KR100814506B1 - Substrate Turnover Device - Google Patents

Abstract

The present invention relates to a substrate turn-over device that rotates the substrate by 180 degrees in a horizontal direction while turning the substrate 180 degrees, and includes fixing means for fixing the substrates 30 and 70 and plates 20 and 60 on which the fixing means are installed. And the plates 20 and 60 via the rotation shafts 21a, 22a, 71a and 72a connected to the plates 20 and 60 and inclined at 45 degrees with respect to the X-direction axes of the substrates 30 and 70. It is a substrate turn-over apparatus characterized by including the plate actuator (23, 24, 73, 74) to rotate.

According to the present invention, it is possible to obtain the effect of turning the substrate 180 degrees while turning the substrate 90 degrees in the horizontal direction with only one turnover operation.

Board, Turnover, Cutting, Jig

Description

Substrate Turn Over Device {Apparatus for Turn Over of Substrate}

1 is a perspective view for explaining a conventional turn-over device.

2 is a cross-sectional view showing a cross-section A-A of FIG.

3 is a perspective view for explaining another conventional turn-over device.

4 is a cross-sectional view showing a section B-B of FIG.

5 is a configuration diagram for explaining a first embodiment of the present invention.

Figure 6 is a cross-sectional view for explaining the structure of the fixing jig in the present invention.

Figure 7 is a cross-sectional view for explaining the mounting state of the substrate mounted to the fixing jig in the present invention.

8 is a configuration diagram illustrating a state in which a substrate is turned over in the first embodiment of the present invention.

9 is a configuration diagram for explaining a second embodiment of the present invention.

10 is a plan view for explaining another embodiment of a fixing jig in a second embodiment of the present invention.

11 is a configuration diagram for explaining a state in which the substrate is turned over in the second embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

10: base 20: jig plate

30: substrate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate turnover apparatus, and more particularly, to a substrate turnover apparatus that rotates the substrate 90 degrees in the horizontal direction while inverting the substrate 180 degrees in one turnover operation.

In general, one of the representative flat panel displays (Liquid Crystal Display module) is a display using the electro-optic properties of the liquid crystal material injected into the LCD panel.

The LCD panel is largely composed of a TFT substrate, a color filter substrate attached to face the TFT substrate, and a liquid crystal injected between the TFT substrate and the color filter substrate.

The TFT substrate and the color filter substrate constituting the LCD panel are formed on, for example, two large glass mother substrates on which four LCD unit cells are simultaneously formed.

The glass mother substrate on which the TFT substrates are formed among the two glass mother substrates is formed such that a plurality of gate lines and data lines cross each other, and thin film transistor (TFT) elements are formed at each intersection point of the gate lines and data lines. In the cross region, pixel electrodes are turned on / off according to an electrical signal applied from a TFT element.

In addition, another glass mother substrate on which the color filter substrates are formed includes a black matrix for covering the gate line, the data line, and the thin film transistor elements, a color filter pattern formed at a position corresponding to the pixel electrode of the TFT substrate, and a common electrode which is an upper electrode. do.

When the TFT substrate and the color filter substrates are formed on the two glass mother substrates as described above, the glass mother substrate on which the TFT substrates are formed and the glass mother substrate on which the color filter substrates are formed are aligned and attached to each of the two glass mother substrates. By cutting the TFT substrates and the color filter substrates along the formed cutting schedule line, a plurality of LCD unit cells are obtained from two glass mother substrates.

As described above, there are two main methods for cutting a plurality of LCD unit cells from two glass parent substrates, one of which is a contact cutting method using a physical force, and the other is a laser cutting facility. It is a non-contact cutting method for generating and cutting a thermal stress on the glass mother substrate using.

The contact cutting method is a method of forming a scribe line (crack) using a diamond cutter along a cutting line formed on a glass wool substrate, and then cutting it by applying an impact (breaking step). It is a method of generating and cutting a crack in a glass parent substrate through a stress change implemented by irradiating a high-temperature laser beam along a cutting target line formed on a substrate and then spraying a cooling fluid.

For example, in order to cut out a plurality of LCD unit cells from two glass mother substrates using the contact cutting method, cracks are formed on the glass mother substrate on which the TFT substrates are formed, and then on another glass mother substrate on which the color filter substrates are formed. Cracks must be formed after the glass parent substrate is turned over to form a crack, and the apparatus required for such a process is a substrate turn-over device.

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By the way, in the case of the substrate turnover device using the vacuum suction plate, stains are generated on the surface of the substrate, which requires a cleaning process later, and the process of turning it 180 degrees (turnover process) and turning it 90 degrees is performed sequentially. It takes a lot of time. In addition, since the process is performed by the vacuum adsorption plate, there is a problem in that the volume of the equipment according to the vacuum adsorption plate equipment is increased, which requires a lot of installation space.

In addition, in the case of a substrate turnover device used for a non-contact cutting method using a laser, when a minute gap is generated due to a crack formed in the mother substrate, a vacuum leak occurs in the corresponding portion, so as to adsorb the mother substrate. The weakening of the substrate may cause a problem in that the substrate is partially separated.

On the other hand, to solve this problem, Patent Publication No. 10-2001-47615 published on June 15, 2001 discloses a laser cutting equipment and a cutting method using the same (hereinafter referred to as 'prior art 1') It is.

As shown in FIGS. 1 and 2, the laser cutting apparatus of the prior art 1 is a heating device (not shown) and a heated device (not shown) for oscillating a laser beam to heat cutting lines of two substrates 140 attached to each other. A laser cutter (not shown) including a cooling device (not shown) that cools a cutting target line and induces a crack in the cutting schedule line, and a substrate 140 installed at a lower portion of the laser cutter and undergoing a cutting process. It consists of a substrate turn-over device 100 for switching the.

Here, the substrate turn-over device 100 is installed at the lower portion of the heating device spaced apart from the heating device and a vacuum generating groove 111 is formed on the upper surface facing the heating device to the cutting process A work stage 110 for fixing the 140 to a vacuum pressure through the stage vacuum line 112, and a vacuum generating groove 131 for generating a vacuum by the vacuum line 132 on one surface facing the substrate 140. Are formed to fix the chuck 130 to prevent the cells cut from any one of the substrates 140 from being separated, and are installed on the fixing chuck 130 and installed on the fixing chuck 130. The turn-over chuck 120 to turn over the substrate to form a vacuum generating grooves 121 for generating a vacuum by the vacuum line 122 to adsorb the fixing chuck 130 on one side facing the) and, The vacuum line 112, 122, 132 It consists of a vacuum generating device (not shown) for generating a vacuum pressure in the vacuum generating groove (111, 121, 131) through.

However, since the substrate turn-over apparatus of the prior art 1 configured as described above basically fixes the substrates by using a vacuum, there is a problem that causes the apparatus to be enlarged according to the vacuum facility.

As another example, there is a laser cutting device (hereinafter referred to as 'prior art 2') disclosed in Korean Patent Publication No. 10-2000-65863 published on November 15, 2000.

3 and 4, the laser cutting apparatus of the related art 2 cools the heated glass mother substrate 270 and the heating apparatus 210 for oscillating a laser beam to heat the glass mother substrate 270. And a cooling device for inducing cracks along the cutting schedule line, a work stage 230 and a work in which the glass wool substrate 270 is placed at an upper surface of the heating device 210 at predetermined intervals. It is composed of a substrate turn-over device 240 for inverting the glass wool substrate 270 placed on the upper surface of the stage 230.

Here, a plurality of vacuum generating grooves 231 are formed on an upper surface of the work stage 230, and a vacuum line 232 for generating vacuum pressure in each of the vacuum generating grooves 231 is formed in the working stage 230. Are connected.
In addition, the substrate turn-over device 240 may include a turn-over jig 220 surrounding the glass mother substrate 270, a holder 241 holding both ends of the turn-over jig 220, and the holder 241. Is rotatably fixed at one end, a cylinder 243 for raising the turn over jig 220 from the work stage 230 to a predetermined height, and a motor for rotating the turn over jig 220 in a predetermined direction (not shown). Is made of.

In addition, the turn-over jig 220 has an accommodating space in which the glass mother substrate 270 is accommodated, and vacuum generating grooves 221 respectively connected to the vacuum line 222 are formed while forming the accommodating space. It consists of an upper jig 228 and a lower jig 229.

By the way, the turn-over jig of the prior art 2 is prepared for the failure of any one vacuum line by forming a plurality of vacuum lines in order to solve the problem of vacuum leak, but as in the prior art 1 is controlled by using a vacuum line Therefore, there is a problem that causes the device to be enlarged.

In addition, since the conventional techniques basically use vacuum pressure, the configuration of the device is complicated, and the operation reliability of the device is inferior due to the large number of control factors (vacuum pressure, whether each vacuum line is opened or closed, connection state of the vacuum line, etc.). There is a problem.

In addition, the substrate turnover apparatuses of the related art configured as described above have a problem in that the number of processes increases due to the inability to simultaneously perform the operation of inverting the substrate and the operation of turning the substrate 90 degrees in the horizontal direction.

An object of the present invention is to solve the problems of the prior art as described above, and to provide a substrate turn-over device to simplify the size and configuration of the equipment by fixing the substrate in a non-vacuum manner.

In addition, another object of the present invention is to provide a substrate turn-over apparatus that turns the substrate 180 degrees and rotates it 90 degrees in the horizontal direction with only one turn-over operation.

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In order to achieve the above object, the substrate turn-over apparatus of the present invention includes a fixing means for fixing a substrate, a plate on which the fixing means is installed, and an X-direction axis connected to the plate and passing through the center of the substrate. It characterized in that it comprises a plate actuator for rotating the plate via an inclined rotary shaft.

The fixing means may include a fixing jig for fixing the substrate and a fixing jig actuator for moving the fixing jig toward the substrate.

In addition, the fixing jig is disposed to face each other with the substrate therebetween, characterized in that connected to the fixing jig actuator via a feed shaft.

In addition, the fixing jig is disposed toward the opposite edges of the substrate, each fixing jig is characterized in that the L-shape in contact with the two sides in contact with each other at the edge of the substrate.

In addition, the fixing jig is disposed toward the opposite sides of the substrate, each fixing jig is characterized in that the contact with one side of the substrate.

In addition, the fixing jig is composed of a first piece that the upper surface of the substrate is in contact, and a second piece that is connected to the first piece and the lower surface of the substrate is in contact, between the first piece and the second piece It is another feature that the receiving portion is provided is inserted into the substrate.

In addition, the fixing jig is characterized in that the moving direction is the same as the inclined angle of the rotation axis of the plate actuator.

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(Example)

The substrate turn-over apparatus according to the present invention will be described in detail with reference to the accompanying drawings showing preferred embodiments of the present invention.

In the accompanying drawings, Figure 5 is a configuration diagram for explaining a first embodiment of the present invention, Figure 6 is a cross-sectional view for explaining the structure of the fixing jig in the present invention, Figure 7 is a substrate mounted to the fixing jig in the present invention 8 is a configuration diagram for explaining a state in which the substrate is turned over in the first embodiment of the present invention, Figure 9 is a configuration diagram for explaining a second embodiment of the present invention, FIG. 10 is a plan view for explaining another embodiment of the fixing jig in the second embodiment of the present invention, and FIG. 11 is a block diagram for explaining a state in which the substrate is turned over in the second embodiment of the present invention.

1. First embodiment (see Figs. 5 to 8)

5 to 8, the first embodiment of the present invention is provided with a base 10, a plate 20 rotatably installed on the base 10, and the plate 20. It consists of fixing means for fixing the board | substrate 30. In this embodiment, the fixing jig 25 and 26 and the fixing jig actuators 23 and 24 are demonstrated as an example.

Although the base 10 has been described using a square planar structure as an example, the base 10 may not be a planar structure if the plate 20 can be rotatably supported, for example, a win that can support the plate 20. It may be made of a descending post structure.

Fixing jigs 25 and 26 fixing the substrate 30 are installed in the plate 20 so as to be able to move forward and backward toward the substrate 30 and the plate actuator 21 fixed to one side of the base 10. , 22 are provided via rotating shafts 21a and 22a, respectively. Here, the rotating shafts 21a and 22a are installed to be inclined with respect to the X-direction axis (the arrow direction in FIG. 5) passing through the center of the substrate 30, and it is particularly important to be installed to be inclined at an angle of 45 degrees.

Therefore, since the plate 20 is rotatable 180 degrees about the rotation shafts 21a and 22a by the plate actuators 21 and 22, the plate 20 may be turned 180 degrees and rotated 90 degrees in the horizontal direction. Can be.

Since the jig plate actuators 21 and 22 should be capable of forward and reverse rotation of 180 degrees, it is preferable that the jig plate actuators 21 and 22 be implemented as a step motor capable of controlling the rotation. If the torque of the motor is weak, the speed reducer increases the torque by reducing the rotation speed. More preferably implemented with a step motor including a.

The fixing jigs 25 and 26 are mounted to the plate 20 so as to be moved forward and backward. To this end, feed shafts 23a and 24a are connected to both ends of the fixing jigs 25 and 26. Fixing jig actuators 23 and 24 are connected to 23a and 24a to rotate the feed shafts 23a and 24a to advance the fixed jig 25 and 26 fixed to the front end thereof.

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One end of the feed shaft (23a, 24a) is connected to the fixing jig (25, 26), respectively, it is preferably supported by a bearing (not shown) for more stable forward and backward.

The fixing jig 25, 26 may be formed in various forms because it can fix the substrate 30. In this embodiment, for example, the fixing jig 25 and 26 are disposed to face opposite edges of the substrate 30. The fixing jig is formed in an L shape to be in contact with two sides of the substrate 30 which are in contact with each other, and the cross-sectional structure thereof is shown in FIG. 6, where the first piece 25a is in contact with the upper surface of the substrate 30. ) And a second piece 25b connected to the first piece 25a to be in contact with the lower surface of the substrate 30, and as shown in FIG. 7, the first piece 25a and the first piece. A portion of the edge of the substrate 30 is received and fixed to the substrate accommodating portion 25c provided between the two pieces 25b.

In order to rotate the substrate 30 using the first embodiment of the present invention configured as described above, 'rotation' refers to an operation of turning the substrate 180 degrees and turning it 90 degrees in the horizontal direction. First, the fixing jig actuators 23 and 24 are rotated forward / reversely to move the fixing jig 25 and 26 mounted on the transfer shafts 23a and 24a toward the substrate 30. As shown in FIG. Secure (30).

Then, after the predetermined process (for example, a scribe line forming process) for the substrate 30, the plate 20 using the plate actuators 21 and 22 for the process processing on the opposite side Rotate 180 degrees.

When the plate 20 is rotated 180 degrees as described above, the substrate 30 is turned 90 degrees in the horizontal direction while being turned 180 degrees. That is, as shown in the substrate 30 of FIG. 5, the direction of the arrow ↓ is changed from top to bottom in the state in which the arrow (→) displayed from left to right is inverted as shown in the substrate 30 of FIG. 8. .

2. Second embodiment (see Figs. 9 to 11)

9 to 11, the fixing means for fixing the substrate 70, the plate 60 on which the fixing means is installed, and the substrate 70 are interposed therebetween. Plate actuators 71 and 72 connected to the plate 60 via rotational axes 71a and 72a disposed to be inclined with respect to the X-direction axis (the arrow direction in FIG. 9) passing through the center of the substrate 70; It consists of a post (not shown) and the base 50 which raise and lower the plate actuators 71 and 72.

In the second embodiment of the present invention, as shown in Fig. 9, the base 50 and the plate 60 are each formed in a square shape, and the plate actuators 71 and 72 are supported by posts (not shown). It is.

As the fixing means used in the second embodiment of the present invention, for example, the fixing jig 75, 76 and the feeding shafts 73a, 74a which are disposed to face each other toward the substrate 70 are interposed therebetween. Fixing jig actuators 73 and 74 for moving 76 may be used. The fixing jig 75 and 56 may have a cross-sectional structure the same as that of the fixing jig 25 and 26 of the first embodiment. It is made in a straight shape to fix one side of the substrate 70 and one end of the transfer shafts 73a and 74a is connected to the middle portion thereof.

Here, in order to more reliably fix the substrate 70 while the substrate 70 is being rotated, as shown in FIG. 10, as in the above-described first embodiment, two of the opposite edges of the substrate 70 are opposed to each other. It is preferable to form the L shape so as to contact the two sides.

In the second embodiment of the present invention made as described above by driving the fixing jig actuators (73, 74) to fix the substrate 70 by approaching the fixing jig (75, 76) toward the substrate 70, A predetermined process (eg, a scribe line forming process) is performed on the substrate 70, and the plate 60 is rotated 180 degrees using the plate actuators 71 and 72 to process the opposite surface. Rotate

When the plate 60 is rotated 180 degrees as described above, the substrate 70 is turned 90 degrees in the horizontal direction while being turned 180 degrees. That is, as shown in the substrate 70 of FIG. 9, the arrow? In the left-to-right direction is turned upside down in the substrate 70 of FIG. 11.
In the above embodiment, the fixing jig is used as the fixing means for fixing the substrate. However, the present invention is not limited thereto, and other fixing means equivalent to the fixing jig can be used as long as the fixing jig can be fixed. .

According to the substrate turn-over apparatus of the present invention made as described above, since the substrate is fixed by using a fixing jig rather than by vacuum fixing, no marks are left by the existing vacuum adsorption plate, and thus the cleaning process is not required. And the effect of simplifying the structure.

In addition, according to the substrate turn-over apparatus of the present invention, by turning the substrate 180 degrees and turning 90 degrees in the horizontal direction at the same time with only one turn-over operation, the tack time is reduced.

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Claims (10)

Fixing means for fixing the substrate (30, 70), Plates 20 and 60 on which the fixing means are installed; The plates 20 and 60 are connected to the plates 20 and 60 via the rotational shafts 21a, 22a, 71a and 72a which are inclined 45 degrees with respect to the X-direction axis passing through the centers of the substrates 30 and 70. Substrate turn over device comprising a plate actuator (23, 24, 73, 74) for rotating. The method of claim 1, The fixing means is a fixing jig (25, 26, 75, 76) for fixing the substrate (30, 70), and fixing to move the fixing jig (25, 26, 75, 76) toward the substrate (30, 70) Substrate turn over device comprising a jig actuator (23, 24, 73, 74). The method of claim 2, The fixing jig 25, 26, 75, and 76 are disposed to face each other with the substrates 30 and 70 interposed therebetween, and the fixing jig actuators 23 may be disposed through the feed shafts 23a, 24a, 73a, and 74a. 24, 73, 74) substrate turnover device characterized in that. The method of claim 3, The fixing jigs 25 and 26 are disposed toward opposite edges of the substrate 30, and each fixing jig 25 and 26 is in contact with two sides of each other at the edges of the substrate 30. A turn-over device for a substrate, characterized in that it has a ruler shape. The method of claim 3, wherein The fixing jigs 75 and 76 are disposed facing the sides of the substrate 70 facing each other, and each of the fixing jigs 75 and 76 contacts one side of the substrate 70. Over device. The method according to any one of claims 2 to 5, The fixing jigs 25, 26, 75, and 76 are connected to the first piece 25a and the first piece 25a to which the upper surfaces of the substrates 30 and 70 are in contact with each other. ) Is formed of a second piece 25b in contact with a bottom surface thereof, and a receiving portion 25c into which substrates 30 and 70 are inserted is provided between the first piece 25a and the second piece 25b. A substrate turnover device. The method of claim 4, wherein The direction in which the fixing jig (25, 26) moves is the same as the inclined angle of the rotation axis (21a, 22a) of the plate actuator (23, 24). delete delete delete

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