KR100710822B1 - 이온빔 주입에 의한 기체 차단막이 형성된 고분자 필름 및그 제조방법 - Google Patents
이온빔 주입에 의한 기체 차단막이 형성된 고분자 필름 및그 제조방법 Download PDFInfo
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- KR100710822B1 KR100710822B1 KR1020060062035A KR20060062035A KR100710822B1 KR 100710822 B1 KR100710822 B1 KR 100710822B1 KR 1020060062035 A KR1020060062035 A KR 1020060062035A KR 20060062035 A KR20060062035 A KR 20060062035A KR 100710822 B1 KR100710822 B1 KR 100710822B1
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- film
- gas barrier
- polymer film
- ions
- polymer
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- 238000010884 ion-beam technique Methods 0.000 title description 22
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- 150000002500 ions Chemical class 0.000 claims abstract description 45
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000005022 packaging material Substances 0.000 claims abstract description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000002513 implantation Methods 0.000 claims abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 6
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 5
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- 229910052734 helium Inorganic materials 0.000 claims abstract description 4
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- 229910052786 argon Inorganic materials 0.000 claims abstract description 3
- 239000001307 helium Substances 0.000 claims abstract description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000001257 hydrogen Substances 0.000 claims abstract description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 3
- 229910052743 krypton Inorganic materials 0.000 claims abstract description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052724 xenon Inorganic materials 0.000 claims abstract description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims abstract description 3
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- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 2
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 claims description 2
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- 229910052715 tantalum Inorganic materials 0.000 claims description 2
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
- C08J7/123—Treatment by wave energy or particle radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D65/02—Wrappers or flexible covers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/28—Treatment by wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/048—Forming gas barrier coatings
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/06—Coating with compositions not containing macromolecular substances
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/48—Ion implantation
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- G—PHYSICS
- G02—OPTICS
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- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
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- H—ELECTRICITY
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- Polymers & Plastics (AREA)
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- Optics & Photonics (AREA)
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- Manufacturing & Machinery (AREA)
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Abstract
Description
이온주입에너지 | 이온조사량 (ions/cm2) | 이온종류 | ||
Ar | N | He | ||
50keV | 5 x 1015 | 2.24 | 3.71 | 7.17 |
1 x 1016 | 1.18 | 2.67 | 4.73 | |
5 x 1016 | 0.62 | 0.35 | 2.70 | |
1 x 1017 | 0.41 | 0.11 | 0.50 |
이온주입에너지 | 이온조사량 (ions/cm2) | 이온종류 | ||
H | N | Xe | ||
50keV | 5 x 1015 | 1.21 | 2.04 | 2.02 |
1 x 1016 | 0.59 | 0.84 | 1.14 | |
5 x 1016 | 0.42 | 0.62 | 0.73 |
Claims (11)
- 제논, 크립톤, 알곤, 질소, 헬륨 및 수소로부터 선택되는 기체 이온 또는 알루미늄, 티타늄 및 탄탈륨으로부터 선택되는 금속 이온에서 선택된 하나의 이온을 고분자 재료 표면에 주입 에너지를 달리하여 주입하거나, 이온의 종류를 달리하여 주입하여, 서로 다른 종류의 기체 차단막이 다층으로 형성된 것을 특징으로 하는 기체 차단막이 형성된 고분자 필름.
- 삭제
- 삭제
- 삭제
- 제 1항의 기체 차단막이 형성된 열팽창이 적은 고분자 필름으로 구성되는 포장재.
- 제 1항의 기체 차단막이 형성된 열팽창이 적은 고분자 필름으로 구성되는 디스플레이 및 전자소자용 차단막.
- 제 1항에 있어서, 상기 주입에너지는 이온 세기 또는 이온량에 따라 달라지는 것을 특징으로 하는 기체 차단막이 형성된 고분자 필름.
- 제7항에 있어서, 이온량은 1013~1020 ions/cm2 인 것을 특징으로 하는 기체 차단막이 형성된 고분자 필름.
- 제7항에 있어서, 이온 세기는 40~100 keV 인 것을 특징으로 하는 기체 차단막이 형성된 고분자 필름.
- 제1항에 있어서, 고분자 필름은 열가소성 및 열경화성 필름인 것을 특징으로 하는 기체 차단막이 형성된 고분자 필름.
- 제10항에 있어서, 고분자필름은 폴리카보네이트, 폴리에테르술폰,폴리이미드, 폴리아릴레이트, 폴리에틸렌나프탈레이트, 폴리에틸렌테레프탈레이트, 환상올레핀 공중합체의 군에서 선택된 어느 하나인 것을 특징으로 하는 기체 차단막이 형성된 고분자 필름.
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KR1020060062035A KR100710822B1 (ko) | 2006-07-03 | 2006-07-03 | 이온빔 주입에 의한 기체 차단막이 형성된 고분자 필름 및그 제조방법 |
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KR1020040031405A Division KR20050106236A (ko) | 2004-05-04 | 2004-05-04 | 이온빔 주입에 의한 기체 차단막이 형성된 고분자 필름 및그 제조방법 |
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Cited By (1)
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KR101220431B1 (ko) * | 2010-12-30 | 2013-01-10 | 한국원자력연구원 | 고분자 소재의 내광성 향상방법 |
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KR102571242B1 (ko) | 2016-07-11 | 2023-08-25 | 삼성디스플레이 주식회사 | 고경도 플라스틱 기판 및 이를 포함하는 표시장치 |
KR102077172B1 (ko) * | 2018-08-17 | 2020-02-13 | 단국대학교 산학협력단 | 질소 이온빔 조사에 의해 표면 경도가 향상된 하드코팅 필름 및 이의 제조방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09124807A (ja) * | 1995-10-30 | 1997-05-13 | Nissin Electric Co Ltd | 高ガスバリア性高分子物品及びその製造方法 |
KR19990065813A (ko) * | 1998-01-16 | 1999-08-05 | 김윤 | 이온빔에 의한 고분자 필름 표면의 금속 증착방법 |
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2006
- 2006-07-03 KR KR1020060062035A patent/KR100710822B1/ko not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09124807A (ja) * | 1995-10-30 | 1997-05-13 | Nissin Electric Co Ltd | 高ガスバリア性高分子物品及びその製造方法 |
KR19990065813A (ko) * | 1998-01-16 | 1999-08-05 | 김윤 | 이온빔에 의한 고분자 필름 표면의 금속 증착방법 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101220431B1 (ko) * | 2010-12-30 | 2013-01-10 | 한국원자력연구원 | 고분자 소재의 내광성 향상방법 |
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