KR100709527B1 - 실리카 함유 적층체, 및 다공성 실리카층 형성용 도포조성물 - Google Patents
실리카 함유 적층체, 및 다공성 실리카층 형성용 도포조성물 Download PDFInfo
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- KR100709527B1 KR100709527B1 KR1020057013389A KR20057013389A KR100709527B1 KR 100709527 B1 KR100709527 B1 KR 100709527B1 KR 1020057013389 A KR1020057013389 A KR 1020057013389A KR 20057013389 A KR20057013389 A KR 20057013389A KR 100709527 B1 KR100709527 B1 KR 100709527B1
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- silica
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- porous silica
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- hole opening
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- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
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- 150000003077 polyols Chemical class 0.000 description 1
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
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- 238000009751 slip forming Methods 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
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- 238000001179 sorption measurement Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- HXJUTPCZVOIRIF-UHFFFAOYSA-N sulfolane Chemical compound O=S1(=O)CCCC1 HXJUTPCZVOIRIF-UHFFFAOYSA-N 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- OQTSOKXAWXRIAC-UHFFFAOYSA-N tetrabutan-2-yl silicate Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)OC(C)CC OQTSOKXAWXRIAC-UHFFFAOYSA-N 0.000 description 1
- YTZVWGRNMGHDJE-UHFFFAOYSA-N tetralithium;silicate Chemical compound [Li+].[Li+].[Li+].[Li+].[O-][Si]([O-])([O-])[O-] YTZVWGRNMGHDJE-UHFFFAOYSA-N 0.000 description 1
- RLQWHDODQVOVKU-UHFFFAOYSA-N tetrapotassium;silicate Chemical compound [K+].[K+].[K+].[K+].[O-][Si]([O-])([O-])[O-] RLQWHDODQVOVKU-UHFFFAOYSA-N 0.000 description 1
- POWFTOSLLWLEBN-UHFFFAOYSA-N tetrasodium;silicate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-][Si]([O-])([O-])[O-] POWFTOSLLWLEBN-UHFFFAOYSA-N 0.000 description 1
- BCLLLHFGVQKVKL-UHFFFAOYSA-N tetratert-butyl silicate Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BCLLLHFGVQKVKL-UHFFFAOYSA-N 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
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- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 150000003606 tin compounds Chemical class 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- YZVRVDPMGYFCGL-UHFFFAOYSA-N triacetyloxysilyl acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)OC(C)=O YZVRVDPMGYFCGL-UHFFFAOYSA-N 0.000 description 1
- KBSUPJLTDMARAI-UHFFFAOYSA-N tribromo(methyl)silane Chemical compound C[Si](Br)(Br)Br KBSUPJLTDMARAI-UHFFFAOYSA-N 0.000 description 1
- IBOKZQNMFSHYNQ-UHFFFAOYSA-N tribromosilane Chemical compound Br[SiH](Br)Br IBOKZQNMFSHYNQ-UHFFFAOYSA-N 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- FOQJQXVUMYLJSU-UHFFFAOYSA-N triethoxy(1-triethoxysilylethyl)silane Chemical compound CCO[Si](OCC)(OCC)C(C)[Si](OCC)(OCC)OCC FOQJQXVUMYLJSU-UHFFFAOYSA-N 0.000 description 1
- ALVYUZIFSCKIFP-UHFFFAOYSA-N triethoxy(2-methylpropyl)silane Chemical compound CCO[Si](CC(C)C)(OCC)OCC ALVYUZIFSCKIFP-UHFFFAOYSA-N 0.000 description 1
- PYOKTQVLKOAHRM-UHFFFAOYSA-N triethoxy(3-triethoxysilylpropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC[Si](OCC)(OCC)OCC PYOKTQVLKOAHRM-UHFFFAOYSA-N 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- NIINUVYELHEORX-UHFFFAOYSA-N triethoxy(triethoxysilylmethyl)silane Chemical compound CCO[Si](OCC)(OCC)C[Si](OCC)(OCC)OCC NIINUVYELHEORX-UHFFFAOYSA-N 0.000 description 1
- YYJNCOSWWOMZHX-UHFFFAOYSA-N triethoxy-(4-triethoxysilylphenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=C([Si](OCC)(OCC)OCC)C=C1 YYJNCOSWWOMZHX-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- BHOCBLDBJFCBQS-UHFFFAOYSA-N trifluoro(methyl)silane Chemical compound C[Si](F)(F)F BHOCBLDBJFCBQS-UHFFFAOYSA-N 0.000 description 1
- WPPVEXTUHHUEIV-UHFFFAOYSA-N trifluorosilane Chemical compound F[SiH](F)F WPPVEXTUHHUEIV-UHFFFAOYSA-N 0.000 description 1
- JCGDCINCKDQXDX-UHFFFAOYSA-N trimethoxy(2-trimethoxysilylethyl)silane Chemical compound CO[Si](OC)(OC)CC[Si](OC)(OC)OC JCGDCINCKDQXDX-UHFFFAOYSA-N 0.000 description 1
- LQASLKRKZDJCBO-UHFFFAOYSA-N trimethoxy(3-trimethoxysilylpropyl)silane Chemical compound CO[Si](OC)(OC)CCC[Si](OC)(OC)OC LQASLKRKZDJCBO-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- DJYGUVIGOGFJOF-UHFFFAOYSA-N trimethoxy(trimethoxysilylmethyl)silane Chemical compound CO[Si](OC)(OC)C[Si](OC)(OC)OC DJYGUVIGOGFJOF-UHFFFAOYSA-N 0.000 description 1
- YIRZROVNUPFFNZ-UHFFFAOYSA-N trimethoxy-(4-trimethoxysilylphenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=C([Si](OC)(OC)OC)C=C1 YIRZROVNUPFFNZ-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- AAPLIUHOKVUFCC-UHFFFAOYSA-N trimethylsilanol Chemical compound C[Si](C)(C)O AAPLIUHOKVUFCC-UHFFFAOYSA-N 0.000 description 1
- QLERFSPANXQJMK-UHFFFAOYSA-N triphenoxy(1-triphenoxysilylethyl)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)C(C)[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 QLERFSPANXQJMK-UHFFFAOYSA-N 0.000 description 1
- OAKRVFBXZCHVCL-UHFFFAOYSA-N triphenoxy(3-triphenoxysilylpropyl)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)CCC[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 OAKRVFBXZCHVCL-UHFFFAOYSA-N 0.000 description 1
- AABYOUNGNSKTRH-UHFFFAOYSA-N triphenoxy(triphenoxysilylmethyl)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)C[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 AABYOUNGNSKTRH-UHFFFAOYSA-N 0.000 description 1
- NLSXASIDNWDYMI-UHFFFAOYSA-N triphenylsilanol Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(O)C1=CC=CC=C1 NLSXASIDNWDYMI-UHFFFAOYSA-N 0.000 description 1
- FEPLNUFFRSBNSK-UHFFFAOYSA-N tris[(2,2,2-trichloroacetyl)oxy]silyl 2,2,2-trichloroacetate Chemical compound ClC(Cl)(Cl)C(=O)O[Si](OC(=O)C(Cl)(Cl)Cl)(OC(=O)C(Cl)(Cl)Cl)OC(=O)C(Cl)(Cl)Cl FEPLNUFFRSBNSK-UHFFFAOYSA-N 0.000 description 1
- VMDWRHNNZFIVTK-UHFFFAOYSA-N tris[(2,2,2-trifluoroacetyl)oxy]silyl 2,2,2-trifluoroacetate Chemical compound FC(F)(F)C(=O)O[Si](OC(=O)C(F)(F)F)(OC(=O)C(F)(F)F)OC(=O)C(F)(F)F VMDWRHNNZFIVTK-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
Images
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- C08J7/04—Coating
- C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
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- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
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- C08K3/36—Silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
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- C23C18/1212—Zeolites, glasses
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
하드코트층 | 실리카 입자 | 최저 반사율 | 굴절률 | 연필경도 | 헤이즈 | |
실시예 1 | UVHC1101 | Snowtex OUP (염주형 실리카 스트링) | 0.1% | 1.27 | 2H | 0.8% |
실시예 2 | UVHC1101 | Snowtex PS-SO (염주형 실리카 스트링) | 0.1% | 1.27 | 2H | 0.9% |
실시예 3 | UVHC1101 | Snowtex OUP (염주형 실리카 스트링)+Snowtex OXS (구분된, 독립적 실리카 입자) (고형분의 중량비=7:3) | 0.2% | 1.28 | 2H | 0.8% |
실시예 4 | FOP-1100 | Snowtex OUP (염주형 실리카 스트링) | 0.1% | 1.26 | 2H | 0.5% |
비교예 1 | UVHC1101 | Snowtex O (구분된, 독립적 실리카 입자) | 0.8% | 1.35 | 2H | 0.8% |
하드코트층 | 실리카 입자 | 가수분해기 함유 실란 | 최저 반사율 | 굴절률 | 연필경도 | 헤이즈 | ||
가수분해반응 | ||||||||
실시예 5 | UVHC1101 | Snowtex OUP (염주형 실리카 스트링)4g | TEOS 0.2g | 실리카와 공존하 | 0.1% | 1.27 | 2H | 0.8% |
실시예 6 | UVHC1101 | Snowtex PS-SO (염주형 실리카 스트링)4g | TEOS 0.2g | 실리카와 공존하 | 0.1% | 1.27 | 2H | 0.9% |
실시예 7 | ACH01 | Snowtex OUP (염주형 실리카 스트링)4g | TEOS 0.2g | 실리카와 공존하 | 0.1% | 1.27 | 2H | 0.7% |
실시예 8 | UVHC1101 | Snowtex OUP (염주형 실리카 스트링)4g | TEOS 0.6g | 실리카와 공존하 | 0.45% | 1.29 | 2H | 0.8% |
실시예 9 | FOP-1100 | Snowtex OUP (염주형 실리카 스트링)4g | TEOS 0.6g | 실리카와 공존하 | 0.45% | 1.29 | 2H | 0.5% |
비교예 2 | UVHC1101 | Snowtex OUP (염주형 실리카 스트링)4g | TEOS 0.4g | 가수분해후에 실리카와 혼합 | 0.1% | 1.27 | H | 0.8% |
비교예 3 | UVHC1101 | Snowtex OUP (염주형 실리카 스트링)4g | TEOS 0.6g | 가수분해후에 실리카와 혼합 | 0.4% | 1.29 | H | 0.8% |
하드코트층 | 실리카 입자 | 도포후의 막의 외관 | 최저 반사율 | 굴절률 | 연필경도 | 헤이즈 | ||
수접촉각 | ||||||||
실시예 4 | FOP-1100 | 47° | Snowtex OUP (염주형 실리카 스트링) | 균일 | 0.1% | 1.26 | 2H | 0.5% |
실시예 10 | FOP-1100 | 47° | Snowtex PS-SO (염주형 실리카 스트링) | 균일 | 0.1% | 1.26 | 2H | 0.6% |
실시예 11 | UVHC1101 | 38° | Snowtex OUP (염주형 실리카 스트링) | 균일 | 0.1% | 1.27 | 2H | 0.8% |
실시예 12 | UVHC1101 | 73° | Snowtex OUP (염주형 실리카 스트링) | 균일 | 0.2% | 1.28 | 2H | 0.8% |
하드코트층 | 실리카입자 | 알칼리 토금속염 | 도포후의 막의 외관 | 최저반사율 | 연필경도 | 헤이즈 | |
실시예 13 | X-12-2400 | Snowtex OUP (염주형 실리카 스트)1g | 10% CaCl2·2H2O 0.092g | 균일 | 0.15% | 2H | 0.15% |
실시예 14 | X-12-2400 | Snowtex OUP (염주형 실리카 스트링)1g | 10% MgCl2·6H2O 0.127g | 균일 | 0.15% | 2H | 0.20% |
실시예 15 | X-12-2400 | Snowtex OUP (염주형 실리카 스트링)1g | 10% CaCl2·4H2O 0.2g | 균일 | 0.20% | H | 0.20% |
실시예 16 | X-12-2400 | Snowtex OUP (염주형 실리카 스트링)0.5g+Snowtex OXS (구형상)0.75g | 10% CaCl2·2H2O 0.092g | 균일 | 0.20% | 2H | 0.20% |
비교예 4 | X-12-2400 | Snowtex O (구분된, 독립적 실리카 입자)0.75g | 첨가하지 않음 | 뭉침 있음 | HB 미만 | ||
비교예 5 | X-12-2400 | Snowtex O (구분된, 독립적 실리카 입자)0.75g | 10% CaCl2·2H2O 0.092g | 균일 | 0.80% | 2H |
산농도 (㏖/ℓ) | 막외관 | |
실시예 17 | 0.0010 | 도1 |
실시예 18 | 0.0020 | 도2 |
실시예 19 | 0.0035 | 도3 |
실시예 20 | 0.0050 | 도4 |
Claims (15)
- 투명 열가소성 수지 기판, 및 그 위에 적층된 1 층 이상의 굴절률이 1.22 이상 1.30 미만의 다공성 실리카층으로 이루어지는 실리카 함유 적층체로서,상기 1 층 이상의 다공성 실리카층이, 복수의 실리카 1차 입자가 염주형으로 연결되어 이루어지는 복수의 염주형 실리카 스트링으로 이루어지고,상기 1 층 이상의 다공성 실리카층의 구멍이, 그 복수의 실리카 1차 입자의 각각의 최대 단면적 측정치의 평균치보다 큰 구멍 개구부 면적을 갖는 복수의 구멍 (P) 을 포함하고, 다만 그 복수의 구멍 (P) 의 구멍 개구부 면적은, 그 다공성 실리카층의 표면 또는 단면 중의 구멍 개구부에 관해서 측정하는 실리카 함유 적층체.
- 제 1 항에 있어서, 상기 염주형 실리카 스트링의, 동적 광산란법에 의해 측정한 평균치로서 표시되는, 평균 길이가 30∼200㎚ 인 실리카 함유 적층체.
- 제 1 항에 있어서, 상기 염주형 실리카 스트링 중에 존재하는 규소 원자수가, 상기 1 층 이상의 다공성 실리카층 중에 존재하는 전체 규소원자수에 대하여 15.0% 이상인 실리카 함유 적층체.
- 제 1 항에 있어서, 상기 구멍 (P) 의 일부 또는 전체 구멍 개구부 면적 (a1) 이, 상기 실리카 1차 입자의 각각의 최대 단면적 측정치의 평균치 (a2) 보다 3σ 이상 더 크고, 여기서 상기 구멍 개구부 면적 (a1) 은 상기 다공성 실리카층의 표면 또는 단면 중의 구멍 개구부에 관해서 측정되고, σ는 상기 복수의 실리카 1차 입자의 최대 단면적 측정치의 표준편차이고,상기 구멍 (P) 의 상기 구멍 개구부 면적 (a1) 의 총합 S(a2+3σ) 과 상기 다공성 실리카층의 표면 또는 단면 중의 전체 구멍 개구부에 관해서 측정한 구멍 개구부 면적의 총합 S 가, 하기 식 (1) 을 만족하는 실리카 함유 적층체:(S(a2+3σ))/(S)≥ 0.5 (1).
- 제 1 항에 있어서, 상기 투명 열가소성 수지 기판의 연필경도가 1H∼8H 인 실리카 함유 적층체.
- 제 1 항에 있어서, 상기 투명 열가소성 수지 기판과 상기 다공성 실리카층 사이에, 수접촉각이 85°이하인 하드 코트층을 추가로 함유하는 실리카 함유 적층체.
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- 투명 열가소성 수지 기판, 및 그 위에 적층된, 굴절률이 1.22 이상 1.30 미만의 1 층 이상의 다공성 실리카층을 포함하는 실리카 함유 적층체를 포함하는 반사방지막으로서,상기 1 층 이상의 다공성 실리카층이, 복수의 실리카 1차 입자가 염주형으로 연결되어 이루어지는 복수의 염주형 실리카 스트링으로 이루어지고,상기 1 층 이상의 다공성 실리카층의 구멍이, 그 복수의 실리카 1차 입자의 각각의 최대 단면적 측정치의 평균치보다 큰 구멍 개구부 면적을 갖는 복수의 구멍 (P) 을 포함하고, 다만 그 복수의 구멍 (P) 의 구멍 개구부 면적은, 그 다공성 실리카층의 표면 또는 단면 중의 구멍 개구부에 관해서 측정하며,상기 실리카 함유 적층체에 포함되는 상기 1 층 이상의 다공성 실리카층이, 복수의 실리카 1차 입자가 염주형으로 연결되어 이루어지는 염주형 실리카 스트링의 분산액을 가수분해기 함유 실란과 혼합하여 혼합물을 수득하고, 그 혼합물을 가수분해 및 탈수축합하는 것을 포함하는 방법으로 수득되는 산물을 함유하는 도포 조성물을 사용하여 형성되는 것을 특징으로 하는 반사방지막.
- 투명 열가소성 수지 기판, 및 그 위에 적층된, 굴절률이 1.22 이상 1.30 미만의 1 층 이상의 다공성 실리카층을 포함하는 실리카 함유 적층체를 포함하는 반사방지막으로서,상기 1 층 이상의 다공성 실리카층이, 복수의 실리카 1차 입자가 염주형으로 연결되어 이루어지는 복수의 염주형 실리카 스트링으로 이루어지고,상기 1 층 이상의 다공성 실리카층의 구멍이, 그 복수의 실리카 1차 입자의 각각의 최대 단면적 측정치의 평균치보다 큰 구멍 개구부 면적을 갖는 복수의 구멍 (P) 을 포함하고, 다만 그 복수의 구멍 (P) 의 구멍 개구부 면적은, 그 다공성 실리카층의 표면 또는 단면 중의 구멍 개구부에 관해서 측정하며,상기 구멍 (P) 의 일부 또는 전체 구멍 개구부 면적 (a1) 이, 상기 실리카 1차 입자의 각각의 최대 단면적 측정치의 평균치 (a2) 보다 3σ 이상 더 크고, 여기서 상기 구멍 개구부 면적 (a1) 은 상기 다공성 실리카층의 표면 또는 단면 중의 구멍 개구부에 관해서 측정되고, σ는 상기 복수의 실리카 1차 입자의 최대 단면적 측정치의 표준편차이고,상기 구멍 (P) 의 상기 구멍 개구부 면적 (a1) 의 총합 S(a2+3σ) 과 상기 다공성 실리카층의 표면 또는 단면 중의 전체 구멍 개구부에 관해서 측정한 구멍 개구부 면적의 총합 S 가, 하기 식 (1) 을 만족하며:(S(a2+3σ))/(S)≥ 0.5 (1)상기 실리카 함유 적층체에 포함되는 상기 1 층 이상의 다공성 실리카층이, 복수의 실리카 1차 입자가 염주형으로 연결되어 이루어지는 염주형 실리카 스트링의 분산액을 가수분해기 함유 실란과 혼합하여 혼합물을 수득하고, 그 혼합물을 가수분해 및 탈수축합하는 것을 포함하는 방법으로 수득되는 산물을 함유하는 도포 조성물을 사용하여 형성되는 것을 특징으로 하는 반사방지막.
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Families Citing this family (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003277605A1 (en) * | 2002-11-08 | 2004-06-07 | Mitsubishi Chemical Corporation | Radiation curing resin composition and cured product thereof |
JP4792732B2 (ja) * | 2004-11-18 | 2011-10-12 | 株式会社日立製作所 | 反射防止膜及び反射防止膜を用いた光学部品及び反射防止膜を用いた画像表示装置 |
US7758956B2 (en) | 2005-02-16 | 2010-07-20 | Fujifilm Corporation | Antireflection film and polarizing plate and image display device using same |
JP5082201B2 (ja) * | 2005-04-18 | 2012-11-28 | 日立化成工業株式会社 | 低屈折率薄膜及びその製造方法 |
JP2006301126A (ja) * | 2005-04-18 | 2006-11-02 | Hitachi Chem Co Ltd | 低屈折率膜 |
JP5011653B2 (ja) * | 2005-04-18 | 2012-08-29 | 日立化成工業株式会社 | 低屈折率薄膜及びその製造方法 |
JP4816223B2 (ja) * | 2005-04-26 | 2011-11-16 | 住友化学株式会社 | 反射防止積層体の製造方法 |
JP4565105B2 (ja) * | 2005-05-02 | 2010-10-20 | 独立行政法人 宇宙航空研究開発機構 | 太陽電池用の光学薄膜およびその製造方法 |
JP5286632B2 (ja) * | 2005-06-08 | 2013-09-11 | 日立化成株式会社 | 多孔質膜及びその製造方法 |
WO2006137365A1 (ja) * | 2005-06-24 | 2006-12-28 | Jsr Corporation | 硬化性樹脂組成物及び反射防止膜 |
JP2007327018A (ja) * | 2005-06-24 | 2007-12-20 | Jsr Corp | 硬化性樹脂組成物及び反射防止膜 |
US7427570B2 (en) | 2005-09-01 | 2008-09-23 | Micron Technology, Inc. | Porous organosilicate layers, and vapor deposition systems and methods for preparing same |
KR101312064B1 (ko) * | 2006-02-08 | 2013-09-25 | 동우 화인켐 주식회사 | 저반사 필름 및 그 제조방법 |
JP5421513B2 (ja) * | 2006-02-24 | 2014-02-19 | 出光興産株式会社 | 硬化膜、樹脂積層体及びコーティング組成物 |
KR100845403B1 (ko) * | 2007-04-16 | 2008-07-10 | 유창국 | 유/무기 하이브리드 코팅제 및 그 제조방법과 열경화방법 |
JP2008308762A (ja) * | 2007-05-17 | 2008-12-25 | Kimoto & Co Ltd | 無電解メッキ形成材料、および無電解メッキされた非導電性基材の製造方法 |
JP5437662B2 (ja) * | 2008-03-03 | 2014-03-12 | 学校法人慶應義塾 | 反射防止膜及びその形成方法 |
CN101579672A (zh) * | 2008-05-16 | 2009-11-18 | 3M创新有限公司 | 用于提高亲水性/透射率的二氧化硅涂层 |
US20100035039A1 (en) * | 2008-08-07 | 2010-02-11 | 3M Innovative Properties Company | Acicular silica coating for enhanced hydrophilicity/transmittivity |
JP5453777B2 (ja) * | 2008-10-23 | 2014-03-26 | 大日本印刷株式会社 | ハードコートフィルム |
US9284426B2 (en) * | 2008-10-23 | 2016-03-15 | Dai Nippon Printing Co., Ltd. | Hard coat film and curable resin composition for hard coat layer |
JP5262609B2 (ja) * | 2008-11-17 | 2013-08-14 | 大日本印刷株式会社 | 光学シートの製造方法 |
JP5262610B2 (ja) * | 2008-11-17 | 2013-08-14 | 大日本印刷株式会社 | 光学シートの製造方法 |
GB0904870D0 (en) * | 2009-03-20 | 2009-05-06 | Oxford Energy Technologies Ltd | Optical coating |
US10539722B2 (en) | 2009-04-15 | 2020-01-21 | 3M Innovative Properties Company | Optical film |
CN101941001B (zh) | 2009-07-03 | 2014-04-02 | 3M创新有限公司 | 亲水涂层、制品、涂料组合物和方法 |
JP5932652B2 (ja) * | 2009-10-24 | 2016-06-08 | スリーエム イノベイティブ プロパティズ カンパニー | 光学構造物 |
EP2540495A4 (en) * | 2010-02-26 | 2014-04-30 | Teijin Dupont Films Japan Ltd | HARD COATING AND METHOD FOR THE PRODUCTION THEREOF |
CN102241899B (zh) * | 2010-05-11 | 2014-05-14 | 3M创新有限公司 | 涂料组合物,改性基体表面的方法和制品 |
JP5683146B2 (ja) * | 2010-06-24 | 2015-03-11 | キヤノン株式会社 | 光学膜の製造方法および光学素子の製造方法 |
JP2012078466A (ja) * | 2010-09-30 | 2012-04-19 | Toppan Printing Co Ltd | 反射防止フィルム |
TWI534458B (zh) * | 2010-10-20 | 2016-05-21 | 3M新設資產公司 | 經保護之低折射率光學元件 |
JP6080349B2 (ja) * | 2010-11-26 | 2017-02-15 | キヤノン株式会社 | 光学部材および撮像装置 |
US8525191B2 (en) | 2011-04-01 | 2013-09-03 | Sabic Innovative Plastics Ip B.V. | Optoelectronic devices and coatings therefore |
US8350275B2 (en) * | 2011-04-01 | 2013-01-08 | Sabic Innovative Plastics Ip B.V. | Optoelectronic devices and coatings therefore |
JP5218868B2 (ja) * | 2011-04-13 | 2013-06-26 | 大日本印刷株式会社 | 撥水・撥油性及び耐擦傷性が向上した反射防止フィルムの製造方法 |
JP2014006496A (ja) * | 2012-05-30 | 2014-01-16 | Canon Inc | 光学部材、撮像装置及び光学部材の製造方法 |
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US20150314403A1 (en) * | 2014-05-01 | 2015-11-05 | Siemens Energy, Inc. | Arrangement for laser processing of turbine component |
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JPWO2021095647A1 (ko) * | 2019-11-15 | 2021-05-20 | ||
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001278637A (ja) * | 1999-12-13 | 2001-10-10 | Nippon Sheet Glass Co Ltd | 低反射ガラス物品 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1275208C (en) * | 1985-01-25 | 1990-10-16 | Roger W. Lange | Silica coating |
WO1999029635A1 (fr) * | 1997-12-09 | 1999-06-17 | Nippon Sheet Glass Co., Ltd. | Plaque de verre antireflet, son procede de production et composition de revetement antireflet |
JPH11292568A (ja) * | 1997-12-09 | 1999-10-26 | Nippon Sheet Glass Co Ltd | 反射防止ガラス板、その製造方法および反射防止膜用被覆組成物 |
CN1185164C (zh) * | 1998-09-10 | 2005-01-19 | 日产化学工业株式会社 | 念珠状硅溶胶、其制法及喷墨记录介质 |
AUPP699798A0 (en) * | 1998-11-06 | 1998-12-03 | Pacific Solar Pty Limited | Thin films with light trapping |
CN1235985C (zh) * | 1998-12-09 | 2006-01-11 | 日本化药株式会社 | 硬涂覆材料以及用该材料获得的膜 |
EP1167313B1 (en) * | 1999-12-13 | 2015-09-23 | Nippon Sheet Glass Co., Ltd. | Low-reflection glass article |
JP2002371148A (ja) * | 2001-06-14 | 2002-12-26 | Mitsubishi Rayon Co Ltd | 合成樹脂成形品、およびその製造方法、ならびにその合成樹脂成形品からなるディスプレイ前面板 |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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TWI238894B (en) | 2005-09-01 |
JP4437783B2 (ja) | 2010-03-24 |
CN1738711A (zh) | 2006-02-22 |
US20060093786A1 (en) | 2006-05-04 |
TW200424555A (en) | 2004-11-16 |
JPWO2004073972A1 (ja) | 2006-06-01 |
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