KR100711426B1 - 인쇄회로기판 스루홀 도금용 산성 동전해 용액의 조성물 - Google Patents
인쇄회로기판 스루홀 도금용 산성 동전해 용액의 조성물 Download PDFInfo
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- KR100711426B1 KR100711426B1 KR1020050082026A KR20050082026A KR100711426B1 KR 100711426 B1 KR100711426 B1 KR 100711426B1 KR 1020050082026 A KR1020050082026 A KR 1020050082026A KR 20050082026 A KR20050082026 A KR 20050082026A KR 100711426 B1 KR100711426 B1 KR 100711426B1
- Authority
- KR
- South Korea
- Prior art keywords
- plating
- cysteine
- printed circuit
- acidic
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007747 plating Methods 0.000 title claims abstract description 49
- 239000000203 mixture Substances 0.000 title claims abstract description 20
- 239000002253 acid Substances 0.000 title claims abstract description 8
- -1 cysteine derivative sulfur compound Chemical class 0.000 claims abstract description 15
- 230000002378 acidificating effect Effects 0.000 claims abstract description 13
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 13
- PXQLVRUNWNTZOS-UHFFFAOYSA-N sulfanyl Chemical class [SH] PXQLVRUNWNTZOS-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000000969 carrier Substances 0.000 claims abstract description 4
- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 claims description 10
- 235000018417 cysteine Nutrition 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 7
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 claims description 6
- 150000001944 cysteine derivatives Chemical class 0.000 claims description 6
- 239000000080 wetting agent Substances 0.000 claims description 6
- 229920000371 poly(diallyldimethylammonium chloride) polymer Polymers 0.000 claims description 5
- 239000000460 chlorine Substances 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 150000001879 copper Chemical class 0.000 claims description 3
- DYUWTXWIYMHBQS-UHFFFAOYSA-N n-prop-2-enylprop-2-en-1-amine Chemical compound C=CCNCC=C DYUWTXWIYMHBQS-UHFFFAOYSA-N 0.000 claims description 3
- SMLNREUXXJESLR-BYPYZUCNSA-N (2r)-2-(ethylamino)-3-sulfanylpropanoic acid Chemical compound CCN[C@@H](CS)C(O)=O SMLNREUXXJESLR-BYPYZUCNSA-N 0.000 claims description 2
- AIFYCUKWFYJXJO-YFKPBYRVSA-N (2r)-2-(propan-2-ylamino)-3-sulfanylpropanoic acid Chemical compound CC(C)N[C@@H](CS)C(O)=O AIFYCUKWFYJXJO-YFKPBYRVSA-N 0.000 claims description 2
- GRSMEHYGTYJDFA-YFKPBYRVSA-N (2r)-2-(propylamino)-3-sulfanylpropanoic acid Chemical compound CCCN[C@@H](CS)C(O)=O GRSMEHYGTYJDFA-YFKPBYRVSA-N 0.000 claims description 2
- CSPHGSFZFWKVDL-UHFFFAOYSA-M (3-chloro-2-hydroxypropyl)-trimethylazanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC(O)CCl CSPHGSFZFWKVDL-UHFFFAOYSA-M 0.000 claims description 2
- NUPDFKWZQURWCC-UHFFFAOYSA-M benzyl-(2-hydroxyethyl)-dimethylazanium;chloride Chemical compound [Cl-].OCC[N+](C)(C)CC1=CC=CC=C1 NUPDFKWZQURWCC-UHFFFAOYSA-M 0.000 claims description 2
- WOWHHFRSBJGXCM-UHFFFAOYSA-M cetyltrimethylammonium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCC[N+](C)(C)C WOWHHFRSBJGXCM-UHFFFAOYSA-M 0.000 claims description 2
- 125000004210 cyclohexylmethyl group Chemical group [H]C([H])(*)C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C1([H])[H] 0.000 claims description 2
- RSPCKAHMRANGJZ-UHFFFAOYSA-N thiohydroxylamine Chemical compound SN RSPCKAHMRANGJZ-UHFFFAOYSA-N 0.000 claims description 2
- LMYRWZFENFIFIT-UHFFFAOYSA-N toluene-4-sulfonamide Chemical compound CC1=CC=C(S(N)(=O)=O)C=C1 LMYRWZFENFIFIT-UHFFFAOYSA-N 0.000 claims description 2
- AQZSPJRLCJSOED-UHFFFAOYSA-M trimethyl(octyl)azanium;chloride Chemical compound [Cl-].CCCCCCCC[N+](C)(C)C AQZSPJRLCJSOED-UHFFFAOYSA-M 0.000 claims description 2
- LIHWADGOPGDHHC-LURJTMIESA-N (2r)-2-(2-methylpropylamino)-3-sulfanylpropanoic acid Chemical compound CC(C)CN[C@@H](CS)C(O)=O LIHWADGOPGDHHC-LURJTMIESA-N 0.000 claims 1
- 239000000243 solution Substances 0.000 abstract description 16
- 238000004070 electrodeposition Methods 0.000 abstract description 14
- 239000008151 electrolyte solution Substances 0.000 abstract description 3
- 239000003381 stabilizer Substances 0.000 abstract description 2
- 230000001427 coherent effect Effects 0.000 abstract 1
- 239000003906 humectant Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- XUJNEKJLAYXESH-REOHCLBHSA-N L-Cysteine Chemical compound SC[C@H](N)C(O)=O XUJNEKJLAYXESH-REOHCLBHSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 5
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- WIYCQLLGDNXIBA-UHFFFAOYSA-L disodium;3-(3-sulfonatopropyldisulfanyl)propane-1-sulfonate Chemical compound [Na+].[Na+].[O-]S(=O)(=O)CCCSSCCCS([O-])(=O)=O WIYCQLLGDNXIBA-UHFFFAOYSA-L 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 2
- 150000003464 sulfur compounds Chemical class 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- RIRXDDRGHVUXNJ-UHFFFAOYSA-N [Cu].[P] Chemical compound [Cu].[P] RIRXDDRGHVUXNJ-UHFFFAOYSA-N 0.000 description 1
- 239000003146 anticoagulant agent Substances 0.000 description 1
- 229940127219 anticoagulant drug Drugs 0.000 description 1
- 229950011260 betanaphthol Drugs 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000002484 cyclic voltammetry Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
- H05K3/424—Plated through-holes or plated via connections characterised by electroplating method by direct electroplating
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
성 분 | 함 량 |
황산구리 5수화물 | 75 g/L |
황산 | 95 ㎖/L |
염소이온 | 40 ppm |
N-시클로헥실시스테인 | 0.01 g/L |
S-(터트-부틸티오)시스테인 | 0.001 g/L |
비스-(소듐 설포프로필)-디설파이드 | 0.01 g/L |
폴리(디알릴디메틸암모늄 클로라이드) | 0.1 g/L |
폴리비닐알코올 | 0.1 g/L |
성 분 | 함 량 |
황산구리 5수화물 | 75 g/L |
황산 | 95 ㎖/L |
염소이온 | 40 ppm |
N-시클로헥실시스테인 | 0.005 g/L |
N,N-디메틸-디티오카바밀 프로필 설포닉산 | 0.01 g/L |
폴리(디알릴디메틸암모늄 클로라이드) | 0.1 g/L |
아세트아미드 | 0.03 g/L |
성 분 | 함 량 |
황산구리 5수화물 | 85 g/L |
황산 | 100 ㎖/L |
염소이온 | 40 ppm |
N-이소프로필시스테인 | 0.005 g/L |
시스테인 N-카르보디티오산 | 0.01 g/L |
비스-(소듐 설포프로필)-디설파이드 | 0.01 g/L |
폴리(디알릴디메틸암모늄 클로라이드) | 0.2 g/L |
디알릴아민 | 0.02 g/L |
Claims (3)
- 산과 구리염 및 염소이온, 시스테인 유도체 황화합물 및 수용성 머캅토 유기 광택제, 캐리어 및 습윤제, 균염제 및 미세화제를 포함하는 동전해 도금액의 조성물로서, 시스테인 유도체 황화합물 및 수용성 머캅토 유기 광택제 화합물군에 해당되는 화합물의 동전해 도금액 1리터 기준으로 함량이 N-에틸시스테인 0.001g∼2.0g, N-프로필시스테인 0.001g∼2.0g, N-이소프로필시스테인 0.001g∼3.0g, N-이소부틸시스테인 0.001g∼3.0g, N-시클로헥실시스테인 0.002g∼2.0g, N-(시클로헥실메틸)시스테인 0.001g∼2.0g, S-(터트-부틸티오)시스테인 0.001g∼1.0g, 시스테인 N-카르보디티오산 0.001g∼1.0g 의 화합물군에서 적어도 한 가지 이상씩 조합되어 첨가되어지는 산성 동전해 도금 조성물.
- 제 1 항에 있어서, 시스테인 유도체 수용성 머캅토 유기 광택제는 N-알킬(C1∼C5), N-디알킬(C1∼C5), N-이소알킬(C1∼C5), N-시클로알킬(C3∼C8)로 구성되어지는 산성 동전해 도금 조성물.
- 제 1 항에 있어서, 균염제 및 미세화제 화합물군에 해당되는 화합물의 동전해 도금액 1리터 기준으로 함량이 아세트아미드 0.01g∼1.0g. 설파닐아미드 0.01g∼1.0g, 디알릴아민 0.01g∼1.0g, 4-톨루엔설폰아미드 0.001g∼0.01g, 세틸트리메틸암모늄 클로라이드 0.001g∼0.3g, (3-클로로-2-히드록시프로필)트리메틸암모늄 클로라이드 0.001g∼0.3g, 옥틸트리메틸암모늄 클로라이드 0.001g∼0.3g, 폴리(디알릴디메틸암모늄 클로라이드) 0.01g∼0.5g, 벤질디메틸(2-히드록시에틸)암모늄 클로라이드 0.001g∼0.3g 으로 구성되는 산성 동전해 도금 조성물.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050082026A KR100711426B1 (ko) | 2005-09-05 | 2005-09-05 | 인쇄회로기판 스루홀 도금용 산성 동전해 용액의 조성물 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050082026A KR100711426B1 (ko) | 2005-09-05 | 2005-09-05 | 인쇄회로기판 스루홀 도금용 산성 동전해 용액의 조성물 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070025643A KR20070025643A (ko) | 2007-03-08 |
KR100711426B1 true KR100711426B1 (ko) | 2007-08-13 |
Family
ID=38099883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050082026A Expired - Fee Related KR100711426B1 (ko) | 2005-09-05 | 2005-09-05 | 인쇄회로기판 스루홀 도금용 산성 동전해 용액의 조성물 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100711426B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115651642B (zh) * | 2022-09-07 | 2023-08-18 | 大连理工大学 | 圆二色信号增强手性光学活性纳米铜材料的制备和应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010074915A (ko) * | 1998-09-03 | 2001-08-09 | 마에다 시게루 | 기판의 도금방법 및 장치 |
KR20010111590A (ko) * | 1999-04-26 | 2001-12-19 | 샬크비즈크 피이터 코르넬리스; 페트귄터 | 머캅토-작용기 화합물을 포함하는 조성물 |
-
2005
- 2005-09-05 KR KR1020050082026A patent/KR100711426B1/ko not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010074915A (ko) * | 1998-09-03 | 2001-08-09 | 마에다 시게루 | 기판의 도금방법 및 장치 |
KR20010111590A (ko) * | 1999-04-26 | 2001-12-19 | 샬크비즈크 피이터 코르넬리스; 페트귄터 | 머캅토-작용기 화합물을 포함하는 조성물 |
Also Published As
Publication number | Publication date |
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KR20070025643A (ko) | 2007-03-08 |
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