45 parts by weight of glycidyl methacrylate, 10 parts by weight of styrene, and 25 parts by weight of tricyclo [5.2.1.0 2,6 ] decane-8-yl methacrylate were replaced with nitrogen, and the temperature of the solution was gradually reduced to 70 ° C. And the polymerization was carried out while maintaining the temperature for 5 hours to obtain a solution of copolymer [A-1].
이 용액의 고형분 농도는 33.2 중량%이고, 공중합체 [A-1]의 Mw는 24,000이었다. Solid content concentration of this solution was 33.2 weight%, and Mw of the copolymer [A-1] was 24,000.
<합성예 2> Synthesis Example 2
냉각관, 교반기를 구비한 플라스크에, 2,2'-아조비스(2,4-디메틸발레로니트릴) 7 중량부, 디에틸렌글리콜메틸에틸에테르 200 중량부를 넣고, 메타크릴산 20 중량부, 메타크릴산글리시딜 50 중량부, 스티렌 25 중량부를 넣고 질소 치환한 후, 1,3-부타디엔 5 중량부를 더 넣고, 서서히 교반하면서 용액의 온도를 70 ℃로 상승시키고, 이 온도를 5 시간 유지하며 중합시켜 공중합체 [A-2]의 용액을 얻었다. In a flask equipped with a cooling tube and a stirrer, 7 parts by weight of 2,2'-azobis (2,4-dimethylvaleronitrile), 200 parts by weight of diethylene glycol methylethyl ether, 20 parts by weight of methacrylic acid, meta 50 parts by weight of glycidyl methacrylate and 25 parts by weight of styrene were added thereto, followed by nitrogen replacement. Then, 5 parts by weight of 1,3-butadiene was added thereto, and the temperature of the solution was gradually increased to 70 ° C. while maintaining the temperature for 5 hours. It superposed | polymerized and obtained the solution of copolymer [A-2].
이 용액의 고형분 농도는 33.3 중량%이고, 공중합체 [A-2]의 Mw는 20,000이었다. Solid content concentration of this solution was 33.3 weight%, and Mw of the copolymer [A-2] was 20,000.
<실시예 1> <Example 1>
감방사선성 수지 조성물의 조제Preparation of a radiation sensitive resin composition
합성예 1에서 얻은 공중합체 [A-1]의 용액 100 중량부(고형분)와, 중합성 화합물 [B]로서 디펜타에리트리톨펜타아크릴레이트와 디펜타에리트리톨헥사아크릴레이트의 혼합물 80 중량부와, 광 중합 개시제 [C]로서 2-(4-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진 8 중량부를 고형분 농도가 35 중량%이 되도록 프로필렌글리콜모노메틸에테르아세테이트에 용해한 후, 공경 0.2 ㎛의 밀리포어 필터로 여과하여, 조성물 용액 (S-1)을 제조하였다. 100 parts by weight (solid content) of the solution of the copolymer [A-1] obtained in Synthesis Example 1, 80 parts by weight of a mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate as the polymerizable compound [B]; 8 parts by weight of 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine as the photopolymerization initiator [C] so that the solid content concentration is 35% by weight propylene glycol monomethyl ether acetate After dissolving in, it filtered by the Millipore filter of 0.2 micrometer of pore diameters, and produced the composition solution (S-1).
스페이서의 형성Formation of spacers
조성물 용액 (S-1)을 유리 기판상에 스피너를 사용하여 도포한 후, 핫 플레이트상에서 80 ℃로 3 분간 프리베이킹하여 도포막을 형성하였다. After apply | coating composition solution (S-1) using a spinner on a glass substrate, it prebaked for 3 minutes at 80 degreeC on the hotplate, and formed the coating film.
이어서, 얻어진 도포막에 공기 중에서, 소정 패턴의 마스크(10 ㎛×10 ㎛) 를 사용하여 노광 갭을 100 ㎛로 하고, 파장 365 nm에서의 노광 강도가 100 W/m2의 자외선인 프록시미티 노광을 30초간 행하였다. 그 후, 0.2 중량%의 테트라메틸암모늄히드록시드 수용액에 의해 25 ℃에서 1분간 현상하여 불필요한 부분을 제거한 후, 순수한 물로 1 분간 세정하여 패턴을 얻었다. Subsequently, the obtained coating film was made into 100 micrometers of exposure gaps in the air using the mask (10 micrometer x 10 micrometers) of a predetermined pattern, and the exposure intensity of the ultraviolet-ray of 100 W / m <2> exposure intensity in wavelength 365nm is carried out. Was performed for 30 seconds. Then, it developed by 0.2 weight% of tetramethylammonium hydroxide aqueous solution at 25 degreeC for 1 minute, removed the unnecessary part, and wash | cleaned for 1 minute with pure water, and obtained the pattern.
계속해서, 얻어진 패턴을 오븐 중에 220 ℃에서 60 분간 가열하여, 소정 패턴을 갖는 높이 5 ㎛의 스페이서를 얻었다. Subsequently, the obtained pattern was heated in an oven for 60 minutes at 220 degreeC, and the spacer of 5 micrometers in height which has a predetermined pattern was obtained.
평가evaluation
얻어진 스페이서에 대해서 하기 항목을 평가하였다. 평가 결과를, 표 1에 표시한다. The following items were evaluated about the obtained spacer. The evaluation results are shown in Table 1.
(1) 패턴 바닥부 단면의 치수 (폭) (1) Dimensions of pattern bottom section (width)
주사형 전자 현미경으로 측정하였다. It was measured by a scanning electron microscope.
(2) 스페이서 강도 (2) spacer strength
미소 압축 시험기(MCTM-200, (주) 시마쯔 세이사꾸쇼 제조) 를 사용하여, 하기와 같이 평가하였다. It evaluated as follows using the micro compression tester (MCTM-200, the Shimadzu Corporation make).
파괴 하중(측정 온도: 25 ℃); 스페이서에 대하여, 직경 50 ㎛의 평면 압자에 의해 수직 방향의 압축 하중을 일정 속도(2.65 mN/초)로 가하며 스페이서에 균열이나 파괴가 생겼을 때의 하중을 측정하여, 파괴 하중으로 하였다. Breaking load (measured temperature: 25 ° C.); With respect to the spacer, a compressive load in the vertical direction was applied at a constant speed (2.65 mN / sec) by a planar indenter having a diameter of 50 µm, and the load when cracks or fractures occurred in the spacer was measured to be a breakdown load.
파괴 왜곡(측정 온도: 25 ℃); 파괴 하중에 도달하였을 때의 압축 변위를 스페이서의 높이(5 ㎛)에서 뺀 값을 파괴 왜곡으로 하였다. Fracture distortion (measured temperature: 25 ° C.); The value obtained by subtracting the compression displacement at the time of reaching the breaking load from the height (5 μm) of the spacer was defined as the breaking distortion.
(3) 내열성 (3) heat resistance
스페이서를 오븐 중에서 240 ℃로 60분간 가열했을 때의 패턴 높이의 치수 변화율을 구하였다. The dimensional change rate of the pattern height when the spacer was heated at 240 degreeC for 60 minutes in oven was calculated | required.
<실시예 2> <Example 2>
공중합체 [A-1]의 용액을 대신해서, 합성예 2에서 얻은 공중합체 [A-2]의 용액을 사용한 것 이외에는, 실시예 1과 동일하게 하여, 조성물 용액 (S-2)을 제조하여, 스페이서를 형성하고 평가하였다. A composition solution (S-2) was produced in the same manner as in Example 1 except that the solution of the copolymer [A-2] obtained in Synthesis Example 2 was used instead of the solution of the copolymer [A-1]. , Spacers were formed and evaluated.
평가 결과를, 표 1에 표시한다. The evaluation results are shown in Table 1.
<실시예 3> <Example 3>
광 중합 개시제 [C]로서 2-(4-디에틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진 5 중량부와 비스(2,4,6-트리메틸벤조일) 페닐포스핀옥시드(IRGACURE-819) 10 중량부를 사용한 것 이외에는, 실시예 1과 동일하게 하여, 조성물 용액 (S-3)을 조제하여, 스페이서를 형성하고 평가하였다. 5 parts by weight of 2- (4-diethylamino-2-methyl-β-styryl) -4,6-bis (trichloromethyl) -s-triazine as the photopolymerization initiator [C] and bis (2,4 A composition solution (S-3) was prepared in the same manner as in Example 1 except that 10 parts by weight of 6-trimethylbenzoyl) phenylphosphine oxide (IRGACURE-819) was used to form and evaluate a spacer.
평가 결과를 표 1에 표시한다. The evaluation results are shown in Table 1.
<실시예 4> <Example 4>
광 중합 개시제 [C]로서 2-(4-디에틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진 8 중량부를 대신해서, 2-(4-이소부틸아미노-2-메틸-β-스티릴)-4,6-비스(트리클로로메틸)-s-트리아진 10 중량부를 사용한 것 이외에는 실시예 1과 동일하게 하여, 조성물 용액 (S-4)을 제조하여, 스페이서를 형성하고 평가하였다. As a photoinitiator [C], 2- (4-diethylamino-2-methyl-β-styryl) -4,6-bis (trichloromethyl) -s-triazine was substituted for 8 parts by weight, and 2- ( Composition solution (S-) in the same manner as in Example 1 except that 10 parts by weight of 4-isobutylamino-2-methyl-β-styryl) -4,6-bis (trichloromethyl) -s-triazine was used. 4) was prepared to form and evaluate spacers.
평가 결과를 표 1에 표시한다.The evaluation results are shown in Table 1.
본 발명에 의하면, 프록시미티 노광에 의해서도 마스크 패턴의 설계 크기를 충실하게 재현할 수 있고, 또한 스페이서로서 필요한 강도, 내열성 등이 우수한 표시 패널용 스페이서를 형성할 수 있는 감방사선성 수지 조성물, 그로부터 얻어진 표시 패널용 스페이서 및 그 스페이서를 갖는 표시 패널이 제공된다.
According to the present invention, a radiation sensitive resin composition capable of faithfully reproducing the design size of a mask pattern even by proximity exposure and forming a spacer for a display panel excellent in strength, heat resistance, and the like required as a spacer, and obtained therefrom A display panel spacer and a display panel having the spacer are provided.
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001073492A JP2002278064A (en) | 2001-03-15 | 2001-03-15 | Radiation-sensitive resin composition, spacer for display panel, and display panel |
JPJP-P-2001-00073492 | 2001-03-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020073403A KR20020073403A (en) | 2002-09-26 |
KR100839300B1 true KR100839300B1 (en) | 2008-06-17 |
Family
ID=18930908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020020013734A Expired - Lifetime KR100839300B1 (en) | 2001-03-15 | 2002-03-14 | Radiation-sensitive resin composition, spacer for display panel, and display panel |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2002278064A (en) |
KR (1) | KR100839300B1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005208360A (en) * | 2004-01-23 | 2005-08-04 | Jsr Corp | Radiation-sensitive resin composition for spacer formation, spacer, method for forming the spacer, and liquid crystal display element |
JP4315010B2 (en) * | 2004-02-13 | 2009-08-19 | Jsr株式会社 | Radiation-sensitive resin composition, display panel spacer and display panel |
JP4380359B2 (en) * | 2004-02-20 | 2009-12-09 | Jsr株式会社 | Radiation-sensitive resin composition for spacer formation, spacer, method for forming the spacer, and liquid crystal display element |
JP4678271B2 (en) * | 2005-09-26 | 2011-04-27 | Jsr株式会社 | Photosensitive resin composition, protective film for liquid crystal display panel and spacer, and liquid crystal display panel comprising them |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03191352A (en) * | 1989-12-15 | 1991-08-21 | W R Grace & Co | Photosensitive resin composite |
JPH0527432A (en) * | 1991-07-08 | 1993-02-05 | Canon Inc | Photopolymerizable composition |
JPH1055064A (en) * | 1996-08-08 | 1998-02-24 | Mitsubishi Chem Corp | Color resist composition and color filter |
-
2001
- 2001-03-15 JP JP2001073492A patent/JP2002278064A/en active Pending
-
2002
- 2002-03-14 KR KR1020020013734A patent/KR100839300B1/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03191352A (en) * | 1989-12-15 | 1991-08-21 | W R Grace & Co | Photosensitive resin composite |
JPH0527432A (en) * | 1991-07-08 | 1993-02-05 | Canon Inc | Photopolymerizable composition |
JPH1055064A (en) * | 1996-08-08 | 1998-02-24 | Mitsubishi Chem Corp | Color resist composition and color filter |
Also Published As
Publication number | Publication date |
---|---|
JP2002278064A (en) | 2002-09-27 |
KR20020073403A (en) | 2002-09-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5013003B2 (en) | Photosensitive resin composition | |
JP2004240241A (en) | Photosensitive resin composition, spacer for display panel and display panel | |
KR101084384B1 (en) | Radiation-sensitive resin composition, spacer and formation method thereof | |
WO2008060011A1 (en) | Photosensitive resin composition for forming column spacer of liquid crystal display, method for forming column spacer using the composition, column spacer formed by the method, and display device comprising the column spacer | |
KR20120069810A (en) | Photosensitive resin composition for spacer, spacer manufactured by the composition and display device including the spacer | |
KR101609234B1 (en) | Photosensitive resin comopsition, photocurable pattern formed from the same and image display comprising the pattern | |
KR20080112983A (en) | Side chain unsaturated polymer, radiation sensitive resin composition and spacer for liquid crystal display device | |
JP4706847B2 (en) | Radiation sensitive resin composition and spacer for liquid crystal display element | |
KR101169474B1 (en) | Radiation sensitive resin composition, spacer, and its forming method, and liquid crystal display device | |
JP4306060B2 (en) | Radiation-sensitive resin composition for spacer and spacer | |
KR20160111805A (en) | Photosensitive resin comopsition, photocurable pattern formed from the same and image display comprising the pattern | |
JP3981968B2 (en) | Radiation sensitive resin composition | |
JP2006023716A (en) | Photosensitive resin composition | |
JP4766235B2 (en) | Radiation sensitive resin composition and spacer for liquid crystal display element | |
KR100805598B1 (en) | Radiation-sensitive resin composition, spacer for display panel and display panel | |
KR101299380B1 (en) | Radiation Sensitive Resin Composition and Spacer for Liquid Crystal Display | |
JP2001261761A (en) | Radiation-sensitive resin composition and spacer for display panel | |
KR100856992B1 (en) | Radiation Sensitive Resin Composition for Forming Spacer, Spacer and Its Forming Method, and Liquid Crystal Display Device | |
KR100839300B1 (en) | Radiation-sensitive resin composition, spacer for display panel, and display panel | |
KR100874567B1 (en) | Display panel spacers, radiation sensitive resin compositions and liquid crystal display elements | |
JP4660990B2 (en) | Radiation-sensitive resin composition, projection material and spacer formed therefrom, and liquid crystal display device comprising the same | |
KR101314033B1 (en) | Photosensitive resin composition, method for forming spacer for display panel | |
JP6571315B2 (en) | Photosensitive resin composition for forming transparent pixels | |
JP2006257220A (en) | Copolymer, radiation-sensitive resin composition using the same, spacer for liquid crystal display element, and liquid crystal display element | |
US20180253004A1 (en) | Photosensitive resin composition and organic insulating film prepared therefrom |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20020314 |
|
PG1501 | Laying open of application | ||
A201 | Request for examination | ||
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20070117 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20020314 Comment text: Patent Application |
|
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20071213 Patent event code: PE09021S01D |
|
E701 | Decision to grant or registration of patent right | ||
PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20080526 |
|
GRNT | Written decision to grant | ||
PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20080611 Patent event code: PR07011E01D |
|
PR1002 | Payment of registration fee |
Payment date: 20080611 End annual number: 3 Start annual number: 1 |
|
PG1601 | Publication of registration | ||
PR1001 | Payment of annual fee |
Payment date: 20110527 Start annual number: 4 End annual number: 4 |
|
PR1001 | Payment of annual fee |
Payment date: 20120521 Start annual number: 5 End annual number: 5 |
|
FPAY | Annual fee payment |
Payment date: 20130524 Year of fee payment: 6 |
|
PR1001 | Payment of annual fee |
Payment date: 20130524 Start annual number: 6 End annual number: 6 |
|
FPAY | Annual fee payment |
Payment date: 20140530 Year of fee payment: 7 |
|
PR1001 | Payment of annual fee |
Payment date: 20140530 Start annual number: 7 End annual number: 7 |
|
FPAY | Annual fee payment |
Payment date: 20150515 Year of fee payment: 8 |
|
PR1001 | Payment of annual fee |
Payment date: 20150515 Start annual number: 8 End annual number: 8 |
|
FPAY | Annual fee payment |
Payment date: 20160517 Year of fee payment: 9 |
|
PR1001 | Payment of annual fee |
Payment date: 20160517 Start annual number: 9 End annual number: 9 |
|
FPAY | Annual fee payment |
Payment date: 20170522 Year of fee payment: 10 |
|
PR1001 | Payment of annual fee |
Payment date: 20170522 Start annual number: 10 End annual number: 10 |
|
FPAY | Annual fee payment |
Payment date: 20180530 Year of fee payment: 11 |
|
PR1001 | Payment of annual fee |
Payment date: 20180530 Start annual number: 11 End annual number: 11 |
|
FPAY | Annual fee payment |
Payment date: 20190530 Year of fee payment: 12 |
|
PR1001 | Payment of annual fee |
Payment date: 20190530 Start annual number: 12 End annual number: 12 |
|
PR1001 | Payment of annual fee |
Payment date: 20200603 Start annual number: 13 End annual number: 13 |
|
PR1001 | Payment of annual fee |
Payment date: 20210601 Start annual number: 14 End annual number: 14 |
|
PC1801 | Expiration of term |
Termination date: 20220914 Termination category: Expiration of duration |