KR100746140B1 - 액정표시장치용 어레이기판과 그 제조방법 - Google Patents
액정표시장치용 어레이기판과 그 제조방법 Download PDFInfo
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- KR100746140B1 KR100746140B1 KR1020000083762A KR20000083762A KR100746140B1 KR 100746140 B1 KR100746140 B1 KR 100746140B1 KR 1020000083762 A KR1020000083762 A KR 1020000083762A KR 20000083762 A KR20000083762 A KR 20000083762A KR 100746140 B1 KR100746140 B1 KR 100746140B1
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- 239000000758 substrate Substances 0.000 title claims abstract description 56
- 239000004973 liquid crystal related substance Substances 0.000 title abstract description 25
- 238000004519 manufacturing process Methods 0.000 title abstract description 5
- 239000011159 matrix material Substances 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000010410 layer Substances 0.000 claims description 56
- 239000010408 film Substances 0.000 claims description 32
- 238000002161 passivation Methods 0.000 claims description 28
- 239000011347 resin Substances 0.000 claims description 21
- 229920005989 resin Polymers 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 17
- 239000011241 protective layer Substances 0.000 claims description 16
- 239000011810 insulating material Substances 0.000 claims description 15
- 239000004925 Acrylic resin Substances 0.000 claims description 7
- 229920000178 Acrylic resin Polymers 0.000 claims description 7
- 239000011651 chromium Substances 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 150000001925 cycloalkenes Chemical class 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims 1
- 238000004581 coalescence Methods 0.000 abstract description 2
- 230000002159 abnormal effect Effects 0.000 abstract 1
- 230000000903 blocking effect Effects 0.000 abstract 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 8
- 238000000151 deposition Methods 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (10)
- 기판과;상기 기판 상에 절연막을 개재하고, 수직으로 교차하여 화소 영역을 정의하는 게이트 배선 및 데이터 배선과;상기 게이트 배선과 연결되는 게이트 전극과, 상기 데이터 배선과 연결되는 소스 극 및 드레인 전극과, 액티브층으로 구성된 박막트랜지스터와;상기 박막트랜지스터와 데이터 배선을 덮으며, 상기 소스 및 드레인 전극과 데이터 배선의 일부를 노출하는 제 1 보호층과;상기 데이터 배선과 박막트랜지스터의 제 1 보호층 상부에 구성되고, 상기 노출된 소스 및 드레인 전극과 데이터 배선과 접촉하는 불투명 저저항 절연막인 블랙매트릭스와;상기 블랙매트릭스 상부에 형성되며, 상기 드레인 전극을 노출하는 드레인 콘택홀을 포함하는 제 2 보호층과;상기 제 2 보호층 상부에 형성되며, 상기 드레인 콘택홀을 통해 상기 드레인 전극과 접촉하는 화소전극을 포함하는 액정표시장치용 어레이 기판.
- 제 1 항에 있어서,상기 블랙매트릭스는 컬러수지와 블랙수지와 아크릴계 수지와 사이클로 올레핀계 수지로 구성된 불투명 저저항 절연물질그룹 중 선택된 하나인 액정표시장치용 어레이기판.
- 제 1 항에 있어서,상기 제 1 보호층과 제 2 보호층은 무기절연물질 또는 유기절연물질로 구성된 액정표시장치용 어레이기판.
- 삭제
- 기판을 준비하는 단계와;상기 기판 상에 절연막을 개재하고, 수직으로 교차하여 화소 영역을 정의하는 게이트 배선 및 데이터 배선을 형성하는 단계와;상기 게이트 배선과 연결되는 게이트 전극과, 상기 데이터 배선과 연결되는 소스 극 및 드레인 전극과, 액티브층으로 구성된 박막트랜지스터를 형성하는 단계와;상기 박막트랜지스터와 데이터 배선을 덮으며, 상기 소스 및 드레인 전극과 데이터 배선의 일부를 노출하는 제 1 보호층을 형성하는 단계와;상기 데이터 배선과 박막트랜지스터의 제 1 보호층 상부에 구성되고, 상기 노출된 소스 및 드레인 전극과 데이터 배선과 접촉하는 불투명 저저항 절연막인 블랙매트릭스를 형성하는 단계와;상기 블랙매트릭스 상부에, 상기 드레인 전극을 노출하는 드레인 콘택홀을 포함하는 제 2 보호층을 형성하는 단계와;상기 제 2 보호층 상부에, 상기 드레인 콘택홀을 통해 상기 드레인 전극과 접촉하는 화소전극을 형성하는 단계를 포함하는 액정표시장치용 어레이기판 제조방법.
- 제 5 항에 있어서,상기 게이트배선과 데이터배선은 알루미늄, 알루미늄 합금, 구리, 텅스텐, 몰리브덴, 크롬으로 구성된 도전성 금속그룹 중 선택된 최소한 하나로 형성한 액정표시장치용 어레이기판 제조방법.
- 제 6 항에 있어서,상기 블랙매트릭스는 컬러수지와 블랙수지와 아크릴계 수지와 사이클로 올레핀계 수지로 구성된 불투명 저저항 절연물질그룹 중 선택된 하나로 형성한 액정표시장치용 어레이기판 제조방법.
- 제 6 항에 있어서,상기 제 1 보호층과 제 2 보호층은 무기절연물질 또는 유기절연물질로 형성한 액정표시장치용 어레이기판 제조방법.
- 삭제
- 제 6 항에 있어서,상기화소전극은 인듐-틴-옥사이드(ITO)와 인듐-징크-옥사이드(IZO)로 구성된 투명 도전성금속 그룹 중 선택된 하나인 액정표시장치용 어레이기판 제조방법.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000083762A KR100746140B1 (ko) | 2000-12-28 | 2000-12-28 | 액정표시장치용 어레이기판과 그 제조방법 |
US10/015,894 US6570631B2 (en) | 2000-12-28 | 2001-12-17 | Black matrix in liquid crystal display and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000083762A KR100746140B1 (ko) | 2000-12-28 | 2000-12-28 | 액정표시장치용 어레이기판과 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20020054608A KR20020054608A (ko) | 2002-07-08 |
KR100746140B1 true KR100746140B1 (ko) | 2007-08-03 |
Family
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KR1020000083762A Expired - Fee Related KR100746140B1 (ko) | 2000-12-28 | 2000-12-28 | 액정표시장치용 어레이기판과 그 제조방법 |
Country Status (2)
Country | Link |
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US (1) | US6570631B2 (ko) |
KR (1) | KR100746140B1 (ko) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3705264B2 (ja) * | 2001-12-18 | 2005-10-12 | セイコーエプソン株式会社 | 表示装置及び電子機器 |
KR100491143B1 (ko) | 2001-12-26 | 2005-05-24 | 삼성에스디아이 주식회사 | 블랙매트릭스를 구비한 평판표시장치 및 그 제조방법 |
JP2003202593A (ja) * | 2002-01-04 | 2003-07-18 | Fujitsu Display Technologies Corp | 液晶表示装置用基板及びそれを備えた液晶表示装置及びその製造方法 |
TWI277788B (en) * | 2002-05-13 | 2007-04-01 | Au Optronics Corp | Active matrix substrate of liquid crystal display device and method fabricating the same |
TWI300508B (en) * | 2003-01-13 | 2008-09-01 | Toppoly Optoelectronics Corp | Liquid crystal display |
US7164456B2 (en) * | 2003-04-08 | 2007-01-16 | Lg.Philips Lcd Co., Ltd | Liquid crystal display device and method of fabricating the same wherein having particular reflective electrode |
KR101002332B1 (ko) * | 2003-12-30 | 2010-12-17 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
TWI322917B (en) * | 2004-03-02 | 2010-04-01 | Innolux Display Corp | Active matrix type liquid crystal display |
US20050253917A1 (en) * | 2004-05-13 | 2005-11-17 | Quanyuan Shang | Method for forming color filters in flat panel displays by inkjetting |
US20050255253A1 (en) * | 2004-05-13 | 2005-11-17 | White John M | Apparatus and methods for curing ink on a substrate using an electron beam |
US7612373B2 (en) * | 2004-06-30 | 2009-11-03 | Lg Display Co., Ltd. | Liquid crystal display device and method of manufacturing liquid crystal display device with color filter layer on thin film transistor |
TWI284246B (en) * | 2004-08-13 | 2007-07-21 | Au Optronics Corp | Pixel structure of a liquid crystal display and fabricating method thereof and liquid crystal display panel |
GB2418062A (en) * | 2004-09-03 | 2006-03-15 | Seiko Epson Corp | An organic Field-Effect Transistor with a charge transfer injection layer |
US20060159843A1 (en) * | 2005-01-18 | 2006-07-20 | Applied Materials, Inc. | Method of substrate treatment for manufacturing of color filters by inkjet printing systems |
JP4772395B2 (ja) * | 2005-06-24 | 2011-09-14 | 三菱電機株式会社 | 電気光学表示装置およびその製造方法 |
US20070015847A1 (en) * | 2005-07-15 | 2007-01-18 | Applied Materials, Inc. | Red printing ink for color filter applications |
US7544723B2 (en) * | 2005-07-15 | 2009-06-09 | Applied Materials, Inc. | Blue printing ink for color filter applications |
US7460267B2 (en) * | 2005-07-15 | 2008-12-02 | Applied Materials, Inc. | Green printing ink for color filter applications |
KR100855782B1 (ko) | 2007-01-29 | 2008-09-01 | 비오이 하이디스 테크놀로지 주식회사 | 에프에프에스 모드 액정표시장치 및 그 제조방법 |
JP6063766B2 (ja) * | 2013-02-20 | 2017-01-18 | 株式会社ジャパンディスプレイ | 半導体装置 |
CN103487982A (zh) * | 2013-08-19 | 2014-01-01 | 京东方科技集团股份有限公司 | 显示装置、阵列基板、像素结构及制作方法 |
KR102255379B1 (ko) * | 2014-08-12 | 2021-05-26 | 삼성디스플레이 주식회사 | 표시 장치 및 이를 제조하는 방법 |
TWI694289B (zh) * | 2019-02-20 | 2020-05-21 | 友達光電股份有限公司 | 顯示裝置 |
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US6211928B1 (en) * | 1996-03-26 | 2001-04-03 | Lg Electronics Inc. | Liquid crystal display and method for manufacturing the same |
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2000
- 2000-12-28 KR KR1020000083762A patent/KR100746140B1/ko not_active Expired - Fee Related
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2001
- 2001-12-17 US US10/015,894 patent/US6570631B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09113889A (ja) * | 1995-10-20 | 1997-05-02 | Kyocera Corp | 液晶表示装置 |
KR19980017194A (ko) * | 1996-08-30 | 1998-06-05 | 구자홍 | 액정표시장치의 기판의 제조방법 및 그 제조방법에 의하여 제조되는 기판의 구조 |
KR19980026562A (ko) * | 1996-10-10 | 1998-07-15 | 구자홍 | 액정표시장치 및 그 제조 방법 |
KR20000048021A (ko) * | 1998-12-10 | 2000-07-25 | 카네코 히사시 | 액정표시장치 및 그 제조방법 |
Also Published As
Publication number | Publication date |
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KR20020054608A (ko) | 2002-07-08 |
US6570631B2 (en) | 2003-05-27 |
US20020085140A1 (en) | 2002-07-04 |
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